WO2024021227A1

WO2024021227A1 - Straight-turning emlsoa chip bar test machine and inspection method

Info

Publication number: WO2024021227A1
Application number: PCT/CN2022/117307
Authority: WO
Inventors: 伊克木·伊力夏提; 徐虎子; 孙家琛; 祁佩恩; 杨宁
Original assignee: 河北圣昊光电科技有限公司
Priority date: 2022-07-29
Filing date: 2022-09-06
Publication date: 2024-02-01
Also published as: CN115579301A; CN115579301B

Abstract

A straight-turning EMLSOA chip bar test machine and an inspection method, which belong to the technical field of semiconductor inspection. The test machine comprises a feeding mechanism, a test table (2), a first moving mechanism (6), a positioning mechanism and a discharging mechanism, and further comprises an inspection mechanism (8), wherein the inspection mechanism (8) comprises a probe assembly and an optical signal receiving unit (9), the probe assembly is provided with a perforating probe (15) and an inspection probe (13), and the optical signal receiving unit (9) is suitable for receiving an optical signal, which is emitted from a light-emitting point of a chip after the inspection probe (13) supplies power to the chip. In the straight-turning EMLSOA chip bar test machine, an inspection mechanism (8) is provided with a perforating probe (15) and an inspection probe (13); after the inspection probe (13) supplies power to a chip, an optical signal emitted from the chip is received by an optical signal receiving unit (9) and inspection is performed; and if the chip is inspected to be unacceptable, the perforating probe (15) perforates and marks the chip, such that the chip can be picked out during a subsequent chip splitting process, thereby avoiding repeated inspection of unacceptable chips and an increase in the time for repeated inspection.

Description

Straight turning EMLSOA chip bar testing machine and detection method

Cross-references to related applications

This application requires the priority of the Chinese patent application submitted to the China Patent Office on July 29, 2022, with the application number 202210914529.9 and the invention name "Straight Turning EMLSOA Chip Bar Testing Machine and Detection Method", and all its contents have been approved This reference is incorporated into this application.

Technical field

This application relates to the field of semiconductor testing technology, and specifically to a straight-turn EMLSOA chip bar testing machine and a testing method.

Background technique

In the production process of EML chips containing SOA, the cleavage machine splits the wafer into bars through cleavage technology. A bar is a single bar formed by multiple chips side by side. The cleaver also needs to split the bar to form a Before splitting the bar bar, it is necessary to conduct a preliminary inspection of the bar bar to check the preliminary situation of each chip. Among them, SOA is an electrode on the chip, which is the semiconductor optical amplifier, EML is the chip category, and is the electrical Absorption modulated laser.

When testing bar bars, if unqualified chips are detected, the chips need to be marked so that unqualified chips can be picked out during the subsequent splitting process.

Contents of the invention

Therefore, this application provides a straight-turn EMLSOA chip bar testing machine and detection method that facilitates marking of unqualified chips during the bar testing process.

In order to solve the above technical problems, this application provides a straight-turn EMLSOA chip bar testing machine, including a loading mechanism, a test bench, a first moving mechanism, a positioning mechanism and a feeding mechanism, and also includes:

The test bench is installed on the driving end of the first moving mechanism, and the first moving mechanism is suitable for driving the test bench to move between the loading position and the testing position;

A detection mechanism, the detection mechanism includes a probe assembly and an optical signal receiving unit, the probe assembly has a punching needle suitable for punching holes in the chip on the bar bar and at least one detection needle suitable for powering the chip on the bar bar;

The optical signal receiving unit is adapted to receive the optical signal emitted from the light-emitting point of the chip after the detection target is supplied to the chip.

Optionally, there are two detection needles.

Optionally, the hardness of the punching needle is higher than the hardness of the detection needle.

Optionally, a second moving mechanism is also included, the punching needle is installed on the driving end of the second moving mechanism, and the second moving mechanism is adapted to drive the punching needle to punch holes on the chip.

Optionally, the optical signal receiving unit includes a PD receiver and an optical fiber receiver, which are respectively adapted to receive optical signals emitted after the chip is powered on.

