KR100537183B1 - Automatic shipping lot system in manufacturing semiconductor and method using the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

The present invention relates to a lot facility moving system and method thereof in a semiconductor manufacturing process, and a computer readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

The present invention inputs the equipment movement request of the corresponding lot by using the integrated automation system for semiconductor line management, and transmits and receives data related to the equipment movement of the lot between each of a plurality of distributed servers, and transmits the equipment movement request of the corresponding lot to a database. Provided is a lot facility moving system and method thereof in a semiconductor manufacturing process capable of carrying out lot facilities without additional work by an operator, and a computer-readable recording medium recording a program for realizing the same. To do so.

3. Summary of Solution to Invention

The present invention includes a first step in which a worker requests equipment movement of a lot using an operator interface process; A second step of, when the worker interface process transmits the equipment movement request of the lot to the worker interface server, the worker interface server receives the equipment movement request of the lot from the worker interface process; The operator interface server receiving the request for equipment movement of the lot selects the lot information, the cassette information and the process information table of the corresponding lot from the master database, checks the data necessary for moving the equipment, and updates the master database. Step 3; When the operator interface server transmits data related to the equipment movement of the lot checked in the master database to the cell management server, the data related to the equipment movement of the lot received by the cell management server is transmitted to the lot schedule server, and the result is read. Transmitting to a worker interface server; A fifth step of the cell management server recording data related to equipment movement of the lot in a history information server queue file and transmitting a result message to the history information server; And receiving, from the cell management server, a message indicating that data relating to the movement of the lot has been recorded in the history information server queue file, the history information server obtains data related to the movement of the lot from the history information server queue file to the history database. Perform a sixth step to confirm and update.

4. Important uses of the invention

The present invention is used in a method of moving a lot in a semiconductor manufacturing process.

Description

LOT AUTOMATIC SHIPPING LOT SYSTEM IN MANUFACTURING SEMICONDUCTOR AND METHOD USING THE SAME

The present invention relates to a system and a method for moving a lot facility in a semiconductor manufacturing process, and a computer-readable recording medium recording a program for realizing the same. In particular, a server distributed using an integrated automation system for semiconductor line management. Lot equipment moving system and method and a program for realizing the lot equipment, which can carry out the equipment movement of the lot by exchanging messages between them and updating the lot process elimination data of the corresponding lot, thereby eliminating the additional work of the operator. The present invention relates to a recording medium which can be read by.

In general, in the semiconductor manufacturing process, after the process is completed on the wafer, it is necessary to move the equipment of the corresponding lot to the assembly plant for package production.

Conventional lot facility moving system, the operator inputs the information of the cassette containing the lot to be moved directly to the assembly plant for the package production and confirm the input information, the facility to receive the lot and proceed with the package process and Enter the process conditions.

However, in the conventional lot facility moving system which performs a series of processes as described above, since only one lot can be moved in a package process, when a lot of lots are installed in a lot, a series of processes as described above are performed by the quantity of lots. There is a problem that needs to be repeated.

The present invention has been made to solve the above problems, input the equipment movement request of the corresponding lot using the integrated automation system for semiconductor line management, and transmits and receives data related to the equipment movement of the lot between the plurality of distributed servers And a lot facility moving system and method thereof in a semiconductor manufacturing process capable of carrying out lot facility movement without additional work by an operator by checking and updating a facility movement request of the corresponding lot, and a program for realizing the same. Its purpose is to provide a computer-readable recording medium having recorded thereon.

The lot equipment movement system in the semiconductor manufacturing process to which the present invention is applied to achieve the above object, the operator interface means for providing an environment that can input the lot equipment movement request from the outside; Server means for checking and transmitting a lot facility movement request received from the operator interface means; And storage means for storing the production information generated in the semiconductor manufacturing process, wherein the server means checks and updates the data.

