ATE120858T1 - Selbsttragender dünnschichtsensor, verfahren zu seiner herstellung und anwendung in der gasdetektion und gaschromatographie. - Google Patents

Selbsttragender dünnschichtsensor, verfahren zu seiner herstellung und anwendung in der gasdetektion und gaschromatographie.

Info

Publication number
ATE120858T1
ATE120858T1 AT90912874T AT90912874T ATE120858T1 AT E120858 T1 ATE120858 T1 AT E120858T1 AT 90912874 T AT90912874 T AT 90912874T AT 90912874 T AT90912874 T AT 90912874T AT E120858 T1 ATE120858 T1 AT E120858T1
Authority
AT
Austria
Prior art keywords
self
production
film sensor
gas
medium
Prior art date
Application number
AT90912874T
Other languages
English (en)
Inventor
Antoinette Rue Saint-G Accorsi
Daniel Charlot
Original Assignee
Inst Nat Environnement Ind
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Nat Environnement Ind, Commissariat Energie Atomique filed Critical Inst Nat Environnement Ind
Application granted granted Critical
Publication of ATE120858T1 publication Critical patent/ATE120858T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/64—Electrical detectors
    • G01N30/66—Thermal conductivity detectors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03D—DEMODULATION OR TRANSFERENCE OF MODULATION FROM ONE CARRIER TO ANOTHER
    • H03D3/00—Demodulation of angle-, frequency- or phase- modulated oscillations
    • H03D3/001—Details of arrangements applicable to more than one type of frequency demodulator
    • H03D3/002—Modifications of demodulators to reduce interference by undesired signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
AT90912874T 1989-08-11 1990-08-10 Selbsttragender dünnschichtsensor, verfahren zu seiner herstellung und anwendung in der gasdetektion und gaschromatographie. ATE120858T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8910837A FR2650891B1 (fr) 1989-08-11 1989-08-11 Capteur a filament en couche mince autoporte, son procede de fabrication et ses applications dans la detection de gaz et en chromatographie gazeuse

Publications (1)

Publication Number Publication Date
ATE120858T1 true ATE120858T1 (de) 1995-04-15

Family

ID=9384674

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90912874T ATE120858T1 (de) 1989-08-11 1990-08-10 Selbsttragender dünnschichtsensor, verfahren zu seiner herstellung und anwendung in der gasdetektion und gaschromatographie.

Country Status (13)

Country Link
US (2) US5549870A (de)
EP (1) EP0486596B1 (de)
JP (1) JPH04507461A (de)
CN (1) CN1019331B (de)
AT (1) ATE120858T1 (de)
AU (1) AU647749B2 (de)
CA (1) CA2060183A1 (de)
CZ (1) CZ393190A3 (de)
DE (2) DE69018471T2 (de)
FR (1) FR2650891B1 (de)
PL (1) PL163992B1 (de)
WO (1) WO1991002242A1 (de)
ZA (1) ZA906062B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69418615T2 (de) * 1993-10-08 1999-09-16 Microchip (Proprietary) Ltd., Pretoria Katalytischer gassensor
WO1995011448A1 (en) * 1993-10-19 1995-04-27 Yuri Gennadevich Usanov Moisture gauge
DE19741697C2 (de) * 1996-12-06 2002-02-21 Roth Hansjoachim Chip zur Überwachung der Quecksilberkonzentration in der Luft
US5834627A (en) * 1996-12-17 1998-11-10 Sandia Corporation Calorimetric gas sensor
JP4801396B2 (ja) * 2005-09-01 2011-10-26 敏嗣 植田 ガスセンサ及びガスセンサの製造方法
JP5144090B2 (ja) * 2007-02-26 2013-02-13 シチズンホールディングス株式会社 接触燃焼式ガスセンサ及び接触燃焼式ガスセンサの製造方法
JP5136868B2 (ja) * 2010-08-18 2013-02-06 横河電機株式会社 熱伝導度検出器およびそれを用いたガスクロマトグラフ
CN103295777B (zh) * 2013-05-23 2015-12-02 东北大学 一种磁流体薄膜的制作方法
EP2863214B1 (de) 2013-10-15 2019-12-18 ams international AG Wärmeleitfähigkeitsdetektor mit einem mehrschichtigen Sensorelement, Gassensor, und Verfahren zur Gasmessung
KR102010448B1 (ko) * 2017-09-20 2019-08-13 (주)에스엔텍 가스 유량 센서 및 가스 유량 측정 장치
CN112284481B (zh) * 2020-10-29 2024-06-11 重庆运点点物流科技有限公司 用于船舶油舱的燃油量监测系统及方法
CN116678526A (zh) * 2023-05-09 2023-09-01 北京石墨烯技术研究院有限公司 垫片式传感器及其制备方法和应用
DE102023208844A1 (de) 2023-09-12 2025-03-13 Robert Bosch Gesellschaft mit beschränkter Haftung Sensorvorrichtung zur Bestimmung einer Wasserstoffkonzentration im Umfeld der Sensorvorrichtung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618750A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Gas detector
US4544441A (en) * 1980-09-04 1985-10-01 Battelle-Institut E.V. Method of making a bolometric radiation detector
JPS60243549A (ja) * 1984-05-05 1985-12-03 ゲゼルシヤフト、フユール、ゲレーテバウ、ミツト、ベシユレンクテル、ハフツング ガスの触媒燃焼用のセンサの製造方法
JPH01109250A (ja) * 1987-10-22 1989-04-26 Toshiba Corp ガスセンサ
ES2030693T3 (es) * 1986-10-28 1992-11-16 Figaro Engineering Inc. Sensor y procedimiento para su fabricacion.
DE3711511C1 (de) * 1987-04-04 1988-06-30 Hartmann & Braun Ag Verfahren zur Bestimmung der Gaskonzentrationen in einem Gasgemisch und Sensor zur Messung der Waermeleitfaehigkeit
DE3743398A1 (de) * 1987-12-21 1989-07-06 Siemens Ag Aufhaengung fuer eine sensoranordnung zum nachweis von gasen durch exotherme katalytische reaktionen
FI82774C (fi) * 1988-06-08 1991-04-10 Vaisala Oy Integrerad uppvaermbar sensor.
DE3844023A1 (de) * 1988-12-27 1990-06-28 Hartmann & Braun Ag Sensor zur bestimmung der gaskonzentration in einem gasgemisch durch messung der waermetoenung

