WO2024092459A1 - 工艺限制策略确定方法和装置、服务器、存储介质 - Google Patents

工艺限制策略确定方法和装置、服务器、存储介质 Download PDF

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Publication number
WO2024092459A1
WO2024092459A1 PCT/CN2022/128773 CN2022128773W WO2024092459A1 WO 2024092459 A1 WO2024092459 A1 WO 2024092459A1 CN 2022128773 W CN2022128773 W CN 2022128773W WO 2024092459 A1 WO2024092459 A1 WO 2024092459A1
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Prior art keywords
target
process restriction
association relationship
policy
target device
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PCT/CN2022/128773
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English (en)
French (fr)
Inventor
刘朝正
李文娟
朴南植
王洪
李鹏
李小伟
高俊
Original Assignee
京东方科技集团股份有限公司
北京中祥英科技有限公司
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Priority to PCT/CN2022/128773 priority Critical patent/WO2024092459A1/zh
Publication of WO2024092459A1 publication Critical patent/WO2024092459A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Definitions

  • the present disclosure relates to the field of data processing technology, and in particular to a method and device for determining a process restriction strategy, a server, and a storage medium.
  • semiconductor products are produced in multiple batches.
  • Different process restriction strategies may be used for each batch.
  • the process restriction strategies in the prior art may involve multiple dimensions, such as customer codes, different factories, sites, main processes, packaging forms, product specifications, etc.
  • flexible process restriction strategies are usually adopted in the prior art to reduce the probability of misprocessing.
  • the batches produced and the equipment used by each site in the prior art may be different, and different restrictions need to be customized for each site, resulting in the inability to achieve unified processing, which increases the difficulty of flow control between different batches and reduces production efficiency.
  • the present disclosure provides a process restriction strategy determination method, device, and server to address the deficiencies of related technologies.
  • a method for determining a process limitation strategy comprising:
  • a drop-down menu corresponding to the target device is displayed; the drop-down menu includes at least one process restriction policy that can be selected by the target device;
  • an association relationship between the target device and the target process restriction strategy is determined.
  • determining the association relationship between the target device and the target process restriction strategy includes:
  • the enabling state of the current process restriction strategy includes an enabled state or a disabled state
  • determining the association relationship between the target device and the target process restriction strategy includes:
  • association relationship table When no association relationship exists in the association relationship table, creating a target association relationship between the device name of the target device and the target process restriction strategy;
  • association table When there is an enabled association in the association table, a target association between the target device and the target process restriction strategy is established, and prompt information of successful strategy binding is generated.
  • determining the association relationship between the target device and the target process restriction strategy includes:
  • the current process restriction policy in which the target device is in a disabled state is unbound.
  • unbinding the current process restriction policy of the target device in a disabled state includes:
  • association relationship When the association relationship is in an enabled state, it is determined that the unbinding fails; when the association relationship is in a disabled state, it is determined that the unbinding succeeds.
  • determining the association relationship between the target device and the target process restriction strategy includes:
  • an enablement state of the current process constraint policy of the target device is updated.
  • the method further comprises:
  • the policy item in the policy item list is processed.
  • processing the policy items in the policy item list includes:
  • an exclusion association relationship between the process restriction strategy and the at least one batch is established.
  • a device for determining a process limitation strategy comprising:
  • a drop-down unit display module configured to display a drop-down menu corresponding to the target device in response to an operation of binding a process restriction policy to the target device; the drop-down menu includes at least one process restriction policy that can be selected by the target device;
  • the association relationship determination module is used to determine the association relationship between the target device and the target process restriction strategy in response to the operation of selecting the target process restriction strategy in the drop-down menu.
  • the association relationship determination module includes:
  • a current strategy acquisition submodule used to acquire the current process restriction strategy of the target device; the enabling state of the current process restriction strategy includes an enabled state or a disabled state;
  • An association relationship maintaining submodule used for determining to maintain the association relationship between the target device and the target process restriction strategy and to fail to establish the association relationship when the current process restriction strategy is in an enabled state
  • the association relationship updating submodule is used to determine to update the association relationship between the target device and the target process restriction strategy when the current process restriction strategy is in a disabled state.
  • the association relationship determination module includes:
  • An association query submodule used to query a preset association table according to the device name of the target device and the target process restriction strategy to determine whether there is an association relationship between the target device and the target process restriction strategy;
  • a target relationship creation submodule used for creating a target association relationship between the device name of the target device and the target process restriction strategy when no association relationship exists in the association relationship table;
  • a target relationship reconstruction submodule used for deleting a disabled relationship and recreating a target relationship when there is a disabled relationship in the relationship table
  • the target relationship establishment submodule is used to establish a target association relationship between the target device and the target process restriction strategy when there is an association relationship in an enabled state in the association relationship table, and generate prompt information of successful strategy binding.
  • the association relationship determination module includes:
  • the current policy unbinding submodule is used to unbind the current process restriction policy of the target device in a disabled state in response to an unbinding operation on the current process restriction policy in the drop-down menu.
  • the current policy unbinding submodule includes:
  • An enabling state acquiring unit used to acquire the enabling state of the association relationship of the target device, wherein the enabling state includes an enabled state or a disabled state;
  • an unbinding failure unit configured to determine that the unbinding fails when the association relationship is in an enabled state
  • the unbinding success unit is used to determine that the unbinding is successful when the association relationship is in a disabled state.
  • the association relationship determination module includes:
  • the enablement status update submodule is used to update the enablement status of the current process constraint policy of the target device in response to an activation operation on the current process constraint policy in the drop-down menu.
  • the device further comprises:
  • An information list acquisition module used to acquire a strategy information list including at least one process restriction strategy
  • a strategy item display module used for displaying a strategy item list of each process restriction strategy in response to a selection operation on each process restriction strategy
  • the policy item processing module is used to process the policy items in the policy item list in response to a processing operation on the policy items in the policy item list.
  • the policy item processing module includes:
  • a batch acquisition submodule for acquiring a plurality of batches that can be associated in response to a selection operation on an excluded item in the policy item list;
  • the exclusion relationship establishment submodule is used to establish an exclusion association relationship between the process restriction strategy and the at least one batch in response to a registration operation on the at least one batch.
  • a server including:
  • the memory is used to store a computer program executable by the processor
  • the processor is used to execute the computer program in the memory to implement the method as described in the first aspect.
  • a non-transitory computer-readable storage medium is provided, and when an executable computer program in the storage medium is executed by a processor, the method described in the first aspect is implemented.
  • a drop-down menu corresponding to the target device in response to the operation of binding a process restriction strategy to a target device, can be displayed; the drop-down menu includes at least one process restriction strategy that can be selected by the target device; then, in response to the operation of selecting a target process restriction strategy in the drop-down menu, the association relationship between the target device and the target process restriction strategy is determined.
  • the solution of this embodiment can pre-create a process restriction strategy and set a corresponding process restriction strategy for the target device, so as to achieve the purpose of uniformly processing the process restriction strategy, facilitate the flow of different batches of products between sites, and help improve production efficiency.
  • FIG. 1 is a block diagram showing a semiconductor manufacturing execution system according to an exemplary embodiment.
  • Fig. 2 is an application architecture diagram of a semiconductor manufacturing execution system according to an exemplary embodiment.
  • FIG. 3 is an operation flow chart of a semiconductor manufacturing execution system according to an exemplary embodiment.
  • Fig. 4 is a flow chart showing a method for determining a process limitation strategy according to an exemplary embodiment.
  • Fig. 5 is a schematic diagram showing an interface for creating a process restriction strategy according to an exemplary embodiment.
  • Fig. 6 is a diagram showing a relationship between a process restriction strategy and strategy items according to an exemplary embodiment.
  • Fig. 7 is a schematic diagram showing a process limitation strategy item interface according to an exemplary embodiment.
  • Fig. 8 is a functional block diagram of a user operation platform according to an exemplary embodiment.
  • Fig. 9 is an architecture diagram of a user operation platform according to an exemplary embodiment.
  • Fig. 10 is a schematic diagram showing a process limitation strategy device interface according to an exemplary embodiment.
  • Fig. 11 is a flow chart showing a process from binding to unbinding an association relationship according to an exemplary embodiment.
  • Fig. 12 is a schematic diagram showing a process limitation strategy exclusion interface according to an exemplary embodiment.
  • Fig. 13 is a schematic diagram showing a method of setting an exclusion batch according to an exemplary embodiment.
  • Fig. 14 is a block diagram showing a device for determining a process limitation strategy according to an exemplary embodiment.
  • Fig. 15 is a block diagram of a server according to an exemplary embodiment.
  • the embodiments of the present disclosure provide a method and device for determining a process limitation strategy, a server, and a non-transitory computer-readable storage medium.
  • the above process limitation strategy determination method can be applied to a semiconductor manufacturing execution system.
  • the semiconductor manufacturing execution system is used for the whole process manufacturing management of semiconductor packaging and testing, executes production orders, tracks the real-time status of equipment resources (such as carriers, materials, etc.) to complete semiconductor products, and achieves the effect of information sharing and process automation implementation of the factory.
  • the above semiconductor manufacturing execution system When a real-time event occurs in the factory, the above semiconductor manufacturing execution system will respond to and report the event in a timely manner, and use the current data to guide the user to handle the event, thereby maximizing production efficiency and yield, which is conducive to reducing production costs and improving production management.
  • the above semiconductor manufacturing execution system adopts a modular design, which can meet the production needs of different packaging and testing process technologies, and has excellent flexibility and scalability, thereby achieving the maximum input-output ratio and achieving the high flexibility and personalized production mode required by Industry 4.0.
  • FIG1 is a block diagram of a semiconductor manufacturing execution system according to an exemplary embodiment.
  • a semiconductor manufacturing execution system includes: a basic data module, a process flow module, a production plan module, a work-in-progress module, an engineering management module, a recipe module, an equipment module, a machine limit module, a carrier module, a material module, a fixture module, and a packaging module.
  • the basic data module can be a unified basic data model platform, providing basic data modeling functions for the semiconductor manufacturing execution system, including but not limited to: factory modeling, equipment modeling, system status modeling, packaging modeling, user authority modeling, recipe (different semiconductor devices require different programs, recipes or menus) basic data modeling, material basic data modeling, process step flow modeling, strategy modeling, data acquisition basic data modeling and alarm basic data modeling.
  • the basic data model as a standard framework, provides users with the required basic general functions and provides a series of customized extension settings, such as unified naming specifications, unified data enumeration types and unified business SQL management, which is conducive to the rapid construction of applications; the definition of objects in cross-multiple applications is standardized, supports multiple languages and multiple units, is more flexible, and has stronger scalability and flexibility.
  • the factory modeling function is used to support the maintenance of factory basic data, support multi-factory mode and support the creation of areas under the factory.
  • the device modeling function is used to support the creation of device master data and the maintenance of device port data.
