KR100533992B1 - Automatic releasing system for holding operation progress of lot in manufacturing semiconductor and method using the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for halting process progress in a semiconductor manufacturing process and a computer readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

The present invention provides a semiconductor manufacturing process that can automatically cancel the process stop by the exchange of messages between distributed servers and updating the process data of the lot using the integrated automation system for semiconductor line management. The present invention provides a system and method for releasing a lot process stop and a computer readable recording medium recording a program for realizing the same.

3. Summary of Solution to Invention

The present invention includes a first step of externally inputting a lot process progress cancellation request using an operator interface process; A second step in which the worker interface process sends a request to stop a lot process progress to a worker interface server; A third step of the operator interface server receiving the lot process progress stop release request from the master database, and transmitting data related to the lot process progress stop release to a cell management server; A fourth step of the cell management server receiving the data related to the cancellation of the lot process progress, transmitting information of the corresponding lot from the lot information, the cassette information, and the equipment group information table of the master database, and the update result to the operator interface server; The cell management server records the data related to the release of the lot process progression in the history information server queue file and transmits a message to the history information server indicating that the data related to the release of the lot process progression is recorded in the history information server queue file. The fifth step; And performing a sixth step of the history information server receiving the message from the cell management server to check and update data related to the lot process cancellation in the history database.

4. Important uses of the invention

The present invention is used in the process of halting the process progress of the lot is stopped in the semiconductor manufacturing process.

Description

System for canceling lot process progress in semiconductor manufacturing process and method thereof {AUTOMATIC RELEASING SYSTEM FOR HOLDING OPERATION PROGRESS OF LOT IN MANUFACTURING SEMICONDUCTOR AND METHOD USING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for releasing a lot process in a semiconductor manufacturing process, and a computer readable recording medium having recorded thereon a program for realizing the same, in particular, a process using an integrated automation system for semiconductor line management. Lot process progress releasing system and method, and a program for realizing the process progress can be automatically released by the exchange of messages between distributed servers and updating the process data of the lot. The present invention relates to a computer-readable recording medium.

In general, in the semiconductor manufacturing process, a process of reading a process result is performed after a specific process, and the results of the processes often deviate from a predetermined standard. At this time, the process should be stopped for treatment of the cause that deviates from the predetermined criteria.

Accordingly, the conventional lot process stop cancellation system includes a worker interface that provides an environment in which a lot stop release request can be input from the outside, and a database for storing and verifying and updating data of production information generated in a semiconductor production process. And a server for storing the lot stop release request received from the worker interface in a database.

The checked and verified data from the operator interface is transmitted to the server, and the server changes the state information of the corresponding lot based on the received data and stores it in the database.

However, the conventional lot process progress stop release system that performs a series of processes as described above, since all the data related to the lot stop release request in the operator interface, so as to confirm and store the data related to the lot stop release request This takes a lot of time, and there is a problem that the workload is added to the operator interface.

Accordingly, the present invention has been made in order to solve the above problems, the process by using the integrated automation system for semiconductor line management process the process is stopped by the exchange of messages between the distributed servers and updating the process data of the lot It is an object of the present invention to provide a system and method for halting progress of a lot process in a semiconductor manufacturing process capable of automatically releasing a stop, and a computer-readable recording medium having recorded thereon a program for realizing the same.

The lot process progress stop release system in a semiconductor manufacturing process to which the present invention is applied to achieve the above object comprises: an operator interface means for providing a lot process progress stop release request input environment of an operator; Server means for checking and transmitting a lot process progress stop releasing request received from said operator interface means; And storage means for storing the production information generated in the semiconductor manufacturing process, wherein the server means checks and updates the data.

In the semiconductor manufacturing process according to the present invention, the lot process progress stop cancellation method may include: a first step of inputting a lot process progress stop cancellation request from an outside using an operator interface process; A second step in which the worker interface process sends a request to stop a lot process progress to a worker interface server; A third step of the operator interface server receiving the lot process progress stop release request from the master database, and transmitting data related to the lot process progress stop release to a cell management server; A fourth step of the cell management server receiving the data related to the cancellation of the lot process progress, transmitting information of the corresponding lot from the lot information, the cassette information, and the equipment group information table of the master database, and the update result to the operator interface server; The cell management server records the data related to the release of the lot process progression in the history information server queue file and transmits a message to the history information server indicating that the data related to the release of the lot process progression is recorded in the history information server queue file. The fifth step; And performing a sixth step of the history information server receiving the message from the cell management server to check and update data related to the lot process cancellation in the history database.

