KR100614573B1 - System for maintaining consistency for created information of lot in manufacturing semiconductor process and method using for the same - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

The present invention relates to a system and method for maintaining consistency of lot computer information generated in a semiconductor manufacturing process, and a computer readable recording medium having recorded thereon a program for realizing the same.

2. The technical problem to be solved by the invention

The present invention, using the integrated automation system for semiconductor line management distributed to a plurality of servers to maintain the consistency of the production site information and computer information of the lot to input the request of matching the process data of the lot and the computer information of the lot To provide a system and method for maintaining the consistency of lot computer information generated in the semiconductor manufacturing process that can be automatically performed through the same, and a computer-readable recording medium recording a program for realizing the same.

3. Summary of Solution to Invention

The present invention includes a first step in which a worker recognizes that computerized information of a run sheet and a lot does not match; A second step of determining which information among the computerized information of the run sheet and the lot is an error; As a result of the determination of the second step, in the case of a computer information error of the lot, the process data of the actual lot is input to request the matching of the lot computer information, and the worker interface process inputs the process data of the lot to the worker interface server. Transmitting a third step; A fourth step of the operator interface server checking the process data of the corresponding lot in the master database based on the process data of the lot and correcting the process data of the corresponding lot; A fifth step of transmitting, by the operator interface server, process data of the corresponding lot to a cell management server; A sixth step of the cell management server confirming the process data of the corresponding lot in the master database and correcting the master database, and then transmitting the process data of the corresponding lot to the lot schedule server; A seventh step of the cell management server recording process data of the corresponding lot in a history information server queue file and transmitting a message to a history information server; An eighth step of receiving, by the history information server receiving the message from the cell management server, reading process data of the corresponding lot from the history information server queue file and updating process history data of the corresponding lot in the history database; And a result of the determination of the second step, when the error of the run sheet, the operator performs a ninth step of modifying the run sheet based on the process data of the actual lot that is being processed in the semiconductor manufacturing process.

4. Important uses of the invention

The present invention is used to maintain the consistency of semiconductor production information.

Process Data, Operator Interface Server, Cell Management Server, History Information Server

Description

SYSTEM FOR MAINTAINING CONSISTENCY FOR CREATED INFORMATION OF LOT IN MANUFACTURING SEMICONDUCTOR PROCESS AND METHOD USING FOR THE SAME}             

1 is a configuration diagram of an embodiment of a system for managing lot computerized information to which the present invention is applied.

2 is a flowchart illustrating an embodiment of a method for maintaining consistency of lot computer information generated in a semiconductor manufacturing process according to the present invention.

3 is a flowchart illustrating a detailed embodiment of a worker interface server for performing the method of maintaining consistency of the lot computation information of FIG. 2.

4 is a flowchart illustrating a detailed embodiment of a cell management server for performing the method of maintaining consistency of the lot computation information of FIG. 2.

FIG. 5 is a flowchart illustrating a detailed embodiment of a history information server for performing the method of maintaining consistency of the lot computation information of FIG. 2.

* Explanation of symbols for the main parts of the drawings

200: worker interface process 202: worker interface server

204: master database 206: cell management server

208: lot schedule server 210: history information server queue file

212: history information server 214: history database

The present invention relates to a method of managing computerized information of a lot generated in a semiconductor manufacturing process, and in particular, corrects information in which an error occurs when the computerized information of a lot cannot be maintained using an integrated automation system for semiconductor line management. The present invention relates to a system and method for maintaining the consistency of lot computer information, and to a computer readable recording medium storing a program for realizing the same.

In general, the automation system for managing the production line in the semiconductor manufacturing process is largely the basic information used by the MES (Manufacturing Execute System) department and the workers in the production line, for example, equipment, lot and stocker information. There is a master unit to manage.

As such, when the automation system managing the semiconductor production line is divided into two systems, the production information of the MES unit and the master unit must always match, but time-out errors may occur due to communication instability between the MES unit and the master unit of the automation system. The production information of the master part does not match with the information of the lot process progress information and equipment history of the MES part because the information on the production site is not updated. Therefore, the information that is actually going on the production line and various reporting information such as process progress information, Equipment utilization rates and production yield information may vary.

Accordingly, a method for matching lot production information of the MES unit and the master unit of the automation system managing the semiconductor production line was needed.

However, the conventional method of maintaining the consistency of the lot production information has various problems as follows.

