KR100533961B1 - System for collecting created engineering data of lot in manufacturing semiconductor process and method using for the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for collecting data of work occurring in a semiconductor manufacturing process and a computer readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

The present invention, by using the integrated automation system for semiconductor line management that is operated by a plurality of servers, collects the work data generated in the semiconductor manufacturing process and stores in a distributed database to provide a safe work data even if a communication failure occurs It is to provide a computer readable recording medium recording a work data collection system and method thereof, and a program for realizing the same.

3. Summary of Solution to Invention

The present invention includes a first step in which a worker inputs a job data and a job data collection request using a worker interface process; A second step in which the worker interface process sends a job data and a job data collection request to a worker interface server; A third step in which the worker interface server receives a job data and a job data collection request from a worker interface process, obtains parameter data of a corresponding lot from a job data related table of a master database, and generates a job data file; A fourth step of transmitting, by the worker interface server, work data to a cell management server; A fifth step of the cell management server receiving job data from an operator interface server and transmitting the job data to a data collection server; A sixth step of the cell management server storing the work data in the history information server queue file and transmitting a message to the history information server indicating that the work data is stored in the history information server queue file; And a seventh step in which the history information server receiving the message from the cell management server obtains the work data from the work data file and the history information server queue file and records the work data in a history database.

4. Important uses of the invention

The present invention is used to collect work data generated in the semiconductor manufacturing process.

Description

SYSTEM FOR COLLECTING CREATED ENGINEERING DATA OF LOT IN MANUFACTURING SEMICONDUCTOR PROCESS AND METHOD USING FOR THE SAME}

The present invention relates to a method for collecting job data of a lot generated in a semiconductor manufacturing process, and more particularly, to an operation data collection request inputted from equipment and a worker using an integrated automation system for semiconductor line management. A work data collection system and method thereof, and a computer-readable recording medium having recorded thereon a program for realizing the same.

In general, in the semiconductor manufacturing process, lots generate a large amount of data as production and measuring equipment proceed, and the generated data need to be stored in the semiconductor line management system because it is highly useful as production information and reporting information. .

Accordingly, the conventional job data collection system as shown in FIG. 1 includes a worker interface process 100 that provides an environment in which a worker can input a job data collection request and job data, and the worker interface process 100. The operator interface server 102 for checking and transmitting the job data input from the operator, the MES database 104 storing lot information, cassette information, equipment information, and process information, and the job data from the operator interface server 102. A cell management server 106 that receives and transmits the data, a history information server 110 that receives the job data from the cell management server 106, and stores the job data in a job data file 108, and the cell management server 106. History server queue file 112 for temporarily storing the job data for storing in the MES database 104, and the history server queue file. It is composed of a cell support server 114 for storing the work data stored in the work 112 in the MES database (104).

However, in the conventional working data collection system as described above, if the data capacity of the MES database 104 is not huge and periodic update and maintenance is performed, the data amount may exceed the capacity of the data storage device or the structure of the database may be broken. In addition, since the size and data capacity of the system is enormous, a large amount of time and manpower is required for its maintenance.

In addition, since the MES database 104 and the work data file 108 are generated by different servers, there is a possibility of data inconsistency, and a communication error between the MES database 104 and the equipment and the terminal occurs. Another problem is that the work data cannot be updated immediately and is missing and cannot perform accurate production control using the work data.

Accordingly, the present invention has been made to solve the above problems, by using the integrated automation system for semiconductor line management operating as a plurality of servers to collect the work data generated in the semiconductor manufacturing process and stored in a distributed database to communicate It is an object of the present invention to provide a system and a method for collecting data of work generated in a semiconductor manufacturing process that can provide safe working data even in the event of a failure, and a computer-readable recording medium storing a program for realizing the same.

The work data collection system generated in the semiconductor manufacturing process of the present invention for achieving the above object, the operator interface means for providing an environment in which a worker can input the work data collection request and the work data; Server means for checking and transmitting the job data received from the worker interface means; And storage means for storing work data generated in the semiconductor manufacturing process, wherein the server means checks and updates the data.

The work data collection method generated in the semiconductor manufacturing process of the present invention includes a first step in which a worker inputs work data and a work data collection request using a worker interface process; A second step in which the worker interface process sends a job data and a job data collection request to a worker interface server; A third step in which the worker interface server receives a job data and a job data collection request from a worker interface process, obtains parameter data of a corresponding lot from a job data related table of a master database, and generates a job data file; A fourth step of transmitting, by the worker interface server, work data to a cell management server; A fifth step of the cell management server receiving job data from an operator interface server and transmitting the job data to a data collection server; A sixth step of the cell management server storing the work data in the history information server queue file and transmitting a message to the history information server indicating that the work data is stored in the history information server queue file; And a seventh step in which the history information server receiving the message from the cell management server obtains the work data from the work data file and the history information server queue file and records the work data in a history database.