In addition, the semiconductor automation system having a processor for managing the process progress of the semiconductor manufacturing process to which the present invention is applied, a first function for inputting a lot process progress cancellation request from the outside using an operator interface process; A second function for the worker interface process to send a lot process progress stop release request to a worker interface server; A third function of the operator interface server receiving the lot process progress stop release request from the master database to confirm a lot process progress stop release request from the master database, and to transmit data related to the lot process progress stop release to a cell management server; A fourth function of the cell management server receiving the data related to the cancellation of the lot process progress, transmitting information of the corresponding lot from the lot information, the cassette information, and the equipment group information table of the master database, to the operator interface server; The cell management server records the data related to the release of the lot process progression in the history information server queue file and transmits a message to the history information server indicating that the data related to the release of the lot process progression is recorded in the history information server queue file. Fifth function; And a computer-readable recording medium having recorded thereon a program for realizing a sixth function of the history information server receiving the message from the cell management server to check and update data related to the stopping of the lot process progress in the history database. .

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a schematic configuration of a lot process stop release system in a semiconductor manufacturing process to which the present invention is applied, and provides an environment where an operator can input a lot process stop release request. 200, a worker interface server 202 for checking and transmitting a lot process progress release request input from the worker interface process 200, and the worker receiving a lot process progress release request from the worker interface process 200. The master database 204 stores lot information, cassette information, and equipment information so that the interface server 202 can check the received data and update the data. Receive related data and receive the master database 204 A cell management server 206 for checking the process data of the corresponding lot, a history information server queue file 208 for temporarily storing data related to the release of the lot process, and a lot and ongoing work. Lot history information server 210 for managing the history and status for the cell management server receives a message, and a history database 212 for storing the history and status for the lot and ongoing work.

The lot process progress releasing method of the semiconductor manufacturing process constructed and operated as described above will be described with reference to FIGS.

FIG. 2 is a flowchart illustrating an embodiment of a process for releasing a process of stopping lot processing in a semiconductor manufacturing process according to the present invention.

When the worker inputs a lot process progress stop release request using the worker interface process 200 (S300), the worker interface process 200 transmits a lot process progress stop release request to the worker interface server 202 (S302). ).

The operator interface server 202 receiving the lot progress stop release request checks the lot progress stop release request in the master database 204 (S304), and displays data related to the lot progress stop release cell management server 206. (S306).

The cell management server 206 receiving the data related to the release of the lot process stop transmits the information of the corresponding lot and the update result of the lot in the lot information, the cassette information and the equipment group information table of the master database 204 to the operator interface server. (S308).

The cell management server 206 records the data related to the lot process progression cancellation in the history information server queue file 208 (S310), and the data related to the lot process progression cancellation in the history information server queue file 208. The message that has been recorded is transmitted to the history information server 210 (S312).

The history information server 210 receiving the message from the cell management server 206 checks and updates the data related to the cancellation of the lot process progress in the history database 212 (S314).

3 is a detailed flowchart of a process (S304) of checking the lot process progress stop release request from the master database 204 by the worker interface server 202 receiving the lot process stop release request in FIG. 2. Referring to 3, the operator interface server checks the worker name, lot ID and cassette ID of the corresponding lot in the master database (S400), and transmits the checked result to the worker interface process 200 (S402). At this time, the operator interface process 200 outputs the confirmed result on the screen so that the operator can confirm.

The operator interface server 202 changes the count of the corresponding lot in the equipment group information table of the master database 204 (S404).

In FIG. 4, the cell management server 206 receiving data related to the cancellation of the lot process progression in FIG. 2 updates the lot information in the lot information, the cassette information, and the equipment group information table of the master database 204. 4, the cell management server 206 receives data related to the cancellation of the lot process progression stop from the operator interface server 202 and transmits the update result to the worker interface server. After checking the equipment group information in which the corresponding lot is located in the equipment group information table of the master database 204 (S502), the information of the corresponding lot is read from the lot information table and the process information table of the master database 204 (S502). (S504).

