WO2024051008A1 - 一种超快大尺寸扫描系统及方法 - Google Patents
一种超快大尺寸扫描系统及方法 Download PDFInfo
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- WO2024051008A1 WO2024051008A1 PCT/CN2022/136686 CN2022136686W WO2024051008A1 WO 2024051008 A1 WO2024051008 A1 WO 2024051008A1 CN 2022136686 W CN2022136686 W CN 2022136686W WO 2024051008 A1 WO2024051008 A1 WO 2024051008A1
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- 230000003287 optical effect Effects 0.000 claims abstract description 36
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- 238000012544 monitoring process Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 5
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- 238000005516 engineering process Methods 0.000 description 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
Definitions
- the present invention relates to the technical field of optical microscopes, and in particular to an ultra-fast large-scale scanning system and method.
- high-magnification objective lenses and industrial cameras are generally used.
- high-magnification objective lenses and industrial cameras scan, their positions are often fixed, and each detection area is limited to the area that their performance can achieve, which has limitations.
- the sample stage is generally moved manually, which is inconvenient to use, is not accurate enough, and cannot meet the scanning accuracy requirements of optical microscopes in various fields.
- current industrial applications such as semiconductor chips, wafers, silicon wafers, industrial designs, etc., require large-area rapid scanning to simplify and streamline operating standards; the demands for industrial applications also place higher demands on optical microscopes. requirements.
- the present invention provides an ultra-fast large-size scanning system and method, which can realize automatic control of the sample stage and realize automatic, fast, and reliable scanning of large areas.
- the present invention provides an ultra-fast large-size scanning system, which includes:
- Sample stage used to place the sample to be tested
- a motion control component connected to the sample stage, is used to realize the movement of the sample stage along the x-axis, y-axis and z-axis, and is also used to achieve surface leveling of the sample to be tested;
- Light source component used to provide the light environment required for scanning
- the objective lens is set just before the sample to be tested, and is used to magnify the surface of the sample to be tested at a corresponding magnification;
- Reflector used to reflect the light signal emitted from the objective lens to the high-resolution camera
- High-resolution camera used to capture the light signal reflected by the mirror
- Height sensor located above the sample stage, is used to monitor the height of each position of the sample to be tested and transmit the height data to the control processing unit;
- a light intensity sensor located above the reflector, is used to monitor light intensity data and transmit it to the control processing unit;
- the control processing unit is used to control the work of the motion control component, adjust the height and attitude of the sample to be measured based on the received height data, and achieve the focusing of the objective lens on the sample surface; it is also used to adjust the intensity of the light source component in real time based on the light intensity data. , in order to ensure uniform contrast of the image after acquisition.
- an implementation is further provided, in which the number of objective lenses is more than two and has different magnifications.
- an implementation in which the reflector can switch between the optical paths of two different objective lenses, specifically: the reflector is fixed on the air pump control moving assembly
- the action of the moving component is controlled by an air pump to drive the reflector to move between the optical paths of different objective lenses to achieve switching.
- the air pump control moving assembly includes a slide block and a slide rail, the slide rail is fixed and horizontally arranged above the reflector, and the The slide block is slidingly connected to the slide rail; the slide block is connected to an air pump, and the air pump is connected to the control processing unit and operates under the control signal of the control processing unit to drive the slide block left and right along the slide rail. move;
- the reflector is fixedly mounted on the slider.
- the motion control component includes:
- the y-axis moving assembly includes a y-axis base and a y-axis slider; the y-axis base is provided with a wide track in the y-axis direction; the y-axis slider is a square plate with a thickness, and the square plate has a y-axis direction and A square inner cavity with openings at both ends, the wide rail is installed in the square inner cavity, and the y-axis slider slides along the wide rail under the action of the power equipment;
- the x-axis moving assembly includes an x-axis fixed frame, a screw assembly and an x-axis sliding member; the x-axis fixed frame is fixed on the y-axis moving assembly; the screw assembly includes a screw motor and a screw, The lead screw is rotatably provided in the x-axis fixed frame, the lead screw motor is provided outside the x-axis fixed frame and connected to the lead screw, and the x-axis sliding member is connected to the The nut is fixedly connected and moves along the x-axis under the action of the screw motor;
- the z-axis moving assembly includes an L-shaped z-axis holder and a sample stage holder; a z-axis guide rail is provided on the inside of the side wall of the z-axis holder, and the sample stage is fixedly installed in the z-axis holder. And in a vertical state with the z-axis guide rail, the sample stage fixing frame is slidingly connected to the z-axis guide rail through a z-axis slider.
- the z-axis slider is connected to the power equipment and can move along the z-axis guide rail under the action of the power equipment.
- the z-axis guide rail moves up and down;
- the rotating assembly includes a first rotating motor and a second rotating motor; the first rotating motor is used to drive the sample stage to rotate along the y-axis, and the second rotating motor is used to drive the sample stage to rotate along the x-axis.
- an implementation is further provided, in which the number of lead screws in the lead screw assembly is more than two.
- an implementation is further provided, in which the motor shaft of the first rotating motor is arranged along the y-axis direction, and the motor shaft is fixedly connected to the first penetration rod, and the third rotating motor is A penetration rod is inserted into the sample stage and is fixedly connected to the sample stage; with the action of the first rotating motor, the sample stage is driven to rotate along the y-axis;
- the motor shaft of the second rotating motor is arranged along the x-axis direction, and its motor shaft is fixedly connected to the second penetration rod.
