JPS6465251A - Surface treatment of aluminum member - Google Patents

Surface treatment of aluminum member

Info

Publication number
JPS6465251A
JPS6465251A JP22361987A JP22361987A JPS6465251A JP S6465251 A JPS6465251 A JP S6465251A JP 22361987 A JP22361987 A JP 22361987A JP 22361987 A JP22361987 A JP 22361987A JP S6465251 A JPS6465251 A JP S6465251A
Authority
JP
Japan
Prior art keywords
ions
thin film
forming
thin
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22361987A
Other languages
Japanese (ja)
Inventor
Shigeo Ohira
Masaya Iwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Light Metal Co Ltd
RIKEN Institute of Physical and Chemical Research
Original Assignee
Nippon Light Metal Co Ltd
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Light Metal Co Ltd, RIKEN Institute of Physical and Chemical Research filed Critical Nippon Light Metal Co Ltd
Priority to JP22361987A priority Critical patent/JPS6465251A/en
Publication of JPS6465251A publication Critical patent/JPS6465251A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve adhesive strength between an Al member and a thin film, by carrying out ion implantation as pretreatment at the time of forming a thin film on the surface of the Al member by a dry vapor growth process. CONSTITUTION:At the time of forming a thin TiNi film on the surface of an Al member by a dry vapor growth process, Ti ions and Ni ions are implanted, as surface prepreparation, into the surface of the Al member. Further, in the case of forming a thin TiC film, Ti ions and C ions are implanted. It is desirable to regulate ion accelerating voltage and the amount of ion implantation in the above ion implantation to 10-800KeV and 1X10<16>-1X10<18> ion/cm<2>, respec tively. By this method, wear resistance, mechanical strength, and surface hard ness equal to or higher than those of a thin film of conventional thickness can be obtained even if the thickness of the thin film is reduced.
JP22361987A 1987-09-07 1987-09-07 Surface treatment of aluminum member Pending JPS6465251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22361987A JPS6465251A (en) 1987-09-07 1987-09-07 Surface treatment of aluminum member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22361987A JPS6465251A (en) 1987-09-07 1987-09-07 Surface treatment of aluminum member

Publications (1)

Publication Number Publication Date
JPS6465251A true JPS6465251A (en) 1989-03-10

Family

ID=16801041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22361987A Pending JPS6465251A (en) 1987-09-07 1987-09-07 Surface treatment of aluminum member

Country Status (1)

Country Link
JP (1) JPS6465251A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03177570A (en) * 1989-12-05 1991-08-01 Raimuzu:Kk Production of combined hard material
US5302422A (en) * 1989-02-16 1994-04-12 Nitruvid Deposition process of a ceramic coating on a metallic substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181863A (en) * 1982-04-14 1983-10-24 Sumitomo Electric Ind Ltd Surface treatment method
JPS61272364A (en) * 1985-05-28 1986-12-02 Rikagaku Kenkyusho Metallic mold

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181863A (en) * 1982-04-14 1983-10-24 Sumitomo Electric Ind Ltd Surface treatment method
JPS61272364A (en) * 1985-05-28 1986-12-02 Rikagaku Kenkyusho Metallic mold

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5302422A (en) * 1989-02-16 1994-04-12 Nitruvid Deposition process of a ceramic coating on a metallic substrate
JPH03177570A (en) * 1989-12-05 1991-08-01 Raimuzu:Kk Production of combined hard material

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