KR100533963B1 - System for automatic holding progressing lot operation in manufacturing semiconductor and method using the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for stopping a lot process in a semiconductor manufacturing process and a computer readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

The present invention, when it is necessary to stop the process of the lot using the integrated automation system for semiconductor line management distributed to a plurality of servers, the operator by the operation of sending and receiving messages, data check and update between each server To provide a system and method for stopping the lot process in a semiconductor manufacturing process that can automatically stop the lot process without intervention, and a computer-readable recording medium recording a program for realizing the lot process.

3. Summary of Solution to Invention

The present invention includes a first step of performing a lot process progress stop request by using an operator interface process from the outside; A second step in which the worker interface process transmits the lot process progress stop request to a worker interface server, and the worker interface server receives a lot process progress stop request; A third step of receiving, by the operator interface server, the lot process progress stop request information from the worker interface process, the lot process progress stop request information in a master database; A fourth step of transmitting, by the operator interface server, a result of performing the third step to a cell management server; A fifth step of the cell management server updating information on the corresponding lot in the lot information, cassette information, and equipment group information table of the master database; A sixth step of the cell management server storing data necessary for stopping the lot process in a history information server queue file and transmitting a result message to the history information server; And the history information server receiving the message indicating that the data for stopping the lot process progress is stored in the history information server queue file from the cell management server, obtaining data for stopping the process progress of the lot from the history information server queue file. A seventh step is performed to update data necessary for stopping the process of the lot in the history database.

4. Important uses of the invention

The present invention is used in a method for stopping the processing of a lot.

Description

System for stopping lot process in semiconductor manufacturing process and method thereof {SYSTEM FOR AUTOMATIC HOLDING PROGRESSING LOT OPERATION IN MANUFACTURING SEMICONDUCTOR AND METHOD USING THE SAME}

The present invention relates to a system and method for stopping a lot process in a semiconductor manufacturing process, and a computer-readable recording medium recording a program for realizing the same. In particular, a server distributed using an integrated automation system for semiconductor line management. Lot process progress stop system and method for automatically stopping the process of the lot by recording and updating data related to the exchange of messages, data related to problems in the process of the lot and process stop of the lot, and A computer readable recording medium having recorded thereon a program for realizing this.

In general, in the semiconductor manufacturing process, a process of reading a process result is performed after a specific process, and the results of the processes may deviate from a predetermined standard. After identifying the cause, the lot must be stopped to proceed with the process.

Accordingly, the lot process progress stopping system in the semiconductor manufacturing process as shown in FIG. 1 is conventionally used.

The conventional lot process stop system uses a worker interface process 100 that provides an environment in which a lot process stop request can be entered, and then the worker stores the lot process stop request in a lot state related file. Data related to the lot process progress stop request is transmitted to the management server 102, the report support server 104 and the remote management server 108, and stored in the history information file 106 and the history database 110, respectively.

However, the conventional lot process interruption system that performs a series of processes as described above, may be mishandled by the operator directly performing the process of stopping the lot process in the operator interface process, the history information file and the history There is a problem that it is difficult to determine the cause of the process stop because the data related to the lot stop process stored in the database is different from each other.

The present invention devised to solve the above problems, when it is necessary to stop the process of the lot using the integrated automation system for semiconductor line management distributed to a plurality of servers, the transmission and reception of messages between each server -Readable system that records the lot process progression system and method thereof in a semiconductor manufacturing process which can automatically stop the lot process progress without operator intervention by data checking and updating, and a program for realizing the data The purpose is to provide a medium.

The lot process progress stop system in the semiconductor manufacturing process to which the present invention is applied to achieve the above object, the operator interface means for providing a lot process progress stop request input environment to the outside; Server means for checking and transmitting a lot process progress stop request received from said operator interface means; And storage means for storing the production information generated in the semiconductor manufacturing process so that the server means can check and update the data.

The lot process progress stopping method in the semiconductor manufacturing process according to the present invention includes: a first step of performing a lot process progress stopping request using an operator interface process from the outside; A second step in which the worker interface process transmits the lot process progress stop request to a worker interface server, and the worker interface server receives a lot process progress stop request; A third step of receiving, by the operator interface server, the lot process progress stop request information from the worker interface process, the lot process progress stop request information in a master database; A fourth step of transmitting, by the operator interface server, a result of performing the third step to a cell management server; A fifth step of the cell management server updating information on the corresponding lot in the lot information, cassette information, and equipment group information table of the master database; A sixth step of the cell management server storing data necessary for stopping the lot process in a history information server queue file and transmitting a result message to the history information server; And the history information server receiving the message indicating that the data for stopping the lot process progress is stored in the history information server queue file from the cell management server, obtaining data for stopping the process progress of the lot from the history information server queue file. A seventh step is performed to update data necessary for stopping the process of the lot in the history database.

The present invention also provides a process automation system having a processor for managing a lot process progress in a semiconductor manufacturing process, comprising: a first function of receiving a lot process progress stop request through an operator interface process; A second function for the worker interface process to send the lot process progress stop request to a worker interface server and for the worker interface server to receive the lot process progress stop request; A third function for the worker interface server receiving the lot process progress stop request from the worker interface process to check the lot process progress stop request information in a master database; A fourth function of causing the operator interface server to transmit a result of performing the third function to a cell management server; A fifth function of causing the cell management server to update the information of the corresponding lot in the lot information, cassette information and equipment group information table of the master database; A sixth function of allowing the cell management server to store data necessary for stopping the lot process in a history information server queue file and to transmit a result message to the history information server; And the history information server receiving the message indicating that the data for stopping the lot process progress is stored in the history information server queue file from the cell management server, obtaining data for stopping the process progress of the lot from the history information server queue file. A computer readable recording medium having recorded thereon a program for realizing a seventh function for updating data necessary for stopping the process of the lot in a history database is provided.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is a block diagram schematically showing the configuration of the lot process progress stop system to which the present invention is applied, the operator interface process 200 to provide an environment in which the operator can enter the lot process progress stop request, and the worker interface A worker interface server 202 that checks and transmits a lot process progress stop request input in the process 200 and a worker interface server 202 that receives a lot process progress stop request from the worker interface process 200 are received. The master database 204 stores lot information, cassette information, and equipment group information so as to check the updated data and update the data, and receives data necessary for stopping the lot process from the operator interface server 202. Casein information, cachet in master database 204 A cell management server 206 for checking the lot information and the device group information, a history information server queue file 208 for temporarily storing data necessary for the cell management server 206 to stop the progress of the lot process, and a lot and work in progress Lot history information server 210 for managing the history and status for the cell management server receives a message, and a history database 212 that stores the lot status, lot problems, lot command history and status.

The lot process progression stopping method in the semiconductor manufacturing process configured and operated as described above will be described with reference to FIGS.

3 is a flow chart of an embodiment for performing a lot process progress stopping method in a semiconductor manufacturing process according to the present invention.

Referring to FIG. 3, when a worker performs a lot process progress stop request using the worker interface process 200 (S300), the worker interface process 200 requests the lot process progress stop request from the worker interface server 202. The worker interface server 202 checks the lot process progress stop request information in the master database 204 (S302).

The operator interface server 202 transmits the result of performing the step S302 to the cell management server 206 (S304), and the cell management server 206 transmits lot information, cassette information, and equipment group information of the master database 204. After updating the information of the corresponding lot in the table (S306), the result is transmitted to the worker interface server 202 (S308). At this time, when the worker interface server 202 transmits the result of performing the step S306 to the worker interface process 200, the worker interface process 200 is displayed on the screen so that the operator can check the result of performing the step S306. Output

The cell management server 206 stores the data necessary to stop the lot process progress in the history information server queue file 208 (S310), and transmits a message to the history information server 210 (S312).

The history information server 210 receives a message from the cell management server 206 in the history information server queue file 208 that it has stored data necessary for stopping the lot process. Acquire the data necessary to stop the process progress of (S314), and updates the data required to stop the process progress of the lot in the history database (212) (S316).

4 is a detailed flowchart of a process (S302) in which the worker interface server 202 confirms the lot process progress stop request information in the master database 204 in FIG. 3. Referring to FIG. The server 202 checks information such as a worker name, a corresponding lot ID, and a cassette ID requested to stop the process in the master database 204 (S400), and transmits the result to the worker interface process 200. (S402). In this case, the worker interface process 200 outputs the operation result of the step S400 to the screen so that the worker can check.