First, if the data capacity of the MES unit is large and periodic updates and maintenance are not performed, there is a problem that the data amount exceeds the capacity of the data storage device or the structure of the database is broken. There is another problem that consumes a lot of time and manpower.

Second, a timeout error occurs due to an unstable communication between the MES unit and the master unit, so that the information on the production site is not immediately updated, so that the master unit information and the MES unit information do not match or are missing.

Third, since the information of the master part depends on the information of the MES part, when a problem occurs in the MES part, the information is not updated in the master part and thus is different from the information of the lot that is currently being processed. There is a problem that the operator cannot perform computerized processing until the data of the master unit and the data match.

Therefore, the present invention devised to solve the above problems, using the integrated automation system for semiconductor line management distributed and operated by a plurality of servers to maintain the consistency of the production site information and computer information of the lot of the relevant lot A system and method for maintaining consistency of lot computer information generated in a semiconductor manufacturing process that can be automatically executed by inputting request for matching process data and lot computer information, and a computer-readable recording medium recording a program for realizing the same. The purpose is to provide.

According to an aspect of the present invention for achieving the above object, the operator interface means for providing an input environment of the request information matching lot information of the worker; A worker interface server for checking and transmitting the lot computer information matching request data received from the worker interface means; A cell management server which receives lot computer information matching request data from the worker interface server, checks, stores and transmits the data in the storage unit; A lot schedule server receiving lot computer information matching request data from the cell management server and updating schedule information for the corresponding lot; A lot history information server that manages a history and status of a lot and a job in progress, and receives a message from the cell management server; A master database storing lot information, cassette information, equipment information, and process information so that the worker interface server can check the lot computer information matching request data received from the worker interface process and update the data based on the data; A history information server queue file in which the cell management server temporarily stores lot computer information matching request data; And a history database in which the history information server checks and stores the history and status of the lot and the ongoing work.

In addition, according to another aspect of the present invention, in response to an error in the computational information of the lot, a first step of transmitting a request for matching the process data of the actual lot in process and lot computational information to which the operator interface process is input to the operator interface server; ; A second step of the operator interface server confirming and correcting the process data of the corresponding lot stored in the master database based on the received process data of the lot; A third step of transmitting, by the operator interface server, process data of the corresponding lot to a cell management server; A fourth step of the cell management server confirming and correcting the process data of the corresponding lot in the master database, and then transmitting the process data of the corresponding lot to a lot schedule server; A fifth step of the cell management server recording process data of the corresponding lot in a history information server queue file and transmitting a message to a history information server; And a sixth step of receiving, by the history information server receiving the message from the cell management server, reading process data of the corresponding lot from the history information server queue file, and updating process history data of the corresponding lot in a history database. Provided is a method for maintaining consistency of lot computer information generated in a semiconductor manufacturing process including a.

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Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a configuration diagram of an embodiment of a system for managing computerized information of a lot to which the present invention is applied.
Referring to FIG. 1, a system for managing computerized information of a lot according to the present embodiment includes a worker interface process 200 that provides an input environment for lot computer information matching request data of a worker, and the worker interface process 200. The operator interface server 202 which checks and transmits the data input from the operator, and the worker interface server 202 which has received the lot computer information matching request data from the worker interface process 200 confirms the received data and sends the data. The master database 204 stores lot information, cassette information, equipment information, and process information so as to be updated, and lot computer information matching request data is received from the operator interface server 202, and the master database 204 receives the request data. A cell management server 206 for confirming the process data of the corresponding lot, and the cell management The lot schedule server 208 receives the lot computer information matching request data from the server 206 and updates the schedule information for the corresponding lot in the master database 204, and the cell management server 206 matches the lot computer information. A history information server queue file 210 for temporarily storing request data, a lot history information server 212 for managing a history and status of a lot and a job in progress, and receiving a message from the cell management server, a lot and a job in progress And a history database 214 that stores history and status for.

Hereinafter, the operation of the system for managing the computerized information of the lot configured as described above will be described with reference to FIGS.

2 is a flowchart illustrating an embodiment of a method for maintaining consistency of lot computer information generated in a semiconductor manufacturing process according to the present invention.

Referring to FIG. 2, the operator recognizes that the run sheet produced by the actual lot in the semiconductor manufacturing process does not match the computerized information of the lot through the information of the lot displayed on the terminal of each equipment. In operation S300, it is determined whether any of the computerized information of the run sheet and the lot is an error in operation S302.

