JP6866460B2 - 光計測において照明を提供するためのシステム - Google Patents
光計測において照明を提供するためのシステム Download PDFInfo
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- JP6866460B2 JP6866460B2 JP2019218828A JP2019218828A JP6866460B2 JP 6866460 B2 JP6866460 B2 JP 6866460B2 JP 2019218828 A JP2019218828 A JP 2019218828A JP 2019218828 A JP2019218828 A JP 2019218828A JP 6866460 B2 JP6866460 B2 JP 6866460B2
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Images
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
- F21V13/12—Combinations of only three kinds of elements
- F21V13/14—Combinations of only three kinds of elements the elements being filters or photoluminescent elements, reflectors and refractors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
- F21V13/02—Combinations of only two kinds of elements
- F21V13/08—Combinations of only two kinds of elements the elements being filters or photoluminescent elements and reflectors
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29332—Wavelength selective couplers, i.e. based on evanescent coupling between light guides, e.g. fused fibre couplers with transverse coupling between fibres having different propagation constant wavelength dependency
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29362—Serial cascade of filters or filtering operations, e.g. for a large number of channels
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- G—PHYSICS
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- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
- G02B6/29388—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM for lighting or use with non-coherent light
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- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
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- G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
- G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
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- G—PHYSICS
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- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
Description
Claims (11)
- 測定ヘッドに照明を提供するためのシステムであって、
複数の光ファイバと、
デリバリー光ファイバと、
複数の波長の照明を前記複数の光ファイバに沿って提供するように構成された複数の照明光源であって、各光ファイバが異なる波長の照明を受信するように構成されている、複数の照明光源と、
選択された波長の照明を前記複数の光ファイバのうちの選択された光ファイバから受信するように構成され、前記選択された波長の照明を前記デリバリー光ファイバに沿って向けるようにさらに構成された組みレンズと、
前記複数の光ファイバを支えるように構成されたフェルールと、
前記フェルールと前記組みレンズと前記デリバリー光ファイバとのうちの少なくとも1つに機械的に連結され、前記選択された光ファイバを、前記組みレンズと前記デリバリー光ファイバとのうちの少なくとも1つに揃えるように構成されたアクチュエータと、
前記選択された波長の照明を前記デリバリー光ファイバから受信するように構成され、前記選択された波長の照明を照明経路に沿って測定ヘッドに向けるようにさらに構成された視準レンズと、
を備える、システム。 - 前記複数の照明光源の各照明光源が、選択された強度の照明を提供するように構成されている、請求項1に記載のシステム。
- 各照明光源の前記選択された強度がパルス幅変調によって制御される、請求項2に記載のシステム。
- 各照明光源の前記選択された強度が音響光学フィルタを活用して制御される、請求項2に記載のシステム。
- 前記照明経路が、照明を直交偏光部品へと分離させるように構成された1つまたは複数の光学要素を含む、請求項1に記載のシステム。
- 前記システムが、
前記照明経路からの照明の一部を受信するように構成された波長モニタ、
をさらに含む、請求項1に記載のシステム。 - 前記照明経路が、前記測定ヘッドに照明を提供するように構成された1つまたは複数のシングルモード光ファイバを含む、請求項1に記載のシステム。
- 前記照明経路が、前記測定ヘッドに照明を提供するように構成された1つまたは複数のマルチモード光ファイバを含む、請求項1に記載のシステム。
- 前記照明経路が、
照明を集めるように構成された組みレンズと、
集められた照明を前記組みレンズから受信するように構成された折り畳みミラーと、
前記折り畳みミラーに連結され、前記1つまたは複数のマルチモードファイバの少なくとも1つのコアに渡って集められた照明をスキャンするために、前記折り畳みミラーを作動させるように構成されたアクチュエータと、
をさらに含む、請求項8に記載のシステム。 - 前記照明経路が、
前記1つまたは複数のマルチモードファイバに提供された照明を集めるように構成された組みレンズと、
前記1つまたは複数のマルチモードファイバの先端に連結され、集められた照明が前記1つまたは複数のマルチモードファイバの少なくとも1つのコアに渡ってスキャンされるように、前記1つまたは複数のマルチモードファイバの前記先端を作動させるように構成されたアクチュエータと、
をさらに含む、請求項8に記載のシステム。 - 前記照明経路が、
前記1つまたは複数のマルチモードファイバを振動させるように構成されたアクチュエータ、
をさらに含む、請求項8に記載のシステム。
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JP2021065399A JP7201731B2 (ja) | 2013-02-22 | 2021-04-07 | 光計測において照明を提供するためのシステム |
JP2022205334A JP7482981B2 (ja) | 2013-02-22 | 2022-12-22 | 光計測において照明を提供するためのシステム |
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US13/774,025 US9512985B2 (en) | 2013-02-22 | 2013-02-22 | Systems for providing illumination in optical metrology |
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JP2018150662A Active JP6628841B2 (ja) | 2013-02-22 | 2018-08-09 | 光計測において照明を提供するためのシステム |
JP2019218828A Active JP6866460B2 (ja) | 2013-02-22 | 2019-12-03 | 光計測において照明を提供するためのシステム |
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US (2) | US9512985B2 (ja) |
EP (1) | EP2959503B1 (ja) |
JP (4) | JP6386479B2 (ja) |
KR (1) | KR102251262B1 (ja) |
CN (2) | CN110632703B (ja) |
IL (2) | IL240676B (ja) |
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Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9535273B2 (en) * | 2011-07-21 | 2017-01-03 | Photon Dynamics, Inc. | Apparatus for viewing through optical thin film color filters and their overlaps |
AU2014255530A1 (en) * | 2013-04-17 | 2015-11-05 | Bae Systems Plc | Alignment of radiation beams |
WO2015138480A2 (en) * | 2014-03-10 | 2015-09-17 | Robe Lighting, Inc. | Collimated lighting effect for an automated luminaire |
US9341761B2 (en) * | 2014-03-18 | 2016-05-17 | Kla-Tencor Corporation | Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes |
KR102269514B1 (ko) | 2014-11-25 | 2021-06-25 | 케이엘에이 코포레이션 | 랜드스케이프의 분석 및 활용 |
EP4220256A1 (en) | 2015-03-16 | 2023-08-02 | Pacific Biosciences of California, Inc. | Analytical system comprising integrated devices and systems for free-space optical coupling |
US10887974B2 (en) | 2015-06-22 | 2021-01-05 | Kla Corporation | High efficiency laser-sustained plasma light source |
US10257918B2 (en) * | 2015-09-28 | 2019-04-09 | Kla-Tencor Corporation | System and method for laser-sustained plasma illumination |
US10244613B2 (en) * | 2015-10-04 | 2019-03-26 | Kla-Tencor Corporation | System and method for electrodeless plasma ignition in laser-sustained plasma light source |
US10371626B2 (en) * | 2016-08-17 | 2019-08-06 | Kla-Tencor Corporation | System and method for generating multi-channel tunable illumination from a broadband source |
US11703388B2 (en) * | 2017-01-19 | 2023-07-18 | Agilent Technologies, Inc. | Optical spectrometer modules, systems and methods for optical analysis with multiple light beams |
EP3619561A4 (en) * | 2017-05-04 | 2021-01-20 | NKT Photonics A/S | LIGHT SOURCE ARRANGEMENT |
US11187838B2 (en) * | 2017-07-31 | 2021-11-30 | Kla Corporation | Spectral filter for high-power fiber illumination sources |
US11125414B2 (en) | 2017-11-15 | 2021-09-21 | Lite-On Electronics (Guangzhou) Limited | Light distribution module |
TWI770275B (zh) * | 2017-11-15 | 2022-07-11 | 光林智能科技股份有限公司 | 配光模組 |
US10444083B2 (en) * | 2017-11-21 | 2019-10-15 | Watlow Electric Manufacturing Company | Multi-fiber optic sensing system |
US11067389B2 (en) * | 2018-03-13 | 2021-07-20 | Kla Corporation | Overlay metrology system and method |
EP3611569A1 (en) * | 2018-08-16 | 2020-02-19 | ASML Netherlands B.V. | Metrology apparatus and photonic crystal fiber |
JP2021192070A (ja) * | 2018-09-04 | 2021-12-16 | ソニーグループ株式会社 | 光通信用コネクタ、制御方法および光通信装置 |
RU188637U1 (ru) * | 2018-12-06 | 2019-04-18 | Федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский государственный университет аэрокосмического приборостроения" | Селективный многоканальный оптический спектрометр |
CN109377907B (zh) * | 2018-12-25 | 2024-05-03 | 安徽蓝海之光科技有限公司 | 井下逃生系统 |
US11156846B2 (en) * | 2019-04-19 | 2021-10-26 | Kla Corporation | High-brightness illumination source for optical metrology |