- the second penetration rod is installed in the sample stage and is fixedly connected to the sample stage. , with the action of the second rotating motor, the sample stage is driven to rotate along the x-axis;
- the first rotating motor and the second rotating motor are both fixedly connected to the z-axis slider, ensuring that the positions of the first rotating motor and the second rotating motor are fixed relative to the z-axis moving component.
- the sample stage is square, and there is a specific gap between the bottom of the sample stage and the upper surface of the bottom of the L-shaped z-axis holder.
- the gap provides space for the rotation of the sample stage and defines the rotation range.
- the present invention provides an ultra-fast large-size scanning method, which is implemented using any of the above-mentioned ultra-fast large-size scanning systems; the steps of the method include:
- the control processing unit determines whether the surface of the sample to be measured is at the optimal height for focusing based on the received detection signal from the height sensor, and adjusts the height of the sample stage by controlling the motion control component so that the objective lens can focus on the sample surface;
- the control processing unit controls the motion control component to automatically level the surface of the sample to be tested
- the control processing unit again controls the motion control component to adjust the height of the surface of the sample to be tested and perform automatic focusing to ensure that the final image is uniform and clear;
- step S5 also includes: during the scanning process, the light intensity sensor detects the reflectivity of the surface of the sample to be tested in real time, and synchronizes it according to the detected data. Adjust the intensity of the light source component to ensure uniform color of the image signal after collection.
- the sample stage of the present invention has motion control functions, automatic displacement, automatic leveling, and automatic focusing, realizing automatic, fast, and large-area scanning. ; It can greatly reduce labor inspection costs, increase production capacity, and achieve stable image acquisition results. After precise control by motion control, the scanned images have no splicing, are fast, have clear images, and do not waste field of view;
- Another technical solution among the above technical solutions has the following advantages or beneficial effects: detecting the reflectivity of the surface of the sample to be tested through a light intensity sensor can ensure uniform contrast of the image after collection;
- the present invention has two objective lenses with different magnifications, which are moved and switched by a total mirror to form two optical paths to meet different scanning requirements, and the two optical paths only use
- One camera can save space, reduce the size of the entire body, and reduce costs.
- Figure 1 is a structural diagram of an ultra-fast large-size scanning system provided by an embodiment of the present invention
- Figure 2 is a structural diagram of optical related components in an ultra-fast large-size scanning system provided by an embodiment of the present invention
- Figure 3 is a structural diagram of a motion control component provided by an embodiment of the present invention.
- Figure 4 is a schematic diagram of the optical path principle provided by an embodiment of the present invention.
- Motion control component 2. Sample stage; 31. First light source; 32. Second light source; 33. Third light source; 34. Fourth light source; 4. High-magnification objective lens; 5. Low-magnification objective lens; 6. Reflector ; 7. High-resolution camera; 8. Height sensor; 9. Control processing unit;
- the ultrafast large-size scanning system of the present invention includes a motion control component 1, a sample stage 2, a light source component, a high-magnification objective lens 4, a low-magnification objective lens 5, a height sensor 8, a reflector 6, and a high-resolution camera 7 , light intensity sensor and control processing unit 9.
- the sample stage is connected to the motion control component and is located below the entire device to form a mechanical group; other light source components, height sensors, objective lenses, reflectors, high-resolution cameras, and light intensity sensors are combined and installed from bottom to top to form an optical group;
- the set can also include a trinocular, which is set above the objective lens. The surface information of the sample can be directly observed with the naked eye through the trinocular, which plays a role in real-time observation.
- the motion control component 1 is arranged at the bottom, which is connected to the bottom of the sample stage 2, and is used to control the movement of the sample stage along the x, y, and z axes and the rotation along the x and y axes.
- the moving distances along the x, y, and z axes are all between 1mm and 15cm; the rotation angles along the x and y axes are between -5° and 5°.
- the motion control component 1 is connected to the control processing unit 9 , and the control processing unit 9 sends a control signal to control the action of the motion control component 1 .
- a plurality of height sensors are provided on the fixed frame above the sample stage 2, the detection direction of which is perpendicular to the sample surface, used to monitor the height of different positions on the sample surface at all times, and transmit the height monitoring signal to the control processing unit 9 and the control processing unit 9. Perform calculations and judgments to calculate the center height data of the sample surface to be measured and the height differences across the sample surface.
- the control processing unit 9 rotates the sample stage along the x-axis and/or the y-axis according to the height difference across the sample surface and through the action of the motion control component 1, thereby achieving leveling of the sample on the sample stage;
- the control processing unit 9 controls the movement of the motion control component 1 according to the center height data of the sample surface to be measured to lift or stop the sample stage, thereby assisting in the automatic focusing of the objective lens on the sample surface.
- the height sensor is a type of sensor such as a capacitive sensor or a laser sensor.
- the structural diagram of the motion control component 1 is shown in Figure 3, including a base 11, a y-axis slider 12, an x-axis moving component, a z-axis moving component 16, a first rotating motor 17 and a second rotating motor 18.
- the base 11 is fixedly installed on the working platform along the y-axis.
- the upper part of the base 11 is provided with a y-axis guide rail.
- the y-axis slider 12 is provided with a hollow structure.
- the y-axis guide rail is disposed in the hollow structure, so that the y-axis slider 12 can Sliding along the y-axis guide rail; the y-axis slider 12 is connected to the power equipment and moves under the action of the power equipment.
- the x-axis moving assembly includes an x-axis fixed frame 13, a screw assembly 14 and an x-axis sliding member 15; the x-axis fixed frame 13 is fixed on the upper surface of the y-axis sliding member 12; the screw assembly 14 includes a screw motor and a screw.
