KR100533987B1 - Method for reworking a splitted child lot in manufacturing semiconductor - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

The present invention relates to a segmented child lot rework method in a semiconductor manufacturing process and a computer readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

The present invention inputs a rework request of a divided child lot by using an integrated automation system for semiconductor line management, and transmits and receives divided child lot rework related data between each of a plurality of distributed servers, By reading and updating the rework request in the database, the computer-readable method of recording the divided child lot reworking method in the semiconductor manufacturing process where the child lot can be reworked without additional work by the operator and the program for realizing the same. To provide a record carrier.

3. Summary of Solution to Invention

The present invention includes a first step of requesting rework of a divided child lot using an operator interface process from the outside; A second step in which the worker interface process transmits a rework request of the divided child lot to a worker interface server, and the worker interface server receives a rework request of the divided child lot from the worker interface process; A third step of the worker interface server receiving the rework request of the divided child lot, checking the rework related data of the divided child lot in the master database, and transmitting the result to the cell management server; Transmitting, by the cell management server, data related to the rework of the divided child lot to a lot schedule server; A fifth step of transmitting, by the cell management server, a result of performing the fourth step to a worker interface server; A sixth step of the cell management server recording the rework related data of the child lot divided in the history information server queue file, and transmitting the result message to the history information server; And the history information server receiving a message from the cell management server indicating that the rework related data of the divided child lot is recorded in the history information server queue file, and obtaining the rework related data of the child lot divided from the history information server queue file. And performing a seventh step of checking and updating the history database.

4. Important uses of the invention

The present invention is used in a segmented child lot process rework method.

Description

METHODS FOR REWORKING A SPLITTED CHILD LOT IN MANUFACTURING SEMICONDUCTOR}

The present invention relates to a method of reworking a divided child lot in a semiconductor manufacturing process, and a computer-readable recording medium recording a program for realizing the same. Particularly, the present invention is distributed using an integrated automation system for semiconductor line management. A partitioned lot rework method for realizing a child lot without the operator's intervention by recording and updating data required to exchange messages between servers and splitting the lot, that is, the child lot, and realizing this The present invention relates to a computer-readable recording medium having recorded thereon a program.

In general, in the semiconductor manufacturing process, the lot is divided in order to investigate the current condition of the semiconductor manufacturing equipment and correct the recipe parameter before proceeding with the parent lot. Since the child lot can no longer proceed with the normal process, it is necessary to rework the divided child lot.

Accordingly, in the system for performing a conventional divided child lot rework, first, a worker directly samples a predetermined number of wafers from a parent lot to generate a child lot, and then corrects the recipe parameter of the child lot. Check the condition.

If an abnormality occurs as a result of the conditional state inspection, the process is performed after recalibrating the recipe parameter of the child lot.

However, in the conventional divided child lot rework method of performing a series of processes as described above, the history management of the child lot is performed by the operator's direct data input and recipe correction, and due to the inaccurate data input of the operator. There was a problem that the child lot disappeared from the computer.

In order to solve the above problems, the present invention inputs a rework request of a divided child lot using an integrated automation system for semiconductor line management, and reworks a child lot divided among a plurality of distributed servers. A method for reworking a divided child lot in a semiconductor manufacturing process that enables reworking of a child lot without additional work by an operator by sending and receiving related data and confirming and updating a rework request of the corresponding child lot in a database. The object of the present invention is to provide a computer-readable recording medium having recorded thereon a program.

In accordance with another aspect of the present invention, there is provided a method for reworking a divided lot in a semiconductor manufacturing process, the method comprising: a first step of requesting a rework of a divided child lot using an operator interface process from the outside; A second step in which the worker interface process transmits a rework request of the divided child lot to a worker interface server, and the worker interface server receives a rework request of the divided child lot from the worker interface process; A third step of the worker interface server receiving the rework request of the divided child lot, checking the rework related data of the divided child lot in the master database, and transmitting the result to the cell management server; Transmitting, by the cell management server, data related to the rework of the divided child lot to a lot schedule server; A fifth step of transmitting, by the cell management server, a result of performing the fourth step to a worker interface server; A sixth step of the cell management server recording the rework related data of the child lot divided in the history information server queue file, and transmitting the result message to the history information server; And the history information server receiving a message from the cell management server indicating that the rework related data of the divided child lot is recorded in the history information server queue file, and obtaining the rework related data of the child lot divided from the history information server queue file. And performing a seventh step of checking and updating the history database.

The present invention also provides a semiconductor process automation system having a processor, comprising: a first function of requesting rework of a divided child lot using an operator interface process from the outside; A second function in which the worker interface process transmits a rework request of the divided child lot to a worker interface server, and the worker interface server receives a rework request of the divided child lot from the worker interface process; A third function of the worker interface server receiving the rework request of the divided child lot, checking the rework related data of the divided child lot in the master database, and transmitting the result to the cell management server; A fourth function of transmitting, by the cell management server, the data related to the rework of the divided child lot to the lot schedule server; A fifth function of transmitting, by the cell management server, a result of performing the fourth function to a worker interface server; A sixth function in which the cell management server records the rework related data of the child lot divided in the history information server queue file, and transmits the result message to the history information server; And the history information server receiving a message from the cell management server indicating that the rework related data of the divided child lot is recorded in the history information server queue file, and obtaining the rework related data of the child lot divided from the history information server queue file. A computer readable recording medium having recorded thereon a program for realizing a seventh function of checking and updating in a history database is provided.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a schematic configuration of a divided lot rework system in a semiconductor manufacturing process to which the present invention is applied. Referring to FIG. A worker interface process 200 that provides an environment in which a divided child lot rework can be requested, a worker interface server 202 that receives, confirms, and transmits a divided child lot rework request from the worker interface process; A master database 204 storing lot, cassette, and equipment group information so that the operator interface server 202 can acquire and update divided child lot rework related data, and received from the operator interface server 202. Checking and updating partitioned child lot rework-related data in the master database 204 A lot schedule server 208 for receiving the child lot rework-related data divided from the management server 206 and the cell management server 206 and modifying the process progress schedule of the child lot in the master database 204; A history information server queue file 210 for temporarily storing divided child lot rework-related data by the cell management server 206 and a message from the cell management server 206 and receiving a message from the history information server queue file 210. History information server 212 for acquiring, checking and updating the divided child lot rework-related data; lot history information for enabling the history information server 212 to check and update the divided child lot rework-related data; It consists of a history database 214 that stores process progress history information and lot command history information.

Hereinafter, the divided child lot rework system configured as described above will be described with reference to FIGS. 2 to 4.

2 is a flow chart of one embodiment for performing segmented child lot rework in a semiconductor manufacturing process in accordance with the present invention.

Referring to FIG. 2, when a worker requests a rework of a divided child lot using a worker interface process 200 (S300), the worker interface process 200 requests a rework request of a divided child lot from a worker interface. The worker interface server 202 receives the rework related data of the divided child lot from the worker interface process 200 (S302).

Upon receiving the rework request of the divided child lot, the worker interface server 202 checks the rework related data of the divided child lot in the master database 204 (S304).

The worker interface server 202 transmits the rework related data of the divided child lot identified in the master database 204 to the cell management server 206 (S306), and the cell management server 206 receives the received divided data. The rework related data of the child lot is transmitted to the lot schedule server 208 (S308). At this time, the lot schedule server 208 modifies the schedule of the corresponding lot in the master database 204 based on the received rework related data of the divided child lot.

In addition, the cell management server 206 transmits the result of performing the step S308 to the operator interface server 202 (S310). In this case, the worker interface server 202 transmits the performance result to the worker interface process 200, and the worker interface process 200 outputs the performance result of step S308 to the screen for the operator to check.

The cell management server 206 records the rework related data of the divided child lot in the history information server queue file 210 (S312), and transmits the result message to the history information server 212 (S314).

The history information server 212 receives a message from the cell management server 206 that the rework related data of the child lot divided into the history information server queue file 210 is recorded. Rework related data of the divided child lot is obtained and confirmed and updated in the history database 214 (S316).

Attached FIG. 3 illustrates a process in which the worker interface server 202 receiving the rework request of the child lot divided in FIG. 2 checks the rework related data of the child lot divided in the master database 204 (S304). Referring to FIG. 3, the worker interface server 202 checks an ID of a worker, a parent lot, and a parent cassette ID of the child lot in the master database 204 (S400), and the child lot ID and the child lot. Check the ID of the child cassette containing the (S402).

In addition, the operator interface server 202 checks the type of the child lot, the lot state, the cassette state, the equipment group ID and the location of the child lot to be reworked (S404), and determines the wafer to be divided in the parent lot. After confirming the quantity and the number of wafers to be child lots (S406), the master database 204 checks the state of the product and the product (S408).

The operator interface server 202 checks the process and the unit process for the child lot to rework in the master database 204 (S410), and confirms the process and the unit process for the child lot to return after finishing the rework. (S412).

4, the history information server 212 receives a message indicating that the rework related data of the child lot divided in the history information server queue file 210 is recorded from the cell management server 206 in FIG. A detailed flow diagram of a process (S316) of acquiring the child lot rework related data divided from the server queue file 210 and confirming and updating in the history database 214. Referring to FIG. 4, the history information server 212 may be used. Receives a message from the cell management server 206 that the rework related data of the divided child lot is recorded in the history information server queue file 210, and receives the message of the child lot divided in the history information server queue file 210. Obtain rework related data.

The history information server 212 selects the lot status history table of the parent lot in the history database 214 (S500), and reconstructs data related to the rework of the divided child lot obtained from the history information server queue file 210. The lot state history table of the parent lot is updated by checking whether the parent lot is processed, whether the process is stopped, whether the wafer quantity and the process progress are automatically terminated (S502).

The history information server 212 inserts the divided child lot rework request into the lot history table of the parent lot of the history database 214 (S504), and the lot state history table and the lot history of the child lot divided from the parent lot. After the table is inserted into the history database 214 (S506), the process progress status history tables of the parent and child lots of the history database 214 are updated (S508).

The history information server 212 inserts the divided child lot rework command into the lot order history table of the parent lot and the child lot (S510).

