ZA901151B - Deposition process of a coating of the ceramic type on a metallic substrate and element comprising a coating obtained by this procedure - Google Patents
Deposition process of a coating of the ceramic type on a metallic substrate and element comprising a coating obtained by this procedureInfo
- Publication number
- ZA901151B ZA901151B ZA901151A ZA901151A ZA901151B ZA 901151 B ZA901151 B ZA 901151B ZA 901151 A ZA901151 A ZA 901151A ZA 901151 A ZA901151 A ZA 901151A ZA 901151 B ZA901151 B ZA 901151B
- Authority
- ZA
- South Africa
- Prior art keywords
- coating
- ceramic type
- procedure
- deposition process
- metallic substrate
- Prior art date
Links
- 239000011248 coating agent Substances 0.000 title abstract 4
- 238000000576 coating method Methods 0.000 title abstract 4
- 239000000919 ceramic Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 title abstract 2
- 238000005137 deposition process Methods 0.000 title 1
- 230000008021 deposition Effects 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 229910052748 manganese Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 150000001247 metal acetylides Chemical class 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 125000002524 organometallic group Chemical group 0.000 abstract 1
- 239000002243 precursor Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Chemically Coating (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Carbon And Carbon Compounds (AREA)
- Ceramic Capacitors (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8902048A FR2643087B1 (fr) | 1989-02-16 | 1989-02-16 | Procede de depot d'un revetement de type ceramique sur un substrat metallique et element comportant un revetement obtenu par ce procede |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA901151B true ZA901151B (en) | 1991-09-25 |
Family
ID=9378851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA901151A ZA901151B (en) | 1989-02-16 | 1990-02-15 | Deposition process of a coating of the ceramic type on a metallic substrate and element comprising a coating obtained by this procedure |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5302422A (de) |
| EP (1) | EP0387113B1 (de) |
| JP (1) | JPH032374A (de) |
| AT (1) | ATE99001T1 (de) |
| CA (1) | CA2010119A1 (de) |
| DE (1) | DE69005331T2 (de) |
| FI (1) | FI93556C (de) |
| FR (1) | FR2643087B1 (de) |
| IL (1) | IL93378A (de) |
| ZA (1) | ZA901151B (de) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5830540A (en) * | 1994-09-15 | 1998-11-03 | Eltron Research, Inc. | Method and apparatus for reactive plasma surfacing |
| WO1996031899A1 (en) * | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
| FR2738017A1 (fr) * | 1995-08-25 | 1997-02-28 | M3D | Procede de revetement d'un carbure ou d'un carbonitrure mixte de ti et de zr par depot chimique en phase vapeur (cvd) et dispositif destine a former un revetement ceramique a partir d'au moins deux precurseurs metalliques |
| US6162513A (en) * | 1996-04-19 | 2000-12-19 | Korea Institute Of Science And Technology | Method for modifying metal surface |
| JP4022048B2 (ja) * | 2001-03-06 | 2007-12-12 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法 |
| TWI343953B (en) * | 2004-05-17 | 2011-06-21 | Ring traveler and method for producing it | |
| FR2904007B1 (fr) * | 2006-07-21 | 2008-11-21 | Toulouse Inst Nat Polytech | Procede de depot de revetements ceramiques non oxydes. |
| WO2009140417A1 (en) * | 2008-05-13 | 2009-11-19 | Sub-One Technology, Inc. | Method of coating inner and outer surfaces of pipes for thermal solar and other applications |
| KR101602517B1 (ko) | 2008-08-04 | 2016-03-10 | 에이지씨 플랫 글래스 노스 아메리카, 인코퍼레이티드 | Ｐｅｃｖｄ를 이용한 박막 코팅을 증착하기 위한 플라즈마 소스 및 방법 |
| ES2900321T3 (es) | 2014-12-05 | 2022-03-16 | Agc Flat Glass Na Inc | Fuente de plasma que utiliza un recubrimiento de reducción de macropartículas y procedimiento para usar una fuente de plasma que utiliza un recubrimiento de reducción de macropartículas para la deposición de recubrimientos de película delgada y modificación de superficies |
| MX2017007356A (es) | 2014-12-05 | 2018-04-11 | Agc Flat Glass Europe S A | Fuente de plasma del catodo hueco. |
| US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
| US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
| US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
| WO2018060644A1 (fr) | 2016-09-28 | 2018-04-05 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Composant nucléaire composite, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration |
| EP3519605B1 (de) * | 2016-09-28 | 2020-08-05 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Nukleare komponente mit amorpher crc-beschichtung, verfahren zur herstellung davon mittels dli-mocvd und verwendung davon zur kontrolle von oxidation/hydridation |
| FR3056816B1 (fr) * | 2016-09-28 | 2021-03-05 | Commissariat Energie Atomique | Composant nucleaire avec revetement de crc amorphe, utilisations contre l'oxydation/hydruration. |
