WO2023275979A1 - 加工ヘッド及び付加製造装置 - Google Patents

加工ヘッド及び付加製造装置 Download PDF

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Publication number
WO2023275979A1
WO2023275979A1 PCT/JP2021/024519 JP2021024519W WO2023275979A1 WO 2023275979 A1 WO2023275979 A1 WO 2023275979A1 JP 2021024519 W JP2021024519 W JP 2021024519W WO 2023275979 A1 WO2023275979 A1 WO 2023275979A1
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WIPO (PCT)
Prior art keywords
processing head
lens array
head according
optical
laser beams
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2021/024519
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English (en)
French (fr)
Japanese (ja)
Inventor
潤 近藤
陽子 井上
宏昌 藤井
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority to JP2023531188A priority Critical patent/JP7515722B2/ja
Priority to PCT/JP2021/024519 priority patent/WO2023275979A1/ja
Publication of WO2023275979A1 publication Critical patent/WO2023275979A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the present disclosure relates to processing heads and additive manufacturing equipment.
  • An additive manufacturing device that manufactures a modeled object through additive processing is known.
  • the processing head for the additive manufacturing apparatus melts the supplied additive material (for example, metal material) in the vicinity of the condensed point (hereinafter also referred to as the "condensed spot") where the heating laser beam is condensed. Then, the melted addition material is added.
  • the condensed spot where the heating laser beam is condensed.
  • the material supply unit that supplies the additional material to the position to be processed blocks the laser light, the light utilization efficiency is lowered.
  • a processing head is known that prevents a decrease in light utilization efficiency. See, for example, US Pat.
  • Patent Document 1 in addition to an optical system that circularizes the light intensity distribution of laser light, a split optical element composed of a V-shaped groove-shaped convex mirror and an optical path split by the split optical element are recombined. and a condensing mechanism composed of a concave mirror. This avoids shielding of the laser light by the material supply section.
  • Patent Document 2 by controlling the polarization state of laser light split by a polarizing beam splitter, the heat distribution of each of the additive material and the additive object at the condensing point is controlled, and the processing quality is improved.
  • Patent No. 6756695 Japanese Patent Application Laid-Open No. 2018-202450
  • Patent Document 1 a concave mirror or a convex mirror is provided in addition to a condensing optical system for condensing laser light in order to avoid light shielding by the material supply unit. Therefore, when manufacturing these mirrors, high processing accuracy and high-precision adjustment of the optical system are required compared to conventional flat mirrors.
  • the polarization beam splitter splits the laser beam, but depending on the specifications of the laser light source or the configuration (for example, fiber) that guides the laser beam, unevenness occurs in the polarized component, and the split laser beam A difference occurs in the light intensity of the light. Therefore, in Patent Document 2, an additional optical element for controlling the polarization state is required. Moreover, among the optical elements for controlling the polarization state, there are very few optical elements that can handle high-power laser light, the cost is high, and the configuration is complicated.
  • An object of the present disclosure is to increase the utilization efficiency of laser light with a simple configuration.
  • a processing head is a processing head that processes a material supplied from a material supply unit to a position to be processed, and includes a light source unit that emits a first laser beam, and the first laser beam. to form a plurality of second laser beams by branching, a condensing optical element for condensing the plurality of second laser beams; and a first and an optical unit.
  • FIG. 1 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus according to Embodiment 1;
  • FIG. 2 is an external perspective view showing the configuration of a lens array of the processing head shown in FIG. 1;
  • FIG. FIG. 4 is an explanatory diagram for explaining the optical function of the lens array of the machining head according to Embodiment 1;
  • FIG. 2 is a view of the periphery of the reflecting optical portion of the processing head shown in FIG. 1 as viewed in the ⁇ z-axis direction;
  • FIG. 11 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus according to a modification of Embodiment 1;
  • FIG. 9 is a block diagram showing the configuration of an additional manufacturing apparatus according to Embodiment 2;
  • FIG. 11 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus according to Embodiment 2;
  • FIG. 11 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus according to Embodiment 3;
  • (A) and (B) are explanatory diagrams for explaining changes in positions of condensed spots of a plurality of second laser beams in the processing head according to Embodiment 3.
  • FIG. FIG. 11 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus according to Embodiment 4;
  • FIG. 11 is a view of the lens array and the lens array driver shown in FIG. 10 as viewed in the ⁇ x-axis direction;
  • (A) and (B) are operation explanatory diagrams for explaining the operation of the lens array of the processing head according to the fourth embodiment.
