ZA901151B - Deposition process of a coating of the ceramic type on a metallic substrate and element comprising a coating obtained by this procedure - Google Patents
Deposition process of a coating of the ceramic type on a metallic substrate and element comprising a coating obtained by this procedureInfo
- Publication number
- ZA901151B ZA901151B ZA901151A ZA901151A ZA901151B ZA 901151 B ZA901151 B ZA 901151B ZA 901151 A ZA901151 A ZA 901151A ZA 901151 A ZA901151 A ZA 901151A ZA 901151 B ZA901151 B ZA 901151B
- Authority
- ZA
- South Africa
- Prior art keywords
- coating
- ceramic type
- procedure
- deposition process
- metallic substrate
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 title abstract 4
- 239000000919 ceramic Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 title abstract 2
- 238000005137 deposition process Methods 0.000 title 1
- 230000008021 deposition Effects 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 229910052748 manganese Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 150000001247 metal acetylides Chemical class 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 125000002524 organometallic group Chemical group 0.000 abstract 1
- 239000002243 precursor Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Chemically Coating (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Ceramic Capacitors (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8902048A FR2643087B1 (fr) | 1989-02-16 | 1989-02-16 | Procede de depot d'un revetement de type ceramique sur un substrat metallique et element comportant un revetement obtenu par ce procede |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA901151B true ZA901151B (en) | 1991-09-25 |
Family
ID=9378851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA901151A ZA901151B (en) | 1989-02-16 | 1990-02-15 | Deposition process of a coating of the ceramic type on a metallic substrate and element comprising a coating obtained by this procedure |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5302422A (de) |
| EP (1) | EP0387113B1 (de) |
| JP (1) | JPH032374A (de) |
| AT (1) | ATE99001T1 (de) |
| CA (1) | CA2010119A1 (de) |
| DE (1) | DE69005331T2 (de) |
| FI (1) | FI93556C (de) |
| FR (1) | FR2643087B1 (de) |
| IL (1) | IL93378A (de) |
| ZA (1) | ZA901151B (de) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5830540A (en) * | 1994-09-15 | 1998-11-03 | Eltron Research, Inc. | Method and apparatus for reactive plasma surfacing |
| WO1996031899A1 (en) * | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
| FR2738017A1 (fr) * | 1995-08-25 | 1997-02-28 | M3D | Procede de revetement d'un carbure ou d'un carbonitrure mixte de ti et de zr par depot chimique en phase vapeur (cvd) et dispositif destine a former un revetement ceramique a partir d'au moins deux precurseurs metalliques |
| US6162513A (en) * | 1996-04-19 | 2000-12-19 | Korea Institute Of Science And Technology | Method for modifying metal surface |
| JP4022048B2 (ja) * | 2001-03-06 | 2007-12-12 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法 |
| PT1598456E (pt) * | 2004-05-17 | 2008-12-29 | Braecker Ag | Viajante e processo para a sua produção |
| FR2904007B1 (fr) * | 2006-07-21 | 2008-11-21 | Toulouse Inst Nat Polytech | Procede de depot de revetements ceramiques non oxydes. |
| JP2011521106A (ja) * | 2008-05-13 | 2011-07-21 | サブ−ワン・テクノロジー・インコーポレーテッド | 太陽熱およびその他の応用例におけるパイプの内面および外面のコーティング方法 |
| WO2010017185A1 (en) | 2008-08-04 | 2010-02-11 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| MY191327A (en) | 2014-12-05 | 2022-06-16 | Agc Flat Glass Na Inc | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
| KR102272311B1 (ko) | 2014-12-05 | 2021-07-06 | 에이쥐씨 글래스 유럽 | 중공형 음극 플라즈마 소스 |
| US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
| US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
| FR3056602B1 (fr) * | 2016-09-28 | 2021-01-01 | Commissariat Energie Atomique | Procede de fabrication par dli-mocvd d'un composant nucleaire avec revetement de crc amorphe |
| FR3056601B1 (fr) * | 2016-09-28 | 2020-12-25 | Commissariat Energie Atomique | Procede de fabrication d'un composant nucleaire a substrat metallique par dli-mocvd |
| EP3520118B1 (de) | 2016-09-28 | 2020-08-05 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Nukleare komponente mit metastabiler cr-beschichtung, dli-mocvd-verfahren zur herstellung davon und verwendung zur oxidation/hydridation |
| EP3520119B1 (de) | 2016-09-28 | 2020-07-29 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Zusammengesetzte nukleare komponente, dli-mocvd-verfahren zur herstellung davon und verwendung zur oxidations-/hydridationsregeleung |
| FR3056816B1 (fr) * | 2016-09-28 | 2021-03-05 | Commissariat Energie Atomique | Composant nucleaire avec revetement de crc amorphe, utilisations contre l'oxydation/hydruration. |