Subsequently, the operator interface server 202 changes the count of the corresponding lot in the equipment group information table of the master database 204 (S404).

5 is a detailed flowchart of a process (S306) in which the cell management server 206 updates the information of the corresponding lot in the lot information, the cassette information, and the equipment group information table of the master database 204. Referring to 5, the cell management server 206 receives the data necessary to stop the process of the lot from the operator interface server 202 (S500), the lot in the equipment group information table of the master database 204 After confirming the information of the equipment group located (S502), by reading the data of the lot from the lot information table and the process information table (S504), to check the state, process information and equipment group ID of the corresponding lot (S506).

Thereafter, the cell management server 206 checks the lot ID in the cassette information table of the master database 204 (S508), and after confirming the location of the cassette for stopping the lot progressing (S510), the master database 204 ) Update the stop code, the progress display, the stop time and the worker information of the lot in the lot information table of (S512), and update the stop display and worker information of the corresponding lot in the process information table (S514).

6 is a detailed flowchart of a process (S316) in which the history information server 210 updates data necessary for stopping the process of the lot in the history database 212. Referring to FIG. The history information server 210 selects the lot status history table of the lot to stop the process progress in the history database 212 (S600), and from the data necessary to stop the lot progress obtained from the history information server queue file 208 The lot state history table is updated by checking data such as the process of the lot to stop the process progress, whether the process progress is stopped and the number of wafers (S602).

The history information server 210 selects and updates the lot history table and the lot problem history table of the lot to stop the process in the history database 212 (S604, S606), the process progress state of the history database 212 The history table is updated (S608).

Thereafter, the history information server 210 inserts a lot process progress stop command into the lot command history table of the history database 212 (S610).

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

The present invention as described above, using the integrated automation system for semiconductor line management distributed to a plurality of servers operating a lot to stop the process progress, sending and receiving messages between each server, confirmation of the data required to stop the lot process progress and By automatically stopping the process of the lot without any intervention by the operator, it is possible to prevent the manufacturing process problem that may occur when the process of the lot is not stopped, and the manpower required to stop the process of the lot. And it is effective to reduce the time effectively.

1 is a block diagram schematically showing the configuration of a lot process progress stopping system in a conventional semiconductor manufacturing process.

Figure 2 is a block diagram showing the schematic configuration of a lot process progress stop system in the semiconductor manufacturing process to which the present invention is applied.

Figure 3 is one embodiment processing flow chart for performing the lot process progress stop method according to the present invention.

Figure 4 is a detailed process flow diagram of the operator interface server for performing the lot process progress stop method of FIG.

5 is a detailed flowchart of a cell management server for performing the lot process progress stopping method of FIG.

6 is a detailed flowchart of a history information server for performing the lot process progress stopping method of FIG.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: master database 206: cell management server

208: history information server queue file 210: history information server

212: history database

Claims (10)

