ATE101075T1 - Roboterhand zum transportieren von halbleiterplaettchen. - Google Patents

Roboterhand zum transportieren von halbleiterplaettchen.

Info

Publication number
ATE101075T1
ATE101075T1 AT88402053T AT88402053T ATE101075T1 AT E101075 T1 ATE101075 T1 AT E101075T1 AT 88402053 T AT88402053 T AT 88402053T AT 88402053 T AT88402053 T AT 88402053T AT E101075 T1 ATE101075 T1 AT E101075T1
Authority
AT
Austria
Prior art keywords
plates
plate
robot hand
semiconductor plates
transporting semiconductor
Prior art date
Application number
AT88402053T
Other languages
English (en)
Inventor
Charles Frederick Wilson
Original Assignee
Sgs Thomson Microelectronics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sgs Thomson Microelectronics filed Critical Sgs Thomson Microelectronics
Application granted granted Critical
Publication of ATE101075T1 publication Critical patent/ATE101075T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/06—Safety devices
    • B25J19/063—Safety devices working only upon contact with an outside object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
AT88402053T 1987-08-17 1988-08-05 Roboterhand zum transportieren von halbleiterplaettchen. ATE101075T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/086,278 US4816732A (en) 1987-08-17 1987-08-17 Robotic hand for transporting semiconductor wafer carriers
EP88402053A EP0304370B1 (de) 1987-08-17 1988-08-05 Roboterhand zum Transportieren von Halbleiterplättchen

Publications (1)

Publication Number Publication Date
ATE101075T1 true ATE101075T1 (de) 1994-02-15

Family

ID=22197492

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88402053T ATE101075T1 (de) 1987-08-17 1988-08-05 Roboterhand zum transportieren von halbleiterplaettchen.

Country Status (6)

Country Link
US (1) US4816732A (de)
EP (1) EP0304370B1 (de)
JP (1) JP2553472B2 (de)
KR (1) KR950005079B1 (de)
AT (1) ATE101075T1 (de)
DE (1) DE3887597T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3915039A1 (de) * 1989-05-08 1990-11-15 Balzers Hochvakuum Hubtisch
US5271686A (en) * 1992-01-27 1993-12-21 The Budd Company Robot hand for aligning and isolating a work tool
DE4210218A1 (de) * 1992-03-28 1993-09-30 Junghans Gmbh Geb Greifer für Handhabungseinrichtungen
EP0597052B1 (de) * 1992-06-03 1996-04-17 Esec Sa Transportroboter für eine bearbeitungs- bzw. behandlungslinie für systemträger
US5668452A (en) * 1996-05-09 1997-09-16 Vlsi Technology, Inc. Magnetic sensing robotics for automated semiconductor wafer processing systems
US5953804A (en) * 1998-07-10 1999-09-21 Systems Engineering Company Automated workpiece insertion method and apparatus
US6282459B1 (en) 1998-09-01 2001-08-28 International Business Machines Corporation Structure and method for detection of physical interference during transport of an article
US6246924B1 (en) * 1998-11-30 2001-06-12 Honda Of America Mfg., Inc. Apparatus and method for automatically realigning an end effector of an automated equipment to prevent a crash
DE60019713T2 (de) 1999-02-17 2006-06-22 Brooks Automation, Inc., Chelmsford Robotische greifvorrichtung zum greifen von werkstücken mit einem an der oberseite angeortneten handgriff
US6695120B1 (en) 2000-06-22 2004-02-24 Amkor Technology, Inc. Assembly for transporting material
US6889813B1 (en) 2000-06-22 2005-05-10 Amkor Technology, Inc. Material transport method
US6530735B1 (en) * 2000-06-22 2003-03-11 Amkor Technology, Inc. Gripper assembly
KR20040017614A (ko) * 2002-08-22 2004-02-27 동부전자 주식회사 웨이퍼 이송 방법
CN101987451B (zh) * 2009-08-03 2013-11-20 鸿富锦精密工业（深圳）有限公司 夹紧机构及使用该夹紧机构的机械手
US9709119B2 (en) * 2015-08-12 2017-07-18 Ati Industrial Automation, Inc. Compliance compensator
JP7180165B2 (ja) * 2018-07-23 2022-11-30 セイコーエプソン株式会社 ロボット、制御装置および制御方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3145333A (en) * 1962-10-29 1964-08-18 Pardini John Anthony Force limiting device for motor control
DE1554691A1 (de) * 1966-12-30 1970-01-15 Engelhardt Hans Vorrichtung zur Entnahme von Tuechern,Lappen od.dgl. aus einem Behaelter
US4179783A (en) * 1974-12-16 1979-12-25 Hitachi, Ltd. Holding apparatus with elastic mechanism
US4316329A (en) * 1979-09-19 1982-02-23 The Charles Stark Draper Laboratory Instrumented remote center compliance device
DE3004014A1 (de) * 1980-02-04 1981-08-06 Jungheinrich Unternehmensverwaltung Kg, 2000 Hamburg Ueberlastsicherungsvorrichtung fuer ein handhabungsgeraet
JPS59353B2 (ja) * 1980-07-24 1984-01-06 ファナック株式会社 把持装置
JPS5761487A (en) * 1980-09-30 1982-04-13 Fujitsu Fanuc Ltd Hand for industrial robot
GB2127775B (en) * 1982-09-27 1985-10-16 Gen Electric Co Plc Controlled machine limb incorporating a safety coupling
GB2152473B (en) * 1984-01-12 1987-01-21 British Nuclear Fuels Ltd Improvements in compliant devices
US4632623A (en) * 1984-10-15 1986-12-30 United Technologies Corporation Workpiece manipulator for a hot environment
DE3445849A1 (de) * 1984-12-15 1986-06-19 Dürr Automation + Fördertechnik GmbH, 7889 Grenzach-Wyhlen Industrie-roboter
US4645411A (en) * 1985-03-18 1987-02-24 Albert Madwed Gripper assembly
FR2581914A1 (fr) * 1985-05-14 1986-11-21 Renault Dispositif de prehension de pieces pour robot manipulateur
US4672741A (en) * 1985-06-27 1987-06-16 Westinghouse Electric Corp. End effector apparatus for positioning a steam generator heat exchanger tube plugging tool

Also Published As

Publication number Publication date
EP0304370A2 (de) 1989-02-22
KR890003497A (ko) 1989-04-15
EP0304370B1 (de) 1994-02-02
KR950005079B1 (ko) 1995-05-18
EP0304370A3 (de) 1991-11-27
JPS6471143A (en) 1989-03-16
DE3887597T2 (de) 1994-06-30
JP2553472B2 (ja) 1996-11-13
US4816732A (en) 1989-03-28
DE3887597D1 (de) 1994-03-17

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