  • FIG. 11 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus according to Embodiment 5;
  • (A) and (B) are explanatory diagrams for explaining changes in positions of condensed spots of a plurality of second laser beams in the processing head according to Embodiment 5.
  • FIG. 11 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus according to Embodiment 5;
  • (A) and (B) are explanatory diagrams for explaining changes in positions of condensed spots of a plurality of second laser beams in the processing head according to Embodiment 5.
  • the coordinate axes of the xyz orthogonal coordinate system are used in the drawings to facilitate understanding of the explanation.
  • the x-axis and y-axis are coordinate axes parallel to the stage 7 of the additive manufacturing apparatus.
  • the z-axis is a coordinate axis orthogonal to the x-axis and the y-axis.
  • the z-axis is an axis parallel to the reference line S passing through the position to be processed 70 .
  • FIG. 1 is a configuration diagram showing a schematic configuration of an additive manufacturing apparatus 100 according to Embodiment 1.
  • the additive manufacturing apparatus 100 is a machine tool that manufactures a modeled object by adding molten additive material to an object to be added (hereinafter also referred to as a "workpiece") placed on the stage 7.
  • the additive manufacturing apparatus 100 has a processing head 1 , a stage 7 and a stage driving section 8 .
  • the stage 7 is used to install and fix additional objects (not shown).
  • the stage 7 has a position to be processed (specifically, a position to be processed 70 shown in FIG. 4 to be described later) and is movable in a predetermined direction.
  • a stage drive unit 8 drives the stage 7 .
  • the stage drive unit 8 has, for example, a motor and a transmission mechanism (for example, gears) that transmits the driving force of the motor to the stage 7 .
  • the stage driving unit 8 can move the stage 7 in, for example, the x-axis direction, the y-axis direction, and the z-axis direction, and rotate it around each axis. As a result, it is possible to manufacture a modeled object having a desired shape.
  • the driving direction of the stage 7 is not limited to the direction described above.
  • the processing head 1 has a material supply section 6 .
  • the processing head 1 processes the additional material supplied from the material supply unit 6 to the position to be processed.
  • the material supply unit 6 is a material supply pipe that supplies the additional material to the position to be processed.
  • the position to be processed is a position in the vicinity of a condensed spot 80, which is a spot where laser light (a second laser light L21 described later) irradiated from the processing head 1 toward the stage 7 converges.
  • the material supply unit 6 is arranged along a reference line S that passes through the position to be processed and is perpendicular to the stage 7 .
  • the additional material is, for example, a powder-like or wire-like metal material.
  • the material supply unit 6 is configured by a tubular housing or the like. Thereby, scattering of the additional material can be prevented.
  • the additional material is a wire-shaped metal material, the metal material can be supplied to the position to be processed by providing the material supply unit 6 with a mechanism for supplying the additional material in the +z-axis direction.
  • the additional material may be the powder-like metal material described above.
  • the processing head 1 further has a light source section 10, a lens array 20 as a condensing optical element, a reflecting optical section 30 as a first optical section, and a plane mirror 40 as a second optical section.
  • the light source unit 10 emits a first laser beam L11.
  • the light source unit 10 has a laser beam irradiation unit 11 and a collimator unit 12 .
  • the laser beam irradiation unit 11 emits a laser beam L1.
  • the laser beam L1 is divergent light.
  • the laser beam irradiation unit 11 has, for example, a laser oscillator, a light guiding optical element (for example, a fiber), and a coupling lens that guides the laser beam L1 emitted from the laser oscillator to the light guiding optical element (not shown). .
  • laser light L1 emitted from the light guiding optical element is schematically shown.
  • the laser beam irradiation unit 11 can be realized without the light guide optical element.
  • the first laser beam L11 shown in FIG. 1 may be a laser beam emitted from a laser oscillator.
  • the collimating section 12 shapes the laser light L1 emitted from the laser light irradiation section 11 into substantially parallel light. Thereby, the first laser beam L11 is formed.
  • the collimating section 12 is composed of, for example, a lens. In the example shown in FIG. 1, the collimator 12 is composed of one lens. The number of lenses provided in the collimating section 12 is not limited, and the collimating section 12 may be composed of a plurality of lenses. Moreover, when the laser beam L1 emitted from the laser beam irradiation unit 11 is already substantially parallel light, the light source unit 10 can be realized without the collimator unit 12 .