  • system status modeling function is used to support batch status maintenance, equipment status maintenance, material status maintenance, carrier status maintenance, fixture status maintenance, and the like.
  • the packaging form modeling is used to maintain packaging-related attribute data and to uniformly maintain and manage packaging methods of different specifications.
  • user authority modeling is used to support the creation and maintenance of users, user groups and user roles, and to support the maintenance of password verification of user menus and user operation interfaces.
  • recipe basic data modeling is used to support the creation and maintenance of process menu data and the maintenance of recipe equipment data relationships.
  • material basic data modeling is used to support the creation and maintenance of material basic data.
  • process step flow modeling is used to support the creation and maintenance of basic data of steps, processes, sections, and processes, support visual interface editing of processes, support the creation and maintenance of branch processes, and support the creation and maintenance of rework processes.
  • strategy modeling is used to support product-level, process-level, and process-step-level process modeling, so that the semiconductor manufacturing execution system can select different equipment and recipes for business operations in the actual production process according to different strategy configurations.
  • strategy refers to a combination of conditions, including a valid condition composed of data such as process and equipment.
  • production strategy refers to a combination of conditions during system production, including a valid condition composed of data such as process and equipment;
  • process strategy refers to a combination of conditions for processes;
  • restriction strategy refers to a combination of conditions that do not allow operations.
  • the data collection basic data modeling is used to support the creation and maintenance of data collection details and the maintenance of data collection rules.
  • the alarm basic data modeling is used to support alarm system information maintenance, alarm triggering conditions for maintenance management, and alarm triggering subsequent actions for maintenance management.
  • the process flow module can allow users to define products and their corresponding process flows, including each process step type and related process control strategies, so as to provide process management specifications for the semiconductor manufacturing execution system.
  • the above process flow includes a process restriction process, and the solution for the process restriction process will be described in detail in the solution shown in FIG4.
  • the process flow module can provide a complete version control mechanism. All active processes in the system must strictly comply with this version control system to avoid errors in production process data and thus avoid serious accidents.
  • the process flow module can support multi-path and rework, and can automatically select paths based on pre-set conditions during on-site operations.
  • the process flow module can also support various product process rule controls, and can perform different process controls according to product and process conditions. The above conditions can be subdivided into work step level, process level, process level, product level and batch level.
  • the process step flow modeling function is used to support the creation and maintenance of basic data of steps, processes, sections and flows, support visual interface editing of flows, support the creation and maintenance of branch flows, and support the creation and maintenance of rework flows.
  • the product process configuration function is used to configure different process flows according to different products. Different recipes and equipment can be selected according to different strategies for the same product and the same process.
  • the production plan module can manage production plan orders and production work orders. For example, a user can create a new production plan order, and then create a new production work order based on the above production plan, and can set the priority of the corresponding plan and work order, as well as the planned time of the production plan and production work order, etc., to facilitate the tracking of order completion during the production process.
  • the planned order function is used to create and maintain planned orders for different factories and control the priority and final delivery time.
  • the work order function is used to track different plans to create different work orders, and special attributes (priority, owner, process notes, etc.) can be specified on the work order.
  • the work-in-progress module can manage the processing of work-in-progress, guide the operator (i.e., the user) to process the product according to the pre-set process requirements, and track and record the processing information in detail.
  • the most important job management function allows tracking of multiple batches for simultaneous processing and provides historical traceability of batches.
  • the WIP function is mainly used for the management of batch work-in-progress business, including all the businesses described above.
  • the query function is used to provide query of work-in-progress.
  • the project management module can manage project-related businesses, including but not limited to: work permit management, QTime management, BOM management, process card management, and batch reservation.
  • the work permit management function is used to provide users with information related to work permits and set expiration times to determine whether the user has the corresponding permissions.
  • the QTime management function is used to support QTime management, set QTime rules, and perform rule control when batches pass through stations.
  • QTime refers to the waiting time from one step to the next step in the process. There is a maximum time or a minimum time, and it is the time required between different process steps in the semiconductor process. Taking steps 1-2 as an example, there are 8 situations for Q-Time:
  • the BOM management function is used to support BOM maintenance and to control the material verification of equipment materials.
  • BOM stands for Bill of Material, which refers to the material name and corresponding material quantity required to process a semiconductor product from the first step to the last step.
  • the process card management function is used to support the creation and maintenance of process cards within the system.
  • Corresponding process card information can be generated according to different process cards for the production and circulation of paper vouchers.
  • the batch reservation function is used to support the batch reservation production function.
  • the Recipe module can create and update the process menu and contain the process menu information of all process flows. Among them, when creating, activating, freezing, canceling and other functions, the setting and use of the process menu are subject to version control.
  • the Recipe module supports the setting of logical process menus and actual process menus (processing parameters), supports the setting of process menus according to process conditions, supports the automatic selection of process menus according to the measurement results of the previous layer, and supports the maintenance of the relationship between equipment and process menus.
  • the equipment module can provide basic equipment information definition, provide equipment status model establishment and tracking management, support equipment authority management, equipment inspection, maintenance and repair process management.
  • the equipment basic data maintenance function is used to maintain equipment basic data.
  • the equipment inspection function is used to support equipment inspection project maintenance and support equipment regular inspection control.
  • the equipment maintenance function is used to support the setting of equipment maintenance and maintenance cycles, and control the maintenance of equipment.
  • the equipment repair function is used to support the equipment repair function.
  • the equipment maintenance function is used to support the tracking of equipment maintenance processes.
  • the equipment ledger function is used to support the query of equipment-related archival data.
  • the machine limit module may provide a control function module for the machine limit of the semiconductor manufacturing execution system, support setting of restriction conditions under different scenarios, and be used to control whether a batch can support production.
  • Positive and negative item settings You can set positive rules, for example, production is allowed only under this rule, and negative rules, production is not allowed under this condition.
  • the semiconductor manufacturing execution system uses CS architecture design and is developed based on the Client-Server (C/S, client-server) architecture model to ensure system stability, smooth interface operation, and enhance user experience.
  • the server is responsible for data management
  • the client is responsible for completing interactive tasks with users.
  • the client module is divided into two parts: one part is for basic data modeling, named FactoryModeler (Modeler), and the other part is for the user's operation interaction interface, named Operator Interface Client (OIC).
  • the front end uses the C# language winform framework
  • the server side uses the Java language, and is developed using the sping boot 2.x framework.
  • the data of the front-end and back-end communications are interacted in XML format, and the corresponding message publishing and subscription processing uses Tibco Rendezvous (Tibco RV), and the database is selected as Oracle 19C.
  • the application architecture is shown in Figure 2.
  • the corresponding relationship between the system and the module in the semiconductor manufacturing execution system includes:
  • Functional modules for realizing record traceability during the manufacturing process production planning module, work-in-progress module, batch module, and packaging module in the OIC system.
  • Core data support module in the process basic data module in FactoryModeler system.
  • FIG. 3 is a flowchart showing the overall operation of a semiconductor manufacturing execution system according to an exemplary embodiment. Referring to FIG. 3 , steps 31 to 37 are included:
  • step 31 the FactoryModeler client in the system creates basic data through the basic data module in response to the interaction with the user.
  • step 32 the FactoryModeler client connects the basic information data into basic business underlying data through the basic data module.
  • Production strategy configuration the corresponding equipment and the associated equipment recipe for the process step under the product. Among them, the production strategy includes 3 modes: product + process + process step mode, process + process step mode and process step mode.
  • the product, process and work step can match the product + process + work step mode, use the equipment and recipe configured in this mode for processing.
  • the product, process or work step cannot match the product + process + work step mode, match the process + work step mode; when the process + work step mode is matched, use the equipment and recipe configured in the process + work step mode for processing; when the process + work step mode cannot be matched, continue to match the work step mode; if the work step model can be matched, use the equipment and recipe in the work step mode; if it cannot be matched, the process will be stuck and the appropriate equipment cannot be selected for processing.
  • the OIC client in the system may perform production plan creation and plan execution operations through the production plan module in response to the interaction with the user.
  • the system enters the production plan, such as the planned output of a product within a period of time, the planned start time, the planned end time, the priority and the person in charge.
  • the production plan such as the planned output of a product within a period of time, the planned start time, the planned end time, the priority and the person in charge.
  • Plan execution Create a work order and formulate the work order information according to the actual inventory and production capacity of the workshop, such as the original planned order number, work order number, work order product from the planned order product, work order quantity less than the planned order data, priority and other related information.
  • step 34 the OIC client in the system performs the manufacturing process through the work-in-progress module and the batch management module.
  • batch-related businesses include the use of functional modules in the work-in-process module and the batch module, such as batch pause, batch cancel pause, batch scrap, batch cancel scrap, batch division, batch combination, batch in and batch out to support process business.
  • step 35 the OIC client in the system controls the batch outbound through the batch outbound function of the work-in-progress module or performs the carrier binding operation using the carrier binding function of the carrier module.
  • Batch outbound binding vehicle When the batch is outbound, select the vehicle information and bind the vehicle.
  • Vehicle binding function to bind the vehicle Enter the vehicle binding function interface, select the batch information, select the vehicle information to be bound, and click Bind to bind the vehicle.
  • Involving vehicle-related business The vehicle needs to be cleaned before binding, and the process restriction strategy determination process involves: vehicle suspension, vehicle unpause, vehicle scrapping, vehicle scrapping and other scenarios.
  • step 36 the OIC client in the system performs batch process management by batch entry and exit of the product module.
  • the process includes the following process sections: cutting-chip bonding-packaging-testing.
  • the batch is in the process route of inbound and outbound operations, and processing and production are carried out strictly in accordance with the process flow nodes set by the process flow management module.
  • equipment is used for processing and the process menu management module is used: the equipment selects the recipe for processing and production based on the relationship between the configured basic data equipment and recipes and the production strategy.
  • Equipment needs regular inspection and maintenance. Therefore, when selecting equipment for processing, the equipment itself will also perform a series of management. If the equipment is not inspected and maintained when it is due, the equipment cannot process the batch for production. Therefore, the system needs to perform equipment inspection and equipment maintenance operations.
  • the machine limit can be accurately formulated according to the product, process, step, equipment, raw material type, and batch.
  • the machine limit system control conditions can be set positively (when the batch meets the condition in the process, the batch will be controlled and the equipment cannot be operated to enter or exit the station) and reversely (contrary to the forward setting, only batches that meet the conditions can use the equipment for entry and exit operations).
  • MES obtains data through sensors, or reads and collects equipment data and stores it in designated files or other databases. At this time, when collecting equipment data, MES needs to parse equipment data from other databases or other files and switch equipment status in the MES system. Or the MES system interacts with corresponding related systems (EAP system, SCADA system) to accurately and real-time obtain equipment status and some instructions for the completion of equipment tasks.
  • EAP system EAP system, SCADA system
  • Manual mode When users correct and modify equipment, they need to manually enter the MES system to maintain data. At this time, the MES system will uniformly process the equipment status and control the equipment status during the production process.
