JPS5322759A - Thickness de tector of plate form objects - Google Patents

Thickness de tector of plate form objects

Info

Publication number
JPS5322759A
JPS5322759A JP9756776A JP9756776A JPS5322759A JP S5322759 A JPS5322759 A JP S5322759A JP 9756776 A JP9756776 A JP 9756776A JP 9756776 A JP9756776 A JP 9756776A JP S5322759 A JPS5322759 A JP S5322759A
Authority
JP
Japan
Prior art keywords
thickness
plate form
tector
form objects
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9756776A
Other languages
Japanese (ja)
Inventor
Susumu Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP9756776A priority Critical patent/JPS5322759A/en
Publication of JPS5322759A publication Critical patent/JPS5322759A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To detect the thickness of plate-form objects by detecting the spacing between a plate form object surface and a measurement reference member and the spacing between the other surface of the plate form object and the measurement reference member through the use of the coherence of laser light and operating the detection information of both of these.
COPYRIGHT: (C)1978,JPO&Japio
JP9756776A 1976-08-16 1976-08-16 Thickness de tector of plate form objects Pending JPS5322759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9756776A JPS5322759A (en) 1976-08-16 1976-08-16 Thickness de tector of plate form objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9756776A JPS5322759A (en) 1976-08-16 1976-08-16 Thickness de tector of plate form objects

Publications (1)

Publication Number Publication Date
JPS5322759A true JPS5322759A (en) 1978-03-02

Family

ID=14195799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9756776A Pending JPS5322759A (en) 1976-08-16 1976-08-16 Thickness de tector of plate form objects

Country Status (1)

Country Link
JP (1) JPS5322759A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617132U (en) * 1979-07-19 1981-02-14
JPS6358703U (en) * 1986-10-03 1988-04-19
JPH02284010A (en) * 1989-04-25 1990-11-21 Sumitomo Heavy Ind Ltd Measuring device for film thickness of resin film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617132U (en) * 1979-07-19 1981-02-14
JPS6358703U (en) * 1986-10-03 1988-04-19
JPH02284010A (en) * 1989-04-25 1990-11-21 Sumitomo Heavy Ind Ltd Measuring device for film thickness of resin film

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