JPS5576904A - Method for detecting position of mark - Google Patents
Method for detecting position of markInfo
- Publication number
- JPS5576904A JPS5576904A JP15156978A JP15156978A JPS5576904A JP S5576904 A JPS5576904 A JP S5576904A JP 15156978 A JP15156978 A JP 15156978A JP 15156978 A JP15156978 A JP 15156978A JP S5576904 A JPS5576904 A JP S5576904A
- Authority
- JP
- Japan
- Prior art keywords
- mark
- outputs
- detectors
- groove mark
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To accurately detect a coordinate position, by projecting a square-shaped electron beam, utilizing the sharpness of the edges of a V-groove mark and symmetry and providing detectors in symmetric positions.
CONSTITUTION: An electron beam shaped to a squere with a side length of (a) is scanned across a V-groove mark. The length of scanning across the V-groove mark is proportional to a quantity of detected charge. Detectors are symmetrically arranged on both the sides of outputs the V-groove mark and so connected to each other that the outputs of the detectors are inverse to each other. The outputs are added to each other to detect the position of the mark.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15156978A JPS5576904A (en) | 1978-12-07 | 1978-12-07 | Method for detecting position of mark |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15156978A JPS5576904A (en) | 1978-12-07 | 1978-12-07 | Method for detecting position of mark |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5576904A true JPS5576904A (en) | 1980-06-10 |
Family
ID=15521387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15156978A Pending JPS5576904A (en) | 1978-12-07 | 1978-12-07 | Method for detecting position of mark |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5576904A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60128307A (en) * | 1983-12-15 | 1985-07-09 | Toshiba Corp | Shape and size measuring method using focusing electron beam |
-
1978
- 1978-12-07 JP JP15156978A patent/JPS5576904A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60128307A (en) * | 1983-12-15 | 1985-07-09 | Toshiba Corp | Shape and size measuring method using focusing electron beam |
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