ATE153128T1 - Verfahren und vorrichtung zur automatischen annäherung der spitze eines rastermikroskops - Google Patents
Verfahren und vorrichtung zur automatischen annäherung der spitze eines rastermikroskopsInfo
- Publication number
- ATE153128T1 ATE153128T1 AT93304455T AT93304455T ATE153128T1 AT E153128 T1 ATE153128 T1 AT E153128T1 AT 93304455 T AT93304455 T AT 93304455T AT 93304455 T AT93304455 T AT 93304455T AT E153128 T1 ATE153128 T1 AT E153128T1
- Authority
- AT
- Austria
- Prior art keywords
- tip
- target surface
- sensing probe
- scanning microscope
- automatically
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/02—Coarse scanning or positioning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/85—Scanning probe control process
- Y10S977/851—Particular movement or positioning of scanning tip
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/897,646 US5262643A (en) | 1992-06-12 | 1992-06-12 | Automatic tip approach method and apparatus for scanning probe microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE153128T1 true ATE153128T1 (de) | 1997-05-15 |
Family
ID=25408183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT93304455T ATE153128T1 (de) | 1992-06-12 | 1993-06-08 | Verfahren und vorrichtung zur automatischen annäherung der spitze eines rastermikroskops |
Country Status (6)
Country | Link |
---|---|
US (1) | US5262643A (de) |
EP (1) | EP0574234B1 (de) |
JP (1) | JP2534439B2 (de) |
AT (1) | ATE153128T1 (de) |
CA (1) | CA2098040C (de) |
DE (1) | DE69310612T2 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5155361A (en) * | 1991-07-26 | 1992-10-13 | The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University | Potentiostatic preparation of molecular adsorbates for scanning probe microscopy |
EP0596494B1 (de) * | 1992-11-06 | 1998-09-02 | Hitachi, Ltd. | Rasterabtastmikroskop und Verfahren zur Steuerfehlerkorrektur |
US5308974B1 (en) * | 1992-11-30 | 1998-01-06 | Digital Instr Inc | Scanning probe microscope using stored data for vertical probe positioning |
US5406832A (en) * | 1993-07-02 | 1995-04-18 | Topometrix Corporation | Synchronous sampling scanning force microscope |
US5440920A (en) * | 1994-02-03 | 1995-08-15 | Molecular Imaging Systems | Scanning force microscope with beam tracking lens |
US5646339A (en) * | 1994-02-14 | 1997-07-08 | International Business Machines Corporation | Force microscope and method for measuring atomic forces in multiple directions |
US5509300A (en) * | 1994-05-12 | 1996-04-23 | Arizona Board Of Regents Acting For Arizona State University | Non-contact force microscope having a coaxial cantilever-tip configuration |
US5753814A (en) * | 1994-05-19 | 1998-05-19 | Molecular Imaging Corporation | Magnetically-oscillated probe microscope for operation in liquids |
US5513518A (en) * | 1994-05-19 | 1996-05-07 | Molecular Imaging Corporation | Magnetic modulation of force sensor for AC detection in an atomic force microscope |
US5515719A (en) * | 1994-05-19 | 1996-05-14 | Molecular Imaging Corporation | Controlled force microscope for operation in liquids |
US5866805A (en) * | 1994-05-19 | 1999-02-02 | Molecular Imaging Corporation Arizona Board Of Regents | Cantilevers for a magnetically driven atomic force microscope |
JPH08220110A (ja) * | 1995-02-17 | 1996-08-30 | Agency Of Ind Science & Technol | 電気力プローブ顕微鏡走査方法 |
WO1996028837A1 (en) * | 1995-03-10 | 1996-09-19 | Molecular Imaging Corporation | Hybrid control system for scanning probe microscopes |
US5614712A (en) * | 1995-03-24 | 1997-03-25 | Quesant Instrument Corporation | Method of engaging the scanning probe of a scanning probe microscope with a sample surface |
JP2730673B2 (ja) * | 1995-12-06 | 1998-03-25 | 工業技術院長 | 超音波を導入するカンチレバーを用いた物性の計測方法および装置 |
US5773824A (en) * | 1997-04-23 | 1998-06-30 | International Business Machines Corporation | Method for improving measurement accuracy using active lateral scanning control of a probe |
US5918274A (en) | 1997-06-02 | 1999-06-29 | International Business Machines Corporation | Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope |
US6079254A (en) * | 1998-05-04 | 2000-06-27 | International Business Machines Corporation | Scanning force microscope with automatic surface engagement and improved amplitude demodulation |
RU2145055C1 (ru) | 1999-02-08 | 2000-01-27 | Ао "Автэкс" | Способ сбора и обработки информации о поверхности образца |
US6672144B2 (en) * | 1999-03-29 | 2004-01-06 | Veeco Instruments Inc. | Dynamic activation for an atomic force microscope and method of use thereof |
