WO2024071303A1 - Poudre de cuivre, pâte de cuivre la contenant, et procédé de production de film conducteur - Google Patents
Poudre de cuivre, pâte de cuivre la contenant, et procédé de production de film conducteur Download PDFInfo
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- WO2024071303A1 WO2024071303A1 PCT/JP2023/035411 JP2023035411W WO2024071303A1 WO 2024071303 A1 WO2024071303 A1 WO 2024071303A1 JP 2023035411 W JP2023035411 W JP 2023035411W WO 2024071303 A1 WO2024071303 A1 WO 2024071303A1
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- Prior art keywords
- copper
- particles
- copper particles
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- mass
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 499
- 239000010949 copper Substances 0.000 title claims abstract description 412
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 410
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 239000002245 particle Substances 0.000 claims abstract description 345
- 239000007771 core particle Substances 0.000 claims abstract description 62
- -1 aliphatic organic acid Chemical class 0.000 claims abstract description 59
- 150000001879 copper Chemical class 0.000 claims abstract description 45
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 24
- 239000011247 coating layer Substances 0.000 claims abstract description 23
- 239000011164 primary particle Substances 0.000 claims abstract description 22
- 229910052799 carbon Inorganic materials 0.000 claims description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 14
- 229910052698 phosphorus Inorganic materials 0.000 claims description 12
- 239000011574 phosphorus Substances 0.000 claims description 12
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010304 firing Methods 0.000 claims description 6
- 238000006722 reduction reaction Methods 0.000 description 83
- 230000009467 reduction Effects 0.000 description 73
- 238000000034 method Methods 0.000 description 57
- 239000000243 solution Substances 0.000 description 49
- 238000006243 chemical reaction Methods 0.000 description 46
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- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 description 21
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 description 21
- 229940112669 cuprous oxide Drugs 0.000 description 21
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 18
- 239000002904 solvent Substances 0.000 description 18
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- 239000001205 polyphosphate Substances 0.000 description 17
- 235000011176 polyphosphates Nutrition 0.000 description 17
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 16
- 238000010521 absorption reaction Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 16
- 229910001431 copper ion Inorganic materials 0.000 description 16
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- 239000003960 organic solvent Substances 0.000 description 13
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 12
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- 230000002776 aggregation Effects 0.000 description 10
- 150000004665 fatty acids Chemical class 0.000 description 10
- 238000005406 washing Methods 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 238000004220 aggregation Methods 0.000 description 8
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 8
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- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 5
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- 229910052757 nitrogen Inorganic materials 0.000 description 5
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- 150000001880 copper compounds Chemical class 0.000 description 4
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 4
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- FBUKVWPVBMHYJY-UHFFFAOYSA-N nonanoic acid Chemical compound CCCCCCCCC(O)=O FBUKVWPVBMHYJY-UHFFFAOYSA-N 0.000 description 4
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 4
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 4
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- 229910052717 sulfur Inorganic materials 0.000 description 4
- 239000011593 sulfur Substances 0.000 description 4
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 3
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 3
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 3
- 238000005481 NMR spectroscopy Methods 0.000 description 3
- 239000005642 Oleic acid Substances 0.000 description 3
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 3
- 235000021314 Palmitic acid Nutrition 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 150000008064 anhydrides Chemical class 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000001636 atomic emission spectroscopy Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000005388 borosilicate glass Substances 0.000 description 3
- 150000001735 carboxylic acids Chemical class 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- JDPSPYBMORZJOD-UHFFFAOYSA-L copper;dodecanoate Chemical compound [Cu+2].CCCCCCCCCCCC([O-])=O.CCCCCCCCCCCC([O-])=O JDPSPYBMORZJOD-UHFFFAOYSA-L 0.000 description 3
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- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 3
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 3
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- NWZSZGALRFJKBT-KNIFDHDWSA-N (2s)-2,6-diaminohexanoic acid;(2s)-2-hydroxybutanedioic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O.NCCCC[C@H](N)C(O)=O NWZSZGALRFJKBT-KNIFDHDWSA-N 0.000 description 2
- GYSCBCSGKXNZRH-UHFFFAOYSA-N 1-benzothiophene-2-carboxamide Chemical compound C1=CC=C2SC(C(=O)N)=CC2=C1 GYSCBCSGKXNZRH-UHFFFAOYSA-N 0.000 description 2
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- GHVNFZFCNZKVNT-UHFFFAOYSA-N Decanoic acid Natural products CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 description 2
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
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- 150000007513 acids Chemical class 0.000 description 2
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- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- GONOPSZTUGRENK-UHFFFAOYSA-N benzyl(trichloro)silane Chemical compound Cl[Si](Cl)(Cl)CC1=CC=CC=C1 GONOPSZTUGRENK-UHFFFAOYSA-N 0.000 description 2
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- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 2
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- 150000004677 hydrates Chemical class 0.000 description 2
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- 239000000463 material Substances 0.000 description 2
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- 239000004020 conductor Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910001956 copper hydroxide Inorganic materials 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 229960000355 copper sulfate Drugs 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 1
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 1
- NWFNSTOSIVLCJA-UHFFFAOYSA-L copper;diacetate;hydrate Chemical compound O.[Cu+2].CC([O-])=O.CC([O-])=O NWFNSTOSIVLCJA-UHFFFAOYSA-L 0.000 description 1
- HFDWIMBEIXDNQS-UHFFFAOYSA-L copper;diformate Chemical compound [Cu+2].[O-]C=O.[O-]C=O HFDWIMBEIXDNQS-UHFFFAOYSA-L 0.000 description 1
- LZJJVTQGPPWQFS-UHFFFAOYSA-L copper;propanoate Chemical compound [Cu+2].CCC([O-])=O.CCC([O-])=O LZJJVTQGPPWQFS-UHFFFAOYSA-L 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000001177 diphosphate Substances 0.000 description 1
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 1
- 235000011180 diphosphates Nutrition 0.000 description 1
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 description 1
- 239000004210 ether based solvent Substances 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 229960002449 glycine Drugs 0.000 description 1
- 235000013905 glycine and its sodium salt Nutrition 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- AKRQHOWXVSDJEF-UHFFFAOYSA-N heptane-1-sulfonic acid Chemical compound CCCCCCCS(O)(=O)=O AKRQHOWXVSDJEF-UHFFFAOYSA-N 0.000 description 1
- FYAQQULBLMNGAH-UHFFFAOYSA-N hexane-1-sulfonic acid Chemical compound CCCCCCS(O)(=O)=O FYAQQULBLMNGAH-UHFFFAOYSA-N 0.000 description 1
- 239000012493 hydrazine sulfate Substances 0.000 description 1
- 229910000377 hydrazine sulfate Inorganic materials 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- 150000002576 ketones Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004811 liquid chromatography Methods 0.000 description 1
- 238000004895 liquid chromatography mass spectrometry Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000006263 metalation reaction Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical compound CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 description 1
- WLGDAKIJYPIYLR-UHFFFAOYSA-N octane-1-sulfonic acid Chemical compound CCCCCCCCS(O)(=O)=O WLGDAKIJYPIYLR-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229940100684 pentylamine Drugs 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
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- 238000004445 quantitative analysis Methods 0.000 description 1
- 150000004671 saturated fatty acids Chemical class 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000012279 sodium borohydride Substances 0.000 description 1
- 229910000033 sodium borohydride Inorganic materials 0.000 description 1
- 229940079827 sodium hydrogen sulfite Drugs 0.000 description 1
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 1
- HLJWMCUZPYEUDI-UHFFFAOYSA-L sodium hyponitrite Chemical compound [Na+].[Na+].[O-]N=N[O-] HLJWMCUZPYEUDI-UHFFFAOYSA-L 0.000 description 1
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 235000010288 sodium nitrite Nutrition 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 1
- 235000019345 sodium thiosulphate Nutrition 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 235000000346 sugar Nutrition 0.000 description 1
- 150000008163 sugars Chemical class 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 description 1
- 229940048102 triphosphoric acid Drugs 0.000 description 1
- NCPXQVVMIXIKTN-UHFFFAOYSA-N trisodium;phosphite Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])[O-] NCPXQVVMIXIKTN-UHFFFAOYSA-N 0.000 description 1
- 150000004670 unsaturated fatty acids Chemical class 0.000 description 1
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/052—Metallic powder characterised by the size or surface area of the particles characterised by a mixture of particles of different sizes or by the particle size distribution
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/07—Metallic powder characterised by particles having a nanoscale microstructure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
- B22F1/102—Metallic powder coated with organic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
- B22F7/02—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers
- B22F7/04—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers with one or more layers not made from powder, e.g. made from solid metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
Definitions
- the present invention relates to copper powder and a copper paste containing the same.