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

As described above, the present invention inputs a divided child lot rework request using an integrated automation system for semiconductor line management, and transmits and receives divided child lot rework related data among a plurality of distributed servers, and transmits child lot. By checking and updating the rework request in the database, the child lot can be reworked without additional work by the worker, and ultimately by reducing the time and manpower required for restarting the divided child lot and managing the data. There is an effect that can increase the efficiency.

delete

1 is a block diagram schematically showing the configuration of a system for reworking a divided child lot in a semiconductor manufacturing process according to the present invention.

FIG. 2 is a flow chart of an embodiment for reworking a divided child lot in a semiconductor manufacturing process applied to FIG. 1.

FIG. 3 is a detailed flowchart of an embodiment of a worker interface server for reworking the divided child lot of FIG.

4 is a flowchart illustrating a detailed embodiment of a history information server for reworking the divided child lots of FIG.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: master database 206: cell management server

208: lot schedule server 210: history information server queue file

212: history information server 214: history database

Claims (6)

A first step of requesting rework of the divided child lot using an external worker interface process; A second step in which the worker interface process transmits a rework request of the divided child lot to a worker interface server, and the worker interface server receives a rework request of the divided child lot from the worker interface process; A third step of the worker interface server receiving the rework request of the divided child lot, checking the rework related data of the divided child lot in the master database, and transmitting the result to the cell management server; Transmitting, by the cell management server, data related to the rework of the divided child lot to a lot schedule server; A fifth step of transmitting, by the cell management server, a result of performing the fourth step to a worker interface server; A sixth step of the cell management server recording the rework related data of the child lot divided in the history information server queue file, and transmitting the result message to the history information server; And Receiving a message indicating that the rework-related data of the divided child lot is recorded in the history information server queue file from the cell management server, the history information server obtains the rework-related data of the child lot divided from the history information server queue file. Seventh step to check and update in the history database Partitioned child lot rework method in a semiconductor manufacturing process comprising a. The method of claim 1, The fourth step, And the eighth step of the lot schedule server modifying a schedule of the corresponding lot in the master database based on the received rework related data of the divided child lot. The method of claim 1, The fifth step, The worker interface server further comprises a ninth step of transmitting the performance result of the fourth step to the operator interface process, the operator interface process outputs the performance result on the screen for the operator to check How to rework partitioned child lots. The method of claim 1, The third step, A tenth step of the worker interface server checking a worker of a child lot, an ID of a parent lot, and a parent cassette ID in a master database, and checking an ID of the child cassette containing the child lot ID and the child lot; The operator interface server checks the type of the child lot, the lot state, the cassette state, the equipment group ID and the location of the child lot to be reworked, and the number of wafers to be divided from the parent lot and the number of wafers to be the child lot. An eleventh step of confirming the quantity; A twelfth step of the worker interface server checking a product and a state of the product in a master database; A step 13 in which the worker interface server confirms a process and a unit process for the child lot to rework in the master database 204 and identifies a process and a unit process for the child lot to finish and rework; And And a fourteenth step of transmitting, by the operator interface server, the results of the tenth to thirteenth steps to a cell management server. The method of claim 1, The seventh step, A fifteenth step of receiving a message indicating that the history information server has recorded rework-related data of a child lot divided in the history information server queue file from a cell management server; A sixteenth step of the history information server acquiring rework related data of a child lot divided from a history information server queue file; The history information server selects the lot status history table of the parent lot in the history database, and processes the parent lot in the rework related data of the divided child lots obtained from the history information server queue file, whether the process is stopped, wafer quantity And a step 17 of checking the process progress automatic termination to update the lot status history table of the parent lot. An eighteenth step, wherein the history information server inserts a split child lot rework request into a lot history table of a parent lot of a history database; A nineteenth step, wherein the history information server inserts a lot status history table and a lot history table of a child lot divided from a parent lot into the history database; A twenty step of the history information server updating a process progress status history table of a parent lot and a child lot of a history database; And And a twenty-first step of inserting, by the history information server, a divided child lot rework instruction into a lot instruction history table of a parent lot and a child lot. In a semiconductor process automation system equipped with a processor, A first function of requesting a rework of a divided child lot using an external worker interface process; A second function in which the worker interface process transmits a rework request of the divided child lot to a worker interface server, and the worker interface server receives a rework request of the divided child lot from the worker interface process; A third function of the worker interface server receiving the rework request of the divided child lot, checking the rework related data of the divided child lot in the master database, and transmitting the result to the cell management server; A fourth function of transmitting, by the cell management server, the data related to the rework of the divided child lot to the lot schedule server; A fifth function of transmitting, by the cell management server, a result of performing the fourth function to a worker interface server; A sixth function in which the cell management server records the rework related data of the child lot divided in the history information server queue file, and transmits the result message to the history information server; And Receiving a message indicating that the rework-related data of the divided child lot is recorded in the history information server queue file from the cell management server, the history information server obtains the rework-related data of the child lot divided from the history information server queue file. Seventh function to check and update in the history database A computer-readable recording medium having recorded thereon a program for realizing this.