JP6386479B2 - 光計測において照明を提供するためのシステム - Google Patents
光計測において照明を提供するためのシステム Download PDFInfo
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- JP6386479B2 JP6386479B2 JP2015559000A JP2015559000A JP6386479B2 JP 6386479 B2 JP6386479 B2 JP 6386479B2 JP 2015559000 A JP2015559000 A JP 2015559000A JP 2015559000 A JP2015559000 A JP 2015559000A JP 6386479 B2 JP6386479 B2 JP 6386479B2
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- 230000003287 optical effect Effects 0.000 title claims description 35
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
- F21V13/12—Combinations of only three kinds of elements
- F21V13/14—Combinations of only three kinds of elements the elements being filters or photoluminescent elements, reflectors and refractors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
- F21V13/02—Combinations of only two kinds of elements
- F21V13/08—Combinations of only two kinds of elements the elements being filters or photoluminescent elements and reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29332—Wavelength selective couplers, i.e. based on evanescent coupling between light guides, e.g. fused fibre couplers with transverse coupling between fibres having different propagation constant wavelength dependency
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29362—Serial cascade of filters or filtering operations, e.g. for a large number of channels
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
- G02B6/29388—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM for lighting or use with non-coherent light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
- G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
Description
Claims (13)
- 測定ヘッドに照明を提供するためのシステムであって、
第1の照明光源と第2の照明光源と第3の照明光源と第4の照明光源と第5の照明光源と第6の照明光源とを含む、複数の照明光源と、
前記第1の照明光源からの照明を誘導経路に沿って反射させるように構成された第1の折り畳みミラーと、
前記第2の照明光源からの照明を前記誘導経路に沿って反射させるように構成された第2の折り畳みミラーと、
前記第1の照明光源からの照明を前記誘導経路に沿って伝達するように構成され、前記第3の照明光源からの照明を前記誘導経路に沿って反射させるようにさらに構成された、第1の二色性結合器と、
前記第2の照明光源からの照明を前記誘導経路に沿って伝達するように構成され、前記第4の照明光源からの照明を前記誘導経路に沿って反射させるようにさらに構成された、第2の二色性結合器と、
前記第1の照明光源からの照明と前記第3の照明光源からの照明とを前記誘導経路に沿って伝達するように構成され、前記第5の照明光源からの照明を前記誘導経路に沿って反射させるようにさらに構成された、第3の二色性結合器と、
前記第6の照明光源からの照明を前記誘導経路に沿って伝達するように構成され、前記第2の照明光源からの照明と前記第4の照明光源からの照明とを前記誘導経路に沿って反射させるようにさらに構成された、第4の二色性結合器と、
前記第2の照明光源からの照明と前記第4の照明光源からの照明と前記第6の照明光源からの照明とを、照明経路に沿って測定ヘッドに伝達するように構成され、前記第1の照明光源からの照明と前記第3の照明光源からの照明と前記第5の照明光源からの照明とを、前記照明経路に沿って前記測定ヘッドへ反射させるようにさらに構成された、第5の二色性結合器と、
を備えた、システム。 - 前記システムが、
各シャッターが前記複数の照明光源のうちの照明光源からの照明を受信するように構成された複数のシャッターであって、選択された波長の照明が前記照明経路に沿って提供されることを可能にするように構成された、複数のシャッター、
をさらに含む、請求項1に記載のシステム。 - 前記複数の照明光源の各照明光源が、選択された波長の照明を提供するように構成されている、請求項1に記載のシステム。
- 前記複数の照明光源の各照明光源が、選択された強度の照明を提供するように構成されている、請求項1に記載のシステム。
- 各照明光源の前記選択された強度がパルス幅変調によって制御される、請求項4に記載のシステム。
- 各照明光源の前記選択された強度が音響光学フィルタを活用して制御される、請求項4に記載のシステム。
- 前記照明経路が、照明を直交偏光部品へと分離させるように構成された1つまたは複数の光学要素を含む、請求項1に記載のシステム。
- 前記システムが、
前記照明経路からの照明の一部を受信するように構成された波長モニタ、
をさらに含む、請求項1に記載のシステム。 - 前記照明経路が、前記測定ヘッドに照明を提供するように構成された1つまたは複数のシングルモード光ファイバを含む、請求項1に記載のシステム。
- 前記照明経路が、前記測定ヘッドに照明を提供するように構成された1つまたは複数のマルチモード光ファイバを含む、請求項1に記載のシステム。
- 前記照明経路が、
照明を集めるように構成された組みレンズと、
集められた照明を前記組みレンズから受信するように構成された折り畳みミラーと、
前記折り畳みミラーに連結され、前記1つまたは複数のマルチモードファイバの少なくとも1つのコアに渡って集められた照明をスキャンするために、前記折り畳みミラーを作動させるように構成されたアクチュエータと、
をさらに含む、請求項10に記載のシステム。 - 前記照明経路が、
前記1つまたは複数のマルチモードファイバに提供された照明を集めるように構成された組みレンズと、
前記1つまたは複数のマルチモードファイバの先端に連結され、集められた照明が前記1つまたは複数のマルチモードファイバの少なくとも1つのコアに渡ってスキャンされるように、前記1つまたは複数のマルチモードファイバの前記先端を作動させるように構成されたアクチュエータと、
をさらに含む、請求項10に記載のシステム。 - 前記照明経路が、
前記1つまたは複数のマルチモードファイバを振動させるように構成されたアクチュエータ、
をさらに含む、請求項10に記載のシステム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/774,025 US9512985B2 (en) | 2013-02-22 | 2013-02-22 | Systems for providing illumination in optical metrology |
US13/774,025 | 2013-02-22 | ||
PCT/US2014/017723 WO2014130829A1 (en) | 2013-02-22 | 2014-02-21 | Systems for providing illumination in optical metrology |
Related Child Applications (1)
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JP2018150662A Division JP6628841B2 (ja) | 2013-02-22 | 2018-08-09 | 光計測において照明を提供するためのシステム |
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JP2016515196A JP2016515196A (ja) | 2016-05-26 |
JP2016515196A5 JP2016515196A5 (ja) | 2017-03-23 |
JP6386479B2 true JP6386479B2 (ja) | 2018-09-05 |
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JP2018150662A Active JP6628841B2 (ja) | 2013-02-22 | 2018-08-09 | 光計測において照明を提供するためのシステム |
JP2019218828A Active JP6866460B2 (ja) | 2013-02-22 | 2019-12-03 | 光計測において照明を提供するためのシステム |
JP2021065399A Active JP7201731B2 (ja) | 2013-02-22 | 2021-04-07 | 光計測において照明を提供するためのシステム |
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JP2019218828A Active JP6866460B2 (ja) | 2013-02-22 | 2019-12-03 | 光計測において照明を提供するためのシステム |
JP2021065399A Active JP7201731B2 (ja) | 2013-02-22 | 2021-04-07 | 光計測において照明を提供するためのシステム |
Country Status (8)
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US (2) | US9512985B2 (ja) |
EP (1) | EP2959503B1 (ja) |
JP (4) | JP6386479B2 (ja) |
KR (1) | KR102251262B1 (ja) |
CN (2) | CN110632703B (ja) |
IL (2) | IL240676B (ja) |
TW (1) | TWI637195B (ja) |
WO (1) | WO2014130829A1 (ja) |
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