Also Published As

Publication number Publication date
PL286431A1 (en) 1991-02-25
US5549870A (en) 1996-08-27
CZ393190A3 (en) 1994-11-16
AU6278690A (en) 1991-03-11
FR2650891A1 (fr) 1991-02-15
AU647749B2 (en) 1994-03-31
JPH04507461A (ja) 1992-12-24
US5753128A (en) 1998-05-19
ZA906062B (en) 1991-05-29
DE486596T1 (de) 1992-10-15
DE69018471T2 (de) 1995-10-05
WO1991002242A1 (fr) 1991-02-21
EP0486596A1 (de) 1992-05-27
CN1049910A (zh) 1991-03-13
PL163992B1 (pl) 1994-06-30
DE69018471D1 (de) 1995-05-11
EP0486596B1 (de) 1995-04-05
CA2060183A1 (en) 1991-02-12
FR2650891B1 (fr) 1993-11-19
CN1019331B (zh) 1992-12-02

Similar Documents

Publication Publication Date Title
ATE120858T1 (de) Selbsttragender dünnschichtsensor, verfahren zu seiner herstellung und anwendung in der gasdetektion und gaschromatographie.
CA2009260A1 (en) Method and apparatus for the measurement of the thermal conductivity of gases
CA2121832A1 (en) Multiple Gas Property Sensor
DE3678255D1 (de) Vorrichtung zur thermischen massenstrommessung von gasen und fluessigkeiten.
GB980169A (en) Improvements in and relating to gas detecting apparatus
GB1437075A (en) Gas detectors
SE7901124L (sv) Anordning for overvakning av korrosion
DE3775165D1 (de) Stromsensor und verfahren zum erfassen des stromflusses in auszuwertenden leitern.
SE9002446D0 (sv) Foerfarande och anordning foer floedeshastighetsmaetning
JPS5244688A (en) Method of automatically measuring density of oxygen
JPS5730937A (en) Humidity measuring method
SU1114878A1 (ru) Полупроводниковый тензорезистор
JPS57160054A (en) Flaw detector
SU1518761A1 (ru) Способ кондиционировани проволочных чувствительных элементов детектора теплопроводности
JPS51138486A (en) Temperature detecting circuit
俞焕祥 et al. Calculation and Measurement of Dynamic Expansion of Roving Flyer
SU665542A1 (ru) Ионизационный детектор дл газовой хроматографии
KR910008398A (ko) 유체물성의 온-라인 측정방법
JPS6447909A (en) Position detecting apparatus
JPS536575A (en) Testing method of electronic parts
KR910010184A (ko) 원적외선 발열체에 의한 건조특성의 측정장치
Viola et al. A recording mercury manometer
JPS56101564A (en) Noise measuring device of audio element
JPS5598337A (en) Detecting method for uneven portion in liquid
Nicholson An improved liquid nitrogen level sensor

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties