WO2024092457A1 - 载具状态更新方法和装置、服务器 - Google Patents

载具状态更新方法和装置、服务器 Download PDF

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Publication number
WO2024092457A1
WO2024092457A1 PCT/CN2022/128770 CN2022128770W WO2024092457A1 WO 2024092457 A1 WO2024092457 A1 WO 2024092457A1 CN 2022128770 W CN2022128770 W CN 2022128770W WO 2024092457 A1 WO2024092457 A1 WO 2024092457A1
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WO
WIPO (PCT)
Prior art keywords
specification information
carrier
vehicle
state
response
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PCT/CN2022/128770
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English (en)
French (fr)
Inventor
张立波
朴南植
苗新宇
李文娟
王洪
高俊
刘朝正
Original Assignee
京东方科技集团股份有限公司
北京中祥英科技有限公司
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Application filed by 京东方科技集团股份有限公司, 北京中祥英科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to PCT/CN2022/128770 priority Critical patent/WO2024092457A1/zh
Publication of WO2024092457A1 publication Critical patent/WO2024092457A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present disclosure relates to the field of data processing technology, and in particular to a vehicle status updating method and device, and a server.
  • the present disclosure provides a vehicle status update method, device, and server to address the deficiencies of related technologies.
  • a vehicle status updating method comprising:
  • a next state of the carrier is determined according to the use state, the retention state and the clean state.
  • obtaining the cleanliness status of the carrier includes:
  • the clean state of the carrier is a clean state.
  • obtaining the usage time of the vehicle includes:
  • the binding time refers to the time when the product is placed in the carrier
  • the unbinding time refers to the time when the product leaves the carrier
  • the usage time of the vehicle is calculated according to the historical usage time of the vehicle and the current usage time.
  • obtaining the use state of the carrier includes:
  • the preset number threshold When the number of cleaning times is equal to the preset number threshold, it is determined that the current state of the carrier is an unavailable state; when the number of cleaning times is less than the preset number threshold, it is determined to maintain the current state of the carrier; the current state is an empty state or an in-use state.
  • obtaining the cleanliness status of the carrier includes:
  • the contamination level of the carrier matches the contamination level of the process site, it is determined that the carrier has successfully entered the process site.
  • obtaining the clean state of the carrier further includes:
  • the method further comprises:
  • the carrier is created according to a preset carrier model; the initial state of the carrier is an unavailable state, the clean state is a dirty state, and the detained state is an undetained state.
  • the preset carrier model is stored in a basic data module of the semiconductor manufacturing execution system; the basic data module is used to create preset carrier models corresponding to various carriers and maintain carrier status.
  • the method further comprises:
  • the detection field includes a detection state
  • the specification information of the carrier is stored in a carrier module of the semiconductor manufacturing execution system; the carrier module is used to manage carrier business.
  • the specification information of the carrier is stored in a carrier module of the semiconductor manufacturing execution system, and the specification information is used by the carrier module and the work-in-process module; the carrier module is used to manage carrier business; and the work-in-process module is used to batch specify carriers.
  • the method further comprises:
  • the method further comprises:
  • the new version of the specification information is different in version from the original version of the specification information but has the same other contents as the original version of the specification information;
  • the new version of the specification information is activated and the state of the original version of the specification information is updated to an inactivated state.
  • the method further comprises:
  • the specification information with the new name is different in name from the specification information with the original name but has the same other contents;
  • the specification information of the new name is activated.
  • the method further comprises:
  • vehicle data in XML format according to the TibcoRV message subscription method, wherein the vehicle data includes the vehicle's usage status, detention status, and clean status; the vehicle data also includes the BPEL name corresponding to the server;
  • Java file corresponding to the BPEL name is found; the Java file includes a releaseMaterial method;
  • Calling the releaseMaterial method causes the vehicle module to process the service; wherein the processing of the service includes operating the database to update the use status, detention status and clean status of the vehicle;
  • a response message in XML format is generated and returned.
  • a vehicle status updating method comprising:
  • the creation page includes a creation button and specification parameters
  • the vehicle In response to detecting an operation of creating a vehicle, the vehicle is created according to the specification information and the life cycle of the vehicle is managed.
  • the method further comprises:
  • the input specification information is acquired and updated.
  • the method further comprises:
  • the new version of the specification information is different in version from the original version of the specification information but has the same other contents as the original version of the specification information;
  • the new version of the specification information is activated and the state of the original version of the specification information is updated to an inactivated state.
  • the method further comprises:
  • the specification information with the new name is different from the specification information with the original name in name but has the same other contents;
  • the specification information of the new name is activated.
  • the method further comprises:
  • the detention status of the vehicle is adjusted to detained or not detained, respectively.
  • the method further comprises:
  • the method further comprises:
  • binding the carrier In response to detecting an operation of binding a carrier to a batch, binding the carrier to a target batch;
  • the target batch In response to detecting an operation of unbinding a batch from a carrier, the target batch is unbound from the carrier.
  • the method further comprises:
  • the position of the carrier is adjusted to a target position.
  • a vehicle status updating device comprising:
  • a status acquisition module is used to obtain the use status, detention status and clean status of the vehicle
  • a state determination module is used to determine a next state of the carrier according to the use state, the retention state and the clean state.
  • the status acquisition module includes:
  • a duration acquisition submodule is used to acquire the usage duration and usage frequency of the vehicle
  • a times acquisition submodule is used to acquire the times the vehicle is used
  • a dirty state determination submodule used to determine that the clean state of the carrier is a dirty state when the number of uses is greater than a preset number threshold and/or the use time is greater than a preset time threshold;
  • the clean state determination submodule is used to determine that the clean state of the carrier is a clean state when the number of uses is less than or equal to the preset number threshold and the use time is less than or equal to the preset time threshold.
  • the duration acquisition submodule includes:
  • a time acquisition unit used to acquire the binding time and unbinding time of the carrier corresponding to the same batch of products;
  • the binding time refers to the time when the product is placed in the carrier, and the unbinding time refers to the time when the product leaves the carrier;
  • a time determination unit configured to determine the current usage time according to the binding time and the unbinding time
  • a time calculation unit is used to calculate the usage time of the vehicle based on the historical usage time of the vehicle and the current usage time.
  • the state acquisition module when it is detected that the clean state of the carrier changes to a dirty state, includes:
  • a times acquisition submodule used to acquire the cleaning times of the carrier and a preset times threshold
  • the state determination submodule is used to determine that the current state of the carrier is an unavailable state when the number of cleaning times is equal to the preset number threshold; when the number of cleaning times is less than the preset number threshold, determine to maintain the current state of the carrier; the current state is an empty state or an in-use state.
  • the status acquisition module includes:
  • a pollution level acquisition submodule used to acquire the pollution level of the carrier and the pollution level of the process site;
  • the site entry determination submodule is used to determine that the carrier has successfully entered the process site when the contamination level of the carrier matches the contamination level of the process site.
  • the status acquisition module further includes:
  • a conversion path determination submodule used to determine whether there is a conversion path between the pollution level of the carrier and the pollution level of the process site when the pollution level of the carrier does not match the pollution level of the process site;
  • the entry determination submodule is used to determine that the carrier successfully enters the process site when it is determined that a conversion path exists; and to determine that the carrier fails to enter the process site when it is determined that no conversion path exists.
  • the device further comprises:
  • the vehicle creation module is used to create the vehicle according to a preset vehicle model; the initial state of the vehicle is an unavailable state, the clean state is a dirty state, and the detained state is an undetained state.
  • the preset carrier model is stored in a basic data module of the semiconductor manufacturing execution system; the basic data module is used to create preset carrier models corresponding to various carriers and maintain carrier status.
  • the device further comprises:
  • a field acquisition submodule configured to acquire a detection field in the specification information of the vehicle in response to detecting an operation of editing the specification information of the vehicle; the detection field includes a detection state;
  • a non-editable state determination submodule used to determine that the specification information of the carrier is in a non-editable state when the detection field is not in the detected state
  • An account comparison submodule used for comparing whether the current account and the editing account for editing the specification information are the same account when the detection field is in the detected state;
  • An editing rejection submodule used for determining to reject the current account from editing the specification information of the vehicle when the current account and the editing account are different;
  • the editing permission submodule is used to determine whether the current account is allowed to edit the specification information of the vehicle and to freeze the specification information after the editing is completed when the current account and the editing account are the same.
  • the specification information of the carrier is stored in a carrier module of the semiconductor manufacturing execution system; the carrier module is used to manage carrier services.
  • the specification information of the carrier is stored in a carrier module of the semiconductor manufacturing execution system, and the specification information is used by the carrier module and the work-in-process module; the carrier module is used to manage carrier business; and the work-in-process module is used to batch specify carriers.
  • the device further comprises:
  • an audit information generating module configured to generate information to be audited in response to detecting a request for activating specification information of the vehicle
  • the vehicle use module is used to determine that the vehicle will be put into use in response to the information to be reviewed being approved.
  • the device further comprises:
  • a specification information generating module configured to generate a new version of specification information in response to detecting an operation of upgrading specification information; the new version of specification information is different in version from the original version of specification information but has the same other contents as the original version;
  • a specification information editing module configured to edit and freeze the specification information of the new version in response to detecting an operation of editing the specification information of the new version
  • the specification information activation module is used to activate the new version of the specification information and update the state of the original version of the specification information to an inactivated state in response to detecting an operation of activating the new version of the specification information.
  • the device further comprises:
  • a specification information generating module configured to generate specification information with a new name in response to detecting an operation of cloning specification information; the specification information with the new name is different in name from the specification information with the original name but has the same other contents;
  • a specification information editing module configured to edit and freeze the specification information of the new name in response to detecting an operation of editing the specification information of the new name
  • the specification information activation module is used to activate the specification information of the new name in response to detecting an operation of activating the specification information of the new name.
  • the device further comprises:
  • the vehicle data acquisition module is used to acquire the vehicle data in XML format according to the TibcoRV message subscription method, wherein the vehicle data includes the use status, detention status and clean status of the vehicle; the vehicle data also includes the BPEL name corresponding to the server;
  • a Java file query module used to query the Java file corresponding to the BPEL name; the Java file includes a releaseMaterial method;
  • a business processing module used to call the releaseMaterial method to enable the vehicle module to process business; wherein processing business includes operating a database to update the use status, detention status and clean status of the vehicle;
  • the response information returning module is used to generate and return response information in XML format in response to the completion of business processing.
  • a vehicle status updating device comprising:
  • a creation page display module for displaying a creation page in response to detecting an operation of configuring a vehicle; the creation page includes a creation button and specification parameters;
  • a specification information acquisition module configured to acquire specification information corresponding to the specification parameters in response to an operation of configuring the specification parameters
  • the life cycle management module is used to respond to the operation of detecting and creating a carrier, create the carrier according to the specification information and manage the life cycle of the carrier.
  • the device further comprises:
  • a specification information display module configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle
  • the specification information updating module is used to obtain the input specification information and update the specification information in response to detecting an operation of editing the specification information of the vehicle.
  • the device further comprises:
  • a specification information display module configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle
  • a specification information generating module configured to generate a new version of specification information in response to detecting an operation of upgrading specification information; the new version of specification information is different in version from the original version of specification information but has the same other contents as the original version;
  • a specification information editing module configured to edit and freeze the specification information of the new version in response to detecting an operation of editing the specification information of the new version
  • the specification information activation module is used to activate the new version of the specification information and update the state of the original version of the specification information to an inactivated state in response to detecting an operation of activating the new version of the specification information.
  • the device further comprises:
  • a specification information display module configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle
  • a specification information generating module configured to generate specification information with a new name in response to detecting an operation of cloning specification information; the specification information with the new name is different in name from the specification information with the original name but has the same other contents;
  • a specification information editing module configured to edit and freeze the specification information of the new name in response to detecting an operation of editing the specification information of the new name
  • the specification information activation module is used to activate the specification information of the new name in response to detecting an operation of activating the specification information of the new name.
  • the device further comprises:
  • a specification information display module configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle
  • the detention status determination module is used to adjust the detention status of the vehicle to detained or not detained in response to detecting the operation of detaining the vehicle or releasing the vehicle.
  • the device further comprises:
  • a specification information display module configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle
  • the scrapped state adjustment module is used to adjust the use state of the vehicle to a scrapped state in response to detecting the operation of the scrapped vehicle.
  • the device further comprises:
  • a batch binding module configured to bind the carrier to a target batch in response to detecting an operation of binding the carrier to a batch
  • the batch unbinding module is used to unbind the target batch from the carrier in response to detecting an operation of unbinding a batch from the carrier.
  • the device further comprises:
  • a specification information display module configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle
  • the vehicle position adjustment module is used to adjust the position of the vehicle to a target position in response to detecting an operation of adjusting the vehicle position.
  • a server including:
  • the memory is used to store a computer program executable by the processor
  • the processor is used to execute the computer program in the memory to implement the method as described in any one of the first aspect or the second aspect.
  • a non-transitory computer-readable storage medium is provided.
  • an executable computer program in the storage medium is executed by a processor, the method described in any one of the first aspect or the second aspect can be performed.
  • the solution provided by the embodiment of the present disclosure can obtain the use state, detention state and clean state of the carrier; then, the next state of the carrier is determined according to the use state, the detention state and the clean state. In this way, the solution of this embodiment can determine the next state of the carrier and can uniformly manage the life cycle of different types of carriers, which can improve the accuracy and utilization rate of the carrier, thereby helping to improve the yield and productivity of semiconductor products.
  • FIG. 1 is a block diagram showing a semiconductor manufacturing execution system according to an exemplary embodiment.
  • Fig. 2 is an application architecture diagram of a semiconductor manufacturing execution system according to an exemplary embodiment.
  • FIG. 3 is an operation flow chart of a semiconductor manufacturing execution system according to an exemplary embodiment.
  • Fig. 4 is a flow chart of a vehicle status updating method according to an exemplary embodiment.
  • Fig. 5 is a flow chart showing a method of obtaining a clean state of a carrier according to an exemplary embodiment.
  • Fig. 6 is a flow chart showing a method of obtaining the usage time of a vehicle according to an exemplary embodiment.
  • Fig. 7 is a flow chart showing a method of obtaining the usage status of a vehicle according to an exemplary embodiment.
  • Fig. 8 is a schematic diagram showing a life cycle according to an exemplary embodiment.
  • Fig. 9 is a flow chart showing a method of obtaining a clean state of a carrier according to an exemplary embodiment.
  • Fig. 10 is a flow chart showing the life cycle of a vehicle according to an exemplary embodiment.
  • Fig. 11 is a flow chart showing a vehicle management process according to an exemplary embodiment.
  • Fig. 12 is a flow chart showing a method of editing specification information of a vehicle according to an exemplary embodiment.
  • Fig. 13 is a flow chart showing a method of activating specification information of a vehicle according to an exemplary embodiment.
  • Fig. 14 is a flow chart showing a method of obtaining a clean state of a carrier according to an exemplary embodiment.
  • Fig. 15 is a flow chart showing a method of obtaining vehicle status according to an exemplary embodiment.
  • Fig. 16 is a flow chart showing a method of obtaining vehicle status according to an exemplary embodiment.
  • Fig. 17 is a block diagram showing a system architecture of a modeling tool according to an exemplary embodiment.
  • Fig. 18 is a block diagram showing a system architecture of a user operating platform according to an exemplary embodiment.
  • Fig. 19 is a flow chart of a vehicle status updating method according to an exemplary embodiment.
  • Fig. 20 is a schematic diagram showing a display specification parameter according to an exemplary embodiment.
  • Fig. 21 is a schematic diagram showing a method of creating a vehicle according to an exemplary embodiment.
  • Fig. 22 is a schematic diagram showing a detained state of a carrier according to an exemplary embodiment.
  • FIG. 23 is a schematic diagram showing an undetained state of a carrier according to an exemplary embodiment.
  • Fig. 24 is a schematic diagram showing a scrapping status according to an exemplary embodiment.
  • Fig. 25 is a schematic diagram showing an unbinding vehicle according to an exemplary embodiment.
  • Fig. 26 is a schematic diagram showing a method of adjusting the position of a carrier according to an exemplary embodiment.
  • Fig. 27 is a block diagram of a vehicle status updating device according to an exemplary embodiment.
  • Fig. 28 is a block diagram of a vehicle status updating device according to an exemplary embodiment.
  • Fig. 29 is a block diagram of a server according to an exemplary embodiment.
  • the embodiments of the present disclosure provide a carrier status update method and device, a server, and a non-transitory computer-readable storage medium.
  • the above carrier status update method can be applied to a semiconductor manufacturing execution system.
  • the semiconductor manufacturing execution system is used for the full-process manufacturing management of semiconductor packaging and testing, executing production orders, tracking the real-time status of equipment resources (such as carriers, materials, etc.) to complete semiconductor products, and achieving the effect of information sharing and process automation implementation in the factory.
  • the above semiconductor manufacturing execution system When a real-time event occurs in the factory, the above semiconductor manufacturing execution system will respond and report the event in a timely manner, and use the current data to guide the user to handle the event, thereby maximizing production efficiency and yield, which is conducive to reducing production costs and improving production management.
  • the above semiconductor manufacturing execution system adopts a modular design, which can meet the production needs of different packaging and testing process technologies, and has excellent flexibility and scalability, thereby achieving the maximum input-output ratio and achieving the high flexibility and personalized production mode required by Industry 4.0.
  • FIG1 is a block diagram of a semiconductor manufacturing execution system according to an exemplary embodiment.
  • a semiconductor manufacturing execution system includes: a basic data module, a process flow module, a production plan module, a work-in-progress module, an engineering management module, a recipe module, an equipment module, a machine limit module, a carrier module, a material module, a fixture module, and a packaging module.
  • the basic data module can be a unified basic data model platform, providing basic data modeling functions for the semiconductor manufacturing execution system, including but not limited to: factory modeling, equipment modeling, system status modeling, packaging modeling, user authority modeling, recipe (different semiconductor devices require different programs, recipes or menus) basic data modeling, material basic data modeling, process step flow modeling, strategy modeling, data acquisition basic data modeling and alarm basic data modeling.
  • the basic data model as a standard framework, provides users with the required basic general functions and provides a series of customized extension settings, such as unified naming specifications, unified data enumeration types and unified business SQL management, which is conducive to the rapid construction of applications; the definition of objects in cross-multiple applications is standardized, supports multiple languages and multiple units, is more flexible, and has stronger scalability and flexibility.
  • the factory modeling function is used to support the maintenance of factory basic data, support multi-factory mode and support the creation of areas under the factory.
  • the device modeling function is used to support the creation of device master data and the maintenance of device port data.
  • system status modeling function is used to support batch status maintenance, equipment status maintenance, material status maintenance, carrier status maintenance, fixture status maintenance, and the like.
  • the packaging form modeling is used to maintain packaging-related attribute data and to uniformly maintain and manage packaging methods of different specifications.
  • user authority modeling is used to support the creation and maintenance of users, user groups and user roles, and to support the maintenance of password verification of user menus and user operation interfaces.
  • recipe basic data modeling is used to support the creation and maintenance of process menu data and the maintenance of recipe equipment data relationships.
  • material basic data modeling is used to support the creation and maintenance of material basic data.
  • process step flow modeling is used to support the creation and maintenance of basic data of steps, processes, sections, and processes, support visual interface editing of processes, support the creation and maintenance of branch processes, and support the creation and maintenance of rework processes.
  • strategy modeling is used to support product-level, process-level, and step-level process modeling, so as to facilitate the semiconductor manufacturing execution system to select different equipment and recipes for business operations in the actual production process according to different strategy configurations.
  • the data collection basic data modeling is used to support the creation and maintenance of data collection details and the maintenance of data collection rules.
  • alarm basic data modeling is used to support alarm system information maintenance, alarm triggering conditions for maintenance management, and alarm triggering subsequent actions for maintenance management.
  • the process flow module can allow users to define products and their corresponding process flows, including each step type and related process control strategies, so as to provide process management specifications for the semiconductor manufacturing execution system.
  • the process flow module can provide a complete version control mechanism. All activated processes in the system must strictly comply with this version control system, which can avoid errors in production process data and thus avoid serious accidents.
  • the process flow module can support multi-path and rework, and can automatically select paths based on pre-set conditions during field operations.
  • the process flow module can also support various product process rule controls, and can perform different process controls according to the conditions of products and processes. The above conditions can be subdivided into process step level, process level, process level, product level and batch level.
  • the process step flow modeling function is used to support the creation and maintenance of basic data of steps, processes, sections and flows, support visual interface editing of flows, support the creation and maintenance of branch flows, and support the creation and maintenance of rework flows.
  • the product process configuration function is used to configure different process flows according to different products. Different recipes and equipment can be selected according to different strategies for the same product and process.
  • the work-in-progress module can manage the processing of work-in-progress, guide the operator (i.e., the user) to process the product according to the pre-set process requirements, and track and record the processing information in detail.
  • the most important job management function allows tracking of multiple batches for simultaneous processing and provides historical traceability of batches.
  • the project management module can manage project-related businesses, including but not limited to: work permit management, QTime management, BOM management, process card management, and batch reservation.
  • the carrier module can support the management of carrier-related services, such as creating carriers, cleaning carriers, binding carriers, unbinding carriers, pausing carriers, and releasing carriers, etc., and support the management of the service life of carriers, the number of times of use, and the management of carrier types.
  • the carrier creation function is used to create the specification information of the carrier.
  • the carrier cleaning function is used to re-clean new carriers and carriers after use.
  • the carrier binding function is used to support the binding of carrier data and batches.
  • the carrier unbinding function is used to support the unbinding operation of carrier and batch data.
  • the carrier pausing function is used to suspend the control of the carrier.
  • the carrier release function is used to resume the paused carrier.
  • the semiconductor manufacturing execution system uses CS architecture design and is developed based on the Client-Server (C/S, client-server) architecture model to ensure system stability, smooth interface operation, and enhance user experience.
  • the server is responsible for data management
  • the client is responsible for completing interactive tasks with users.
  • the client module is divided into two parts: one part is for basic data modeling, named FactoryModeler (Modeler), and the other part is for the user's operation interaction interface, named Operator Interface Client (OIC).
  • the front end uses the C# language winform framework
  • the server side uses the Java language, and is developed using the sping boot 2.x framework.
  • the data of the front-end and back-end communications are interacted in XML format, and the corresponding message publishing and subscription processing uses Tibco Rendezvous (Tibco RV), and the database is selected as Oracle 19C.
  • the technical architecture is shown in Figure 2.
  • the corresponding relationship between the system and the module in the semiconductor manufacturing execution system includes:
  • Functional modules for realizing record traceability during the manufacturing process production planning module, work-in-progress module, batch module, and packaging module in the OIC system.
  • Core data support module in the process basic data module in FactoryModeler system.
  • the working process of the carrier module includes:
  • Carrier creation fill in business data on the OIC front-end page.
  • the MES.MOdule.Views.Carrier code module in the front-end code module corresponds to the front-end carrier management module.
  • the corresponding code MES.MOdule.Views.Durable.CarrierCreate.cs under this module represents the carrier creation page.
  • the data is encapsulated in XML format on the page. Its core parameter is the BPEL name "DurableCCarrierCreatereate.bpel" corresponding to the server.
  • the server obtains the BPEL XML data named "CarrierCreate.bpel" according to the TibcoRV message subscription method.
  • the server automatically finds the corresponding BPEL according to the BPEL name transmitted by the front end, and then enters the com.zisemi.mes.solution.event.carrier.CarrierCreateEvent.Java file in siemi-mes-be-solution under the solution module of the BPEL configuration Java entry program, executes the event method, and the event method calls the com.zisemi.mes.core.carrier corresponding to the server in the Core code module to implement business processing (the underlying ORM framework is used, and JDBC technology is used to operate the database to complete data updates).
  • the corresponding message is returned, and the message is transmitted back to the front end for response via XML.
  • FIG. 3 is a flowchart showing the overall operation of a semiconductor manufacturing execution system according to an exemplary embodiment. Referring to FIG. 3 , steps 31 to 37 are included:
  • step 31 the FactoryModeler client in the system creates basic data through the basic data module in response to the interaction with the user.
  • step 32 the FactoryModeler client connects the basic information data into basic business underlying data through the basic data module.
  • Production strategy configuration the corresponding equipment and the associated equipment recipe for the process step under the product. Among them, the production strategy includes 3 modes: product + process + process step mode, process + process step mode and process step mode.
  • the product, process and work step can match the product + process + work step mode, use the equipment and recipe configured in this mode for processing.
  • the product, process or work step cannot match the product + process + work step mode, match the process + work step mode; when the process + work step mode is matched, use the equipment and recipe configured in the process + work step mode for processing; when the process + work step mode cannot be matched, continue to match the work step mode; if the work step model can be matched, use the equipment and recipe in the work step mode; if it cannot be matched, the process will be stuck and the appropriate equipment cannot be selected for processing.
  • the OIC client in the system may perform production plan creation and plan execution operations through the production plan module in response to the interaction with the user.
  • the system enters the production plan, such as the planned output of a product within a period of time, the planned start time, the planned end time, the priority and the person in charge.
  • the production plan such as the planned output of a product within a period of time, the planned start time, the planned end time, the priority and the person in charge.
  • Plan execution Create a work order and formulate the work order information according to the actual inventory and production capacity of the workshop, such as the original planned order number, work order number, work order product from the planned order product, work order quantity less than the planned order data, priority and other related information.
  • step 34 the OIC client in the system performs the manufacturing process through the work-in-progress module and the batch management module.
  • batch-related businesses include the use of functional modules in the work-in-process module and the batch module, such as batch pause, batch cancel pause, batch scrap, batch cancel scrap, batch division, batch combination, batch in and batch out to support process business.
  • step 35 the OIC client in the system controls the batch outbound through the batch outbound function of the work-in-progress module or performs the carrier binding operation using the carrier binding function of the carrier module.
  • Batch outbound binding vehicle When the batch is outbound, select the vehicle information and bind the vehicle.
  • Vehicle binding function to bind the vehicle Enter the vehicle binding function interface, select the batch information, select the vehicle information to be bound, and click Bind to bind the vehicle.
  • Involving vehicle-related business Before binding the vehicle, the vehicle needs to be cleaned.
  • the vehicle status update process involves: vehicle suspension, vehicle unpause, vehicle scrapping, vehicle scrapping and other scenarios.
  • step 36 the OIC client in the system performs batch process management through batch entry and exit of the work-in-progress module.
  • the process includes the following process sections: cutting-chip bonding-packaging-testing.
  • the batch is in the process route of inbound and outbound operations, and processing and production are carried out strictly in accordance with the process flow nodes set by the process flow management module.
  • equipment is used for processing and the process menu management module is used: the equipment selects the recipe for processing and production based on the relationship between the configured basic data equipment and recipes and the production strategy.
  • Equipment needs regular inspection and maintenance. Therefore, when selecting equipment for processing, the equipment itself will also perform a series of management. If the equipment is not inspected and maintained when it is due, the equipment cannot process the batch for production. Therefore, the system needs to perform equipment inspection and equipment maintenance operations.
  • the machine limit can be accurately formulated according to the product, process, step, equipment, raw material type, and batch.
  • the machine limit system control conditions can be set positively (when the batch meets the condition in the process, the batch will be controlled and the equipment cannot be operated to enter or exit the station) and reversely (contrary to the forward setting, only batches that meet the conditions can use the equipment for entry and exit operations).
  • MES obtains data through sensors, or reads and collects equipment data and stores it in designated files or other databases. At this time, when collecting equipment data, MES needs to parse equipment data from other databases or other files and switch equipment status in the MES system. Or the MES system interacts with corresponding related systems (EAP system, SCADA system) to accurately and real-time obtain equipment status and some instructions for the completion of equipment tasks.
  • EAP system EAP system, SCADA system
  • Manual mode When users correct and modify equipment, they need to manually enter the MES system to maintain data. At this time, the MES system will uniformly manage the equipment status and control the equipment status during the production process.
  • Involving equipment and material business using the relationship between equipment ports and materials in the basic data module, and using the material module: performing material loading and unloading operations.
  • Involving equipment and fixture business using the relationship between the equipment port and the fixture in the basic data module, using the fixture module: performing fixture loading and unloading operations.
  • Involving batch control business Use the corresponding functions of the engineering management module, such as the Qtime function, to set the maximum time limit from entry to exit.
  • the batch will trigger the Qtime timing after entering the station. If the exit operation is not performed within the maximum time, the subsequent exit will be controlled. The maximum limit time has been exceeded. Please contact the product engineer for processing.