Optionally, the positioning mechanism includes: a push plate installed on a third moving mechanism, the push plate is adapted to be arranged corresponding to the test bench, and the third moving mechanism is adapted to drive the push plate where the test bench is located move along the first direction and/or the second direction above the plane, and the first direction and the second direction are perpendicular to each other;

The end of the push plate that is suitable for contacting the bar bar has a pushing part and toggle parts located on both sides of the pushing part. The pushing part and the toggle parts on both sides form a "凵"-shaped groove.

Optionally, the push plate is provided with an inclined surface between the two dialing parts, the inclined surface is inclined toward the end of the push plate, and the inclined surface forms the pushing part at the end of the push plate.

Optionally, the test platform is provided with a plurality of adsorption holes, the plurality of adsorption holes are arranged in a straight line, and the arrangement direction of the adsorption holes is perpendicular to the first direction of the push plate.

Optionally, the side of the test bench close to the adsorption hole is provided with chamfers.

Testing methods are also provided, including the above-mentioned straight-turn EMLSOA chip bar testing machine, and also include the following steps:

The loading mechanism transports the bars to the test bench;

The positioning mechanism adjusts the position of the bar bar on the test bench;

Move the test bench to the detection position, and the detection mechanism will detect individual chips in the bar in sequence. If an unqualified chip is encountered, the control punching will be performed to mark the chip;

The picking mechanism places the inspected bar bars in the storage box to complete the bar bar inspection.

The technical solution of this application has the following advantages:

1. The straight-turn EMLSOA chip bar testing machine provided by this application has a punching needle and a detection needle in the detection mechanism. After the detection is powered on the chip, the optical signal receiving unit receives the optical signal emitted by the chip and detects it. If If the detection chip fails, punch holes and mark the chip so that it can be picked out during the subsequent splitting process to avoid repeated testing of unqualified chips and increase the workload of the operator; the usual bar machine test is repeated The reason is that after the Bar is adsorbed and placed on the test bench, its left and right positions are not accurate enough. Since the test bench is relatively wide, the flatness of the entire plane cannot be completely guaranteed, so the Bar is randomly placed on different The consistency of the position with the plane of the test bench is also unstable. This is a big problem in bar machine testing that greatly affects test repeatability. After we adopt the "凵" shaped push plate structure, we can accurately position the starting end of the Bar at the predetermined starting point through the "凵". In this way, no matter how many times it is placed, the starting position of the Bar will be fixed and will not shift, and the contact effect with the test bench will not change, ensuring the stability of test data repeatability.

2. In the straight-turn EMLSOA chip bar testing machine provided by this application, the hardness of the punching needle is higher than the hardness of the detection needle, so as to facilitate the punching operation of the chip.

3. For the straight-turning EMLSOA chip bar testing machine provided by this application, the push plate is installed on the third moving mechanism. The third moving mechanism can control the pushing plate to move in the first direction and/or the second direction. After the material mechanism places the bar bar on the test bench, it controls the third moving mechanism to drive the push plate to move forward, backward, left, and right in the first direction and/or the second direction. When the push plate moves forward, backward, left, and right, the The pushing part and the toggle part drive the bar bar to move, thereby changing the position of the bar bar on the test bench.

4. The detection method provided by this application, by setting up a punching needle in the detection mechanism and marking unqualified chips during the bar detection process, can enable the bar to select problematic chips during the subsequent splitting process. Avoiding repeated testing of failed chips saves time.

Description of drawings

In order to more clearly explain the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description The drawings illustrate some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without exerting creative efforts.

Figure 1 is a schematic structural diagram of a straight-turning EMLSOA chip bar testing machine provided in Embodiment 1 of the present application;

Figure 2 is a schematic structural diagram of the detection mechanism provided in Embodiment 1 of the present application;

Figure 3 is a schematic structural diagram of the positioning mechanism provided in Embodiment 1 of the present application;

Figure 4 is a schematic structural diagram of the push plate provided in Embodiment 1 of the present application;

Figure 5 is a top view of the push plate provided in Embodiment 1 of the present application;

Figure 6 is a flow chart of the detection method provided in Embodiment 2 of the present application.