The present invention also provides a semiconductor automation system having a processor for managing production information of a semiconductor manufacturing process, comprising: a first function in which a worker inputs work data and a work data collection request using an operator interface process; A second function in which the worker interface process sends a job data and a job data collection request to a worker interface server; A third function in which the worker interface server receives a job data and a job data collection request from a worker interface process, obtains parameter data of a corresponding lot from a job data related table of a master database, and generates a job data file; A fourth function of transmitting, by the worker interface server, work data to a cell management server; A fifth function of receiving, by the cell management server, job data from an operator interface server and transmitting the job data to a data collection server; A sixth function of storing, by the cell management server, the work data in a history information server queue file and transmitting a message to the history information server indicating that the cell management server has stored the work data in the history information server queue file; And a program for realizing a seventh function of acquiring the work data from the work data file and the history information server queue file by the history information server receiving the message from the cell management server and recording the work data in a history database. Provide a recording medium.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Fig. 2 is a block diagram showing an embodiment configuration of a job data collection system to which the present invention is applied. Referring to Fig. 2, a job data collection system according to the present embodiment is provided by a worker. A worker interface process 200 that provides an inputable environment, a worker interface server 202 that checks and transmits job data input by the worker interface process 200, lot information, cassette information, equipment information, and the like. The master database 204 in which process information is stored, the job data file 206 generated by the operator interface server 202 to store job data, and the job data of the corresponding lot in the master database 204 are stored. The cell management server 208 to check and the job data from the cell management server 208 to receive the mas A data collection server 210 for storing in the database 204, a history information server queue file 212 in which the cell management server 208 temporarily stores work data, and a history and status of lots and work in progress. And a lot history information server 214 for receiving messages from the cell management server 208 and a history database 216 for storing the history and status of lots and ongoing work.

3 is a block diagram showing a configuration of another embodiment of a job data collection system to which the present invention is applied. Referring to FIG. 3, a job data collection system according to the present embodiment is a device communication server for job data and jobs. A device 300 for transmitting a data collection request, a device communication server 302 in charge of communication between the device and a device server, receiving and converting a job data and a job data collection request from the device 300 and transmitting the converted data; The equipment server 304 receives the job data and the job data collection request from the equipment communication server 302 and controls the equipment, and the equipment interface server 306 receives, confirms and transmits the job data from the equipment server 304. Lot information, cassette information, equipment information, and the like so that the equipment interface server 306 can check the received working data and update the data. The master database 204 in which process information is stored, the job data file 206 generated by the equipment interface server 306 to store job data, and the job data of the corresponding lot in the master database 204 are stored. The cell management server 208 for checking, the data collection server 210 for receiving the job data from the cell management server 208 and storing it in the master database 204, and the cell management server 208 for the job data. A history information server queue file 212 for temporarily storing the information, a lot history information server 214 for managing the history and status of the lot and the work in progress, and receiving a message from the cell management server 208; It consists of a history database 216 that stores history and status for the job.

The operation data collection method generated in the semiconductor manufacturing process configured and operated as described above will be described with reference to FIGS. 4 to 10.

4 is a flowchart illustrating an embodiment of a method for collecting job data generated in a semiconductor manufacturing process according to the present invention.

Referring to FIG. 4, when a worker inputs a job data and job data collection request using the worker interface process 200 (S400), the worker interface process 200 sends a job data and job data collection request to the worker interface server. Send to 202.

The worker interface server 202 receives a job data and job data collection request from the worker interface process 200 (S402), and obtains parameter data of the corresponding lot from the job data related table of the master database 204 (S404). In step S406, the job data file 206 is generated.

The worker interface server 202 transmits the work data to the cell management server 208 (S408), and the cell management server 208 receives the work data from the worker interface server 202 and collects the data. Transmit to (S410).

The cell management server 208 stores the work data in the history information server queue file 212 (S412), and displays a message indicating that the work data is stored in the history information server queue file 212. Transmit (S414).

The history information server 214 receiving the message from the cell management server 208 obtains the job data from the job data file 206 and the history information server queue file 212 and records the job data in the history database 216. (S416).

5 is a flow chart of another embodiment for performing a job data collection method generated in a semiconductor manufacturing process according to the present invention.