  • Work permit function that is, the employee equipment operation authority management module. Only when the corresponding employee has the operation permit for the equipment and the permit is valid, can the employee operate the equipment for batch processing, and then strictly control the production and put it on the production order (Manufacture order, MO).
  • step 37 the OIC client in the system controls the batch to enter the packaging stage after the batch process is completed.
  • FIG4 is a flow chart of a carrier status update method according to an exemplary embodiment.
  • a carrier status update method includes steps 41 to 42.
  • step 41 the use status, detention status and clean status of the carrier are obtained.
  • the server side can create different types of vehicles according to the preset vehicle model, where the initial state of the vehicle is unavailable (NotAvailable), the clean state is dirty (dirty), and the detained state is not detained (NotOnhold).
  • the user can click the create button in the interactive page (of the FactoryModeler client that appears later), and the created vehicle and the specification information of the vehicle will appear in the interactive page, such as the factory name, version number, vehicle type, number of washable times, preset number threshold, preset duration threshold, creation time, usage status, clean status, etc., which can be set according to the specific scenario and are not limited here.
  • the preset vehicle model is stored in the basic data module; the basic data module is used to create preset vehicle models corresponding to various vehicles.
  • the above specification information can also be stored in the vehicle module and can be bound to the corresponding material or batch. When the vehicle is bound to the batch, the corresponding vehicle is selected according to the raw material type of the batch.
  • the server can also respond to the operation of editing the specification information of the vehicle, such as clicking the modify button, to obtain the detection field in the specification information of the vehicle, such as the version number, clean state and detection state.
  • the detection state is used to indicate that an account is editing the specification information.
  • the server can determine that the specification information of the vehicle is in an uneditable state.
  • the detection field is in the detection state, the current account is compared with the editing account that edits the specification information (that is, there is currently an account that edits the specification information of the vehicle, referred to as the editing account) to see if they are the same account.
  • the server can determine that the current account is rejected from editing the specification information of the vehicle, that is, the current account cannot edit the specification information of the vehicle; when the current account and the editing account are the same, the server can determine that the current account is allowed to edit the specification information of the vehicle and freeze the specification information after the editing is completed.
  • the specification information of the vehicle is frozen after the editing is completed, so that the specification information can be solidified, that is, it cannot be edited or deleted again, thereby preventing the specification information that has been published from being tampered with.
  • the specification information after freezing can be released to the operator through an activation operation, so that the operator can create and use a carrier of the specification in the production system.
  • the operator can create multiple carriers of the same specification.
  • the server can generate information to be reviewed in response to detecting a request to activate the specification information of the carrier. Then, in response to the approval of the information to be reviewed, the server can determine to put the carrier into use.
  • the above-mentioned information to be reviewed is usually confirmed by a designated person (such as the operator's leader, etc.) before it can be successfully activated. In this way, in this embodiment, by introducing a sign-off mechanism, it is ensured that the specification information released to the production environment is approved, and the approval information is recorded and traceable, thereby improving production efficiency and product yield.
  • the user can modify the published specification information according to business needs, thereby upgrading the specification information of the vehicle.
  • the server can generate a new version of the specification information.
  • the new version of the specification information is different from the original version of the specification information and the other contents are the same.
  • the server can edit the new version of the specification information and freeze it.
  • the server in response to detecting an operation to activate the new version of the specification information, the server can activate the new version of the specification information and update the status of the original version of the specification information to an unactivated state.
  • the new version of the specification information can be edited and frozen without affecting the original specification information, thereby not affecting the management of the original vehicle.
  • a user can clone the specification information that has been published according to business needs, thereby cloning the specification information of the vehicle.
  • the server can generate specification information with a new name.
  • the specification information with the new name is different from the specification information with the original name, but the other contents are the same.
  • the server can edit the specification information with the new name and freeze it.
  • the server can activate the specification information with the new name.
  • the specification information with the new name can be edited and frozen and used as a vehicle of a specification after activation, without affecting the specification information with the original name, thereby not affecting the management of the original vehicle.
  • the server can obtain the cleanliness status of the carrier, referring to FIG. 5 , which includes steps 51 to 53 .
  • the server may obtain the usage time and usage frequency of the vehicle.
  • the server may obtain the usage time of the vehicle, referring to FIG. 6 , which includes steps 61 to 63 .
  • the server can obtain the binding time and unbinding time of the carrier corresponding to the same batch of products; the binding time refers to the time when the product is placed in the carrier, and the unbinding time refers to the time when the product leaves the carrier.
  • the binding time refers to the time when the product is placed in the carrier
  • the unbinding time refers to the time when the product leaves the carrier.
  • the server may calculate the usage time of the vehicle according to the historical usage time of the vehicle and the current usage time.
  • T1 represents the historical usage time.
  • U1 represents the historical usage count, and U represents the current usage count.
  • step 52 when the number of times of use is greater than a preset number threshold and/or the length of use time is greater than a preset length threshold, the server may determine that the clean state of the vehicle is a dirty state.
  • the server stores the preset time threshold corresponding to the usage time, that is, the usable time T limit of the vehicle after each cleaning.
  • the server stores the preset number threshold corresponding to the number of uses, that is, the number of times the vehicle can be used after each cleaning U limit .
  • the server can compare the number of uses with the preset number threshold, and obtain the size relationship between the number of uses and the preset number threshold, that is, the number of uses is greater than the preset number threshold, or the number of uses is less than or equal to the preset number threshold.
  • the server can compare the usage time with the preset time threshold, and obtain the size relationship between the usage time and the preset time threshold, that is, the usage time is greater than the preset time threshold, or the usage time is less than or equal to the preset time threshold.
  • the server may determine that the clean state of the vehicle is dirty, and the vehicle needs to be cleaned.
  • step 53 when the number of uses is less than or equal to the preset number threshold and the use time is less than or equal to the preset time threshold, the server can determine that the clean state of the vehicle is a clean state.
  • the server can determine that the clean state of the carrier is a clean state.
  • the server can determine that the carrier does not need to be cleaned.
  • the server can obtain the use status of the vehicle, which includes the unavailable state (NotAvaiable), the empty state (Empty), the in-use state (InUse) and the scrapped state (Scrapped).
  • the server can obtain the use status of the vehicle, see FIG. 7, including steps 71 to 72.
  • the server may obtain the number of cleanings of the carrier and a preset number threshold.
  • step 72 when the number of cleaning times is equal to the preset number threshold, the server can determine that the current state of the vehicle is an unavailable state; when the number of cleaning times is less than the preset number threshold, the server can determine to maintain the current state of the vehicle; the current state is an empty state or an in-use state.
  • step 42 a next state of the carrier is determined according to the use state, the retention state, and the clean state.
  • the service end can determine the next state of the carrier according to the use state, the detention state and the clean state, so as to realize the normal circulation of the carrier in the actual production process.
  • the life cycle of the carrier is shown in FIG8. Referring to FIG8, in the carrier creation stage, the use state of the carrier is unavailable, the clean state is dirty and the detention state is not detained. In the carrier cleaning stage, the use state of the carrier is vacant, the clean state is clean and the detention state is not detained. In the carrier binding batch stage, the use state of the carrier is in use, the clean state is clean and the detention state is not detained. When the user finds that there is a problem with the carrier or the object in the carrier, the user can choose to detain the carrier in the interactive page.
  • the use state of the carrier is in use, the clean state is clean and the detention state is detained (OnHold).
  • the user can choose to release the carrier in the interactive page.
  • the use state of the carrier is in use, the clean state is clean and the detention state is not detained (NotOnHold).
  • the vehicle unbinding batch stage the vehicle's usage status is unavailable (needs cleaning), the clean status is dirty, and the detained status is not detained.
  • the vehicle cleaning stage the vehicle's usage status is empty, the clean status is clean, and the detained status is not detained.
  • the vehicle scrapping stage the vehicle's usage status is empty, the clean status is clean, and the detained status is not detained.
  • the vehicle cancellation and scrapping stage the vehicle's usage status is unavailable, the clean status is clean, and the detained status is not detained. From vehicle creation to vehicle scrapping and cancellation of scrapping, the vehicle completes a life cycle. Afterwards, the above stages are cycled and the vehicle is reused to achieve the effect of managing the vehicle's life cycle.
  • the clean state of the carrier also includes the pollution level.
  • the server can obtain the clean state of the carrier, see Figure 9, including: the server can obtain the pollution level of the carrier and the pollution level of the process site.
  • the above pollution level is pre-set for the carrier and the process site, for example, the dust level is 10,000 or 1 million.
  • the server can determine that the carrier successfully enters the process site.
  • the server can determine whether there is a conversion path between the pollution level of the carrier and the pollution level of the process site.
  • the conversion path refers to a pre-set conversion rule, for example, a carrier with a dust level of 10,000 can enter a process site with a dust level of 1 million.
  • the server can determine that the carrier successfully enters the process site; when it is determined that there is no conversion path, the server can determine that the carrier fails to enter the process site.
  • the carrier is controlled according to the pollution level, which can ensure that the semiconductor production process is not affected by the carrier and improve production efficiency.
  • the solution provided by the embodiment of the present disclosure can obtain the use state, detention state and clean state of the carrier; then, the next state of the carrier is determined according to the use state, the detention state and the clean state.
  • the solution of this embodiment manages the life cycle of different types of carriers in a unified manner, which can improve the accuracy and utilization rate of the carrier, and thus help improve the yield and productivity of semiconductor products.
  • the semiconductor manufacturing execution system can maintain and activate the carrier according to the carrier specification information. Enter the carrier, where the entry method includes manual input and Excel import. Then, use the carrier again, at this time, you can record the carrier use stage and perform life cycle management; you can also maintain the carrier contamination level and verify the contamination level and process station.
  • the vehicle management process includes: vehicle specification modeling, vehicle specification freezing, vehicle specification activation, and approval phases. Among them, after the vehicle specification freezing, it can also include vehicle specification archiving, vehicle specification cloning, and vehicle specification upgrade.
  • Vehicle specification modeling is to save the vehicle specification information into the semiconductor manufacturing execution system through the modeling tool.
  • the user can perform modeling by either Excel import or manual entry.
  • the detection field CheckState can be used to manage the editing status of the specification information.
  • the detection field value is the checkout status CheckOut
  • it can be determined that an account is editing the specification information, and this account is called the editing account.
  • it can be determined whether the current account and the editing account are the same account. If the current account and the editing account are the same account, the current account can edit the specification information; if the current account and the editing account are not the same account, the current account cannot edit the specification information.
  • the vehicle specifications can be frozen to solidify the vehicle specification information, and cannot be edited or deleted again, which can prevent the published specification information from being tampered with.
  • the specification information can be activated after being frozen.
  • the operator can create and use a carrier of this specification in the production system.
  • the activation must be confirmed by a designated person before the activation can be successful.
  • the semiconductor manufacturing execution system can introduce a sign-off mechanism to ensure that the specification data released to the production environment has been approved, and the approval information is recorded and traceable. If the user modifies the published specification information according to business needs, the semiconductor packaging system can provide two editing methods, namely the carrier specification upgrade and carrier specification cloning shown in Figure 11.
  • Vehicle specification upgrade requires upgrading the original vehicle specification information.
  • the new version of the specification information is the same as the original version of the specification information except for the version number.
  • the new version of the specification information can be edited.
  • the specification information of all vehicles of this specification in the production environment is updated, and the new version of the specification information is frozen and activated.
  • the freezing and activation process is shown in Figure 13.
  • Carrier specification cloning is to create a carrier specification information with a new name.
  • the cloned specification information i.e. the specification information with the new name
  • the activated specification information with the new name can be managed as a new information carrier specification, which will not affect the management of the original carrier specifications.
  • the input and use of the carrier Referring to Figures 8 and 12, after completing the maintenance of the carrier specification information, the user can create a carrier of the corresponding specifications in the production operation platform, and manage the life cycle of the (physical) carrier in sequence, for example, carrier creation, carrier cleaning, batch binding, batch unbinding, carrier replacement, carrier detention, carrier release, carrier scrapping and cancellation of scrapping.
  • the carrier status, detention status and clean status are used to determine that the carrier is at different positions in the life cycle, and its status is also different.
  • the carrier needs to be cleaned regularly and needs to be scrapped after a certain period of use. Combining these two scenarios, the effective period of the carrier can be calculated in this embodiment.
  • the effective period of the carrier after each cleaning can be measured from the two dimensions of usage time and number of uses. When the effective period is reached, the carrier must be cleaned before it can continue to be used; further, the number of cleaning times of the carrier is limited. When the number of cleaning times of the carrier reaches a preset threshold, the carrier cannot be used and the user needs to scrap the carrier.
  • each cleaning action of the carrier can be recorded, and the clean state of the carrier can be reset to the clean state Clean; at the same time, the number of times the carrier can be used after cleaning U and the time T after cleaning are reset to 0.
  • the state of the carrier when the state of the carrier is adjusted to the unavailable state NotAvailable, it can be determined that the carrier has reached the service life set in the carrier specification and can no longer be cleaned or put into the production process. Otherwise, it can continue to be cleaned and used in the production process.
  • the judgment of the unbinding batch is triggered only when the clean state of the vehicle changes to the dirty state Dirty.
  • the carrier pollution level is maintained and verified.
  • different process sites have different controls on pollution levels.
  • the lithography site has extremely strict environmental requirements.
  • the pollution level of the carrier and the pollution level of the process site can be judged.
  • the carrier cannot enter the site for normal production.
  • the carrier can enter the site for normal production.
  • the setting of the pollution level conversion path is provided in this embodiment to meet the needs, as shown in Figure 16.
  • the specification information is maintained in the modeling tool, and its data is finally persisted in the Oracle database.
  • the system architecture of the modeling tool is shown in FIG. 17 .
  • the modeling tool includes an Oracle database and a vehicle tool.
  • the vehicle tool includes vehicle modeling, version management, freeze activation, and editing rights control.
  • vehicle modeling includes vehicle type modeling and vehicle specification modeling.
  • the Oracle database includes vehicle type information, vehicle specification information, and vehicle information. The modeling tool and the Oracle database communicate using the TCP/IP protocol.
  • the user enters and queries production information on the Winform client, and the results are sent to the server through tibco; after relevant logical processing, they are persisted in the Oracle database.
  • the system architecture of the user operation platform is shown in Figure 18.
  • the system architecture of the user operation platform includes the user operation platform, server and Oracle database.
  • the user operation platform includes client interface, vehicle creation, specification information review, vehicle cleaning, batch binding, batch unbinding, vehicle scrapping, Winform+Infragistics module.
  • the server includes QRY service, CNM service, CNX service and Spring boot+Spring MVC+Bpei.
  • the embodiment of the present disclosure also provides a vehicle status update method, see FIG. 19 , which includes steps 191 to 193 .
  • step 191 in response to detecting an operation to configure a vehicle, a creation page is displayed; the creation page includes a creation button and specification parameters.
  • the user can perform configuration operations through the FactoryModeler client in the semiconductor packaging system.
  • the user operates the FactoryModeler client, and in response to detecting the operation of configuring the carrier, a maintenance page as shown in FIG20 is displayed.
  • a button (create) and specification parameters are created on the creation page.
  • step 192 in response to the operation of configuring the specification parameters, the specification information corresponding to the specification parameters is obtained.
  • TimeUserLimit is 2 hours
  • CleanTimeLimit is 2 hours, etc., which can be set according to specific scenarios and are not limited here.
  • step 193 in response to detecting an operation of creating a vehicle, the vehicle is created according to the specification information and the life cycle of the vehicle is managed.
  • the semiconductor manufacturing execution system in response to detecting an operation of displaying carrier specification information, may display the specification information of the carrier as shown in FIG20. Then, in response to detecting an operation of editing the specification information of the carrier, the semiconductor manufacturing execution system may obtain the input specification information and update the specification information.
  • the semiconductor manufacturing execution system in response to detecting an operation of displaying the specification information of the carrier, may display the specification information of the carrier, such as the carrier. Then, in response to detecting an operation of upgrading the specification information, the semiconductor manufacturing execution system may generate a new version of the specification information; the new version of the specification information is different from the original version of the specification information in version but the other contents are the same. Thereafter, in response to detecting an operation of editing the new version of the specification information, the semiconductor manufacturing execution system may edit the new version of the specification information and freeze it. Finally, in response to detecting an operation of activating the new version of the specification information, the semiconductor manufacturing execution system may activate the new version of the specification information and update the status of the original version of the specification information to an inactivated status.
  • the semiconductor manufacturing execution system in response to detecting an operation of displaying specification information of the carrier, may display specification information of the carrier; in response to detecting an operation of cloning specification information, the semiconductor manufacturing execution system may generate specification information of a new name; the specification information of the new name has a different name from the specification information of the original name but the other contents are the same; in response to detecting an operation of editing the specification information of the new name, the semiconductor manufacturing execution system may edit the specification information of the new name and freeze it; in response to detecting an operation of activating the specification information of the new name, the semiconductor manufacturing execution system may activate the specification information of the new name.
  • the semiconductor manufacturing execution system may display the specification information of the carrier in response to detecting an operation of displaying the specification information of the carrier. Then, in response to detecting an operation of detaining the carrier or releasing the carrier, referring to FIG. 22 and FIG. 23 , the detention status of the carrier is adjusted to being detained or not detained, respectively.
  • the semiconductor manufacturing execution system may display the specification information of the carrier in response to detecting an operation of displaying the specification information of the carrier. Then, in response to detecting an operation of scrapping the carrier, referring to FIG. 24 , the semiconductor manufacturing execution system may adjust the use status of the carrier to a scrapped status.
  • the semiconductor manufacturing execution system may bind the carrier to a target batch in response to detecting an operation of binding a carrier to a batch. Then, in response to detecting an operation of unbinding a carrier to a batch, the semiconductor manufacturing execution system may unbind the target batch from the carrier, as shown in FIG. 25 .
  • the semiconductor manufacturing execution system may display the specification information of the carrier in response to detecting an operation of displaying the carrier specification information. Then, in response to detecting an operation of adjusting the position of the carrier, as shown in FIG. 26 , the semiconductor manufacturing execution system may adjust the position of the carrier to the target position.
  • this embodiment further provides a vehicle status updating device, as shown in FIG. 27 , comprising:
  • the status acquisition module 271 is used to acquire the use status, detention status and clean status of the carrier;
  • the state determination module 272 is used to determine the next state of the carrier according to the use state, the retention state and the clean state.
  • this embodiment further provides a vehicle status updating device, as shown in FIG. 28 , comprising:
  • a specification information acquisition module 282 configured to acquire specification information corresponding to the specification parameters in response to an operation of configuring the specification parameters
  • the lifecycle management module 283 is used to create the vehicle according to the specification information and manage the lifecycle of the vehicle in response to detecting the operation of creating the vehicle.
  • the device embodiment shown in this embodiment matches the content of the above method embodiment, and the content of the above method embodiment can be referred to, which will not be repeated here.
  • a server is also provided, see FIG. 29 , comprising:
  • the memory 292 is used to store computer programs executable by the processor 291;
  • the processor 291 is used to execute the computer program in the memory 292 to implement the above method.

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Abstract

提供了一种载具状态更新方法和装置、服务器。该方法包括：获取载具的使用状态、扣留状态和洁净状态（41）；根据使用状态、扣留状态和洁净状态确定载具的下一状态（42）；根据当前状态管理载具的生命周期。本发明可以确定载具的下一状态且可以对不同种类的载具的生命周期进行统一管理，可以提高载具的准确率和使用率，进而有利于提高半导体产品的良率和生产率。

Description

载具状态更新方法和装置、服务器 技术领域
本公开涉及数据处理技术领域，尤其涉及一种载具状态更新方法和装置、服务器。
背景技术
目前，在生产半导体产品的过程中，需要使用不同种类的载具，以为半导体产品提供保护、运送和储存等功能，能够有效避免产品在不同工艺站点之间运送时带来的污染及静电损害等问题，有效提升良率。
考虑到不同载具所装载的产品、可使用次数、可使用容量等属性的不同而衍生出多种类型，使得载具具有不同的使用寿命，导致无法统一管理载具，有可能影响到生产效率。
发明内容
本公开提供一种载具状态更新方法和装置、服务器，以解决相关技术的不足。
根据本公开实施例的第一方面，提供一种载具状态更新方法，包括：
获取载具的使用状态、扣留状态和洁净状态；
根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。
可选地，获取载具的洁净状态，包括：
获取所述载具的使用时长和使用次数；
当所述使用次数大于预设次数阈值和/或所述使用时长大于预设时长阈值时，确定所述载具的洁净状态为脏污状态；
当所述使用次数小于或等于所述预设次数阈值且所述使用时长小于或等于所述预设时长阈值时，确定所述载具的洁净状态为干净状态。
可选地，获取所述载具的使用时长，包括：
获取所述载具对应同一批次产品的绑定时间和解绑时间；所述绑定时间是指产品置入载具的时间，所述解绑时间是指产品从载具离开的时间；
根据所述绑定时间和所述解绑时间确定本次使用时间；
根据所述载具的历史使用时间和所述本次使用时间计算所述载具的使用时长。
可选地，当检测到所述载具的洁净状态变为脏污状态时，获取载具的使用状态，包括：
获取所述载具的清洗次数和预设次数阈值；
当所述清洗次数等于所述预设次数阈值时，确定所述载具的当前状态为不可用状态；当所述清洗次数小于所述预设次数阈值时，确定保持所述载具的当前状态；所述当前状态为空置状态或者使用中状态。
可选地，获取载具的洁净状态，包括：
获取所述载具的污染等级和工艺站点的污染等级；
当所述载具的污染等级与所述工艺站点的污染等级匹配时，确定所述载具成功进入所述工艺站点。
可选地，获取载具的洁净状态，还包括：
当所述载具的污染等级与所述工艺站点的污染等级不匹配时，确定所述载具的污染等级与所述工艺站点的污染等级之间是否存在转换通路；
当确定存在转换通路时，确定所述载具成功进入所述工艺站点；当确定不存在转换通路时，确定所述载具进入所述工艺站点失败。
可选地，所述方法还包括：
按照预设载具模型创建所述载具；所述载具的初始状态为不可用状态、所述洁净状态为脏污状态以及扣留状态为未扣留。
可选地，所述预设载具模型存储到半导体制造执行系统的基础数据模块之内；所述基础数据模块用于创建各种载具对应的预设载具模型以及维护载具状态。
可选地，所述方法还包括：
响应于检测到编辑所述载具的规格信息的操作，获取所述载具的规格信息内的检测字段；所述检测字段包括检出状态；
当所述检测字段不是所述检出状态时，确定所述载具的规格信息处于不可编辑状态；
当所述检测字段为所述检出状态时，对比当前账户与编辑所述规格信息的编辑账户 是否为同一账户；
当所述当前账户和所述编辑账户不同时，确定拒绝所述当前账户编辑所述载具的规格信息；当所述当前账户和所述编辑账户相同时，确定允许所述当前账户编辑所述载具的规格信息并在编辑完成后冻结所述规格信息。
可选地，所述载具的规格信息存储到半导体制造执行系统的载具模块之内；所述载具模块用于管理载具业务。
可选地，所述载具的规格信息存储到半导体制造执行系统的载具模块之内，所述规格信息供所述载具模块和在制品模块使用；所述载具模块用于管理载具业务；所述在制品模块用于批次指定载具。
可选地，所述方法还包括：
响应于检测到激活所述载具的规格信息的请求，生成待审核信息；
响应于所述待审核信息被审批，确定将所述载具投入使用。
可选地，所述方法还包括：
响应于检测到升版规格信息的操作，生成新版本的规格信息；所述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同；
响应于检测到编辑所述新版本的规格信息的操作，编辑所述新版本的规格信息并冻结；
响应于检测到激活所述新版本的规格信息的操作，激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。
可选地，所述方法还包括：
响应于检测到克隆规格信息的操作，生成新名称的规格信息；所述新名称的规格信息与原名称的规格信息的名称不同且其他内容相同；
响应于检测到编辑所述新名称的规格信息的操作，编辑所述新名称的规格信息并冻结；
响应于检测到激活所述新名称的规格信息的操作，激活所述新名称的规格信息。
可选地，所述方法还包括：
根据TibcoRV消息订阅方式获取XML格式的载具数据，所述载具数据包括载具的 使用状态、扣留状态和洁净状态；所述载具数据还包括服务端对应的BPEL名称；
查询到所述BPEL名称对应的Java文件；所述Java文件包括releaseMaterial方法；
调用所述releaseMaterial方法使载具模块处理业务；其中处理业务包括操作数据库以更新载具的使用状态、扣留状态和洁净状态；
响应于业务处理完成，生成并返回XML格式的响应信息。
根据本公开实施例的第二方面，提供一种载具状态更新方法，包括：
响应于检测到配置载具的操作，显示创建页面；所述创建页面包括创建按键和规格参数；
响应于配置规格参数的操作，获取所述规格参数对应的规格信息；
响应于检测创建载具的操作，根据所述规格信息创建所述载具并管理所述载具的生命周期。
可选地，所述方法还包括：
响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
响应于检测到编辑载具的规格信息的操作，获取所输入的规格信息并更新所述规格信息。
可选地，所述方法还包括：
响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
响应于检测到升版规格信息的操作，生成新版本的规格信息；所述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同；
响应于检测到编辑所述新版本的规格信息的操作，编辑所述新版本的规格信息并冻结；
响应于检测到激活所述新版本的规格信息的操作，激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。
可选地，所述方法还包括：
响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
响应于检测到克隆规格信息的操作，生成新名称的规格信息；所述新名称的规格信 息与原名称的规格信息的名称不同且其他内容相同；
响应于检测到编辑所述新名称的规格信息的操作，编辑所述新名称的规格信息并冻结；
响应于检测到激活所述新名称的规格信息的操作，激活所述新名称的规格信息。
可选地，所述方法还包括：
响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
响应于检测到扣留载具或者放行载具的操作，分别将所述载具的扣留状态调整为扣留中或者未扣留。
可选地，所述方法还包括：
响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
响应于检测到报废载具的操作，将所述载具的使用状态调整为报废状态。
可选地，所述方法还包括：
响应于检测到对载具绑定批次的操作，绑定所述载具至目标批次；
响应于检测到对载具解绑批次的操作，将所述目标批次从所述载具解绑。
可选地，所述方法还包括：
响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
响应于检测到调整载具位置的操作，调整所述载具的位置至目标位置。
根据本公开实施例的第三方面，提供一种载具状态更新装置，包括：
状态获取模块，用于获取载具的使用状态、扣留状态和洁净状态；
状态确定模块，用于根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。
可选地，所述状态获取模块包括：
时长获取子模块，用于获取所述载具的使用时长和使用次数；
次数获取子模块，用于获取所述载具的使用次数；
脏污状态确定子模块，用于在所述使用次数大于预设次数阈值和/或所述使用时长大于预设时长阈值时，确定所述载具的洁净状态为脏污状态；
干净状态确定子模块，用于在所述使用次数小于或等于所述预设次数阈值且所述使用时长小于或等于所述预设时长阈值时，确定所述载具的洁净状态为干净状态。
可选地，所述时长获取子模块包括：
时间获取单元，用于获取所述载具对应同一批次产品的绑定时间和解绑时间；所述绑定时间是指产品置入载具的时间，所述解绑时间是指产品从载具离开的时间；
时间确定单元，用于根据所述绑定时间和所述解绑时间确定本次使用时间；
时间计算单元，用于根据所述载具的历史使用时间和所述本次使用时间计算所述载具的使用时长。
可选地，当检测到所述载具的洁净状态变为脏污状态时，所述状态获取模块包括：
次数获取子模块，用于获取所述载具的清洗次数和预设次数阈值；
状态确定子模块，用于在当所述清洗次数等于所述预设次数阈值时，确定所述载具的当前状态为不可用状态；在所述清洗次数小于所述预设次数阈值时，确定保持所述载具的当前状态；所述当前状态为空置状态或者使用中状态。
可选地，所述状态获取模块包括：
污染等级获取子模块，用于获取所述载具的污染等级和工艺站点的污染等级；
站点进入确定子模块，用于在所述载具的污染等级与所述工艺站点的污染等级匹配时，确定所述载具成功进入所述工艺站点。
可选地，所述状态获取模块还包括：
转换通路判断子模块，用于在所述载具的污染等级与所述工艺站点的污染等级不匹配时，确定所述载具的污染等级与所述工艺站点的污染等级之间是否存在转换通路；
进入确定子模块，用于在确定存在转换通路时，确定所述载具成功进入所述工艺站点；在确定不存在转换通路时，确定所述载具进入所述工艺站点失败。
可选地，所述装置还包括：
载具创建模块，用于按照预设载具模型创建所述载具；所述载具的初始状态为不可用状态、所述洁净状态为脏污状态以及扣留状态为未扣留。
可选地，所述预设载具模型存储到半导体制造执行系统的基础数据模块之内；所述基础数据模块用于创建各种载具对应的预设载具模型以及维护载具状态。
可选地，所述装置还包括：
字段获取子模块，用于响应于检测到编辑所述载具的规格信息的操作，获取所述载具的规格信息内的检测字段；所述检测字段包括检出状态；
不可编状态确定子模块，用于在所述检测字段不是所述检出状态时，确定所述载具的规格信息处于不可编辑状态；
账户对比子模块，用于在所述检测字段为所述检出状态时，对比当前账户与编辑所述规格信息的编辑账户是否为同一账户；
编辑拒绝子模块，用于在所述当前账户和所述编辑账户不同时，确定拒绝所述当前账户编辑所述载具的规格信息；
编辑允许子模块，用于在所述当前账户和所述编辑账户相同时，确定允许所述当前账户编辑所述载具的规格信息并在编辑完成后冻结所述规格信息。
可选地，所述载具的规格信息存储到半导体制造执行系统的载具模块之内；所述载具模块用于管理载具业务。
可选地，所述载具的规格信息存储到半导体制造执行系统的载具模块之内，所述规格信息供所述载具模块和在制品模块使用；所述载具模块用于管理载具业务；所述在制品模块用于批次指定载具。
可选地，所述装置还包括：
审核信息生成模块，用于响应于检测到激活所述载具的规格信息的请求，生成待审核信息；
载具使用模块，用于响应于所述待审核信息被审批，确定将所述载具投入使用。
可选地，所述装置还包括：
规格信息生成模块，用于响应于检测到升版规格信息的操作，生成新版本的规格信息；所述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同；
规格信息编辑模块，用于响应于检测到编辑所述新版本的规格信息的操作，编辑所述新版本的规格信息并冻结；
规格信息激活模块，用于响应于检测到激活所述新版本的规格信息的操作，激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。
可选地，所述装置还包括：
规格信息生成模块，用于响应于检测到克隆规格信息的操作，生成新名称的规格信息；所述新名称的规格信息与原名称的规格信息的名称不同且其他内容相同；
规格信息编辑模块，用于响应于检测到编辑所述新名称的规格信息的操作，编辑所述新名称的规格信息并冻结；
规格信息激活模块，用于响应于检测到激活所述新名称的规格信息的操作，激活所述新名称的规格信息。
可选地，所述装置还包括：
载具数据获取模块，用于根据TibcoRV消息订阅方式获取XML格式的载具数据，所述载具数据包括载具的使用状态、扣留状态和洁净状态；所述载具数据还包括服务端对应的BPEL名称；
Java文件查询模块，用于查询到所述BPEL名称对应的Java文件；所述Java文件包括releaseMaterial方法；
业务处理模块，用于调用所述releaseMaterial方法使载具模块处理业务；其中处理业务包括操作数据库以更新载具的使用状态、扣留状态和洁净状态；
响应信息返回模块，用于响应于业务处理完成，生成并返回XML格式的响应信息。
根据本公开实施例的第四方面，提供一种载具状态更新装置，包括：
创建页面显示模块，用于响应于检测到配置载具的操作，显示创建页面；所述创建页面包括创建按键和规格参数；
规格信息获取模块，用于响应于配置规格参数的操作，获取所述规格参数对应的规格信息；
生命周期管理模块，用于响应于检测创建载具的操作，根据所述规格信息创建所述载具并管理所述载具的生命周期。
可选地，所述装置还包括：
规格信息显示模块，用于响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
规格信息更新模块，用于响应于检测到编辑载具的规格信息的操作，获取所输入的规格信息并更新所述规格信息。
可选地，所述装置还包括：
规格信息显示模块，用于响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
规格信息生成模块，用于响应于检测到升版规格信息的操作，生成新版本的规格信息；所述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同；
规格信息编辑模块，用于响应于检测到编辑所述新版本的规格信息的操作，编辑所述新版本的规格信息并冻结；
规格信息激活模块，用于响应于检测到激活所述新版本的规格信息的操作，激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。
可选地，所述装置还包括：
规格信息显示模块，用于响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
规格信息生成模块，用于响应于检测到克隆规格信息的操作，生成新名称的规格信息；所述新名称的规格信息与原名称的规格信息的名称不同且其他内容相同；
规格信息编辑模块，用于响应于检测到编辑所述新名称的规格信息的操作，编辑所述新名称的规格信息并冻结；
规格信息激活模块，用于响应于检测到激活所述新名称的规格信息的操作，激活所述新名称的规格信息。
可选地，所述装置还包括：
规格信息显示模块，用于响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
扣留状态确定模块，用于响应于检测到扣留载具或者放行载具的操作，分别将所述载具的扣留状态调整为扣留中或者未扣留。
可选地，所述装置还包括：
规格信息显示模块，用于响应于检测到显示载具规格信息的操作，显示所述载 具的规格信息；
报废状态调整模块，用于响应于检测到报废载具的操作，将所述载具的使用状态调整为报废状态。
可选地，所述装置还包括：
批次绑定模块，用于响应于检测到对载具绑定批次的操作，绑定所述载具至目标批次；
批次解绑模块，用于响应于检测到对载具解绑批次的操作，将所述目标批次从所述载具解绑。
可选地，所述装置还包括：
规格信息显示模块，用于响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
载具位置调整模块，用于响应于检测到调整载具位置的操作，调整所述载具的位置至目标位置。
根据本公开实施例的第五方面，提供一种服务器，包括：
存储器与处理器；
所述存储器用于存储所述处理器可执行的计算机程序；
所述处理器用于执行所述存储器中的计算机程序，以实现如第一方面或者第二方面任一项所述的方法。
根据本公开实施例的第六方面，提供一种非暂态计算机可读存储介质，当所述存储介质中的可执行的计算机程序由处理器执行时，能够如第一方面或者第二方面任一项所述的方法。
本公开的实施例提供的技术方案可以包括以下有益效果：
本公开实施例提供的方案中可以获取载具的使用状态、扣留状态和洁净状态；然后，根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。这样，本实施例的方案可以确定载具的下一状态且可以对不同种类的载具的生命周期进行统一管理，可以提高载具的准确率和使用率，进而有利于提高半导体产品的良率和生产率。
应当理解的是，以上的一般描述和后文的细节描述仅是示例性和解释性的，并不能限制本公开。
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此处的附图被并入说明书中并构成本说明书的一部分，示出了符合本公开的实施例，并与说明书一起用于解释本公开的原理。
图1是根据一示例性实施例示出的一种半导体制造执行系统的框图。
图2是根据一示例性实施例示出的一种半导体制造执行系统的应用架构图。
图3是根据一示例性实施例示出的一种半导体制造执行系统的操作流程图。
图4是根据一示例性实施例示出的一种载具状态更新方法的流程图。
图5是根据一示例性实施例示出的一种获取载具的洁净状态的流程图。
图6是根据一示例性实施例示出的一种获取载具的使用时长的流程图。
图7是根据一示例性实施例示出的一种获取载具的使用状态的流程图。
图8是根据一示例性实施例示出的一种生命周期的示意图。
图9是根据一示例性实施例示出的一种获取载具的洁净状态的流程图。
图10是根据一示例性实施例示出的一种载具的生命周期的流程图。
图11是根据一示例性实施例示出的一种载具的管理流程的流程图。
图12是根据一示例性实施例示出的一种编辑载具的规格信息的流程图。
图13是根据一示例性实施例示出的一种激活载具的规格信息的流程图。
图14是根据一示例性实施例示出的一种获取载具的洁净状态的流程图。
图15是根据一示例性实施例示出的一种获取载具状态的流程图。
图16是根据一示例性实施例示出的一种获取载具状态的流程图。
图17是根据一示例性实施例示出的一种建模工具的系统架构的框图。
图18是根据一示例性实施例示出的一种用户操作平台的系统架构的框图。
图19是根据一示例性实施例示出的一种载具状态更新方法的流程图。
图20是根据一示例性实施例示出的一种显示规格参数的示意图。
图21是根据一示例性实施例示出的一种创建载具的示意图。
图22是根据一示例性实施例示出的一种显示载具的扣留状态的示意图。
图23是根据一示例性实施例示出的一种显示载具的未扣留状态的示意图。
图24是根据一示例性实施例示出的一种显示报废状态的示意图。
图25是根据一示例性实施例示出的一种解绑载具的示意图。
图26是根据一示例性实施例示出的一种调整载具位置的示意图。
图27是根据一示例性实施例示出的一种载具状态更新装置的框图。
图28是根据一示例性实施例示出的一种载具状态更新装置的框图。
图29是根据一示例性实施例示出的一种服务器的框图。
具体实施方式
这里将详细地对示例性实施例进行说明，其示例表示在附图中。下面的描述涉及附图时，除非另有表示，不同附图中的相同数字表示相同或相似的要素。以下示例性所描述的实施例并不代表与本公开相一致的所有实施例。相反，它们仅是与如所附权利要求书中所详述的、本公开的一些方面相一致的装置例子。需要说明的是，在不冲突的情况下，下述的实施例及实施方式中的特征可以相互组合。
为解决上述技术问题，本公开实施例提供了一种载具状态更新方法和装置、服务器、非暂态计算机可读存储介质。上述载具状态更新方法可以适用于半导体制造执行系统。该半导体制造执行系统用于半导体封测全流程制造管理，执行生产订单、跟踪设备资源(如载具、物料等)的实时状态至完成半导体产品，达到对工厂的信息共享与流程自动化实施的效果。当工厂发生实时事件时，上述半导体制造执行系统会对该事件及时作出反应、报告，并用当前数据指导用户处理该事件，从而最大限度地提高生产效率与良率，有利于降低生产成本以及改善生产管理。并且，上述半导体制造执行系统采用模块化设计，可满足不同封测工艺技术生产需求，具有极好的灵活性与扩展性，从而实现最大的投入产出比，达到工业4.0要求的高灵活性和个性化生产模式。
图1是根据一示例性实施例示出的一种半导体制造执行系统的框图。参见图1，一种半导体制造执行系统包括：基础数据模块、工艺流程模块、生产计划模块、在制品模块、工程管理模块、Recipe模块、设备模块、机限模块、载具模块、物料模块、治具 模块、包装模块。
在一实施例中，基础数据模块可以是一个统一的基础数据模型平台，为半导体制造执行系统提供基础数据建模功能，包括但不限于：工厂建模、设备建模、系统状态建模、封装形式建模、用户权限建模、recipe(不同半导体器件需要不同的程式、配方或者菜单)基础数据建模、物料基础数据建模、工艺工步流程建模、策略建模、数据采集基础数据建模和警报基础数据建模。可理解的是，该基础数据模型作为一个标准框架，为用户提供了所需的基础通用功能，并提供了一系列的自定义扩展设置，如统一的命名规范、统一的数据枚举类型和统一的业务SQL管理，有利于应用程序的快速构建；交叉多应用程序中对象的定义标准化、支持多语种和多单位，更加灵活，扩展性更强和更灵活。
本实施例中，工厂建模功能用于支持工厂基础数据的维护、支持多工厂模式和支持工厂下区域的创建。
本实施例中，设备建模功能用于支持设备主数据的创建和设备port口数据维护。
本实施例中，系统状态建模功能用于支持批次状态维护、支持设备状态维护、支持物料状态维护、支持载具状态维护和支持治具状态维护等等。
本实施例中，封装形式建模用于用来维护封装相关属性数据，用于统一维护管理不同规格的封装方式。
本实施例中，用户权限建模用于支持用户、用户组和用户角色的创建和维护，支持用户菜单和用户操作界面密码校验的维护。
本实施例中，recipe基础数据建模用于支持工艺菜单数据的创建和维护，支持recipe设备数据关系的维护。
本实施例中，物料基础数据建模用于支持物料基础数据的创建和维护
本实施例中，工艺工步流程建模用于支持工步、工序、工段、流程的基础数据的创建和维护，支持流程的可视化界面编辑，支持分支流程的创建和维护，支持返工流程的创建和维护。
本实施例中，策略建模用于支持产品级、工艺级、工步级流程建模，以方便半导体制造执行系统根据不同的策略配置在实际生产过程中选择不同的设备和recipe进行业务操作。
本实施例中，数据采集基础数据建模用于支持数据采集明细项的创建和维护，支持数据采集规则的维护。
本实施例中，警报基础数据建模用于支持警报系统信息维护，支持警报触发条件进行维护管理，支持警报触发后续动作进行维护管理。
在一实施例中，工艺流程模块可以允许用户定义产品及其对应的工艺流程，包括每个工步类型及相关流程控制策略，从而为半导体制造执行系统提供流程管理规范。以版本控制为例，工艺流程模块可以提供一套完整的版本控制机制，系统内所有的激活在制的流程必须严格遵守这一版本控制系统，可以避免生产工艺数据出现错误，从而避严重事故。以流程定义为例，工艺流程模块可以支持多路径(Multi-path)和返工，并且现场作业时可基于预先设定条件自动进行路径选择。工艺流程模块还可以支持各种产品流程规则控制，可根据产品、流程的条件进行不同的流程控制，上述条件可以细分工步级、工序级、流程级、产品级和批次级等。
本实施例中，工艺工步流程建模功能用于支持工步、工序、工段和流程的基础数据的创建和维护，支持流程的可视化界面编辑，支持分支流程的创建和维护，支持返工流程的创建和维护。
本实施例中，产品流程配置功能用于根据不同产品配置不同的工艺流程，同产品同流程下可根据不同的策略选择不同的recipe和设备。
在一实施例中，在制品模块可以对在制品进行加工管理，指导操作员(即用户)按照预先设定的工艺要求加工产品，并对加工信息进行详细的跟踪和记录。其中，最主要的作业管理功能允许跟踪多批次同时处理，提供批次的历史追溯。除常用的创建批次(CreateLot)进站(Track In)/出站(Track Out)外，其它功能包括：分批(Split)/合批(Merge)、暂停(Hold)/释放(Relase)、跳步(Skip)/未来动作(Future Action)、站内返工(Internal-rework)/站外返工(External-rework)，批次报废，批次取消报废，批次指定载具，特殊业务分批出站，合批出站，多芯键合进站，编测一体进出站等。
在一实施例中，工程管理模块可以对工程相关业务进行管理，包括但不限于：上岗证管理、QTime管理、BOM管理、流程卡管理和批次预约等功能。其中，
在一实施例中，载具模块可以支持载具相关业务的管理，例如，创建载具、清洗载具、绑定载具、解绑载具、暂停载具和释放载具等，支持载具的使用寿命管理，使用次数管理，支持载具类型的管理。载具创建功能用于载具的规格信息的创建。清洗载 具功能用于新载具和使用后载具的重新清洗。绑定载具功能用于支持载具数据和批次的绑定。解绑载具功能用于支持载具和批次数据的解绑操作。暂停载具功能用于对载具进行暂停控制。释放载具功能用于对暂停的载具进行恢复操作。
在一实施例中，半导体制造执行系统选用CS架构设计，基于Client-Server(C/S，客户端-服务端)架构模式开发，以保证系统稳定性，界面操作流畅性，提升用户的体验度。其中，服务端负责数据的管理，客户端负责完成与用户的交互任务。客户端模块分为两部分：一部分为基础数据建模，命名为FactoryModeler(Modeler)，另外一部分用于用户的操作交互界面，命名为Operator Interface Client(OIC)。前端选用C#语言winform框架，服务器端采用Java语言，采用sping boot 2.x框架进行开发。前后端通信的数据使用XML格式交互，对应消息发布订阅的处理选用Tibco Rendezvous(Tibco RV)，数据库选取为Oracle 19C，技术架构如图2所示。
结合图1和图2，半导体制造执行系统中系统与模块的对应关系包括：
在制程过程中实现工艺制程卡控的功能模块：OIC系统中工程管理模块，机限管理模块。
在制程过程中实现记录追溯的功能模块：OIC系统中生产计划模块，在制品模块，批次模块，包装模块。
在制程过程中辅助的关键功能模块：OIC系统中设备模块，工艺菜单模块，工艺流程模块，物料模块，载具模块。
在制程过程中核心数据支撑模块：FactoryModeler系统中基础数据模块。
结合图1～图2所示的半导体制造执行系统，载具模块的工作过程包括：
载具创建：OIC前端页面填写业务数据，前端代码模块中MES.MOdule.Views.Carrier该代码模块对应前端载具管理模块，该模块下对应的代码MES.MOdule.Views.Durable.CarrierCreate.cs表示载具创建页面，在页面将数据封装为XML格式，其核心参数为服务端对应的BPEL名称“DurableCCarrierCreatereate.bpel”。
服务端根据TibcoRV消息订阅方式获取到BPEL名为“CarrierCreate.bpel”的xml数据，服务端自动根据前台传送的BPEL名称找到对应的BPEL，然后进入BPEL配置的java入口程序solution模块下zisemi-mes-be-solution中com.zisemi.mes.solution.event.carrier.CarrierCreateEvent.Java文件，执行event方法，event方法调用Core代码模块中的com.zisemi.mes.core.carrier对应服务端对应载具模块实现业 务处理(底层使用ORM框架，JDBC技术操作数据库，完成数据更新)，处理完成业务后，返回对应的消息，消息通过XML在传回给前端响应。
需要说明的是，该载具模块下其他功能业务代码逻辑同上，唯一变动点：前端页面不同，前端传入服务端BPEL名称不同，传入xml数据格式不同，其余服务端代码逻辑流程全部保持一致。
继续参见图1～图2，图3是根据一示例性实施例示出的一种半导体制造执行系统整体操作的流程图，参见图3，包括步骤31～步骤37：
在步骤31中，系统中FactoryModeler客户端响应于与用户的交互操作，通过基础数据模块创建基础数据。
1创建工厂信息；2创建用户信息；3创建用户组信息；4创建用户组菜单权限；5创建设备类型数据；6创建设备状态数据；7创建设备数据；8创建设备组信息；9创建设备Port信息；10创建治具类型信息；11创建治具状态信息；12创建治具信息；13创建载具类型信息；14创建载具状态信息；15创建载具信息；16创建原材料类型信息；17创建原材料状态信息；18创建批次类型信息；19创建批次状态信息；20创建仓库信息；21创建库位信息；22创建货架信息；23创建产品类型信息；24创建产品信息；25创建产品包装规格信息；26创建工步信息；27创建子流程信息(多个工步串联成子流程)；28创建主流程信息(多个子流程串联成主流程)；29创建Recipe信息。
在步骤32中，FactoryModeler客户端通过基础数据模块将基础信息数据串联成基础的业务底层数据。
1创建设备和recipe关系，以支撑工艺制程中使用设备加工时选择设备对于recipe加工。
2创建产品和流程的关系，以支撑制程中产品工艺流程流转。以下port说明：(1)如果涉及设备和物料关系的port，port指设备上的物料上料口；(2)如果涉及设备和治具关系的port，port指设备上的安装治具的设备位置，又称站位。
3创建设备port和物料类型关系，以支撑后续物料上机业务，即通过对应的port口将物料上机。
4创建设备port和治具类型关系，以支撑后续治具上机业务，即通过对应的port口将治具上机。
5创建物料类型和载具类型绑定，以支撑后续载具绑定批次时根据批次的原材料类型选择对于的载具。
6生产策略配置：产品下该流程下该工步设置对于的设备及关联出设备recipe。其中，生产策略包括3种模式：产品+工艺+工步模式，工艺+工步模式和工步模式。
在生产过程中，当产品、工艺和工步均能匹配产品+工艺+工步模式时，使用该模式下配置的设备和recipe加工。当产品、工艺或者工步不能匹配产品+工艺+工步模式时，匹配工艺+工步模式；当匹配上工艺+工步模式时，使用该工艺+工步模式下配置的设备和recipe加工；当不能匹配工艺+工步模式时，继续去匹配工步模式；如能匹配工步模型，使用该工步模式下的设备和recipe；如不能匹配则在制程中会进行卡控，不能选择合适的设备加工。
在步骤33中，系统中OIC客户端可以响应于与用户的交互操作，通过生产计划模块进行生产计划创建和计划执行操作。
1系统录入生产计划，例如一段时间内的某产品的计划产出量，计划开始时间，计划结束时间，优先级和负责人。
2计划执行：创建工单，根据车间的实际库存和产能进行制定工单信息，例如原计划订单号，工单号，工单产品来着计划订单产品，工单数量小于计划订单数据，优先级等相关信息的创建。
在步骤34中，系统中OIC客户端通过在制品模块和批次管理模块进行生产制造制程。
1创建批次：使用批次模块的批次创建，根据工单信息进行批次的生成(批次创建)，完成批次的创建。
2批次加工：使用在制品模块和批次模块的进站，出站操作进行批次操作
可理解的是，批次相关业务包括使用在制品模块和批次模块中的功能模块，如批次暂停，批次取消暂停，批次报废，批次取消报废，分批，合批，批次批量进站，批次批量出站进行工艺制程业务支持等。
在步骤35中，系统中OIC客户端通过在制品模块的批次出站功能控制批次出站或者使用载具模块的载具绑定功能进行载具绑定操作。
批次出站绑定载具：批次在进行出站操作的时候，选择载具信息，进行载具绑 定。载具绑定功能进行载具绑定：进入在载具绑定功能界面，选择批次信息，选择需要绑定的载具信息，点击绑定进行载具绑定。涉及载具相关业务：载具绑定之前需要进行载具清洗，载具状态更新过程中涉及到：载具暂停，载具取消暂停，载具报废，载具取消报废等场景的使用。
在步骤36中，系统中OIC客户端通过在制品模块的批次进出站进行批次制程管理。其中制程包括如下工艺段：切割-贴片-键合-封装-测试。
本步骤中，制程过程中：涉及到工艺相关的业务，使用工艺流程管理模块：批次在进行进站出站操作的工艺路线，严格按照工艺流程管理模块设置的工艺流程节点进行加工生产。
涉及到recipe相关的业务，使用设备进行加工，使用工艺菜单管理模块：设备根据配置的基础数据设备和recipe关系，及其结合生产策略进行选择对于的recipe进行加工生产。
涉及到设备模块的业务：设备需要定期点检和维护保养，因此批次在选择设备进行加工的同时，设备自身也会进行设备的一系列管理，如果设备到期未点检和未保养，该设备无法加工批次进行生产。因此系统需要进行设备点检和设备维保操作。
同时批次在进站操作的同时除对设备状态(IDEL，RUN状态才能加工批次)进行卡控外，还有许多设备的限制，以下机限管理模块：机限可以根据产品，流程，工步，设备，原材料类型，批次进行精确制定机限系统卡控条件，卡控条件可以正向设置(批次在制程中满足该条件后，会进行批次卡控无法操作设备进出站)，反向设置(与正向设置相反，只有满足条件的批次才能使用该设备进行进出站操作)。
本步骤中，设备在做维护和保养的同时，也需要监控设备状态，通常工厂分为手动和自动两种模式：
自动模块：MES通过传感器获取数据，或者会读取对设备数据进行收集存放在指定的文件内或其他数据库中，此时mes在做设备数据收集时，需要从其他数据库或者其他文件中解析设备数据并在MES系统中切换设备状态。或者MES系统和对应的相关性的系统(EAP系统，SCADA系统)进行数据交互，准确实时的获取设备状态，及其一些设备任务执行完成的指令。
手动模式：用户在修正和修改设备时，需要手动进入MES系统进行数据维护，此时MES系统会对设备状态进行统一管理，对于生产制程中进行设备状态的卡控。
涉及到设备物料业务：使用基础数据模块中的设备port和物料的关系，使用物料模块：进行物料上机，物料下机操作业务。
涉及到设备治具业务：使用基础数据模块中的设备port和治具的关系，使用治具模块：进行治具上机，治具下机操作业务。
涉及到批次控制业务：使用工程管理模块对应的功能，例如：Qtime功能，设置进站到出站的最大时间限制，批次在进站后触发Qtime计时，如果超过最大时间没有进行出站操作，后续出站会对批次进行卡控已超过最大限制时间，请联系产品工程师处理。
上岗证功能：即员工操作设备权限管理模块，只有对应员工有该设备的操作证，并且证件有效期未过期，员工才能操作该设备进行批次加工，进而严格卡控生产，放在生产工单(Manufacture order，MO)。
在步骤37中，系统中OIC客户端在批次制程结束后控制批次进入包装环节。
使用包装管理模块：进行批次盒码生成和对应箱码生成，生成后进行扫描箱号入库。