Explanation of reference symbols:

1. Push plate; 2. Test bench; 3. Bar; 4. Third moving mechanism; 5. First workbench; 6. First moving mechanism; 7. Pushing part; 8. Detection mechanism; 9. Optical signal Receiving unit; 10. Second workbench; 11. Slide plate; 12. Fourth moving mechanism; 13. Detection needle; 14. Second moving mechanism; 15. Punching needle; 16. Temperature control table; 17. Toggle part .

Detailed ways

The technical solution of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of this application.

In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. It does not indicate or imply that the device or element referred to must have a specific orientation or a specific orientation. construction and operation, and therefore should not be construed as limitations on this application. Furthermore, the terms “first,” “second,” “third,” and “fourth” are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of this application, it should be noted that, unless otherwise clearly stated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. Connection, or integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood on a case-by-case basis.

In addition, the technical features involved in different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

Example 1

This embodiment provides a specific implementation of a straight-turn EMLSOA chip bar testing machine, including a loading mechanism, a test bench 2, a first moving mechanism 6, a positioning mechanism, a detection mechanism 8 and a feeding mechanism, such as As shown in Figures 1 and 2, the test bench 2 is installed on the driving end of the first moving mechanism 6. The test bench 2 can be controlled to move through the first moving mechanism, so that the test bench 2 drives the bar bar 3 at the loading position and Move between test positions, in which the bar 3 is repositioned through the positioning mechanism at the loading position. The detection mechanism 8 includes a probe assembly and an optical signal receiving unit 9. The probe assembly has a punching needle 15 suitable for punching holes in the chip on the bar 3 and a detection needle 13 suitable for powering the chip on the bar 3. The detection needle 13 After the chip is powered, the light-emitting points on the chip will emit light, and the optical signal receiving unit 9 can receive the light signals emitted by the chip's light-emitting points, and then detect some parameters of the chip. After the detection needle 13 supplies power to the chip, it receives the optical signal emitted by the chip through the optical signal receiving unit 9 and detects it. If the detection chip is unqualified, the punching needle 15 punches and marks the chip so that it can be removed during the subsequent splitting process. Pick out to avoid repeated testing of unqualified chips and increase the workload of operators.

Specifically, there are two detection needles 13, which can detect a chip with dual electrodes. As an alternative implementation, the detection pins 13 can also be set to one, three or other numbers, which can satisfy the number of electrodes on the chip. In this embodiment, two are preferred.

Each detection pin 13 is installed on the driving end of the fourth moving mechanism 12, and the position of the detection pin 13 can be controlled by the fourth moving mechanism 12, so as to complete the power supply detection of the chip.

In this embodiment, the punching needle 15 is installed on the driving end of the second moving mechanism 14. After detecting that the chip is unqualified, the punching needle 15 is controlled by the second moving mechanism 14 to punch and mark the chip.

Specifically, the hardness of the punching pin 15 is higher than the hardness of the detection pin 13. Since the detection pin 13 is used to power the chip, its hardness is low. If the detection pin 13 is used to punch the chip, the detection pin 13 will The damage is greater and the service life of the detection needle 13 is shortened. A punching needle 15 with a higher hardness is used to facilitate the punching operation of the chip. The material of the punching needle 15 is preferably steel, and it can also be made of other materials with a higher hardness, such as Ceramic materials, etc.

In this embodiment, the optical signal receiving unit 9 includes a PD receiver and an optical fiber receiver, which are respectively adapted to receive optical signals emitted from the light-emitting point after the chip is powered on. Among them, the PD receiver converts the optical signal into an electrical signal and transmits it to the signal amplification acquisition board for data collection, calculates and processes the electrical characteristic data and classifies the electrical characteristic grade according to the judgment conditions; the optical fiber receiver sends the received spectral curve data into Perform spectral signal analysis in the spectrometer, determine whether the product quality requirements are met based on the results of the spectral test data, and classify the product grade. Specifically, the PD receiver may be a photodiode, and the fiber optic receiver may be a collimating lens.

In this embodiment, as shown in Figures 3, 4 and 5, the positioning mechanism includes a push plate 1. The push plate 1 is installed on the third moving mechanism 4. The third moving mechanism 4 can control the push plate 1 to move in the first direction. and/or movement in a second direction, wherein the first direction and the second direction are perpendicular to each other. The end of the push plate 1 that is in contact with the bar 3 has a pushing part 7 and toggle parts 17 located on both sides of the pushing part 7. The pushing part 7 and the toggle parts 17 on both sides form a "凵"-shaped groove. 7 can push the bar 3 to the position of the adsorption hole, and the dialing part 17 can adjust the position of the bar 3 on the adsorption hole. When the loading mechanism places the bar 3 on the test bench 2, it controls the third moving mechanism 4 to drive the push plate 1 to move forward, backward, left, and right in the first direction and/or the second direction. When moving, the pushing part 7 and the dialing part 17 on the push plate 1 drive the bar 3 to move, changing the position of the bar 3 on the test bench 2 .

Specifically, if the position of the bar 3 in the first direction or the second direction is accurate after the bar 3 is placed on the test bench 2, you can only adjust the position of the bar 3 in one direction, or you can re-adjust the position of the bar 3 in both directions. adjustment in one direction.

Specifically, the push plate 1 is provided with an inclined surface between the two dialing parts 17 , the inclined surface is inclined toward the end of the push plate 1 , and the inclined surface forms a pushing part 7 at the end of the push plate 1 , and both sides of the pushing part 7 The protruding length of the side toggle portion 17 is not less than the width of the bar 3 so that the bar 3 can be completely placed in the "凵"-shaped groove.

As shown in Figure 1, the optical signal receiving unit 9 has two groups with different angles. Each group of optical signal receiving units 9 can receive the optical signal emitted by the light-emitting point of the chip. Two groups of optical signal receiving units 9 with different angles can be set at the same time. Chips with different light emitting angles in the bar 3 are detected without the need to replace or adjust the angle of the optical signal receiving unit 9 .

In this embodiment, a number of adsorption holes are provided on the test bench 2 , and the adsorption holes are arranged in a straight line, and the arrangement direction of the adsorption holes is perpendicular to the first direction of the push plate 1 . Specifically, the push plate 1 moves in a first direction and/or upward. The first direction is the direction in which the pushing part 7 on the push plate 1 pushes the bar bar 3 to move, that is, the direction in which the bar bar 3 moves laterally; the second direction is the push direction. The dialing part 17 on the plate 1 pushes the bar 3 in the direction in which it moves, that is, the direction in which the bar 3 moves longitudinally.

As an alternative implementation, the adsorption holes can also be opened on other sides or in other directions on the test bench 2. At this time, the pushing part 7 and the dialing part 17 on the push plate 1 are adjusted to be consistent with the arrangement direction of the adsorption holes. Corresponding direction, so that the push plate 1 can push the bar 3 and make the length direction of the bar 3 coincide with the arrangement direction of the adsorption holes.

In this embodiment, a first workbench 5 is also included. The first moving mechanism 6, the second moving mechanism 14, the third moving mechanism 4 and the fourth moving mechanism 12 are all arranged on the first workbench 5, where the first The moving mechanism 6 is an electric cylinder, and the test bench 2 is installed on the driving end of the electric cylinder through a mounting bracket and other structures. Through the telescopic movement of the electric cylinder, the reciprocating motion of the test bench 2 is realized.

In this embodiment, a temperature control platform 16 is also included. The test platform 2 is installed on the temperature control platform 16. The test platform 2 is installed on the driving end of the first moving mechanism 6 through the temperature control platform 16. The temperature control platform 16 is connected to a temperature controller. The control device, namely the heating device and the temperature measurement device, can heat and temperature control the test bench 2 to ensure that the Bar bar is at a suitable detection temperature. Specifically, the heating device can be an electric heating wire, and the temperature measuring device can be a temperature sensor.

The second moving mechanism 14 includes a forward and backward moving device, a left and right moving device and an up and down moving device. The forward and backward moving device is slidably installed on the left and right moving device. The left and right moving device is slidably installed on the first workbench 5. The up and down moving device is slidably installed on the front and rear moving device. On the device, the punching needle 15 is installed on the up and down moving device. Through the movement of the front and rear moving device, the left and right moving device and the up and down moving device, the punching needle 15 can move forward and backward, left and right and up and down. Specifically, the left and right moving device is installed on the first workbench 5, the forward and backward moving device is installed on the driving end of the left and right moving device, and the up and down moving device is installed on the driving end of the forward and backward moving device; specifically, the left and right moving device can be the third A slide block is slidably installed on the first slide rail, and the first slide rail is installed on the first workbench 5. The forward and backward moving device may be a second slide rail installed on the first slide block, and a slide rail is slidably installed on the second slide rail. The second slide block, the up and down moving device may be a third slide rail installed on the second slide block, a third slide block is slidably installed on the third slide rail, and the punching needle 15 is installed on the third slide block. The first slide rail, the second slide rail and the third slide rail are perpendicular to each other.