  • Involving equipment and material business using the relationship between equipment ports and materials in the basic data module, and using the material module: performing material loading and unloading operations.
  • Involving equipment and fixture business using the relationship between the equipment port and the fixture in the basic data module, using the fixture module: performing fixture loading and unloading operations.
  • Involving batch control business Use the corresponding functions of the engineering management module, such as the Qtime function, to set the maximum time limit from entry to exit.
  • the batch will trigger the Qtime timing after entering the station. If the exit operation is not performed within the maximum time, the subsequent exit will be controlled. The maximum limit time has been exceeded. Please contact the product engineer for processing.
  • Work permit function that is, the employee equipment operation authority management module. Only when the corresponding employee has the operation permit for the equipment and the permit is valid, can the employee operate the equipment for batch processing, and then strictly control the production and put it on the production order (Manufacture order, MO).
  • step 37 the OIC client in the system controls the batch to enter the packaging stage after the batch process is completed.
  • FIG4 is a flow chart of a method for determining a process constraint strategy according to an exemplary embodiment. Referring to FIG4 , the method includes steps 41 to 42 .
  • step 41 in response to an operation of binding a process restriction policy to a target device, a drop-down menu corresponding to the target device is displayed; the drop-down menu includes at least one process restriction policy selectable by the target device.
  • step 42 in response to the operation of selecting the target process restriction strategy in the drop-down menu, the association relationship between the target device and the target process restriction strategy is determined.
  • the solution of this embodiment can pre-create a process restriction strategy and set a corresponding process restriction strategy for the target device, so as to achieve the purpose of unified processing of process restriction strategies, facilitate the flow of different batches of products between sites, and help improve production efficiency.
  • the server can store several process restriction policies.
  • Each process restriction policy has a unique identifier, which can be associated with the device to establish an association relationship between the two.
  • each process restriction policy also sets a validity period, restriction type, restriction description, restriction batch, etc.
  • the validity period of the process restriction policy includes two fields: the start time StartTime and the end time EndTime. Among them, StartTime cannot be later than EndTime.
  • the server can determine whether the process restriction policy is within the validity period based on the above start time StartTime and end time EndTime.
  • the constraint types of the process constraint strategy include: Accept and Reject.
  • Accept means that when the batch of the product passes the batch type match, it means that the process constraint strategy passes, otherwise it does not pass
  • Reject means that when the batch of the product passes the batch type match, it means that the process constraint strategy is rejected, otherwise it passes.
  • the constraint type can include two types of tables, namely, one for Accept table and one for Reject table, which are respectively used for matching the constraint type of the process constraint strategy.
  • the server can set the process restriction policy in response to the user's operation.
  • the restriction type of the process restriction policy needs to restrict the batch types including all batch type lists. You can select multiple batches by checking the checkbox (CheckBox), or you can select "All (ALL)" to take effect on all batch types.
  • the setting page of the process restriction policy is shown in Figure 5. Referring to Figure 5, the policy information list (ConstraintPolicyNameList) of the process restriction policy, the selected process restriction policy (ConstraintPolicyName), restriction type (ConstraintType) and description (Description). When selecting Accept within the restriction type (ConstraintType), you can select the corresponding batch (LotType).
  • the server may select a corresponding process restriction strategy according to the user's selection operation on the production operation platform, and create multiple restriction items for the process restriction strategy, that is, the relationship between the process restriction strategy and the strategy items is shown in FIG6 .
  • the process constraint policy may include a process constraint policy name (ConstraintPolicyName, ie, a unique identifier), a process constraint policy item name (ConstraintPolicyItemName), a process constraint policy item value (ConstraintPolicyItemValue), and a description (Description).
  • the process constraint policy can display the process constraint policy item name (ConstrintPolicyItemName) and the process constraint policy item value (ConstrintPolicyItemValue).
  • the item name can be selected through the drop-down menu, and the item drop-down content can be specially maintained in the dictionary, which can include but is not limited to the customer code (CustomerCode), factory (Factory), site (Operation), package form (PackageType), main process name (ProcessFlow), product specification name (ProductSpec), each item name can find the corresponding information in the batch or through the batch, and can be combined and compared in the subsequent batch entry verification to determine whether the batch meets the policy conditions and operate the batch to enter the station or not according to the comparison results.
  • the process constraint policy item value stores the target value that the user needs to match in text form.
  • the server can bind the process restriction policy and the equipment, that is, establish an association relationship between the target equipment and the process restriction policy.
  • the above binding operation can be implemented by a modeling tool on the user operation platform. It is understandable that the modeling tool shown in FIG8 can also be used for operations such as binding equipment, binding batches, unbinding equipment, unbinding batches, and process restriction policy maintenance.
  • system architecture of the user operation platform is shown in FIG9 .
  • the system architecture of the user operation platform includes the user operation platform, server and Oracle database.
  • the user operation platform includes the client interface, process restriction strategy creation, policy item creation, equipment binding, batch binding, enable/disable status, etc., as well as Winform+Infragistics modules.
  • the server includes QRY service, CNM service, CNX service and Spring boot+Spring MVC+Bpei modules.
  • the Oracle database includes modules such as policy information and policy history.
  • the server in response to the operation of binding a process restriction policy for a target device, displays a first drop-down menu corresponding to the target device.
  • the first drop-down menu includes at least one process restriction policy that can be selected by the target device, and the effect is shown in FIG5 .
  • the user can select a process restriction policy in the first drop-down menu as the target process restriction policy, and at this time, the server can manage the association relationship between the target device and the target process restriction policy in response to the operation of selecting the target process restriction policy in the first drop-down menu.
  • the above association relationship may include creation, update, unbinding, etc.
  • the server may process the association relationship between the target device and the target process restriction policy. For example, the server may obtain the current process restriction policy of the target device; the enabling state of the current process restriction policy includes an enabled state (Enable) or a disabled state (Disable). When the current process restriction policy is in an enabled state, the server may determine to maintain the association relationship between the target device and the target process restriction policy and fail to establish the association relationship. When the current process restriction policy is in a disabled state, the server may determine to update the association relationship between the target device and the target process restriction policy.
  • the server may obtain the current process restriction policy of the target device; the enabling state of the current process restriction policy includes an enabled state (Enable) or a disabled state (Disable).
  • the server may determine to maintain the association relationship between the target device and the target process restriction policy and fail to establish the association relationship.
  • the server may determine to update the association relationship between the target device and the target process restriction policy.
  • the server may process the association relationship between the target device and the target process restriction policy. For example, the server may query a preset association relationship table according to the device name of the target device and the target process restriction policy to determine whether there is an association relationship between the target device and the target process restriction policy. When there is no association relationship in the association relationship table, the server may create a target association relationship between the device name of the target device and the target process restriction policy, and write the above association relationship table to facilitate subsequent queries. When there is an association relationship in a disabled state (Disable) in the association relationship table, the server deletes this association relationship and recreates a target association relationship, and writes the above association relationship table to facilitate subsequent queries.
  • a disabled state Disable
  • the server may establish a target association relationship between the target device and the target process restriction policy, and write the above association relationship table to facilitate subsequent queries, and may also generate a prompt message that the policy binding is successful.
  • the server can obtain the device name of the target device selected by the user on the workbench and the selected target process constraint policy, and store the device name (MachineName) of the target device in the policy information list (ConstraintPolicyList), as shown in FIG11 .
  • FIG. 10 illustrates the constraint policy device interface (ConstraintPolicyMachineView), where the left side of the interface is the device list (Machine Type), which includes the device name (MachineName), device type (MachineType), device name details (DetailMachineName), device group name (MachineGroupName) and description (Description), etc.
  • the right side of the interface is the conditions (Conditions), including the process constraint policy name (ConstraintPolicyName), start time (StartTime), end time (StartTime), constraint type (ConatraintType), batch type (LotType) and description (Description), as well as the buttons set in the lower right corner of the interface, including: Enable, Disable, Deassign, Assign and Exit. Among them, Enable means enabling the association relationship, Disable means disabling the association relationship, Deassign means unbinding the association relationship, and Assign means binding the association relationship.
  • the server can parse the above policy information list, compare the device name (MachineName) with the device name list (ContraintPolicyMachine) in the database, that is, the list of associations between the device and the process restriction policy, and query whether the above target device has been associated with a process restriction policy. If it has been associated with a process restriction policy and the association is enabled, the user can reselect the device, that is, the binding operation has failed. If no association is found or there is an association and it is disabled, the server can create a new association or delete the current association and create a new one.
  • the server may process the association between the target device and the target process restriction policy. For example, the user may click on the target device, and the first drop-down menu of the target device is displayed; then, the user may select the unbinding function in the first drop-down menu to unbind the current process restriction policy of the target device in a disabled state.
  • the server may obtain the enablement state of the target device in response to the unbinding operation of the current process restriction policy in the drop-down menu, and the enablement state includes an enabled state or a disabled state.
  • the server can obtain the device name of the target device selected by the user on the workbench and the selected target process restriction policy, and store the device name (MachineName) of the target device in the policy information list (ConstraintPolicyList).
  • the server can parse the above policy information list, compare the device name (MachineName) with the device name list (ContraintPolicyMachine) in the database, that is, the list of associations between the device and the process restriction policy, and query whether the above target device has been associated with a process restriction policy. If a process restriction policy has been associated and the association is enabled, the server determines that the unbinding has failed; if a process restriction policy has been associated and the association is disabled, the server determines that the unbinding has been successful.
  • the server can bind the target device and the target process restriction policy according to the user's binding operation (Assign) to obtain the target association relationship; the server can adjust the above target association relationship to an enabled state (Enable). Under some conditions, the server can adjust the above target association relationship to a disabled state (Disable). In other words, the server can update the enable state of the current process restriction policy of the target device in response to the activation operation of the current process restriction policy in the first drop-down menu. Finally, the server can also unbind the target device and the target process restriction policy according to the user's unbinding operation (Deassign).
  • the server obtains a policy information list including at least one process restriction policy.
  • the user can select a policy item in the policy information list, and the server can display a policy item list of each process restriction policy in response to the selection operation of each process restriction policy. Afterwards, the user can process the policy item in the policy item list, and the server can process the policy item in the policy item list in response to the processing operation of the policy item in the policy item list.
  • the server can set some batches as whitelists according to the user's operation, that is, no restrictions are imposed on the selected batches.
  • the policy item information list can be displayed; when a restriction exclusion list in the policy item information list is selected, the restriction exclusion list can include multiple selectable batches, and when at least one batch is selected, an exclusion association relationship between the process restriction policy and at least one batch can be established. It should be noted that the relationship between the process restriction policy and the batch can be one-to-one or many-to-many.
  • the server can call the process restriction policy verification algorithm, obtain the batch name (LotName) of the newly entered batch, and query the ConstraintPolicyExcept table.
