JPS5324233A - Pattern examination system - Google Patents
Pattern examination systemInfo
- Publication number
- JPS5324233A JPS5324233A JP9900976A JP9900976A JPS5324233A JP S5324233 A JPS5324233 A JP S5324233A JP 9900976 A JP9900976 A JP 9900976A JP 9900976 A JP9900976 A JP 9900976A JP S5324233 A JPS5324233 A JP S5324233A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- examination system
- pattern examination
- line width
- pattern line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To detect the real pattern line width and to secure a low-cost pattern examination by detecting the diffracted light at the pattern edge along with the detection of the pattern line width in the scanning direction of the test material to be examined.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9900976A JPS5324233A (en) | 1976-08-19 | 1976-08-19 | Pattern examination system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9900976A JPS5324233A (en) | 1976-08-19 | 1976-08-19 | Pattern examination system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5324233A true JPS5324233A (en) | 1978-03-06 |
JPS5646630B2 JPS5646630B2 (en) | 1981-11-04 |
Family
ID=14235068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9900976A Granted JPS5324233A (en) | 1976-08-19 | 1976-08-19 | Pattern examination system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5324233A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1980001002A1 (en) * | 1978-10-30 | 1980-05-15 | Fujitsu Ltd | Pattern inspection system |
JPS55500331A (en) * | 1978-03-13 | 1980-06-12 | ||
JPS5940106A (en) * | 1982-08-30 | 1984-03-05 | Fujitsu Ltd | Trigger signal generator |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50110779A (en) * | 1974-02-06 | 1975-09-01 |
-
1976
- 1976-08-19 JP JP9900976A patent/JPS5324233A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50110779A (en) * | 1974-02-06 | 1975-09-01 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55500331A (en) * | 1978-03-13 | 1980-06-12 | ||
WO1980001002A1 (en) * | 1978-10-30 | 1980-05-15 | Fujitsu Ltd | Pattern inspection system |
JPS5940106A (en) * | 1982-08-30 | 1984-03-05 | Fujitsu Ltd | Trigger signal generator |
Also Published As
Publication number | Publication date |
---|---|
JPS5646630B2 (en) | 1981-11-04 |
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