A lot facility moving method in a semiconductor manufacturing process according to the present invention includes a first step in which a worker requests facility movement of a lot using an operator interface process; A second step of, when the worker interface process transmits the equipment movement request of the lot to the worker interface server, the worker interface server receives the equipment movement request of the lot from the worker interface process; The operator interface server receiving the request for equipment movement of the lot selects the lot information, the cassette information and the process information table of the corresponding lot from the master database, checks the data necessary for moving the equipment, and updates the master database. Step 3; When the operator interface server transmits data related to the equipment movement of the lot checked in the master database to the cell management server, the data related to the equipment movement of the lot received by the cell management server is transmitted to the lot schedule server, and the result is read. Transmitting to a worker interface server; A fifth step of the cell management server recording data related to equipment movement of the lot in a history information server queue file and transmitting a result message to the history information server; And receiving, from the cell management server, a message indicating that data relating to the movement of the lot has been recorded in the history information server queue file, the history information server obtains data related to the movement of the lot from the history information server queue file to the history database. Perform a sixth step to confirm and update.

In addition, the lot equipment movement system in the semiconductor manufacturing process to which the present invention is applied, the first function that the operator requests the equipment movement of the lot using the operator interface process; A second function that, if the worker interface process sends a plant movement request of a lot to a worker interface server, receives a plant movement request of the lot from a worker interface process; The operator interface server receiving the request for equipment movement of the lot selects the lot information, the cassette information and the process information table of the corresponding lot from the master database, checks the data necessary for moving the equipment, and updates the master database. Trifunction; When the operator interface server transmits data related to the equipment movement of the lot checked in the master database to the cell management server, the data related to the equipment movement of the lot received by the cell management server is transmitted to the lot schedule server, and the result is read. A fourth function for transmitting to a worker interface server; A fifth function of recording, by the cell management server, data relating to equipment movement of the lot in a history information server queue file, and transmitting a result message to the history information server; And receiving, from the cell management server, a message indicating that data relating to the movement of the lot has been recorded in the history information server queue file, the history information server obtains data related to the movement of the lot from the history information server queue file to the history database. A computer readable recording medium having recorded thereon a program for realizing a sixth function of checking and updating is provided.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a schematic configuration of a lot facility moving system in a semiconductor manufacturing process to which the present invention is applied. Referring to Fig. 1, in the lot facility moving system to which the present invention is applied, an operator moves equipment of a lot. A worker interface process 200 for providing an environment in which a request can be made, a worker interface server 202 for receiving, confirming and transmitting a lot facility movement request from the worker interface process, and the worker interface server 202 may be configured to include a lot of a lot. The master database 204 stores lot, cassette, and process information for acquiring and updating data for equipment movement, and the master database 204 for data related to lot equipment movement received from the operator interface server 202. Cell management server 206 to check and update from the cell management server 206 Lot schedule server 208 for receiving data related to the movement of the lot from the relevant lot and modifying the process progress schedule of the corresponding lot in the master database 204, and data related to the movement of the lot for the cell management server 206. History information server queue file 210 for temporarily storing the data, and history information for receiving and receiving a message from the cell management server 206 and acquiring and confirming and updating data related to lot equipment movement in the history information server queue file 210. The server 212 and a history database 214 storing lot history information, process progress history information, and lot command history information so that the history information server 212 can check and update data on lot facility movement. Equipped.

Hereinafter, the operation of the lot facility moving system configured as described above will be described with reference to FIGS.

Figure 2 is a flow chart of an embodiment for performing the lot equipment movement method in the semiconductor manufacturing process according to the present invention.

Referring to FIG. 2, when a worker requests equipment movement of a lot using the worker interface process 200 (S300), the worker interface process 200 transmits a equipment movement request of the lot to the worker interface server 202. And, the worker interface server 202 receives the equipment movement request of the lot from the worker interface process 200 (S302).

The operator interface server 202 receiving the equipment movement request of the lot selects the lot information, the cassette information and the process information table of the corresponding lot from the master database 204 to confirm the data necessary for moving the equipment, and The master database 204 is updated (S304).