  • the ConstraintPolicyExcept table it means that the batch needs to be verified for the process restriction policy; when there is an exclusion association in the ConstraintPolicyExcept table, it means that the batch does not need to be verified for the process restriction policy. In this way, this embodiment can improve production efficiency by flexibly setting the restriction policy of the batch.
  • this embodiment further provides a device for determining a process restriction strategy, as shown in FIG14 , comprising:
  • the drop-down unit display module 141 is used to display a drop-down menu corresponding to the target device in response to an operation of binding a process restriction policy to the target device; the drop-down menu includes at least one process restriction policy that can be selected by the target device;
  • the association relationship determination module 142 is used to determine the association relationship between the target device and the target process restriction strategy in response to the operation of selecting the target process restriction strategy in the drop-down menu.
  • the association relationship determination module includes:
  • a current strategy acquisition submodule used to acquire the current process restriction strategy of the target device; the enabling state of the current process restriction strategy includes an enabled state or a disabled state;
  • an association relationship maintaining submodule used for determining to maintain the association relationship between the target device and the target process restriction strategy and to fail to establish the association relationship when the current process restriction strategy is in an enabled state
  • the association relationship updating submodule is used to determine to update the association relationship between the target device and the target process restriction strategy when the current process restriction strategy is in a disabled state.
  • the association relationship determination module includes:
  • An association query submodule used to query a preset association table according to the device name of the target device and the target process restriction strategy to determine whether there is an association relationship between the target device and the target process restriction strategy;
  • a target relationship creation submodule used for creating a target association relationship between the device name of the target device and the target process restriction strategy when no association relationship exists in the association relationship table;
  • a target relationship reconstruction submodule used for deleting a disabled relationship and recreating a target relationship when there is a disabled relationship in the relationship table
  • the target relationship establishment submodule is used to establish a target association relationship between the target device and the target process restriction strategy when there is an association relationship in an enabled state in the association relationship table, and generate prompt information of successful strategy binding.
  • the association relationship determination module includes:
  • the current policy unbinding submodule is used to unbind the current process restriction policy of the target device in a disabled state in response to an unbinding operation on the current process restriction policy in the drop-down menu.
  • the current policy unbinding submodule includes:
  • An enabling state acquiring unit used to acquire the enabling state of the association relationship of the target device, wherein the enabling state includes an enabled state or a disabled state;
  • an unbinding failure unit configured to determine that the unbinding fails when the association relationship is in an enabled state
  • the unbinding success unit is used to determine that the unbinding is successful when the association relationship is in a disabled state.
  • the association relationship determination module includes:
  • the enablement status update submodule is used to update the enablement status of the current process constraint policy of the target device in response to an activation operation on the current process constraint policy in the drop-down menu.
  • the device further comprises:
  • An information list acquisition module used to acquire a strategy information list including at least one process restriction strategy
  • a strategy item display module used for displaying a strategy item list of each process restriction strategy in response to a selection operation on each process restriction strategy
  • the policy item processing module is used to process the policy items in the policy item list in response to a processing operation on the policy items in the policy item list.
  • the policy item processing module includes:
  • a batch acquisition submodule for acquiring a plurality of batches that can be associated in response to a selection operation on an excluded item in the policy item list;
  • the exclusion relationship establishment submodule is used to establish an exclusion association relationship between the process restriction strategy and the at least one batch in response to a registration operation on the at least one batch.
  • the device embodiment shown in this embodiment matches the content of the above method embodiment, and the content of the above method embodiment can be referred to, which will not be repeated here.
  • a server is also provided, referring to FIG. 15 , comprising:
  • Memory 152 and processor 151 are examples of processors 152 and processor 151;
  • the memory 152 is used to store computer programs executable by the processor 151;
  • the processor 151 is used to execute the computer program in the memory 152 to implement the above method.

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Abstract

本公开是关于一种工艺限制策略确定方法和装置、服务器。方法包括：响应于为目标设备绑定工艺限制策略的操作，显示目标设备对应的下拉菜单；下拉菜单中包括目标设备可选用的至少一项工艺限制策略（41）；响应于选择下拉菜单中的目标工艺限制策略的操作，确定目标设备和目标工艺限制策略之间的关联关系（42）。本实施例的方案可以预先创建工艺限制策略，并为目标设备设置相应的工艺限制策略，达到统一处理工艺限制策略的目的，方便不同批次产品在站点之间流转，有利于提高生产效率。

Description

工艺限制策略确定方法和装置、服务器、存储介质 技术领域
本公开涉及数据处理技术领域，尤其涉及一种工艺限制策略确定方法和装置、服务器、存储介质。
背景技术
目前，在生产半导体产品的过程中，会分成多个批次进行生产半导体产品。对于每个批次可能使用不同的工艺限制策略，现有技术中的工艺限制策略可能涉及多个维度，例如客户编码、不同工厂、站点、主流程、封装形式、产品规格等等。也就是说，现有技术中通常采用灵活的工艺限制策略来降低误加工概率。然而，现有技术中各个站点所生产的批次和使用设备可能不同，需要为每个站点定制化不同的限制，导致无法做到统一处理，从而给不同批次之间流转控制增加了困难，降低生产效率。
发明内容
本公开提供一种工艺限制策略确定方法和装置、服务器，以解决相关技术的不足。
根据本公开实施例的第一方面，提供一种工艺限制策略确定方法，包括：
响应于为目标设备绑定工艺限制策略的操作，显示所述目标设备对应的下拉菜单；所述下拉菜单中包括所述目标设备可选用的至少一项工艺限制策略；
响应于选择所述下拉菜单中的目标工艺限制策略的操作，确定所述目标设备和所述目标工艺限制策略之间的关联关系。
可选地，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
获取所述目标设备的当前工艺限制策略；所述当前工艺限制策略的使能状态包括启用状态或者禁用状态；
当所述当前工艺限制策略处于启用状态时，确定保持所述目标设备和所述目标工艺限制策略存在的关联关系且建立关联关系失败；
当所述当前工艺限制策略处于禁用状态时，确定更新所述目标设备和所述目标工艺限制策略之间的关联关系。
可选地，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
根据所述目标设备的设备名称和所述目标工艺限制策略查询预设的关联关系表，以确定所述目标设备和所述目标工艺限制策略是否存在关联关系；
当所述关联关系表中不存在关联关系时，创建所述目标设备的设备名称和所述目标工艺限制策略之间的目标关联关系；
当所述关联关系表中存在处于禁用状态的关联关系时，删除本条关联关系并重新创建一条目标关联关系；
当所述关联关系表中存在处于启用状态的关联关系时，建立所述目标设备和所述目标工艺限制策略之间的目标关联关系，并生成策略绑定成功的提示信息。
可选地，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
响应于对所述下拉菜单中当前工艺限制策略的解绑操作，解绑所述目标设备处于禁用状态的当前工艺限制策略。
可选地，解绑所述目标设备处于禁用状态的当前工艺限制策略，包括：
获取所述目标设备的关联关系的使能状态，所述使能状态包括启用状态或者禁用状态；
当所述关联关系处于启用状态时，确定解绑失败；当所述关联关系处于禁用状态时确定解绑成功。
可选地，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
响应于对所述下拉菜单中的当前工艺限制策略的激活操作，更新所述目标设备的当前工艺限制策略的使能状态。
可选地，所述方法还包括：
获取包含至少一个工艺限制策略的策略信息列表；
响应于对各个工艺限制策略的选择操作，显示所述各个工艺限制策略的策略项列表；
响应于对所述策略项列表中策略项的处理处理操作，处理处理所述策略项列表中的策略项。
可选地，处理处理所述策略项列表中的策略项，包括：
响应于对所述策略项列表中排除项的选择操作，获取可关联的多个批次；
响应于对至少一个批次的注册操作，建立所述工艺限制策略和所述至少一个批次的排除关联关系。
根据本公开实施例的第二方面，提供一种工艺限制策略确定装置，所述装置包括：
下拉单元显示模块，用于响应于为目标设备绑定工艺限制策略的操作，显示所述目标设备对应的下拉菜单；所述下拉菜单中包括所述目标设备可选用的至少一项工艺限制策略；
关联关系确定模块，用于响应于选择所述下拉菜单中的目标工艺限制策略的操作，确定所述目标设备和所述目标工艺限制策略之间的关联关系。
可选地，所述关联关系确定模块包括：
当前策略获取子模块，用于获取所述目标设备的当前工艺限制策略；所述当前工艺限制策略的使能状态包括启用状态或者禁用状态；
关联关系保持子模块，用于当所述当前工艺限制策略处于启用状态时，确定保持所述目标设备和所述目标工艺限制策略存在的关联关系且建立关联关系失败；
关联关系更新子模块，用于当所述当前工艺限制策略处于禁用状态时，确定更新所述目标设备和所述目标工艺限制策略之间的关联关系。
可选地，所述关联关系确定模块包括：
关联关系查询子模块，用于根据所述目标设备的设备名称和所述目标工艺限制策略查询预设的关联关系表，以确定所述目标设备和所述目标工艺限制策略是否存在关联关系；
目标关系创建子模块，用于当所述关联关系表中不存在关联关系时，创建所述目标设备的设备名称和所述目标工艺限制策略之间的目标关联关系；
目标关系重建子模块，用于当所述关联关系表中存在处于禁用状态的关联关系时，删除本条关联关系并重新创建一条目标关联关系；
目标关系建立子模块，用于当所述关联关系表中存在处于启用状态的关联关系时，建立所述目标设备和所述目标工艺限制策略之间的目标关联关系，并生成策略绑定成功的提示信息。
可选地，所述关联关系确定模块包括：
当前策略解绑子模块，用于响应于对所述下拉菜单中当前工艺限制策略的解绑操作，解绑所述目标设备处于禁用状态的当前工艺限制策略。
可选地，所述当前策略解绑子模块，包括：
使能状态获取单元，用于获取所述目标设备的关联关系的使能状态，所述使能状态包括启用状态或者禁用状态；
解绑失败单元，用于当所述关联关系处于启用状态时，确定解绑失败；
解绑成功单元，用于当所述关联关系处于禁用状态时确定解绑成功。
可选地，所述关联关系确定模块包括：
使能状态更新子模块，用于响应于对所述下拉菜单中的当前工艺限制策略的激活操作，更新所述目标设备的当前工艺限制策略的使能状态。
可选地，所述装置还包括：
信息列表获取模块，用于获取包含至少一个工艺限制策略的策略信息列表；
策略项显示模块，用于响应于对各个工艺限制策略的选择操作，显示所述各个工艺限制策略的策略项列表；
策略项处理模块，用于响应于对所述策略项列表中策略项的处理处理操作，处理处理所述策略项列表中的策略项。
可选地，所述策略项处理模块包括：
批次获取子模块，用于响应于对所述策略项列表中排除项的选择操作，获取可关联的多个批次；
排除关系建立子模块，用于响应于对至少一个批次的注册操作，建立所述工艺限制策略和所述至少一个批次的排除关联关系。
根据本公开实施例的第三方面，提供一种服务器，包括：
存储器与处理器；
所述存储器用于存储所述处理器可执行的计算机程序；
所述处理器用于执行所述存储器中的计算机程序，以实现如第一方面所述的方法。
根据本公开实施例的第四方面，提供一种非暂态计算机可读存储介质，当所述存储 介质中的可执行的计算机程序由处理器执行时，以实现如第一方面所述的方法。
本公开的实施例提供的技术方案可以包括以下有益效果：
本公开实施例提供的方案中可以响应于为目标设备绑定工艺限制策略的操作，显示所述目标设备对应的下拉菜单；所述下拉菜单中包括所述目标设备可选用的至少一项工艺限制策略；然后，响应于选择所述下拉菜单中的目标工艺限制策略的操作，确定所述目标设备和所述目标工艺限制策略之间的关联关系。这样，本实施例的方案可以预先创建工艺限制策略，并为目标设备设置相应的工艺限制策略，达到统一处理工艺限制策略的目的，方便不同批次产品在站点之间流转，有利于提高生产效率。
应当理解的是，以上的一般描述和后文的细节描述仅是示例性和解释性的，并不能限制本公开。
附图说明
此处的附图被并入说明书中并构成本说明书的一部分，示出了符合本公开的实施例，并与说明书一起用于解释本公开的原理。
图1是根据一示例性实施例示出的一种半导体制造执行系统的框图。
图2是根据一示例性实施例示出的一种半导体制造执行系统的应用架构图。
图3是根据一示例性实施例示出的一种半导体制造执行系统的操作流程图。
图4是根据一示例性实施例示出的一种工艺限制策略确定方法的流程图。
图5是根据一示例性实施例示出的一种创建工艺限制策略界面的示意图。
图6是根据一示例性实施例示出的一种工艺限制策略和策略项的关系图。
图7是根据一示例性实施例示出的一种工艺限制策略项界面的示意图。
图8是根据一示例性实施例示出的一种用户操作平台的功能框图。
图9是根据一示例性实施例示出的一种用户操作平台的架构图。
图10是根据一示例性实施例示出的一种工艺限制策略设备界面的示意图。
图11是根据一示例性实施例示出的一种从绑定到解绑关联关系的流程图。
图12是根据一示例性实施例示出的一种工艺限制策略排除界面的示意图。
图13是根据一示例性实施例示出的一种设置排除批次的示意图。
图14是根据一示例性实施例示出的一种工艺限制策略确定装置的框图。
图15是根据一示例性实施例示出的一种服务器的框图。
具体实施方式
这里将详细地对示例性实施例进行说明，其示例表示在附图中。下面的描述涉及附图时，除非另有表示，不同附图中的相同数字表示相同或相似的要素。以下示例性所描述的实施例并不代表与本公开相一致的所有实施例。相反，它们仅是与如所附权利要求书中所详述的、本公开的一些方面相一致的装置例子。需要说明的是，在不冲突的情况下，下述的实施例及实施方式中的特征可以相互组合。
为解决上述技术问题，本公开实施例提供了一种工艺限制策略确定方法和装置、服务器、非暂态计算机可读存储介质。上述工艺限制策略确定方法可以适用于半导体制造执行系统。该半导体制造执行系统用于半导体封测全流程制造管理，执行生产订单、跟踪设备资源(如载具、物料等)的实时状态至完成半导体产品，达到对工厂的信息共享与流程自动化实施的效果。当工厂发生实时事件时，上述半导体制造执行系统会对该事件及时作出反应、报告，并用当前数据指导用户处理该事件，从而最大限度地提高生产效率与良率，有利于降低生产成本以及改善生产管理。并且，上述半导体制造执行系统采用模块化设计，可满足不同封测工艺技术生产需求，具有极好的灵活性与扩展性，从而实现最大的投入产出比，达到工业4.0要求的高灵活性和个性化生产模式。
图1是根据一示例性实施例示出的一种半导体制造执行系统的框图。参见图1，一种半导体制造执行系统包括：基础数据模块、工艺流程模块、生产计划模块、在制品模块、工程管理模块、Recipe模块、设备模块、机限模块、载具模块、物料模块、治具模块、包装模块。
在一实施例中，基础数据模块可以是一个统一的基础数据模型平台，为半导体制造执行系统提供基础数据建模功能，包括但不限于：工厂建模、设备建模、系统状态建模、封装形式建模、用户权限建模、recipe(不同半导体器件需要不同的程式、配方或者菜单)基础数据建模、物料基础数据建模、工艺工步流程建模、策略建模、数据采集基础数据建模和警报基础数据建模。可理解的是，该基础数据模型作为一个标准框架，为用户提供了所需的基础通用功能，并提供了一系列的自定义扩展设置，如统一的命名规范、统一的数据枚举类型和统一的业务SQL管理，有利于应用程序的快速构建；交叉多应用程序中对象的定义标准化、支持多语种和多单位，更加灵活，扩展性更强和更灵活。
本实施例中，工厂建模功能用于支持工厂基础数据的维护、支持多工厂模式和支持工厂下区域的创建。
本实施例中，设备建模功能用于支持设备主数据的创建和设备port口数据维护。
本实施例中，系统状态建模功能用于支持批次状态维护、支持设备状态维护、支持物料状态维护、支持载具状态维护和支持治具状态维护等等。
本实施例中，封装形式建模用于用来维护封装相关属性数据，用于统一维护管理不同规格的封装方式。
本实施例中，用户权限建模用于支持用户、用户组和用户角色的创建和维护，支持用户菜单和用户操作界面密码校验的维护。
本实施例中，recipe基础数据建模用于支持工艺菜单数据的创建和维护，支持recipe设备数据关系的维护。
本实施例中，物料基础数据建模用于支持物料基础数据的创建和维护
本实施例中，工艺工步流程建模用于支持工步、工序、工段、流程的基础数据的创建和维护，支持流程的可视化界面编辑，支持分支流程的创建和维护，支持返工流程的创建和维护。
本实施例中，策略建模用于支持产品级、工艺级、工步级流程建模，以方便半导体制造执行系统根据不同的策略配置在实际生产过程中选择不同的设备和recipe进行业务操作。其中，策略是指条件组合，包括工艺，设备等数据组成的一个有效条件。例如，生产策略是指系统生产时的条件组合，包括工艺，设备等数据组成的一个有效条件；工艺策略是指工艺的组合条件；限制策略是指不允许操作的组合条件。
本实施例中，数据采集基础数据建模用于支持数据采集明细项的创建和维护，支持数据采集规则的维护。
本实施例中，警报基础数据建模用于支持警报系统信息维护，支持警报触发条件进行维护管理，支持警报触发后续动作进行维护管理。
在一实施例中，工艺流程模块可以允许用户定义产品及其对应的工艺流程，包括每个工步类型及相关流程控制策略，从而为半导体制造执行系统提供流程管理规范。其中，上述工艺流程包括工艺限制流程，关于工艺限制流程的方案会在图4所示的方案中详细描述。
以版本控制为例，工艺流程模块可以提供一套完整的版本控制机制，系统内所有的激活在制的流程必须严格遵守这一版本控制系统，可以避免生产工艺数据出现错误，从而避严重事故。以流程定义为例，工艺流程模块可以支持多路径(Multi-path)和返工，并且现场作业时可基于预先设定条件自动进行路径选择。工艺流程模块还可以支持各种产品流程规则控制，可根据产品、流程的条件进行不同的流程控制，上述条件可以细分工步级、工序级、流程级、产品级和批次级等。
本实施例中，工艺工步流程建模功能用于支持工步、工序、工段和流程的基础数据的创建和维护，支持流程的可视化界面编辑，支持分支流程的创建和维护，支持返工流程的创建和维护。
本实施例中，产品流程配置功能用于根据不同产品配置不同的工艺流程，同产品同流程下可根据不同的策略选择不同的recipe和设备。
在一实施例中，生产计划模块可以对生产计划订单、生产工单进行管理。例如，用户可以新建生产计划订单，再根据上述生产计划新建生产工单，并且可以设置对应计划和工单的优先级以及生产计划和生产工单的计划时间等相关信息，方便生产制造过程进行订单完成情况的跟踪。
本实施例中，计划订单功能用于创建和维护不同工厂的计划订单，控制优先级和最后交货时间。
本实施例中，工单功能用于跟踪不同的计划创建不同的工单，可指定工单上特殊的属性(优先级、所有者、工艺备注等)。
在一实施例中，在制品模块可以对在制品进行加工管理，指导操作员(即用户)按照预先设定的工艺要求加工产品，并对加工信息进行详细的跟踪和记录。其中，最主要的作业管理功能允许跟踪多批次同时处理，提供批次的历史追溯。除常用的创建批次(CreateLot)进站(Track In)/出站(Track Out)外，其它功能包括：分批(Split)/合批(Merge)、暂停(Hold)/释放(Relase)、跳步(Skip)/未来动作(Future Action)、站内返工(Internal-rework)/站外返工(External-rework)，批次报废，批次取消报废，批次指定载具，特殊业务分批出站，合批出站，多芯键合进站，编测一体进出站等。
本实施例中，WIP功能用于主要针对批次在制业务的管理，包括以上所描述的所有业务。查询功能用于提供在制品的查询。
在一实施例中，工程管理模块可以对工程相关业务进行管理，包括但不限于： 上岗证管理、QTime管理、BOM管理、流程卡管理和批次预约等功能。其中，
上岗证管理功能用于提供给用户配置上岗证相关信息，并设置失效时间，用于确定用户是否具有对应的权限。
QTime管理功能用于支持QTime管理，设置QTime规则，并在批次过站时进行规则卡控。其中QTime是指工艺上一步一步到下一步跟踪的等待时间，有最大时间或最小时间，半导体工艺中不同工艺步骤之间所需的时间。以1-2两个步骤举例，Q-Time就有8种情况：
a,第1步进站-第1步出站的最大时间；
b,第1步进站-第1步出站的最小时间；
c,第1步进站-第2步进站的最小时间；
d,第1步进站-第2步进站的最大时间；
.....；
g,第1步出站-第2进站最大，最小时间；
h,第1步出站-第2出站最大，最小时间。
BOM管理功能用于支持BOM的维护，用于控制设备物料上机的物料校验。其中，BOM为Bill of Material，即物料清单，是指从第一步到最后一步工序加工一个半导体产品出来所需要使用的物料名称和对应的物料数量。
流程卡管理功能用于支持系统内流程卡的创建和维护，可根据不同的流程卡生成对应的流程卡信息，用于生产流转纸质凭证。
批次预约功能用于支持批次预约生产功能。
在一实施例中，Recipe模块可以创建和更新工艺菜单，并包含所有工艺流程的工艺菜单信息。其中，在创建、激活、冻结、取消等功能时，工艺菜单的设置使用受版本控制。该Recipe模块支持逻辑工艺菜单和实际工艺菜单(加工参数)的设置，支持根据工艺条件设定工艺菜单，以及支持根据前层量测结果自动选择工艺菜单，支持设备和工艺菜单关系的维护。
在一实施例中，设备模块可以提供设备基础信息定义，提供设备状态模型的建立与追踪管理，支持设备权限管理、设备的点检、维护保养和报修维修流程的管理。设 备基础数据维护功能用于维护设备基础数据。设备点检功能用于支持设备点检项目维护，支持设备定期点检控制。设备维保功能用于支持设备维护和保养周期的设置，并对设备进行维保的控制。设备报修功能用于支持设备报修功能。设备维修功能用于支持设备维修流程跟踪。设备台账功能用于支持设备相关档案数据的查询。
在一实施例中，机限模块可以提供半导体制造执行系统机限的控制功能模块、支持设置不同场景下的限制条件，用于卡控批次是否能支持生产。
根据设备设置：可根据设备的具体情况设置某场景下的规则，当批次在生产制造中遇到该规则则无法通过该机限生产。
根据产品设置：可根据产品的具体情况设置某场景下的规则，当批次在生产制造中遇到该规则则无法通过该机限生产。
根据工艺流程设置：可根据工艺流程的具体情况设置某场景下的规则，当批次在生产制造中遇到该规则则无法通过该机限生产。
正反项设置：可设置正向规则，比如该规则下才允许生产，反项规则，该条件下不允许生产。
在一实施例中，半导体制造执行系统选用CS架构设计，基于Client-Server(C/S，客户端-服务端)架构模式开发，以保证系统稳定性，界面操作流畅性，提升用户的体验度。其中，服务端负责数据的管理，客户端负责完成与用户的交互任务。客户端模块分为两部分：一部分为基础数据建模，命名为FactoryModeler(Modeler)，另外一部分用于用户的操作交互界面，命名为Operator Interface Client(OIC)。前端选用C#语言winform框架，服务器端采用Java语言，采用sping boot 2.x框架进行开发。前后端通信的数据使用XML格式交互，对应消息发布订阅的处理选用Tibco Rendezvous(Tibco RV)，数据库选取为Oracle 19C，应用架构如图2所示。
结合图1和图2，半导体制造执行系统中系统与模块的对应关系包括：
在制程过程中实现工艺制程卡控的功能模块：OIC系统中工程管理模块，机限管理模块。
在制程过程中实现记录追溯的功能模块：OIC系统中生产计划模块，在制品模块，批次模块，包装模块。
在制程过程中辅助的关键功能模块：OIC系统中设备模块，工艺菜单模块，工 艺流程模块，物料模块，载具模块，载具模块。
在制程过程中核心数据支撑模块：FactoryModeler系统中基础数据模块。
继续参见图1～图2，图3是根据一示例性实施例示出的一种半导体制造执行系统整体操作的流程图，参见图3，包括步骤31～步骤37：
在步骤31中，系统中FactoryModeler客户端响应于与用户的交互操作，通过基础数据模块创建基础数据。
1创建工厂信息；2创建用户信息；3创建用户组信息；4创建用户组菜单权限；5创建设备类型数据；6创建设备状态数据；7创建设备数据；8创建设备组信息；9创建设备Port信息；10创建治具类型信息；11创建治具状态信息；12创建治具信息；13创建载具类型信息；14创建载具状态信息；15创建载具信息；16创建原材料类型信息；17创建原材料状态信息；18创建批次类型信息；19创建批次状态信息；20创建仓库信息；21创建库位信息；22创建货架信息；23创建产品类型信息；24创建产品信息；25创建产品包装规格信息；26创建工步信息；27创建子流程信息(多个工步串联成子流程)；28创建主流程信息(多个子流程串联成主流程)；29创建Recipe信息。
在步骤32中，FactoryModeler客户端通过基础数据模块将基础信息数据串联成基础的业务底层数据。
1创建设备和recipe关系，以支撑工艺制程中使用设备加工时选择设备对于recipe加工。
2创建产品和流程的关系，以支撑制程中产品工艺流程流转。以下port说明：(1)如果涉及设备和物料关系的port，port指设备上的物料上料口；(2)如果涉及设备和治具关系的port，port指设备上的安装治具的设备位置，又称站位。
3创建设备port和物料类型关系，以支撑后续物料上机业务。
4创建设备port和治具类型关系，以支撑后续治具上机业务。
5创建物料类型和载具类型绑定，以支撑后续载具绑定批次时根据批次的原材料类型选择对于的载具。
6生产策略配置：产品下该流程下该工步设置对于的设备及关联出设备recipe。其中，生产策略包括3种模式：产品+工艺+工步模式，工艺+工步模式和工步模式。
在生产过程中，当产品、工艺和工步均能匹配产品+工艺+工步模式时，使用该 模式下配置的设备和recipe加工。当产品、工艺或者工步不能匹配产品+工艺+工步模式时，匹配工艺+工步模式；当匹配上工艺+工步模式时，使用该工艺+工步模式下配置的设备和recipe加工；当不能匹配工艺+工步模式时，继续去匹配工步模式；如能匹配工步模型，使用该工步模式下的设备和recipe；如不能匹配则在制程中会进行卡控，不能选择合适的设备加工。
在步骤33中，系统中OIC客户端可以响应于与用户的交互操作，通过生产计划模块进行生产计划创建和计划执行操作。
1系统录入生产计划，例如一段时间内的某产品的计划产出量，计划开始时间，计划结束时间，优先级和负责人。
2计划执行：创建工单，根据车间的实际库存和产能进行制定工单信息，例如原计划订单号，工单号，工单产品来着计划订单产品，工单数量小于计划订单数据，优先级等相关信息的创建。
在步骤34中，系统中OIC客户端通过在制品模块和批次管理模块进行生产制造制程。
1创建批次：使用批次模块的批次创建，根据工单信息进行批次的生成(批次创建)，完成批次的创建。
2批次加工：使用在制品模块和批次模块的进站，出站操作进行批次操作
可理解的是，批次相关业务包括使用在制品模块和批次模块中的功能模块，如批次暂停，批次取消暂停，批次报废，批次取消报废，分批，合批，批次批量进站，批次批量出站进行工艺制程业务支持等。
在步骤35中，系统中OIC客户端通过在制品模块的批次出站功能控制批次出站或者使用载具模块的载具绑定功能进行载具绑定操作。
批次出站绑定载具：批次在进行出站操作的时候，选择载具信息，进行载具绑定。载具绑定功能进行载具绑定：进入在载具绑定功能界面，选择批次信息，选择需要绑定的载具信息，点击绑定进行载具绑定。涉及载具相关业务：载具绑定之前需要进行载具清洗，工艺限制策略确定过程中涉及到：载具暂停，载具取消暂停，载具报废，载具取消报废等场景的使用。
在步骤36中，系统中OIC客户端通过在制品模块的批次进出站进行批次制程管 理。其中制程包括如下工艺段：切割-贴片-键合-封装-测试。
本步骤中，制程过程中：涉及到工艺相关的业务，使用工艺流程管理模块：批次在进行进站出站操作的工艺路线，严格按照工艺流程管理模块设置的工艺流程节点进行加工生产。
涉及到recipe相关的业务，使用设备进行加工，使用工艺菜单管理模块：设备根据配置的基础数据设备和recipe关系，及其结合生产策略进行选择对于的recipe进行加工生产。
涉及到设备模块的业务：设备需要定期点检和维护保养，因此批次在选择设备进行加工的同时，设备自身也会进行设备的一系列管理，如果设备到期未点检和未保养，该设备无法加工批次进行生产。因此系统需要进行设备点检和设备维保操作。
同时批次在进站操作的同时除对设备状态(IDEL，RUN状态才能加工批次)进行卡控外，还有许多设备的限制，以下机限管理模块：机限可以根据产品，流程，工步，设备，原材料类型，批次进行精确制定机限系统卡控条件，卡控条件可以正向设置(批次在制程中满足该条件后，会进行批次卡控无法操作设备进出站)，反向设置(与正向设置相反，只有满足条件的批次才能使用该设备进行进出站操作)。
本步骤中，设备在做维护和保养的同时，也需要监控设备状态，通常工厂分为手动和自动两种模式：
自动模块：MES通过传感器获取数据，或者会读取对设备数据进行收集存放在指定的文件内或其他数据库中，此时mes在做设备数据收集时，需要从其他数据库或者其他文件中解析设备数据并在MES系统中切换设备状态。或者MES系统和对应的相关性的系统(EAP系统，SCADA系统)进行数据交互，准确实时的获取设备状态，及其一些设备任务执行完成的指令。
手动模式：用户在修正和修改设备时，需要手动进入MES系统进行数据维护，此时MES系统会对设备状态进行统一处理，对于生产制程中进行设备状态的卡控。
涉及到设备物料业务：使用基础数据模块中的设备port和物料的关系，使用物料模块：进行物料上机，物料下机操作业务。
涉及到设备治具业务：使用基础数据模块中的设备port和治具的关系，使用治具模块：进行治具上机，治具下机操作业务。
涉及到批次控制业务：使用工程管理模块对应的功能，例如：Qtime功能，设置进站到出站的最大时间限制，批次在进站后触发Qtime计时，如果超过最大时间没有进行出站操作，后续出站会对批次进行卡控已超过最大限制时间，请联系产品工程师处理。
上岗证功能：即员工操作设备权限管理模块，只有对应员工有该设备的操作证，并且证件有效期未过期，员工才能操作该设备进行批次加工，进而严格卡控生产，放在生产工单(Manufacture order，MO)。
在步骤37中，系统中OIC客户端在批次制程结束后控制批次进入包装环节。
使用包装管理模块：进行批次盒码生成和对应箱码生成，生成后进行扫描箱号入库。
基于上述半导体制造执行系统，本公开实施例还提供的一种工艺限制策略确定方法，图4是根据一示例性实施例示出的一种工艺限制策略确定方法的流程图。参见图4，包括步骤41～步骤42。
在步骤41中，响应于为目标设备绑定工艺限制策略的操作，显示所述目标设备对应的下拉菜单；所述下拉菜单中包括所述目标设备可选用的至少一项工艺限制策略。
在步骤42中，响应于选择所述下拉菜单中的目标工艺限制策略的操作，确定所述目标设备和所述目标工艺限制策略之间的关联关系。
这样，本实施例的方案可以预先创建工艺限制策略，并为目标设备设置相应的工艺限制策略，达到统一处理工艺限制策略的目的，方便不同批次产品在站点之间流转，有利于提高生产效率。
在一实施例中，服务端可以存储若干个工艺限制策略。其中，各个工艺限制策略拥有唯一的标识，该标识可以与设备进行关联即建立两者之间的关联关系。并且，各个工艺限制策略还设置有效期、限制类型、限制描述、限制批次等。
以有效期为例，工艺限制策略的有效期包括两个字段：开始时间StartTime与结束时间EndTime。其中，StartTime不能晚于EndTime。在生产过程中，服务器可以根据上述开始时间StartTime与结束时间EndTime来确定工艺限制策略是否位于有效期内。
以限制类型(ConstraintType)为例，工艺限制策略的限制类型包括：通过(Accept)和拒绝(Reject)。其中，通过(Accept)是指产品的批次通过批次类型匹配时说明该工艺限制策略通过，否则不通过；拒绝(Reject)是指产品的批次通过批次类型匹配时 说明该工艺限制策略被拒绝，否则通过。可理解的是，限制类型可以包括两个类型的表格即一个用于Accept表格和一个用于Reject表格，分别用于工艺限制策略的限制类型的匹配。
本实施例中，服务器可以响应于用户的操作来设置工艺限制策略。例如，工艺限制策略的限制类型需要限制的批次类型包括所有的批次类型列表，可通过勾选选择框(CheckBox)的方式选择多个批次，也可以选择“全部(ALL)”对所有批次类型生效。工艺限制策略的设置页面如图5所示。参见图5，工艺限制策略的策略信息列表(ConstraintPolicyNameList)，所选择的工艺限制策略(ConstraintPolicyName)、限制类型(ConstraintType)和描述(Description)。当选择限制类型(ConstraintType)内的通过(Accept)时，可以选择对应的批次(LotType)。
本实施例中，关于限制策略类型的具体描述，包括Accept和Reject描述见表1。
表1限制类型的描述
限制类型(ConstraintType) 描述(Description)
Accept 满足ConstraintPolicy的Lot能加载到设备
Reject 满足ConstraintPolicy的Lot不能加载到设备
继续参见图5，限制类型的限制类型(ConstraintType)为通过(Accept)时，该通过(Accept)对应的批次(LotType)包括Develop、Dummy、Engineer、OQA等，此时可以选择其中的一个或者全部(ALL)，再选择确认按键(Confirm)。或者不选择，直接选择退出按键(Exit)。
继续参见图5，工艺限制策略的关键字描述如表2所示。
表2工艺限制策略的关键点描述
Figure PCTCN2022128773-appb-000001
Figure PCTCN2022128773-appb-000002
在一实施例中，服务器可以根据用户在生产操作平台的选择操作，选择相应的工艺限制策略，并为该工艺限制策略创建多个限制项，即工艺限制策略与策略项的关系如图6所示。
参见图6和图7，工艺限制策略可以包括工艺限制策略名称(ConstraintPolicyName即唯一标识)、工艺限制策略项名称(ConstraintPolicyItemName)、工艺限制策略项值(ConstraintPolicyItemValue)、描述(Description)。
继续参见图7，当选择已维护的工艺限制策略的策略信息列表(ConstraintPoliceList)内的某一个工艺限制策略时，可以显示该工艺限制策略的如图8右侧所示的信息列表，方便用户确认该策略的详细信息。此时，工艺限制策略可以显示工艺限制策略项名称(ConstrintPolicyItemName)和工艺限制策略项值(ConstrintPolicyItemValue)。其中，项名称可以通过下拉菜单进行选择，项下拉内容可专门在字典中维护，可以包括但不限于客户编码(CustomerCode)、工厂(Factory)、站点(Operation)、封装形式(PackageType)、主流程名称(ProcessFlow)、产品规格名称(ProductSpec)，每个项名称都能在批次中或通过批次找到对应的信息，后续在批次进站的校验中可组合比对，以确定批次是否满足策略条件并根据对比结果对该批次操作进站或不进站。另外，工艺限制策略项值以文本方式存储用户需要匹配的目标值。
在一实施例中，服务器可以绑定工艺限制策略和设备，即建立目标设备和工艺限制策略之间的关联关系。参见图8，上述绑定操作可以在用户操作平台上的建模工具实现。可理解的是，图8所示的建模工具还可以用于绑定设备、绑定批次、解绑设备、解绑批次、工艺限制策略维护等操作。
在一实施例中，用户操作平台的系统架构如图9所示。
参见图9，用户操作平台的系统架构包括用户操作平台、服务器和Oracle数据库。用户操作平台包括客户端界面、工艺限制策略创建、策略项创建、绑定设备、绑定批次、启用/禁用状态等以及Winform+Infragistics模块。服务器包括QRY服务，CNM服务、CNX服务和Spring boot+Spring MVC+Bpei模块。Oracle数据库包括策略信息和策略历史等模块。
本实施例中，服务器响应于为目标设备绑定工艺限制策略的操作，显示该目标 设备对应的第一下拉菜单。其中，第一下拉菜单中包括目标设备可选用的至少一项工艺限制策略，效果如图5所示。用户可以选择第一下拉菜单中的一个工艺限制策略作为目标工艺限制策略，此时服务器可以响应于选择第一下拉菜单中的目标工艺限制策略的操作，管理目标设备和目标工艺限制策略之间的关联关系。其中，上述关联关系可以包括创建、更新、解绑等。
在一实施例中，服务器可以处理目标设备和目标工艺限制策略之间的关联关系。例如，服务器可以获取目标设备的当前工艺限制策略；该当前工艺限制策略的使能状态包括启用状态(Enable)或者禁用户状态(Disable)。当当前工艺限制策略处于启用状态时，服务器可以确定保持目标设备和目标工艺限制策略存在的关联关系且建立关联关系失败。当当前工艺限制策略处于禁用状态时，服务器可以确定更新所述目标设备和所述目标工艺限制策略之间的关联关系。
在另一实施例中，服务器可以处理目标设备和目标工艺限制策略之间的关联关系。例如，服务器可以根据目标设备的设备名称和目标工艺限制策略查询预设的关联关系表，以确定目标设备和目标工艺限制策略是否存在关联关系。当关联关系表中不存在关联关系时，服务器可以创建目标设备的设备名称和目标工艺限制策略之间的目标关联关系，并写入上述关联关系表以方便后续查询。当关联关系表中存在处于禁用状态(Disable)的关联关系时，服务器删除本条关联关系并重新创建一条目标关联关系，并写入上述关联关系表以方便后续查询。当关联关系表中存在处于启用状态(Enable)的关联关系时，服务器可以建立目标设备和目标工艺限制策略之间的目标关联关系，并写入上述关联关系表以方便后续查询，还可以生成策略绑定成功的提示信息。
实际应用中，服务器可以获取用户在工作台所选择的目标设备的设备名称和所选择的目标工艺限制策略，将目标设备的设备名称(MachineName)并存储到策略信息列表(ConstraintPolicyList)内，效果如图11所示。
参见图10，图10中示例了限制策略设备界面(ConstraintPolicyMachineView)，其中界面左侧为设备列表(Machine Type)，该设备列表包括设备名称(MachineName)、设备类型(MachineType)、设备名称细节(DetailMachineName)、设备组名称(MachineGroupName)和描述(Description)等。界面右侧为条件(Conditions)包括工艺限制策略名称(ConstraintPolicyName)、开始时间(StartTime)、结束时间(StartTime)、限制类型(ConatraintType)、批次类型(LotType)和描述(Description)，以及设置在界面右下角的按键，包括：启用(Enable)、禁用(Disable)、解绑(Deassign)、 绑定(assign)和退出(Exit)。其中，启用(Enable)是指启用关联关系，禁用(Disable)是指禁用关联关系，解绑(Deassign)是指解绑关联关系，绑定(assign)是指绑定关联关系。
在一实施例中，服务器可以解析上述策略信息列表，将设备名称(MachineName)与数据库中的设备名称列表(ContraintPolicyMachine)，即设备和工艺限制策略的关联关系列表，查询上述目标设备是否已经关联到某一个工艺限制策略。如果已经关联了某一个工艺限制策略且关联关系是启用状态，可以让用户重新选择设备即本次绑定操作是失败的。如果没有查询到关联关系或者有关联关系且是禁用状态，服务器可以新建一条关联关系或者删除当前关联关系再新建一条关联关系。
在又一实施例中，服务器可以处理目标设备和目标工艺限制策略之间的关联关系。例如，用户可以点击目标设备，此时显示该目标设备的第一下拉菜单；然后，用户可以选择第一下拉菜单中的解绑功能，从而解绑目标设备处于禁用状态的当前工艺限制策略。或者说，服务器可以响应于对下拉菜单中当前工艺限制策略的解绑操作，获取目标设备的使能状态，该使能状态包括启用状态或者禁用状态。
实际应用中，服务器可以获取用户在工作台所选择的目标设备的设备名称和所选择的目标工艺限制策略，将目标设备的设备名称(MachineName)并存储到策略信息列表(ConstraintPolicyList)内。服务器可以解析上述策略信息列表，将设备名称(MachineName)与数据库中的设备名称列表(ContraintPolicyMachine)，即设备和工艺限制策略的关联关系列表，查询上述目标设备是否已经关联到某一个工艺限制策略。如果已经关联了某一个工艺限制策略且关联关系是启用状态，服务器确定解绑失败；如果已经关联了某一个工艺限制策略且关联关系是禁用状态，服务器确定解绑成功。