- the lead screw is located in the x-axis fixed frame 13.
- the lead screw motor is located at the outer end of the x-axis fixed frame 13 and is connected to the lead screw.
- the x-axis sliding member 15 is fixedly connected to the nut provided on the lead screw. Move along the x-axis under action.
- the number of lead screws is preferably two or more to ensure reliability.
- the z-axis moving assembly 16 includes an L-shaped z-axis holder.
- a z-axis guide rail is provided on the inside of the side wall of the z-axis holder.
- the sample stage is fixedly installed in the z-axis holder and is perpendicular to the z-axis guide rail.
- the sample stage The fixed frame is slidingly connected to the z-axis guide rail through the z-axis slider.
- the z-axis slider is connected to power equipment such as a motor, and can move up and down along the z-axis guide rail under the action of the motor.
- the rotating assembly between the sample stage and the sample stage holder, including a first rotating motor 17 and a second rotating motor 18; the motor shaft of the first rotating motor 17 is arranged along the y-axis direction, and its motor shaft is connected to the first through-pass
- the rods are fixedly connected.
- the first penetrating rod is installed in the sample stage and is fixedly connected to the sample stage. After the first penetrating rod penetrates the sample stage, it is rotatably connected to the concave hole provided on the z-axis slider.
- the concave hole is The height positions of the first penetration rod and the first rotating motor 17 are limited; the first rotating motor 17 is fixedly connected to the z-axis slider.
- the motor shaft of the second rotation motor 18 is arranged along the x-axis direction, and its motor shaft is fixedly connected to the second penetration rod.
- the second penetration rod is installed in the sample stage and is fixedly connected to the sample stage. With the second rotation motor
- the action of 18 drives the sample stage to rotate along the x-axis.
- the second rotating motor 18 is fixedly connected to the z-axis slider, ensuring that the position of the second rotating motor is fixed relative to the z-axis moving component.
- the sample stage 2 is used to place the sample to be scanned. It is suitable for placing samples with a mass not exceeding 3kg.
- the sample stage is equipped with a gravity sensor for measuring the weight of the placed sample.
- the light source component includes a plurality of specific light sources, the first light source 31, the second light source 32, the third light source 33 and the fourth light source 34, including bright field light sources and dark field light sources of visible light. According to samples of different materials or different reflectivities or Choose light sources for different scanning needs.
- the light source can be irradiated vertically on the sample surface, or it can be irradiated on the sample surface at a specific angle, and the angle can be adjusted manually to achieve the best effect.
- the first light source 31 and the second light source 32 are position-adjustable light sources, and the third light source 33 and the fourth light source 34 are position-fixed light sources.
- the first light source 31 and the second light source 32 are bright field light sources
- the third light source 33 and the fourth light source 34 are dark field light sources
- the angle between the light source beam and the sample surface is 0°-180°
- the position of the adjustable light source The specific adjustment structure can be achieved by setting the light source on the screw motor assembly, and the work of the screw motor assembly drives the light source to move along the screw; during operation, you can choose to use one or more light sources according to the type of sample, and collect images according to
- the type of information determines whether to use a bright field light source or a dark field light source, that is, the control processing unit 9 is electrically connected to the above four light sources, and the switches and working states of the four light sources are controlled according to the actual situation to achieve one, two, three or four Two light sources work simultaneously to provide the required light environment for sample scanning.
- Two objective lenses namely high-magnification objective lens 4 and low-magnification objective lens 5, are installed on the objective lens converter and are used to observe the sample on the sample stage.
- the low-magnification objective lens 5 is a low-magnification objective lens of ⁇ 2 times
- the high-magnification objective lens 4 is a high-magnification objective lens of ⁇ 10 times.
- the number of objective lenses is not limited to two, but can also be 1 or more than 3 to form single optical path, dual optical path, three optical path and more optical path systems.
- the reflector 6 is arranged on the optical path between the objective lens and the high-resolution camera 7 to reflect the optical signal or change the direction of the optical path, and redirect the optical signal or optical path to the receiving optical path of the high-resolution camera 7 .
- two reflectors can be fixedly installed in the two optical paths respectively, or one reflector can be fixed on the moving component controlled by the air pump, and the movement of the moving component controlled by the air pump drives the reflector to move between the two optical paths. Or move between multiple optical paths, and switch between multiple optical paths at any time.
- the air pump control moving assembly as shown in Figure 2, is slidably installed on the lower surface of the top bracket.
- the reflector 6 is fixedly installed on the air pump control moving assembly, and its setting direction is at an angle of about 45 degrees, which can move the low-end mirror 6 below it.
- the light signal emitted from the magnification objective lens or the high-magnification objective lens is reflected to the high-resolution camera set on the side.
- the air pump control moving assembly includes a slider, which is slidingly connected to the slide rail provided on the lower surface of the top bracket; the slider is connected to the air pump, and the air pump is connected to the control processing unit 9.
- the air pump receives the control signal from the control processing unit 9 and drives the slider along the The slide rail moves left and right, from above one objective lens to above another objective lens, to achieve switching of different optical paths.
- High-resolution camera 7 used to quickly collect light image signals.
- the high-resolution camera 7 is a line array camera or an area array camera; the high-resolution camera is suitable for fast imaging, and the fast imaging speed is: 1HZ ⁇ speed ⁇ 1000kHZ; the resolution can be selected between 1K-32K according to customer needs, or Optional signal acquisition card is suitable for large-size image acquisition.
- Light intensity sensor set above the reflector, is used to detect the reflectivity of the surface of the sample to be tested (the actual detection data is the light intensity, and the reflectivity of the sample surface is obtained based on the detected light intensity and the light source intensity), and ensures the image signal after collection Even color.
- the light intensity sensor can sense the reflectivity of the sample surface. According to the feedback information from the reflectance sensor, it is sent to the software system in the control processing unit to automatically adjust the contrast of the picture. Then the color of the picture will be uniform, and the overall tone of the picture will not be too white or excessive. Black situation.
- the trinocular can directly observe the surface of the sample and is matched with an area array camera.
- the control processing unit 9 communicates with the motion control component 1 and each sensor through embedded software. It controls the movement and rotation of the sample stage through the motion control component 1, and controls the automatic focusing of the sample surface by combining with the height sensor.
- the optical path principle in the scanning system of the present invention is shown in Figure 4.
- the light intensity detector 104 can be understood as a light intensity sensor of the present invention, and is used for detecting light intensity.
- a high-speed camera 105 needs to be added to receive the optical signal emitted from the high-magnification objective lens 4. It can be directly set in the vertical direction of the high-magnification objective lens 4. In this case, there is no need for a reflector.
- the method for scanning and detecting using the ultra-fast large-size scanning system of the present invention includes the following steps:
- the control processing unit 9 controls the sample stage to automatically move to directly below the height sensor
- the control processing unit 9 determines whether the sample surface is at the optimal height for focusing based on the received detection signal from the height sensor, and adjusts the height of the sample stage by controlling the motion control component 1, so that the objective lens can be focused on the sample surface;
- control processing unit 9 can be used to control the selected position for scanning.
- the sample stage moves horizontally at a specific speed and path driven by the motion control component 1, thereby realizing continuous and automatic scanning of large-size samples; the scanning process is realized through the movement of the sample, without the need for an optical assembly Device refocusing and other adjustments are performed to increase scanning speed and improve the reliability of scanning large-size samples;