- the present invention also relates to a method for producing a conductive film.
- Copper is a highly conductive metal and a versatile material, and is therefore widely used industrially as a conductive material.
- copper powder which is an aggregate of copper particles, is widely used as a raw material for manufacturing various electronic components, such as the external and internal electrodes of multilayer ceramic capacitors (hereafter also referred to as "MLCC"), and wiring for various substrates.
- MLCC multilayer ceramic capacitors
- the present applicant has previously proposed a technology relating to spherical copper particles in which the average particle size of the primary particles is 0.1 ⁇ m or more and 0.6 ⁇ m or less, and the particle surfaces are treated with a surface treatment agent (see Patent Document 1).
- This technology has the advantage of improving the low-temperature sintering properties of the copper particles.
- the objective of the present invention is therefore to provide copper powder that can produce conductive films with high continuity and density, and that has a low sintering temperature.
- the present invention includes the following copper particles A and copper particles B,
- the copper powder has a content of copper particles A of 60% by mass or more and 99% by mass or less relative to the total content of copper particles A and copper particles B, and a content of copper particles B of 1% by mass or more and 40% by mass or less.
- the present invention comprises a core particle made of copper and a coating layer that coats the surface of the core particle, the coating layer is formed from a copper salt of an aliphatic organic acid, Copper particles having a primary particle diameter of 0.1 ⁇ m or more and 0.6 ⁇ m or less.
- [Copper particles B] a ratio (S1B) of a first crystallite size S1 calculated by the Scherrer formula from the half-width of a peak derived from the copper (111) plane in an X-ray diffraction measurement to a BET diameter B calculated from a BET specific surface area is 0.23 or less;
- the ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 calculated by the Scherrer formula from the half-width of the peak derived from the (220) plane of copper in X-ray diffraction measurement is 1.35 or less; Copper particles having a primary particle diameter of 0.1 ⁇ m or more and 2.0 ⁇ m or less.
- the present invention will be described below based on preferred embodiments.
- the copper powder of the present invention includes copper particles A and copper particles B described below.
- the present invention comprises a core particle made of copper and a coating layer that coats the surface of the core particle, the coating layer is formed from a copper salt of an aliphatic organic acid, Copper particles having a primary particle diameter of 0.1 ⁇ m or more and 0.6 ⁇ m or less.
- [Copper particles B] a ratio (S1B) of a first crystallite size S1 calculated by the Scherrer formula from the half-width of a peak derived from the copper (111) plane in an X-ray diffraction measurement to a BET diameter B calculated from a BET specific surface area is 0.23 or less;
- the ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 calculated by the Scherrer formula from the half-width of the peak derived from the (220) plane of copper in X-ray diffraction measurement is 1.35 or less; Copper particles having a primary particle size of 0.1 ⁇ m or more and 2.0 ⁇ m or less, except for those that fall under Copper Particles A.
- copper particles A have a spherical shape.
- copper particles B have a flat shape.
- the average image analysis diameter of the primary particles of the copper particles A is preferably 0.1 ⁇ m or more and 0.6 ⁇ m or less, more preferably 0.12 ⁇ m or more and 0.4 ⁇ m or less, and even more preferably 0.15 ⁇ m or more and 0.3 ⁇ m or less.
- the primary particle refers to an object that is recognized as the smallest unit of a particle, judging from the geometric shape of its outer shape.
- the average image analysis diameter of the primary particles of copper particles B is preferably 0.1 ⁇ m or more and 2.0 ⁇ m or less, more preferably 0.15 ⁇ m or more and 1.0 ⁇ m or less, and even more preferably 0.2 ⁇ m or more and 0.6 ⁇ m or less.
- the particle diameter of the copper particles A calculated from the BET specific surface area is preferably 0.1 ⁇ m or more and 0.6 ⁇ m or less, more preferably 0.12 ⁇ m or more and 0.4 ⁇ m or less, and even more preferably 0.15 ⁇ m or more and 0.3 ⁇ m or less.
- the particle diameter of copper particles B calculated from the BET specific surface area is preferably 0.1 ⁇ m or more and 2.0 ⁇ m or less, more preferably 0.15 ⁇ m or more and 1.0 ⁇ m or less, and even more preferably 0.2 ⁇ m or more and 0.6 ⁇ m or less.
- BET diameter B the thermal conductivity of the copper powder of the present invention can be increased, and the sintering temperature can be effectively reduced.
- the BET diameter B is also referred to as the primary particle diameter of the copper particles B.
- the average image analysis diameter of the primary particles of copper particles A and B can be determined, for example, by observing the copper particles at a magnification of 10,000 times or 30,000 times using a scanning electron microscope (JSM-6330F manufactured by JEOL Ltd.), measuring the maximum Feret's diameter in the horizontal direction for 200 particles in the field of view, and calculating the volume average particle diameter converted into a sphere from these measured values.
- the average image analysis diameter of the primary particles of copper particles A calculated in this manner is also referred to as the primary particle diameter of copper particles A.
- the BET diameters A and B calculated from the BET specific surface area can be measured under the following conditions based on the BET method. Specifically, the measurements can be performed by nitrogen adsorption using "Macsorb” manufactured by Mountech Co., Ltd. The amount of powder to be measured is 0.2 g, and the preliminary degassing conditions are under vacuum at 80°C for 30 minutes.
- the BET diameters A and B are calculated from the measured BET specific surface area by the following formula (I).
- d is the BET diameter A or B [ ⁇ m]
- a BET is the specific surface area measured by the BET single point method [m 2 /g]
- ⁇ is the density of copper [g/cm 3 ].
- d 6 / (A BET ⁇ ⁇ ) ... (I)
- preferred embodiments of the copper particles A and B will be described in detail.
- the copper particles A have a surface treatment agent containing a copper salt of an aliphatic organic acid applied to the surface of the particles.
- a coating layer made of the surface treatment agent is formed so as to cover the surface of the copper core particle continuously or discontinuously.
- the surface treatment agent is used to suppress both the oxidation of copper and the aggregation of the particles.
- the core particles preferably consist of only copper with the remainder being unavoidable impurities.
- the surface treatment agent used in the present invention contains a copper salt of an aliphatic organic acid.
- surface treatment agents such as fatty acids and fatty acid amines have been used to simultaneously inhibit the oxidation of copper in copper particles and inhibit the aggregation of the particles.
- such treatment agents have a high decomposition temperature, and there are cases where they cannot be sufficiently removed during sintering of the copper particles. This can cause the sintering start temperature to rise and the resistance of the conductive film obtained after sintering the copper particles together to increase.
- the inventors conducted extensive research to solve this problem and found that by using a copper salt of an aliphatic organic acid as a surface treatment agent, it is possible to lower the sintering start temperature while inhibiting both the oxidation of copper and the aggregation of the particles, and as a result, it is possible to improve the low-temperature sintering of the particles while lowering the resistance of the conductive film obtained after sintering.
- the number of carbon atoms in the aliphatic organic acid constituting the copper salt of an aliphatic organic acid is preferably 6 to 18, more preferably 8 to 18, even more preferably 10 to 18, and even more preferably 12 to 18.
- examples of such aliphatic organic acids include linear or branched, saturated or unsaturated carboxylic acids, and linear or branched, saturated or unsaturated hydrocarbon group-containing sulfonic acids, and the like, preferably linear, saturated or unsaturated carboxylic acids.
- the valence of copper in the copper salt of an aliphatic organic acid is monovalent or divalent, and preferably divalent.
- carboxylic acids include citric acid, hexanoic acid, heptanoic acid, octanoic acid, nonanoic acid, decanoic acid, lauric acid, palmitic acid, oleic acid, stearic acid, etc., of which lauric acid, oleic acid, and stearic acid are preferred, and lauric acid and stearic acid are more preferred.
- sulfonic acids include hexanesulfonic acid, heptanesulfonic acid, octanesulfonic acid, nonanesulfonic acid, decanesulfonic acid, laurinsulfonic acid, palmitic acid, oleinsulfonic acid, stearinsulfonic acid, etc. These aliphatic organic acids can be used alone or in combination of two or more kinds.
- the surface treatment agent can be applied to the particle surface, for example, in a process after the production of core particles made of copper, by contacting the obtained core particles with a copper salt of an aliphatic organic acid, which is the surface treatment agent.
- the amount of the surface treatment agent applied is expressed as the proportion (mass %) of the entire surface treatment agent in copper particles A in a state in which the surface treatment agent is applied, and is preferably 0.2 mass % or more and 2.0 mass % or less in carbon atom equivalent, and more preferably 0.3 mass % or more and 1.0 mass % or less.
- the proportion (mass %) of the surface treatment agent applied to the surface of the copper particles A can be measured as follows: 0.5 g of copper powder, which is an aggregate of copper particles A to which a surface treatment agent has been applied, is heated in an oxygen stream using a carbon/sulfur analyzer (Horiba, Ltd., EMIA-320V), and the carbon content in the copper powder is decomposed into CO or CO2 , and the amount of the decomposed carbon or CO2 is quantified to calculate the proportion of the surface treatment agent.
- a carbon/sulfur analyzer Horiba, Ltd., EMIA-320V
- NMR nuclear magnetic resonance
- Raman spectroscopy Raman spectroscopy
- infrared spectroscopy liquid chromatography
- TOF-SIMS time-of-flight secondary ion mass spectrometry
- Copper particles A have a coating layer formed on the surface of a core particle using a copper salt of an aliphatic organic acid as a surface treatment agent, and whether or not the coating layer was formed using a copper salt of an aliphatic organic acid can be determined, for example, by the following method.
- the copper particles A are diluted with KBr so that the mass of the copper particles A becomes 5 mass%, and the measurement sample is mixed in a mortar and measured by a diffuse reflectance method using an infrared spectrophotometer (model number: FT-IR4600) manufactured by JASCO Corporation under conditions of a resolution of 4 cm -1 and an accumulation number of 128 times, and a graph (spectrum) is obtained in which the vertical axis represents the value obtained by Kubelka-Munk conversion of absorbance and the horizontal axis represents wave numbers (500 to 4000 cm -1 ).
- FT-IR4600 infrared spectrophotometer
- the coating layer is formed using a copper salt of an aliphatic organic acid. That is, it is preferable that, in the measurement by infrared spectroscopy, the copper particles A have an infrared absorption peak in the range of 1504 cm -1 or more and 1514 cm -1 or less and no infrared absorption peak is observed in the range of 1584 cm -1 or more and 1596 cm -1 or less. "Having an infrared absorption peak" is defined according to the following method.
- IR spectrum data normalized with the maximum value of the peak observed in the range of 2910 cm -1 to 2940 cm -1 is differentiated twice, and waveform separation is performed in the range of 1500 cm -1 to 1600 cm -1 based on the zero-up crossing method.
- an arithmetic mean value is calculated from the absolute value of the amplitude from the reference line (zero) in each waveform obtained by waveform separation.
- an infrared absorption peak is detected in the range of 1584 cm -1 or more and 1596 cm -1 or less, and in this respect, they can be distinguished from copper particles A.
- infrared absorption when infrared absorption is observed in infrared spectroscopy, it indicates that some bonds exist in the molecule. In particular, when infrared absorption is observed at a high wave number position, it can be said that bonds with high bond energy exist in the molecule because infrared rays at high wave numbers have high energy.
- copper particles A are compared with copper particles using a fatty acid or an aliphatic amine as a surface treatment agent, infrared absorption is observed in the low wave number region of 1504 cm ⁇ 1 or more and 1514 cm ⁇ 1 or less for both particles, and it is presumed that the absorption in this region means that a coating layer is bonded to the surface of the core particles.
- the copper particles A do not show infrared absorption observed in the high wavenumber region, whereas the copper particles using fatty acids or aliphatic amines as surface treatment agents show infrared absorption in the high wavenumber region.
- the copper particles of the present invention have fewer bonds with large bond energy in the molecule.
- copper particles A can be analyzed, for example, by TOF-SIMS.
- the temperature at which the ratio of the mass loss to the mass loss at 500°C is 10% is preferably 150°C or higher and 220°C or lower, and more preferably 180°C or higher and 220°C or lower.
- thermogravimetric analysis can be carried out, for example, by the following method. That is, using a TG-DTA2000SA manufactured by Bruker AXS, a measurement sample of 50 mg is used, and the mass loss rate is measured when heated from 25°C to 1000°C. The atmosphere is nitrogen, and the heating rate is 10°C/min. The lower the temperature at which the mass loss rate reaches a predetermined rate, the lower the temperature at which the aliphatic organic acid that forms the coating layer can be removed, and this is a measure of the low-temperature sintering property of copper particle A.
- the shape of the copper particles A is preferably spherical.
- the shape of the core particles may be spherical.
- the spherical shape of the particles means that the circularity coefficient measured by the following method is preferably 0.85 or more, more preferably 0.90 or more.
- the circularity coefficient is calculated by the following method. A scanning electron microscope image of the metal particles is taken, and 1000 particles that do not overlap with each other are randomly selected. When the area of the two-dimensional projection image of the particle is S and the perimeter is L, the circularity coefficient of the particle is calculated from the formula 4 ⁇ S/ L2 . The arithmetic average value of the circularity coefficient of each particle is the above-mentioned circularity coefficient. When the two-dimensional projection image of the particle is a perfect circle, the circularity coefficient of the particle is 1.
- Copper particles B have a predetermined relationship in terms of crystallite size on a specific crystal plane calculated by X-ray diffraction measurement. Specifically, when the particle diameter calculated from the BET specific surface area is the BET diameter B, and the crystallite size calculated from the diffraction peak derived from the (111) plane of copper in the X-ray diffraction measurement by the Scherrer formula is the first crystallite size S1, the ratio (S1/B) of the first crystallite size S1 to the BET diameter B is preferably 0.23 or less, more preferably 0.02 or more and 0.23 or less, and even more preferably 0.05 or more and 0.23 or less.
- the diffraction peak originating from the (111) plane of copper is the peak with the maximum height of the X-ray diffraction pattern obtained by X-ray diffraction measurement of copper particles B. From this, it is considered that the first crystallite size is larger than the crystallite size calculated from the diffraction peaks originating from other crystallite planes, and is also representative of crystallinity. Therefore, it is presumed that the first crystallite size S1 is small relative to the BET diameter B, so that there are many crystal grain boundaries in one particle. As a result, the thermal energy applied when the particles are heated makes the crystallite interface more unstable, which activates atomic diffusion, thereby increasing the fusion between particles at low temperatures and lowering the sintering temperature. Such copper particles can be obtained, for example, by the manufacturing method described below.
- the first crystallite size S1 of copper particles B is preferably 10 nm or more and 80 nm or less, more preferably 20 nm or more and 75 nm or less, and even more preferably 25 nm or more and 70 nm or less.
- the ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 is a predetermined value or less.
- the S1/S2 ratio is preferably 1.35 or less, more preferably 0.1 or more and 1.3 or less, and further preferably 0.1 or more and 1.2 or less.
