KR20010108788A - Automatic adjusting system for loss of lot data in manufacturing semiconductor and method using the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for automatically calibrating lot data loss in a semiconductor manufacturing process and a computer readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

The present invention, using the integrated automation system for semiconductor line management distributed to a plurality of servers, without the operator's intervention by sending and receiving messages, data confirmation and update between each server of the lot data lost during the process To provide a system and method for automatically calibrating lot data loss in a semiconductor manufacturing process that can be automatically calibrated, and a computer readable recording medium recording a program for realizing the same.

3. Summary of Solution to Invention

The present invention includes a first step in which a worker inputs a lot data loss correction request using an operator interface process; A second step of receiving, by the worker interface server, a lot data loss calibration request from the worker interface process when the worker interface process sends a lot data loss calibration request to the worker interface server; A third step of the operator interface server confirming the obtained lot data loss correction request in the master database and updating the lot, cassette, and process information; A fourth step of the worker interface server transmitting the lost data of the lot identified in the third step to a cell management server; A fifth step in which the cell management server receives the lost data of the lot from the operator interface server and records the lost data in the lot information in the history information server queue file, and then transmits a message indicating that the lost data of the lot is stored in the history information server queue file to the history information server. ; And a sixth step of the history information server receiving the message from the cell management server, acquiring the lost data of the lot from the history information server queue file and updating the history database.

4. Important uses of the invention

The present invention is used in the method of correcting lost data of a lot in a semiconductor manufacturing process.

Description

AUTOMATIC ADJUSTING SYSTEM FOR LOSS OF LOT DATA IN MANUFACTURING SEMICONDUCTOR AND METHOD USING THE SAME

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for automatically calibrating lot data loss in a semiconductor manufacturing process and a computer readable recording medium recording a program for realizing the same. Lot data loss automatic calibration system and method for automatically calibrating lost data of a lot in process by exchanging messages between servers and updating lot loss data of the corresponding lot, and a program for realizing the same The present invention relates to a computer-readable recording medium.

In general, the semiconductor manufacturing process loses data on the lot in progress due to complex problems such as communication failure between equipment and host, host instability, missing operator data input, and host transmission of bad data due to equipment instability. This can happen.

Conventional lot data loss calibration method first deletes the history of the lot and equipment history that the operator was in the process directly, recovers the lot from the equipment, and then corrects the loss of the lot data, then proceeds to the next step. Proceed.

However, in the conventional lot data loss correction method of performing a series of processes as described above, since the process of manually deleting the history of the lot is in progress, the work efficiency is lowered, and the processing time of the standby lot is increased. In addition, since all the servers repeatedly perform the same tasks for the lot data loss correction, there is a problem that the operating efficiency of the system is lowered.

In order to solve the above problems, the present invention uses the integrated automation system for semiconductor line management distributed and operated by a plurality of servers, message transmission and reception between each server, and data of the lot lost during the process. The purpose of the present invention is to provide an automatic calibration system for lot data loss in a semiconductor manufacturing process that can be automatically calibrated without operator intervention by checking and updating, and a method thereof, and a computer-readable recording medium recording a program for realizing the same. There is this.

1 is a block diagram showing a schematic configuration of a lot data loss automatic correction system to which the present invention is applied;

2 is a flow chart of an embodiment for performing a method for automatically correcting lot data loss in a semiconductor manufacturing process according to the present invention.

FIG. 3 is an exemplary detailed processing flow diagram of an operator interface server for performing the automatic lot data loss calibration method of FIG. 2. FIG.

4 is a flowchart illustrating a detailed embodiment of a history information server for performing the automatic lot data loss correction method of FIG. 2.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: master database 206: cell management server

208: history information server queue file 210: history information server

212: history database

The lot data loss automatic calibration system in the semiconductor manufacturing process of the present invention for achieving the above object, the operator interface means for providing a lot data loss correction request input environment of the operator; Server means for checking and transmitting the lot data loss correction request received from the operator interface means; And storage means for storing the production information generated in the semiconductor manufacturing process, wherein the server means checks and updates the data.

In the semiconductor manufacturing process according to the present invention, the automatic lot data loss calibration method includes a first step in which an operator inputs a lot data loss calibration request using an operator interface process; A second step of receiving, by the worker interface server, a lot data loss calibration request from the worker interface process when the worker interface process sends a lot data loss calibration request to the worker interface server; A third step of the operator interface server confirming the obtained lot data loss correction request in the master database and updating the lot, cassette, and process information; A fourth step of the worker interface server transmitting the lost data of the lot identified in the third step to a cell management server; A fifth step in which the cell management server receives the lost data of the lot from the operator interface server and records the lost data in the lot information in the history information server queue file, and then transmits a message indicating that the lost data of the lot is stored in the history information server queue file to the history information server. ; And a sixth step of the history information server receiving the message from the cell management server, acquiring the lost data of the lot from the history information server queue file and updating the history database.

In addition, the lot data loss automatic calibration system in the semiconductor manufacturing process to which the present invention is applied, a first function that the operator inputs a lot data loss calibration request using the operator interface process; A second function that, if the worker interface process sends a lot data loss calibration request to a worker interface server, the worker interface server receives a lot data loss calibration request from a worker interface process; A third function of the operator interface server confirming the obtained lot data loss calibration request in the master database and updating the lot, cassette and process information; A fourth function of the worker interface server transmitting the lost data of the lot identified in the third function to a cell management server; A fifth function of receiving, by the cell management server, the lost data of the lot from the operator interface server and recording the lost data of the lot in a history information server queue file, and then transmitting a message indicating that the lost data of the lot is stored in the history information server queue file to the history information server; ; And a program for realizing a sixth function of updating the history database by acquiring the lost data of the lot from the history information server queue file by the history information server receiving the message from the cell management server. Provide the medium.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram schematically showing the configuration of an automatic lot data loss calibration system to which the present invention is applied, and provides an operator interface process 200 for providing an environment in which a worker can input a lot data loss calibration request, and the worker. The worker interface server 202 confirms and transmits a lot data loss calibration request inputted by the interface process 200, and the worker interface server 202 that receives the lot data loss calibration request from the worker interface process 200. The master database 204 stores lot information, cassette information, and process information so as to check the received data and update the data, and receives the data lost in the previous process from the operator interface server 202 to the master. Balls from that lot in the database 204 A cell management server 206 for checking data, a history information server queue file 208 for temporarily storing lot loss data by the cell management server 206, and a history and status of the lot and the ongoing work; Lot history information server 210 for receiving messages from the cell management server, and a history database 212 for storing the history and status of the lot and ongoing work.

A lot data loss automatic calibration method in a semiconductor manufacturing process constructed and operated as described above will be described with reference to FIGS.

2 is a flowchart illustrating an example process for performing a lot data loss automatic calibration method in a semiconductor manufacturing process according to the present invention.

When the worker inputs a lot data loss calibration request using the worker interface process 200 (S300), and the worker interface process 200 transmits a lot data loss calibration request to the worker interface server 202, the worker interface The server 202 receives the lot data loss calibration request from the operator interface process 200 (S302), acknowledges the obtained lot data loss calibration request in the master database 204, and updates the lot, cassette and process information. (S304).

The worker interface server 202 transmits the lost data of the lot identified in step S304 to the cell management server 206 (S306), and the cell management server 206 loses the lot from the worker interface server 202. After receiving the data and recording it in the history information server queue file 210 (S308), a message indicating that the lost data of the lot is stored in the history information server queue file 210 is transmitted to the history information server 212 (S310). .

The history information server 212 receiving the message from the cell management server 206 obtains the lost data of the lot from the history information server queue file 210 and updates the history database 212 (S312).

Attached FIG. 3 is a process in which the operator interface server 202 confirms the lot data loss correction request from the operator interface process 200 in the master database 204, and updates the lot, cassette, and process information in FIG. As a detailed flowchart of S304, the worker interface server 202 checks the ID of the corresponding lot and the cassette ID containing the lot in the master database 204 (S400), and checks the identified lot and cassette information. The transmission is transmitted to the interface server 202 (S402). In this case, the worker interface server 202 transmits the received lot and cassette information to the worker interface process 200, and the worker interface process 200 outputs the received lot and cassette information to a screen. To check.

The operator interface server 202 records the lost previous process data of the corresponding lot in the lot information table, the cassette information table, and the process information table of the master database 204 (S404).

4 is a history database in which the history information server 212 receiving the message from the cell management server 206 in FIG. 2 obtains lot data lost in a previous process from the history information server queue file 210. As a detailed flow chart of updating 212 (S312), the history information server 210 receives a message from the cell management server 206 indicating that the lost data of the lot has been stored in the history information server queue file 208. After acquiring the lost data of the corresponding lot from the history information server queue file 212, the lot state history table of the corresponding lot is selected from the history database S500 (S500), and the history information server queue file ( Lost data of the lot obtained in step 208 is recorded in the lot state history table (S502).

The history information server 210 selects a lot history table, a process progress history table and a process progress history table of the corresponding lot from the history database 212 (S504), and updates the data based on the corresponding lot data loss data (S504). In operation S506, a lot data loss correction request is inserted into the lot command history table of the history database 212.

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

The present invention as described above, by using the integrated automation system for semiconductor line management distributed to a plurality of servers operating the data of the lot lost during the process by sending and receiving messages between each server, data check and update operations By automatically calibrating without intervention, it is possible to reliably calibrate the lost lot data and effectively reduce the time and manpower required for data calibration, ultimately increasing production efficiency.

Claims (9)

Worker interface means for providing a lot data loss correction request input environment of the worker; Server means for checking and transmitting the lot data loss correction request received from the operator interface means; And Storage means for storing the production information generated in the semiconductor manufacturing process, the server means to check and update the data Lot data loss automatic calibration system in the semiconductor manufacturing process comprising a. The method of claim 1, The server means, A worker interface server for checking and transmitting a lot data loss correction request received from said worker interface means; A cell management server which receives a lot data loss calibration request from the operator interface server, checks, stores and transmits the data in the storage unit; And A lot data loss automatic calibration system in a semiconductor manufacturing process including a lot history information server for managing the history and status of the lot and ongoing work, and receives a message from the cell management server. The method of claim 1, The storage means, A master database in which lot information, cassette information, and process information are stored so that the operator interface server can confirm a lot data loss correction request; A history information server queue file in which the cell management server temporarily stores lot process progress request data; And And a history database in which the history information server checks and stores the history and status of the lot and the ongoing work. A first step in which a worker inputs a lot data loss correction request using an operator interface process; A second step of receiving, by the worker interface server, a lot data loss calibration request from the worker interface process when the worker interface process sends a lot data loss calibration request to the worker interface server; A third step of the operator interface server confirming the obtained lot data loss correction request in the master database and updating the lot, cassette, and process information; A fourth step of the worker interface server transmitting the lost data of the lot identified in the third step to a cell management server; A fifth step in which the cell management server receives the lost data of the lot from the operator interface server and records the lost data in the lot information in the history information server queue file, and then transmits a message indicating that the lost data of the lot is stored in the history information server queue file to the history information server. ; And A sixth step of receiving the message from the cell management server and updating the history database by acquiring the lost data of the lot from the history information server queue file; Lot data loss automatic correction method in the semiconductor manufacturing process comprising a. The method of claim 4, wherein The third step, A seventh step of the worker interface server confirming an ID of the corresponding lot and a cassette ID containing the lot in a master database; An eighth step of transmitting, by the worker interface server, the identified lot and cassette information to the worker interface process; And the ninth step of the operator interface server recording the lost previous process data of the corresponding lot in the lot information table, the cassette information table, and the process information table of the master database. . The method of claim 5, The eighth step, And automatically performing lot data loss in the semiconductor manufacturing process, further comprising a tenth step of outputting the corresponding lot and cassette information on the screen so that the operator can check the received lot and cassette information from the operator interface server. Calibration method. The method of claim 4, wherein The fifth step, An eleventh step of the cell management server receiving loss data of a lot from a worker interface server; A twelve step of the cell management server recording lost data of the received lot in a history information server queue file; And And a thirteenth step of transmitting, by the cell management server, a message indicating that the lost data of the lot is stored in the history information server queue file to the history information server. The method of claim 4, wherein The sixth step, A fourteenth step of receiving, by the history information server, a message indicating that the lost data of the lot is stored in a history information server queue file from a cell management server; A fifteenth step, wherein the history information server acquires lost data of the corresponding lot from a history information server queue file; A sixteenth step after the fifteenth step, the history information server selecting a lot status history table of the corresponding lot from a history database; A seventeenth step of recording, by the history information server, lost data of a lot obtained from a history information server queue file in the lot state history table; Step 18, wherein the history information server selects a lot history table, a process progress history table, and a process progress history table of the corresponding lot from a history database and updates the data based on the corresponding lot data loss data; And And a nineteenth step of the history information server inserting a lot data loss calibration request into a lot command history table of a history database. A first function in which the operator inputs a lot data loss correction request using an operator interface process; A second function that, if the worker interface process sends a lot data loss calibration request to a worker interface server, the worker interface server receives a lot data loss calibration request from a worker interface process; A third function of the operator interface server confirming the obtained lot data loss calibration request in the master database and updating the lot, cassette and process information; A fourth function of the worker interface server transmitting the lost data of the lot identified in the third function to a cell management server; A fifth function of receiving, by the cell management server, the lost data of the lot from the operator interface server and recording the lost data of the lot in a history information server queue file, and then transmitting a message indicating that the lost data of the lot is stored in the history information server queue file to the history information server; ; And A sixth function of receiving the message from the cell management server and updating the history database by acquiring the lost data of the lot from the history information server queue file; A computer-readable recording medium having recorded thereon a program for realizing this.