- the light intensity sensor detects the reflectivity of the surface of the sample to be tested, and at the same time, the data is fed back to adjust the contrast synchronously to ensure that the color of the image signal after acquisition is uniform.
- the scanning system of the present invention can detect the following aspects of the sample: front scratches, back scratches, cracks, line cuts, and wrinkles; stains and oil stains; edge chipping and chipping; bubbles, holes, and holes; and surface foreign matter. , white spots, mole spots, crystal defects; warping; flat edge impressions, crystal edge impressions, uneven grinding, aperture; double flat edges; laser engraving code inspection; heavy industry wafer crystal grid inspection; customer-customized defect inspection and definition .
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Abstract
一种超快大尺寸扫描系统及方法,属于光学显微镜技术领域,能够实现对样品台(2)的自动控制,实现自动、快速、大面积可靠扫描;该系统包括:样品台(2);运动控制组件(1),用于实现样品台(2)沿x、y和z轴的移动以及待测样品表面调平;光源组件;物镜;反射镜,用于将物镜处发射来的光信号反射到高分辨相机处;高分辨相机(7);高度传感器(8),用于监测待测样品各位置的高度;光强传感器,用于监测光强数据;控制处理单元(9),用于控制运动控制组件(1)的工作实现物镜在样品表面的聚焦;还用于根据光强数据实时调整光源组件强度以保证采集后的图像对比度均匀。
Description
本发明涉及光学显微镜技术领域,尤其涉及一种超快大尺寸扫描系统及方法。
目前,对于基本的光学的扫描检测,一般都会用到高倍物镜和工业相机。但现有高倍物镜和工业相机进行扫描时,位置往往是固定的,每次检测面积仅限于其性能所能达到的面积,具有局限性。且样品台一般是手动控制移动,使用时多有不便,且不够准确,不能满足各领域对光学显微镜扫描精度的要求。另外,目前工业应用方面,例如半导体芯片、晶圆、硅片、工业设计等都需要大面积快速扫描,才能使操作标准简单化、流程化;工业应用方面的需求也对光学显微镜提出了更高的要求。
因此,有必要研究一种新的超快大尺寸扫描系统及方法来应对现有技术的不足,以解决或减轻上述一个或多个问题。
发明内容
有鉴于此,本发明提供了一种超快大尺寸扫描系统及方法,能够实现对样品台的自动控制,实现自动、快速、大面积可靠扫描。
一方面,本发明提供一种超快大尺寸扫描系统,所述系统包括:
样品台,用于放置待测样品;
运动控制组件,与所述样品台连接,用于实现所述样品台沿x轴、y轴和z轴的移动,也用于实现待测样品表面调平;
光源组件,用于提供扫描所需的光环境;
物镜,正对待测样品设置,用于对待测样品的表面进行对应倍率的放大;
反射镜,用于将物镜处发射来的光信号反射到高分辨相机处;
高分辨相机,用于拍摄反射镜反射来的光信号;
高度传感器,设于样品台上方,用于监测待测样品各位置的高度,并将高度数据传输给控制处理单元;
光强传感器,设置在反射镜上方,用于监测光强数据并传输给控制处理单元;
控制处理单元,用于控制运动控制组件的工作,并根据接收到的高度数据调整待测样品的高度和姿态,实现物镜在样品表面的聚焦;还用于根据光强数据实时调整光源组件的强度,以便保证采集后的图像对比度均匀。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,所述物镜的数量为两个以上,且具有不同倍率。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,所述反射镜能够在两个不同物镜所在光路之间进行切换,具体为:所述反射镜固定在气泵控制移动组件上,通过气泵控制移动组件的动作带动所述反射镜在不同物镜所在的光路之间移动,实现切换。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,所述气泵控制移动组件包括滑块和滑轨,所述滑轨固定且水平向的设置在反射镜上方,所述滑块与所述滑轨滑动连接;所述滑块与气泵连接,所述气泵与所述控制处理单元连接并在所述控制处理单元的控制信号下动作从而带动所述滑块沿滑轨左右移动;
所述反射镜固定设置在所述滑块上。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,所述运动控制组件包括:
y轴移动组件,包括y轴底座和y轴滑动件;y轴底座上设有y轴方向的宽轨;y轴滑动件为具有厚度的方形板状,所述方形板状具有y轴方向且两端开口的方形内腔,所述宽轨穿设在所述方形内腔中,在动力设备的作用下实现所述y轴滑动件沿所述宽轨的滑动;
x轴移动组件,包括x轴固定框架、丝杠组件和x轴滑动件;所述x轴固定框架固定设于y轴移动组件上;所述丝杠组件包括丝杠电机和丝杠,所述丝杠可转动地设于所述x轴固定框架内,所述丝杠电机设于所述x轴固定框架外侧且与所述丝杠连接,所述x轴滑动件与设于丝杠上的螺母固定连接,在所述丝杠电机的作用下沿x轴移动;
z轴移动组件,包括呈L形的z轴固定座和样品台固定架;所述z轴固定座的侧壁内侧设有z轴导轨,所述样品台固定架设于所述z轴固定座内且与所述z轴导轨呈垂直状态,所述样品台固定架通过z轴滑块与z轴导轨滑动连接,所述z轴滑块与动力设备连接,在所述动力设备的作用下能够沿z轴导轨上下移动;