US6545492B1 (en) | 1999-09-20 | 2003-04-08 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US6583411B1 (en) * | 2000-09-13 | 2003-06-24 | Europaisches Laboratorium Für Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US6590208B2 (en) * | 2001-01-19 | 2003-07-08 | Veeco Instruments Inc. | Balanced momentum probe holder |
JP2003202284A (ja) | 2002-01-09 | 2003-07-18 | Hitachi Ltd | 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法 |
US6986280B2 (en) * | 2002-01-22 | 2006-01-17 | Fei Company | Integrated measuring instrument |
JP2003227788A (ja) * | 2002-02-05 | 2003-08-15 | Inst Of Physical & Chemical Res | 走査型プローブ顕微鏡及び試料の表面構造測定方法 |
JP2004264039A (ja) | 2003-01-30 | 2004-09-24 | Hitachi Ltd | 走査プローブ顕微鏡及びcd・断面プロファイル計測方法並びに半導体デバイス製造方法 |
US6845655B2 (en) * | 2003-03-17 | 2005-01-25 | Wisconsin Alumni Research Foundation | Heterodyne feedback system for scanning force microscopy and the like |
US20050092907A1 (en) * | 2003-11-04 | 2005-05-05 | West Paul E. | Oscillating scanning probe microscope |
JP4502122B2 (ja) * | 2004-11-26 | 2010-07-14 | セイコーインスツル株式会社 | 走査型プローブ顕微鏡及び走査方法 |
US20060213289A1 (en) * | 2005-03-24 | 2006-09-28 | Kjoller Kevin J | Probe for a scanning probe microscope and method of manufacture |
JP4571554B2 (ja) * | 2005-07-28 | 2010-10-27 | 日本電子株式会社 | 走査型プローブ顕微鏡の探針と試料表面との距離測定方法及び走査型プローブ顕微鏡 |
US7278300B2 (en) * | 2005-09-29 | 2007-10-09 | International Business Machines Corporation | Gas filled reactive atomic force microscope probe |
JP5189009B2 (ja) * | 2009-02-24 | 2013-04-24 | 日本電子株式会社 | Spmにおけるプローブアプローチ方法 |
US8335049B1 (en) | 2010-06-07 | 2012-12-18 | Western Digital Technologies, Inc. | Disk drive detecting crack in microactuator |
US8547657B1 (en) | 2010-06-10 | 2013-10-01 | Western Digital Technologies, Inc. | Disk drive detecting defective microactuator |
US8322235B1 (en) * | 2011-02-18 | 2012-12-04 | Western Digital Technologies, Inc. | Microactuator test assembly comprising a spreader pin for engaging a load beam of an actuator arm |
US8605383B1 (en) | 2012-05-21 | 2013-12-10 | Western Digital Technologies, Inc. | Methods, devices and systems for characterizing polarities of piezoelectric (PZT) elements of a two PZT element microactuator |
US9122625B1 (en) | 2012-12-18 | 2015-09-01 | Western Digital Technologies, Inc. | Error correcting code encoder supporting multiple code rates and throughput speeds for data storage systems |
US8797664B1 (en) | 2012-12-22 | 2014-08-05 | Western Digital Technologies, Inc. | Polarity detection of piezoelectric actuator in disk drive |
US9153283B1 (en) | 2014-09-30 | 2015-10-06 | Western Digital Technologies, Inc. | Data storage device compensating for hysteretic response of microactuator |
US10883934B2 (en) | 2016-05-23 | 2021-01-05 | International Business Machines Corporation | Optical sensor with luminescent quantum nanoprobes |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0290647B1 (de) * | 1987-05-12 | 1991-07-24 | International Business Machines Corporation | Atomares Kräftemikroskop mit oscillierendem Quarz |
DE3820518C1 (de) * | 1988-06-16 | 1990-01-11 | Wild Leitz Gmbh, 6330 Wetzlar, De | |
US5079958A (en) * | 1989-03-17 | 1992-01-14 | Olympus Optical Co., Ltd. | Sensor having a cantilever |
US4952857A (en) * | 1989-03-24 | 1990-08-28 | Quanscan, Inc. | Scanning micromechanical probe control system |
JP2909828B2 (ja) * | 1989-07-05 | 1999-06-23 | セイコーインスツルメンツ株式会社 | 複合走査型トンネル顕微鏡 |
US5059793A (en) * | 1989-10-04 | 1991-10-22 | Olympus Optical Co., Ltd. | Scanning tunneling microscope having proper servo control function |
US5025658A (en) * | 1989-11-28 | 1991-06-25 | Digital Instruments, Inc. | Compact atomic force microscope |
US5148026A (en) * | 1990-11-20 | 1992-09-15 | Kabushiki Kaisha Toshiba | Scanning probe microscopy |
-
1992
- 1992-06-12 US US07/897,646 patent/US5262643A/en not_active Expired - Lifetime
-
1993
- 1993-06-01 JP JP5130602A patent/JP2534439B2/ja not_active Expired - Fee Related
- 1993-06-08 EP EP93304455A patent/EP0574234B1/de not_active Expired - Lifetime
- 1993-06-08 AT AT93304455T patent/ATE153128T1/de not_active IP Right Cessation
- 1993-06-08 DE DE69310612T patent/DE69310612T2/de not_active Expired - Lifetime
- 1993-06-09 CA CA002098040A patent/CA2098040C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2534439B2 (ja) | 1996-09-18 |
JPH0674754A (ja) | 1994-03-18 |
CA2098040C (en) | 2000-02-15 |
EP0574234A1 (de) | 1993-12-15 |
US5262643A (en) | 1993-11-16 |
DE69310612T2 (de) | 1997-10-30 |
DE69310612D1 (de) | 1997-06-19 |
EP0574234B1 (de) | 1997-05-14 |
CA2098040A1 (en) | 1993-12-13 |
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Legal Events
Date | Code | Title | Description |
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |