WO2024050881A1 - 一种导向装置 - Google Patents

一种导向装置 Download PDF

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Publication number
WO2024050881A1
WO2024050881A1 PCT/CN2022/121101 CN2022121101W WO2024050881A1 WO 2024050881 A1 WO2024050881 A1 WO 2024050881A1 CN 2022121101 W CN2022121101 W CN 2022121101W WO 2024050881 A1 WO2024050881 A1 WO 2024050881A1
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WO
WIPO (PCT)
Prior art keywords
hook
accelerator
guide device
rod
groove
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PCT/CN2022/121101
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English (en)
French (fr)
Inventor
杜雷
关云明
杨晶峰
Original Assignee
台湾积体电路制造股份有限公司
台积电(中国)有限公司
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Application filed by 台湾积体电路制造股份有限公司, 台积电(中国)有限公司 filed Critical 台湾积体电路制造股份有限公司
Publication of WO2024050881A1 publication Critical patent/WO2024050881A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00

Definitions

  • the present application belongs to the field of semiconductor manufacturing technology, and particularly relates to a guide device.
  • the ion implanter is the main equipment for doping and consists of an accelerator, an ion source, an ion introduction and mass analyzer, a scanning system and a process chamber.
  • the accelerator can only be disassembled and assembled manually due to the small working space.
  • the accelerator is heavy and contains fragile parts such as graphite, which is time-consuming and labor-intensive to install and seriously affects the installation efficiency.
  • Embodiments of the present application provide a guide device that can quickly guide an accelerator into an ion implanter.
  • An embodiment of the present application provides a guide device for introducing an accelerator into an ion implanter.
  • the guide device includes: a guide plate, including a load-bearing surface and a back surface arranged along its thickness direction, a receiving groove with an opening located on the load-bearing surface; A connection surface that connects the load-bearing surface and the back surface.
  • the load-bearing surface extends along a preset trajectory and is used to carry the accelerator so that the accelerator can move along the preset trajectory.
  • the connection surface is located at one end of the preset trajectory; a connection mechanism is connected to the connection surface and consists of The connecting surface protrudes, and the connecting mechanism is used to connect with the ion implanter; the sliding mechanism is installed in the receiving groove.
  • the sliding mechanism includes at least one rolling rod. The rolling rod extends in a direction that intersects with the preset trajectory and is rotatably connected to the guide plate. , the scroll bar is used to guide the accelerator movement.
  • At least part of the rolling rod protrudes from the opening of the receiving groove to the bearing surface.
  • the receiving groove penetrates the bearing surface and the back surface.
  • the preset trajectory is V-shaped
  • the guide plate includes a first segment and a second segment that are intersected and connected along the preset trajectory, and the first surface of the first segment and the second segment The second surface is connected at an acute angle.
  • guardrails are provided on the first surface and/or the second surface, and the guardrails protrude from the bearing surface.
  • a handle is provided on the second surface.
  • the receiving groove includes a first groove located in the first section and a second groove located in the second section, and the first groove and the second groove are connected.
  • rolling rods are provided in both the first groove and the second groove, and a plurality of rolling rods are arranged at intervals along a preset trajectory.
  • the connecting mechanism includes: a first hook, including a first hook head and a first hook rod.
  • the first hook rod is connected to the connecting surface and extends from the connecting surface.
  • the first hook head and the first hook rod are connected to the connecting surface.
  • a hook rod is connected at one end away from the connection surface, and the first hook head is bent toward the first surface, and the first hook head is used to connect with the ion implanter.
  • the connecting mechanism further includes: a second hook, including a second hook head and a second hook rod.
  • the second hook rod is connected to the connecting surface and extends from the connecting surface.
  • the second hook head is connected to the connecting surface.
  • the second hook rod is connected at one end away from the connection surface, and the second hook head is bent toward the first surface.
  • the second hook head is used to connect to the ion implanter; the distance between the second hook and the first surface is smaller than the distance between the first hook and the first surface.
  • the distance between the first surface and the width of the second hook rod is greater than the width of the first hook rod; the angle between the extension direction of the first hook rod and the second hook rod and the connecting surface is 5°-15°.
  • the guide device of the embodiment of the present application connects the guide plate to the ion implanter through a connecting mechanism.
  • the guide plate avoids damage caused by the accelerator falling and injures the operator, thereby improving the safety of personnel operation; by connecting the connecting mechanism to the preset trajectory On the connection surface at one end, the connection surface faces the ion implanter. After the accelerator moves along the preset trajectory, it is finally connected to the ion implanter. There is no need to manually adjust the movement direction of the accelerator, saving labor costs; the accelerator is carried by the bearing surface on the guide plate, and The rolling rod of the sliding mechanism guides the accelerator to move along the preset trajectory, and finally introduces the accelerator into the ion implanter, which greatly improves the efficiency and success rate of installing the accelerator.
  • Figure 1 is a schematic top structural view of a guide device, an accelerator and an ion implanter according to some embodiments of the present application;
  • Figure 2 shows an exemplary cross-sectional structural diagram of the guide device, accelerator and ion implanter in Figure 1 at section A-A;
  • FIG. 3 shows an exemplary top structural diagram of the guide device in FIG. 1 .
  • the accelerator is heavy (about 15 kilograms) and contains fragile parts such as graphite, which is time-consuming and laborious to install and seriously affects the installation efficiency.
  • the guide device includes: a guide plate, including a load-bearing surface and a back surface arranged along its thickness direction, a receiving groove with an opening located on the load-bearing surface, and a guide plate connecting the load-bearing surface and the back surface.
  • the connection surface on the back, the load-bearing surface extends along the preset trajectory and is used to carry the accelerator so that the accelerator can move along the preset trajectory.
  • the connection surface is located at one end of the preset trajectory; the connection mechanism is connected to the connection surface and extends from the connection surface.
  • the connection mechanism is used to connect with the ion implanter; the sliding mechanism is installed in the receiving tank.
  • the sliding mechanism includes at least one rolling rod. The rolling rod extends in the direction that intersects the preset trajectory and is rotatably connected to the guide plate. The rolling rod is used To guide accelerator movement.
  • the guide device connects the guide plate to the ion implanter through a connecting mechanism.
  • the guide plate avoids damage caused by the accelerator falling and injures the operator, and improves operator safety; by connecting the connecting mechanism to one end of the preset trajectory On the connection surface, the connection surface faces the ion implanter. After the accelerator moves along the preset trajectory, it is finally connected to the ion implanter. There is no need for manual labor to control the movement direction of the accelerator, saving labor costs; the accelerator is carried through the bearing surface on the guide plate and passed through The rolling rod of the sliding mechanism guides the accelerator to move along the preset trajectory, and finally introduces the accelerator into the ion implanter, which greatly improves the efficiency and success rate of installing the accelerator.
  • embodiments of the present application provide a guide device.
  • the guide device provided by the embodiment of the present application is introduced below.
  • the x direction is set as the preset trajectory direction.
  • Figure 1 is a top structural schematic diagram of the guide device, accelerator and ion implanter in some embodiments of the present application;
  • Figure 2 shows an example of the guide device, accelerator and ion implanter in Figure 1.
  • the guide device 10 is used to guide the accelerator 20 into the ion implanter 30.
  • the ion implanter 30 is provided with a mounting port 31 for accommodating the accelerator 20. There is an obstacle on one side outside the mounting port 31. (not shown), so that when installing the accelerator 20, the worker's operating space is narrow.
  • the guide device 10 includes: a guide plate 11 , a connecting mechanism 12 and a sliding mechanism 13 .
  • the guide plate 11 includes a bearing surface 111 , a back surface 112 , a connecting surface 113 and a receiving groove 114 whose opening is located on the bearing surface 111 .
  • the bearing surface 111 and the back surface 112 are arranged along the thickness direction of the guide plate 11 .
  • the bearing surface 111 is extended along a preset trajectory (x direction in the figure) and is used to carry the accelerator 20 so that the accelerator 20 can move along the preset trajectory (x direction in the figure).
  • the connection surface 113 is located at one end of the preset trajectory (x direction in the figure), and the connection surface 113 connects the bearing surface 111 and the back surface 112 .
  • the connecting mechanism 12 is connected to the connecting surface 113 and extends from the connecting surface 113 .
  • the connecting mechanism 12 is used to connect to the ion implanter 30 .
  • the sliding mechanism 13 is installed in the receiving groove 114.
  • the sliding mechanism 13 includes at least one rolling rod 131.
  • the rolling rod 131 is extended in a direction intersecting the preset trajectory (x direction in the figure) and is rotatably connected to the guide plate 11.
  • the rolling rod 131 131 is used to guide the accelerator 20 to move.
  • the guide device 10 connects the guide plate 11 to the ion implanter 30 through the connecting mechanism 12.
  • the guide plate 11 avoids damage caused by the accelerator 20 falling and injures the operator, thereby improving the operator's operational safety; by using
  • the connection mechanism 12 is connected to the connection surface 113 at one end of the preset trajectory (x direction in the figure), and the connection surface 113 faces the ion implanter 30, so that the accelerator 20 moves along the preset trajectory (x direction in the figure) and finally connects with the ions.
  • the injection machine 30 is connected, eliminating the need for manual effort to regulate the movement direction of the accelerator 20, saving labor costs; the accelerator 20 is carried through the bearing surface 111 on the guide plate 11, and the accelerator 20 is guided along the preset trajectory through the rolling rod 131 of the sliding mechanism 13 (in the figure (x direction), and finally the accelerator 20 is introduced into the ion implanter 30, which greatly improves the efficiency and success rate of installing the accelerator 20.
  • the preset trajectory (x direction in the figure) is V-shaped
  • the guide plate 11 includes a first segment 115 and a second segment that are intersectingly connected along the preset trajectory (x direction in the figure).
  • Segment 116, the first surface 1151 of the first segment 115 and the second surface 1161 of the second segment 116 are connected at an acute angle.
  • the guide device 10 provided in this embodiment makes the guide plate 11 avoid the outside of the installation opening 31 by intersecting the first segment 115 and the second segment 116 along a V-shaped preset trajectory (x direction in the figure). Obstacles on one side make reasonable use of the limited working space to install the guide device 10.
  • FIG. 3 shows an exemplary top structural diagram of the guide device in FIG. 1 .
  • the ion implanter 30 may also be provided with at least one installation groove 32 , and the installation groove 32 is provided with a limiting post 321 .
  • the connecting mechanism 12 includes a first hook 121 , and the first hook 121 includes a first hook head 1211 and a first hook rod 1212 .
  • the first hook rod 1212 is connected to the connecting surface 113 and extends from the connecting surface 113 .
  • the first hook head 1211 is connected to an end of the first hook rod 1212 away from the connecting surface 113 .
  • the first hook head 1211 is bent toward the first surface 1151 , and the first hook head 1211 is used to connect to the ion implanter 30 .
  • the first hook head 1211 When connecting the guide device 10 to the ion implanter 30, extend the first hook 121 into the installation groove 32, the first hook head 1211 bypasses the limiting post 321 and then hooks the limiting post to prevent the first hook 121 from being removed from the installation groove. Prolapse within 32 seconds.
  • the guide device 10 provided in this embodiment uses the first hook head 1211 that is bent toward the first surface 1151, so that when the guide device 10 is installed on the ion implanter 30, it moves toward the first surface 1151 side and hooks the limiting column. 321, avoiding obstacles on the outside side of the installation opening 31, and rationally utilizing the limited working space to install the guide device 10.
  • connection mechanism 12 may also include second hooks 122 , and the number of the installation slots 32 is equal to the number of hooks in the connection mechanism 12 and corresponds one to one.
  • the second hook 122 includes a second hook head 1221 and a second hook rod 1222 .
  • the second hook rod 1222 is connected to the connecting surface 113 and extends from the connecting surface 113.
  • the second hook head 1221 is connected to an end of the second hook rod 1222 away from the connecting surface 113.
  • the second hook head 1221 is bent toward the first surface 1151 , and the second hook head 1221 is used to connect with the ion implanter 30 .
  • the distance between the second hook 122 and the first surface 1151 is less than the distance between the first hook 121 and the first surface 1151
  • the width of the second hook 122 is greater than the width of the first hook 121 .
  • the guide device 10 provided in this embodiment is designed to have a smaller width of the first hook 121 away from the first surface 1151, so that when the guide device 10 is installed on the ion implanter 30, the first hook 121 and the outside of the installation port 31 can be avoided. If obstacles interfere, the limited working space should be rationally utilized to install the guide device 10 .
  • the included angle between the first hook rod 1212, the second hook rod 1222 and the connecting surface 113 is 5°-15°.
  • the guide device 10 provided in this embodiment allows the accelerator 20 to slide toward the ion implanter 30 more easily by making the bearing surface 111 slightly inclined to form an angle with the horizontal plane.
  • first hook rod 1212, the second hook rod 1222 and the connecting surface 113 can also be connected vertically, and the mounting groove 32 is set to be inclined to the horizontal plane, which can also make the bearing surface 111 slightly inclined. on the horizontal plane.
  • guardrails 14 are provided on the first surface 1151 and/or the second surface 1161 , and the guardrails 14 protrude from the bearing surface 111 .
  • the guide device 10 provided in this embodiment uses the guardrail 14 protruding from the bearing surface 111 to prevent the accelerator 20 from rolling over on the bearing surface 111 and injuring the operator or damaging the equipment when guiding the accelerator 20 into the ion implanter 30 .
  • the guardrail 14 is only provided on the first surface 1151 and the second surface 1161 side because there are obstacles on the outside side of the installation opening 31. Due to the interference of the obstacles, the accelerator 20 will not roll over from the obstacle side.
  • a handle 15 is also provided on the second surface 1161 .
  • the guide device 10 provided in this embodiment uses the handle 15 to facilitate operator operation when the guide device 10 is installed on the ion implanter 30 .
  • At least part of the rolling rod 131 protrudes from the opening of the receiving groove 114 and extends out of the bearing surface 111 .
  • the guide device 10 provided in this embodiment partially extends the rolling rod 131 of the accommodating groove 114, so that the accelerator 20 contacts the rolling rod 131 when moving on the guide plate 11, thereby reducing the friction force when the accelerator 20 moves.
  • the receiving groove 114 runs through the bearing surface 111 and the back surface 112 .
  • the guide device 10 provided in this embodiment has a receiving groove 114 that penetrates the bearing surface 111 and the back surface 112, which not only reduces the weight of the guide plate 11, but also prevents dust accumulation in the receiving groove 114 from being difficult to clean.
  • the receiving groove 114 includes a first groove 1141 located in the first section 115 and a second groove 1142 located in the second section 116, and the first groove 1141 and the second groove 1142 are connected.
  • rolling rods 131 are provided in both the first groove 1141 and the second groove 1142, and multiple rolling rods 131 are arranged at intervals along a preset trajectory (x direction in the figure).
  • the guide device 10 uses the first groove 1141, the second groove 1142 and a plurality of rolling rods 131 spaced along the preset trajectory (x direction in the figure), so that the accelerator 20 can move from the second segment 116 Moving to the first segment 115 with the help of the rolling rod 131 greatly improves the efficiency and success rate of installing the accelerator 20 .
  • the guide plate 11, the connecting mechanism 12, the sliding mechanism 13 and the guardrail 14 are all made of high-strength stainless steel.
  • the guide plate 11 and the connecting mechanism 12 can be connected by welding or integrally cut from a steel plate.
  • the guide plate 11 is connected to the guardrail 14 by welding.
  • the handle 15 can be made of stainless steel or plastic. When the handle 15 is made of stainless steel, the handle 15 and the guide plate 11 can be connected by welding. When the handle 15 is made of plastic, the handle 15 and the guide plate 11 can be connected by bolts.
  • the guide device 10 connects the guide plate 11 to the ion implanter 30 through the connecting mechanism 12.
  • the guide plate 11 avoids damage caused by the accelerator 20 falling and injures the operator, thereby improving the operator's operational safety; by using
  • the connection mechanism 12 is connected to the connection surface 113 at one end of the preset trajectory (x direction in the figure), and the connection surface 113 faces the ion implanter 30, so that the accelerator 20 moves along the preset trajectory (x direction in the figure) and finally connects with the ions.
  • the injection machine 30 is connected, eliminating the need for manual effort to regulate the movement direction of the accelerator 20, saving labor costs; the accelerator 20 is carried through the bearing surface 111 on the guide plate 11, and the accelerator 20 is guided along the preset trajectory through the rolling rod 131 of the sliding mechanism 13 (in the figure (x direction), and finally the accelerator 20 is introduced into the ion implanter 30, which greatly improves the efficiency and success rate of installing the accelerator 20.

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Abstract

本申请公开一种导向装置，用于将加速器导入离子注入机，其特征在于，导向装置包括：引导板，包括沿其厚度方向设置的承载面和背面、开口位于承载面的容纳槽及连接承载面和背面的连接面，承载面沿预设轨迹延伸成型并用于承载加速器，以使加速器能够沿预设轨迹移动，连接面位于预设轨迹的一端；连接机构，连接于连接面并由连接面伸出，连接机构用于与离子注入机连接；滑动机构，安装于容纳槽，滑动机构包括至少一个滚动杆，滚动杆沿与预设轨迹相交的方向延伸成型并与引导板可转动连接，滚动杆用于引导加速器移动。本申请公开的导向装置，提高人员操作安全性的同时，大大提高了安装加速器的效率及成功率。

Description

一种导向装置
相关申请的交叉引用
本申请要求享有于2022年9月5日提交的名称为“一种导向装置”的中国专利申请202222352310.2的优先权，该申请的全部内容通过引用并入本文中。
技术领域
本申请属于半导体制造技术领域，尤其涉及一种导向装置。
背景技术
在半导体晶圆制造中，由于纯净硅的导电性能很差，需要加入少量杂质使其结构和电导率发生改变，从而变成一种有用的半导体，这个过程称为掺杂。离子注入机是掺杂的主要设备，由加速器、离子源、离子引入和质量分析器、扫描系统和工艺腔等部件组成。
在离子注入机的保养期间，有许多部件需要拆除、维护和重新安装，其中加速器由于作业空间小，只能采用人工拆装的方式。但加速器重量较大，又含有石墨等脆弱易碎的部分，在安装时费时费力，严重影响安装效率。
发明内容
本申请实施例提供一种导向装置，能够将加速器快速导入离子注入机。
本申请实施例提供一种导向装置，用于将加速器导入离子注入机，其特征在于，导向装置包括：引导板，包括沿其厚度方向设置的承载面和背面、开口位于承载面的容纳槽及连接承载面和背面的连接面，承载面沿预设轨迹延伸成型并用于承载加速器，以使加速器能够沿预设轨迹移动，连接面位于预设轨迹的一端；连接机构，连接于连接面并由连接面伸出，连 接机构用于与离子注入机连接；滑动机构，安装于容纳槽，滑动机构包括至少一个滚动杆，滚动杆沿与预设轨迹相交的方向延伸成型并与引导板可转动连接，滚动杆用于引导加速器移动。
根据本申请第一方面的实施方式，至少部分滚动杆从容纳槽的开口伸出承载面。
根据本申请第一方面的实施方式，容纳槽贯穿承载面与背面。
根据本申请第一方面的实施方式，预设轨迹呈V形，引导板包括沿预设轨迹相交连接的第一分段和第二分段，第一分段的第一表面和第二分段的第二表面呈锐角连接。
根据本申请第一方面的实施方式，第一表面和/或第二表面上设置有护栏，护栏凸出于承载面。
根据本申请第一方面的实施方式，第二表面上设置有把手。
根据本申请第一方面的实施方式，容纳槽包括位于第一分段的第一槽和位于第二分段的第二槽，第一槽和第二槽连通。
根据本申请第一方面的实施方式，第一槽与第二槽内均设有滚动杆，多个滚动杆沿预设轨迹间隔设置。
根据本申请第一方面的实施方式，连接机构包括：第一挂钩，包括第一挂钩头和第一挂钩杆，第一挂钩杆连接于连接面并由连接面伸出，第一挂钩头与第一挂钩杆远离连接面的一端连接，第一挂钩头朝第一表面的方向弯折，第一挂钩头用于与离子注入机连接。
根据本申请第一方面的实施方式，连接机构还包括：第二挂钩，包括第二挂钩头和第二挂钩杆，第二挂钩杆连接于连接面并由连接面伸出，第二挂钩头与第二挂钩杆远离连接面的一端连接，第二挂钩头朝第一表面的方向弯折，第二挂钩头用于与离子注入机连接；第二挂钩与第一表面的距离小于第一挂钩与第一表面的距离，第二挂钩杆的宽度大于第一挂钩杆的宽度；第一挂钩杆、第二挂钩杆的延伸方向与连接面之间的夹角为5°-15°。
本申请实施例的导向装置，通过连接机构将引导板连接在离子注入机上，引导板避免了加速器掉落造成损坏以及砸伤操作人员，提高人员操作 安全性；通过使连接机构连接于预设轨迹一端的连接面上，连接面朝向离子注入机，加速器沿预设轨迹移动后最终与离子注入机相连，无需人工费力调控加速器运动方位，节约人力成本；通过引导板上的承载面承载加速器，并通过滑动机构的滚动杆引导加速器沿预设轨迹移动，最终将加速器导入离子注入机，大大提高了安装加速器的效率及成功率。
附图说明
从下面结合附图对本申请的具体实施方式的描述中可以更好地理解本申请，其中，通过阅读以下参照附图对非限制性实施例所作的详细描述，本申请的其它特征、目的和优点将会变得更明显，相同或相似的附图标记表示相同或相似的特征。
图1为本申请一些实施例的导向装置、加速器和离子注入机的俯视结构示意图；
图2示出一种示例的图1中导向装置、加速器和离子注入机在A-A截面的的剖视结构示意图；
图3示出一种示例的图1中导向装置的俯视结构示意图。
附图标记：
10、导向装置；11、引导板；111、承载面；112、背面；113、连接面；114、容纳槽；1141、第一槽；1142、第二槽；115、第一分段；1151、第一表面；116、第二分段；1161、第二表面；12、连接机构；121、第一挂钩；1211、第一挂钩头；1212、第一挂钩杆；122、第二挂钩；1221、第二挂钩头；1222、第二挂钩杆；13、滑动机构；131、滚动杆；14、护栏；15、把手；
20、加速器；
30、离子注入机；31、安装口；32、安装槽；321、限位柱。
具体实施方式
下面结合附图和实施例对本申请的实施方式作进一步详细描述。以下 实施例的详细描述和附图用于示例性地说明本申请的原理，但不能用来限制本申请的范围，即本申请不限于所描述的实施例。
在本申请的描述中，需要说明的是，除非另有说明，“多个”的含义是两个以上；术语“上”、“下”、“左”、“右”、“内”、“外”等指示的方位或位置关系仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性。“垂直”并不是严格意义上的垂直，而是在误差允许范围之内。“平行”并不是严格意义上的平行，而是在误差允许范围之内。
下述描述中出现的方位词均为图中示出的方向，并不是对本申请的具体结构进行限定。在本申请的描述中，还需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是直接相连，也可以通过中间媒介间接相连。对于本领域的普通技术人员而言，可视具体情况理解上述术语在本申请中的具体含义。
申请人发现在现有技术中，将加速器安装进离子注入机时，由于作业空间小，只能采用人工拆装的方式。但加速器重量较大(大约15公斤)，又含有石墨等脆弱易碎的部分，在安装时费时费力，严重影响安装效率。
鉴于上述问题，申请人提出导向装置，用于将加速器导入离子注入机，导向装置包括：引导板，包括沿其厚度方向设置的承载面和背面、开口位于承载面的容纳槽及连接承载面和背面的连接面，承载面沿预设轨迹延伸成型并用于承载加速器，以使加速器能够沿预设轨迹移动，连接面位于预设轨迹的一端；连接机构，连接于连接面并由连接面伸出，连接机构用于与离子注入机连接；滑动机构，安装于容纳槽，滑动机构包括至少一个滚动杆，滚动杆沿与预设轨迹相交的方向延伸成型并与引导板可转动连接，滚动杆用于引导加速器移动。
本申请提供的导向装置，通过连接机构将引导板连接在离子注入机上，引导板避免了加速器掉落造成损坏以及砸伤操作人员，提高人员操作安全 性；通过使连接机构连接于预设轨迹一端的连接面上，连接面朝向离子注入机，加速器沿预设轨迹移动后最终与离子注入机相连，无需人工费力调控加速器运动方位，节约人力成本；通过引导板上的承载面承载加速器，并通过滑动机构的滚动杆引导加速器沿预设轨迹移动，最终将加速器导入离子注入机，大大提高了安装加速器的效率及成功率。
请参考图1至图3，为了解决现有技术问题，本申请实施例提供了一种导向装置。下面对本申请实施例所提供的导向装置进行介绍。在本实施例中，将x方向定为预设轨迹方向。
请参考图1和图2，图1为本申请一些实施例的导向装置、加速器和离子注入机的俯视结构示意图；图2示出一种示例的图1中导向装置、加速器和离子注入机在A-A截面的的剖视结构示意图。
如图1和图2所示，导向装置10用于将加速器20导入离子注入机30，离子注入机30上设有安装口31，用于容纳加速器20，安装口31外部的一侧有障碍物(未图示)，使得在安装加速器20时，工人的操作空间狭小。导向装置10包括：引导板11、连接机构12和滑动机构13。引导板11包括承载面111、背面112、连接面113和开口位于承载面111的容纳槽114，承载面111和背面112沿引导板11的厚度方向设置。承载面111沿预设轨迹(图中的x方向)延伸成型并用于承载加速器20，以使加速器20能够沿预设轨迹(图中的x方向)移动。连接面113位于预设轨迹(图中的x方向)的一端，连接面113连接承载面111和背面112。连接机构12连接于连接面113并由连接面113伸出，连接机构12用于与离子注入机30连接。滑动机构13安装于容纳槽114，滑动机构13包括至少一个滚动杆131，滚动杆131沿与预设轨迹(图中的x方向)相交的方向延伸成型并与引导板11可转动连接，滚动杆131用于引导加速器20移动。
本实施例提供的导向装置10，通过连接机构12将引导板11连接在离子注入机30上，引导板11避免了加速器20掉落造成损坏以及砸伤操作人员，提高人员操作安全性；通过使连接机构12连接于预设轨迹(图中的x方向)一端的连接面113上，连接面113朝向离子注入机30，使得加速器20沿预设轨迹(图中的x方向)移动后最终与离子注入机30相连，无需人 工费力调控加速器20运动方位，节约人力成本；通过引导板11上的承载面111承载加速器20，并通过滑动机构13的滚动杆131引导加速器20沿预设轨迹(图中的x方向)移动，最终将加速器20导入离子注入机30，大大提高了安装加速器20的效率及成功率。
在一些可选的实施例中，预设轨迹(图中的x方向)呈V形，引导板11包括沿预设轨迹(图中的x方向)相交连接的第一分段115和第二分段116，第一分段115的第一表面1151和第二分段116的第二表面1161呈锐角连接。
本实施例提供的导向装置10，通过沿V形的预设轨迹(图中的x方向)相交连接的第一分段115和第二分段116，使得引导板11避开了安装口31外部一侧的障碍物，合理利用有限的作业空间来安装导向装置10。
请参考图2和图3，图3示出一种示例的图1中导向装置的俯视结构示意图。
如图2和图3所示，在一些可选的实施例中，离子注入机30上还可以设有至少一个安装槽32，安装槽32内设有限位柱321。连接机构12包括第一挂钩121，第一挂钩121包括第一挂钩头1211和第一挂钩杆1212。第一挂钩杆1212连接于连接面113并由连接面113伸出，第一挂钩头1211与第一挂钩杆1212远离连接面113的一端连接。第一挂钩头1211朝第一表面1151的方向弯折，第一挂钩头1211用于与离子注入机30相连。
在将导向装置10与离子注入机30连接时，将第一挂钩121伸入安装槽32内，第一挂钩头1211绕过限位柱321后钩住限位柱防止第一挂钩121从安装槽32内脱出。
本实施例提供的导向装置10，通过朝向第一表面1151弯折的第一挂钩头1211，使得将导向装置10安装在离子注入机30时向第一表面1151一侧移动并挂住限位柱321，避开了安装口31外部一侧的障碍物，合理利用有限的作业空间来安装导向装置10。
在一些可选的实施例中，连接机构12还可以包括第二挂钩122，安装槽32的数量与连接机构12中挂钩的数量相等且一一对应。第二挂钩122包括第二挂钩头1221和第二挂钩杆1222。第二挂钩杆1222连接于连接面 113并由连接面113伸出，第二挂钩头1221与第二挂钩杆1222远离连接面113的一端连接。第二挂钩头1221朝第一表面1151的方向弯折，第二挂钩头1221用于与离子注入机30相连。第二挂钩122与第一表面1151的距离小于第一挂钩121与第一表面1151的距离，第二挂钩122的宽度大于第一挂钩121的宽度。
本实施例提供的导向装置10，通过将远离第一表面1151的第一挂钩121宽度设计的更小，使得将导向装置10安装在离子注入机30时避免第一挂钩121与安装口31外部的障碍物出现干涉，合理利用有限的作业空间来安装导向装置10。
在一些可选的实施例中，第一挂钩杆1212、第二挂钩杆1222与连接面113之间的夹角为5°-15°。
本实施例提供的导向装置10，通过使承载面111稍稍倾斜与水平面形成夹角，使加速器20能更轻松的滑向离子注入机30。
在一些可选的实施例中，第一挂钩杆1212、第二挂钩杆1222与连接面113之间也可以垂直连接，而将安装槽32设置为与水平面倾斜，同样能使承载面111稍稍倾斜于水平面。
在一些可选的实施例中，第一表面1151和/或第二表面1161上设置有护栏14，护栏14凸出于承载面111。
本实施例提供的导向装置10，通过凸出承载面111的护栏14，使得将加速器20引导入离子注入机30时，避免加速器20在承载面111上侧翻砸伤操作人员或损坏设备。而只在第一表面1151、第二表面1161一侧设置护栏14，是由于安装口31外部一侧有障碍物，由于障碍物的干涉作用，加速器20不会从障碍物一侧侧翻。
在一些可选的实施例中，第二表面1161上还设置有把手15。
本实施例提供的导向装置10，通过把手15使得将导向装置10安装在离子注入机30时便于人员操作。