Referring to FIG. 5, when the device 300 transmits a job data and a job data collection request generated from the device to the device communication server 302 (S500), the device communication server 302 is received from the device 300. The job data and the job data collection request are converted into a form that can be read by the equipment server 304 and transmitted (S502).

When the equipment server 304 transmits the job data and the job data collection request received from the device communication server 302 to the device interface server 306 (S504), the device interface server 306 receives the job data and the job. A data collection request is received from the equipment server 304 (S506).

The device interface server 306 obtains parameter data of the corresponding lot from the job data related table of the master database 204 (S508), and generates a job data file 206 (S510).

The equipment interface server 306 transmits job data to the cell management server 208 (S512), and the cell management server 208 receives the job data from the operator interface server 202 to collect the data. In step S514.

The cell management server 208 stores the work data in the history information server queue file 212 (S516) and sends a message indicating that the work data is stored in the history information server queue file 212. (S518).

The history information server 214 receiving the message from the cell management server 208 obtains the job data from the job data file 206 and the history information server queue file 212 and records the job data in the history database 216. (S520).

6 is a detailed flowchart of a process (S404) of obtaining the parameter data of the corresponding lot from the job data related table of the master database 204 in FIG. 4. Referring to FIG. The parameter data of the corresponding lot is obtained from the parameter set, the individual parameter information, and the latest parameter information table of the master database 204 (S600), and the obtained parameter data is transmitted to the operator interface process 200. At this time, the operator interface process 200 outputs the received parameter data on the screen so that the worker can check the current job data of the corresponding lot.

FIG. 7 is a detailed flowchart of a process in which the cell management server 208 receives work data from the operator interface server 202 and transmits it to the data collection server 210. Referring to FIG. The cell management server 208 receives the job data of the corresponding lot from the operator interface server 202 (S700), and transmits it to the data collection server 210 (S702). In this case, the data collection server 210 stores the received job data in the master database 204.

8, the history information server 214 receives the message from the cell management server 208 and obtains the job data from the job data file 206 and the history information server queue file 212. 8 is a detailed flowchart of the process of recording to the database 216. Referring to FIG. 8, the history information server 214 transfers job data from the cell management server 208 to the history information server queue file 212. FIG. Receives a message that has been recorded (S800), obtains the job data of the corresponding lot from the job data file 206 and the history information server queue file (212) (S802), and of the lot from the history database 216 The lot history table is selected (S804).

The history information server 214 obtains a job data collection request time from the obtained job data (S806), and updates the job data collection request time of the corresponding lot from the lot history table of the history database 216 (S808). ).

Finally, the history information server 214 inserts a job data collection request command of the corresponding lot from the lot command history table of the history database 216 (S810).

9 is a detailed flowchart of a process (S508) of obtaining the parameter data of the corresponding lot from the operation data related table of the master database 204 in the FIG. 5. Referring to FIG. The parameter data of the corresponding lot is obtained from the parameter set of the master database 204, the individual parameter information, and the latest parameter information table (S900), and the obtained parameter data is transmitted to the equipment server 304.

FIG. 10 is a detailed flowchart of a process S514 in which the cell management server 208 receives work data from the equipment interface server 306 and transmits it to the data collection server 210. Referring to FIG. The cell management server 208 receives the job data of the corresponding lot from the equipment interface server 306 (S1000) and transmits the data to the data collection server 210 (S1002). In this case, the data collection server 210 stores the received job data in the master database 204.

In FIG. 5, the history information server 214 receives a message from the cell management server 208 and obtains job data from the job data file 206 and the history information server queue file 212 to the history database 216. The detailed flow of the recording process (S520) is the same as the above-described process flow of FIG. 8 and will be omitted.

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

The present invention as described above, by distributing and managing the work data managed by one server using an integrated automation system for semiconductor line management operated by a plurality of servers can provide safe work data even in the event of communication failure between servers. Therefore, it is effective to obtain the information necessary for effective production management, and it is possible to effectively reduce the manpower and time required for the maintenance and management of the work data loss that may occur due to the server computer error.

1 is a block diagram showing a schematic configuration of a system for collecting operation data generated in a conventional semiconductor manufacturing process.

Figure 2 is a block diagram showing an embodiment configuration of a job data collection system to which the present invention is applied.

Figure 3 is a block diagram showing another embodiment configuration of a job data collection system to which the present invention is applied

4 is a flow chart of an embodiment for performing a method for collecting job data occurring in a semiconductor manufacturing process according to the present invention.

Figure 5 is another embodiment processing flow diagram for performing a job data collection method occurring in the semiconductor manufacturing process according to the present invention.

FIG. 6 is a flowchart illustrating an example embodiment of a worker interface server for performing the job data collection method of FIG. 4; FIG.