The cell management server 206 checks the state of the lot, the process information and the equipment group ID in the master database 204 (S506), and after confirming the ID of the corresponding lot in the cassette information table of the master database 204 ( In step S508, the master database 204 checks the position of the cassette containing the lot in order to release the process stop of the lot (S510).

After performing the S510, the cell management server 206 removes the process progress stop code, process progress stop indication, process progress stop time of the corresponding lot from the lot information table of the master database 204, and releases the lot process progress stop. A worker is set (S512), and the lot information table of the master database 204 is updated (S514).

The cell management server 206 removes the progress indication and the worker information from the process information table of the master database 204 and updates the process information table (S516).

5 is a process in which the history information server 210 receiving the message from the cell management server 206 in FIG. 2 checks and updates data related to the cancellation of the lot process progress in the history database 212 (S314). Referring to FIG. 5, the history information server 210 receives a message from the cell management server 206 that the data relating to the release of the lot process stop is recorded in the history server server queue file 208. (S600) and after acquiring data related to the lot process stop cancellation from the history information server queue file 208 (S602), the lot state history table of the lot to release the lot progress stop from the history database 212 is selected. (S604).

From the history information server 210 data related to the lot process progress stop release obtained from the history information server queue file 208, data such as the process of the lot to stop the lot process progress stop, process progress stop and wafer quantity After checking, the lot status history table is updated (S606), and the lot problem history table of the lot to cancel the lot process progression stop is selected in the history database 212 (S608).

Thereafter, the history information server 210 updates the process progress state history table of the history database 212 (S610), and inserts a lot process progress stop cancel command into the lot command history table (S612).

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

The present invention as described above, by using the integrated automation system for semiconductor line management, the lot is stopped by automatically canceling the process progress by the exchange of messages between the distributed servers and the update of the process data of the corresponding lot, By reducing the time and manpower required to cancel the process, the production efficiency can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a schematic configuration of a lot process stop releasing system in a semiconductor manufacturing process to which the present invention is applied.

Figure 2 is an embodiment processing flow diagram for performing the lot process progress cancellation method applied to Figure 1 above.

FIG. 3 is a detailed flowchart illustrating an embodiment of a worker interface server for performing the lot process progress releasing method of FIG. 2; FIG.

Figure 4 is a detailed flowchart of an embodiment of a cell management server for performing the lot process progress release cancellation method of FIG.

FIG. 5 is a flowchart illustrating a detailed embodiment of a history information server for performing the lot process progress releasing method of FIG. 2; FIG.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: master database 206: cell management server

208: history information server queue file 210: history information server

212: history database

Claims (10)

