ATE162636T1 - Herstellungsmethode für scharfe faseroptische verzweigungen in integrierten optischen komponenten - Google Patents

Herstellungsmethode für scharfe faseroptische verzweigungen in integrierten optischen komponenten

Info

Publication number
ATE162636T1
ATE162636T1 AT93203208T AT93203208T ATE162636T1 AT E162636 T1 ATE162636 T1 AT E162636T1 AT 93203208 T AT93203208 T AT 93203208T AT 93203208 T AT93203208 T AT 93203208T AT E162636 T1 ATE162636 T1 AT E162636T1
Authority
AT
Austria
Prior art keywords
manufacturing
branches
optical components
sharp fiber
integrated optical
Prior art date
Application number
AT93203208T
Other languages
English (en)
Inventor
Der Tol Johannes Jacobus G Van
Eduard Gerard Metaal
Jorgen Werngreen Pedersen
Original Assignee
Nederland Ptt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL9301071A external-priority patent/NL9301071A/nl
Application filed by Nederland Ptt filed Critical Nederland Ptt
Application granted granted Critical
Publication of ATE162636T1 publication Critical patent/ATE162636T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
AT93203208T 1992-11-26 1993-11-16 Herstellungsmethode für scharfe faseroptische verzweigungen in integrierten optischen komponenten ATE162636T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9202059 1992-11-26
NL9301071A NL9301071A (nl) 1993-06-18 1993-06-18 Werkwijze voor het vervaardigen van scherpe golfgeleidervertakkingen in geintegreerde optische componenten.

Publications (1)

Publication Number Publication Date
ATE162636T1 true ATE162636T1 (de) 1998-02-15

Family

ID=26647034

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93203208T ATE162636T1 (de) 1992-11-26 1993-11-16 Herstellungsmethode für scharfe faseroptische verzweigungen in integrierten optischen komponenten

Country Status (6)

Country Link
US (1) US5364495A (de)
EP (1) EP0599394B1 (de)
JP (1) JPH06208031A (de)
AT (1) ATE162636T1 (de)
DE (1) DE69316552T2 (de)
ES (1) ES2111707T3 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9400266A (nl) * 1994-02-22 1995-10-02 Nederland Ptt Werkwijze en bijbehorend paar van maskerpatronen voor het onder toepassing van dubbele maskering vervaardigen van geintegreerde optische golfgeleiderstructuren.
NL1001777C2 (nl) 1995-11-29 1997-05-30 Nederland Ptt Werkwijze voor het vervaardigen van scherpe golfgeleider-vertakkingen in geïntegreerde optische circuits.
KR100223329B1 (ko) * 1995-12-29 1999-10-15 김영환 반도체 소자의 미세 패턴 제조방법
IT1285023B1 (it) * 1996-03-22 1998-06-03 Cselt Centro Studi Lab Telecom Procedimento per la realizzazione di laser con regione di guida rastremata.
FI104891B (fi) * 1996-10-08 2000-04-28 Fluilogic Systems Oy Menetelmä ja laitteisto neste-erien annostelemiseksi
KR19990035454A (ko) * 1997-10-31 1999-05-15 윤종용 단일 챔버내에서 평면 광 도파로를 제작하는 방법
KR20010096722A (ko) * 2000-04-14 2001-11-08 구자홍 분기형 광도파로의 제작방법
US6818559B2 (en) * 2001-03-21 2004-11-16 Intel Corporation Method of fabrication to sharpen corners of Y-branches in integrated optical components and other micro-devices
GB0119917D0 (en) * 2001-08-15 2001-10-10 Bookham Technology Plc Production of an integrated optical device
US7006719B2 (en) * 2002-03-08 2006-02-28 Infinera Corporation In-wafer testing of integrated optical components in photonic integrated circuits (PICs)
US6921490B1 (en) * 2002-09-06 2005-07-26 Kotura, Inc. Optical component having waveguides extending from a common region

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6259905A (ja) * 1985-09-10 1987-03-16 Sumitomo Electric Ind Ltd 光導波路の製造方法
DE68909779T2 (de) * 1989-06-16 1994-05-05 Ibm Methode zur Verbesserung der Ebenheit geätzter Spiegelfacetten.
US4938841A (en) * 1989-10-31 1990-07-03 Bell Communications Research, Inc. Two-level lithographic mask for producing tapered depth
JPH03291605A (ja) * 1990-04-10 1991-12-20 Furukawa Electric Co Ltd:The 光導波路の形成方法
US5271801A (en) * 1990-07-09 1993-12-21 Commissariat A L'energie Atomique Process of production of integrated optical components

Also Published As

Publication number Publication date
EP0599394B1 (de) 1998-01-21
EP0599394A1 (de) 1994-06-01
DE69316552D1 (de) 1998-02-26
JPH06208031A (ja) 1994-07-26
ES2111707T3 (es) 1998-03-16
US5364495A (en) 1994-11-15
DE69316552T2 (de) 1998-06-04

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee