JPS53110369A - Position detecting method - Google Patents

Position detecting method

Info

Publication number
JPS53110369A
JPS53110369A JP2448177A JP2448177A JPS53110369A JP S53110369 A JPS53110369 A JP S53110369A JP 2448177 A JP2448177 A JP 2448177A JP 2448177 A JP2448177 A JP 2448177A JP S53110369 A JPS53110369 A JP S53110369A
Authority
JP
Japan
Prior art keywords
detecting method
position detecting
shift
rotary
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2448177A
Other languages
Japanese (ja)
Inventor
Shinichi Uno
Nobushi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2448177A priority Critical patent/JPS53110369A/en
Publication of JPS53110369A publication Critical patent/JPS53110369A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

PURPOSE: To realize a position detecting method suited for the minute material processing, by illuminating at least two areas by light among plural patterns of the material whose position shift is to be detected in order to measure the rotary shift and then deciding the position shift of other patterns based on the measurement of the rotary shift.
COPYRIGHT: (C)1978,JPO&Japio
JP2448177A 1977-03-08 1977-03-08 Position detecting method Pending JPS53110369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2448177A JPS53110369A (en) 1977-03-08 1977-03-08 Position detecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2448177A JPS53110369A (en) 1977-03-08 1977-03-08 Position detecting method

Publications (1)

Publication Number Publication Date
JPS53110369A true JPS53110369A (en) 1978-09-27

Family

ID=12139364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2448177A Pending JPS53110369A (en) 1977-03-08 1977-03-08 Position detecting method

Country Status (1)

Country Link
JP (1) JPS53110369A (en)

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