Worker interface means for providing a lot process progress release cancel request input environment for a worker; Server means for checking and transmitting a lot process progress stop releasing request received from said operator interface means; And Storage means for storing the production information generated in the semiconductor manufacturing process, the server means to check and update the data Lot process progress stop release system in the semiconductor manufacturing process comprising a. The method of claim 1, The server means, A worker interface server for checking and transmitting a lot process progress release request input in the worker interface process; A cell management server which receives data related to the release of the lot process from the operator interface server and checks the process data of the corresponding lot in the storage unit; And And a lot history information server for managing the history and status of the lot and the ongoing work and receiving a message from the cell management server. The method of claim 1, The storage means, A master database in which lot information, cassette information and equipment information are stored so that the worker interface server receiving the lot process progress release request from the worker interface process can check the received data and update the data; A history information server queue file in which the cell management server temporarily stores data related to the release of the lot process; And A lot stop halting system in a semiconductor manufacturing process comprising a history database storing the history and status of lots and ongoing work. A first step of externally inputting a lot process progress cancellation request using an operator interface process;  A second step in which the worker interface process sends a request to stop a lot process progress to a worker interface server; A third step of the operator interface server receiving the lot process progress stop release request from the master database, and transmitting data related to the lot process progress stop release to a cell management server; A fourth step of the cell management server receiving the data related to the cancellation of the lot process progress, transmitting information of the corresponding lot from the lot information, the cassette information, and the equipment group information table of the master database, and the update result to the operator interface server; The cell management server records the data related to the release of the lot process progression in the history information server queue file and transmits a message to the history information server indicating that the data related to the release of the lot process progression is recorded in the history information server queue file. The fifth step; And A sixth step in which the history information server receiving the message from the cell management server checks and updates data related to the cancellation of the lot process progress in the history database; Lot process progress cancellation method in a semiconductor manufacturing process comprising a. The method of claim 4, wherein The third step, A seventh step of the operator interface server checking a worker name, a lot ID, and a cassette ID of the corresponding lot in the master database; An eighth step of sending, by the worker interface server, the checked result to a worker interface process; And And the ninth step of changing, by the operator interface server, the count of the corresponding lot in the equipment group information table of the master database. The method of claim 5, The eighth step, A tenth step in which the worker interface process receives a result confirmed in the seventh step from a worker interface server; And And an eleventh step of outputting the result received by the operator interface process to a screen for the operator to confirm. The method of claim 4, wherein The fourth step, A twelfth step, wherein the cell management server receives data related to the cancellation of the lot process progression from an operator interface server; A step 13 in which the cell management server checks the device group information in which the corresponding lot is located in the device group information table of the master database; A 14th step of the cell management server reading information on the corresponding lot from the lot information table and the process information table of the master database; A fifteenth step of the cell management server checking a lot state, process information, and an equipment group ID in a master database; A sixteenth step of the cell management server confirming an ID of a corresponding lot in a cassette information table of a master database; A 17th step of the cell management server confirming the position of the cassette containing the lot in order to release the process stop of the lot in the master database; After performing step 17, the cell management server removes the process progress stop code, process progress stop indication, process progress stop time of the corresponding lot from the lot information table of the master database, and sets a lot process progress stop release worker. 18 steps; A nineteenth step of the cell management server updating a lot information table of a master database; And And a twenty step of removing, by the cell management server, the process indication table and the worker information from the process information table of the master database, and updating the process information table. The method of claim 4, wherein The fifth step, A twenty-first step of the cell management server recording data related to the cancellation of the lot process progress in a history information server queue file; And And a twenty-second step of transmitting, by the cell management server, a message indicating that data relating to the release of the lot process stop is recorded in the history information server queue file, to the history information server. The method of claim 4, wherein The sixth step, A twenty-third step of receiving, by the history information server, a message indicating that data relating to the release of the lot process progress stop has been recorded in a history junk server queue file from a cell management server; A twenty-fourth step of acquiring, by the history information server, data related to the cancellation of the lot process progression from a history information server queue file; A twenty-fifth step of the history information server selecting a lot status history table of a lot to release lot stop from a history database; Lot status history table by checking the data, such as the process of the lot to cancel the lot process progress stop, whether the process progress is stopped and the number of wafers from the data related to the release of the lot process progress stop obtained from the history information server queue file A twenty sixth step of updating; Step 27, wherein the history information server selects and updates a lot problem history table of a lot to release lot processing from the history database; Step 28, after the step 27, the history information server updates a process progress status history table of a history database; And And the twenty-seventh step of inserting, by the history information server, a lot process progress stop cancel command into a lot command history table of a history database. In a semiconductor automation system having a processor for managing the process progress of the semiconductor manufacturing process, A first function of externally inputting a lot process progress stop releasing request using an operator interface process;  A second function for the worker interface process to send a lot process progress stop release request to a worker interface server; A third function of the operator interface server receiving the lot process progress stop release request from the master database to confirm a lot process progress stop release request from the master database, and to transmit data related to the lot process progress stop release to a cell management server; A fourth function of the cell management server receiving the data related to the cancellation of the lot process progress, transmitting information of the corresponding lot from the lot information, the cassette information, and the equipment group information table of the master database, to the operator interface server; The cell management server records the data related to the release of the lot process progression in the history information server queue file and transmits a message to the history information server indicating that the data related to the release of the lot process progression is recorded in the history information server queue file. Fifth function; And A sixth function in which a history information server receiving a message from the cell management server checks and updates data related to the cancellation of the lot process progress in the history database; A computer-readable recording medium having recorded thereon a program for realizing this.