The operator interface server 202 transmits data related to equipment movement of the lot confirmed in the master database 204 to the cell management server 206 (S306), and the cell management server 206 moves equipment of the received lot. In operation S308, the data related to the data is transmitted to the lot schedule server 208. At this time, the lot schedule server 208 modifies the schedule of the corresponding lot in the master database 204 based on the data related to the equipment movement of the received lot.

In addition, the cell management server 206 transmits the result of performing the step S308 to the operator interface server 202 (S310). In this case, the worker interface server 202 transmits the performance result to the worker interface process 200, and the worker interface process 200 outputs the performance result of step S308 to the screen so that the worker can check.

The cell management server 206 records the data related to the movement of the lot in the history information server queue file 210 (S312), and transmits the result message to the history information server 212 (S314).

The history information server 212, which has received a message from the cell management server 206 that records data relating to the movement of the lot in the history information server queue file 210, receives the message from the lot information in the history information server queue file 210. Obtaining data related to the movement of the equipment is confirmed and updated in the history database 214 (S316).

In FIG. 3, the operator interface server 202 receiving the lot movement request of the lot in FIG. 2 selects the lot information, the cassette information, and the process information table of the corresponding lot from the master database 204 to move the facility. This is a detailed flowchart of the process (S304) of checking the necessary data and updating the master database 204. Referring to FIG. 3, a worker interface server (receiving a lot movement request from the worker interface process 200) ( 202 selects the lot information, the cassette information and the process information table of the corresponding lot to move the equipment from the master database 204 (S400), the lot type of the corresponding lot from the selected lot information, the cassette information and the process information table, After checking the necessity of reworking, stopping, lot status, cassette status, product, process and unit process information (S402), Check the equipment movement process of the lot progress in the process information table of the group master database (204) (S404).

The worker interface server 202 transmits the result confirmed in the master database 204 to the worker interface process 200 (S406). At this time, the operator interface process 200 outputs the data check result related to the movement of the lot facility of the corresponding lot received on the screen so that the operator can check.

The operator interface server 202 selects a facility information table and a facility movement telegram table in process in the master database 204 (S408) and deletes an existing lot information table of the corresponding lot from the master database 204. In operation S410, the cassette information table of the corresponding lot is updated in the master database 204 in operation S412.

Thereafter, the worker interface server 202 determines whether the lot progress is automatically terminated in the corresponding lot (S414).

If the determination result (S414), the lot progress automatic termination of the lot is "Yes", the operator interface server 202 deletes the existing process information table in the master database 204 (S416), the lot of the corresponding lot If the automatic progress is "no", the operator interface server 202 adds a new process information table according to the movement of the equipment of the lot in the master database 204 (S418).

4 is a history information server queue in which the history information server 212 receives a message indicating that data relating to the movement of a lot is recorded in the history information server queue file 210 from the cell management server 206 in FIG. 2. A detailed flow diagram of a process (S316) of acquiring data related to equipment movement of a lot from the file 210 and confirming and updating in the history database 214. Referring to FIG. 4, the history information server 212 manages a cell. Receive a message from the server 206 that the data relating to the equipment movement of the lot has been recorded in the history information server queue file 210, and obtain data related to the equipment movement of the lot from the history information server queue file 210 ( S500).

The history information server 212 checks the data related to the movement of the equipment of the lot acquired from the history information server queue file 210 and checks the process, process progress, wafer quantity, and rework at the equipment to be moved (S502). ), The history of the lot to be progressed in the facility to be moved is inserted into the lot history table of the history database 214 (S504).

Subsequently, the history information server 212 updates the process progress status history information table and the process progress history information table of the history database 214 (S506), and after inserting the equipment movement command of the lot into the lot instruction history table ( S508), it is determined whether or not automatic termination of the corresponding lot process proceeds (S510).

If the determination result (S510), whether the automatic end of the lot process progress is "no", the history information server 212 inserts a lot information table of the new equipment to move to the history database (214) (S512).

In addition, the history information server 212 inserts the process progress status history information table of the equipment to be newly moved to the history database 214 (S514), inserts the lot command history table of the equipment to be newly moved (S516), and returns. do.

On the other hand, if the determination result (S510), whether the automatic end of the lot process progress is "Yes", the history information server 212 is automatically returned after the process of the lot (S518).

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

In the present invention as described above, by using the integrated automation system for semiconductor line management, input the equipment movement request of the corresponding lot, transmit and receive data related to the equipment movement of the lot between each of the plurality of distributed servers, the equipment movement of the lot By checking and updating the request in the database, it is possible to carry out lot movement without additional work by the operator, and by managing the lot movement data of the lot reliably, the time and manpower required for the movement of the lot and management of the data can be determined. It can effectively reduce the efficiency and ultimately increase the production efficiency.

1 is a block diagram schematically showing the configuration of a lot facility moving system in a semiconductor manufacturing process according to the present invention;

FIG. 2 is a flowchart illustrating an example process for performing a lot facility moving method in a semiconductor manufacturing process applied to FIG. 1.

FIG. 3 is a flowchart illustrating a detailed embodiment of a worker interface server for performing the lot facility moving method of FIG. 2.

4 is a flowchart illustrating a detailed embodiment of a history information server for performing the lot facility moving method of FIG.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: master database 206: cell management server

208: lot schedule server 210: history information server queue file

212: history information server 214: history database

Claims (11)

Operator interface means for providing an environment in which a lot facility movement request can be input from the outside; Server means for checking and transmitting a lot facility movement request received from the operator interface means; And Storage means for storing the production information generated in the semiconductor manufacturing process, the server means to check and update the data Lot equipment movement system in the semiconductor manufacturing process comprising a. The method of claim 1, The server means, A worker interface server for receiving, confirming and transmitting a lot facility movement request from the worker interface process; A cell management server transmitting data related to lot facility movement received from the operator interface server; A lot schedule server that receives data related to facility movement of the lot from the cell management server and modifies the process progress schedule of the lot in the storage means; And And a history information server which receives a message from the cell management server and obtains, confirms and updates data related to the movement of the lot. The method of claim 1, The storage means, A master database in which the operator interface server acquires and updates cassette information, lot information, and process information for lot facility movement; A history information server queue file in which the cell management server temporarily stores data related to lot facility movement; And And a history database for storing lot history information, process progress history information, and lot command history information so that the history information server can check and update the data on the lot facility movement. A first step in which a worker requests facility movement of a lot using a worker interface process; A second step of, when the worker interface process transmits the equipment movement request of the lot to the worker interface server, the worker interface server receives the equipment movement request of the lot from the worker interface process; The operator interface server receiving the request for equipment movement of the lot selects the lot information, the cassette information and the process information table of the corresponding lot from the master database, checks the data necessary for moving the equipment, and updates the master database. Step 3; When the operator interface server transmits data related to the equipment movement of the lot checked in the master database to the cell management server, the data related to the equipment movement of the lot received by the cell management server is transmitted to the lot schedule server, and the result is read. Transmitting to a worker interface server; A fifth step of the cell management server recording data related to equipment movement of the lot in a history information server queue file and transmitting a result message to the history information server; And The history information server, which has received a message from the cell management server that the data relating to the movement of the lot is recorded in the history information server queue file, obtains data related to the movement of the lot from the history information server queue file and confirms it in the history database. And sixth step of updating Lot equipment movement method in a semiconductor manufacturing process comprising a. The method of claim 4, wherein The third step, A seventh step of selecting, from the master database, lot information, cassette information, and process information table of the corresponding lot to which the worker interface server, which has received the lot movement request from the worker interface process, moves the facility; The operator interface server checks the selected lot information, cassette information and process information table for the lot type, rework need, whether to stop, lot status, cassette status, product, process and unit process information. Step 8; A ninth step of the operator interface server confirming a facility moving process of the corresponding lot in an ongoing process information table of the master database; A tenth step of transmitting, by the worker interface server, the result confirmed in the master database to the worker interface process; An eleventh step of the operator interface server selecting a facility information table and a