- copper particles B have a copper (111) plane on a specific surface of the particle surface, and a copper (220) plane on a surface intersecting the (111) plane.
- the flat shape means a shape having a pair of main surfaces facing each other and side surfaces intersecting these main surfaces.
- the fusion property between the particles at low temperatures can be improved, and the sintering temperature of the copper powder can be reduced.
- This is advantageous in that the sinterability can be further improved compared to spherical particles and mechanically produced flat copper particles.
- the contact between the copper particles B is likely to be face-to-face contact as described above, the contact area is larger than that of spherical copper particles, etc. Due to this, the conductive film produced from the copper powder of the present invention containing the copper particles B has high continuity.
- Such copper particles can be obtained, for example, by the manufacturing method described below.
- the second crystallite size S2 of copper particles B is preferably 10 nm or more and 80 nm or less, more preferably 20 nm or more and 75 nm or less, and even more preferably 30 nm or more and 70 nm or less.
- the ratio (S1/S3) of the first crystallite size S1 to the third crystallite size S3 is a predetermined value or less.
- the S1/S3 ratio is preferably 1.35 or less, more preferably 0.20 or more and 1.30 or less, and further preferably 0.50 or more and 1.25 or less.
- copper particles B Since metallic copper is prone to have a face-centered cubic crystal structure, copper particles B have a copper (111) plane on a specific surface of the particle surface, and a copper (311) plane on a surface intersecting the (111) plane.
- the S1/S3 ratio in the above-mentioned range when the copper particles B are arranged during sintering, the main surfaces of the copper particles B or the side surfaces of the copper particles B are likely to contact each other, and the contact parts of the copper particles B are likely to have the same crystal plane.
- the copper powder of the present invention when the copper powder of the present invention is heated, atomic diffusion at the crystallite interface of the copper particles B is activated, the fusion property of the particles at low temperatures is improved, and the sintering temperature of the copper powder can be reduced. This is advantageous in that the sinterability can be further improved compared to spherical particles and mechanically produced flat copper particles.
- Such copper particles can be obtained, for example, by the manufacturing method described below.
- the third crystallite size S3 of the particles B is preferably 10 nm or more and 80 nm or less, more preferably 20 nm or more and 75 nm or less, and even more preferably 30 nm or more and 70 nm or less.
- Copper particles B preferably contain copper element as a major component.
- Containing copper element as a major component means that the copper element content in the copper particles is 97.0% by mass or more, preferably 97.5% by mass or more, more preferably 98.0% by mass or more, and even more preferably 98.5% by mass or more.
- the copper element content can be measured, for example, by ICP atomic emission spectrometry.
- the copper particles B contain, in addition to elemental copper, elements other than copper, or consist of elemental copper and contain no elements other than copper except for unavoidable impurities. Copper particles B are permitted to contain trace amounts of unavoidable impurity elements such as oxygen, as long as this does not impair the effects of the present invention. In either embodiment, the content of elements other than copper in the copper particles is preferably 1.5 mass% or less. The content of these elements can be measured, for example, by ICP atomic emission spectrometry.
- the copper particles B have a low carbon element content.
- the carbon element content in the copper particles B is preferably 5000 ppm or less, more preferably 4500 ppm or less, and even more preferably 4000 ppm or less. The lower the content, the better, but 100 ppm or more is realistic.
- Such copper particles can be manufactured, for example, by the manufacturing method described below.
- the carbon element content can be measured by, for example, gas analysis or combustion carbon analysis.
- This confirmation method includes, for example, X-ray photoelectron spectroscopy (XPS), nuclear magnetic resonance (NMR), Raman spectroscopy, infrared spectroscopy, liquid chromatography, time-of-flight secondary ion mass spectrometry (TOF-SIMS), and other methods, either alone or in combination. If it is determined that the particle surface is coated by this method, the above-mentioned methods are used alone or in combination to qualitatively and quantitatively analyze the type and amount of elements contained in the coating layer formed by the coating process.
- the physical properties of the organic material can be evaluated by thermogravimetry (TG) by measuring the mass change occurring before and after the firing temperature and the amount of carbon after heating to that temperature.
- TG thermogravimetry
- the content of phosphorus contained in the copper particles B is within a predetermined range.
- the content of phosphorus in the copper particles is preferably 300 ppm or more, more preferably 300 ppm or more and 1500 ppm or less, and even more preferably 300 ppm or more and 1000 ppm or less.
- Such copper particles can be manufactured, for example, by the manufacturing method described below.
- the presence or absence of phosphorus in the copper particles B and its content can be measured, for example, by ICP atomic emission spectroscopy.
- the lower the carbon content of copper particles B the less likely sintering inhibition occurs, and the copper powder can be sintered at a lower temperature.
- the carbon content is within the range mentioned above, it is possible to relatively suppress sintering inhibition caused by organic matter present on the surface of copper particles B, so organic matter may be intentionally applied to the surface of copper particles B.
- the organic matter applied to the surface of the copper particles B can be, for example, various copper salts of fatty acids or aliphatic organic acids, and aliphatic amines.
- various copper salts of fatty acids or aliphatic organic acids, and aliphatic amines By applying such an organic matter to the surface of the copper particles B, it is possible to suppress aggregation between the copper particles.
- fatty acids or aliphatic amines include benzoic acid, pentanoic acid, hexanoic acid, octanoic acid, nonanoic acid, decanoic acid, lauric acid, palmitic acid, oleic acid, stearic acid, pentylamine, hexylamine, octylamine, decylamine, laurylamine, oleylamine, and stearylamine.
- These fatty acids or aliphatic amines can be used alone or in combination of two or more.
- the shape of copper particles B is not particularly limited as long as the effects of the present invention are achieved, but when produced by the method described below, it is preferably flat. Such particles have a pair of nearly flat main surfaces facing each other and side surfaces intersecting both main surfaces, and are plate-like in shape with the maximum span of the main surfaces being greater than the thickness. In this case, it is also preferable that when the main surfaces of copper particles B are viewed in plan, their shape has an outline defined by a combination of straight lines or a combination of straight lines and curves.
- the conductive film produced from the copper paste containing the copper powder of the present invention has high density and continuity.
- the content ratio of copper particles A to the total of copper particles A and copper particles B is preferably 60% by mass or more and 99% by mass or less, more preferably 65% by mass or more and 88% by mass or less, and even more preferably 70% by mass or more and 85% by mass or less.
- the content ratio of copper particles B to the total of copper particles A and copper particles B is preferably 1 mass% or more and 40 mass% or less, more preferably 12 mass% or more and 35 mass% or less, and even more preferably 15 mass% or more and 30 mass% or less.
- the copper powder of the present invention is preferably produced by mixing copper particles A and copper particles B in the preferred ratio described above. Below, a preferred method for producing copper particles A and copper particles B, and a method for mixing copper particles A and copper particles B will be described in detail in order.
- This production method involves contacting core particles made of copper with a solution containing a copper salt of an aliphatic organic acid to form a coating layer that coats the surfaces of the core particles.
- core particles made of copper are prepared.
- the copper core particles can be produced, for example, by the wet method described in JP 2015-168878 A. That is, a reaction liquid containing a monovalent or divalent copper source such as copper chloride, copper acetate, copper hydroxide, copper sulfate, copper oxide, or cuprous oxide is prepared in a liquid medium containing water and a monohydric alcohol preferably having 1 to 5 carbon atoms. This reaction liquid is mixed with hydrazine in a ratio of preferably 0.5 to 50 moles per mole of copper, and the copper source is reduced to obtain core particles made of copper.
- the core particles obtained by this method do not have a surface treatment agent such as a copper salt of an aliphatic organic acid applied to their surfaces, and have a small particle size.
- the core particles obtained in the above-mentioned process are preferably washed.
- washing methods include decantation and rotary filter methods.
- an aqueous slurry is prepared by dispersing the core particles in a solvent such as water, and washing is performed until the conductivity of the slurry is preferably 2.0 mS or less.