  • the lens array 20 splits the first laser beam L11 to form a plurality of second laser beams L21.
  • FIG. 2 is an external perspective view showing the configuration of the lens array 20 shown in FIG.
  • the lens array 20 is integrally formed with a plurality of (for example, four) lenses 20a, 20b, 20c, and 20d.
  • the plurality of lenses 20a, 20b, 20c, and 20d respectively form the plurality of second laser beams L21.
  • Each of the plurality of lenses 20a, 20b, 20c, and 20d is, for example, a plano-convex lens.
  • FIG. 3 is an explanatory diagram for explaining the optical function of the lens array 20 of the machining head 1 according to the first embodiment.
  • a plurality of lenses 201a and 201b are integrally formed in the lens array 20 shown in FIG.
  • the shape of the lens array 20 shown in FIG. 3 is different from the shape of the lens array 20 shown in FIGS. 1 and 2, the lens arrays 20 shown in FIGS. 1-3 have the same optical function as each other.
  • the focused spot Q1 is arranged at a position spatially shifted from the focused spot Q2. It is Therefore, since the processing head 1 is provided with the lens array 20, the first laser beam L11 emitted from the light source unit 10 can avoid the material supply unit 6 located on the optical axis C, and A plurality of focused spots can be formed on the stage 7 . In this case, the focal length of the lenses forming the lens array 20 must be designed to be the same as the optical path length from the lens array 20 to the position to be processed.
  • the reflective optical unit 30, which will be described later also has the light-collecting properties of the plurality of second laser beams L21 split by the lens array 20, the respective light-collecting properties of the lens array 20 and the reflective optical unit 30 are synthesized. Therefore, it is necessary to design so that the plurality of second laser beams L21 are condensed at the position to be processed.
  • the number of lenses constituting the lens array 20 is four, but the number of lenses is not limited to four. It is preferable that the number of lenses constituting the lens array 20 is three or more in order to prevent unevenness in the heat distribution of each of the additional material and the additional object.
  • FIG. FIG. 4 is a view of the processing head 1 shown in FIG. 1, in which the periphery of the reflecting optical section 30 is viewed in the ⁇ z-axis direction.
  • the reflecting optical section 30 directs the plurality of second laser beams L21 branched by the lens array 20 to the position 70 to be processed.
  • the reflecting optical unit 30 directs a plurality of second laser beams L21 branched by the lens array 20 and reflected by a plane mirror 40, which will be described later, toward the processing position 70.
  • the reflective optical section 30 has a plurality of condensing mirrors 31 as a plurality of condensing members having a plurality of reflecting surfaces 31a.
  • the collecting mirror 31 is, for example, a plane mirror.
  • the plurality of reflective surfaces 31a are arranged at a plurality of positions surrounding the processing position 70, respectively.
  • the plurality of reflecting surfaces 31a are arranged with the reference line S as the center at equal angular intervals.
  • the plurality of reflecting surfaces 31a direct the plurality of second laser beams L21 toward the processed position 70, respectively.
  • the plurality of reflecting surfaces 31 a isotropically irradiate the plurality of second laser beams L ⁇ b>21 toward the position to be processed 70 . As a result, it is possible to prevent unevenness in the heat distribution of the additive material and the additive object. Therefore, processing quality can be improved.
  • the number of reflective surfaces 31 a in the reflective optical section 30 corresponds to the number of lenses forming the lens array 20 . As shown in FIG. 2 described above, in the lens array 20 of Embodiment 1, four lenses 20a, 20b, 20c, and 20d are integrally formed. Therefore, the reflective optical section 30 has four reflective surfaces 31a arranged independently of each other. If the plurality of second laser beams L21 branched by the lens array 20 can be reflected toward the processed position 70, the number of the reflecting surfaces 31a in the reflecting optical section 30 is not limited to four, and may be two or more. I wish I had.
  • the surface shape of the condenser mirror 31 is flat, but is not limited to this. In order to improve the light gathering performance, the surface shape of the light gathering mirror 31 may be, for example, spherical, parabolic, or the like.
  • the collector mirror 31 is made of metal, for example.
  • the condenser mirror 31 may be either a dielectric multilayer mirror or a diffraction grating (for example, a reflective diffraction grating) that reflects light of a specific wavelength.
  • the plane mirror 40 guides the plurality of second laser beams L21 branched by the lens array 20 to the reflecting optical section 30 .
  • the plurality of second laser beams L21 travel in the +z-axis direction along the material supply section 6 and enter the reflecting optical section 30 .