| FR3056815B1 (fr) * | 2016-09-28 | 2021-01-29 | Commissariat Energie Atomique | Composant nucleaire a substrat metallique et utilisations contre l'oxydation/hydruration. |
| EP3519604B1 (de) | 2016-09-28 | 2020-07-29 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Nukleare komponente mit einem metallsubstrat, verfahren zur herstellung davon mittels dli-mocvd und verwendungen davon zur oxidation/hydridierung |
| WO2018060642A1 (fr) | 2016-09-28 | 2018-04-05 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Composant nucléaire avec revetement de crc amorphe, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration |
| WO2019182954A1 (en) * | 2018-03-19 | 2019-09-26 | Applied Materials, Inc. | Methods of protecting metallic components against corrosion using chromium-containing thin films |
| CN111936664A (zh) | 2018-03-19 | 2020-11-13 | 应用材料公司 | 在航空航天部件上沉积涂层的方法 |
| US11015252B2 (en) | 2018-04-27 | 2021-05-25 | Applied Materials, Inc. | Protection of components from corrosion |
| US11009339B2 (en) | 2018-08-23 | 2021-05-18 | Applied Materials, Inc. | Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries |
| EP3959356A4 (de) | 2019-04-26 | 2023-01-18 | Applied Materials, Inc. | Verfahren zum schutz von luft- und raumfahrtkomponenten gegen korrosion und oxidation |
| US11794382B2 (en) | 2019-05-16 | 2023-10-24 | Applied Materials, Inc. | Methods for depositing anti-coking protective coatings on aerospace components |
| US11697879B2 (en) | 2019-06-14 | 2023-07-11 | Applied Materials, Inc. | Methods for depositing sacrificial coatings on aerospace components |
| US11466364B2 (en) | 2019-09-06 | 2022-10-11 | Applied Materials, Inc. | Methods for forming protective coatings containing crystallized aluminum oxide |
| US11519066B2 (en) | 2020-05-21 | 2022-12-06 | Applied Materials, Inc. | Nitride protective coatings on aerospace components and methods for making the same |
| CN115734826A (zh) | 2020-07-03 | 2023-03-03 | 应用材料公司 | 用于翻新航空部件的方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1446272A1 (de) * | 1959-05-11 | 1969-01-23 | Union Carbide Corp | Verfahren zum Gasplattieren |
| GB1032828A (en) * | 1962-07-06 | 1966-06-15 | Ionic Plating Company Ltd | Improved method for depositing chromium on non-metallic substrates |
| US3474017A (en) * | 1966-05-23 | 1969-10-21 | Ethyl Corp | Preparation of cyclopentadienyl metal olefin compounds |
| SE397370B (sv) * | 1977-03-01 | 1977-10-31 | Sandvik Ab | Sett att framstella ett notningsbestendigt ytskikt pa legerat stal |
| FR2446326A1 (fr) * | 1979-01-10 | 1980-08-08 | Creusot Loire | Perfectionnement a la nitruration ionique des corps creux allonges, en aciers |
| EP0055459A1 (de) * | 1980-12-29 | 1982-07-07 | Rikuun Electric co. | Verfahren zur Herstellung von Oxiden durch chemische Dampf-Abscheidung (CVD) |
| US4605566A (en) * | 1983-08-22 | 1986-08-12 | Nec Corporation | Method for forming thin films by absorption |
| US4810530A (en) * | 1986-08-25 | 1989-03-07 | Gte Laboratories Incorporated | Method of coating metal carbide nitride, and carbonitride whiskers with metal carbides, nitrides, carbonitrides, or oxides |
| FR2604188B1 (fr) * | 1986-09-18 | 1992-11-27 | Framatome Sa | Element tubulaire en acier inoxydable presentant une resistance a l'usure amelioree |
| CN1019513B (zh) * | 1986-10-29 | 1992-12-16 | 三菱电机株式会社 | 化合物薄膜形成装置 |
| JPS6465251A (en) * | 1987-09-07 | 1989-03-10 | Nippon Light Metal Co | Surface treatment of aluminum member |
-
1989
- 1989-02-16 FR FR8902048A patent/FR2643087B1/fr not_active Expired - Fee Related
-
1990
- 1990-02-12 DE DE69005331T patent/DE69005331T2/de not_active Expired - Fee Related
- 1990-02-12 AT AT90400374T patent/ATE99001T1/de not_active IP Right Cessation
- 1990-02-12 EP EP90400374A patent/EP0387113B1/de not_active Expired - Lifetime
- 1990-02-13 IL IL9337890A patent/IL93378A/en not_active IP Right Cessation
- 1990-02-15 FI FI900758A patent/FI93556C/fi not_active IP Right Cessation
- 1990-02-15 CA CA002010119A patent/CA2010119A1/en not_active Abandoned
- 1990-02-15 ZA ZA901151A patent/ZA901151B/xx unknown
- 1990-02-16 JP JP2035992A patent/JPH032374A/ja active Pending
-
1992
- 1992-11-13 US US07/975,999 patent/US5302422A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| IL93378A (en) | 1994-08-26 |
| FI900758A0 (fi) | 1990-02-15 |
| DE69005331D1 (de) | 1994-02-03 |
| EP0387113B1 (de) | 1993-12-22 |
| FR2643087B1 (fr) | 1991-06-07 |
| IL93378A0 (en) | 1990-11-29 |
| US5302422A (en) | 1994-04-12 |
| EP0387113A1 (de) | 1990-09-12 |
| FR2643087A1 (fr) | 1990-08-17 |
| FI93556C (fi) | 1995-04-25 |
| JPH032374A (ja) | 1991-01-08 |
| ATE99001T1 (de) | 1994-01-15 |
| DE69005331T2 (de) | 1994-06-09 |
| FI93556B (fi) | 1995-01-13 |
| CA2010119A1 (en) | 1990-08-16 |
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