ATA37397A - Verfahren zur herstellung einer strukturierten schicht - Google Patents

Verfahren zur herstellung einer strukturierten schicht

Info

Publication number
ATA37397A
ATA37397A AT0037397A AT37397A ATA37397A AT A37397 A ATA37397 A AT A37397A AT 0037397 A AT0037397 A AT 0037397A AT 37397 A AT37397 A AT 37397A AT A37397 A ATA37397 A AT A37397A
Authority
AT
Austria
Prior art keywords
producing
structured layer
structured
layer
Prior art date
Application number
AT0037397A
Other languages
English (en)
Other versions
AT405690B (de
Original Assignee
Sleytr Uwe B
Pum Dietmar Dipl Ing Dr
Fallmann Wolfgang
Stangl Guenther
Ims Ionen Mikrofab Syst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sleytr Uwe B, Pum Dietmar Dipl Ing Dr, Fallmann Wolfgang, Stangl Guenther, Ims Ionen Mikrofab Syst filed Critical Sleytr Uwe B
Priority to AT0037397A priority Critical patent/AT405690B/de
Priority to PCT/AT1998/000050 priority patent/WO1998039688A1/de
Priority to DE19880252T priority patent/DE19880252D2/de
Priority to JP53798998A priority patent/JP2001513909A/ja
Publication of ATA37397A publication Critical patent/ATA37397A/de
Priority to US09/388,289 priority patent/US6296700B1/en
Application granted granted Critical
Publication of AT405690B publication Critical patent/AT405690B/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
  • Chemically Coating (AREA)
AT0037397A 1997-03-04 1997-03-04 Verfahren zur herstellung einer strukturierten schicht AT405690B (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT0037397A AT405690B (de) 1997-03-04 1997-03-04 Verfahren zur herstellung einer strukturierten schicht
PCT/AT1998/000050 WO1998039688A1 (de) 1997-03-04 1998-03-04 Verfahren zur herstellung einer strukturierten schicht
DE19880252T DE19880252D2 (de) 1997-03-04 1998-03-04 Verfahren zur Herstellung einer strukturierten Schicht
JP53798998A JP2001513909A (ja) 1997-03-04 1998-03-04 構造化された層の製造方法
US09/388,289 US6296700B1 (en) 1997-03-04 1999-09-01 Method of producing a structured layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0037397A AT405690B (de) 1997-03-04 1997-03-04 Verfahren zur herstellung einer strukturierten schicht

Publications (2)

Publication Number Publication Date
ATA37397A true ATA37397A (de) 1999-02-15
AT405690B AT405690B (de) 1999-10-25

Family

ID=3488876

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0037397A AT405690B (de) 1997-03-04 1997-03-04 Verfahren zur herstellung einer strukturierten schicht

Country Status (5)

Country Link
US (1) US6296700B1 (de)
JP (1) JP2001513909A (de)
AT (1) AT405690B (de)
DE (1) DE19880252D2 (de)
WO (1) WO1998039688A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4102317A (en) * 1977-02-16 1978-07-25 Shonnard John R Apparatus for igniting charcoal briquettes

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19941448A1 (de) * 1999-08-31 2001-03-01 Stefan Bossmann Verfahren zur Herstellung von regelmäßigen Nanostrukturen
AT410805B (de) * 2001-05-29 2003-08-25 Sleytr Uwe B Verfahren zum erzeugen einer schicht funktioneller moleküle
NL1020090C2 (nl) * 2002-02-28 2003-08-29 Tno Nieuwe coating voor biosensoren.
EP1598858B1 (de) * 2003-02-28 2014-04-09 Fujitsu Limited Herstellungsverfahren zum ätzfesten film, herstellungsverfahren zur oberflächengehärteten resiststruktur, und herstellungsverfahren zum halbleiterbauelement
WO2006025391A1 (ja) * 2004-08-31 2006-03-09 Kyoto University 分子デバイス及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728591A (en) * 1986-03-07 1988-03-01 Trustees Of Boston University Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4102317A (en) * 1977-02-16 1978-07-25 Shonnard John R Apparatus for igniting charcoal briquettes

Also Published As

Publication number Publication date
JP2001513909A (ja) 2001-09-04
US6296700B1 (en) 2001-10-02
AT405690B (de) 1999-10-25
WO1998039688A1 (de) 1998-09-11
DE19880252D2 (de) 2000-01-27

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Legal Events

Date Code Title Description
EIH Change in the person of patent owner
ELJ Ceased due to non-payment of the annual fee