  • the plurality of second laser beams L21 are reflected by the plane mirror 40 so as to be substantially rotationally symmetrical about the reference line S passing through the position to be processed 70 (see FIG. 4), and isotropically toward the position to be processed 70. Concentrate. This heats the add-on material supplied to the work position 70 .
  • the plane mirror 40 has a through hole 40a.
  • the material supply part 6 is arranged through the through-hole 40a. Thereby, interference between the material supply unit 6 and the plane mirror 40 can be prevented. It should be noted that the processing head 1A can be realized without the flat mirror 40, as shown in FIG. 5, which will be described later.
  • the lens array 20 splits the first laser beam L11 emitted from the light source unit 10 to form a plurality of second laser beams L21, and the second laser beam L21 to focus.
  • the reflecting optical section 30 directs the plurality of second laser beams L21 branched by the lens array 20 to the positions 70 to be processed. This makes it possible to avoid light shielding by the material supply unit 6 with a simple configuration. Therefore, it is possible to improve the utilization efficiency of laser light with a simple configuration.
  • the reflective optical section 30 has a plurality of reflecting surfaces 31a arranged at a plurality of positions surrounding the position to be processed 70, and the plurality of reflecting surfaces 31a includes a plurality of second of laser beams L21 are directed to the position to be processed 70 respectively.
  • the processing head 1 further has a plane mirror 40 that guides the plurality of second laser beams L21 branched by the lens array 20 to the reflecting optical section 30.
  • the second laser beam L21 branched by the lens array 20 is isotropically applied to the position 70 to be processed. Thereby, processing quality can be improved.
  • the plane mirror 40 has the through hole 40a, and the material supply unit 6 is arranged through the through hole 40a. Thereby, interference between the material supply unit 6 and the plane mirror 40 can be prevented.
  • FIG. 5 is a diagram showing a schematic configuration of a processing head 1A according to a modification of the first embodiment. 5, the same or corresponding components as those shown in FIG. 1 are given the same reference numerals as those shown in FIG.
  • the processing head 1A according to the modification of the first embodiment does not have the plane mirror 40 shown in FIG. It is different from the processing head 1. Except for this point, the processing head 1A according to the modification of the first embodiment is the same as the processing head 1 according to the first embodiment. Therefore, FIG. 4 will be referred to in the following description.
  • the additional manufacturing apparatus 100A has a processing head 1A, a stage 7, and a stage driving section 8.
  • the processing head 1A has a material supply section 6, a light source section 10, a lens array 20, and a reflecting optical section 30.
  • the lens array 20 and the reflective optical section 30 are arranged at a position where the second laser light L21 split by the lens array 20 directly enters the reflective optical section 30 .
  • the lens array 20 is arranged on the -z-axis side of the material supply section 6 and the reflecting optical section 30.
  • the lens array 20 is arranged at a position facing the stage 7 with the material supply section 6 and the reflecting optical section 30 interposed therebetween.
  • the lens array 20 splits the first laser beam L11 emitted from the light source unit 10 to form a plurality of second laser beams L21,
  • the laser beam L21 is condensed.
  • the reflecting optical section 30 directs the plurality of second laser beams L21 branched by the lens array 20 to the positions 70 to be processed. This makes it possible to avoid light shielding by the material supply unit 6 with a simple configuration. Therefore, it is possible to improve the utilization efficiency of laser light with a simple configuration.
  • the lens array 20 and the reflecting optical section 30 are positioned so that the plurality of second laser beams L21 branched by the lens array 20 directly enter the reflecting optical section 30. are placed.
  • the processing head 1A according to the modification of the first embodiment can be realized without having the plane mirror 40 shown in FIG. 1 described above. Therefore, the number of parts in the machining head 1A can be reduced. Therefore, it is possible to improve the utilization efficiency of laser light with a simpler configuration.
  • FIG. 6 is a block diagram showing the configuration of an additional manufacturing apparatus 200 according to Embodiment 2.
  • FIG. 7 is a configuration diagram showing a schematic configuration of an additive manufacturing apparatus 200 according to Embodiment 2.
  • the additional manufacturing apparatus 200 according to Embodiment 2 differs from the additional manufacturing apparatus 100 according to Embodiment 1 in the configuration of the reflective optical section 230 of the processing head 2 .
  • the additional manufacturing apparatus 200 according to the second embodiment is the same as the additional manufacturing apparatus 100 according to the first embodiment. Therefore, FIG. 4 will be referred to in the following description.