- the washing conditions at this time can be, for example, a washing temperature of 15°C to 30°C and a washing time of 10 minutes to 60 minutes when water is used as the washing solvent.
- the core particles to be washed can be uniformly dispersed without agglomeration, and the surface treatment described below can be performed efficiently.
- the content of copper core particles in this slurry is preferably 5% by mass to 50% by mass from the viewpoint of improving both washing efficiency and particle dispersibility.
- a direct current thermal plasma (DC plasma) method described in WO 2015/122251 may be used as another method for producing core particles made of copper.
- copper mother powder can be subjected to a direct current thermal plasma method, which is a type of PVD method, to generate core particles from the mother powder.
- the core particles obtained by this method also have no surface treatment agent such as a copper salt of an aliphatic organic acid on their surfaces, and have a small particle size. If necessary, the obtained core particles may be subjected to a crushing process or a classification process to separate or remove coarse particles and fine particles.
- the core particles obtained by the above-mentioned method are surface-treated with a surface treatment agent to form a coating layer that covers the surface of the core particles.
- a method of surface treatment for example, a method of contacting the core particles with a solution in which a copper salt of an aliphatic organic acid is dissolved in a solvent can be adopted.
- the form of the core particles to be contacted with the copper salt of an aliphatic organic acid in this step may be an aqueous slurry in which the core particles are dispersed in a solvent such as water, or may be in a dry state in which the core particles are not dispersed in a solvent or the like.
- one of the core particles and the copper salt solution of an aliphatic organic acid may be added to the other, or the core particles and the copper salt solution of an aliphatic organic acid may be contacted simultaneously.
- a solution of the copper salt of an aliphatic organic acid is added to a slurry in which the core particles are dispersed.
- the method of adding core particles to a copper salt solution of an aliphatic organic acid and performing surface treatment will be described below as an example.
- the solvent used in the copper salt solution of an aliphatic organic acid is heated to a temperature below the boiling point of the solvent used (for example, 25°C to 80°C), and under that condition, the copper salt of an aliphatic organic acid is added to the solvent to prepare a copper salt solution of an aliphatic organic acid.
- the dry core particles or core particle-containing slurry are added to the copper salt solution of an aliphatic organic acid, and then stirred for one hour to perform surface treatment on the surfaces of the core particles.
- the copper particles A obtained by this method are core particles made of copper and have a coating layer made of a copper salt of an aliphatic organic acid formed on the surface of the core particles.
- the slurry is heated to a temperature above the melting point of the copper salt of the aliphatic organic acid in order to uniformly form a coating layer on the surfaces of the core particles.
- the content of the copper salt of an aliphatic organic acid in the reaction solution containing the core particles is preferably 0.1 parts by mass or more and 3.0 parts by mass or less, more preferably 0.2 parts by mass or more and 2.0 parts by mass or less, per 100 parts by mass of core particles that have not been surface-treated.
- Solvents for dissolving the copper salt of an aliphatic organic acid include organic solvents such as monohydric alcohols having 1 to 5 carbon atoms, polyhydric alcohols, esters of polyhydric alcohols, ketones, and ethers. Of these, from the viewpoints of compatibility with water, economy, ease of handling, and ease of removal, it is preferable to use monohydric alcohols having 1 to 5 carbon atoms, and it is even more preferable to use an aqueous methanol solution, ethanol, 1-propanol, or isopropyl alcohol.
- the copper particles A obtained through the above steps may be washed or separated into solid and liquid as necessary, and then mixed with copper particles B in the form of a slurry in which the copper particles A are dispersed in a solvent such as water or an organic solvent, or the copper particles A may be dried and mixed with copper particles B in the form of a dry powder that is an aggregate of copper particles.
- a solvent such as water or an organic solvent
- the copper particles A may be dried and mixed with copper particles B in the form of a dry powder that is an aggregate of copper particles.
- oxidation of the copper, which is a constituent metal, and aggregation of particles are suppressed, while at the same time providing an excellent copper powder with a low sintering temperature.
- This production method includes two reduction steps: a first reduction step in which copper ions are reduced to produce cuprous oxide, and a second reduction step in which cuprous oxide is reduced in the presence of diphosphate or higher polyphosphoric acid or a salt thereof (hereinafter, also referred to as polyphosphoric acids) to produce copper particles.
- the polyphosphoric acids are present in the reaction system either when the second reduction step is performed or before the second reduction step is performed.
- the polyphosphoric acids may be present in the reaction system before or when the first reduction step is performed, and the second reduction step may be performed in that state.
- the polyphosphoric acids may not be present in the reaction system in the first reduction step, but may be present in the reaction system after the completion of the first reduction step, or when the second reduction step is performed or immediately before the second reduction step.
- a reaction solution containing a copper source and a reducing compound is prepared, and a first reduction step is carried out to reduce copper ions and generate cuprous oxide in the solution.
- the reaction solution may be prepared by adding each raw material to a solvent at the same time to form the reaction solution, or each raw material may be added to the solvent in any order. From the viewpoint of making it easier to control the reduction reaction of copper ions and improving the ease of handling during production, it is preferable to premix the copper source with a solvent to prepare a copper-containing solution, and then add a solid reducing compound or a solution of the reducing compound predissolved in a solvent to the copper-containing solution.
- the reducing compound may be added all at once or gradually.
- the reaction solution may or may not contain polyphosphates.
- polyphosphates When polyphosphates are present in the reaction solution, it is preferable to add the copper source, polyphosphates, and reducing compound in that order, since this allows the reduction of copper ions by the reducing compound and the control of crystal growth to be effectively achieved.
- the solvent for the reaction solution can be water or a lower alcohol such as methanol, ethanol, or propanol. These can be used alone or in combination.
- the copper source used in the first reduction step includes compounds that generate copper ions in the reaction solution, and water-soluble copper compounds are preferred.
- Specific examples of such copper sources include various copper compounds such as organic copper salts, such as copper formate, copper acetate, and copper propionate, and inorganic copper salts, such as copper nitrate and copper sulfate. These copper compounds may be anhydrides or hydrates. These copper compounds may be used alone or in combination.
- the content of the copper source in the reaction system in the first reduction step is preferably 0.01 mol/L or more and 2.0 mol/L or less, more preferably 0.1 mol/L or more and 1.5 mol/L or less, expressed as the molar concentration of copper element.
- the reducing compound is a water-soluble compound.
- reducing compounds include hydrazine-based compounds such as hydrazine, hydrazine hydrochloride, hydrazine sulfate, and hydrazine hydrate; boron compounds and salts thereof such as sodium borohydride and dimethylamine borane; sulfur oxoacid salts such as sodium sulfite, sodium hydrogen sulfite, and sodium thiosulfate; nitrogen oxoacid salts such as sodium nitrite and sodium hyponitrite; and phosphorus oxoacids and salts thereof such as phosphorous acid, sodium phosphite, hypophosphorous acid, and sodium hypophosphite.
- These reducing compounds may be anhydrides or hydrates. These reducing compounds may be used alone or in combination of two or more.
- a hydrazine-based compound as the reducing compound in the reducing solution, and it is even more preferable to use an anhydride or hydrate of hydrazine.
- the content of the reducing compound in the reaction solution in the first reduction step is preferably 0.1 to 2 moles, more preferably 0.1 to 1 mole, per mole of copper element.
- the reaction solution in the first reduction step is preferably in an acidic condition with a pH of 3 to 5 at 25°C, in that when a reducing compound, particularly a hydrazine-based compound, is used, the degree of reduction can be appropriately controlled so that reduction to cuprous oxide proceeds but not to metallic copper, while facilitating anisotropy in the copper crystal growth that proceeds in the second reduction step.
- a reducing compound particularly a hydrazine-based compound
- the pH can be adjusted using various acids or basic substances, or by adding polyphosphoric acids to the reaction solution.
