JPS52124814A - Detection unit of minute pattern - Google Patents

Detection unit of minute pattern

Info

Publication number
JPS52124814A
JPS52124814A JP4149176A JP4149176A JPS52124814A JP S52124814 A JPS52124814 A JP S52124814A JP 4149176 A JP4149176 A JP 4149176A JP 4149176 A JP4149176 A JP 4149176A JP S52124814 A JPS52124814 A JP S52124814A
Authority
JP
Japan
Prior art keywords
detection unit
minute pattern
minute
pattern
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4149176A
Other languages
Japanese (ja)
Other versions
JPS6050106B2 (en
Inventor
Takatsugu Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4149176A priority Critical patent/JPS6050106B2/en
Publication of JPS52124814A publication Critical patent/JPS52124814A/en
Publication of JPS6050106B2 publication Critical patent/JPS6050106B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To estimate the tested board accurately by detecting automatically the location and size of the minute pattern on the board form object.
COPYRIGHT: (C)1977,JPO&Japio
JP4149176A 1976-04-13 1976-04-13 Micro pattern detection device Expired JPS6050106B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4149176A JPS6050106B2 (en) 1976-04-13 1976-04-13 Micro pattern detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4149176A JPS6050106B2 (en) 1976-04-13 1976-04-13 Micro pattern detection device

Publications (2)

Publication Number Publication Date
JPS52124814A true JPS52124814A (en) 1977-10-20
JPS6050106B2 JPS6050106B2 (en) 1985-11-06

Family

ID=12609810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4149176A Expired JPS6050106B2 (en) 1976-04-13 1976-04-13 Micro pattern detection device

Country Status (1)

Country Link
JP (1) JPS6050106B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0216019A (en) * 1988-07-02 1990-01-19 Sato Shiyousan:Kk Monolithic molding method of vessel having barrier property and synthetic resin and monolithic molding vessel

Also Published As

Publication number Publication date
JPS6050106B2 (en) 1985-11-06

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