facility movement telegram table in the master database; A twelve step of the worker interface server deleting an existing lot information table of the corresponding lot from the master database and then updating the cassette information table of the corresponding lot from the master database; A thirteenth step after the twelfth step, the operator interface server determines whether the lot is automatically terminated in the corresponding lot; As a result of the determination of the thirteenth step, when the lot progress automatic termination of the corresponding lot is “Yes”, the fourteenth step of the operator interface server deleting the existing process information table from the master database; As a result of the determination of the thirteenth step, when the lot progress automatic termination of the lot is "No", the operator interface server includes a fifteenth step of adding a new process information table according to the movement of the equipment of the lot to the master database; Lot facility movement method in semiconductor manufacturing process. The method of claim 5, The tenth step, And a sixteenth step of outputting a data check result related to the lot facility movement of the corresponding lot received by the worker interface process on a screen for a worker to confirm. The method of claim 4, wherein The fourth step, A seventeenth step of transmitting, by the cell management server, data related to equipment movement of the lot received by the cell management server to the lot schedule server when the worker interface server transmits data related to equipment movement of the lot identified in the master database; And 18. The method of claim 1, wherein the cell management server transmits the processing result of the seventeenth step to the operator interface server. The method of claim 7, wherein The seventeenth step, And a nineteenth step of modifying the schedule of the corresponding lot in the master database based on the data related to the movement of the lot by the lot schedule server having received data related to the movement of the lot from the cell management server. Lot plant movement in the process. The method of claim 7, wherein The eighteenth step, A twenty step of transmitting, by the worker interface server, the performance result of the seventeenth step to a worker interface process; And And a twenty-first step of the operator interface process outputting the result of the seventeenth step on a screen so that an operator can confirm the result. The method of claim 4, wherein The sixth step, A twenty-second step of receiving, by the history information server, a message indicating that the cell management server has recorded data related to equipment movement of the lot in a history information server queue file; A twenty-third step of obtaining, by the history information server, data related to equipment movement of a lot from a history information server queue file; A twenty-fourth step of checking, by the history information server, data related to the equipment movement of the lot obtained from the history information server queue file whether the process, process progress stop, wafer quantity, and rework are performed in the equipment to be moved; A twenty-fifth step of inserting a history of a lot to be performed in a facility to which the history information server is to be moved into a lot history table of the history database; A twenty sixth step of the history information server updating a process progress status history table and a process progress history information table of a history database, and inserting a plant movement command of a lot into a lot instruction history table; A 27th step of determining, by the history information server, whether the lot process of the lot to be moved to the facility is automatically terminated; A 28th step of inserting a lot information table of a facility to be newly moved into the history database when the determination result of the 27th step is that the automatic end of the corresponding lot process is "no"; Inserting, by the history information server, a process progress status history information table of a facility to be newly moved in the history database, and inserting a lot command history table of a facility to be newly moved; And If the determination result of the 27th step, the automatic end of the lot process progress is "Yes", the lot equipment movement in the semiconductor manufacturing process including the 30th step of automatically terminating the process of the lot process; Way. A first function in which a worker requests equipment movement of a lot using an operator interface process; A second function that, if the worker interface process sends a plant movement request of a lot to a worker interface server, receives a plant movement request of the lot from a worker interface process; The operator interface server receiving the request for equipment movement of the lot selects the lot information, the cassette information and the process information table of the corresponding lot from the master database, checks the data necessary for moving the equipment, and updates the master database. Trifunction; When the operator interface server transmits data related to the equipment movement of the lot checked in the master database to the cell management server, the data related to the equipment movement of the lot received by the cell management server is transmitted to the lot schedule server, and the result is read. A fourth function for transmitting to a worker interface server; A fifth function of recording, by the cell management server, data relating to equipment movement of the lot in a history information server queue file, and transmitting a result message to the history information server; And The history information server, which has received a message from the cell management server that the data relating to the movement of the lot is recorded in the history information server queue file, obtains data related to the movement of the lot from the history information server queue file and confirms it in the history database. And the sixth function to update A computer-readable recording medium having recorded thereon a program for realizing this.