基于上述各实施例的内容，参见图11，服务器可以根据用户的绑定操作(Assign)，绑定目标设备和目标工艺限制策略，得到目标关联关系；服务器可以将上述目标关联关系调整为启用状态(Enable)在一些条件下，服务器可以将上述目标关联关系调整为禁用状态(Disable)。或者说，服务器可以响应于第一下拉菜单中当前工艺限制策略的激活操作，更新目标设备的当前工艺限制策略的使能状态。最后，服务器还可以根据用户的解绑操作(Deassign)，解绑目标设备和目标工艺限制策略。
在一实施例中，服务器获取包含至少一个工艺限制策略的策略信息列表。用户可以选择上述策略信息列表内的策略项，服务器可以响应于对各个工艺限制策略的选择操作，显示各个工艺限制策略的策略项列表。之后，用户可以对策略项列表中策略项进 行处理，服务器可以响应于对策略项列表中策略项的处理处理操作，处理策略项列表中的策略项。
例如，服务器可以根据用户的操作，将一些批次设置为白名单，即对所选择的批次不做限制。当选择某一个工艺限制策略的策略项后，可以显示该策略项信息列表；当选择策略项信息列表内的限制排除列表时，该限制排除列表可以包括多个可选择的批次，当选择至少一个批次后，可以建立工艺限制策略与至少一个批次的排除关联关系。需要说明的是，工艺限制策略与批次可以是一对一的关系，也可以是多对多的关系。
参见图12，工艺限制策略排除界面内左上角显示工艺限制策略列表(ConstraintPolicyList)、右下角的工艺限制策略项列表(ConstraintPolicyItemList)和右侧的工艺限制策略排除列表(ConstraintExceptionList)。当选择一个工艺限制策略后，可以点击注册排除按键(Register Exception)。此时，服务器可以继续显示批次注册列表，如图13所示。
在批次与工艺限制策略建立排除关联关系后，该批次在进站时不再进行校验，即不再对该批次使用工艺限制策略。例如，批次进站后，服务器可以调用工艺限制策略检验算法，获取新进入的批次的批次名称(LotName)并查询ConstraintPolicyExcept表，当该ConstraintPolicyExcept表不存在排除关联关系时，说明该批次需要进行工艺限制策略校验；当该ConstraintPolicyExcept表存在排除关联关系时，说明该批次不需要进行工艺限制策略校验。这样，本实施例通过灵活设置批次的限制策略，可以提高生产效率。
在本公开实施例提供的一种工艺限制策略确定方法的基础上，本实施例还提供了一种工艺限制策略确定装置，参见图14，包括：
下拉单元显示模块141，用于响应于为目标设备绑定工艺限制策略的操作，显示所述目标设备对应的下拉菜单；所述下拉菜单中包括所述目标设备可选用的至少一项工艺限制策略；
关联关系确定模块142，用于响应于选择所述下拉菜单中的目标工艺限制策略的操作，确定所述目标设备和所述目标工艺限制策略之间的关联关系。
在一实施例中，所述关联关系确定模块包括：
当前策略获取子模块，用于获取所述目标设备的当前工艺限制策略；所述当前工艺限制策略的使能状态包括启用状态或者禁用状态；
关联关系保持子模块，用于当所述当前工艺限制策略处于启用状态时，确定保 持所述目标设备和所述目标工艺限制策略存在的关联关系且建立关联关系失败；
关联关系更新子模块，用于当所述当前工艺限制策略处于禁用状态时，确定更新所述目标设备和所述目标工艺限制策略之间的关联关系。
在一实施例中，所述关联关系确定模块包括：
关联关系查询子模块，用于根据所述目标设备的设备名称和所述目标工艺限制策略查询预设的关联关系表，以确定所述目标设备和所述目标工艺限制策略是否存在关联关系；
目标关系创建子模块，用于当所述关联关系表中不存在关联关系时，创建所述目标设备的设备名称和所述目标工艺限制策略之间的目标关联关系；
目标关系重建子模块，用于当所述关联关系表中存在处于禁用状态的关联关系时，删除本条关联关系并重新创建一条目标关联关系；
目标关系建立子模块，用于当所述关联关系表中存在处于启用状态的关联关系时，建立所述目标设备和所述目标工艺限制策略之间的目标关联关系，并生成策略绑定成功的提示信息。
在一实施例中，所述关联关系确定模块包括：
当前策略解绑子模块，用于响应于对所述下拉菜单中当前工艺限制策略的解绑操作，解绑所述目标设备处于禁用状态的当前工艺限制策略。
在一实施例中，所述当前策略解绑子模块，包括：
使能状态获取单元，用于获取所述目标设备的关联关系的使能状态，所述使能状态包括启用状态或者禁用状态；
解绑失败单元，用于当所述关联关系处于启用状态时，确定解绑失败；
解绑成功单元，用于当所述关联关系处于禁用状态时确定解绑成功。
在一实施例中，所述关联关系确定模块包括：
使能状态更新子模块，用于响应于对所述下拉菜单中的当前工艺限制策略的激活操作，更新所述目标设备的当前工艺限制策略的使能状态。
在一实施例中，所述装置还包括：
信息列表获取模块，用于获取包含至少一个工艺限制策略的策略信息列表；
策略项显示模块，用于响应于对各个工艺限制策略的选择操作，显示所述各个工艺限制策略的策略项列表；
策略项处理模块，用于响应于对所述策略项列表中策略项的处理处理操作，处理处理所述策略项列表中的策略项。
在一实施例中，所述策略项处理模块包括：
批次获取子模块，用于响应于对所述策略项列表中排除项的选择操作，获取可关联的多个批次；
排除关系建立子模块，用于响应于对至少一个批次的注册操作，建立所述工艺限制策略和所述至少一个批次的排除关联关系。
需要说明的是，本实施例中示出的装置实施例与上述方法实施例的内容相匹配，可以参考上述方法实施例的内容，在此不再赘述。
在示例性实施例中，还提供了一种服务器，参见图15，包括：
存储器152与处理器151；
所述存储器152用于存储所述处理器151可执行的计算机程序；
所述处理器151用于执行所述存储器152中的计算机程序，以实现如上述的方法。
本领域技术人员在考虑说明书及实践这里公开的公开后，将容易想到本公开的其它实施方案。本公开旨在涵盖任何变型、用途或者适应性变化，这些变型、用途或者适应性变化遵循本公开的一般性原理并包括本公开未公开的本技术领域中的公知常识或惯用技术手段。说明书和实施例仅被视为示例性的，本公开的真正范围和精神由下面的权利要求指出。
应当理解的是，本公开并不局限于上面已经描述并在附图中示出的精确结构，并且可以在不脱离其范围进行各种修改和改变。本公开的范围仅由所附的权利要求来限制。

Claims (15)

  1. 一种工艺限制策略确定方法，其特征在于，包括：
    响应于为目标设备绑定工艺限制策略的操作，显示所述目标设备对应的下拉菜单；所述下拉菜单中包括所述目标设备可选用的至少一项工艺限制策略；
    响应于选择所述下拉菜单中的目标工艺限制策略的操作，确定所述目标设备和所述目标工艺限制策略之间的关联关系。
  2. 根据权利要求1所述的方法，其特征在于，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
    获取所述目标设备的当前工艺限制策略；所述当前工艺限制策略的使能状态包括启用状态或者禁用状态；
    当所述当前工艺限制策略处于启用状态时，确定保持所述目标设备和所述目标工艺限制策略存在的关联关系且建立关联关系失败；
    当所述当前工艺限制策略处于禁用状态时，确定更新所述目标设备和所述目标工艺限制策略之间的关联关系。
  3. 根据权利要求1所述的方法，其特征在于，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
    根据所述目标设备的设备名称和所述目标工艺限制策略查询预设的关联关系表，以确定所述目标设备和所述目标工艺限制策略是否存在关联关系；
    当所述关联关系表中不存在关联关系时，创建所述目标设备的设备名称和所述目标工艺限制策略之间的目标关联关系；
    当所述关联关系表中存在处于禁用状态的关联关系时，删除本条关联关系并重新创建一条目标关联关系；
    当所述关联关系表中存在处于启用状态的关联关系时，建立所述目标设备和所述目标工艺限制策略之间的目标关联关系，并生成策略绑定成功的提示信息。
  4. 根据权利要求1所述的方法，其特征在于，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
    响应于对所述下拉菜单中当前工艺限制策略的解绑操作，解绑所述目标设备处于禁用状态的当前工艺限制策略。
  5. 根据权利要求4所述的方法，其特征在于，解绑所述目标设备处于禁用状态的当前工艺限制策略，包括：
    获取所述目标设备的关联关系的使能状态，所述使能状态包括启用状态或者禁用状 态；
    当所述关联关系处于启用状态时，确定解绑失败；当所述关联关系处于禁用状态时确定解绑成功。
  6. 根据权利要求1所述的方法，其特征在于，确定所述目标设备和所述目标工艺限制策略之间的关联关系，包括：
    响应于对所述下拉菜单中的当前工艺限制策略的激活操作，更新所述目标设备的当前工艺限制策略的使能状态。
  7. 根据权利要求1所述的方法，其特征在于，所述方法还包括：
    获取包含至少一个工艺限制策略的策略信息列表；
    响应于对各个工艺限制策略的选择操作，显示所述各个工艺限制策略的策略项列表；
    响应于对所述策略项列表中策略项的处理操作，处理所述策略项列表中的策略项。
  8. 根据权利要求1所述的方法，其特征在于，处理所述策略项列表中的策略项，包括：
    响应于对所述策略项列表中排除项的选择操作，获取可关联的多个批次；
    响应于对至少一个批次的注册操作，建立所述工艺限制策略和所述至少一个批次的排除关联关系。
  9. 一种工艺限制策略确定装置，其特征在于，所述装置包括：
    下拉单元显示模块，用于响应于为目标设备绑定工艺限制策略的操作，显示所述目标设备对应的下拉菜单；所述下拉菜单中包括所述目标设备可选用的至少一项工艺限制策略；
    关联关系确定模块，用于响应于选择所述下拉菜单中的目标工艺限制策略的操作，确定所述目标设备和所述目标工艺限制策略之间的关联关系。
  10. 根据权利要求9所述的装置，其特征在于，所述关联关系确定模块包括：
    当前策略获取子模块，用于获取所述目标设备的当前工艺限制策略；所述当前工艺限制策略的使能状态包括启用状态或者禁用状态；
    关联关系保持子模块，用于当所述当前工艺限制策略处于启用状态时，确定保持所述目标设备和所述目标工艺限制策略存在的关联关系且建立关联关系失败；
    关联关系更新子模块，用于当所述当前工艺限制策略处于禁用状态时，确定更新所述目标设备和所述目标工艺限制策略之间的关联关系。
  11. 根据权利要求9所述的装置，其特征在于，所述关联关系确定模块包括：
    关联关系查询子模块，用于根据所述目标设备的设备名称和所述目标工艺限制策略 查询预设的关联关系表，以确定所述目标设备和所述目标工艺限制策略是否存在关联关系；
    目标关系创建子模块，用于当所述关联关系表中不存在关联关系时，创建所述目标设备的设备名称和所述目标工艺限制策略之间的目标关联关系；
    目标关系重建子模块，用于当所述关联关系表中存在处于禁用状态的关联关系时，删除本条关联关系并重新创建一条目标关联关系；
    目标关系建立子模块，用于当所述关联关系表中存在处于启用状态的关联关系时，建立所述目标设备和所述目标工艺限制策略之间的目标关联关系，并生成策略绑定成功的提示信息。
  12. 根据权利要求9所述的装置，其特征在于，所述关联关系确定模块包括：
    当前策略解绑子模块，用于响应于对所述下拉菜单中当前工艺限制策略的解绑操作，解绑所述目标设备处于禁用状态的当前工艺限制策略。
  13. 根据权利要求12所述的装置，其特征在于，所述当前策略解绑子模块，包括：
    使能状态获取单元，用于获取所述目标设备的关联关系的使能状态，所述使能状态包括启用状态或者禁用状态；
    解绑失败单元，用于当所述关联关系处于启用状态时，确定解绑失败；
    解绑成功单元，用于当所述关联关系处于禁用状态时确定解绑成功；
    处理操作处理所述策略项列表中的策略项。
  14. 一种服务器，其特征在于，包括：
    存储器与处理器；
    所述存储器用于存储所述处理器可执行的计算机程序；
    所述处理器用于执行所述存储器中的计算机程序，以实现如权利要求1～8任一项所述的方法。
  15. 一种非暂态计算机可读存储介质，其特征在于，当所述存储介质中的可执行的计算机程序由处理器执行时，能够实现如权利要求1～8任一项所述的方法。
PCT/CN2022/128773 2022-10-31 2022-10-31 工艺限制策略确定方法和装置、服务器、存储介质 WO2024092459A1 (zh)

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