- the subsequent reaction can be carried out efficiently without adding other substances to the reaction system, which is advantageous in that it prevents the inclusion of unintended impurities and allows the desired copper particles to be obtained efficiently.
- the reduction reaction in the first reduction step may be carried out with the reaction liquid in an unheated state or in a heated state.
- the temperature of the reaction liquid is preferably 10°C or higher and 60°C or lower, more preferably 20°C or higher and 50°C or lower.
- the reaction time in the first reduction step is preferably 0.1 hours or higher and 2 hours or lower, more preferably 0.2 hours or higher and 1 hour or lower, provided that the temperature is within the above-mentioned range. From the viewpoint of uniformity of the reduction reaction, it is also preferable to continue stirring the reaction liquid from the start of the reaction to the end of the reaction.
- a second reduction step is carried out in which the cuprous oxide obtained in the first reduction step is reduced to produce metallic copper particles.
- the second reduction step is also preferably carried out under wet conditions, as in the first reduction step, and it is more preferable that both reduction steps are carried out in the same reaction system.
- polyphosphoric acids used in the present production method include polyphosphoric acids and their salts, such as diphosphoric acid (H 4 P 2 O 7 ), triphosphoric acid (tripolyphosphoric acid, H 5 P 3 O 10 ), tetrapolyphosphoric acid (H 6 P 4 O 13 ), etc., each of which has preferably 2 to 8, more preferably 2 to 5, phosphoric acid monomer units in its structure.
- the polyphosphate salts include alkali metal salts, alkaline earth metal salts, other metal salts, ammonium salts, etc. These can be used alone or in combination.
- the content of polyphosphates in the second reduction step is preferably 0.1 millimole or more, more preferably 0.1 millimole or more and 1 mole or less, per mole of copper element.
- concentration of polyphosphates in this range the crystal growth of copper resulting from the reduction reaction of cuprous oxide can be made anisotropic, and copper particles having a small particle size and a small crystallite size on a specific crystal plane can be obtained with high productivity.
- the concentration of polyphosphates does not change substantially before and after the first reduction step. Therefore, by adding polyphosphates in the above-mentioned concentration range to the reaction system in the first reduction step, the amount of polyphosphates present that is suitable for reduction to metallic copper and grain growth in the second reduction step can be sufficiently achieved.
- the above-mentioned reducing compound can be added to perform reduction to metallic copper.
- the content of the reducing compound in the reaction solution in the second reduction step is preferably 1 mole or more and 8 moles or less, more preferably 2 moles or more and 6 moles or less, relative to 1 mole of copper element.
- the reducing compound in the second reduction step may be added all at once or gradually. From the viewpoint of efficiently obtaining copper particles that satisfy the above-mentioned crystallite size ratio and particle diameter, it is preferable to adopt gradually adding the reducing compound.
- the reaction solution in the second reduction step is preferably kept under non-acidic conditions (neutral or alkaline conditions) with a pH of 7.0 or more at 25° C., in that when a reducing compound, particularly a hydrazine-based compound, is used, the reduction of the copper ions and cuprous oxide remaining in the reaction solution to metallic copper can be efficiently promoted, and the crystal growth of copper can be easily made anisotropic.
- the pH is preferably adjusted before the addition of the reducing compound in the second reduction step, in that the degree of reduction of the copper ions can be appropriately controlled.
- Various acids and basic substances can be used for adjusting the pH.
- the reaction solution after the first reduction step is in an acidic condition, it is preferable to adjust the pH of the reaction solution by adding a basic substance such as sodium hydroxide or potassium hydroxide.
- a basic substance such as sodium hydroxide or potassium hydroxide.
- the heating conditions for the reaction solution are preferably such that the temperature is maintained at 10°C or higher and 60°C or lower, particularly 20°C or higher and 50°C or lower, from the start of the second reduction step, i.e., the time when the reducing compound is added, until the end of the reaction.
- the reaction time is preferably 30 minutes or longer and 720 minutes or shorter under the above temperature conditions.
- the inventors speculate as follows about the reason why copper particles with a low sintering temperature can be obtained in this manufacturing method by performing a two-step reduction process in which copper ions are reduced to cuprous oxide and then to metallic copper, and by having polyphosphoric acids present during the second reduction process.
- first reduction step copper ions are reduced by a reducing compound in the reaction solution, and very small particles of cuprous oxide are generated in the reaction solution.
- second reduction step monovalent copper ions eluted from the cuprous oxide particles are reduced to form metallic copper nuclei. Since these nuclei are very unstable, they repeatedly combine with each other or redissolve in the reaction solution, and eventually the particles grow.
- the polyphosphates are adsorbed to specific crystal faces of copper, and growth in the direction of the crystal faces is suppressed. On the other hand, growth is not suppressed on crystal faces to which polyphosphates are not adsorbed, and growth in the direction of the crystal faces proceeds.
- metallic copper is likely to have a face-centered cubic crystal structure and the results of X-ray diffraction measurement of the obtained copper particles.
- the crystal face to which polyphosphates are adsorbed is the (111) face of copper in the particles, and the crystal face to which polyphosphates are not adsorbed is the (220) face of copper located perpendicular to the (111) face of copper. For this reason, it is considered that anisotropic growth occurs in which the growth of the (111) face of copper is suppressed and the growth of the (220) face of copper progresses, resulting in flat copper particles with a low sintering temperature.
- the reduction reaction is carried out under acidic conditions, particularly in the first reduction step, so that the reducing power can be controlled to a level where copper ions can be reduced to cuprous oxide but not to metallic copper. In addition, this also makes it easier to control the subsequent metallic copper production reaction. Then, by changing the conditions to non-acidic conditions, the dissolution rate of cuprous oxide can be reduced and the supply of monovalent copper ions can be controlled. By carrying out the second reduction in this environment, the reduction reaction rate to metallic copper can be adjusted to gentle conditions, which is particularly advantageous in that the nucleus growth rate can be controlled.
- the copper particles B obtained through the above steps even if they do not contain organic components that control crystal growth, such as organic amines, amino alcohols, or reducing sugars, will satisfy the above-mentioned suitable crystallite sizes and ratios thereof, suitable particle diameter, and suitable contents of various elements such as carbon, and will have a flattened shape.
- the copper particles B thus obtained have a crystal face of the crystal present on the main surface and grown in a direction perpendicular to the main surface, and a crystal face of the crystal present on the side surface and grown in a direction along the main surface, each of which has a specific orientation direction, and each crystal face is formed uniformly in one direction.
- the copper particles B obtained through the above steps may be washed or separated into solid and liquid as necessary, and then mixed with the copper particles A in the form of a slurry in which the copper particles B are dispersed in a solvent such as water or an organic solvent, or the particles may be dried and mixed with the copper particles A in the form of a dry powder that is an aggregate of the copper particles B. In either case, the copper particles B have a low sintering temperature and are excellent. If necessary, the copper particles B may be further surface-coated with an organic substance such as a fatty acid or a salt thereof, or an inorganic substance such as a silicon-based compound, in order to improve the dispersibility of the particles. As long as the effects of the present invention are achieved, it is acceptable for the obtained copper particles B to contain elements other than the copper element, for example by unavoidably oxidizing the surface slightly.
- the copper particles A and the copper particles B can be mixed in a dry or wet manner, but from the viewpoint of ease of mixing, it is preferable to mix them in a dry manner. Dry mixing can be performed using a known dry mixing device. Wet mixing can be performed in an organic solvent or an aqueous solvent.
- the copper powder of the present invention can also be further dispersed in an organic solvent, a resin, or the like and used in the form of a conductive composition such as a conductive ink or a copper paste.
- a conductive composition such as a conductive ink or a copper paste.
- the conductive composition is composed of at least copper powder and an organic solvent.
- organic solvent those similar to those used in the technical field of conductive compositions containing metal powders can be used without any particular limitation. Examples of such organic solvents include monohydric alcohols, polyhydric alcohols, polyhydric alcohol alkyl ethers, polyhydric alcohol aryl ethers, polyethers, esters, nitrogen-containing heterocyclic compounds, amides, amines, and saturated hydrocarbons.
