ZA200605470B - Micro-fluid ejection device having high resistance heater film - Google Patents

Micro-fluid ejection device having high resistance heater film

Info

Publication number
ZA200605470B
ZA200605470B ZA200605470A ZA200605470A ZA200605470B ZA 200605470 B ZA200605470 B ZA 200605470B ZA 200605470 A ZA200605470 A ZA 200605470A ZA 200605470 A ZA200605470 A ZA 200605470A ZA 200605470 B ZA200605470 B ZA 200605470B
Authority
ZA
South Africa
Prior art keywords
micro
high resistance
ejection device
fluid ejection
resistance heater
Prior art date
Application number
ZA200605470A
Other languages
English (en)
Inventor
Byron V Bell
Robert W Cornell
Guan Yimin
George K Parish
Original Assignee
Lexmark Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lexmark Int Inc filed Critical Lexmark Int Inc
Publication of ZA200605470B publication Critical patent/ZA200605470B/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49087—Resistor making with envelope or housing
    • Y10T29/49098—Applying terminal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49163—Manufacturing circuit on or in base with sintering of base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49346—Rocket or jet device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
ZA200605470A 2004-01-20 2005-01-20 Micro-fluid ejection device having high resistance heater film ZA200605470B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/760,726 US7080896B2 (en) 2004-01-20 2004-01-20 Micro-fluid ejection device having high resistance heater film

Publications (1)

Publication Number Publication Date
ZA200605470B true ZA200605470B (en) 2008-09-25

Family

ID=34750056

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200605470A ZA200605470B (en) 2004-01-20 2005-01-20 Micro-fluid ejection device having high resistance heater film

Country Status (13)

Country Link
US (3) US7080896B2 (zh)
EP (2) EP1716000B1 (zh)
JP (1) JP2007526143A (zh)
CN (1) CN1997519B (zh)
AU (1) AU2005206983B2 (zh)
BR (1) BRPI0506936A (zh)
CA (1) CA2552728C (zh)
DE (1) DE602005023410D1 (zh)
HK (1) HK1105181A1 (zh)
MX (1) MXPA06008196A (zh)
TW (1) TWI340091B (zh)
WO (1) WO2005069947A2 (zh)
ZA (1) ZA200605470B (zh)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7654645B2 (en) * 2005-04-04 2010-02-02 Silverbrook Research Pty Ltd MEMS bubble generator
US20080115359A1 (en) * 2006-11-21 2008-05-22 Yimin Guan High Resistance Heater Material for A Micro-Fluid Ejection Head
US20080213927A1 (en) * 2007-03-02 2008-09-04 Texas Instruments Incorporated Method for manufacturing an improved resistive structure
US20080214007A1 (en) * 2007-03-02 2008-09-04 Texas Instruments Incorporated Method for removing diamond like carbon residue from a deposition/etch chamber using a plasma clean
US8409458B2 (en) * 2007-03-02 2013-04-02 Texas Instruments Incorporated Process for reactive ion etching a layer of diamond like carbon
JP5539895B2 (ja) * 2007-12-02 2014-07-02 ヒューレット−パッカード デベロップメント カンパニー エル．ピー． 電気的に絶縁されるプリントヘッドダイ接地ネットワークをフレキシブル回路で電気的に接続する方法
JP5403919B2 (ja) * 2008-01-29 2014-01-29 キヤノン株式会社 インクジェット記録ヘッド用基板、及びインクジェット記録ヘッド、記録装置
KR20090131176A (ko) * 2008-06-17 2009-12-28 삼성전자주식회사 잉크젯 프린트헤드용 히터 및 그 제조방법
WO2010050977A1 (en) * 2008-10-31 2010-05-06 Hewlett-Packard Development Company, L.P. Thermal fluid-ejection device die
KR101311282B1 (ko) * 2008-11-10 2013-09-30 잼텍 리미티드 히터 산화물 성장을 저지하기 위해 증가하는 구동 펄스를 가진 프린트헤드
EP2563596B1 (en) * 2010-04-29 2015-07-22 Hewlett Packard Development Company, L.P. Fluid ejection device
US20120091121A1 (en) * 2010-10-19 2012-04-19 Zachary Justin Reitmeier Heater stack for inkjet printheads
CN102761994A (zh) * 2011-04-25 2012-10-31 艾尔莎光电科技股份有限公司 纳米陶瓷电热涂层装置及其制造方法
US8727499B2 (en) 2011-12-21 2014-05-20 Hewlett-Packard Development Company, L.P. Protecting a fluid ejection device resistor
CN103660574A (zh) * 2012-09-20 2014-03-26 研能科技股份有限公司 喷墨头芯片的结构
JP5764723B2 (ja) * 2012-10-10 2015-08-19 株式会社岡野製作所 圧力センサおよび該センサを用いた真空加工装置
US9016837B2 (en) * 2013-05-14 2015-04-28 Stmicroelectronics, Inc. Ink jet printhead device with compressive stressed dielectric layer
CN103325507B (zh) * 2013-06-21 2017-02-22 广州天极电子科技有限公司 一种高稳定性的薄膜电阻器及其制造方法
WO2015116050A1 (en) * 2014-01-29 2015-08-06 Hewlett-Packard Development Company, L.P. Thermal ink jet printhead
WO2016164041A1 (en) * 2015-04-10 2016-10-13 Hewlett-Packard Development Company, L.P. Removing an inclined segment of a metal conductor while forming printheads
US10173420B2 (en) 2015-07-30 2019-01-08 Hewlett-Packard Development Company, L.P. Printhead assembly
US10334879B2 (en) * 2015-12-21 2019-07-02 Funai Electric Co., Ltd Method and apparatus for metering and vaporizing a fluid
WO2017127069A1 (en) * 2016-01-20 2017-07-27 Hewlett-Packard Development Company, L.P. Energy efficient printheads
US10314342B2 (en) 2017-10-20 2019-06-11 Altria Client Services Llc E-vaping device using a jet dispensing cartridge, and method of operating the e-vaping device
CN114242361A (zh) * 2021-11-29 2022-03-25 广东风华高新科技股份有限公司 一种薄膜片式电阻器及其制备方法