基于上述半导体制造执行系统，本公开实施例还提供的一种载具状态更新方法，图4是根据一示例性实施例示出的一种载具状态更新方法的流程图。参见图4，一种载具状态更新方法，包括步骤41～步骤42。
在步骤41中，获取载具的使用状态、扣留状态和洁净状态。
本实施例中，服务端存在不同种类的载具。在一示例中，服务端可以按照预设载具模型创建不同种类的载具，其中载具的初始状态为不可用状态(NotAvailable)、洁净状态为脏污状态(dirty)以及扣留状态为未扣留(NotOnhold)。例如，用户可以在(后续出现的FactoryModeler客户端的)交互页面内点击创建按键，此时交互页面内会出现所创建的载具以及载具的规格信息，例如工厂名称、版本号、载具类型、可清洗次数、预设次数阈值、预设时长阈值、创建时间、使用状态、洁净状态等等，可以根据具体场景进行设置，在此不作限定。
其中，预设载具模型存储到基础数据模块之内；所述基础数据模块用于创建各种载具对应的预设载具模型。上述规格信息还可以存储到载具模块之内，并且可以与相应物料或者批次绑定。载具绑定批次时，根据批次的原材料类型选择对应的载具。
在一实施例中，服务端还可以响应于检测到编辑载具的规格信息的操作，例如 点击修改(modify)按键，获取载具的规格信息内的检测字段，如版本号、洁净状态以及检出状态。上述检出状态用于表示有账户正在对该规格信息进行编辑。当载具的检测字段不是检出状态时，服务端可以确定载具的规格信息处于不可编辑状态。当上述检测字段为检出状态时，对比当前账户与编辑所述规格信息的编辑账户(即当前存在一个编辑载具规格信息的账户，称之为编辑账户)是否为同一账户。当当前账户和编辑账户不同时，服务端可以确定拒绝当前账户编辑载具的规格信息，即当前账户无法编辑上述载具的规格信息；当上述当前账户和编辑账户相同时，服务端可以确定允许当前账户编辑载具的规格信息并在编辑完成后冻结(Frozen)规格信息。本实施例中，在编辑结束后将载具的规格信息冻结，可以将规格信息固化，即不能再次编辑或删除，从而避免已经发布的规格信息被篡改。
在一实施例中，冻结之后的规格信息可以通过激活操作，发布给操作人员，使操作人员在生产系统中可以创建并使用该规格的载具，例如操作人员可以创建多个同一规格的载具。在一示例中，服务端可以响应于检测到激活载具的规格信息的请求，生成待审核信息。然后，响应于待审核信息被审批，服务端可以确定将载具投入使用。需要说明的是，上述待审核信息通常由指定人员(如操作人员的领导等)确认才能激活成功。这样，本实施例中通过引入签核机制，确保发布到生产环境中的规格信息经过审批，且审批信息有记录和可追溯，提高生产效率和产品良率。
在一实施例中，用户可以随着业务需要修改已经发布的规格信息，从而对载具的规格信息进行规格升版。服务端可以响应于检测到升版规格信息的操作，生成新版本的规格信息。上述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同。然后，响应于检测到编辑所述新版本的规格信息的操作，服务端可以编辑所述新版本的规格信息并冻结。之后，响应于检测到激活所述新版本的规格信息的操作，服务端可以激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。这样，本实施例中通过升版规格信息，可以对新版本的规格信息进行编辑和冻结操作，而不影响到原有规格信息，从而不影响到原有载具的管理。
在一实施例中，用户可以随着业务需要克隆已经发布的规格信息，从而克隆载具的规格信息。服务端可以响应于检测到克隆规格信息的操作，生成新名称的规格信息。上述新名称的规格信息与原名称的规格信息的名称不同且其他内容相同。然后，响应于检测到编辑所述新名称的规格信息的操作，服务端可以编辑所述新名称的规格信息并冻结。之后，响应于检测到激活所述新名称的规格信息的操作，服务端可以激活所述新名 称的规格信息。这样，本实施例中通过克隆规格信息，可以对新名称的规格信息进行编辑和冻结操作并在激活后作为一种规格的载具使用，而不影响到原名称的规格信息，从而不影响到原有载具的管理。
本实施例中，服务端可以获取载具的洁净状态，参见图5，包括步骤51～步骤53。
在步骤51中，服务端可以获取所述载具的使用时长和使用次数。
本步骤中，服务端可以获取所述载具的使用时长，参见图6，包括步骤61～步骤63。
在步骤61中，服务端可以获取所述载具对应同一批次产品的绑定时间和解绑时间；所述绑定时间是指产品置入载具的时间，所述解绑时间是指产品从载具离开的时间。例如在载具内放入对象(原料、半成品、产品等)时此时对载具进行绑定批次，记录绑定时间t_start；在对象取出时对载具解绑批次，记录解绑时间t_end。
在步骤62中，服务端可以根据所述绑定时间和所述解绑时间确定本次使用时间。例如，本批次的使用时间为：Tuse＝t_end-t_start。
在步骤63中，服务端可以根据所述载具的历史使用时间和所述本次使用时间计算所述载具的使用时长。例如，载具的使用时间为：T＝T1+Tuse。T1表示历史使用时间。
本步骤中，服务端可以获取所述载具的使用次数，即在每次解绑批次后载具的使用次数增加1，即解绑本批次后的使用次数为：U＝U1+1。U1表示历史使用次数，U表示当前使用次数。
在步骤52中，当所述使用次数大于预设次数阈值和/或所述使用时长大于预设时长阈值时，服务端可以确定所述载具的洁净状态为脏污状态。
本步骤中，服务端存储使用时长对应的预设时长阈值，即载具在每一次清洗后的可使用时间T limit。并且，服务端存储使用次数对应的预设次数阈值，即载具在每一次清洗后的可使用次数U limit。这样，在获取到使用次数之后，服务端可以对比使用次数与预设次数阈值，获得使用次数与预设次数阈值的大小关系，即使用次数大于预设次数阈值，或者，使用次数小于或者等于预设次数阈值。以及在获取到使用时长之后，服务端可以对比使用时长与预设时长阈值，获得使用时长与预设时长阈值的大小关系，即使用时长大于预设时长阈值，或者，使用时长小于或者等于预设时长阈值。
本实施例中，当使用次数大于预设次数阈值和/或使用时长大于预设时长阈值即(T＞T limit)+(U＞U limit)＞1时，服务端可以确定载具的洁净状态为脏污状态(dirty)，此时载具需要清洗。
在步骤53中，当所述使用次数小于或等于所述预设次数阈值且所述使用时长小于或等于所述预设时长阈值时，服务端可以确定所述载具的洁净状态为干净状态。
本步骤中，当所述使用次数小于或等于所述预设次数阈值且所述使用时长小于或等于所述预设时长阈值时，服务端可以确定所述载具的洁净状态为干净状态。或者说，当使用次数大于预设次数阈值和/或使用时长大于预设时长阈值即(T＞T limit)+(U＞U limit)＝0均不成立时，服务端可以确定载具无需清洗。
本实施例中，服务端可以获取载具的使用状态，该使用状态包括不可用状态(NotAvaiable)、空置状态(Empty)、使用中状态(InUse)和报废状态(Scrapped)。本步骤中，当检测到载具的洁净状态变为脏污状态时，服务器可以获取载具的使用状态，参见图7，包括步骤71～步骤72。
在步骤71中，服务端可以获取所述载具的清洗次数和预设次数阈值。
本步骤中，服务器可以存储预设次数阈值C limit，服务端直接读取即可。载具在每一次清洗后，清洗次数增加1，即C＝C1+1，C1为历史清洗次数，C表示当前清洗次数。
在步骤72中，当所述清洗次数等于所述预设次数阈值时，服务器可以确定所述载具的当前状态为不可用状态；当所述清洗次数小于所述预设次数阈值时，服务器可以确定保持所述载具的当前状态；所述当前状态为空置状态或者使用中状态。
在步骤42中，根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。
本实施例中，服务端可以根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态，实现载具在实际生产过程中的正常流转。载具的生命周期如图8所示。参见图8，在载具创建阶段，载具的使用状态为不可用状态、洁净状态为脏污状态和扣留状态为未扣留。在载具清洗阶段，载具的使用状态为空置状态、洁净状态为干净状态和扣留状态为未扣留。在载具绑定批次阶段，载具的使用状态为使用中、洁净状态为干净状态和扣留状态为未扣留。当用户发现载具或者载具内的对象存在问题时，可以在交互页面内选择扣留载具，此时载具的使用状态为使用中、洁净状态为干净状态 和扣留状态为扣留中(OnHold)。当解决载具或者载具内对象对应问题消失后，可以在交互页面内选择放行载具，此时载具的使用状态为使用中、洁净状态为干净状态和扣留状态为未扣留(NotOnHold)。在载具解绑批次阶段，载具的使用状态为不可用(需要清洗)、洁净状态为脏污状态和扣留状态为未扣留。在载具清洗阶段，载具的使用状态为空置状态、洁净状态为干净状态和扣留状态为未扣留。在载具报废阶段，载具的使用状态为空置状态、洁净状态为干净状态和扣留状态为未扣留。在载具取消报废阶段，载具的使用状态为不可用状态、洁净状态为干净状态和扣留状态为未扣留。从载具创建到载具报废和取消报废，载具完成一个生命周期。之后，上述各阶段进行循环，重复利用载具，达到对载具的生命周期进行管理的效果。
在生产半导体产品的过程中，不同工艺站点对于污染等级有着不同的管控，例如光刻站点对环境的要求极为严苛，为了防止因载具不满足站点的污染等级要求，在一实施例中载具的洁净状态还包括污染等级，此时服务端可以获取载具的洁净状态，参见图9，包括：服务端可以获取所述载具的污染等级和工艺站点的污染等级。上述污染等级是为载具和工艺站点预先设置的，例如灰尘等级为万级或者百万级。当所述载具的污染等级与所述工艺站点的污染等级匹配时，服务端可以确定所述载具成功进入所述工艺站点。当所述载具的污染等级与所述工艺站点的污染等级不匹配时，服务端可以确定所述载具的污染等级与所述工艺站点的污染等级之间是否存在转换通路。其中转换通路是指预先设置的转换规则，例如灰尘等级是万级的载具可以进入灰尘等级是百万级的工艺站点。当确定存在转换通路时，服务端可以确定所述载具成功进入所述工艺站点；当确定不存在转换通路时，服务端可以确定所述载具进入所述工艺站点失败。本实施例中根据污染等级管控载具，可以保证不因载具的原因影响到半导体生产过程，提高生产效率。
至此，本公开实施例提供的方案中可以获取载具的使用状态、扣留状态和洁净状态；然后，根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。这样，本实施例的方案对不同种类的载具的生命周期进行统一管理，可以提高载具的准确率和使用率，进而有利于提高半导体产品的良率和生产率。
结合图1～图3所示的半导体制造执行系统以及图4～图9所示的载具状态更新方法，下面结合各场景描述载具的生命周期的各阶段。
参见图10，半导体制造执行系统可以根据载具规格信息维护与激活载具。录入载具，其中录入方式包括手动输入和Excel导入。然后，再使用载具，此时可以记录载具使用阶段，进行生命周期管理；还可以根据维护载具污染等级并对污染等级和工艺站 点进行校验。
参见图11，载具的管理流程，包括：载具规格建模、载具规格冻结、载具规格激活、签核阶段。其中，载具规格冻结之后还可以包括载具规格归档、载具规格克隆和载具规格升版。
载具规格建模即将载具规格信息通过建模工具保存到半导体制造执行系统之中。本步骤中，参见图12，用户可以通过Excel导入或手动录入两种方式进行建模，在载具规格冻结之前，用户可以对建模信息进行编辑；为了避免多个用户同时编辑，可以采用检测字段CheckState对规格信息的编辑状态进行管理，当检测字段取值为检出状态CheckOut时，可以确定有账户正在编辑规格信息，此账户称之为编辑账户。此时可以判断当前账户和编辑账户是否为同一账户，如果当前账户和编辑账户是同一账户，当前账户可以编辑规格信息；如果当前账户和编辑账户不是同一账户，当前账户无法编辑规格信息。
本步骤中，编辑结束之后可以冻结载具规格以固化载具的规格信息，并且不能再次编辑和被删除，可以避免已经发布的规格信息被篡改。
本步骤中，冻结之后的规格信息可以进行激活操作。参见图13，操作人员在生产系统中可以创建并使用该规格的载具。为了让生产线内数据更加可靠，激活时需要由指定人员确认方能激活成功。半导体制造执行系统可以引入签核机制，确保发布到生产环境中的规格数据经过审批，且审批信息有记录，可追溯。如果用户根据业务需要修改已经发布的规格信息，半导体封装系统可以提供两种编辑方式，即图11中所展示的载具规格升版和载具规格克隆。
载具规格升版需要对原有载具规格信息进行升版，新版本的规格信息除版本号之外，其他内容同原版本的规格信息相同；此时可以编辑新版本的规格信息。然后，更新生产环境中所有该规格载具的规格信息，并将新版本的规格信息冻结后激活，其中冻结和激活流程如图13所示。
新版本的规格信息激活后，将原版本的规格信息自动变更为未激活状态。此时半导体制造执行系统内所有载具的规格自动继承新版本的规格信息。载具规格克隆是创建一个新名称的载具规格信息，克隆后的规格信息(即新名称的规格信息)除名称外其他内容与原规格信息的内容保持一致，用户可以对克隆后的规格信息进行编辑、冻结和激活操作。激活后的新名称的规格信息可以作为一种新的信息载具规格进行管理，不会 影响到原有载具规格的管理。
本实施例中，载具的录入和使用。参见图8和图12，完成维护载具规格信息之后，用户即可在生产操作平台中对相应规格的载具进行创建，依次实现对(实物)载具的生命周期进行管理，例如，载具创建、载具清洗、绑定批次、解绑批次、更换载具、载具扣留、载具放行、载具报废和取消报废等阶段。或者说，本实施例中，使用载具状态、扣留状态和洁净状态来确定载具处于生命周期中不同的位置，其状态也不同。
在生产过程中需要对载具进行定期清洗，并且在使用一定时间后需要将载具报废，结合这两个场景，本实施例中可以计算载具的使用有效期，可以从使用时间和使用次数两个维度衡量每次清洗后的载具可以使用的有效期，当达到有效期后，载具必须在清洗后才能继续使用；进一步，限制载具的清洗次数，当载具清洗次数达到预设次数阈值之后，该载具无法使用，用户需要将该载具进行报废操作。
参见图14，假设存在载具规格CarrierSpecA，载具清洗后可使用次数U limit，载具清洗后可使用时间T limit，载具的可清洗次数C limit，录入并清洗该规格的载具CarrierA后，此时载具CarrierA的使用次数U为0，使用时间T为0，清洗次数C为1。在生产过程中，该载具之内会不停的放入和取出生产批次，这一操作在载具生命周期中体现为载具的绑定批次和解绑批次。在绑定批次时，会记录批次的绑定事件t_start，在解绑载具时记录解绑时间t_end，载具解绑生产批次之后计算本次使用时间：T use＝t_end-t_start
然后，更新当前载具的使用时间：T＝T1+T use；
同时，系统会更新载具的使用次数：U＝U1+1。
本实施例中通过以下公式来决定载具是否需要清洗：
Figure PCTCN2022128770-appb-000001
本实施例中，载具清洗之后，可以对载具每次清洗动作进行记录，并将载具的洁净状态重置为干净状态Clean；同时，重置载具的清洗后可使用次数U和清洗后可使用时间T为0。除此之外，系统还会记录该载具的清洗次数C：C＝C1+1。当载具CarrierA的清洁状态变更为脏污状态dirty时，系统会做如下判定：
Figure PCTCN2022128770-appb-000002
本实施例中，将载具的状态调整为不可用状态NotAvailable时，可以确定载具 已经达到载具规格中设定的使用寿命，无法再进行清洗，也不能投入生产过程中。反之则可以继续清洗并再生产过程中进行使用。
本实施例中，参见图15，在载具生命周期中解绑批次的位置，只有当载具洁净状态变更为脏污状态Dirty时才会触发该解绑批次的判断。
本实施例中，载具污染等级的维护与校验。在生产过程中，不同的工艺站点对于污染等级有着不同的管控，例如光刻站点对环境的要求极为严苛的，为了防止因载具不满足站点的污染等级要求。此时，可以判断载具的污染等级和工艺站点的污染等级，当二者不匹配时，载具无法进入该站点进行正常生产。当二者相匹配时，载具可以进入该站点进行正常生产。此外，当业务中存在需要载具进入不同污染等级的站点时，本实施例中提供了污染等级转换通路的设定以满足需求，如图16所示。
本实施例中，规格信息在建模工具中进行维护，其数据最终在Oracle数据库中进行持久化保存，建模工具的系统架构如图17所示。
参见图17，建模工具包括Oracle数据库和载具工具。载具工具包括载具建模、版本管理、冻结激活和编辑权控制。其中，载具建模包括载具类型建模和载具规格建模。Oracle数据库包括载具类型信息、载具规格信息和载具信息。建模工具与Oracle数据库之间采用TCP/IP协议进行通信。
用户在Winform客户端上进行生产信息的录入与查询作业，其结果通过tibco发送给服务端Server；经过相关逻辑处理后，在Oracle数据库中进行持久化保存，用户操作平台的系统架构如图18所示。参见图18，用户操作平台的系统架构包括用户操作平台、服务器和Oracle数据库。用户操作平台包括客户端界面、载具创建、规格信息审核、载具清洗、绑定批次、批次解绑、载具报废、Winform+Infragistics模块。服务器包括QRY服务，CNM服务、CNX服务和Spring boot+Spring MVC+Bpei。