7 is a flowchart illustrating a detailed embodiment of a cell management server for performing the job data collection method of FIG. 4;

FIG. 8 is a flowchart illustrating a detailed embodiment of a history information server for performing the job data collection method of FIG. 4; FIG.

9 is a flowchart illustrating a detailed embodiment of an equipment interface server for performing the job data collection method of FIG.

FIG. 10 is a flowchart of an embodiment of a cell management server for performing the job data collection method of FIG. 5; FIG.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: Master Database 206: Job Data File

208: cell management server 210: data collection server

212: history information server queue file 214: history information server

216: history database 300: equipment

302: equipment communication server 304: equipment server

306: Equipment Interface Server

Claims (17)

In the semiconductor automation system for managing the production information of the semiconductor manufacturing process, Worker interface means for providing an environment in which a worker can input work data collection requests and work data; Server means for checking and transmitting the job data received from the worker interface means; And Storage means for storing the work data generated in the semiconductor manufacturing process, the server means to check and update the data Operation data collection system occurs in the semiconductor manufacturing process comprising a. The method of claim 1, The server means, A worker interface server for checking and transmitting work data input in the worker interface process; A cell management server that receives and transmits job data from the worker interface server; A data collection server for receiving and storing work data from the cell management server; And And a lot history information server for managing the history and status of the lot and the ongoing work, and receiving a message from the cell management server. The method of claim 1, The storage means, A master database in which the worker interface server can confirm the job data received from the worker interface process, the lot database, cassette information, equipment information, and process information; A job data file generated by the worker interface server to store job data; A history information server queue file in which the cell management server temporarily stores work data; And And a history database in which the history information server checks and stores the history and status of the lot and the ongoing work. In the semiconductor automation system for managing the production information of the semiconductor manufacturing process, Equipment for transmitting the work data generated during the process of the lot and transmitting a work data collection request; Server means for checking and transmitting the work data and the work data collection request received from the equipment; And Storage means for storing the work data generated in the semiconductor manufacturing process, the server means to check and update the data Operation data collection system occurs in the semiconductor manufacturing process comprising a. The method of claim 4, wherein The server means, An equipment communication server in charge of communication with the equipment and receiving and converting a task data and a task data collection request from the equipment and transmitting the converted data; An equipment server that receives the task data and the task data collection request from the equipment communication server and controls the equipment; An equipment interface server for receiving, confirming and transmitting job data from the equipment server; A cell management server for receiving and transmitting job data from the equipment interface server; A data collection server for receiving and storing work data from the cell management server; And And a lot history information server for managing the history and status of the lot and the ongoing work, and receiving a message from the cell management server. The method of claim 4, wherein The storage means, A master database in which the equipment interface server can check the job data received from the equipment server, and stores lot information, cassette information, equipment information, and process information; A job data file generated by the device interface server to store job data; A history information server queue file in which the cell management server temporarily stores work data; And And a history database in which the history information server checks and stores the history and status of the lot and the ongoing work. In the work data collection method in the semiconductor automation system for managing the production information of the semiconductor manufacturing process, A first step in which a worker inputs a job data and a job data collection request using a worker interface process; A second step in which the worker interface process sends a job data and a job data collection request to a worker interface server; A third step in which the worker interface server receives a job data and a job data collection request from a worker interface process, obtains parameter data of a corresponding lot from a job data related table of a master database, and generates a job data file; A fourth step of transmitting, by the worker interface server, work data to a cell management server; A fifth step of the cell management server receiving job data from an operator interface server and transmitting the job data to a data collection server; A sixth step of the cell management server storing the work data in the history information server queue file and transmitting a message to the history information server indicating that the work data is stored in the history information server queue file; And A seventh step in which the history information server receiving the message from the cell management server acquires the work data from the work data file and the history information server queue file and records the work data in a history database; Work data collection method occurs in the semiconductor manufacturing process comprising a. The method of claim 7, wherein The third step, An eighth step of the worker interface server receiving a job data and a job data collection request from a worker interface process; A ninth step of the operator interface server obtaining parameter data of the corresponding lot from the parameter set of the master database, the individual parameter information, and the latest parameter information table; A tenth step of transmitting, by the worker interface server, the obtained parameter data to the worker interface process; And And an eleventh step in which the operator interface process outputs the received parameter data to a screen so that an operator can check the operation data of the corresponding lot. The method of claim 7, wherein The fifth step, A twelfth step of the cell management server receiving job data from a worker interface server; A thirteenth step, wherein the cell management server transmits the received work data to a data collection server; And And a fourteenth step of storing, by the data collection server, the work data received from the cell management server, in the master database. The method of claim 7, wherein The seventh step, A fifteenth step of receiving, by the history information server, a message