As a result of determination, if the computer information error of the lot, the operator inputs the process data of the actual lot that is in the process of the semiconductor manufacturing process using the operator interface process 200 and requests the matching of the lot computer information (S304). . The operator interface process 200 transmits the process data of the actual lot input by the worker to the worker interface server 202.

The operator interface server 202 receiving the process data of the actual lot from the worker interface process 200 checks the process data and the master database 204 of the lot and based on the process data of the received lot, the master The process data of the corresponding lot stored in the database 204 is corrected (S306).

The operator interface server 202 confirming and correcting the process data of the corresponding lot in the master database 204 transmits the process data of the corresponding lot to the cell management server 206 (S308).

The cell management server 206 receiving the process data of the lot from the worker interface server 202 confirms the process data of the lot received from the master database 204 and corrects the master database 204. After (S310), the process data of the corresponding lot is transmitted to the lot schedule server 208 (S312). At this time, the lot schedule server 208 checks and updates the schedule of the corresponding lot in the master database 204 based on the process data of the corresponding lot (S314).

The cell management server 206 records the process data of the corresponding lot in the history information server queue file 210 (S316), and the process information of the corresponding lot in the history information server 212. In operation S318, a message indicating that the message has been recorded is transmitted to the history information server 212.

The history information server 212 receiving the message from the cell management server 206 reads the process data of the corresponding lot from the history information server queue file 210, and processes the corresponding lot in the history database 214. The history data is updated (S320).

On the other hand, if it is determined that the run sheet is an error as a result of the determination (S302), the operator corrects the run sheet based on the process data of the actual lot that is being processed in the semiconductor manufacturing process (S322).

In FIG. 3, in FIG. 2, the operator interface server 202 checks the process data of the lot and the master database 204 and processes the corresponding lot stored in the master database 204 based on the process data of the corresponding lot. Detailed flowchart of the process of correcting the data (S306).
Referring to FIG. 3, the worker interface server 202 may process process information, unit process information, and lot of the corresponding lot in the master database 204 based on the process data of the lot received from the worker interface process 200. Check whether or not the hold (S400), and converts the result of the check into the form of data that can be transmitted to the worker interface process 200 (S402).

The operator interface server 202 stores the basic information such as lot IDs of all the lots in the semiconductor manufacturing process of the master database 204, the cassette ID containing the corresponding lot, the location of the lot and the cassette, the state of the lot, and the like. Acquire the basic information of the corresponding lot from the lot information table (S404), and information of the cassette containing the corresponding lot from the cassette information table of the master database 204, for example, the equipment group ID where the cassette is located and the location of the cassette. Obtain the cassette state and the equipment ID (S406).

Subsequently, the operator interface server 202 obtains process progress information of the corresponding lot from the unit process progress information table of the master database 204 (S408).

The worker interface server 202 compares the process data of the lot received from the worker interface process 200 with the data of the corresponding lot of the lot information table, the cassette information table and the unit process progress information table of the master database 204. Thereafter, the comparison result is converted into data that can be transmitted to the worker interface process 200 and transmitted (S410).

The worker interface server 202 stores the process data of the lot received from the worker interface process 202 and the corresponding lot of the ongoing product information table, the ongoing process information table, and the unit process information table of the master database 204. Check whether it matches (S412).

As a result of the check, when the process data of the lot received from the operator interface process 200 and the information of the ongoing product information table, the ongoing process information table, and the unit process information table of the master database 204 do not match, the worker interface server 202 updates the equipment group information table, the individual equipment information table, the lot, and the cassette information table of the master database 204 based on the process data of the lot received from the operator interface process 202 (S414).

On the other hand, if it is confirmed that the process data of the lot received from the operator interface process 200 and the information of the ongoing product information table, the ongoing process information table and the unit process information table of the master database 204 match, it is returned.

4 is a cell management server 206 that has received the process data of the corresponding lot from the operator interface server 202 in FIG. 2 and confirms the process data of the received lot in the master database 204. Detailed flowchart of the process of correcting the database 204 (S310).
Referring to FIG. 4, the cell management server 206 that has received the process data of the corresponding lot from the operator interface server 202, in the master database 204, the equipment group of the process reserved for the lot to proceed and the corresponding lot. In fact, it is determined whether the equipment group of the currently located process does not match (S500).