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3775278A (en) * 1972-03-22 1973-11-27 Bell Telephone Labor Inc Technique for the fabrication of thin film resistors
US4042479A (en) * 1973-12-27 1977-08-16 Fujitsu Ltd. Thin film resistor and a method of producing the same
JPS5434097A (en) 1977-08-23 1979-03-13 Fujitsu Ltd Manufacture of thin film resistor
CA1128669A (en) 1979-02-21 1982-07-27 Wolf-Dieter Munz Method for producing and electrical thin layer circuit
JPS606547B2 (ja) 1981-02-25 1985-02-19 富士通株式会社 薄膜混成集積回路
JPS6089567A (ja) 1983-10-19 1985-05-20 Fujitsu Ltd タンタルアルミ合金膜生成方法
JPS6089568A (ja) 1983-10-19 1985-05-20 Fujitsu Ltd タンタルアルミ合金膜生成方法
US4535343A (en) * 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
JPS61142759A (ja) * 1984-12-14 1986-06-30 Ngk Spark Plug Co Ltd Ｉｃパツケ−ジ用基板
US4862197A (en) * 1986-08-28 1989-08-29 Hewlett-Packard Co. Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby
US4801067A (en) * 1986-08-29 1989-01-31 Ngk Spark Plug Co., Ltd. Method of connecting metal conductor to ceramic substrate
US4809428A (en) * 1987-12-10 1989-03-07 Hewlett-Packard Company Thin film device for an ink jet printhead and process for the manufacturing same
US5231306A (en) * 1992-01-31 1993-07-27 Micron Technology, Inc. Titanium/aluminum/nitrogen material for semiconductor devices
US5504041A (en) * 1994-08-01 1996-04-02 Texas Instruments Incorporated Conductive exotic-nitride barrier layer for high-dielectric-constant materials
US5554564A (en) * 1994-08-01 1996-09-10 Texas Instruments Incorporated Pre-oxidizing high-dielectric-constant material electrodes
US5489548A (en) * 1994-08-01 1996-02-06 Texas Instruments Incorporated Method of forming high-dielectric-constant material electrodes comprising sidewall spacers
US5585300A (en) * 1994-08-01 1996-12-17 Texas Instruments Incorporated Method of making conductive amorphous-nitride barrier layer for high-dielectric-constant material electrodes
US5576579A (en) * 1995-01-12 1996-11-19 International Business Machines Corporation Tasin oxygen diffusion barrier in multilayer structures
US5636441A (en) * 1995-03-16 1997-06-10 Hewlett-Packard Company Method of forming a heating element for a printhead
US5554364A (en) * 1995-06-07 1996-09-10 Helene Curtis, Inc. Compositions and methods to reduce post-perm odor
US5723358A (en) * 1996-04-29 1998-03-03 Vlsi Technology, Inc. Method of manufacturing amorphous silicon antifuse structures
US6239492B1 (en) * 1996-05-08 2001-05-29 Micron Technology, Inc. Semiconductor structure with a titanium aluminum nitride layer and method for fabricating same
US5892281A (en) * 1996-06-10 1999-04-06 Micron Technology, Inc. Tantalum-aluminum-nitrogen material for semiconductor devices
US6527813B1 (en) * 1996-08-22 2003-03-04 Canon Kabushiki Kaisha Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