本公开实施例还提供了一种载具状态更新方法，参见图19，包括步骤191～步骤193。
在步骤191，响应于检测到配置载具的操作，显示创建页面；所述创建页面包括创建按键和规格参数。
本实施例中，用户可以通过半导体封装系统中FactoryModeler客户端进行配置操作。用户操作FactoryModeler客户端，响应于检测到配置载具的操作，显示如图20所示的维护页面。参见图21，创建页面创建按键(create)和规格参数(如FactoryName、 carrierSpecVersion、carrierType、TimeUsedLimit等)。
在步骤192，响应于配置规格参数的操作，获取所述规格参数对应的规格信息。参见图20所示，TimeUserLimit为2小时、CleanTimeLimit为2小时等，可以根据具体场景进行设置，在此不作限定。
在步骤193，响应于检测创建载具的操作，根据所述规格信息创建所述载具并管理所述载具的生命周期。
在一实施例中，半导体制造执行系统可以响应于检测到显示载具规格信息的操作，显示如图20所示的载具的规格信息。然后，响应于检测到编辑载具的规格信息的操作，半导体制造执行系统可以获取所输入的规格信息并更新所述规格信息。
在一实施例中，半导体制造执行系统可以响应于检测到显示载具规格信息的操作，显示如的载具的规格信息。然后，响应于检测到升版规格信息的操作，半导体制造执行系统可以生成新版本的规格信息；所述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同。之后，响应于检测到编辑所述新版本的规格信息的操作，半导体制造执行系统可以编辑所述新版本的规格信息并冻结。最后，响应于检测到激活所述新版本的规格信息的操作，半导体制造执行系统可以激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。
在一实施例中，半导体制造执行系统可以响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；响应于检测到克隆规格信息的操作，半导体制造执行系统可以生成新名称的规格信息；所述新名称的规格信息与原名称的规格信息的名称不同且其他内容相同；响应于检测到编辑所述新名称的规格信息的操作，半导体制造执行系统可以编辑所述新名称的规格信息并冻结；响应于检测到激活所述新名称的规格信息的操作，激活所述新名称的规格信息。
在一实施例中，半导体制造执行系统可以响应于检测到显示载具规格信息的操作，显示所述载具的规格信息。然后，响应于检测到扣留载具或者放行载具的操作，参见图22和图23，分别将所述载具的扣留状态调整为扣留中或者未扣留。
在一实施例中，半导体制造执行系统可以响应于检测到显示载具规格信息的操作，显示所述载具的规格信息。然后，响应于检测到报废载具的操作，参见图24，半导体制造执行系统可以将所述载具的使用状态调整为报废状态。
在一实施例中，半导体制造执行系统可以响应于检测到对载具绑定批次的操作， 绑定所述载具至目标批次。然后，响应于检测到对载具解绑批次的操作，参见图25，半导体制造执行系统可以将所述目标批次从所述载具解绑。
在一实施例中，半导体制造执行系统可以响应于检测到显示载具规格信息的操作，显示所述载具的规格信息。然后，响应于检测到调整载具位置的操作，参见图26，半导体制造执行系统可以调整所述载具的位置至目标位置。
在本公开实施例提供的一种载具状态更新方法的基础上，本实施例还提供了一种载具状态更新装置，参见图27，包括：
状态获取模块271，用于获取载具的使用状态、扣留状态和洁净状态；
状态确定模块272，用于根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。
在本公开实施例提供的一种载具状态更新方法的基础上，本实施例还提供了一种载具状态更新装置，参见图28，包括：
创建页面显示模块281，用于响应于检测到配置载具的操作，显示创建页面；所述创建页面包括创建按键和规格参数；
规格信息获取模块282，用于响应于配置规格参数的操作，获取所述规格参数对应的规格信息；
生命周期管理模块283，用于响应于检测创建载具的操作，根据所述规格信息创建所述载具并管理所述载具的生命周期。
需要说明的是，本实施例中示出的装置实施例与上述方法实施例的内容相匹配，可以参考上述方法实施例的内容，在此不再赘述。
在示例性实施例中，还提供了一种服务器，参见图29，包括：
存储器292与处理器291；
所述存储器292用于存储所述处理器291可执行的计算机程序；
所述处理器291用于执行所述存储器292中的计算机程序，以实现如上述的方法。
本领域技术人员在考虑说明书及实践这里公开的公开后，将容易想到本公开的其它实施方案。本公开旨在涵盖任何变型、用途或者适应性变化，这些变型、用途或者 适应性变化遵循本公开的一般性原理并包括本公开未公开的本技术领域中的公知常识或惯用技术手段。说明书和实施例仅被视为示例性的，本公开的真正范围和精神由下面的权利要求指出。
应当理解的是，本公开并不局限于上面已经描述并在附图中示出的精确结构，并且可以在不脱离其范围进行各种修改和改变。本公开的范围仅由所附的权利要求来限制。

Claims (27)

  1. 一种载具状态确定方法，其特征在于，包括：
    获取载具的使用状态、扣留状态和洁净状态；
    根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。
  2. 根据权利要求1所述的方法，其特征在于，获取载具的洁净状态，包括：
    获取所述载具的使用时长和使用次数；
    当所述使用次数大于预设次数阈值和/或所述使用时长大于预设时长阈值时，确定所述载具的洁净状态为脏污状态；
    当所述使用次数小于或等于所述预设次数阈值且所述使用时长小于或等于所述预设时长阈值时，确定所述载具的洁净状态为干净状态。
  3. 根据权利要求2所述的方法，其特征在于，获取所述载具的使用时长，包括：
    获取所述载具对应同一批次产品的绑定时间和解绑时间；所述绑定时间是指产品置入载具的时间，所述解绑时间是指产品从载具离开的时间；
    根据所述绑定时间和所述解绑时间确定本次使用时间；
    根据所述载具的历史使用时间和所述本次使用时间计算所述载具的使用时长。
  4. 根据权利要求2所述的方法，其特征在于，当检测到所述载具的洁净状态变为脏污状态时，获取载具的使用状态，包括：
    获取所述载具的清洗次数和预设次数阈值；
    当所述清洗次数等于所述预设次数阈值时，确定所述载具的当前状态为不可用状态；当所述清洗次数小于所述预设次数阈值时，确定保持所述载具的当前状态；所述当前状态为空置状态或者使用中状态。
  5. 根据权利要求1所述的方法，其特征在于，所述洁净状态还包括污染等级，获取载具的洁净状态，包括：
    获取所述载具的污染等级和工艺站点的污染等级；
    当所述载具的污染等级与所述工艺站点的污染等级匹配时，确定所述载具成功进入所述工艺站点。
  6. 根据权利要求5所述的方法，其特征在于，获取载具的洁净状态，还包括：
    当所述载具的污染等级与所述工艺站点的污染等级不匹配时，确定所述载具的污染等级与所述工艺站点的污染等级之间是否存在转换通路；
    当确定存在转换通路时，确定所述载具成功进入所述工艺站点；当确定不存在转换通路时，确定所述载具进入所述工艺站点失败。
  7. 根据权利要求1所述的方法，其特征在于，所述方法还包括：
    按照预设载具模型创建所述载具；所述载具的初始状态为不可用状态、所述洁净状态为脏污状态以及扣留状态为未扣留。
  8. 根据权利要求7所述的方法，其特征在于，所述预设载具模型存储到半导体制造执行系统的基础数据模块之内；所述基础数据模块用于创建各种载具对应的预设载具模型以及维护载具状态。
  9. 根据权利要求7所述的方法，其特征在于，所述方法还包括：
    响应于检测到编辑所述载具的规格信息的操作，获取所述载具的规格信息内的检测字段；所述检测字段包括检出状态；
    当所述检测字段不是所述检出状态时，确定所述载具的规格信息处于不可编辑状态；
    当所述检测字段为所述检出状态时，对比当前账户与编辑所述规格信息的编辑账户是否为同一账户；
    当所述当前账户和所述编辑账户不同时，确定拒绝所述当前账户编辑所述载具的规格信息；当所述当前账户和所述编辑账户相同时，确定允许所述当前账户编辑所述载具的规格信息并在编辑完成后冻结所述规格信息。
  10. 根据权利要求9所述的方法，其特征在于，所述载具的规格信息存储到半导体制造执行系统的载具模块之内；所述载具模块用于管理载具业务。
  11. 根据权利要求9所述的方法，其特征在于，所述载具的规格信息存储到半导体制造执行系统的载具模块之内，所述规格信息供所述载具模块和在制品模块使用；所述载具模块用于管理载具业务；所述在制品模块用于批次指定载具。
  12. 根据权利要求7所述的方法，其特征在于，所述方法还包括：
    响应于检测到激活所述载具的规格信息的请求，生成待审核信息；
    响应于所述待审核信息被审批，确定将所述载具投入使用。
  13. 根据权利要求7所述的方法，其特征在于，所述方法还包括：
    响应于检测到升版规格信息的操作，生成新版本的规格信息；所述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同；
    响应于检测到编辑所述新版本的规格信息的操作，编辑所述新版本的规格信息并冻结；
    响应于检测到激活所述新版本的规格信息的操作，激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。
  14. 根据权利要求7所述的方法，其特征在于，所述方法还包括：
    响应于检测到克隆规格信息的操作，生成新名称的规格信息；所述新名称的规格信息与原名称的规格信息的名称不同且其他内容相同；
    响应于检测到编辑所述新名称的规格信息的操作，编辑所述新名称的规格信息并冻结；
    响应于检测到激活所述新名称的规格信息的操作，激活所述新名称的规格信息。
  15. 根据权利要求1所述的方法，其特征在于，所述方法还包括：
    根据TibcoRV消息订阅方式获取XML格式的载具数据，所述载具数据包括载具的使用状态、扣留状态和洁净状态；所述载具数据还包括服务端对应的BPEL名称；
    查询到所述BPEL名称对应的Java文件；所述Java文件包括releaseMaterial方法；
    调用所述releaseMaterial方法使载具模块处理业务；其中处理业务包括操作数据库以更新载具的使用状态、扣留状态和洁净状态；
    响应于业务处理完成，生成并返回XML格式的响应信息。
  16. 一种载具状态更新方法，其特征在于，包括：
    响应于检测到配置载具的操作，显示创建页面；所述创建页面包括创建按键和规格参数；
    响应于配置规格参数的操作，获取所述规格参数对应的规格信息；
    响应于检测创建载具的操作，根据所述规格信息创建所述载具并管理所述载具的生命周期。
  17. 根据权利要求16所述的方法，其特征在于，所述方法还包括：
    响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
    响应于检测到编辑载具的规格信息的操作，获取所输入的规格信息并更新所述规格信息。
  18. 根据权利要求16所述的方法，其特征在于，所述方法还包括：
    响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
    响应于检测到升版规格信息的操作，生成新版本的规格信息；所述新版本的规格信息与原版本的规格信息的版本不同且其他内容相同；
    响应于检测到编辑所述新版本的规格信息的操作，编辑所述新版本的规格信息并冻结；
    响应于检测到激活所述新版本的规格信息的操作，激活所述新版本的规格信息并将所述原版本的规格信息的状态更新为未激活状态。
  19. 根据权利要求16所述的方法，其特征在于，所述方法还包括：
    响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
    响应于检测到克隆规格信息的操作，生成新名称的规格信息；所述新名称的规格信息与原名称的规格信息的名称不同且其他内容相同；
    响应于检测到编辑所述新名称的规格信息的操作，编辑所述新名称的规格信息并冻结；
    响应于检测到激活所述新名称的规格信息的操作，激活所述新名称的规格信息。
  20. 根据权利要求16所述的方法，其特征在于，所述方法还包括：
    响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
    响应于检测到扣留载具或者放行载具的操作，分别将所述载具的扣留状态调整为扣留中或者未扣留。
  21. 根据权利要求16所述的方法，其特征在于，所述方法还包括：
    响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
    响应于检测到报废载具的操作，将所述载具的使用状态调整为报废状态。
  22. 根据权利要求16所述的方法，其特征在于，所述方法还包括：
    响应于检测到对载具绑定批次的操作，绑定所述载具至目标批次；
    响应于检测到对载具解绑批次的操作，将所述目标批次从所述载具解绑。
  23. 根据权利要求16所述的方法，其特征在于，所述方法还包括：
    响应于检测到显示载具规格信息的操作，显示所述载具的规格信息；
    响应于检测到调整载具位置的操作，调整所述载具的位置至目标位置。
  24. 一种载具状态更新装置，其特征在于，包括：
    状态获取模块，用于获取载具的使用状态、扣留状态和洁净状态；
    状态确定模块，用于根据所述使用状态、所述扣留状态和所述洁净状态确定所述载具的下一状态。
  25. 一种载具状态更新装置，其特征在于，包括：
    创建页面显示模块，用于响应于检测到配置载具的操作，显示创建页面；所述创建页面包括创建按键和规格参数；
    规格信息获取模块，用于响应于配置规格参数的操作，获取所述规格参数对应的规格信息；
    生命周期管理模块，用于响应于检测创建载具的操作，根据所述规格信息创建所述载具并管理所述载具的生命周期。
  26. 一种服务器，其特征在于，包括：
    存储器与处理器；
    所述存储器用于存储所述处理器可执行的计算机程序；
    所述处理器用于执行所述存储器中的计算机程序，以实现如权利要求1～15或者16～23任一项所述的方法。
  27. 一种非暂态计算机可读存储介质，其特征在于，当所述存储介质中的可执行的计算机程序由处理器执行时，能够实现如权利要求1～15或者16～23任一项所述的方法。
PCT/CN2022/128770 2022-10-31 2022-10-31 载具状态更新方法和装置、服务器 WO2024092457A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223554A (ja) * 1999-01-27 2000-08-11 Shinko Electric Co Ltd ウエーハキャリア
JP2011108958A (ja) * 2009-11-20 2011-06-02 Hitachi High-Tech Control Systems Corp 半導体ウェーハ搬送装置及びこれを用いた搬送方法
CN105185731A (zh) * 2015-08-17 2015-12-23 北京七星华创电子股份有限公司 一种半导体热处理设备的晶片调度控制方法及系统
CN106647667A (zh) * 2016-12-29 2017-05-10 武汉华星光电技术有限公司 载具的管理方法及计算机集成制造设备
CN111445096A (zh) * 2018-12-28 2020-07-24 深圳市永盛隆科技有限公司 物料自动装卸载控制方法、装置、电子设备及存储介质

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000223554A (ja) * 1999-01-27 2000-08-11 Shinko Electric Co Ltd ウエーハキャリア
JP2011108958A (ja) * 2009-11-20 2011-06-02 Hitachi High-Tech Control Systems Corp 半導体ウェーハ搬送装置及びこれを用いた搬送方法
CN105185731A (zh) * 2015-08-17 2015-12-23 北京七星华创电子股份有限公司 一种半导体热处理设备的晶片调度控制方法及系统
CN106647667A (zh) * 2016-12-29 2017-05-10 武汉华星光电技术有限公司 载具的管理方法及计算机集成制造设备
CN111445096A (zh) * 2018-12-28 2020-07-24 深圳市永盛隆科技有限公司 物料自动装卸载控制方法、装置、电子设备及存储介质

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