EP3992614A4 (en) * | 2019-06-27 | 2023-06-28 | HORIBA, Ltd. | Analysis device |
CN110346313A (zh) * | 2019-07-31 | 2019-10-18 | 清华大学 | 一种光调制微纳结构、微集成光谱仪及光谱调制方法 |
US11933717B2 (en) * | 2019-09-27 | 2024-03-19 | Kla Corporation | Sensitive optical metrology in scanning and static modes |
US11762305B2 (en) | 2019-12-05 | 2023-09-19 | Asml Netherlands B.V. | Alignment method |
US11587781B2 (en) | 2021-05-24 | 2023-02-21 | Hamamatsu Photonics K.K. | Laser-driven light source with electrodeless ignition |
US11619097B2 (en) | 2021-05-24 | 2023-04-04 | Saudi Arabian Oil Company | System and method for laser downhole extended sensing |
US11725504B2 (en) | 2021-05-24 | 2023-08-15 | Saudi Arabian Oil Company | Contactless real-time 3D mapping of surface equipment |
JP7410625B2 (ja) * | 2021-09-28 | 2024-01-10 | キヤノン株式会社 | 照明装置、計測装置、基板処理装置、および物品の製造方法 |
WO2023233548A1 (ja) * | 2022-05-31 | 2023-12-07 | 日本電信電話株式会社 | 紫外光照射システム及び紫外光照射方法 |
Family Cites Families (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2579044B1 (fr) * | 1985-03-13 | 1988-02-26 | Commissariat Energie Atomique | Dispositif de multiplexage de plusieurs signaux lumineux en optique integree |
US5109447A (en) | 1991-03-04 | 1992-04-28 | The Boeing Company | High-powered, spectrally flat, very broadband optical source including optical coupler and method using same |
JPH06137948A (ja) * | 1992-10-28 | 1994-05-20 | Shimadzu Corp | 測光装置 |
JPH10170239A (ja) * | 1996-10-08 | 1998-06-26 | Matsushita Electric Ind Co Ltd | 3次元形状計測装置 |
US6278519B1 (en) | 1998-01-29 | 2001-08-21 | Therma-Wave, Inc. | Apparatus for analyzing multi-layer thin film stacks on semiconductors |
JPH11231222A (ja) * | 1998-01-27 | 1999-08-27 | Carl Zeiss Jena Gmbh | 走査ユニット付顕微鏡、そのための配置および操作方法 |
ATE441183T1 (de) * | 1999-01-22 | 2009-09-15 | Konica Minolta Opto Inc | Optische abtastvorrichtung, mit der optischen abtastvorrichtung versehenes aufnahme/wiedergabegerät, optisches element und verfahren zur datenaufnahme/wiedergabe |
US6147799A (en) * | 1999-10-08 | 2000-11-14 | Agilent Technologies Inc. | Physically compact variable optical delay element having wide adjustment range |
US6429943B1 (en) | 2000-03-29 | 2002-08-06 | Therma-Wave, Inc. | Critical dimension analysis with simultaneous multiple angle of incidence measurements |
US6766084B1 (en) | 2000-08-25 | 2004-07-20 | Stratos International, Inc. | Coarse wave division multiplexer |
EP1296471A3 (de) * | 2001-09-25 | 2005-06-01 | Siemens Aktiengesellschaft | Kompensationsanordnung zur adaptiven Entzerrung eines optischen Signals |
US20040109225A1 (en) | 2002-12-06 | 2004-06-10 | Np Photonics, Inc. | Multi-mode pumped ase source using phosphate and tellurite glasses |
US6965431B2 (en) * | 2003-02-28 | 2005-11-15 | Ut-Battelle, Llc | Integrated tunable optical sensor (ITOS) system |
JP2005070090A (ja) * | 2003-08-22 | 2005-03-17 | Toshiba Corp | 多波長光源装置 |
US7181119B2 (en) * | 2003-09-05 | 2007-02-20 | Sumitomo Electric Industries, Ltd. | Optically amplifying waveguide, optical amplifier module, and optical communication system |
JP4608219B2 (ja) * | 2004-01-19 | 2011-01-12 | オリンパス株式会社 | レーザ走査顕微鏡 |
JP4869562B2 (ja) * | 2004-03-26 | 2012-02-08 | オリンパス株式会社 | 走査型共焦点顕微鏡 |
US7790533B2 (en) | 2004-06-18 | 2010-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method, laser irradiation apparatus, and method for manufacturing semiconductor device |
US7375812B2 (en) * | 2005-02-22 | 2008-05-20 | Axsun Technologies, Inc. | Method and system for reducing parasitic spectral noise in tunable semiconductor source spectroscopy system |