转动组件,包括第一转动电机和第二转动电机;所述第一转动电机用于带动所述样品台沿y轴转动,所述第二转动电机用于带动所述样品台沿x轴转动。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,所述丝杠组件中丝杠数量为两根以上。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,所述第一转动电机的电机轴沿y轴方向设置,其电机轴与第一穿设杆固连,所述第一穿设杆穿设在样品台内且与所述样品台固定连接;随着所述第一转动电机的动作带动所述样品台沿y轴转动;
所述第二转动电机的电机轴沿x轴方向设置,其电机轴与第二穿设杆固连,所述第二穿设杆穿设在所述样品台内且与所述样品台固定连接,随 着所述第二转动电机的动作带动所述样品台沿x轴转动;
所述第一转动电机和所述第二转动电机均与所述z轴滑块固定连接,保证第一转动电机和第二转动电机的位置相对于z轴移动组件是固定的。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,所述样品台为方形,且所述样品台的底部与L形的z轴固定座的底板上表面之间具有特定距离的间隙,所述间隙为所述样品台的转动提供空间并限定转动范围。
另一方面,本发明提供一种超快大尺寸扫描方法,所述方法采用如上任一所述的超快大尺寸扫描系统实现;所述方法的步骤包括:
S1、将待测样品放置在样品台上,并通过运动控制组件对样品台的位置进行x、y、z三轴向的调整,使其处于相对合适的位置;
S2、控制处理单元根据接收的高度传感器的检测信号,判断待测样品表面是否处于聚焦的最佳高度,并通过控制运动控制组件对样品台高度进行调整,实现物镜能够聚焦于样品表面;
S3、控制处理单元控制运动控制组件,对待测样品表面进行自动调平;
S4、控制处理单元再次控制运动控制组件调整待测样品表面的高度,进行自动聚焦,以保证最终图像均匀清晰;
S5、开始扫描:样品台在运动控制组件的带动下按特定速度、特定路径进行水平向移动,将待测样品表面的不同扫描区域持续移动到物镜下方,从而实现对大尺寸样品的连续自动扫描。
如上所述的方面和任一可能的实现方式,进一步提供一种实现方式,步骤S5的内容还包括:扫描过程中由光强传感器实时检测待测样品表面的反射率,并根据检测的数据同步调节光源组件的强度,以保证采集后的图像信号颜色均匀。
与现有技术相比,上述技术方案中的一个技术方案具有如下优点或有 益效果:本发明的样品台有运动控制功能,自动位移、自动调平、自动聚焦,实现自动、快速、大面积扫描;可以大大降低人力检测成本,增加产能、图像采集结果稳定,且经过运动控制精准控制后,扫描出的图片无拼接、速度快、图像清晰、不浪费视野;
上述技术方案中的另一个技术方案具有如下优点或有益效果:高分辨扫描相机扫描,加快扫描速率,节省检测时间;
上述技术方案中的另一个技术方案具有如下优点或有益效果:通过光强传感器检测待测样品表面的反射率,能够保证采集后的图像对比度均匀;
上述技术方案中的另一个技术方案具有如下优点或有益效果:本发明有两个不同倍数的物镜,通过全反镜移动切换,形成两个光路,满足不同的扫描需求,且两个光路仅使用一台相机,可以节省空间,减小整机机身的尺寸、降低成本。
当然,实施本发明的任一产品并不一定需要同时达到以上所述的所有技术效果。
为了更清楚地说明本发明实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图。
图1是本发明一个实施例提供的超快大尺寸扫描系统结构图;
图2是本发明一个实施例提供的超快大尺寸扫描系统中光学相关组件的结构图;
图3是本发明一个实施例提供的运动控制组件的结构图;
图4是本发明一个实施例提供的光路原理示意图。
其中,图中:
1、运动控制组件;2、样品台;31、第一光源;32、第二光源;33、第三光源;34、第四光源;4、高倍物镜;5、低倍物镜;6、反射镜;7、高分辨相机;8、高度传感器;9、控制处理单元;
101~103、样品;104、光强探测器;105、高速摄像机。
为了更好的理解本发明的技术方案,下面结合附图对本发明实施例进行详细描述。
应当明确,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。
本发明的超快大尺寸扫描系统,如图1所示,包括运动控制组件1、样品台2、光源组件、高倍物镜4、低倍物镜5、高度传感器8、反射镜6、高分辨相机7、光强传感器以及控制处理单元9。其中,样品台与运动控制组件连接,位于整个装置的下方,组成机械组;其他光源组件、高度传感器、物镜、反射镜、高分辨相机、光强传感器由下而上组合安装成光学组;光学组还可以包括三目镜,三目镜设置在物镜上方,可以通过三目镜直接用肉眼观测样品表面信息,起到即时观测作用。
运动控制组件1设置在最底部,其与样品台2的底部连接,用于控制样品台进行沿x、y、z轴的移动以及沿x、y轴的转动。沿x、y、z轴的移动距离在均为1mm-15cm之间;沿x、y轴转动的角度均在-5°到5°之间。运动控制组件1与控制处理单元9连接,由控制处理单元9发送控制信号从而控制运动控制组件1的动作。样品台2上方的固定架上设置有多个高度传感器,其检测方向垂直于样品表面,用于时刻监测样品表面不同 位置的高度,并将高度监测信号传输给控制处理单元9并由控制处理单元9进行计算和判断,计算出待测样品表面的中心高度数据,以及样品表面各处的高度差值。一方面,由控制处理单元9根据样品表面各处的高度差值并通过运动控制组件1的动作使样品台沿x轴和/或y轴的转动,实现对样品台上样品的调平;另一方面,由控制处理单元9根据待测样品表面的中心高度数据控制运动控制组件1动作进行样品台的升降或停止升降,从而协助实现物镜在样品表面的自动聚焦。高度传感器为电容传感器或激光传感器等类型的传感器。