- organic solvents can be used alone or in combination of two or more.
- polyethers such as polyethylene glycol and polypropylene glycol, which have a high reducing action and prevent unintended oxidation of copper particles during sintering.
- polyethylene glycol when polyethylene glycol is used as the organic solvent, its number average molecular weight is preferably 120 to 400, and more preferably 180 to 400.
- the conductive composition containing copper powder of the present invention may further contain at least one of a dispersant, an organic vehicle, and a glass frit, if necessary.
- dispersants include dispersants such as nonionic surfactants that do not contain sodium, calcium, phosphorus, sulfur, or chlorine.
- organic vehicles include mixtures containing resin components such as acrylic resins, epoxy resins, ethyl cellulose, and carboxyethyl cellulose, and solvents such as terpene-based solvents such as terpineol and dihydroterpineol, and ether-based solvents such as ethyl carbitol and butyl carbitol.
- glass frits include borosilicate glass, barium borosilicate glass, and zinc borosilicate glass.
- the conductive composition containing the copper powder of the present invention can be applied to a substrate to form a coating film, which can then be fired to form a conductive film containing copper.
- the conductive film is preferably used, for example, to form circuits on printed wiring boards and to ensure electrical continuity of external electrodes of ceramic capacitors.
- the substrate include printed circuit boards made of glass epoxy resins and flexible printed circuit boards made of polyimide.
- the amounts of copper powder and organic solvent in the conductive composition containing copper powder of the present invention can be adjusted according to the specific use of the conductive composition and the coating method of the conductive composition, but the content of copper powder in the conductive composition is preferably 5% by mass or more and 95% by mass or less, and more preferably 80% by mass or more and 90% by mass or less.
- Coating methods that can be used include, for example, the inkjet method, the dispenser method, the microdispenser method, the gravure printing method, the screen printing method, the dip coating method, the spin coating method, the spray coating method, the bar coating method, and the roll coating method.
- the heating temperature when sintering the formed coating film may be equal to or higher than the sintering start temperature of the copper powder, and may be, for example, 150°C to 220°C.
- the heating atmosphere may be, for example, an oxidizing atmosphere or a non-oxidizing atmosphere.
- oxidizing atmospheres include oxygen-containing atmospheres.
- non-oxidizing atmospheres include reducing atmospheres such as hydrogen and carbon monoxide, weakly reducing atmospheres such as a hydrogen-nitrogen mixed atmosphere, and inert atmospheres such as argon, neon, helium, and nitrogen.
- the heating time is preferably 1 minute to 3 hours, more preferably 3 minutes to 2 hours, provided that heating is performed within the above-mentioned temperature range.
- the conductive film thus obtained is obtained by sintering the copper powder of the present invention, so that sintering can proceed sufficiently even when sintering is performed under relatively low temperature conditions. Furthermore, during sintering, the copper particles that make up the copper powder melt even at low temperatures, so that the contact area between the copper particles or between the copper particles and the surface of the base material can be increased, resulting in a high degree of adhesion to the objects to be joined and an efficient formation of a dense sintered structure. Furthermore, the conductive film obtained has high continuity, density, and conductive reliability.
- the present invention has been described above based on its preferred embodiments, but the present invention is not limited to the above embodiments.
- the copper powder of the present invention may contain copper particles other than copper particles A and copper particles B as long as the desired effect is achieved.
- the above-described embodiment of the present invention encompasses the following technical ideas.
- [1] Contains the following copper particles A and copper particles B, A copper powder in which the content of copper particles A is 60% by mass or more and 99% by mass or less, and the content of copper particles B is 1% by mass or more and 40% by mass or less, relative to the total of copper particles A and copper particles B.
- [Copper particles A] The present invention comprises a core particle made of copper and a coating layer that coats the surface of the core particle, the coating layer is formed from a copper salt of an aliphatic organic acid, Copper particles having a primary particle diameter of 0.1 ⁇ m or more and 0.6 ⁇ m or less.
- [Copper particles B] a ratio (S1/B) of a first crystallite size S1 calculated by the Scherrer formula from the half-width of a peak derived from the copper (111) plane in an X-ray diffraction measurement to a BET diameter B calculated from a BET specific surface area is 0.23 or less;
- the ratio (S1/S2) of the first crystallite size S1 to the second crystallite size S2 calculated by the Scherrer formula from the half-width of the peak derived from the (220) plane of copper in X-ray diffraction measurement is 1.35 or less; Copper particles having a primary particle diameter of 0.1 ⁇ m or more and 2.0 ⁇ m or less.
- the copper particles B have a ratio (S1/S3) of the first crystallite size S1 to the third crystallite size S3 calculated by the Scherrer equation from the half-width of the peak derived from the (311) plane of copper in an X-ray diffraction measurement, of 1.35 or less.
- [3] The copper powder according to [1] or [2], wherein the copper particles B contain carbon element and the content of the carbon element is 5000 ppm or less.
- the copper powder according to any one of [1] to [3], wherein the copper particles B contain phosphorus element and the content of the phosphorus element is 300 ppm or more.
- [5] A copper paste containing the copper powder according to any one of [1] to [4].
- [6] A method for producing a conductive film, comprising applying the copper paste according to [5] to a substrate to form a coating film, and firing the coating film.
- copper particles A-1, A-2, and B-1 to B-3 were used as copper particles.
- spherical copper particles described in JP 2015-168878 A were used as copper particles A-2.
- Other copper particles were produced by the following method.
- the slurry of the washed core particles was heated to 50° C., and under this condition, a solution in which 17 g of copper (II) laurate was dissolved in 4 L of isopropyl alcohol was instantly added as a surface treatment agent, and the mixture was stirred at 50° C. for 1 hour. Then, solid-liquid separation was performed by filtration, and copper particles having a coating layer of a copper salt of an aliphatic organic acid formed on the surface of the core particles were obtained as a solid content. The content of the surface treatment agent in the obtained copper particles was 0.7% by mass in terms of carbon atoms. Next, the copper particles A-1 and A-2 were subjected to the following evaluations.
- ⁇ Second reduction step> a 25% NaOH aqueous solution was added to the reaction solution in the first reduction step to adjust the pH of the solution to 7.0.
- the solution was then heated to 40° C., and 1900.0 g of hydrazine (molar ratio relative to 1 mole of copper: 3.0) was quantitatively and sequentially added to the solution over 10 minutes to perform the second reduction step.
- the solution was then cooled to 30° C. and stirred for 150 minutes to obtain copper particles in which the cuprous oxide particles were reduced to metallic copper.
- the aqueous slurry of copper particles thus obtained was subjected to decantation washing until the electrical conductivity reached 1.0 mS (washed slurry).
- the slurry of the washed core particles was heated to 50°C, and under this condition, a solution in which 4 g of copper (II) laurate was dissolved in 1 L of isopropyl alcohol was instantly added as a surface treatment agent, and the mixture was stirred at 50°C for 1 hour. Then, solid-liquid separation was performed by filtration, and copper particles in which a coating layer of a copper salt of an aliphatic organic acid was formed on the surface of the core particles were obtained as a solid content. Then, the mixture was dried to obtain copper powder consisting of an aggregate of copper particles.
- the obtained copper particles had a copper element content of more than 98% by mass and had a flat shape.
- Copper particles B-2 were obtained in the same manner as in the production of copper particles B-1, except that the amount of sodium tripolyphosphate added was 24 g (molar ratio relative to 1 mole of copper: 0.006). The obtained copper particles had a copper content of more than 98% by mass and a flat shape.
- the carbon element content in the copper particles of copper particles B-1 to B-3 was measured using a carbon/sulfur analyzer (CS844 manufactured by LECO Japan LLC) by placing 0.50 g of any of copper particles B-1 to B-3 in a magnetic crucible, using oxygen gas (purity: 99.5%) as the carrier gas, and setting the analysis time to 40 seconds.
