JPS5322759A - Thickness de tector of plate form objects - Google Patents
Thickness de tector of plate form objectsInfo
- Publication number
- JPS5322759A JPS5322759A JP9756776A JP9756776A JPS5322759A JP S5322759 A JPS5322759 A JP S5322759A JP 9756776 A JP9756776 A JP 9756776A JP 9756776 A JP9756776 A JP 9756776A JP S5322759 A JPS5322759 A JP S5322759A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- plate form
- tector
- form objects
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To detect the thickness of plate-form objects by detecting the spacing between a plate form object surface and a measurement reference member and the spacing between the other surface of the plate form object and the measurement reference member through the use of the coherence of laser light and operating the detection information of both of these.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9756776A JPS5322759A (en) | 1976-08-16 | 1976-08-16 | Thickness de tector of plate form objects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9756776A JPS5322759A (en) | 1976-08-16 | 1976-08-16 | Thickness de tector of plate form objects |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5322759A true JPS5322759A (en) | 1978-03-02 |
Family
ID=14195799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9756776A Pending JPS5322759A (en) | 1976-08-16 | 1976-08-16 | Thickness de tector of plate form objects |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5322759A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5617132U (en) * | 1979-07-19 | 1981-02-14 | ||
JPS6358703U (en) * | 1986-10-03 | 1988-04-19 | ||
JPH02284010A (en) * | 1989-04-25 | 1990-11-21 | Sumitomo Heavy Ind Ltd | Measuring device for film thickness of resin film |
-
1976
- 1976-08-16 JP JP9756776A patent/JPS5322759A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5617132U (en) * | 1979-07-19 | 1981-02-14 | ||
JPS6358703U (en) * | 1986-10-03 | 1988-04-19 | ||
JPH02284010A (en) * | 1989-04-25 | 1990-11-21 | Sumitomo Heavy Ind Ltd | Measuring device for film thickness of resin film |
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