As an alternative embodiment, the left and right moving device can also be a first cylinder, the forward and backward moving device can be a second cylinder, and the up and down moving device can be a third cylinder. The first cylinder is installed on the first workbench 5, and the second cylinder Installed on the driving end of the first cylinder, the third cylinder is installed on the driving end of the second cylinder, the punching needle 15 is installed on the driving end of the third cylinder, the driving of the first cylinder, the second cylinder and the third cylinder The directions are perpendicular to each other. The position control of the punching needle 15 is accurately realized through the control of the second moving mechanism 14 .

In this embodiment, the structural settings of the third moving mechanism 4 and the fourth moving mechanism 12 are the same as the above-mentioned second moving mechanism 14 , except that the driving ends of the third moving mechanism 4 and the fourth moving mechanism 12 are respectively equipped with push plates. 1 and detection pin 13.

In this embodiment, a second workbench 10 is also included. The optical signal receiving unit 9 is installed on the second workbench 10 . The second workbench 10 is provided with two groups of optical signal receiving units 9 , each group of optical signal receiving units 9 It includes a PD receiver and an optical fiber receiver, in which the receiving angles of the receivers in the two sets of optical signal receiving units 9 are different. Chips with different light-emitting angles in the bar 3 can be tested at the same time. For example, in the bar 3 50 chips, of which 20 chips have a light-emitting angle at the first angle, and the other 30 chips have a light-emitting angle at the second angle, and the two sets of optical signal receiving units 9 can switch between the two angles to complete the comparison. To detect the chips in the entire bar 3, there is no need to adjust the receiving angle of the optical signal receiving unit 9 during the detection process.

Specifically, the second workbench 10 is installed on the sliding plate 11, and the sliding plate 11 and the second workbench 10 are integrally installed on the driving end of the driving device. The driving device can be an electric cylinder, a pneumatic cylinder or a telescopic rod, etc., so as to facilitate The sliding plate 11 and the second workbench 10 drive the optical signal receiving unit 9 to reciprocate, so that different receivers in the optical signal receiving unit 9 are aligned with the emitting chips in the bar 3 . In this embodiment, the moving direction of the slide plate 11 and the second workbench 10 is parallel to the driving direction of the first driving structure.

In this embodiment, the loading mechanism and the discharging mechanism are both conventional suction nozzle structures. The loading mechanism adsorbs the bar bar 3 to be detected from the bar placement box to the test bench 2 through the suction nozzle, and waits for the bar bar to be detected. After completion, the unloading mechanism will absorb and transfer the inspected Bar bars to the storage box through the suction nozzle, so no further details will be given.

In this embodiment, although the unqualified chip will be punched and marked by the punching needle 15, the performance of the chip will not be affected.

In this embodiment, EML is the chip type, SOA is one of the electrodes on the chip, the straight direction is the emission angle of the chip's light-emitting point, and the straight-turn EMLSOA chip bar is the EML containing SOA electrodes with different light-emitting angles. Bar formed by chips.

Example 2

This embodiment provides a specific implementation of the bar 3 detection method. As shown in Figure 6, it is implemented using the straight-turn EMLSOA chip bar testing machine in Embodiment 1. It also includes the following steps: loading mechanism Transport the bar 3 to the test bench 2; the positioning mechanism adjusts the position of the bar 3 on the test bench 2; move the test bench 2 to the detection position, and the detection mechanism 8 detects individual chips in the bar 3 in sequence. The unqualified chip is controlled by the punching needle 15 to punch holes and mark the chip; the picking mechanism places the tested bar in the storage box to complete the detection of the bar bar 3.