- the measurement results are shown in Table 2 below.
- the content of phosphorus element in the copper particles was measured by dissolving 1.00 g of any of copper particles B-1 to B-3 in 50 mL of 15% aqueous nitric acid solution, and introducing the solution into an ICP emission spectrometer (PS3520VDDII manufactured by Hitachi High-Tech Science Co., Ltd.). The measurement results are shown in Table 2 below.
- Measurements were performed on copper particles B-1 to B-3 by the following method. First, a 20% by mass aqueous slurry was prepared using the washed slurry of copper particles B-1 to B-3. Then, an isopropyl alcohol solution in which 12 g of copper laurate was dissolved as a surface coating treatment agent was added at once to the slurry heated to 50 ° C., and the mixture was stirred for 1 hour. Then, the solid content obtained by solid-liquid separation by filtration was vacuum dried, and the copper powder obtained by obtaining copper particles subjected to surface coating treatment was classified using a sieve with a mesh size of 75 ⁇ m, and the undersized portion was used as a sample.
- This sample was filled into a sample holder, and measurements were performed under the following conditions using an X-ray diffractometer (Ultima IV manufactured by Rigaku Co., Ltd.). Then, among the diffraction peaks, the main peaks at the positions corresponding to the (220) plane, (111) plane or (311) plane of copper are used as the target, and based on the full width at half maximum of the peak, the above-mentioned Scherrer formula is used to calculate each crystallite size S1 to S3, as well as the S1/S2 and S1/S3 ratios.Furthermore, the S1/B ratio is calculated from each crystallite size obtained. The results are shown in the following Table 2.
- the copper powder to be measured was spread on a measurement holder, and the copper powder was smoothed using a glass plate so that the thickness of the copper powder was 0.5 mm and the surface was smooth.
- the X-ray diffraction pattern obtained under the above measurement conditions was analyzed using analysis software under the following conditions.
- the peak width was corrected using the LaB6 value.
- the crystallite size was calculated using the full width at half maximum of the peak and the Scherrer constant (0.94).
- the peaks of the X-ray diffraction pattern used in the analysis are as follows:
- the Miller indices shown below are synonymous with the above-mentioned copper crystal planes.
- a peak indexed with Miller index (220) in the vicinity of 2 ⁇ 71° to 76°.
- a peak indexed with Miller index (111) in the vicinity of 2 ⁇ 40° to 45°.
- a peak indexed with Miller index (311) in the vicinity of 2 ⁇ 87.5° to 92.5°.
- Examples 1 to 7 and 9 and Comparative Examples 1 to 7 Copper particles A-1, A-2, and B-1 to B-3 were mixed in the ratios shown in Table 3 below to obtain copper powders of each Example and Comparative Example. Specifically, each copper particle was added to a 100 mL container in the ratios shown in Table 3, and then mixed using a small ball mill (AV-1 manufactured by Asahi Rika) to obtain copper powders of each Example and Comparative Example. Mixing was performed at 100 rpm for 1 hour. The copper powder obtained as described above and polyethylene glycol having a number average molecular weight of 200 were mixed using a three-roll kneader to obtain a copper paste containing 85% by mass of copper powder. The content of each copper particle component relative to 100 parts by mass of the total of the copper particles is shown in Table 3. The "solid content concentration" indicates the ratio of the mass of the copper powder to the mass of the entire copper paste.
- the copper paste of each of the Examples and Comparative Examples was applied onto a glass substrate, and the substrate was baked at 190° C. for 10 minutes in a nitrogen atmosphere to form a conductive film on the glass substrate.
- the obtained conductive film had a length of 2 cm, a width of 1 cm and a thickness of 30 ⁇ m, and was evaluated as follows.
- the thickness of the fired film of the Cu paste was determined by measuring the thickness of the conductive film and glass substrate, and the thickness of the glass substrate alone using a digital length measuring machine (Nikon MFC-101), and calculating the difference between these thicknesses as the thickness of the conductive film.
- the surface roughness (average roughness Ra) of each conductive film was measured at three points using a surface roughness/contour shape measuring instrument (SURFCOM 130A manufactured by Tokyo Seimitsu Co., Ltd.) and the average value of the obtained values was calculated.
- the results are shown in Table 3. From the viewpoint of electrical resistance, the surface roughness Ra is preferably 2.0 or less. Furthermore, a conductive film having a small surface roughness Ra means that the conductive film has high density.
- a copper paste was screen-printed on the polished side of a 5 mm square copper chip with one side polished with a #800 polishing sheet in the form of 2 mm x 2 mm x 30 ⁇ m, and a 3 mm square copper chip with one side polished with a #800 polishing sheet was placed so that the polished surface was the bonding surface. Thereafter, the chip was bonded by firing at 200 ° C. for 30 minutes under a nitrogen atmosphere while applying pressure of 5 MPa using a pressure firing machine (IMC-1AB6 manufactured by Imoto Seisakusho). The bond strength of the resulting bonded body was measured using a bond tester (Condor Sigma manufactured by XYZTEC Corporation).
- Example 8 Comparative Example 8 and Comparative Example 9
- Table 4 As shown in Table 4 below, when copper powder and polyethylene glycol having a number average molecular weight of 200 were mixed using a three-roll mixer, the mixing ratio of copper powder and polyethylene glycol was changed to prepare copper pastes containing 90 mass% copper powder. Except for this, the copper pastes and conductive films thereof of Example 8, Comparative Example 8, and Comparative Example 9 were prepared in the same manner as in Example 2, Comparative Example 3, and Comparative Example 5. These copper pastes and conductive films thereof were evaluated in the same manner as in Examples 1 to 7 and Comparative Examples 1 to 7. The results are shown in Table 4.
- the copper powders of Examples 2 and 8, which contain both copper particles A-1 and B-1 are less likely to be adversely affected in the resistivity and surface roughness Ra of the conductive film, even when the content of the organic solvent in the copper paste is changed.
- Comparative Examples 8 and 9 when copper powder containing only either copper particles A-1 or B-1 is used, if the content of the organic solvent in the copper paste is 10 mass%, it can be seen that the resistivity of the conductive film in particular increases significantly.
- a copper powder is provided that can produce a conductive film having high continuity and density and can be sintered at a low temperature.
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Abstract
L'invention concerne une poudre de cuivre comprenant une particule de cuivre A et une particule de cuivre B, la teneur en particule de cuivre A étant de 60 à 99 % en masse et la teneur en particule de cuivre B étant de 1 à 40 % en masse sur la base de la quantité totale de particule de cuivre A et de particule de cuivre B ; [Particule de cuivre A] une particule de cuivre ayant une taille de base de 0,1 à 0,6 µm et comprenant une particule centrale constituée de cuivre et une couche de revêtement recouvrant la surface de la particule centrale, la couche de revêtement étant formée d'un sel de cuivre d'un acide organique aliphatique. [Particule de cuivre B] : une particule de cuivre ayant une taille de base de 0,1 à 2,0 µm, le rapport (S1/B) de la première taille des cristallites S1, déterminée à partir de la demi-largeur d'un pic partant du plan (111) du cuivre dans une mesure de diffraction des rayons X au diamètre BET B, étant inférieur ou égal à 0,23, et le rapport (S1/S2) de S1 à la seconde taille des cristallites S2, déterminée à partir de la demi-largeur d'un pic partant du plan (220), étant inférieur ou égal à 1,35.
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JP2015168878A (ja) * | 2014-03-10 | 2015-09-28 | 三井金属鉱業株式会社 | 銅粉 |
JP2021025115A (ja) * | 2019-08-08 | 2021-02-22 | 三井金属鉱業株式会社 | 銅粒子 |
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JP2015168878A (ja) * | 2014-03-10 | 2015-09-28 | 三井金属鉱業株式会社 | 銅粉 |
JP2021025115A (ja) * | 2019-08-08 | 2021-02-22 | 三井金属鉱業株式会社 | 銅粒子 |
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