运动控制组件1的结构图如图3所示,包括底座11、y轴滑动件12、x轴移动组件、z轴移动组件16、第一转动电机17和第二转动电机18。底座11沿y轴固定设于工作平台上,底座11上部设有y轴导轨,y轴滑动件12设有中空结构,y轴导轨穿设在该中空结构中,从而使y轴滑动件12能够沿着y轴导轨滑动;y轴滑动件12与动力设备连接,在动力设备作用下移动。x轴移动组件包括x轴固定框架13、丝杠组件14和x轴滑动件15;x轴固定框架13固定设于y轴滑动件12上表面;丝杠组件14包括丝杠电机和丝杠,丝杠设于x轴固定框架13内,丝杠电机设于x轴固定框架13外端且与丝杠连接,x轴滑动件15与设于丝杠上的螺母固定连接,在丝杠电机的作用下沿x轴移动。优选丝杠数量为两根以上,以保证可靠性。z轴移动组件16包括呈L形的z轴固定座,z轴固定座的侧壁内侧设有z轴导轨,样品台固定架设于z轴固定座内且与z轴导轨呈垂直状态,样品台固定架通过z轴滑块与z轴导轨滑动连接,z轴滑块与动力设备如电机连接,在电机的作用下能够沿z轴导轨上下移动。样品台与样品台固定架之间还设有转动组件,包括第一转动电机17和第二转动电机18;第一转动电机17的电机轴沿y轴方向设置,其电机轴与第一穿设杆固连,第一穿设杆穿设在样品台内且与样品台固定连接,第一穿设杆穿 透样品台后与设于z轴滑块上的凹孔可转动连接,凹孔的存在对第一穿设杆以及第一转动电机17的高度位置进行了限定;第一转动电机17与z轴滑块固定连接。方形的样品台的底部与L形的z轴固定座的底板上表面之间具有特定距离的间隙,该间隙给了方形样品台的转动空间也限定了转动角度范围,包括x轴和y轴方向的转动限制。第二转动电机18的电机轴沿x轴方向设置,其电机轴与第二穿设杆固连,第二穿设杆穿设在样品台内且与样品台固定连接,随着第二转动电机18的动作带动样品台沿x轴转动。第二转动电机18与z轴滑块固定连接,保证了第二转动电机的位置相对于z轴移动组件是固定的。
样品台2,用于放置待扫描样品,其适用于放置质量不超过3kg的样品,样品台上设置有重力传感器,用于测量放置的样品的重量。
光源组件,包括多个具体光源,第一光源31、第二光源32、第三光源33和第四光源34,囊括可见光的明场光源和暗场光源,根据不同材质或不同反光率的样品或不同扫描需求选择光源。光源可以垂直照射在样品表面,也可以倾斜特定角度照射在样品表面,手动转动调节角度,以达到最好的效果。
第一光源31、第二光源32是可调节位置的光源,第三光源33、第四光源34是位置固定的光源。另外针对图中:第一光源31、第二光源32是明场光源,第三光源33、第四光源34是暗场光源;光源光束与样品表面角度是0°-180°;位置可调光源的具体调节结构可以通过将光源设置在丝杠电机组件上,通过丝杠电机组件的工作带动光源实现沿丝杠的移动;工作时根据样品类型可以选择使用一个还是多个光源,根据要采集图像信息的类型确定使用明场光源还是暗场光源,即将控制处理单元9与以上四个光源均电连接,根据实际情况控制四个光源的开关和工作状态,实现一个、两个、三个或四个光源同时工作,从而给样品扫描提供所需的光环境。
两个物镜,即高倍物镜4和低倍物镜5,两物镜安装在物镜转换器上,用于观察样品台上的样品。低倍物镜5为≤2倍的低倍率物镜,高倍物镜4为≥10倍的高倍率物镜。物镜的数量不限于两个,还可以是1个或3个以上,以形成单光路、双光路、三光路以及更多光路系统。
反射镜6,设置在物镜和高分辨率相机7之间的光路上,用于反射光信号或改变光路方向,将光信号或光路改向到高分辨相机7的接收光路上。当具有两个以上光路时,可以采用两个反射镜分别固定安装在两个光路中,也可以将一个反射镜固定在气泵控制移动组件上,通过气泵控制移动组件的动作带动反射镜在两个或多个光路之间移动,随时实现多个光路之间切换。气泵控制移动组件,如图2所示,其滑动设置在顶部支架的下表面,反射镜6固定设置在气泵控制移动组件上,且其设置方向为45度角左右,能够将位于其下方的低倍物镜或高倍物镜发射过来的光信号反射到设置在侧面的高分辨相机上。气泵控制移动组件包括滑块,其与设置在顶部支架下表面的滑轨滑动连接;滑块与气泵连接,气泵与控制处理单元9连接,气泵接收控制处理单元9的控制信号并带动滑块沿滑轨左右移动,从一个物镜上方移动到另一物镜上方,实现不同光路的切换。
高分辨相机7,用于快速采集光图像信号。高分辨相机7为线阵相机或面阵相机;高分辨相机适用于快速取像,快速取像速度是:1HZ≤速度≤1000kHZ;分辨率可按照客户需求装择1K-32K之间,也可以选装信号采集卡,适用于大尺寸图像采集。
光强传感器,设置反射镜上方,用于检测待测样品表面的反射率(实际检测数据为光强,根据检测光强和光源光强得到样品表面的反射率),并保证采集后的图像信号颜色均匀。该光强传感器可以感应到样品表面的反射率,根据反射率传感器反馈信息到控制处理单元中的软件系统,自动调节图片对比度,然后图片颜色就会均匀,不会出现图片整体色调过白或 者过黑的情况。
三目镜,能直接观察样品表面,有相匹配面阵相机。
控制处理单元9,通过内嵌的软件与运动控制组件1以及各传感器连接通信,其通过运动控制组件1控制样品台的移动及转动,以及通过与高度传感器结合,控制样品表面自动聚焦。
本发明扫描系统中的光路原理如图4所示。底部放置有三个样品101、102和103,三个样品是基于光路给出的,不代表三个独立待测样品。光强探测器104可以理解为本发明的光强传感器,用于探测光强。当两路光路分别采用一个摄像设备时,需增加高速摄像机105,用其来接收高倍物镜4发射来的光信号,可以直接设置在高倍物镜4的垂直方向上,此时无需反射镜的存在。
用本发明的超快大尺寸扫描系统进行扫描检测的方法,包括以下步骤:
(1)将样品放置在样品台上,利用可见光作为光源,可见光照射于待测样品表面,可见光在样品表面发生反射;
(2)控制处理单元9控制样品台自动移动到高度传感器正下方;
(3)控制处理单元9根据接收的高度传感器的检测信号,判断样品表面是否处于聚焦的最佳高度,并通过控制运动控制组件1对样品台高度进行调整,最终实现物镜能够聚焦于样品表面;
(4)使样品整体表面聚焦均匀,再通过控制处理单元9控制运动控制组件,自动调平样品表面;
(5)再次控制处理单元9控制自动聚焦,保证最终图像均匀清晰,也可以多次聚焦,提高图像质量;
(6)聚焦完成后可以通过控制处理单元9控制选取位置进行扫描,
(7)开启扫描后样品台在运动控制组件1的带动下按特定速度、特定路径进行水平向移动,从而实现对大尺寸样品的连续自动扫描;扫描过 程通过样品的移动来实现,无需光学组器件的重新聚焦以及其他调整工作,从而增加扫描速度,也提高了大尺寸样品扫描的可靠性;
(8)扫描过程中由光强传感器检测待测样品表面的反射率,同时反馈数据同步调节对比度,保证采集后的图像信号颜色均匀。
(9)最后通过采集图片进行影像处理与分析,影像前处理、3D重建、图形辨识,快速自动化获取大尺寸检测结果。