在一些可选的实施例中，至少部分滚动杆131从容纳槽114的开口伸出伸出承载面111。
本实施例提供的导向装置10，通过部分伸出容纳槽114的滚动杆131，使得加速器20在引导板11上移动时是与滚动杆131接触，降低加速器20移动时的摩擦力。
在一些可选的实施例中，容纳槽114贯穿承载面111与背面112。
本实施例提供的导向装置10，通过贯穿承载面111、背面112的容纳槽114，既降低引导板11的重量，也避免容纳槽114积灰后难清理。
在一些可选的实施例中，容纳槽114包括位于第一分段115的第一槽1141和位于第二分段116的第二槽1142，第一槽1141和第二槽1142连通。
在一些可选的实施例中，第一槽1141和第二槽1142内均设有滚动杆131，多个滚动杆131沿预设轨迹(图中的x方向)间隔设置。
本实施例提供的导向装置10，通过第一槽1141、第二槽1142以及多个沿预设轨迹(图中的x方向)间隔设置的滚动杆131，使得加速器20可以从第二分段116一直借助滚动杆131移动到第一分段115，大大提高了安装加速器20的效率以及成功率。
在一些可选的实施例中，引导板11、连接机构12、滑动机构13和护栏14均为高强度不锈钢制成，引导板11与连接机构12可通过焊接相连或钢板一体切割成型，引导板11与护栏14通过焊接相连。把手15既可以为不锈钢材质，也可以为塑料材质。当把手15为不锈钢材质时，把手15与引导板11可通过焊接相连，当把手15为塑料材质时，把手15与引导板11可通过螺栓连接。
本实施例提供的导向装置10，通过连接机构12将引导板11连接在离子注入机30上，引导板11避免了加速器20掉落造成损坏以及砸伤操作人员，提高人员操作安全性；通过使连接机构12连接于预设轨迹(图中的x方向)一端的连接面113上，连接面113朝向离子注入机30，使得加速器20沿预设轨迹(图中的x方向)移动后最终与离子注入机30相连，无需人工费力调控加速器20运动方位，节约人力成本；通过引导板11上的承载面111承载加速器20，并通过滑动机构13的滚动杆131引导加速器20沿预设轨迹(图中的x方向)移动，最终将加速器20导入离子注入机30，大大提高了安装加速器20的效率及成功率。
以上所述，仅为本申请的具体实施方式，所属领域的技术人员可以清楚地了解到，为了描述的方便和简洁，上述描述的系统、模块和单元的具体工作过程，可以参考前述方法实施例中的对应过程，在此不再赘述。应理解，本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，可轻易想到各种等效的修改或替换，这些修改或替换都应涵盖在本申请的保护范围之内。

Claims (10)

  1. 一种导向装置，用于将加速器导入离子注入机，所述导向装置包括：
    引导板，包括沿其厚度方向设置的承载面和背面、开口位于所述承载面的容纳槽及连接所述承载面和所述背面的连接面，所述承载面沿预设轨迹延伸成型并用于承载所述加速器，以使所述加速器能够沿所述预设轨迹移动，所述连接面位于所述预设轨迹的一端；
    连接机构，连接于所述连接面并由所述连接面伸出，所述连接机构用于与所述离子注入机连接；
    滑动机构，安装于所述容纳槽，所述滑动机构包括至少一个滚动杆，所述滚动杆沿与预设轨迹相交的方向延伸成型并与所述引导板可转动连接，所述滚动杆用于引导所述加速器移动。
  2. 根据权利要求1所述的导向装置，其中，至少部分所述滚动杆从所述容纳槽的开口伸出所述承载面。
  3. 根据权利要求1所述的导向装置，其中，所述容纳槽贯穿所述承载面与所述背面。
  4. 根据权利要求1所述的导向装置，其中，所述预设轨迹呈V形，所述引导板包括沿所述预设轨迹相交连接的第一分段和第二分段，所述第一分段的第一表面和所述第二分段的第二表面呈锐角连接。
  5. 根据权利要求4所述的导向装置，其中，所述第一表面和/或所述第二表面上设置有护栏，所述护栏凸出于所述承载面。
  6. 根据权利要求4所述的导向装置，其中，所述第二表面上设置有把手。
  7. 根据权利要求4所述的导向装置，其中，所述容纳槽包括位于所述第一分段的第一槽和位于所述第二分段的第二槽，所述第一槽和所述第二槽连通。
  8. 根据权利要求7所述的导向装置，其中，所述第一槽与所述第二槽内均设有所述滚动杆，多个所述滚动杆沿预设轨迹间隔设置。
  9. 根据权利要求4所述的导向装置，其中，所述连接机构包括：
    第一挂钩，包括第一挂钩头和第一挂钩杆，所述第一挂钩杆连接于所述连接面并由所述连接面伸出，所述第一挂钩头与所述第一挂钩杆远离所述连接面的一端连接，所述第一挂钩头朝所述第一表面的方向弯折，所述第一挂钩头用于与所述离子注入机连接。
  10. 根据权利要求9所述的导向装置，其中，所述连接机构还包括：
    第二挂钩，包括第二挂钩头和第二挂钩杆，所述第二挂钩杆连接于所述连接面并由所述连接面伸出，所述第二挂钩头与所述第二挂钩杆远离所述连接面的一端连接，所述第二挂钩头朝所述第一表面的方向弯折，所述第二挂钩头用于与所述离子注入机连接；所述第二挂钩与所述第一表面的距离小于所述第一挂钩与所述第一表面的距离，所述第二挂钩杆的宽度大于所述第一挂钩杆的宽度；所述第一挂钩杆、所述第二挂钩杆的延伸方向与所述连接面之间的夹角为5°-15°。
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