| WO2018060643A1 (fr) | 2016-09-28 | 2018-04-05 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Composant nucléaire avec revetement de cr metastable, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration |
| FR3056815B1 (fr) * | 2016-09-28 | 2021-01-29 | Commissariat Energie Atomique | Composant nucleaire a substrat metallique et utilisations contre l'oxydation/hydruration. |
| FR3056601B1 (fr) * | 2016-09-28 | 2020-12-25 | Commissariat Energie Atomique | Procede de fabrication d'un composant nucleaire a substrat metallique par dli-mocvd |
| JP7198746B2 (ja) | 2016-09-28 | 2023-01-04 | コミサーリャ ア レナジー アトミック エー オー エナジー アルタナティブ | 金属基材を有する原子炉コンポーネント、ｄｌｉ－ｍｏｃｖｄによる製造方法および酸化／水素化に対する使用 |
| FR3056602B1 (fr) * | 2016-09-28 | 2021-01-01 | Commissariat Energie Atomique | Procede de fabrication par dli-mocvd d'un composant nucleaire avec revetement de crc amorphe |
| WO2019182967A1 (en) | 2018-03-19 | 2019-09-26 | Applied Materials, Inc. | Methods for depositing coatings on aerospace components |
| SG11202008259UA (en) * | 2018-03-19 | 2020-10-29 | Applied Materials Inc | Methods of protecting metallic components against corrosion using chromium-containing thin films |
| US11015252B2 (en) | 2018-04-27 | 2021-05-25 | Applied Materials, Inc. | Protection of components from corrosion |
| US11009339B2 (en) | 2018-08-23 | 2021-05-18 | Applied Materials, Inc. | Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries |
| EP3959356A4 (de) | 2019-04-26 | 2023-01-18 | Applied Materials, Inc. | Verfahren zum schutz von luft- und raumfahrtkomponenten gegen korrosion und oxidation |
| US11794382B2 (en) | 2019-05-16 | 2023-10-24 | Applied Materials, Inc. | Methods for depositing anti-coking protective coatings on aerospace components |
| US11697879B2 (en) | 2019-06-14 | 2023-07-11 | Applied Materials, Inc. | Methods for depositing sacrificial coatings on aerospace components |
| US11466364B2 (en) | 2019-09-06 | 2022-10-11 | Applied Materials, Inc. | Methods for forming protective coatings containing crystallized aluminum oxide |
| US11519066B2 (en) | 2020-05-21 | 2022-12-06 | Applied Materials, Inc. | Nitride protective coatings on aerospace components and methods for making the same |
| CN115734826A (zh) | 2020-07-03 | 2023-03-03 | 应用材料公司 | 用于翻新航空部件的方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1446272A1 (de) * | 1959-05-11 | 1969-01-23 | Union Carbide Corp | Verfahren zum Gasplattieren |
| GB1032828A (en) * | 1962-07-06 | 1966-06-15 | Ionic Plating Company Ltd | Improved method for depositing chromium on non-metallic substrates |
| US3474017A (en) * | 1966-05-23 | 1969-10-21 | Ethyl Corp | Preparation of cyclopentadienyl metal olefin compounds |
| SE397370B (sv) * | 1977-03-01 | 1977-10-31 | Sandvik Ab | Sett att framstella ett notningsbestendigt ytskikt pa legerat stal |
| FR2446326A1 (fr) * | 1979-01-10 | 1980-08-08 | Creusot Loire | Perfectionnement a la nitruration ionique des corps creux allonges, en aciers |
| EP0055459A1 (de) * | 1980-12-29 | 1982-07-07 | Rikuun Electric co. | Verfahren zur Herstellung von Oxiden durch chemische Dampf-Abscheidung (CVD) |
| US4605566A (en) * | 1983-08-22 | 1986-08-12 | Nec Corporation | Method for forming thin films by absorption |
| US4810530A (en) * | 1986-08-25 | 1989-03-07 | Gte Laboratories Incorporated | Method of coating metal carbide nitride, and carbonitride whiskers with metal carbides, nitrides, carbonitrides, or oxides |
| FR2604188B1 (fr) * | 1986-09-18 | 1992-11-27 | Framatome Sa | Element tubulaire en acier inoxydable presentant une resistance a l'usure amelioree |
| CN1019513B (zh) * | 1986-10-29 | 1992-12-16 | 三菱电机株式会社 | 化合物薄膜形成装置 |
| JPS6465251A (en) * | 1987-09-07 | 1989-03-10 | Nippon Light Metal Co | Surface treatment of aluminum member |
-
1989
- 1989-02-16 FR FR8902048A patent/FR2643087B1/fr not_active Expired - Fee Related
-
1990
- 1990-02-12 DE DE69005331T patent/DE69005331T2/de not_active Expired - Fee Related
- 1990-02-12 AT AT90400374T patent/ATE99001T1/de not_active IP Right Cessation
- 1990-02-12 EP EP90400374A patent/EP0387113B1/de not_active Expired - Lifetime
- 1990-02-13 IL IL9337890A patent/IL93378A/en not_active IP Right Cessation
- 1990-02-15 FI FI900758A patent/FI93556C/fi not_active IP Right Cessation
- 1990-02-15 CA CA002010119A patent/CA2010119A1/en not_active Abandoned
- 1990-02-15 ZA ZA901151A patent/ZA901151B/xx unknown
- 1990-02-16 JP JP2035992A patent/JPH032374A/ja active Pending
-
1992
- 1992-11-13 US US07/975,999 patent/US5302422A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| FR2643087B1 (fr) | 1991-06-07 |
| US5302422A (en) | 1994-04-12 |
| EP0387113B1 (de) | 1993-12-22 |
| FI93556C (fi) | 1995-04-25 |
| JPH032374A (ja) | 1991-01-08 |
| IL93378A0 (en) | 1990-11-29 |
| IL93378A (en) | 1994-08-26 |
| FI900758A0 (fi) | 1990-02-15 |
| DE69005331D1 (de) | 1994-02-03 |
| ATE99001T1 (de) | 1994-01-15 |
| EP0387113A1 (de) | 1990-09-12 |
| FI93556B (fi) | 1995-01-13 |
| FR2643087A1 (fr) | 1990-08-17 |
| DE69005331T2 (de) | 1994-06-09 |
| CA2010119A1 (en) | 1990-08-16 |
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