Operator interface means for providing a lot process progress stop request input environment to the outside; Server means for checking and transmitting a lot process progress stop request received from said operator interface means; And Storage means for storing production information generated in a semiconductor manufacturing process so that the server means can check and update data Lot process progress stop system in the semiconductor manufacturing process comprising a. The method of claim 1, The server means, A worker interface server for checking and transmitting a lot process progress stop request received from the worker interface means; A cell management server which receives a lot process progress stop request from the operator interface server, checks, stores and transmits the data in the storage unit; And A lot process progress stop system in the semiconductor manufacturing process including a lot history information server that manages the history and status of the lot and the ongoing work, and receives a message from the cell management server. The method of claim 1, The storage means, A master database in which lot information, cassette information, and equipment group information are stored so that the worker interface server can confirm a lot process progress stop request; A history information server queue file in which the cell management server temporarily stores lot process progress stop data; And And a history database storing a lot status, a lot problem, and a lot instruction history so that the history information server can check and store the lot process progress stop data. A first step of performing a lot process progress stop request by using an operator interface process externally; A second step in which the worker interface process transmits the lot process progress stop request to a worker interface server, and the worker interface server receives a lot process progress stop request; A third step of receiving, by the operator interface server, the lot process progress stop request information from the worker interface process, the lot process progress stop request information in a master database; A fourth step of transmitting, by the operator interface server, a result of performing the third step to a cell management server; A fifth step of the cell management server updating information on the corresponding lot in the lot information, cassette information, and equipment group information table of the master database; A sixth step of the cell management server storing data necessary for stopping the lot process in a history information server queue file and transmitting a result message to the history information server; And The history information server having received a message from the cell management server that the data necessary to stop the lot process progression is stored in the history information server queue file, obtains data necessary to stop the process progression of the lot from the history information server queue file, and history A seventh step of updating data required for stopping the process of the lot in the database; Lot process progress stop method in the semiconductor manufacturing process comprising a. The method of claim 4, wherein The fifth step, An eighth step of the cell management server transmitting the result of the fifth step to the worker interface server; A ninth step of transmitting, by the worker interface server, the result of performing the fifth step received from the cell management server to the worker interface process; And And a tenth step in which the operator interface process outputs the result of the fifth step on a screen so that an operator can confirm the result of the fifth step. The method according to claim 4 or 5, The third step, An eleventh step of the operator interface server confirming information such as a worker name, a corresponding lot ID, a cassette ID, and the like for requesting to stop the process in the master database; A twelfth step of transmitting, by the worker interface server, the result of performing the eleventh step to the worker interface process; And A process for stopping a lot process in a semiconductor manufacturing process comprising a thirteenth step in which the operator interface server changes a count of a corresponding lot in a device group information table of a master database. The method of claim 6, The twelfth step, And a fourteenth step of outputting the result of the eleventh step from the operator interface server to the screen for the operator to check the result of the work. The method of claim 6, The fifth step, A fifteenth step of receiving, by the cell management server, data necessary for stopping process progress of the lot from an operator interface server; After the cell management server checks the information of the equipment group in which the corresponding lot is located in the equipment group information table of the master database, the data of the corresponding lot is read from the lot information table and the process information table, and the state, process information, and equipment of the corresponding lot are read. A sixteenth step of checking a group ID; A seventeenth step of the cell management server confirming a lot ID and a location of a cassette for stopping lot progress in a cassette information table of a master database; An eighteenth step of the cell management server updating the progress code, the progress display, the stop time, and the worker information of the corresponding lot in the lot information table of the master database; And And a nineteenth step of the cell management server updating the lot display and worker information of the corresponding lot in the process information table of the master database. The method of claim 8, The seventh step, A twenty-second step of receiving, from the cell management server, a message indicating that data required for stopping the lot process progress is stored in the history information server queue file, the history information server obtaining data necessary for stopping the process progress of the lot from the history information server queue file; step; The history information server selects the lot status history table of the lot to stop the process progress from the history database, and processes the process and the process of the lot to stop the process progress from the data necessary to stop the lot progress obtained from the history information server queue file. A twenty-first step of updating the lot state history table by checking data such as whether to stop and a wafer quantity; A twenty-second step of the history information server selecting and updating a lot history table and a lot problem history table of lots to stop processing in a history database; In a twenty-third step, after the twenty-second step, the history information server updates a process progress status history table of a history database; And And a twenty-fourth step of inserting, by the history information server, a lot process progress stop command into a lot command history table of a history database. In the process automation system having a processor for managing the lot process progress in the semiconductor manufacturing process, A first function of receiving a lot process progress stop request through an operator interface process; A second function for the worker interface process to send the lot process progress stop request to a worker interface server and for the worker interface server to receive the lot process progress stop request; A third function for the worker interface server receiving the lot process progress stop request from the worker interface process to check the lot process progress stop request information in a master database; A fourth function of causing the operator interface server to transmit a result of performing the third function to a cell management server; A fifth function of causing the cell management server to update the information of the corresponding lot in the lot information, cassette information and equipment group information table of the master database; A sixth function of allowing the cell management server to store data necessary for stopping the lot process in a history information server queue file and to transmit a result message to the history information server; And The history information server having received a message from the cell management server that the data necessary to stop the lot process progression is stored in the history information server queue file, obtains data necessary to stop the process progression of the lot from the history information server queue file, and history A seventh function of updating data required for stopping the process of the lot in the database; A computer-readable recording medium having recorded thereon a program for realizing this.