WO2023286114A1 - 測距装置 - Google Patents

測距装置 Download PDF

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Publication number
WO2023286114A1
WO2023286114A1 PCT/JP2021/026104 JP2021026104W WO2023286114A1 WO 2023286114 A1 WO2023286114 A1 WO 2023286114A1 JP 2021026104 W JP2021026104 W JP 2021026104W WO 2023286114 A1 WO2023286114 A1 WO 2023286114A1
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WO
WIPO (PCT)
Prior art keywords
light
emitted
distance measuring
measuring device
lights
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/026104
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
彰太 中原
正幸 大牧
菜月 本田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to US18/574,079 priority Critical patent/US20240329204A1/en
Priority to JP2023534438A priority patent/JP7471525B2/ja
Priority to DE112021007951.4T priority patent/DE112021007951T5/de
Priority to PCT/JP2021/026104 priority patent/WO2023286114A1/ja
Publication of WO2023286114A1 publication Critical patent/WO2023286114A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/87—Combinations of systems using electromagnetic waves other than radio waves

Definitions

  • the present disclosure relates to a rangefinder.
  • a distance measuring device that calculates the distance to an object to be measured based on the time from the time the light is emitted to the time the reflected light from the object to be measured is received.
  • vehicle-mounted rangefinders are used to detect obstacles in advance, they are required to detect obstacles in a wide-angle field of view.
  • one scanning device that scans laser light, a plurality of light source units that emit laser light, and a return light that is reflected light from an object to be measured are received.
  • a rangefinding beam irradiation device having a plurality of light receiving elements has been proposed.
  • This apparatus includes a light source section for making a plurality of laser beams incident on a scanning device at different angles of incidence, and a plurality of light receiving elements arranged at positions corresponding to the angles of incidence of the plurality of laser beams. It is possible to scan the laser light at a wider scanning angle than the scanning angle corresponding to the rotation angle of the device and to receive the return light.
  • JP 2015-125109 A paragraphs 0082 to 0083, FIG. 13
  • the present disclosure has been made to solve the above-described problems, and aims to provide a distance measuring device capable of improving ease of mounting a plurality of light receiving elements.
  • a distance measuring device includes a light emitting unit that emits a plurality of emitted light beams, a plurality of separating optical units, and a plurality of light beams that travel from the plurality of light emitting units through the plurality of separating optical units and have different incident angles.
  • a scanning optical unit that scans the plurality of emitted light beams incident on the scanning optical unit; and return light that is reflected light from the irradiated area of the plurality of scanned emitted light beams, the return light being reflected by the scanning optical unit and reflected by the plurality of It is characterized by having a plurality of light-receiving elements that respectively receive the plurality of return lights that travel through the separation optical section, and a base member that holds the plurality of light-receiving elements and the plurality of separation optical sections.
  • FIG. 1 is a front perspective view schematically showing a distance measuring device according to Embodiment 1;
  • FIG. 1 is a rear perspective view schematically showing a distance measuring device according to Embodiment 1;
  • FIG. FIG. 2 is a cross-sectional view of the distance measuring device of FIG. 1 taken along line III-III;
  • FIG. 2 is a cross-sectional view of the range finder of FIG. 1 taken along line IV-IV;
  • FIG. 2 is a cross-sectional view of the range finder of FIG. 1 taken along line VV;
  • 2 is a diagram showing the structure of the optical system of the distance measuring device according to Embodiment 1 and the optical paths of outgoing light and return light;
  • FIG. 4 is a diagram showing a ranging area corresponding to a scanning range of the ranging device according to Embodiment 1;
  • FIG. FIG. 11 is a front perspective view schematically showing a distance measuring device according to Embodiment 2;
  • FIG. 11 is a rear perspective view schematically showing a distance measuring device according to Embodiment 2;
  • FIG. 9 is a cross-sectional view along line SX-SX of the distance measuring device of FIG. 8;
  • FIG. 10 is a diagram showing the structure of an optical system and the optical paths of emitted light and return light of a distance measuring device according to Embodiment 2;
  • FIG. 10 is a diagram showing the structure of an optical system and the optical paths of emitted light and return light of a distance measuring device according to Embodiment 3;
  • FIG. 11 is a block diagram schematically showing the configuration of a ranging system according to a modification;
  • a distance measuring device will be described below with reference to the drawings.
  • the following embodiments are merely examples, and the embodiments can be combined as appropriate and each embodiment can be modified as appropriate.
  • the drawing also shows the coordinate axes of the XYZ orthogonal coordinate system.
  • the Z direction is the direction of the center of the range-finding area where the object to be measured by the range-finding device exists.
  • the +Z direction is the traveling direction (i.e., forward) of the central ray of the emitted light when the central emitted light of the three emitted lights emitted from the rangefinder is scanning in the central direction of the scanning range. be.
  • the -Z direction is the traveling direction of the return light, which is the reflected light from the measurement object when the central emitted light of the three emitted lights emitted from the measurement object is scanning in the center direction of the scanning range ( i.e. backward).
  • the Y direction is the vertical direction of the rangefinder.
  • the +Y direction is the upward direction of the range finder, and the -Y direction is the downward direction of the range finder.
  • the X direction is the horizontal direction of the range finder and is the direction perpendicular to both the Y and Z directions.
  • the distance measuring device 1a includes a plurality of light emitting units 101, 102, 103 that generate a plurality of emitted light beams E1, E2, E3, respectively, and a scanning device 5, which is a scanning optical unit. , a plurality of separation mirrors SP1, SP2, and SP3 as a plurality of separation optical units, a light receiving substrate 200 provided with a plurality of light receiving elements, and a plurality of second deflection mirrors as a plurality of second deflection optical members. It includes MB1, MB2, MB3 and a base member 2.
  • the distance measuring device 1a also includes light receiving units 201, 202, and 203, which will be described later. Further, the distance measuring device 1a can contain all the components of the optical system in a housing that is open in the +Z direction. In Embodiment 1, the description of the housing is omitted.
  • the distance measuring device 1a is installed, for example, in front of the vehicle, detects an object to be measured in front of the vehicle, and measures the distance to the object to be measured.
  • the distance measuring device 1a emits light toward an object to be measured (that is, an object to be measured) while scanning light, and receives the light reflected by the object to be measured, thereby measuring the distance from the object to the distance measuring device 1a.
  • the base member 2 holds and fixes the parts.
  • the fixed component is the optical system of the distance measuring device 1a (that is, the optical system of the optical device for distance measurement).
  • the base member 2 fixes each component with an adhesive, screws, or the like.
  • the base member 2 may be composed of a plurality of parts.
  • the base member 2 is composed of a rear base portion 3 and a front base portion 4 .
  • the configuration of the base member 2 may be another configuration.
  • FIG. 3 is a cross-sectional view of the distance measuring device 1a of FIG. 1 taken along line III-III.
  • FIG. 4 is a cross-sectional view of the distance measuring device 1a of FIG. 1 taken along line IV-IV.
  • FIG. 5 is a cross-sectional view of the distance measuring device 1a of FIG. 1 along line VV.
  • FIG. 6 is a diagram showing the structure of the optical system of the distance measuring device 1a according to Embodiment 1 and the optical paths of outgoing light and return light.
  • the light emitting units 101, 102, 103 respectively include light source units LD1, LD2, LD3, emitting optical systems CA1, CA2, CA3, and emitting optical systems CB1, CB2, CB3.
  • Light emitting units 101, 102, and 103 emit emitted light beams E1, E2, and E3, respectively.
  • light emitting portions 101 , 102 and 103 are arranged in the X direction and fixed to the upper surface of rear base portion 3 .
  • the light emitting section 102 is arranged at the center of the distance measuring device 1a in the X direction.
  • the light emitting portions 101 and 103 are arranged in the -Z direction and the +Z direction of the light emitting portion 102, respectively.
  • the arrangement interval between the light emitting portions 101 and 102 and the arrangement interval between the light emitting portions 101 and 103 are equal.
  • the light source units LD1, LD2, and LD3 emit light.
  • the light source units LD1, LD2, and LD3 are laser light sources, and emitted light is laser light.
  • the wavelengths of light generated by the light source units LD1, LD2, and LD3 are, for example, 870 nm to 1600 nm.
  • Emission optical systems CA1, CA2, and CA3 and emission optical systems CB1, CB2, and CB3 collimate or converge the lights generated by the light source sections LD1, LD2, and LD3, respectively, and output light. E1, E2 and E3 are emitted.
  • Each of the emission optical systems CA1, CA2, CA3 and each of the emission optical systems CB1, CB2, CB3 is composed of, for example, a convex lens, a cylindrical lens, or a toroidal lens.
  • Each of the emission optical systems CA1, CA2, CA3 and each of the emission optical systems CB1, CB2, CB3 may be configured with a plurality of optical components such as a plurality of lenses, or may be omitted. Part or all of the emission optical systems CA1, CA2, CA3 and the emission optical systems CB1, CB2, CB3 may be fixed to the base member 2.
  • the emission optical systems CA1, CA2 and CA3 and the emission optical systems CB1, CB2 and CB3 are arranged on a straight line in the -Y direction passing through the light source units LD1, LD2 and LD3, respectively. , and emitted light beams E1, E2, and E3 in the -Y direction.
  • the emission optical systems CA1, CA2 and CA3 are fixed to the light emission sections 101, 102 and 103, respectively.
  • the output optical systems CB1, CB2, and CB3 are fixed to the rear base portion 3. As shown in FIG.
  • the scanning device 5 reflects the emitted lights E1, E2, and E3 emitted from the light emitting sections 101, 102, and 103 by the scanning mirror 6, and emits them from the inside of the rangefinder 1a to the outside.
  • the scanning device 5 rotates the scanning mirror 6 around a rotation axis TH, which is at least one rotation axis.
  • the scanning device 5 may rotate around another rotation axis (for example, the rotation axis in the X direction) that is orthogonal to the rotation axis TH.
  • the scanning device 5 may have both the function of rotating around the rotation axis TH and the function of rotating around another rotation axis orthogonal to the rotation axis TH.
  • the scanning device 5 may rotate the scanning mirror 6 around two orthogonal rotation axes.
  • the scanning device 5 can horizontally scan the emitted light beams E1, E2, and E3 by rotating the scanning mirror 6 around the first rotation axis TH.
  • the scanning device 5 can vertically scan the emitted lights E1, E2, and E3 by rotating the scanning mirror 6 around the second rotation axis.
  • the scanning device 5 is, for example, a MEMS (Micro Electro Mechanical Systems) mirror or a gimbal-type mirror actuator.
  • the scanning device 5 reflects the emitted light E2 and emits it in the +Z direction when the scanning mirror 6 is in the neutral position of the rotation operation.
  • the scanning device 5 is arranged such that the scanning mirror 6 is at the center position of the rangefinder 1a in the X direction, and rotates around the +X axis with respect to the YX plane (that is, , clockwise about the X-axis when facing the +X direction), the output reflected by the scanning mirror 6 is fixed to the front base 4 at the neutral position of the rotational movement of the scanning mirror 6.
  • the emitted light E2 is directed in the +Z direction.
  • the emitted light E2 is horizontally scanned by rotating the scanning mirror 6 about the rotation axis TH.
  • the separation mirrors SP1, SP2, and SP3 respectively reflect the emitted lights E1, E2, and E3, and transmit the return lights R1, R2, and R3, which are reflected lights reflected by the measurement object.
  • the separation mirrors SP1, SP2, and SP3 are, for example, mirrors provided with reflection regions only in the portions irradiated with the emitted light beams E1, E2, and E3, or have external shapes with only the portions irradiated with the emitted light beams E1, E2, and E3. or a mirror that partially transmits and partially reflects the emitted lights E1, E2, and E3.
  • the separation mirrors SP1, SP2, and SP3 are configured to reflect the emitted lights E1, E2, and E3 emitted from the light emitting sections 101, 102, and 103, respectively, and guide them to the scanning mirror 6.
  • the emitted light beams E1, E2, and E3 reflected by the separation mirrors SP1, SP2, and SP3 may pass through a plurality of mirrors before reaching the scanning mirror 6, preferably through the second deflection mirrors MB1, MB2, and MB3. reaches the scanning mirror 6 via .
  • the return lights R1, R2, and R3 transmitted through the separation mirrors SP1, SP2, and SP3 are configured to travel toward the light receiving sections 201, 202, and 203, respectively.
  • the light emitting portions 101, 102, and 103, the scanning device 5, and the light receiving portions 201, 202, and 203 are configured so that the emitted light beams E1, E2, and E3 and the returned light beams R1, R2, and R3 are partially coaxial. constitutes an optical system. Therefore, it becomes difficult for the ambient light to enter the light receiving units 201, 202, and 203, and the S/N ratio of the range finder 1a to the ambient light can be improved.
  • the separation mirrors SP1, SP2, and SP3 are arranged in the -Y direction of the light emitting sections 101, 102, and 103, and are arranged around the -X axis with respect to the YX plane (that is, in the -X direction). are fixed to the rear base portion 3 while being equally inclined (clockwise around the X-axis in the case).
  • the separation mirrors SP1, SP2, and SP3 deflect the emitted light beams E1, E2, and E3 by a predetermined angle in the +Y direction and the -Z direction (that is, in a direction between the +Y direction and the -Z direction). and lead to the second deflecting mirrors MB1, MB2, MB3.
  • the second deflecting mirrors MB1, MB2, MB3 are configured to reflect the emitted lights E1, E2, E3 deflected by the separating mirrors SP1, SP2, SP3, respectively, and guide them to the scanning mirror 6.
  • the second deflecting mirrors MB1, MB2, and MB3 are arranged at positions in the +Z direction from the scanning mirror 6.
  • the second deflection mirror MB2 is fixed to the front base portion 4 so as to be inclined with respect to the YX plane around the +X axis (that is, clockwise around the X axis when facing in the +X direction).
  • the second deflecting mirror MB2 deflects the emitted light E2 by a predetermined angle in the +Y direction and the -Z direction (that is, in the direction between the +Y direction and the -Z direction) and guides it to the scanning mirror 6. ing.
  • the second deflection mirror MB1 rotates around the +X axis and around the -Y axis with respect to the YX plane (that is, rotates clockwise about the X axis when facing the +X direction and rotates in the -Y direction). It is fixed to the front base portion 4 with an inclination (clockwise around the Y axis when facing). As a result, the second deflecting mirror MB1 deflects the emitted light E1 by a predetermined angle in the +Y direction, the -Z direction, and the +X direction (that is, the emitted light E1 is in the +Y direction, the -Z direction, and the +X direction). ) and directed to the scanning mirror 6 .
  • the second deflection mirror MB3 rotates around the +X axis and around the +Y axis with respect to the YX plane (that is, rotates clockwise about the X axis when facing the +X direction and faces the +Y direction). clockwise about the Y-axis in the case) and fixed to the front base portion 4. As shown in FIG. As a result, the second deflecting mirror MB3 deflects the emitted light E3 by a predetermined angle in the +Y direction, the -Z direction and the -X direction (that is, in the direction between the +Y direction, the -Z direction and the -X direction). It is deflected and led to scanning mirror 6 .
  • the light receiving sections 201, 202, and 203 include light receiving elements PD1, PD2, and PD3, aperture sections AP1, AP2, and AP3 each having an aperture (that is, an opening) and a light shielding section in which the opening is formed, and an optical filter. It comprises BPF1, BPF2 and BPF3, first deflecting mirrors MA1, MA2 and MA3, and light receiving and condensing optical systems CL1, CL2 and CL3.
  • the light-receiving elements PD1, PD2, and PD3 are mounted on a light-receiving substrate 200, which is a common mounting substrate.
  • the light receiving units 201, 202, and 203 respectively receive the return lights R1, R2, and R3, and output detection signals corresponding to the intensities of the return lights R1, R2, and R3.
  • the light receiving elements PD1, PD2, and PD3 are configured to detect the return lights R1, R2, and R3, respectively.
  • the light receiving elements PD1, PD2, and PD3 are, for example, photodiodes, avalanche photodiodes, or silicon photomultipliers.
  • the light-receiving substrate 200 is a substrate on which light-receiving elements PD1, PD2, and PD3 are mounted.
  • the light-receiving substrate 200 monitors and outputs detection signals corresponding to the light detected by the light-receiving elements PD1, PD2, and PD3.
  • the light receiving and condensing optical systems CL1, CL2, and CL3 are configured to converge the return lights R1, R2, and R3, respectively.
  • the light receiving and condensing optical systems CL1, CL2, and CL3 are, for example, lenses, mirrors, or combinations thereof.
  • the light receiving and condensing optical systems CL1, CL2, and CL3, for example, converge the return lights R1, R2, and R3 on the light receiving elements PD1, PD2, and PD3, respectively, and irradiate them.
  • the light receiving and condensing optical systems CL1, CL2, and CL3, for example, converge the return lights R1, R2, and R3, respectively, with the openings of the aperture portions AP1, AP2, and AP3 as focal points.
  • the aperture portions AP1, AP2, and AP3 have openings for passing light, and block part of the return lights R1, R2, and R3 incident on the light-receiving elements PD1, PD2, and PD3. configured to determine the light receiving viewing angle of 1a.
  • the aperture portions AP1, AP2, and AP3 can also be configured integrally with the rear base portion 3. As shown in FIG. Also, the aperture parts AP1, AP2, and AP3 can be omitted.
  • the optical filters BPF1, BPF2, and BPF3 are arranged to set the wavelength bands of the return lights R1, R2, and R3 incident on the light receiving elements PD1, PD2, and PD3.
  • the optical filters BPF1, BPF2, and BPF3 transmit light in the wavelength band of light emitted from the light sources LD1, LD2, and LD3, and remove light in other wavelengths.
  • the optical filters BPF1, BPF2, and BPF3 are, for example, absorption filters or dichroic filters.
  • the optical filters BPF1, BPF2 and BPF3 may be omitted.
  • the first deflection mirrors MA1, MA2 and MA3 are configured to reflect the return lights R1, R2 and R3 in the same direction and guide them to the light receiving elements PD1, PD2 and PD3, respectively. That is, the return lights R1, R2 and R3 traveling from the first deflecting mirrors MA1, MA2 and MA3 to the light receiving elements PD1, PD2 and PD3 are parallel to each other. As a result, the directions of the light receiving surfaces of the light receiving elements PD1, PD2, and PD3 can be made the same.
  • the light-receiving elements PD1, PD2, and PD3 are mounted on the surface of the light-receiving substrate 200 facing the -Y direction.
  • the light receiving substrate 200 is fixed to the upper surface of the rear base portion 3 .
  • the light receiving elements PD1, PD2, and PD3 are arranged at the same position in the Y direction, and arranged to receive return lights R1, R2, and R3 traveling in the +Y direction, respectively.
  • the aperture portions AP1, AP2 and AP3 are fixed to the rear base portion 3 at positions in the -Y direction of the light receiving elements PD1, PD2 and PD3, respectively.
  • the optical filters BPF1, BPF2, and BPF3 are fixed to the rear base portion 3 at positions in the -Y direction of the aperture portions AP1, AP2, and AP3, respectively, in the same direction.
  • the first deflecting mirrors MA1, MA2 and MA3 are arranged to form virtual straight lines extending from the light receiving elements PD1, PD2 and PD3 in the -Y direction and the return lights R1, R2 and R3 transmitted through the separation mirrors SP1, SP2 and SP3, respectively. is placed at the intersection of This placement location is the corner end of the portion facing the outside of the rear base portion 3 (that is, the end in the -Y direction and the -Z direction).
  • the first deflection mirrors MA1, MA2, and MA3 are tilted equally around the -X axis with respect to the YX plane (that is, clockwise around the X axis when facing the -X direction). 3 is fixed. As a result, the first deflection mirrors MA1, MA2 and MA3 deflect the return lights R1, R2 and R3 in the +Y direction and guide them to the light receiving elements PD1, PD2 and PD3. Furthermore, the first deflecting mirrors MA1, MA2, MA3 are arranged at the same position in the Z direction, at the same position in the Y direction, and arranged side by side in the X direction. Furthermore, the light receiving and condensing optical systems CL1, CL2, and CL3 are arranged between the first deflection mirrors MA1, MA2, and MA3 and the separation mirrors SP1, SP2, and SP3, respectively, and are fixed to the rear base portion 3. .
  • the rear base portion 3 has an inner wall 23, which separates the optical path area of the outgoing light beams E1, E2, and E3 from the optical path area of the return light beams R1, R2, and R3.
  • the rear base portion 3 includes inner walls 21 and 22, which divide the optical paths of the return lights R1, R2, and R3 into respective regions.
  • FIG. 6 is a diagram showing the structure of the optical system of the distance measuring device 1a and the optical paths of outgoing light beams E1, E2 and E3 and return light beams R1, R2 and R3.
  • FIG. 7 is a diagram showing ranging areas S1, S2, and S3 (that is, irradiated areas of emitted light) corresponding to the scanning range of the ranging device 1a. Note that FIG. 6 shows only main optical members, and the base member 2 and the like are not shown.
  • Emission light E1 emitted from the light source unit LD1 in the -Y direction is collimated by the emission optical system CA1 and the emission optical system CB1, and is incident on the separation mirror SP1.
  • the emitted light E1 reflected by the separation mirror SP1 travels in the +Y direction and the +Z direction (that is, in the direction between the +Y direction and the +Z direction) and enters the second deflection mirror MB1.
  • the emitted light E1 reflected by the second deflection mirror MB1 travels in the +Y direction, the ⁇ Z direction, and the +X direction (that is, in the direction between the +Y direction, the ⁇ Z direction, and the +X direction), and reaches the scanning mirror 6. Incident.
  • the emitted light E1 reflected by the scanning mirror 6 is emitted in the +Z direction and the +X direction (that is, in the direction between the +Z direction and the +X direction). That is, the emitted light E1 is emitted to the front left of the rangefinder 1a.
  • the scanning mirror 6 rotates about the rotation axis TH, the emitted light E1 is applied to the range-finding area S1 scanned in the horizontal direction corresponding to the rotation angle of the scanning mirror 6 .
  • the return light R1 from the measurement target in the distance measurement area S1 travels backward along the optical path of the emitted light E1 and enters the separation mirror SP1.
  • the return light R1 that has passed through the separation mirror SP1 is condensed by the light receiving and condensing optical system CL1 and enters the first deflecting mirror MA1.
  • the return light R1 reflected by the first deflecting mirror MA1 travels in the +Y direction and enters the optical filter BPF1.
  • the return light R1 from which the light of wavelengths other than the wavelength band of the light emitted from the light source section LD1 is removed by the optical filter BPF1 enters the aperture section AP1.
  • the return light R1, which has a predetermined light-receiving viewing angle by the aperture portion AP1 is incident on the light receiving element PD1, and the return light R1 is detected.
  • Emission light E2 emitted from the light source unit LD2 in the -Y direction is collimated by the emission optical system CA2 and the emission optical system CB2, and enters the separation mirror SP2.
  • the emitted light E2 reflected by the separation mirror SP2 travels in the +Y direction and the +Z direction (that is, in the direction between the +Y direction and the +Z direction) and enters the second deflection mirror MB2.
  • the emitted light E2 reflected by the second deflecting mirror MB2 travels in the +Y direction and the -Z direction (that is, in the direction between the +Y direction and the -Z direction) and enters the scanning mirror 6.
  • the emitted light E2 reflected by the scanning mirror 6 is emitted in the +Z direction.
  • the emitted light E2 is emitted to the front of the distance measuring device 1a.
  • the scanning mirror 6 rotates about the rotation axis TH
  • the emitted light E2 is applied to the range-finding area S2 that is scanned in the horizontal direction corresponding to the rotation angle of the scanning mirror 6 .
  • the return light R2 from the measurement target in the ranging area S2 travels backward along the optical path of the emitted light E2 and enters the separation mirror SP2.
  • the return light R2 that has passed through the separation mirror SP2 is condensed by the light receiving and condensing optical system CL2 and enters the first deflecting mirror MA2.
  • the return light R2 reflected by the first deflecting mirror MA2 travels in the +Y direction and enters the optical filter BPF2.
  • the return light R2 from which the light of wavelengths other than the wavelength band of the light emitted from the light source section LD2 is removed by the optical filter BPF2 enters the aperture section AP2.
  • the return light R2, which has a predetermined light-receiving viewing angle by the aperture portion AP2, is incident on the light receiving element PD2, and the return light R2 is detected.
  • Emission light E3 emitted from the light source unit LD3 in the -Y direction is collimated by the emission optical system CA3 and the emission optical system CB3, and enters the separation mirror SP3.
  • the emitted light E3 reflected by the separation mirror SP3 travels in the +Y direction and the +Z direction (that is, in the direction between the +Y direction and the +Z direction) and enters the second deflection mirror MB3.
  • the emitted light E3 reflected by the second deflection mirror MB3 travels in the +Y direction, the ⁇ Z direction and the ⁇ X direction (that is, in a direction between the +Y direction, the ⁇ Z direction and the ⁇ X direction), and the scanning mirror 6.
  • the emitted light E3 reflected by the scanning mirror 6 is emitted in the +Z direction and the -X direction (that is, in the direction between the +Z direction and the -X direction). That is, the emitted light E3 is emitted to the right front of the rangefinder 1a.
  • the scanning mirror 6 rotates about the rotation axis TH, the emitted light E3 irradiates the range-finding area S3 scanned in the horizontal direction corresponding to the rotation angle of the scanning mirror 6 .
  • the return light R3 from the measurement target in the distance measurement area S3 travels backward along the optical path of the emitted light E3 and enters the separation mirror SP3.
  • the return light R3 that has passed through the separation mirror SP3 is condensed by the light receiving and condensing optical system CL3 and enters the first deflecting mirror MA3.
  • the return light R3 reflected by the first deflection mirror MA3 travels in the +Y direction and enters the optical filter BPF3.
  • the return light R3 from which light of wavelengths other than the wavelength band of the light emitted from the light source section LD3 has been removed by the optical filter BPF3 enters the aperture section AP3.
  • the return light R3, which has a predetermined light-receiving viewing angle by the aperture portion AP3, is incident on the light receiving element PD3, and the return light R3 is detected.
  • the distance measuring device 1 a can measure distances in an angular range wider than the scanning angle corresponding to the rotation angle of the scanning mirror 6 .
  • the distance measurement areas S1, S2, and S3 are illustrated so as to overlap, but the boundaries of the adjacent distance measurement areas may be aligned with each other, or the adjacent distance measurement areas may be separated from each other. good too.
  • the return lights R1, R2, and R3 travel in the same direction by the first deflecting mirrors MA1, MA2, and MA3, respectively.
  • the light is incident on the light receiving elements PD1, PD2 and PD3.
  • the light receiving elements PD1, PD2, PD3 can be arranged in the same direction, and the ease of mounting the light receiving elements PD1, PD2, PD3 on the light receiving substrate 200 can be improved.
  • the first deflection mirrors MA1, MA2 and MA3 are located at the corners of the portion of the base member 2 facing the outside. located at the end.
  • a distance measuring device requires adjustment of the optical axis of the light-receiving field of view.
  • the distance measuring apparatus in which the optical paths of the emitted light and the return light are configured to be the same as in the first embodiment, it is necessary to adjust the optical axis of the return light so that the optical axis of the return light is aligned with the optical axis of the emitted light. necessary.
  • Embodiment 1 When adjusting the optical axis of multiple light-receiving elements mounted on a single light-receiving substrate, it is impossible to move each light-receiving element independently. Optical axis adjustment by However, it is necessary to adjust the position of the lens arranged inside the optical path of the return light, and the lack of space makes the adjustment difficult. On the other hand, in Embodiment 1, by adjusting the positions and angles of the first deflecting mirrors MA1, MA2, and MA3, the optical axis can be similarly adjusted. Since the first deflecting mirrors MA1, MA2 and MA3 are located at the corner ends of the portion facing the outside of the base member 2, it is easy to secure an adjustment work space and to perform the adjustment easily.
  • a general lens since a general lens has a thin cylindrical shape and is optically used except for the side surface of the lens, it is necessary to hold the lens only by the side surface of the lens, which makes gripping and suction itself difficult.
  • the first deflecting mirrors MA1, MA2, and MA3 are planar, and the plane on the opposite side of the reflecting surface does not act optically, this surface can be easily held by suction.
  • the light emitting units 101, 102, 103, the scanning device 5, and the light receiving units 201, 202, 203 are composed of emitted light beams E1, E2, E3, return light beams R1, R2, R3 constitutes a coaxial optical system that is partially coaxial. Therefore, ambient light is less likely to enter the light receiving units 201, 202, and 203, and the S/N ratio of the distance measuring device 1a with respect to ambient light can be improved.
  • the light receiving elements PD1, PD2, and PD3 are arranged in the same direction and at the same position in the Y direction. Thereby, three or more light receiving elements can be provided, and distance measurement can be performed in a wide angular range.
  • the light receiving elements can be arranged not only on a line but also on a plane, which facilitates optical design.
  • all the light receiving elements are mounted on one light receiving substrate 200 .
  • the substrate manufacturing cost can be reduced.
  • the optical filters BPF1, BPF2, and BPF3 are arranged in the ⁇ Y direction of the light receiving elements PD1, PD2, and PD3, respectively, so that the surfaces on which the return lights R1, R2, and R3 are incident are oriented in the same direction. are placed in the As a result, the return lights R1, R2, and R3 are incident on the optical filters BPF1, BPF2, and BPF3 at the same angle, respectively. Therefore, the influence of the incident angle dependence of the optical filters can be eliminated, and the optical filters BPF1, BPF2, and BPF3 can be made into common parts.
  • Such a structure is particularly suitable for rangefinders equipped with dichroic optical filters having incident angle dependence of the wavelength to be selected.
  • the apertures AP1, AP2, AP3 are on the optical paths of the return lights R1, R2, R3 traveling toward the light receiving elements PD1, PD2, PD3. It is arranged at a position just before it is incident on the PD3.
  • the light receiving viewing angles of the light receiving elements PD1, PD2, and PD3 can be limited, and the resolution of the light receiving elements PD1, PD2, and PD3 can be increased.
  • the focal length of the light receiving and condensing optical system is f
  • the diameter of the aperture that is, opening diameter
  • the return lights R1, R2 and R3 condensed by the light receiving and condensing optical systems CL1, CL2 and CL3 are incident on the first deflecting mirrors MA1, MA2 and MA3.
  • the irradiation area of the return light beams R1, R2, and R3 is reduced, the reflecting surfaces of the first deflection mirrors MA1, MA2, and MA3 can be reduced, and the size of the first deflection mirrors MA1, MA2, and MA3 can be reduced. can do.
  • the longer the focal length f the larger the aperture diameter D. Therefore, the processing accuracy of the openings of the aperture portions with respect to the light-receiving viewing angle ⁇ can be relaxed, and the processing cost of the aperture portions AP1, AP2, AP can be reduced.
  • the influence of errors in fixing positions of the apertures AP1, AP2, and AP3 to the base member 2 in the in-plane direction is alleviated. Therefore, the assembly accuracy to the base member 2 can be relaxed. Further, the aperture portions AP1, AP2, and AP3 can be omitted by increasing the focal length f so that the aperture diameter D with respect to the light-receiving viewing angle ⁇ is equal to the size of the light-receiving element. In addition, since the focal length f of the light receiving and condensing optical systems CL1, CL2, and CL3 becomes longer, the angle of the light condensed at the focal position becomes sharper.
  • the light receiving and collecting optical systems CL1, CL2, CL3 are arranged between the first deflection mirrors MA1, MA2, MA3 and the separation mirrors SP1, SP2, SP3. Accordingly, the light emitting units 101, 102, and 103 can emit the emitted light beams E1, E2, and E3 without receiving the optical action of the light receiving and condensing optical systems CL1, CL2, and CL3. The optical performance of E2 and E3 can be improved.
  • the first deflecting mirrors MA1, MA2 and MA3 are arranged at the same position in the Z direction, at the same position in the Y direction, and arranged side by side in the X direction.
  • the adjusting device for holding the first deflecting mirrors MA1, MA2 and MA3 only moves in the horizontal direction, or the distance measuring device 1a , each of the first deflecting mirrors MA1, MA2, and MA3 can be held by simply moving , and adjustment is facilitated.
  • the light receiving elements PD1, PD2, and PD3 emit the emitted light E1, E2, and E3 from the light emitting portions 101, 102, and 103 by the first deflecting mirrors MA1, MA2, and MA3. are arranged to receive return light beams R1, R2, and R3 that are incident from the direction opposite to the direction in which they are directed.
  • the light receiving units 201, 202, and 203 can be arranged in the same direction as the light emitting units 101, 102, and 103, and the distance measurement becomes easier than when the light receiving units 201, 202, and 203 are arranged in other directions.
  • the dimension along the Z direction and the dimension along the Y direction of the device 1a can be reduced.
  • emitted lights E1, E2, and E3 reflected by the separation mirrors SP1, SP2, and SP3 are emitted from the light emitting portions 101, 102, and 103 arranged in the -Z direction of the scanning mirror 6,
  • the light is directed to second deflection mirrors MB1, MB2, and MB3 arranged to protrude from the scanning mirror 6 in the +Z direction, and guided to the scanning mirror 6 by the second deflection mirrors MB1, MB2, and MB3.
  • the light emitting portions 101, 102, 103 and the light receiving portions 201, 202, 203 are collectively arranged in the -Z direction of the scanning mirror 6.
  • the dimension in the Z direction of the portion projecting in the +Z direction from the scanning mirror 6 is reduced. Therefore, as shown in FIG. 7, a space for securing the optical path lengths of the emitted light beams E1, E2, and E3 that spread in the X direction as they travel from the scanning mirror 6 in the +Z direction is provided by the rangefinder 1a. Since there is no need to provide it inside the range finder 1a, the dimension along the X direction of the range finder 1a can be reduced.
  • the optical paths from the second deflecting mirrors MB1, MB2, MB3 to the light receiving elements PD1, PD2, PD3 are parallel to the YZ plane.
  • the inclinations of the first deflecting mirrors MA1, MA2, and MA3 are all the same, and in the optical axis adjustment work, the first deflecting mirrors MA1, MA2, and MA3 are held, and the angle when starting adjustment is can be unified and adjustment becomes easy.
  • FIG. 2 The configuration of the range finder 1b according to the second embodiment is the same as the configuration of the range finder 1a according to the first embodiment unless otherwise specified. Therefore, configurations having the same functions as those of the first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated.
  • FIG. 8 and 9 are a front perspective view and a rear perspective view schematically showing a distance measuring device 1b according to Embodiment 2.
  • FIG. 8 or 9 the range finder 1b according to the second embodiment includes a scanning device 5 having a smaller dimension along the Y direction than the range finder 1a according to the first embodiment.
  • the light emitting units 101, 102, and 103 are arranged in the +Y direction and the emitted light beams E1, E2, and E3 are emitted in the -Y direction, the light emitting units 101, 102, and 103 are arranged in the +Y direction. Only 102 and 103 protrude in the +Y direction.
  • the range finder 1b according to the second embodiment is configured to have a smaller dimension along the Y direction.
  • FIG. 10 is a cross-sectional view along line SX-SX of the distance measuring device 1b in FIG.
  • FIG. 11 is a diagram showing the structure of the optical system of the distance measuring device 1b according to Embodiment 2 and the optical paths of the emitted light beams E1, E2 and E3 and the return light beams R1, R2 and R3.
  • a rangefinder 1b includes separation mirrors SPA1, SPA2, and SPA3. Separating mirrors SPA1, SPA2, and SPA3 transmit (that is, pass through) emitted light E1, E2, and E3, and reflect return light R1, R2, and R3, respectively.
  • the separation mirrors SPA1, SPA2, and SPA3 in the second embodiment reverse the objects of reflection and transmission of light from the separation mirrors SP1, SP2, and SP3 in the first embodiment.
  • the separation mirrors SPA1, SPA2, and SPA3 are, for example, mirrors provided with holes only in the areas where the emitted lights E1, E2, and E3 are incident, or vapor-deposited reflection surfaces only in areas where the emitted lights E1, E2, and E3 are incident. mirrors, or mirrors that partially transmit and partially reflect the return lights R1, R2, and R3.
  • the separation mirrors SPA1, SPA2, and SPA3 are configured to reflect the return lights R1, R2, and R3 and guide them to the light receiving sections 201, 202, and 203, respectively.
  • the light emitting portions 101, 102, and 103 are fixed side by side on the rear surface of the rear base portion 3.
  • FIG. The light emitting unit 102 is arranged at the center of the distance measuring device 1b in the X direction.
  • the light emitting portions 101 and 103 are arranged in the -Z direction and the +Z direction of the light emitting portion 102, respectively.
  • the arrangement interval between the light emitting portions 101 and 102 and the arrangement interval between the light emitting portions 101 and 103 are equal.
  • the emission optical systems CA1, CA2, CA3 and the emission optical systems CB1, CB2, CB3 are respectively arranged on a straight line in the +Z direction passing through the light source units LD1, LD2, LD3, and emitted light beams E1, E2, E3 is emitted.
  • the separation mirrors SPA1, SPA2, and SPA3 are arranged in the +Z direction of the light emitting portions 101, 102, and 103, and rotate around the -X axis with respect to the YX plane (that is, around the X axis when facing the -X direction). clockwise) are fixed to the rear base portion 3 in a state of being equally inclined. As a result, the separation mirrors SPA1, SPA2, and SPA3 deflect the return lights R1, R2, and R3 in the +Y direction and guide them to the light receiving sections 201, 202, and 203, respectively.
  • the light-receiving substrate 200 is fixed to the rear surface of the rear base portion 3, and the light-receiving elements PD1, PD2, and PD3 are mounted on the surface of the light-receiving substrate 200 facing the +Z direction.
  • Aperture portions AP1, AP2, and AP3 are fixed to rear base portion 3 in the +Z direction of light receiving elements PD1, PD2, and PD3, respectively.
  • the optical filters BPF1, BPF2, and BPF3 are fixed to the rear base portion 3 in the +Z direction of the aperture portions AP1, AP2, and AP3, respectively.
  • the first deflecting mirrors MA1, MA2 and MA3 respectively generate virtual straight lines in the +Z direction from the optical filters BPF1, BPF2 and BPF3 and return lights R1, R2 and R3 reflected by the separation mirrors SPA1, SPA2 and SPA3. are placed where they intersect. This placement location is the corner end of the portion facing the outside of the rear base portion 3 (that is, the end in the +Y direction and the +Z direction).
  • the first deflecting mirrors MA1, MA2, MA3 are equally inclined with respect to the YX plane around the ⁇ X axis (that is, clockwise around the X axis when facing the ⁇ X direction). It is fixed to part 3.
  • the first deflection mirrors MA1, MA2 and MA3 deflect the return lights R1, R2 and R3 in the -Z direction and guide them to the light receiving elements PD1, PD2 and PD3.
  • the light receiving and condensing optical systems CL1, CL2, and CL3 are arranged between the first deflection mirrors MA1, MA2, and MA3 and the separation mirrors SPA1, SPA2, and SPA3, respectively, and are fixed to the rear base portion 3.
  • FIG. 11 shows only main optical members, and the base member 2 and the like are not shown. Also, the scanning range of the distance measuring device 1b is the same as that shown in FIG.
  • Emission light E1 emitted from the light source unit LD1 in the +Z direction is collimated by the emission optical system CA1 and the emission optical system CB1, and enters the separation mirror SPA1.
  • the emitted light E1 that has passed through the separation mirror SPA1 is incident on the second deflection mirror MB1.
  • the emitted light E1 reflected by the second deflection mirror MB1 travels in the +Y direction, the ⁇ Z direction, and the +X direction (that is, in the direction between the +Y direction, the ⁇ Z direction, and the +X direction), and reaches the scanning mirror 6. Incident.
  • the emitted light E1 reflected by the scanning mirror 6 is emitted in the +Z direction and the +X direction (that is, in the direction between the +Z direction and the +X direction). That is, the emitted light E1 is emitted to the front left of the rangefinder 1b.
  • the scanning mirror 6 rotates about the rotation axis TH, the emitted light E1 is applied to the range-finding area S1 scanned in the horizontal direction corresponding to the rotation angle of the scanning mirror 6 .
  • the return light R1 from the measurement target in the ranging area S1 travels backward along the optical path of the emitted light E1 and enters the separation mirror SPA1.
  • the return light R1 reflected by the separation mirror SPA1 travels in the +Y direction, is condensed by the light receiving and condensing optical system CL1, and enters the first deflecting mirror MA1.
  • the return light R1 reflected by the first deflecting mirror MA1 travels in the -Z direction and enters the optical filter BPF1.
  • the return light R1 from which wavelengths other than those of the light source section LD1 are removed by the optical filter BPF1 enters the aperture section AP1.
  • the return light R1, which has a predetermined light-receiving viewing angle by the aperture portion AP1 is incident on the light receiving element PD1, and the return light R1 is detected.
  • Emission light E2 emitted from the light source unit LD2 in the +Z direction is collimated by the emission optical system CA2 and the emission optical system CB2, and enters the separation mirror SPA2.
  • the emitted light E2 that has passed through the separation mirror SPA2 is incident on the second deflection mirror MB2.
  • the emitted light E2 reflected by the second deflecting mirror MB2 travels in the +Y direction and the -Z direction (that is, in the direction between the +Y direction and the -Z direction) and enters the scanning mirror 6.
  • the emitted light E2 reflected by the scanning mirror 6 is emitted in the +Z direction. That is, the emitted light E2 is emitted to the front front of the rangefinder 1b.
  • the emitted light E2 is applied to the range-finding area S2 that is scanned in the horizontal direction corresponding to the rotation angle of the scanning mirror 6 .
  • the return light R2 from the measurement target in the ranging area S2 travels backward along the optical path of the emitted light E2 and enters the separation mirror SPA2.
  • the return light R2 reflected by the separation mirror SPA2 travels in the +Y direction, is condensed by the light receiving and condensing optical system CL2, and enters the first deflecting mirror MA2.
  • the return light R2 reflected by the first deflection mirror MA2 travels in the -Z direction and enters the optical filter BPF2.
  • Emission light E3 emitted from the light source unit LD3 in the +Z direction is collimated by the emission optical system CA3 and the emission optical system CB3, and enters the separation mirror SPA3.
  • the emitted light E3 that has passed through the separation mirror SPA3 is incident on the second deflection mirror MB3.
  • the emitted light E3 reflected by the second deflection mirror MB3 travels in the +Y direction, the ⁇ Z direction and the ⁇ X direction (that is, in a direction between the +Y direction, the ⁇ Z direction and the ⁇ X direction), and the scanning mirror 6.
  • the emitted light E3 reflected by the scanning mirror 6 is emitted in the +Z direction and the -X direction (that is, in the direction between the +Z direction and the -X direction). That is, the emitted light E3 is emitted to the right front of the rangefinder 1b.
  • the scanning mirror 6 rotates about the rotation axis TH, the emitted light E3 irradiates the range-finding area S3 scanned in the horizontal direction corresponding to the rotation angle of the scanning mirror 6 .
  • the return light R3 from the measurement object in the ranging area S3 travels backward along the optical path of the emitted light E3 and enters the separation mirror SPA3.
  • the return light R3 reflected by the separation mirror SP3 travels in the +Y direction, is condensed by the light receiving and condensing optical system CL3, and enters the first deflecting mirror MA3.
  • the return light R3 reflected by the first deflection mirror MA3 travels in the -Z direction and enters the optical filter BPF3.
  • Return light R3 from which wavelengths other than those of the light source section LD3 are removed by the optical filter BPF3 enters the aperture section AP3.
  • the return light R3, which has a predetermined light-receiving viewing angle by the aperture portion AP3, is incident on the light receiving element PD3, and the return light R3 is detected.
  • the distance measuring device 1b can measure distances in an angular range wider than the scanning angle corresponding to the rotation angle of the scanning mirror 6.
  • the light receiving elements PD1, PD2, and PD3 emit light beams E1, E2, It is arranged so as to receive return lights R1, R2, and R3 incident from the direction opposite to the direction in which E3 is emitted.
  • the light receiving units 201, 202, and 203 can be arranged in the same direction as the light emitting units 101, 102, and 103, and the distance measurement becomes easier than when the light receiving units 201, 202, and 203 are arranged in other directions.
  • the dimension along the Y direction of the device 1b can be reduced.
  • the third embodiment has the same configuration and effects as those of the first embodiment unless otherwise specified.
  • the configuration of the range finder 1c according to the third embodiment is the same as the configuration of the range finder 1a according to the first embodiment unless otherwise specified. Therefore, configurations having the same functions as those of the first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated.
  • FIG. 12 is a diagram showing the structure of the optical system of the distance measuring device 1c according to Embodiment 3 and the optical paths of the emitted lights E1, E2, E3 and the return lights R1, R2, R3.
  • the distance measuring device 1c according to the third embodiment differs from the distance measuring device 1a according to the first embodiment in the locations of the light receiving and collecting optical systems CL1, CL2, and CL3.
  • light receiving and collecting optical systems CL1, CL2 and CL3 are arranged between the separating mirrors SP1, SP2 and SP3 and the first deflecting mirrors MA1, MA2 and MA3.
  • Embodiment 3 in order to extend the distances from the light receiving and condensing optical systems CL1, CL2, and CL3 to the aperture portions AP1, AP2, and AP3, the separating mirror SP1 is positioned in the +Z direction more than the separating mirrors SP1, SP2, and SP3. , SP2, SP3 and the second deflection mirrors MB1, MB2, MB3.
  • the emitted lights E1, E2, and E3 are incident on the light-receiving and condensing optical systems CL1, CL2, and CL3, and emitted toward the range-finding area, which is the irradiated area of the emitted light. Therefore, the emission optical systems CA1, CA2 and CA3 and the emission optical systems CB1, CB2 and CB3 combine with the optical effects of the light receiving and condensing optical systems CL1, CL2 and CL3 to convert the emitted light beams E1, E2 and E3 into parallel beams. or configured to collect light.
  • the light receiving and condensing optical systems CL1, CL2 and CL3 are arranged in the +Z direction relative to the separation mirrors SP1, SP2 and SP3. , CL2 and CL3 can be increased.
  • the processing accuracy of the openings of the aperture portions AP1, AP2, AP3 and the fixing position accuracy of the aperture portions AP1, AP2, AP3 in the in-plane direction that is, the fixing positions on the plane including the aperture portions AP1, AP2, AP3 accuracy
  • the positional deviation accuracy in the focus direction is provided.
  • FIG. 13 is a block diagram schematically showing the configuration of a distance measuring system 1 including a distance measuring device 1a (or 1b or 1c) and an information processing device 400 according to a modification.
  • the information processing device 400 is, for example, a processing circuit.
  • the processing circuitry may be a computer.
  • the information processing device 400 controls the driving of the scanning device 5 and the driving of the light sources LD1, LD2, and LD3, and based on the detection signals of the light receiving elements PD1, PD2, and PD3, the distance measuring device 1a (or 1b or 1c). to an object to be measured in the area to be measured. Specifically, the information processing apparatus 400 determines the distance to the measurement object based on the time from when the light sources LD1, LD2, and LD3 emit light to when the light receiving elements PD1, PD2, and PD3 receive the return light. Calculate the distance.
  • the information processing apparatus 400 includes a processor 401, a memory 402, a storage device 403, an interface 404 connected to the scanning device 5, an interface 405 connected to the light sources LD1, LD2 and LD3, and light receiving elements PD1 and PD2. , and an interface 406 connected to PD3.
  • the processor 401 is composed of, for example, a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), or an FPGA (Field-Programmable Gate Array).
  • the memory 402 is a volatile storage device such as RAM (Random Access Memory).
  • the storage device 403 is, for example, a nonvolatile storage device such as a hard disk device (HDD) or solid state drive (SSD).
  • the processing circuit that configures the information processing device 400 may be dedicated hardware, or the processor 401 that executes the distance measurement program stored in the memory 402 .
  • the processor 401 may be any of a processing device, an arithmetic device, a microprocessor, a microcomputer, and a DSP (Digital Signal Processor).
  • the processing circuit may be, for example, a single circuit, a composite circuit, a programmed processor, an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or any of these. is a combination of any of
  • the distance measuring system By using the distance measuring system 1, it is possible to measure the distance to the measurement object within a wide measurement area.
  • 1 distance measuring system 1a, 1b, 1c distance measuring device, 101, 102, 103 light emitting part, 200 light receiving substrate, 201, 202, 203 light receiving part, 2 base member, 3 front base part, 4 rear base part, 5 scanning Device, 6 scanning mirror (scanning optical section), TH mirror rotation direction, LD1, LD2, LD3 light source section, MA1, MA2, MA3 first deflecting mirror MB1, MB2, MB3 second deflecting mirror CA1, CA2, CA3 outgoing optical system, CB1, CB2, CB3 outgoing optical system, SP1, SP2, SP3 separation mirror (separation optical part), SPA1, SPA2, SPA3 separation mirror (separation optical part), CL1, CL2, CL3 light receiving and collecting optical system , BPF1, BPF2, BPF3 optical filters, AP1, AP2, AP3 aperture parts, PD1, PD2, PD3 light receiving elements, E1, E2, E3 emitted light, R1, R2, R3 returned light, S1, S2, S3

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