If it is determined that the equipment group of the process in which the lot is scheduled to proceed and the equipment group of the process in which the lot is actually present do not match, the cell management server 206 reserves the reservation of the lot in the master database 204. After the process information is deleted (S502), the process information of the corresponding lot is inserted in the actual semiconductor manufacturing process (S504), and then the next process is performed.

On the other hand, if it is determined that the equipment group of the process in which the lot is scheduled to proceed and the equipment group of the process in which the lot is currently located, the next process is performed.

5 is a flowchart illustrating a detailed embodiment of a history information server for performing the method of maintaining consistency of the lot computation information of FIG. 2.

Referring to FIG. 5, the history information server 212 checks whether the process data of the corresponding lot obtained from the history information server queue file 210 matches the data of the lot state history table of the history database 214. (S600).

As a result of the check, when the process data of the corresponding lot and the corresponding lot process data of the history database 214 do not match, the history information server 212 is based on the received process data of the corresponding lot database 214. Update the lot status history table of (S602), insert the lot computational information matching job history into the history table of the corresponding lot of the history database 214 (S604), and process progress information of the corresponding lot; It is updated in step 214 (S606).

Next, the history information server 212 inserts a computer information matching command of a lot of the corresponding lot into the lot command history table of the history database 214 (S608), and returns.

On the other hand, when it is confirmed that the process data of the corresponding lot and the corresponding lot process data of the history database 214 are received, it is returned.

The present invention described above is capable of various substitutions, modifications, and changes without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains. It is not limited to the drawing.

In the present invention as described above, by maintaining the consistency of production and process data of the lot in a unit operation called the lot production information matching command in the integrated automation system for semiconductor line management can effectively reduce the time of maintaining the consistency of production information During the work time, the worker can perform another computer work, so that the work efficiency can be improved.

In addition, the present invention can reduce the manpower and time spent on the stability of the database and its maintenance by distributing and managing the process data mostly managed by the MES unit of the semiconductor automation system to a plurality of servers, communication of the semiconductor automation system Even if a timeout error occurs due to anxiety, the information on the production site is not missing, so that accurate production information can be managed.

Claims (11)