US5976392A (en) * 1997-03-07 1999-11-02 Yageo Corporation Method for fabrication of thin film resistor
KR100269310B1 (ko) 1997-09-29 2000-10-16 윤종용 도전성확산장벽층을사용하는반도체장치제조방법
US6391769B1 (en) * 1998-08-19 2002-05-21 Samsung Electronics Co., Ltd. Method for forming metal interconnection in semiconductor device and interconnection structure fabricated thereby
US6395148B1 (en) * 1998-11-06 2002-05-28 Lexmark International, Inc. Method for producing desired tantalum phase
US6336713B1 (en) * 1999-07-29 2002-01-08 Hewlett-Packard Company High efficiency printhead containing a novel nitride-based resistor system
US6467864B1 (en) * 2000-08-08 2002-10-22 Lexmark International, Inc. Determining minimum energy pulse characteristics in an ink jet print head
US6500724B1 (en) * 2000-08-21 2002-12-31 Motorola, Inc. Method of making semiconductor device having passive elements including forming capacitor electrode and resistor from same layer of material
RU2194335C2 (ru) 2000-10-26 2002-12-10 Акционерное общество открытого типа "НИИ молекулярной электроники и завод "Микрон" Способ реактивного ионно-плазменного травления слоев ta, tan, taal
US6545339B2 (en) * 2001-01-12 2003-04-08 International Business Machines Corporation Semiconductor device incorporating elements formed of refractory metal-silicon-nitrogen and method for fabrication
KR100396891B1 (ko) * 2001-03-21 2003-09-03 삼성전자주식회사 반도체 소자의 금속 배선 형성 방법
US20020158945A1 (en) * 2001-04-30 2002-10-31 Miller Richard Todd Heating element of a printhead having resistive layer over conductive layer
CN1168603C (zh) * 2001-05-09 2004-09-29 研能科技股份有限公司 喷墨头芯片制造方法
US6410426B1 (en) * 2001-07-09 2002-06-25 Texas Instruments Incorporated Damascene cap layer process for integrated circuit interconnects
KR100434697B1 (ko) * 2001-09-05 2004-06-07 주식회사 하이닉스반도체 반도체소자의 제조방법
US6676246B1 (en) 2002-11-20 2004-01-13 Lexmark International, Inc. Heater construction for minimum pulse time

Also Published As

Publication number Publication date
US7080896B2 (en) 2006-07-25
DE602005023410D1 (de) 2010-10-21
EP2177360B1 (en) 2011-05-25
CN1997519A (zh) 2007-07-11
WO2005069947A3 (en) 2006-10-12
JP2007526143A (ja) 2007-09-13
TW200530048A (en) 2005-09-16
TWI340091B (en) 2011-04-11
MXPA06008196A (es) 2007-02-02
CA2552728A1 (en) 2005-08-04
CA2552728C (en) 2010-10-05
EP1716000B1 (en) 2010-09-08
HK1105181A1 (en) 2008-02-06
US20060197807A1 (en) 2006-09-07
EP2177360A1 (en) 2010-04-21
AU2005206983A1 (en) 2005-08-04
BRPI0506936A (pt) 2007-06-12
EP1716000A4 (en) 2009-08-26
WO2005069947A2 (en) 2005-08-04
CN1997519B (zh) 2011-05-25
AU2005206983B2 (en) 2009-12-03
US7918015B2 (en) 2011-04-05
US20090094834A1 (en) 2009-04-16
EP1716000A2 (en) 2006-11-02
US20050157089A1 (en) 2005-07-21

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