AT316894B - Halbleitervorrichtung und Verfahren zur Herstellung derselben - Google Patents

Halbleitervorrichtung und Verfahren zur Herstellung derselben

Info

Publication number
AT316894B
AT316894B AT1103969A AT1103969A AT316894B AT 316894 B AT316894 B AT 316894B AT 1103969 A AT1103969 A AT 1103969A AT 1103969 A AT1103969 A AT 1103969A AT 316894 B AT316894 B AT 316894B
Authority
AT
Austria
Prior art keywords
manufacturing
same
semiconductor device
semiconductor
Prior art date
Application number
AT1103969A
Other languages
German (de)
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of AT316894B publication Critical patent/AT316894B/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/148Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061Electrical connection means
    • G01L19/0084Electrical connection means to the outside of the housing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/147Details about the mounting of the sensor to support or covering means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R21/00Variable-resistance transducers
    • H04R21/02Microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00Diaphragms for electromechanical transducers; Cones
    • H04R7/02Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04Plane diaphragms
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00Diaphragms for electromechanical transducers; Cones
    • H04R7/16Mounting or tensioning of diaphragms or cones
    • H04R7/18Mounting or tensioning of diaphragms or cones at the periphery
    • H04R7/22Clamping rim of diaphragm or cone against seating

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Recrystallisation Techniques (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
AT1103969A 1968-11-29 1969-11-26 Halbleitervorrichtung und Verfahren zur Herstellung derselben AT316894B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6817089A NL162254B (nl) 1968-11-29 1968-11-29 Halfgeleiderinrichting voor het omzetten van mechanische spanningen in elektrische signalen en werkwijze voor het vervaardigen daarvan.

Publications (1)

Publication Number Publication Date
AT316894B true AT316894B (de) 1974-07-25

Family

ID=19805282

Family Applications (1)

Application Number Title Priority Date Filing Date
AT1103969A AT316894B (de) 1968-11-29 1969-11-26 Halbleitervorrichtung und Verfahren zur Herstellung derselben

Country Status (10)

Country Link
AT (1) AT316894B (pt)
BE (1) BE742331A (pt)
BR (1) BR6914557D0 (pt)
CH (1) CH518006A (pt)
DE (1) DE1959527C3 (pt)
ES (2) ES373779A1 (pt)
FR (1) FR2024961A1 (pt)
GB (1) GB1295650A (pt)
NL (1) NL162254B (pt)
SE (2) SE384437B (pt)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0006740A1 (en) * 1978-06-28 1980-01-09 Gould Inc. Improvements in strain gauges
EP0338180A1 (en) * 1988-04-21 1989-10-25 MAGNETI MARELLI S.p.A. An electrical force and/or deformation sensor, particularly for use as a pressure sensor
EP0340022A1 (en) * 1988-04-29 1989-11-02 Schlumberger Industries, Inc. Mechanical sensor for high temperature environments

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4071838A (en) 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
DE2841312C2 (de) * 1978-09-22 1985-06-05 Robert Bosch Gmbh, 7000 Stuttgart Monolithischer Halbleiter-Drucksensor und Verfahren zu dessen Herstellung
JPS5550668A (en) * 1978-10-06 1980-04-12 Hitachi Ltd Semiconductor pressure converter
IT1212404B (it) * 1979-02-22 1989-11-22 Rca Corp Metodo comportante un singolo attacco per la formazione di un mesa presentante una parete a piu'gradini.
JP2719448B2 (ja) * 1991-01-24 1998-02-25 三菱電機株式会社 半導体圧力検出装置
WO2006023753A2 (en) * 2004-08-20 2006-03-02 Semitool, Inc. System for thinning a semiconductor workpiece
CN113555346B (zh) * 2020-08-21 2023-05-23 友达光电股份有限公司 电路基板以及电路基板的应变量的测量方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3270554A (en) * 1961-01-04 1966-09-06 Bell Telephone Labor Inc Diffused layer transducers
US3277698A (en) * 1963-11-15 1966-10-11 Bell Telephone Labor Inc Stress sensing semiconductive devices
NL153947B (nl) * 1967-02-25 1977-07-15 Philips Nv Werkwijze voor het vervaardigen van halfgeleiderinrichtingen, waarbij een selectief elektrolytisch etsproces wordt toegepast en halfgeleiderinrichting verkregen met toepassing van de werkwijze.
BE711537A (pt) * 1968-03-01 1968-09-02

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0006740A1 (en) * 1978-06-28 1980-01-09 Gould Inc. Improvements in strain gauges
EP0338180A1 (en) * 1988-04-21 1989-10-25 MAGNETI MARELLI S.p.A. An electrical force and/or deformation sensor, particularly for use as a pressure sensor
EP0340022A1 (en) * 1988-04-29 1989-11-02 Schlumberger Industries, Inc. Mechanical sensor for high temperature environments

Also Published As

Publication number Publication date
GB1295650A (pt) 1972-11-08
ES400839A1 (es) 1975-02-01
NL6817089A (pt) 1970-06-02
SE384437B (sv) 1976-05-03
BE742331A (pt) 1970-05-27
CH518006A (de) 1972-01-15
DE1959527B2 (de) 1981-03-19
DE1959527A1 (de) 1970-06-11
NL162254B (nl) 1979-11-15
BR6914557D0 (pt) 1973-01-02
FR2024961A1 (pt) 1970-09-04
DE1959527C3 (de) 1981-12-10
SE363700B (pt) 1974-01-28
ES373779A1 (es) 1972-05-16

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee