WO2024018612A1 - 半導体装置および電力変換装置 - Google Patents

半導体装置および電力変換装置 Download PDF

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Publication number
WO2024018612A1
WO2024018612A1 PCT/JP2022/028435 JP2022028435W WO2024018612A1 WO 2024018612 A1 WO2024018612 A1 WO 2024018612A1 JP 2022028435 W JP2022028435 W JP 2022028435W WO 2024018612 A1 WO2024018612 A1 WO 2024018612A1
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Prior art keywords
bias
gate
power semiconductor
circuit
control circuit
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PCT/JP2022/028435
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English (en)
French (fr)
Japanese (ja)
Inventor
章太郎 山本
幸彦 和田
美子 玉田
健一 諸熊
智和 丸山
彩輝 池尻
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority to JP2024534881A priority Critical patent/JPWO2024018612A1/ja
Priority to DE112022007572.4T priority patent/DE112022007572T5/de
Priority to CN202280098068.0A priority patent/CN119631289A/zh
Priority to PCT/JP2022/028435 priority patent/WO2024018612A1/ja
Publication of WO2024018612A1 publication Critical patent/WO2024018612A1/ja
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/38—Means for preventing simultaneous conduction of switches

Definitions

  • the present disclosure relates to a semiconductor device, and relates to driving a power semiconductor element.
  • One of the problems related to the reliability of power semiconductor devices is erroneous gate firing.
  • erroneous gate firing occurs, the high voltage side power supply on the upper arm side and the low voltage side power supply on the lower arm side of the single phase in which the erroneous firing occurred in the power inverter are short-circuited.
  • a large short-circuit current flows between the power supplies, causing increased loss in the inverter device, and in the worst case, may lead to thermal runaway.
  • the voltage applied to the gate terminal of a power semiconductor element has two voltages: a first voltage and a second voltage at a voltage level lower than the first voltage.
  • the turn-off operation of the power semiconductor device is performed using a first voltage, and the first voltage is generally not higher than the negative bias applied to the gate terminal.
  • the switching loss of the power semiconductor element is increased compared to when the second voltage is used.
  • switching loss is improved by speeding up the turn-on operation.
  • Non-Patent Document 1 a negative bias is applied to the gate terminal of the own arm element over a period from the start of the turn-off operation of the power semiconductor element to the end of the turn-on operation of the power semiconductor element on the opposing arm side. In other words, during the dead time period and the switching period, a negative bias continues to be applied to the gate terminal of the own arm element. Therefore, in systems where the dead time setting value is large, there is a concern that the effect of stress reduction on the gate oxide film may be insufficient.
  • the present disclosure is intended to solve the above problems, and aims to provide a semiconductor device and a power conversion device that can improve the reliability of power semiconductor elements.
  • a semiconductor device includes a gate voltage control circuit that applies an on bias and an off bias to a gate terminal of a power semiconductor element according to a first drive signal, and a gate voltage control circuit that applies an on bias and an off bias to a gate terminal of a power semiconductor element according to a first drive signal and an off bias according to a first drive signal and a second drive signal. and an off-bias voltage control circuit that changes the bias voltage level and controls the applied period of the changed off-bias.
  • a power conversion device includes a first power semiconductor element, a second power semiconductor element provided on the opposite arm side connected in series with the first power semiconductor element, and a first power semiconductor element and a second power semiconductor element connected in series with the first power semiconductor element.
  • First and second gate drive circuits are provided corresponding to the second power semiconductor devices, respectively, and drive the corresponding power semiconductor devices according to first and second drive signals.
  • Each gate drive circuit includes a gate voltage control circuit that applies on-bias and off-bias to the gate terminal of the power semiconductor device according to a corresponding drive signal, and a gate voltage control circuit that changes the voltage level of off-bias according to first and second drive signals. , and an off-bias voltage control circuit that controls the application period of the changed off-bias.
  • the semiconductor device and power conversion device according to the present disclosure can improve the reliability of power semiconductor elements.
  • FIG. 2 is a block diagram for explaining the functions of a gate drive circuit 100 of the power semiconductor device according to the first embodiment.
  • 3 is a diagram illustrating a specific configuration of a first control circuit 21 and a second control circuit 31 according to the first embodiment.
  • FIG. FIG. 3 is a diagram illustrating a timing chart when the gate drive circuit 100 according to the first embodiment controls the gate of the power semiconductor element 10.
  • FIG. 7 is a diagram illustrating a gate drive circuit 101 according to a second embodiment.
  • FIG. FIG. 7 is a diagram illustrating a timing chart when the gate drive circuit 101 according to the second embodiment controls the gate of the power semiconductor element.
  • FIG. 7 is a block diagram for explaining the functions of a gate drive circuit 100# of a power semiconductor device according to a third embodiment.
  • FIG. 7 is a diagram illustrating a specific configuration of a first control circuit 21# and a second control circuit 31# according to the third embodiment.
  • FIG. 2 is a diagram illustrating a waveform of a gate voltage Vgs of a SiC-MOSFET to which a gate drive circuit 100 of the present disclosure is applied.
  • FIG. 7 is a diagram illustrating a timing chart when the gate drive circuit 101 according to the fifth embodiment controls the gate of the power semiconductor element.
  • FIG. 7 is a block diagram for explaining the functions of an integrated drive circuit 102 according to a sixth embodiment.
  • FIG. 7 is a block diagram showing the configuration of a power conversion system according to a seventh embodiment.
  • Embodiment 1 A gate drive circuit for a power semiconductor device that is an example of the present disclosure will be described below.
  • FIG. 1 is a block diagram for explaining the functions of a gate drive circuit 100 according to the first embodiment.
  • a gate drive circuit 100 controls the gate of a power semiconductor element 10 connected between a DC high voltage power supply in accordance with input of an external drive signal IN1 and an external drive signal IN2. Specifically, the gate drive circuit 100 controls a so-called switching operation that switches the on/off operation of the power semiconductor element 10.
  • the power semiconductor element 10 corresponds to a switching element of a main circuit in an inverter circuit of a power conversion device.
  • it is one element of a 2-in-1 half-bridge circuit, a 4-in-1 full-bridge circuit, or a 6-in-1 three-phase inverter. Since these circuit configurations generate an inverter output voltage through PWM control, a high voltage of several hundred volts or more is applied between the drain and source of the element during off-operation. Further, a large current depending on the system of the power conversion device flows through the element during the ON operation. These operating states are controlled by the gate voltage that turns on and off the power semiconductor element 10 according to the external drive signal IN1.
  • the gate drive circuit 100 includes a gate voltage control circuit 20 and an off-bias voltage control circuit 30.
  • the gate voltage control circuit 20 controls the on-bias and off-bias of the gate of the power semiconductor element 10.
  • Gate voltage control circuit 20 includes a first control circuit 21 and a first switching circuit 22.
  • the first control circuit 21 controls the gate control signal so that the power semiconductor element 10 performs a desired switching operation according to the input external drive signal IN1. Specifically, the gate control signal is set to "1" during the period when the power semiconductor element 10 should be on, and the gate control signal is set to "0" during the period when the power semiconductor element 10 is to be turned off.
  • These binary voltage signals can be constructed by generating a pulse waveform with a communication signal source such as a 5V system, 3.3V system, or the like of a logic circuit.
  • the first switching circuit 22 is arranged between the gate of the power semiconductor element 10 and the first control circuit 21.
  • the high side of the first switching circuit 22 is connected to the positive voltage source Vdd, and the low side is connected to the second switching circuit 32.
  • the first switching circuit 22 includes an NPN transistor 22A, a PNP transistor 22B, and a resistance element 22C.
  • NPN transistor 22A and PNP transistor 22B are connected in series.
  • NPN transistor 22A is connected to a positive voltage source Vdd and connected to an output node.
  • the PNP transistor 22B is connected to an output node and an output node of the second switching circuit 32.
  • the gates of the NPN transistor 22A and the PNP transistor 22B are connected to the first control circuit 21 via the resistance element 22C.
  • the first switching circuit 22 can switch the current path according to the gate control signal output from the first control circuit 21. This changes the path through which the gate current of the power semiconductor element 10 flows, which is equivalent to switching between charging and discharging the gate. Therefore, the first switching circuit 22 functions to switch the gate voltage applied to the gate of the power semiconductor element 10 and to control the on/off operation of the power semiconductor element 10.
  • the off-bias voltage control circuit 30 controls the level of the off-bias applied to the gate of the power semiconductor element 10 during the off-operation according to the external drive signal IN1 and the external drive signal IN2. Specifically, the off-bias voltage control circuit 30 has a voltage level during the off-operation of the power semiconductor device 10, so if it is a positive value, there is a possibility that it exceeds the gate threshold voltage of the power semiconductor device 10. Therefore, set it so that it is always below 0V.
  • the number of off-bias level switches is assumed to be two, as an example.
  • the external drive signal IN1 and the external drive signal IN2 are used to switch between the two off-bias levels.
  • the external drive signal IN1 is the same as the input signal to the first control circuit 21.
  • the external drive signal IN2 needs to provide the gate drive circuit 100 with timing information regarding gate erroneous firing (also referred to as self-turn-on phenomenon) of the power semiconductor device 10, which will be described later.
  • External drive signal IN2 is provided as means separate from external drive signal IN1.
  • Off-bias voltage control circuit 30 includes a second control circuit 31 and a second switching circuit 32.
  • the second control circuit 31 has an off-bias control circuit that can arbitrarily adjust the off-bias voltage level and the off-bias application period applied to the gate of the power semiconductor element 10 based on the input of the external drive signal IN1 and the external drive signal IN2. Outputs bias voltage control signal. The specific method will be described later.
  • the second switching circuit 32 is connected to the second control circuit 31, the first switching circuit 22, and the source electrode of the power semiconductor element 10.
  • the high side of the second switching circuit 32 is connected to the source electrode of the power semiconductor element 10, and the low side is connected to the negative voltage source Vneg.
  • the second switching circuit 32 includes an NPN transistor 32A, a PNP transistor 32B, and a resistance element 32C.
  • NPN transistor 32A and PNP transistor 32B are connected in series.
  • the NPN transistor 32A is connected to the source electrode of the power semiconductor element 10 and to the output node.
  • the output node is connected to the first switching circuit 22 .
  • PNP transistor 32B is connected to the output node and negative voltage source Vneg.
  • the gates of NPN transistor 32A and PNP transistor 32B are connected to second control circuit 31 via resistance element 32C.
  • the second switching circuit 32 switches the off-bias level of the gate according to the off-bias voltage control signal generated by the second control circuit 31. Specifically, a reference potential Vs based on the source potential of the power semiconductor element 10 and a negative voltage source Vneg are switched. That is, by switching the source potential of the power semiconductor device 10, the off-bias level applied to the gate of the power semiconductor device 10 is changed.
  • the state of connection to the reference potential Vs will also be referred to as “shallow off-bias” and the state of connection to negative voltage source Vneg will also be referred to as “deep off-bias” as needed.
  • the shallow off-bias and deep off-bias applied to the gate of the power semiconductor element 10 are based on the off-operation of the power semiconductor element 10. Therefore, the shallow off-bias that is not uniquely determined only by the operation of the second switching circuit 32 and is applied to the gate of the power semiconductor element 10 by the first switching circuit 22 only during the off-operation period of the power semiconductor element 10; Toggle deep off bias.
  • the off-bias level applied to the gate of the power semiconductor device 10 is controlled based on the states of the gate voltage control circuit 20 and the off-bias voltage control circuit 30.
  • the first control circuit 21 and the second control circuit 31 may be composed of passive elements such as resistors, capacitors, and diodes, and RC filters.
  • a Schmitt trigger element for conditioning the transmitted signal may also be provided.
  • the first control circuit 21 is a delay line that delays the transmission signal by a certain period of time (can be realized with a delay IC or a buffer circuit)
  • the second control circuit 31 is a delay line that delays the transmission signal by a certain amount of time (can be realized with a delay IC or a buffer circuit)
  • the second control circuit 31 is a delay line that delays the transmission signal by a certain period of time (can be realized with a delay IC or a buffer circuit).
  • It is equipped with a logic operation circuit that performs logic operations such as the following.
  • the first switching circuit 22 and the second switching circuit 32 have a totem pole circuit structure in which switching elements are arranged in the upper and lower arms, and can control the output in two stages according to the input gate control signal.
  • the above-described push-pull circuit may be configured in which the high-side element is an NPN transistor and the low-side element is a PNP transistor, or other configurations may be adopted.
  • FIG. 2 is a diagram illustrating a specific configuration of the first control circuit 21 and the second control circuit 31 according to the first embodiment.
  • first control circuit 21 includes a control section 21A and a delay circuit 21B.
  • the control unit 21A receives the external drive signal IN1 as an input signal, and plays the role of generating a prepared signal.
  • it can be realized using a capacitor for voltage maintenance, a diode element for preventing reverse conduction, and a Schmitt trigger element for adjusting the transmission signal.
  • the delay circuit 21B is a delay circuit that receives the output signal of the control unit 21A, delays the output signal by a certain amount of time, and generates a delayed signal.
  • the delay line may be any delay line that delays the transmission signal by a certain period of time, and the delay line may be formed of a logic IC or a buffer element.
  • the gate control signal input to the first switching circuit 22 shown in FIG. 1 is delayed by a certain amount of time with respect to the external drive signal IN1.
  • the operation of the first switching circuit 22 can also be delayed by the same amount of time. Therefore, the timing of the switching operation of the power semiconductor device 10 is also delayed by the same amount of time overall.
  • the logic ICs and buffer elements that make up the delay line may have multiple terminals per element, the delay amount of the logic IC and the buffer element may be different, and the connection destination of the circuit may be switched using jumper pins.
  • the gate delay amount of the power semiconductor device 10 can be variably set.
  • the second control circuit 31 includes delay circuits 31A and 31B, inverters IV0 and IV1, AND circuits AD0 and AD1, and a NOR circuit NR.
  • the AND circuit AD0 receives the external drive signal IN1 via the delay circuit 31A and the external drive signal IN1 via the inverter IV0, and outputs the AND logical operation result to the NOR circuit NR.
  • the AND circuit AD1 receives the external drive signal IN2 and the external drive signal IN2 via the delay circuit 31B and the inverter IV1, and outputs the AND logical operation result to the NOR circuit NR.
  • NOR circuit NR receives inputs from AND circuits AD0 and AD1, and outputs a NOR logical operation result.
  • the delay circuits 31A and 31B are delay circuits that generate delayed signals.
  • it may be composed of an RC filter, which is a general delay time adjustment circuit, and it is even better to include a Schmitt trigger element for adjusting the transmission signal. Note that the delay amounts of the delay circuits 31A and 31B can be adjusted to different values.
  • the NOR circuit NR normally outputs an off-bias voltage control signal (“1”). As a result, the NPN transistor 32A of the second switching circuit 32 is turned on.
  • the AND circuit AD0 outputs a one-shot pulse signal proportional to the amount of delay of the delay circuit 31A.
  • the NOR circuit NR turns on the PNP transistor 32B of the second switching circuit 32 in response to the period of the one-shot pulse signal.
  • the AND circuit AD1 outputs a one-shot pulse signal proportional to the amount of delay of the delay circuit 31B.
  • the NOR circuit NR turns on the PNP transistor 32B of the second switching circuit 32 in response to the period of the one-shot pulse signal.
  • the second control circuit 31 receives two external drive signals IN1 and IN2, performs a logical operation such as a logical sum (OR) or a logical product (AND) on the two signals, and extracts one signal from the two output signals.
  • This is a logic operation circuit that generates an off-bias voltage control signal.
  • it may be composed of a discrete IC element that includes only one element, or it may be composed of a 2-in-1 logic IC that has two logic functions. It may be configured to include at least one AND element and one OR element each for performing logical operations.
  • delay circuits 31A and 31B By providing the delay circuits 31A and 31B, it is possible to generate an off-bias voltage control signal according to the external drive signal IN1 and the external drive signal IN2, and adjust the time of the signal.
  • the resistors and capacitors of the RC filters of the delay circuits 31A and 31B may be configured with variable resistors or variable capacitors. With such a configuration, it becomes possible to variably set the application timing and application time of the deep off-bias Vneg of the power semiconductor element 10.
  • the first control circuit 21 included in the gate voltage control circuit 20 includes the control section 21A and the delay circuit 21B
  • the second control circuit 31 included in the off-bias voltage control circuit 30 includes the control section 21A and the delay circuit 21B.
  • FIG. 3 is a diagram illustrating a timing chart when the gate drive circuit 100 according to the first embodiment controls the gate of the power semiconductor element 10.
  • gate drive circuit 100 differs in operation between gate drive circuit 100 according to the first embodiment and a comparative example.
  • the horizontal axis represents time, and the vertical axis represents external drive signal IN1, external drive signal IN2, and gate voltage Vgs of power semiconductor element 10, respectively.
  • the gate drive circuit 100 starts to discharge the gate to the power semiconductor element 10 in response to the external drive signal IN1 changing from “1" to "0". That is, the power semiconductor device 10 performs a turn-off operation. Since the gate charge charged during the ON operation is extracted, the gate voltage Vgs of the power semiconductor element begins to drop.
  • the gate voltage Vgs drops sharply from the on-bias voltage Vdd.
  • the gate voltage Vgs maintains a certain voltage value. This period is called a mirror period and continues until there is no change in the parasitic capacitance between the gate and drain depending on the drain-source voltage Vds (generally, in the case of a SiC-MOSFET, the mirror period is very short).
  • the gate voltage Vgs begins to fall again and reaches the deep off-bias Vneg, thereby completing the turn-off operation.
  • the gate drive circuit according to the first embodiment and the comparative example (here, the configuration according to Patent Document 1).
  • the gate drive circuit 100 according to the first embodiment has the function of applying a deep off-bias Vneg to the gate, the turn-off speed of the power semiconductor element 10 is higher than that of the case without the function of applying a deep off-bias according to the comparative example. It gets faster.
  • the absolute value of the rate of change dVgs/dt of the gate voltage Vgs is higher in the configuration according to the first embodiment than in the configuration in the comparative example. It's also big.
  • the gate voltage Vgs decreases from the shallow off-bias Vs to the deep off-bias Vneg.
  • the turn-off operation of the power semiconductor element 10 is completed at time t1 when the gate voltage Vgs reaches the deep off-bias Vneg.
  • a deep off-bias Vneg is applied to the gate of the power semiconductor element 10 from time t1, so that the above-mentioned stress on the gate oxide film, which causes characteristic deterioration and failure, can be avoided.
  • the period from time t1 to time t2 when deep off-bias Vneg begins to return to shallow off-bias Vs is the dead time period Td set in the inverter circuit of the power converter (upper arm and lower arm Short enough that both arms work off). That is, the actual stress on the gate oxide film is very small. Therefore, high reliability of the power semiconductor device 10 can be ensured.
  • deep off-bias Vneg is applied to the gate of the power semiconductor element 10 during the period from time t0 to time t2. This period is defined as the first period. Next, the process after time t2 will be explained.
  • the gate voltage Vgs of the power semiconductor element 10 is set to a shallow off-bias Vs, and the external drive signal IN1 and the external drive signal IN2 are set to "0".
  • the external drive signal IN2 has a function of notifying the timing of incorrect gate firing of the power semiconductor element 10, that is, the timing of turn-on of the opposing arm element.
  • the gate drive circuit 100 determines that it is the timing to turn on the opposing arm element of the power semiconductor device 10 according to the change in the external drive signal IN2, and again the gate voltage Vgs of the power semiconductor device 10 changes from the shallow off-bias Vs to the deep off-bias Vs. Change to off bias Vneg. Thereafter, as the opposing arm element turns on, the gate voltage Vgs of the power semiconductor element 10 rises from the deep off-bias Vneg.
  • the gate voltage Vgs does not exceed 0V. In other words, it can be said that there is sufficient margin for the gate threshold voltage of the power semiconductor element 10.
  • the period ton during which the opposing arm element of the power semiconductor element 10 actually starts the turn-on operation corresponds to the amount of delay of the gate control signal to the opposing arm element. Since it takes time to establish the deep off-bias Vneg applied to the gate voltage Vgs of the power semiconductor element 10, a delay is inserted in the gate control signal to the opposing arm element. By doing so, it is possible to completely prevent the gate erroneous firing of the power semiconductor element 10.
  • the gate voltage Vgs of the power semiconductor element 10 again starts returning from the deep off-bias Vneg to the shallow off-bias Vs.
  • the stress applied to the gate oxide film of the power semiconductor device 10 is extremely small. That is, the deep off-bias Vneg is applied to the gate of the power semiconductor element 10 during the period from time t3 to time t4.
  • the period from the end of the dead time period Td until a shallow off-bias is applied to the gate of the power semiconductor element 10 is defined as a second period. In other words, the period from time t3 to time t4 is included in the second period.
  • the gate drive circuit 100 improves the switching loss by applying a deep off-bias to the power semiconductor device 10, while limiting the application time of the deep-off bias to a limited period in the first period and the second period. It is also possible to improve the reliability of the power semiconductor device 10 by keeping the distance within the range. This leads to a longer lifespan of power semiconductor elements, and it is possible to realize an economical power converter system.
  • Embodiment 2 In the second embodiment, the operation of the gate drive circuit 101 including the gate resistance control circuit 40 between the power semiconductor element 10 and the first switching circuit 22 will be described.
  • FIG. 4 is a diagram illustrating gate drive circuit 101 according to the second embodiment.
  • gate drive circuit 101 is different from gate drive circuit 100 according to the first embodiment in that gate resistance control circuit 40 is provided between power semiconductor element 10 and first switching circuit 22. The points are different. Since the other configurations are the same, detailed description thereof will not be repeated.
  • the gate resistance control circuit 40 includes a gate resistance 41 and a bypass switching element 42 connected in parallel to both ends of the gate resistance 41.
  • the gate resistor 41 adjusts the switching speed of the power semiconductor element 10, specifically, adjusts the turn-on speed and turn-off speed.
  • the resistance value of the gate resistor 41 If the resistance value of the gate resistor 41 is large, the surge voltage of the drain-source voltage Vds and electromagnetic noise during switching can be reduced, but switching loss increases. On the other hand, when the resistance value of the gate resistor 41 is small, the relationship between the surge voltage of the drain-source voltage Vds, electromagnetic noise, and switching loss is opposite to that when the resistance value is large.
  • the bypass switching element 42 performs a turn-on operation and a turn-off operation in response to an ON/OFF command of a gate control signal.
  • the bypass switching element 42 is connected in parallel to the gate resistor 41. After the turn-on operation of the bypass switching element 42, the gate current flows through the bypass switching element 42, and after the turn-off operation, the gate current flows through the gate resistor 41.
  • the timing at which the bypass switching element 42 according to the second embodiment is turned on and the gate resistor 41 is bypassed is when the off-bias level of the gate is switched between the deep off-bias Vneg and the shallow off-bias Vs.
  • the bypass switching element 42 maintains the off operation until the turn-off operation of the power semiconductor element 10 is completed, and the deep off-bias Vneg is maintained until the turn-off operation of the power semiconductor element 10 is completed. From the time when Vs is established, the bypass switching element 42 is turned on until switching to the shallow off-bias Vs.
  • the bypass switching element 42 is turned on during the period from time Tb1 to time Tb2.
  • the timing for turning off the bypass switching element 42 according to the second embodiment and switching to the path via the gate resistor 41 is such that the dead time period Td ends and the shallow off-bias Vs is prepared for the turn-on operation of the opposing arm element. From the time when switching from Vneg to deep off-bias Vneg to the start of turn-on operation of the opposing arm element.
  • the bypass switching element 42 maintains the on operation, and before the turn-on operation of the opposing arm element, the bypass switching element 42 maintains the on operation.
  • the switching element 42 is turned off.
  • the bypass switching element 42 is turned on during the period from time T3 to Tb3.
  • bypass switching element 42 By performing the operation of the bypass switching element 42 as described above, a bypass path that does not involve the gate resistor 41 can be used only for switching between the deep off-bias Vneg and the shallow off-bias Vs applied to the gate of the power semiconductor element 10. use.
  • the second switching circuit 32 operates in conjunction with the first switching circuit 22. That is, the switching speed between the deep off-bias Vneg and the shallow off-bias Vs depends on the circuit constant of the discharge path of the power semiconductor element 10. In short, if the value of the gate resistance 41 is large, the switching speed between the deep off-bias Vneg and the shallow off-bias Vs becomes slower in accordance with the value. In the second embodiment, by providing a bypass path that does not involve the gate resistor 41, it is possible to increase the switching speed between the deep off-bias Vneg and the shallow off-bias Vs. In other words, it is possible to suitably manipulate the level and timing of the off-bias applied to the gate of the power semiconductor element 10.
  • the gate resistor 41 is effective against erroneous firing of the gate. This is because if the gate resistance 41 has a small value (for example, 0 ohm), vibrations will occur due to the stray inductance component of the gate wiring of the power semiconductor element 10, which may cause gate erroneous firing. Additionally, the increased susceptibility to electromagnetic noise may similarly trigger false gate firing. As a countermeasure against these phenomena, when gate erroneous firing occurs, that is, when the opposing arm element turns on, the bypass switching element 42 is turned off and set to a path via the gate resistor 41.
  • a small value for example, 0 ohm
  • FIG. 5 is a diagram illustrating a timing chart when the gate drive circuit 101 according to the second embodiment controls the gate of the power semiconductor element.
  • gate drive circuit 101 according to the second embodiment and gate drive circuit 100 according to the first embodiment are the same, detailed description thereof will not be repeated.
  • the turn-off operation of the power semiconductor device 10 starts.
  • the gate voltage of the power semiconductor element 10 is lowered to deep off-bias Vneg, and deep off-bias Vneg is established at time t1.
  • the deep off bias Vneg is switched to the shallow off bias Vs in order to shorten the application time of the deep off bias Vneg.
  • the difference from the gate drive circuit 100 according to the first embodiment is that the bypass switching element 42 performs a turn-on operation at time tb1 within the interval between time t1 and time t2 included in the first period. It is.
  • the gate voltage of the power semiconductor element 10 changes at time t2.
  • the switching speed from the deep off-bias Vneg to the shallow off-bias Vs becomes faster, and as shown in the figure, it is possible to quickly return to the shallow off-bias Vs. Since it quickly returns to the shallow off-bias Vs, the application time of the deep off-bias Vneg can be reliably shortened compared to the first embodiment.
  • the bypass switching element 42 performs a turn-off operation.
  • the external drive signal IN2 that notifies the timing of the turn-on operation of the opposing arm element changes from "0" to "1". That is, the dead time period Td ends at time t3.
  • the bypass switching element 42 is turned on.
  • the switching speed from the shallow off-bias Vs to the deep off-bias Vneg is faster than in the first embodiment because the gate resistor 41 is bypassed, and as shown in the figure, the switching speed from the shallow off-bias Vs to the deep off-bias Vneg is faster than in the first embodiment, and as shown in the figure, the switching speed is faster than in the first embodiment because the gate resistor 41 is bypassed. It is possible to apply a deep off-bias Vneg.
  • the bypass switching element 42 performs a turn-off operation.
  • the opposing arm element turns on, and the power semiconductor element 10 gate erroneously fires.
  • the bypass switching element 42 is turned off.
  • the gate resistance control circuit 40 turns off the bypass switching element 42 and connects the gate resistance 41.
  • the on-operation period (tb1-tb2, t3-tb3) of the bypass switching element 42 can be set using the components described in the first embodiment. Specifically, this can be realized by combining the RC filter that delays the period from time t0 to tb1, and the logic operation circuit described in Embodiment 1 that creates a one-shot pulse with the external drive signal IN1 and the external drive signal IN2. It is. Furthermore, the on-operation period (bypass period) of the bypass switching element 42 can be arbitrarily set, and it is also possible to switch between the on-operation and the off-operation at a plurality of locations.
  • the gate resistor 41 is composed of a circuit element such as a general lead resistor or a chip resistor, and may have a circuit constant and a power capacity that conform to the switching operating conditions of the power semiconductor element 10. It does not matter whether the number is singular or plural, or whether the circuit configuration is series or parallel.
  • As the bypass switching element 42 an inexpensive discrete circuit element is sufficient as long as it can cope with the gate capacitance of the power semiconductor element 10. The higher the high-speed response of the bypass switching element 42, the more desirable it is. While a high gate threshold voltage reduces the risk of malfunction, the high-speed response decreases, and a low gate threshold voltage reduces the high-speed response. The trade-off is that while the performance is improved, the risk of malfunction increases.
  • the gate drive circuit 101 includes the gate resistance control circuit 40 between the power semiconductor element 10 and the first switching circuit 22, so that the deep off-bias Vneg applied to the gate of the power semiconductor element 10 can be adjusted. It is possible to further shorten the period. Furthermore, the reliability of the power semiconductor device 10 is further improved by speeding up the switching from the shallow off-bias Vs to the deep off-bias Vneg.
  • Embodiment 3 In Embodiment 3, a configuration of a switching circuit that is different from Embodiment 1 will be described.
  • FIG. 6 is a block diagram for explaining the functions of gate drive circuit 100# of the power semiconductor device according to the third embodiment.
  • gate drive circuit 100# replaces gate voltage control circuit 20 with gate voltage control circuit 20#, and replaces off-bias voltage control circuit 30 with off-bias voltage control circuit 20#. The difference is that it is replaced with circuit 30#.
  • the other configurations are the same as the gate drive circuit 100 according to the first embodiment, so detailed description thereof will not be repeated.
  • Gate voltage control circuit 20# differs from gate voltage control circuit 20 in that first control circuit 21 is replaced with first control circuit 21#, and first switching circuit 22 is replaced with first switching circuit 22#. different.
  • the off-bias voltage control circuit 30# has the second control circuit 31 replaced with a second control circuit 31#, and the second switching circuit 32 replaced with a second switching circuit 32#.
  • the points are different.
  • the first switching circuit 22# includes a PMOSFET 22P on the high side and an NMOSFET 22N on the low side.
  • PMOSFET 22P and NMOSFET 22N are connected in series.
  • PMOSFET 22P is connected to a positive voltage source Vdd and connected to an output node.
  • the NMOSFET 22N is connected to the output node and the output node of the second switching circuit 32.
  • the second switching circuit 32# includes a PMOSFET 32P on the high side and an NMOSFET 32N on the low side.
  • PMOSFET32P and NMOSFET32N are connected in series.
  • PMOSFET 32P is connected to the source electrode of power semiconductor element 10 and to the output node.
  • the output node is connected to first switching circuit 22#.
  • NMOSFET 32N is connected to the output node and negative voltage source Vneg. It can be said that the switching circuit according to the third embodiment is particularly effective for a power converter device to which a wide bandgap semiconductor is applied, for example, and applied to high frequency drive applications.
  • CMOS circuit composed of PMOSFET 22P and NMOSFET 22N, PMOSFET 32P and NMOSFET 32N according to Embodiment 3 will be described.
  • the output lines of the PMOSFET 22P and NMOSFET 22N swing between the power supply voltage Vdd applied to the high side of the PMOSFET 22P and the low side potential (shallow off-bias Vs or deep off-bias Vneg). Furthermore, a constant driving capability can be obtained regardless of the difference between the input voltage from the power supply voltage and the output voltage of the output line. With such a drive output, it is possible to realize gate drive circuit 100# that has high drive capability and high stability.
  • the swing range of the output line is narrowed by the gate threshold voltage of the transistor elements of the upper and lower arms.
  • the output of the push-pull circuit becomes a floating state, resulting in unstable operation.
  • Gate drive circuit 100# can achieve high drive capability and stable operation by realizing the switching circuit with a CMOS circuit. These effects are expected to improve the characteristics of the power semiconductor device 10 and lead to suppression of oscillation caused by fluctuations in gate potential.
  • CMOS circuits Although the advantages of CMOS circuits have been described above, there are also disadvantages of CMOS circuits.
  • a through current may flow between the high-side power supply voltage and the low-side reference potential.
  • the power consumption of the gate drive circuit 100 may increase due to the flow of this through current.
  • An increase in power consumption means that it is unsuitable for high-frequency drive operation, which contradicts the above-mentioned merits.
  • a dead time period between the upper and lower arms may be generated at the stage before the PMOSFET 22P, NMOSFET 22N, and PMOSFET 32P, NMOSFET 32N.
  • a dead time period By providing an appropriate dead time period, it is possible to reduce the through current flowing into the CMOS circuit.
  • the signals applied to the gates of PMOSFET22P, NMOSFET22N and PMOSFET32P, NMOSFET32N may be controlled independently.
  • FIG. 7 is a diagram illustrating a specific configuration of first control circuit 21# and second control circuit 31# according to the third embodiment.
  • the basic element configuration is the same as that of the first control circuit 21 and the second control circuit 31 shown in FIG. 2, so repeated explanation will be omitted.
  • first control circuit 21# includes a control section 21A# and a delay circuit 21B#.
  • the second control circuit 31# includes delay circuits 31A#, 31B#, an inverter IV, an AND circuit AD, and an OR circuit OR.
  • the AND circuit AD receives the external drive signal IN2 via the delay circuit 31B# and the inverter IV, and the external drive signal IN2 not via any element or additional circuit, etc., and outputs the AND logical operation result to the OR circuit OR.
  • the OR circuit OR receives the external drive signal IN1 via the delay circuit 31A# and the input of the AND circuit AD, and outputs an OR logical operation result.
  • Delay circuits 31A# and 31B# are delay circuits that generate delayed signals.
  • it may be composed of an RC filter, which is a general delay time adjustment circuit, and it is even better to include a Schmitt trigger element for adjusting the transmission signal. Note that the delay amounts of delay circuits 31A# and 31B# can be adjusted to be different.
  • the OR circuit OR outputs an off-bias voltage control signal (“1”) when the power semiconductor device 10 is in a steady state with no switching operation, and an off-bias voltage control signal (“0”) when it is in a steady state with no switching operation. Output.
  • PMOSFET 32P of second switching circuit 32# repeats on and off operations at a constant cycle.
  • OR circuit OR maintains an output of "1" for a period proportional to the amount of delay of delay circuit 31A#.
  • the OR circuit OR turns on the NMOSFET 32N of the second switching circuit 32# in response to the output maintenance period of "1".
  • AND circuit AD outputs a one-shot pulse signal proportional to the amount of delay of delay circuit 31B#.
  • the OR circuit OR turns on the NMOSFET 32N of the second switching circuit 32# in response to the period of the one-shot pulse signal.
  • the first control circuit 21 included in the gate voltage control circuit 20 includes a PMOSFET 22P and the NMOSFET 22N
  • the second control circuit 31 included in the off-bias voltage control circuit 30 includes a PMOSFET 32P and an NMOSFET 32N.
  • Embodiment 4 In Embodiment 4, another form of controlling the off-bias level applied to the gate of the power semiconductor element 10 will be described.
  • FIG. 8 is a diagram illustrating the waveform of the gate voltage Vgs of the SiC-MOSFET to which the gate drive circuit 100 of the present disclosure is applied.
  • the gate on bias is set to +20V
  • the shallow off bias Vs is set to 0V
  • the deep off bias Vneg is set to -5V. All driving conditions were the same except for the period of deep off-bias Vneg.
  • Waveform LA is shown with a shorter off-bias application period than waveform LB. That is, these waveforms have different periods of deep off-bias Vneg.
  • the period of deep off-bias Vneg is adjusted.
  • the delay amount of the delay circuit is adjusted and the off-bias application period is adjusted.
  • the period of deep off-bias Vneg can be set to a short period. It is possible to do so. This makes it possible to further reduce stress on the gate oxide film.
  • Embodiment 5 In the fifth embodiment, another mode regarding the operation of the gate drive circuit 100 including the gate resistance control circuit 40 according to the second embodiment will be described.
  • FIG. 9 is a diagram illustrating a timing chart when the gate drive circuit 101 according to the fifth embodiment controls the gate of the power semiconductor element.
  • gate drive circuit 101 according to the fifth embodiment and gate drive circuit 100 according to the second embodiment are the same, detailed description thereof will not be repeated.
  • the gate voltage Vgs of the power semiconductor element 10 is quickly switched from the deep off-bias Vneg to the shallow off-bias Vs.
  • the time for applying the deep off-bias Vneg to the gate of the power semiconductor element 10 is reliably shortened.
  • the time tb4 at which the bypass switching element 42 is turned on is set to be between the time when the turn-on operation of the opposing arm element of the power semiconductor element 10 ends and the time t4. With this setting, it is possible to suppress the vibration of the gate of the power semiconductor element 10 during the turn-on period of the opposing arm element, and to avoid the possibility of causing erroneous firing. Further, it is possible to obtain the effect of shortening the application time of the deep off-bias Vneg of the power semiconductor element 10.
  • This embodiment can be realized by providing additional elements to the configuration of FIG. 4.
  • the additional elements are provided with a function of controlling the gate resistance control circuit 40 so that the value of the gate resistance 41 becomes small and determining the time tb3 which is the timing of the turn-on operation of the bypass switching element 42.
  • time tb4 is determined by utilizing the timing information of time ton, which is the timing of the turn-on operation of the opposing arm element of the power semiconductor element 10.
  • timing information at time ton by providing an overvoltage detection circuit or a voltage change rate dVds/dt detection circuit between the drain electrode and source electrode of the power semiconductor element 10.
  • the gate current detection circuit may be connected in series so as to be adjacent to the gate resistance control circuit 40.
  • the second control circuit 31 included in the off-bias voltage control circuit 30 may be provided with a state timer whose time has been set in advance.
  • the time tb4 may be set by conducting a preliminary experiment, for example, by measuring the time required for the opposing arm element turn-on operation of the power semiconductor element 10.
  • a timing at which the bypass switching element 42 included in the gate resistance control circuit 40 performs a turn-on operation is added to the configuration according to the second embodiment. Thereby, it is possible to more suitably shorten the application time of the deep off-bias Vneg applied to the gate of the power semiconductor element 10.
  • Embodiment 6 In the sixth embodiment, the configuration of the integrated drive circuit 102 will be described.
  • FIG. 10 is a block diagram for explaining the functions of the integrated drive circuit 102 according to the sixth embodiment.
  • integrated drive circuit 102 compared to gate drive circuit 100, includes two drive circuits, gate drive circuit 100P and gate drive circuit 100N, and these two gate drive circuits The point is that it is an integrated circuit with a built-in circuit.
  • the integrated type is, for example, an integrated upper and lower arm in which power semiconductor elements are connected in series, and as shown in Figure 10, it has a half-bridge circuit configuration that is often seen in power modules in which power semiconductor elements are packaged in a 2-in-1 package. It is possible to apply it to
  • a power semiconductor element 10P and a power semiconductor element 10N connected in series are used as a single drive circuit called an integrated drive circuit 102 to drive the power semiconductor elements of the upper and lower arms.
  • the input signals are external drive signal IN1 and external drive signal IN2.
  • the external drive signal IN is set to "1" during the period when the corresponding power semiconductor element is to be turned on, and the external drive signal IN is set to "1" during the period when the corresponding power semiconductor element is to be turned off.
  • IN may be a logic-based pulse signal set to "0".
  • the external drive signal IN1 controls the gate of the power semiconductor element 10P of the upper arm element and is input to the gate voltage control circuit 20P.
  • the external drive signal IN2 controls the gate of the power semiconductor element 10N of the lower arm element and is input to the gate voltage control circuit 20N.
  • the off-bias voltage control circuit 30P receives an external drive signal IN2 that informs the turn-on timing of the power semiconductor element 10N of the lower arm element, which is the opposing arm element.
  • the off-bias voltage control circuit 30N receives an external drive signal IN1 that informs the turn-on timing of the power semiconductor element 10P of the upper arm element, which is the opposing arm element.
  • the gate drive circuit 100P and the gate drive circuit 100N included in the integrated drive circuit 102 basically have the same circuit configuration, but there are variations in element characteristics between the power semiconductor elements 10P and 10N of the upper and lower arm elements. If it exists, it may be finely adjusted internally by off-bias voltage control circuits 30P and 30N. For example, by adjusting the timing of deep off-bias Vneg and shallow off-bias Vs for off-bias voltage control circuit 30P and off-bias voltage control circuit 30N, more suitable operation of the power semiconductor element can be realized.
  • the external drive signal IN1 and the external drive signal IN2 are, for example, an insulating element such as a photocoupler or an isolation transformer, or a gate voltage control circuit 20P, a gate voltage control circuit 20N, and an off-bias voltage control circuit 30P.
  • An isolation element with sufficient dielectric strength is provided inside the off-bias voltage control circuit 30N.
  • the isolation element may be an isolator IC with multiple inputs and multiple outputs, and in such a configuration, the isolation process can be shared between the gate voltage control circuit 20P and the off-bias voltage control circuit 30P.
  • the positive voltage source Vdd_P supplied to the gate drive circuit 100P is always an insulated power source, and the potential of the positive voltage source Vdd_P is a floating potential with respect to the ground potential. Further, the deep off-bias Vneg_P and the shallow off-bias Vs_P provided inside the gate drive circuit 100P are also at floating potential with respect to the ground potential. Since the positive voltage source Vdd_P is a floating power source, an arbitrary potential may be generated using, for example, a three-terminal regulator to generate an appropriate deep off-bias Vneg_P and shallow off-bias Vs_P.
  • the configuration of a half-bridge circuit will be described, but the method according to the fifth embodiment is also applicable to a power module for a three-phase inverter in which power semiconductor elements are packaged in a 6-in-1 package, for example.
  • the configuration according to the sixth embodiment includes an integrated drive circuit 102 that integrates the drive circuits of the upper and lower arms in order to drive the upper and lower arm elements in the half bridge circuit of the power converter.
  • an integrated drive circuit 102 that integrates the drive circuits of the upper and lower arms in order to drive the upper and lower arm elements in the half bridge circuit of the power converter.
  • Embodiment 7 is an example in which the power conversion device according to the embodiment described above is applied to a power conversion system. Although the present disclosure is not limited to a specific power conversion device, a case where the present disclosure is applied to a three-phase inverter will be described below as a seventh embodiment.
  • FIG. 11 is a block diagram showing the configuration of a power conversion system according to the seventh embodiment.
  • the power conversion system according to the seventh embodiment includes a power supply 1000, a power conversion device 1001, and a load 1004.
  • Power supply 1000 is a DC power supply and supplies DC power to power conversion device 1001.
  • the power source 1000 can be composed of various things, for example, it can be composed of a DC system, a solar cell, a storage battery, or it can be composed of a rectifier circuit or an AC/DC converter connected to an AC system. Good too. Further, the power supply 1000 may be configured with a DC/DC converter that converts DC power output from a DC system into predetermined power.
  • the power conversion device 1001 is a three-phase inverter connected between a power source 1000 and a load 1004, converts DC power supplied from the power source 1000 into AC power, and supplies the AC power to the load 1004.
  • Power conversion device 1001 includes a main conversion circuit 1002 that converts DC power into AC power and outputs the same, and a control circuit 1003 that outputs a control signal for controlling main conversion circuit 1002 to main conversion circuit 1002.
  • the load 1004 is a three-phase electric motor driven by AC power supplied from the power conversion device 1001. Note that the load 1004 is not limited to a specific application, but is a motor installed in various electrical devices, and is used, for example, as a motor for a hybrid vehicle, an electric vehicle, a railway vehicle, an elevator, or an air conditioner.
  • the main conversion circuit 1002 includes a power semiconductor element and a freewheeling diode (not shown), and converts DC power supplied from the power supply 1000 into AC power by switching the power semiconductor element, and converts the DC power supplied from the power supply 1000 into AC power, supply to.
  • the main conversion circuit 1002 is a two-level three-phase full bridge circuit, and includes six power semiconductor elements and each power It can be constructed from six freewheeling diodes arranged antiparallel to the semiconductor element.
  • the six power semiconductor elements are connected in series every two power semiconductor elements to constitute upper and lower arms, and each upper and lower arm constitutes each phase (U phase, V phase, W phase) of the full bridge circuit.
  • the output terminals of each of the upper and lower arms, that is, the three output terminals of the main conversion circuit 1002 are connected to a load 1004.
  • main conversion circuit 1002 it is possible to apply the gate drive circuit described in Embodiments 1 to 6 that drives each power semiconductor element.
  • the gate drive circuit generates a gate control signal that drives the power semiconductor element of the main conversion circuit 1002 and supplies it to the control electrode of the power semiconductor element of the main conversion circuit 1002.
  • the control circuit 1003 outputs an external drive signal that turns the power semiconductor element on and an external drive signal that turns the power semiconductor element off to the control electrode of each power semiconductor element.
  • the external drive signal is a voltage signal (on signal) that is higher than the threshold voltage of the power semiconductor element
  • the external drive signal is the voltage signal that is higher than the threshold voltage of the power semiconductor element. becomes a voltage signal (off signal) below the threshold voltage of .
  • the control circuit 1003 controls the power semiconductor elements of the main conversion circuit 1002 so that the desired power is supplied to the load 1004. Specifically, the time (on time) during which each power semiconductor element of the main conversion circuit 1002 should be in the on state is calculated based on the power to be supplied to the load 1004. For example, the main conversion circuit 1002 can be controlled by PWM control that modulates the on-time of the power semiconductor element according to the voltage to be output. Then, the gate drive circuit included in the main conversion circuit 1002 is controlled so that an on signal is output to the power semiconductor element that should be in the on state at each time, and an off signal is output to the power semiconductor element that is to be in the off state. Outputs commands (external drive signals).
  • the present disclosure is not limited to this and can be applied to various power conversion devices.
  • a two-level power converter is used, but a three-level or multi-level power converter may be used, and when supplying power to a single-phase load, the present disclosure may be applied to a single-phase inverter. May be applied.
  • the present disclosure can also be applied to a DC/DC converter or an AC/DC converter.
  • the power conversion device to which the present disclosure is applied is not limited to cases where the above-mentioned load is an electric motor. It can also be used as a power conditioner for solar power generation systems, power storage systems, etc.
  • 10, 10N, 10P power semiconductor element 20, 20N, 20P gate voltage control circuit, 21 first control circuit, 22 first switching circuit, 30, 30N, 30P off-bias voltage control circuit, 31 second control circuit, 32 2nd switching circuit, 40 gate resistance control circuit, 41 gate resistance, 42 bypass switching element, 100, 100N, 100P, 101 gate drive circuit, 102 integrated drive circuit, 1000 power supply, 1001 power conversion device, 1002 main conversion circuit , 1003 Control circuit, 1004 Load.

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WO2025182389A1 (ja) * 2024-03-01 2025-09-04 ミネベアパワーデバイス株式会社 半導体装置の駆動回路および電力変換装置

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JP2004015974A (ja) * 2002-06-11 2004-01-15 Tdk Corp スイッチング電源装置
JP2015012624A (ja) * 2013-06-26 2015-01-19 株式会社デンソー 駆動回路
JP2020182334A (ja) * 2019-04-25 2020-11-05 株式会社デンソー 駆動回路

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JP3770008B2 (ja) * 1999-11-05 2006-04-26 株式会社日立製作所 半導体電力変換装置
JP5130310B2 (ja) * 2010-03-17 2013-01-30 日立アプライアンス株式会社 電圧駆動型半導体素子のゲート駆動回路及び電力変換装置
JP5827609B2 (ja) * 2012-09-27 2015-12-02 株式会社豊田中央研究所 駆動回路
JP6904091B2 (ja) * 2017-06-21 2021-07-14 富士電機株式会社 ゲート駆動回路およびインバータ装置

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JP2004015974A (ja) * 2002-06-11 2004-01-15 Tdk Corp スイッチング電源装置
JP2015012624A (ja) * 2013-06-26 2015-01-19 株式会社デンソー 駆動回路
JP2020182334A (ja) * 2019-04-25 2020-11-05 株式会社デンソー 駆動回路

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WO2025182389A1 (ja) * 2024-03-01 2025-09-04 ミネベアパワーデバイス株式会社 半導体装置の駆動回路および電力変換装置

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