用本发明的扫描系统能够检测出样品的:正面刮伤、背面刮伤、裂痕、线切痕、褶皱;污迹、油污;边缘缺角、崩脚;气泡、空孔、凹洞;表面异物、白点、痣点、晶体缺陷;曲翘;平边印痕、晶边印痕、研磨不匀、光圈;双平边;雷刻码检验;重工片晶格纹检查;客户定制化缺陷检查与定义。
以上对本申请实施例所提供的一种超快大尺寸扫描系统及方法,进行了详细介绍。以上实施例的说明只是用于帮助理解本申请的方法及其核心思想;同时,对于本领域的一般技术人员,依据本申请的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本申请的限制。
还需要说明的是,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的商品或者系统不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种商品或者系统所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的商品或者系统中还存在另外的相同要素。“大致”是指在可接收的误差范围内,本领域技术人员能够在一定误差范围内解决所述技术问题,基本达到所述技术效果。
在本发明实施例中使用的术语是仅仅出于描述特定实施例的目的,而非旨在限制本发明。在本发明实施例和所附权利要求书中所使用的术语 “和/或”仅仅是一种描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,可以表示:单独存在A,同时存在A和B,单独存在B这三种情况。另外,本文中字符“/”,一般表示前后关联对象是一种“或”的关系。
Claims (10)
- 一种超快大尺寸扫描系统,其特征在于,所述系统包括:样品台,用于放置待测样品;运动控制组件,与所述样品台连接,用于实现所述样品台沿x轴、y轴和z轴的移动,也用于实现待测样品表面调平;光源组件,用于提供扫描所需的光环境;物镜,正对待测样品设置,用于对待测样品的表面进行对应倍率的放大;反射镜,用于将物镜处发射来的光信号反射到高分辨相机处;高分辨相机,用于拍摄反射镜反射来的光信号;高度传感器,设于样品台上方,用于监测待测样品各位置的高度,并将高度数据传输给控制处理单元;控制处理单元,用于控制运动控制组件的工作,并根据接收到的高度数据调整待测样品的高度和姿态,实现物镜在样品表面的聚焦。
- 根据权利要求1所述的超快大尺寸扫描系统,其特征在于,所述物镜的数量为两个以上,且具有不同倍率。
- 根据权利要求2所述的超快大尺寸扫描系统,其特征在于,所述反射镜能够在两个不同物镜所在光路之间进行切换,具体为:所述反射镜固定在气泵控制移动组件上,通过气泵控制移动组件的动作带动所述反射镜在不同物镜所在的光路之间移动,实现切换。
- 根据权利要求3所述的超快大尺寸扫描系统,其特征在于,所述气泵控制移动组件包括滑块和滑轨,所述滑轨固定且水平向的设置在反射镜上方,所述滑块与所述滑轨滑动连接;所述滑块与气泵连接,所述气泵与所述控制处理单元连接并在所述控制处理单元的控制信号下动作从而带动所述滑块沿滑轨左右移动;所述反射镜固定设置在所述滑块上。
- 根据权利要求1所述的超快大尺寸扫描系统,其特征在于,所述运动控制组件包括:y轴移动组件,包括y轴底座和y轴滑动件;y轴底座上设有y轴方向的宽轨;y轴滑动件为具有厚度的方形板状,所述方形板状具有y轴方向且两端开口的方形内腔,所述宽轨穿设在所述方形内腔中,在动力设备的作用下实现所述y轴滑动件沿所述宽轨的滑动;x轴移动组件,包括x轴固定框架、丝杠组件和x轴滑动件;所述x轴固定框架固定设于y轴移动组件上;所述丝杠组件包括丝杠电机和丝杠,所述丝杠可转动地设于所述x轴固定框架内,所述丝杠电机设于所述x轴固定框架外侧且与所述丝杠连接,所述x轴滑动件与设于丝杠上的螺母固定连接,在所述丝杠电机的作用下沿x轴移动;z轴移动组件,包括呈L形的z轴固定座和样品台固定架;所述z轴固定座的侧壁内侧设有z轴导轨,所述样品台固定架设于所述z轴固定座内且与所述z轴导轨呈垂直状态,所述样品台固定架通过z轴滑块与z轴导轨滑动连接,所述z轴滑块与动力设备连接,在所述动力设备的作用下能够沿z轴导轨上下移动;转动组件,包括第一转动电机和第二转动电机;所述第一转动电机用于带动所述样品台沿y轴转动,所述第二转动电机用于带动所述样品台沿x轴转动。
- 根据权利要求5所述的超快大尺寸扫描系统,其特征在于,所述丝杠组件中丝杠数量为两根以上。
- 根据权利要求5所述的超快大尺寸扫描系统,其特征在于,所述第一转动电机的电机轴沿y轴方向设置,其电机轴与第一穿设杆固连,所述第一穿设杆穿设在样品台内且与所述样品台固定连接;随着所述第一转动电机的动作带动所述样品台沿y轴转动;所述第二转动电机的电机轴沿x轴方向设置,其电机轴与第二穿设杆固连,所述第二穿设杆穿设在所述样品台内且与所述样品台固定连接,随着所述第二转动电机的动作带动所述样品台沿x轴转动;所述第一转动电机和所述第二转动电机均与所述z轴滑块固定连接,保证第一转动电机和第二转动电机的位置相对于z轴移动组件是固定的。
- 根据权利要求7所述的超快大尺寸扫描系统,其特征在于,所述样品台为方形,且所述样品台的底部与L形的z轴固定座的底板上表面之间具有特定距离的间隙,所述间隙为所述样品台的转动提供空间并限定转动范围。
- 一种超快大尺寸扫描方法,其特征在于,所述方法采用权利要求1-8任一所述的超快大尺寸扫描系统实现;所述方法的步骤包括:S1、将待测样品放置在样品台上,并通过运动控制组件对样品台的位置进行x、y、z三轴向的调整,使其处于相对合适的位置;S2、控制处理单元根据接收的高度传感器的检测信号,判断待测样品表面是否处于聚焦的最佳高度,并通过控制运动控制组件对样品台高度进行调整,实现物镜能够聚焦于样品表面;S3、控制处理单元控制运动控制组件,对待测样品表面进行自动调平;S4、控制处理单元再次控制运动控制组件调整待测样品表面的高度,进行自动聚焦,以保证最终图像均匀清晰;S5、开始扫描:样品台在运动控制组件的带动下按特定速度、特定路径进行水平向移动,将待测样品表面的不同扫描区域持续移动到物镜下方,从而实现对大尺寸样品的连续自动扫描。
- 根据权利要求9所述的超快大尺寸扫描方法,其特征在于,步骤S5的内容还包括:扫描过程中由光强传感器实时检测待测样品表面的反射率,并根据检测的数据同步调节光源组件的强度,以保证采集后的图像信号颜 色均匀。
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