delete delete Worker interface means for providing an input environment for the lot computer information matching request data of the worker; A worker interface server for checking and transmitting the lot computer information matching request data received from the worker interface means; A cell management server which receives lot computer information matching request data from the worker interface server, checks, stores and transmits the data in the storage unit; A lot schedule server receiving lot computer information matching request data from the cell management server and updating schedule information for the corresponding lot; A lot history information server that manages a history and status of a lot and a job in progress, and receives a message from the cell management server; A master database storing lot information, cassette information, equipment information, and process information so that the worker interface server can check the lot computer information matching request data received from the worker interface process and update the data based on the data; A history information server queue file in which the cell management server temporarily stores lot computer information matching request data; And History database that the history information server checks and stores the history and status of the lot and ongoing work A system for maintaining consistency of lot computer information generated in a semiconductor manufacturing process having a. A first step of transmitting, to the operator interface server, a request for matching the process data of the actual lot in process and the lot computation information to which the operator interface process is input in response to an error of the computation information of the lot; A second step of the operator interface server confirming and correcting the process data of the corresponding lot stored in the master database based on the received process data of the lot; A third step of transmitting, by the operator interface server, process data of the corresponding lot to a cell management server; A fourth step of the cell management server confirming and correcting the process data of the corresponding lot in the master database, and then transmitting the process data of the corresponding lot to a lot schedule server; A fifth step of the cell management server recording process data of the corresponding lot in a history information server queue file and transmitting a message to a history information server; And A sixth step of receiving, by the history information server receiving the message from the cell management server, reading process data of the corresponding lot from the history information server queue file, and updating process history data of the corresponding lot in the history database; Method of maintaining the consistency of lot computer information generated in the semiconductor manufacturing process comprising a. The method of claim 4, wherein The second step, A seventh step of receiving, by the worker interface server, process data of the lot from a worker interface process; An eighth step of the worker interface server confirming process information, unit process information, and progress hold of the lot in the master database based on the received process data of the lot; A ninth step of converting the verification result of the eighth step into a form of data which can be transmitted to the worker interface process; A tenth step of the worker interface server obtaining information on the corresponding lot from the lot information table, the cassette information table, and the unit process progress information table of the master database; An eleventh step of converting the data obtained in the eighth to tenth forms into a form transferable to a worker interface process after checking with the master database; And A 12th step of the worker interface server confirming information of the corresponding lot in the ongoing product information table, the ongoing process information table, and the unit process progress information table of the master database; As a result of the check in the twelfth step, when the process data of the lot received from the operator interface process and the information of the ongoing product information table, the ongoing process information table and the unit process information table of the master database do not match, the master database Consistency of lot computer information generated in a semiconductor manufacturing process comprising a thirteenth step of updating a device group information table, an individual device information table, a lot and a cassette information table based on process data of a lot received from the operator interface process. How to maintain. The method of claim 5, The tenth step is In the lot information table in which the operator interface server stores the lot IDs of all lots undergoing the semiconductor manufacturing process of the master database, the cassette ID containing the corresponding lot, the location of the lot and the cassette, and the basic information of the state of the lot. A fourteenth step of acquiring the basic information of the lot; And the fifteenth step of obtaining, by the operator interface server, information of a cassette containing the corresponding lot in the cassette information table of the master database, including the equipment group ID where the cassette is located, the location of the cassette, the cassette status, and the equipment ID. How to maintain the consistency of lot computer information generated in the semiconductor manufacturing process. The method of claim 5, The eleventh step, A sixteenth step of the worker interface server confirming the process data of the lot received from the worker interface process and the data of the corresponding lot of the lot information table, the cassette information table and the unit process progress information table of the master database; And a seventeenth step of converting the result confirmed in the sixteenth step into data that can be transmitted to the worker interface process and transmitting the same. The method of claim 4, wherein The fourth step, An eighteenth step of the cell management server receiving process data of the corresponding lot from the operator interface server; A nineteenth step of the cell management server determining whether the equipment group of the process reserved for the lot to proceed in the master database does not match the equipment group of the process in which the corresponding lot is actually present; As a result of the determination of step 19, when the equipment group of the process in which the lot is reserved to proceed and the equipment group of the process in which the lot is actually present do not match, the cell management server reserves the corresponding lot in the master database. 20th step of deleting the processed process information; A twenty-first step of the cell management server inserting the process information of the lot into the master database using the process information of the corresponding lot received from the operator interface server; A twenty-second step of transmitting, by the cell management server, process information of the corresponding lot received from the operator interface server to the lot schedule server; And The semiconductor device includes a twenty-third step of performing the twenty-second step if the equipment group of the process reserved for the lot is in progress and the equipment group of the process in which the lot is actually present as a result of the determination of the nineteenth step. How to maintain consistency of lot computer information generated in the manufacturing process. The method of claim 4, wherein The fifth step, A twenty-fourth step of the cell management server recording the process data of the corresponding lot in the history information server queue file; And a twenty-five step of transmitting, by the cell management server, a message indicating that the process information of the corresponding lot has been recorded in the history information server queue file to the history information server. . The method of claim 4, wherein The sixth step, Checking, by the history information server, whether the process data of the corresponding lot obtained from the history information server queue file matches the data of the lot status history table of the history database; As a result of checking in step 26, if the received process data of the corresponding lot and the corresponding lot process data of the history database do not match, the history information server receives the history based on the received process data of the corresponding lot. Updating a lot status history table of the database; Step 28, the history information server inserting a lot computational information matching job history into a history table of a corresponding lot of the history database; Step 29, wherein the history information server updates process progress information of the corresponding lot in the history database; And And a thirty step of inserting, by the history information server, a computer-readable information matching command of the corresponding lot into the lot command history table of the history database. In a semiconductor process automation system equipped with a processor, A first function of transmitting, to the operator interface server, a request for matching the process data of the actual lot in process and the lot computation information to which the operator interface process is input in response to an error of the computation information of the lot; A second function of the operator interface server confirming and correcting the process data of the corresponding lot stored in the master database based on the received process data of the lot; A third function of transmitting, by the operator interface server, process data of the corresponding lot to a cell management server; A fourth function of the cell management server confirming and correcting the process data of the corresponding lot in the master database, and then transmitting the process data of the corresponding lot to the lot schedule server; A fifth function of the cell management server recording the process data of the corresponding lot in a history information server queue file and transmitting a message to a history information server; And A sixth function in which the history information server, having received the message from the cell management server, reads and acquires the process data of the corresponding lot from the history information server queue file and updates the process history data of the corresponding lot in the history database. A computer-readable recording medium having recorded thereon a program for realizing this.

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