JPS5324233A - Pattern examination system - Google Patents

Pattern examination system

Info

Publication number
JPS5324233A
JPS5324233A JP9900976A JP9900976A JPS5324233A JP S5324233 A JPS5324233 A JP S5324233A JP 9900976 A JP9900976 A JP 9900976A JP 9900976 A JP9900976 A JP 9900976A JP S5324233 A JPS5324233 A JP S5324233A
Authority
JP
Japan
Prior art keywords
pattern
examination system
pattern examination
line width
pattern line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9900976A
Other languages
Japanese (ja)
Other versions
JPS5646630B2 (en
Inventor
Masahito Nakajima
Katsumi Fujiwara
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9900976A priority Critical patent/JPS5324233A/en
Publication of JPS5324233A publication Critical patent/JPS5324233A/en
Publication of JPS5646630B2 publication Critical patent/JPS5646630B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To detect the real pattern line width and to secure a low-cost pattern examination by detecting the diffracted light at the pattern edge along with the detection of the pattern line width in the scanning direction of the test material to be examined.
COPYRIGHT: (C)1978,JPO&Japio
JP9900976A 1976-08-19 1976-08-19 Pattern examination system Granted JPS5324233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9900976A JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9900976A JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Publications (2)

Publication Number Publication Date
JPS5324233A true JPS5324233A (en) 1978-03-06
JPS5646630B2 JPS5646630B2 (en) 1981-11-04

Family

ID=14235068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9900976A Granted JPS5324233A (en) 1976-08-19 1976-08-19 Pattern examination system

Country Status (1)

Country Link
JP (1) JPS5324233A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001002A1 (en) * 1978-10-30 1980-05-15 Fujitsu Ltd Pattern inspection system
JPS55500331A (en) * 1978-03-13 1980-06-12
JPS5940106A (en) * 1982-08-30 1984-03-05 Fujitsu Ltd Trigger signal generator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110779A (en) * 1974-02-06 1975-09-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110779A (en) * 1974-02-06 1975-09-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55500331A (en) * 1978-03-13 1980-06-12
WO1980001002A1 (en) * 1978-10-30 1980-05-15 Fujitsu Ltd Pattern inspection system
JPS5940106A (en) * 1982-08-30 1984-03-05 Fujitsu Ltd Trigger signal generator

Also Published As

Publication number Publication date
JPS5646630B2 (en) 1981-11-04

Similar Documents

Publication Publication Date Title
JPS5223986A (en) Method of detecting surface flaws
JPS5324233A (en) Pattern examination system
JPS54935A (en) Pattern detector
JPS5342762A (en) Radiation measuring apparatus
JPS523461A (en) Measuring, detecting and alarming device of land subsidence under a bu ilding
JPS51139353A (en) Apparatus of measuring the positions and widths simultaneously
JPS5357087A (en) Flaw detecting system
JPS52125387A (en) Surface flaw detecting method of hot steel materials
JPS5229789A (en) Apparatus for derection, identification and indication of surface defe cts of travelling sheet-form objects
JPS5344075A (en) Ultrasonic inspecting method
JPS5374452A (en) Abnormality detector
JPS5322759A (en) Thickness de tector of plate form objects
JPS5293388A (en) Detection of flaw size in surface wave ultrasonic flaw probing
JPS53110369A (en) Position detecting method
JPS53108488A (en) Flaw detector for tubes
JPS5217081A (en) Cable abnormal point detecting apparatus
JPS524135A (en) Booklet detection equipment
JPS5292783A (en) Detecting end of flaw detector
JPS53147466A (en) Pattern defect detecting method of photo resist film
JPS52128189A (en) Eddy current flaw detector
JPS52106752A (en) Optical guide for photoelectric detection
JPS5576904A (en) Method for detecting position of mark
JPS51114187A (en) Device for detecting scratches
JPS51140681A (en) Leakage detection device
JPS52124814A (en) Detection unit of minute pattern