During the testing process, if an unqualified chip is encountered, the punching needle 15 is controlled to punch and mark the chip. If the currently tested chip is qualified, the next chip will continue to be tested until all chips on the Bar are tested. Remove the inspected Bar strips and place them in the storage box

By setting the punching needle 15 in the detection mechanism 8 to mark the unqualified chips during the detection process of the bar 3, the bar 3 can select problematic chips in the subsequent splitting process to avoid unqualified chips. Repeated chip testing saves time.

Obviously, the above-mentioned embodiments are only examples for clear explanation and are not intended to limit the implementation. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. An exhaustive list of all implementations is neither necessary nor possible. However, obvious changes or modifications derived therefrom are still within the protection scope of the present invention.

Claims

A straight turning EMLSOA chip bar testing machine includes a loading mechanism, a test bench (2), a first moving mechanism (6), a positioning mechanism and a feeding mechanism, and is characterized by:

The test bench (2) is installed on the driving end of the first moving mechanism (6). The first moving mechanism (6) is suitable for driving the test bench (2) between the loading position and the testing position. move;

Detection mechanism (8), the detection mechanism (8) includes a probe assembly and a light signal receiving unit (9), the probe assembly has a punching needle (15) suitable for punching holes in the chip on the bar bar (3) And at least one detection pin (13) suitable for supplying power to the chip on the bar bar (3);

The optical signal receiving unit (9) has two groups with different angles, and each group of the optical signal receiving unit (9) is adapted to receive the optical signal emitted by the chip's luminous point after the detection needle (13) supplies power to the chip;

The positioning mechanism includes: a push plate (1), which is installed on a third moving mechanism (4). The push plate (1) is suitable for being arranged corresponding to the test bench (2). The third moving mechanism (4) Suitable to drive the push plate (1) to move in the first direction and/or the second direction above the plane where the test bench (2) is located, and the first direction and the second direction are perpendicular to each other;

The end of the push plate (1) suitable for contact with the bar bar (3) has a pushing part (7) and a dialing part (17) located on both sides of the pushing part (7). The pushing part (7) and The dialing parts (17) on both sides form a "凵"-shaped groove.
The straight-turn EMLSOA chip bar testing machine according to claim 1, characterized in that the detection needle (13) has two.
The straight-turn EMLSOA chip bar testing machine according to claim 1, characterized in that the hardness of the punching needle (15) is higher than the hardness of the detection needle (13).
The straight-turn EMLSOA chip bar testing machine according to claim 1, further comprising a second moving mechanism (14), and the punching needle (15) is installed on the second moving mechanism (14). ), the second moving mechanism (14) is adapted to drive the punching needle (15) to punch holes in the chip.
The straight-turn EMLSOA chip bar testing machine according to claim 1, characterized in that the optical signal receiving unit (9) includes a PD receiver and an optical fiber receiver, respectively adapted to receive the light emitted after the chip is powered on. Signal.
The straight-turn EMLSOA chip bar testing machine according to claim 1, characterized in that the push plate (1) is provided with a slope between the two toggle parts (17), and the slope is It is inclined toward the end of the push plate (1), and the inclined surface forms the pushing portion (7) at the end of the push plate (1).
The straight-turning EMLSOA chip bar testing machine according to claim 1, characterized in that the test bench (2) is provided with a number of adsorption holes, and the plurality of adsorption holes are arranged in a straight line, and the adsorption holes are The arrangement direction is perpendicular to the first direction of the push plate (1).
The straight-turn EMLSOA chip bar testing machine according to claim 7, characterized in that the side of the test bench (2) close to the adsorption hole is provided with chamfers.
The bar detection method includes the straight turning EMLSOA chip bar testing machine according to any one of claims 1 to 8, characterized in that it also includes the following steps:

The loading mechanism transports the bar bar (3) to the test bench (2);

The positioning mechanism adjusts the position of the bar bar (3) on the test bench (2);

Move the test bench (2) to the detection position, and the detection mechanism (8) detects individual chips in the bar (3) in sequence. If an unqualified chip is encountered, the punching needle (15) controls the punching needle (15) to punch and mark the chip. ;

The picking mechanism places the inspected bar (3) in the storage box to complete the inspection of the bar (3).