indicating that job data is stored in a history information server queue file from a cell management server; A sixteenth step of obtaining, by the history information server, job data from the job data file and the history information server queue file; And And a seventeenth step of recording the operation data acquired by the history information server in the history database. In the work data collection method in the semiconductor automation system for managing the production information of the semiconductor manufacturing process, A first step in which the equipment transmits the work data and the work data collection request generated during the process of the lot to the equipment communication server; A second step of the equipment communication server converting and transmitting the work data and the work data collection request received from the equipment into a form that the equipment server can read; A third step of receiving, by the equipment server, the job data and the job data collection request from the device communication server, and transmitting the job data and the job data collection request to the device interface server; A fourth step of the device interface server obtaining the parameter data of the corresponding lot from the work data related table of the master database, generating a work data file, and transmitting the work data to a cell management server; A fifth step of the cell management server receiving job data from an equipment interface server and transmitting the job data to a data collection server; A sixth step of the cell management server storing the work data in the history information server queue file and transmitting a message to the history information server indicating that the work data is stored in the history information server queue file; And A seventh step in which the history information server receiving the message from the cell management server acquires the work data from the work data file and the history information server queue file and records the work data in a history database; Work data collection method occurs in the semiconductor manufacturing process comprising a. The method of claim 11, The second step, An eighth step of the device communication server receiving a job data and a job data collection request from a device; A ninth step of the equipment communication server converting the received work data and the work data collection request into a form that the equipment server can read; And And a tenth step of transmitting, by the equipment communication server, the converted task data and the task data collection request to the equipment server. The method of claim 11, The fourth step, An eleventh step of the equipment interface server receiving a job data and a job data collection request from an equipment server; A twelfth step, wherein the device interface server obtains parameter data of the corresponding lot from the parameter set of the master database, the individual parameter information and the latest parameter information table; And And a thirteenth step of transmitting, by the equipment interface server, the acquired parameter data to the equipment server. The method of claim 11, The fifth step, A fourteenth step in which the cell management server receives work data from an equipment interface server; A fifteenth step of transmitting, by the cell management server, the received work data to a data collection server; And And a sixteenth step of storing the work data in the master database by the data collection server receiving the work data from the cell management server. The method of claim 11, The seventh step, A seventeenth step of receiving, by the history information server, a message indicating that job data is stored in a history information server queue file from a cell management server; An eighteenth step of the history information server obtaining job data from the job data file and a history information server queue file; And And a nineteenth step of recording the operation data acquired by the history information server in the history database. In a semiconductor automation system having a processor for managing production information of a semiconductor manufacturing process, A first function in which a worker inputs a job data and a job data collection request using a worker interface process; A second function in which the worker interface process sends a job data and a job data collection request to a worker interface server; A third function in which the worker interface server receives a job data and a job data collection request from a worker interface process, obtains parameter data of a corresponding lot from a job data related table of a master database, and generates a job data file; A fourth function of transmitting, by the worker interface server, work data to a cell management server; A fifth function of receiving, by the cell management server, job data from an operator interface server and transmitting the job data to a data collection server; A sixth function of storing, by the cell management server, the work data in a history information server queue file and transmitting a message to the history information server indicating that the cell management server has stored the work data in the history information server queue file; And A seventh function in which the history information server receiving the message from the cell management server obtains the job data from the job data file and the history information server queue file and records the job data in a history database; A computer-readable recording medium having recorded thereon a program for realizing this. In a semiconductor automation system having a processor for managing production information of a semiconductor manufacturing process, A first function in which the equipment transmits the work data and the work data collection request generated during the process of the lot to the equipment communication server; A second function of converting, by the device communication server, the job data and the job data collection request received from the device into a form that the device server can read; A third function of receiving, by the equipment server, the job data and the job data collection request from the device communication server, and transmitting the job data and the job data collection request to the device interface server; A fourth function of the equipment interface server obtaining the parameter data of the corresponding lot from the work data related table of the master database, generating a work data file, and transmitting the work data to a cell management server; A fifth function of receiving, by the cell management server, job data from an equipment interface server and transmitting the job data to a data collection server; A sixth function of storing, by the cell management server, the work data in a history information server queue file and transmitting a message to the history information server indicating that the cell management server has stored the work data in the history information server queue file; And A seventh function in which the history information server receiving the message from the cell management server obtains the job data from the job data file and the history information server queue file and records the job data in a history database; A computer-readable recording medium having recorded thereon a program for realizing this.