TW200643472A (en) * | 2005-04-07 | 2006-12-16 | Accent Optical Tech Inc | Apparatus and methods for scatterometry of optical devices |
DE102005054184B4 (de) * | 2005-11-14 | 2020-10-29 | Carl Zeiss Microscopy Gmbh | Multispektrale Beleuchtungsvorrichtung und Messverfahren |
JP4727517B2 (ja) * | 2006-01-11 | 2011-07-20 | 富士フイルム株式会社 | 光源装置および光断層画像化装置 |
US7567351B2 (en) | 2006-02-02 | 2009-07-28 | Kla-Tencor Corporation | High resolution monitoring of CD variations |
US7435982B2 (en) | 2006-03-31 | 2008-10-14 | Energetiq Technology, Inc. | Laser-driven light source |
US7989786B2 (en) | 2006-03-31 | 2011-08-02 | Energetiq Technology, Inc. | Laser-driven light source |
JP2009094186A (ja) * | 2007-10-05 | 2009-04-30 | Seiko Epson Corp | 光源装置、照明装置、モニタ装置及び画像表示装置 |
JP4453737B2 (ja) * | 2007-10-10 | 2010-04-21 | 住友電気工業株式会社 | 広帯域光源装置及び分析装置 |
NL1036188A1 (nl) | 2007-12-05 | 2009-06-08 | Asml Netherlands Bv | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method. |
JP2009253129A (ja) | 2008-04-09 | 2009-10-29 | Fujifilm Corp | 光源および光断層画像化装置 |
NL1036734A1 (nl) | 2008-04-09 | 2009-10-12 | Asml Netherlands Bv | A method of assessing a model, an inspection apparatus and a lithographic apparatus. |
JP2009258207A (ja) * | 2008-04-14 | 2009-11-05 | Panasonic Corp | ディスプレイ装置 |
EP2191770B1 (en) * | 2008-05-02 | 2016-04-13 | Olympus Corporation | Optical inspection device, electromagnetic wave detection method, electromagnetic wave detection device, organism observation method, microscope, endoscope, and optical tomographic image generation device |
US7926951B2 (en) * | 2008-07-11 | 2011-04-19 | Eastman Kodak Company | Laser illuminated micro-mirror projector |
KR100962522B1 (ko) * | 2008-07-24 | 2010-06-14 | 한국표준과학연구원 | 3색 광원을 이용하는 멀티플렉스 cars 분광장치 |
EP2344861B1 (en) * | 2008-10-03 | 2017-11-22 | NanoDrop Technologies LLC | Dual sample mode spectrophotometer |
JP2010125270A (ja) * | 2008-12-01 | 2010-06-10 | Hoya Corp | 内視鏡装置 |
US8275226B2 (en) * | 2008-12-09 | 2012-09-25 | Spectral Applied Research Ltd. | Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope |
WO2010101629A1 (en) * | 2009-03-01 | 2010-09-10 | Tau Science Corporation | High speed quantum efficiency measurement apparatus utilizing solid state lightsource |
US8462823B2 (en) | 2009-08-06 | 2013-06-11 | Emcore Corporation | Small packaged tunable laser with beam splitter |
US8441639B2 (en) | 2009-09-03 | 2013-05-14 | Kla-Tencor Corp. | Metrology systems and methods |
JP2011153982A (ja) * | 2010-01-28 | 2011-08-11 | Sanyo Electric Co Ltd | ビーム照射装置および半導体レーザ装置 |
KR20110121306A (ko) * | 2010-04-30 | 2011-11-07 | 김현진 | 엘이디와 광섬유를 이용한 라이팅시스템 |
US8896832B2 (en) * | 2010-06-17 | 2014-11-25 | Kla-Tencor Corp. | Discrete polarization scatterometry |
US8384045B2 (en) * | 2010-07-01 | 2013-02-26 | Sony Corporation | Minute particle analyzing device and method |
JP5675219B2 (ja) * | 2010-08-27 | 2015-02-25 | キヤノン株式会社 | 光パルス発生装置、テラヘルツ分光装置およびトモグラフィ装置 |
CN101949849B (zh) * | 2010-09-08 | 2011-09-21 | 华中科技大学 | 基于光纤倏逝场照明器的光激活定位显微成像系统 |
KR101279236B1 (ko) * | 2011-06-01 | 2013-07-05 | 주식회사 쓰리레이저테크놀로지 | 다파장 가시광 레이저 조명 |
NL2008936A (en) * | 2011-07-28 | 2013-01-29 | Asml Netherlands Bv | Illumination source for use in inspection methods and/or lithography inspection and lithographic apparatus and inspection method. |
US9400246B2 (en) | 2011-10-11 | 2016-07-26 | Kla-Tencor Corporation | Optical metrology tool equipped with modulated illumination sources |
CN102538866B (zh) * | 2011-12-23 | 2013-05-15 | 北京交通大学 | 一种可调谐拍波线扫描的表面三维干涉测量系统 |
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