  • the additional manufacturing device 200 has a processing head 2, a stage 7, a stage driving section 8, and a control section 9.
  • the processing head 2 has a material supply section 6, a light source section 10, a lens array 20, a reflecting optical section 230, and a plane mirror 40.
  • the reflective optical section 230 has a plurality of collecting mirrors 231 having a plurality of reflecting surfaces 31a, and a plurality of reflecting surface driving sections 232 that drive the plurality of collecting mirrors 231, respectively.
  • the reflecting surface driving section 232 drives the collecting mirror 231 based on the control signal output from the control section 9 . Thereby, the reflecting surface driving section 232 can change the positions of the condensed spots 80 of the plurality of second laser beams L21 at the processing position 70 (see FIG. 4). Therefore, it is possible to optimize the heat distribution of the focused spot 80 and improve the processing quality.
  • the reflective surface driver 232 scans the focused spot of the second laser beam L21 on the xy plane.
  • the reflecting optical section 230 is a focusing position adjusting optical section that changes the positions of the focused spots 80 of the plurality of second laser beams L21.
  • the control unit 9 drives the reflective surface driving unit 232 based on at least one of the movement direction and movement speed of the stage 7 and the characteristics of the additional material. Thereby, the positions of the focused spots 80 of the plurality of second laser beams L21 can be changed based on at least one of the moving direction and moving speed of the stage 7 and the characteristics of the additional material.
  • the collecting mirror 231 is a galvano-mirror, and the reflecting surface driving section 232 rotates the galvano-mirror about an axis perpendicular to the reference line S.
  • the condensing mirror 231 rotates, for example, around two axes (for example, ⁇ Ry direction and ⁇ Rz direction shown in FIG. 7), so that the tilt angle of the condensing mirror 231 is modulated at high speed.
  • the collecting mirror 231 is not limited to a galvanomirror, and may be another mirror.
  • the reflective surface driver 232 may be a piezo element that drives the condenser mirror 231 .
  • the collecting mirror 231 is a plane mirror as in the first embodiment. Therefore, the reflecting surface driving section 232 is a rotation driving section capable of varying the tilt angle of the collecting mirror 231 as described above.
  • the collecting mirror 231 is a curved mirror, if the positions of the collecting spots 80 of the plurality of second laser beams L21 can be controlled, the reflecting surface driving section 232 moves the collecting mirror 231 to z It may also be a translational drive unit that translates in the axial direction.
  • the lens array 20 splits the first laser beam L11 emitted from the light source unit 10 to form a plurality of second laser beams L21, and the second laser beam L21 to focus.
  • the reflecting optical section 230 directs the plurality of second laser beams L21 branched by the lens array 20 to the positions to be processed 70, respectively. This makes it possible to avoid light shielding by the material supply unit 6 with a simple configuration. Therefore, it is possible to improve the utilization efficiency of laser light with a simple configuration.
  • the reflective optical unit 230 has the reflective surface driving unit 232 that drives the plurality of reflective surfaces 31a, and the condensed spots of the plurality of second laser beams L21 at the processing position 70 change the position 80 of .
  • the heat distribution of the focused spot 80 can be optimized, and the processing quality can be improved. Therefore, according to the second embodiment, it is possible to improve the processing quality while improving the utilization efficiency of laser light with a simple configuration.
  • FIG. 8 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus 300 according to Embodiment 3.
  • the additional manufacturing apparatus 300 according to the third embodiment differs from the additional manufacturing apparatus 100 according to the first embodiment in that the processing head 3 is provided with a lens array driving section 350 that drives the lens array 20 to rotate. Except for this point, the additional manufacturing apparatus 300 according to the third embodiment is the same as the additional manufacturing apparatuses 100 and 200 according to the first or second embodiment. 3, 4 and 6 are therefore referred to in the following description.
  • the additional manufacturing device 300 has a processing head 3, a stage 7, a stage driving section 8, and a control section 9 (see FIG. 6).
  • the processing head 3 has a material supply section 6, a light source section 10, a lens array 20, a reflecting optical section 30, a plane mirror 40, and a lens array driving section 350 as a first optical element driving section.
  • the lens array driver 350 rotates the lens array 20 around the x-axis.
  • the x-axis is the center axis
  • the clockwise rotation is the +Rx direction
  • the counterclockwise rotation is the ⁇ Rx direction.
  • the lens array driving section 350 has, for example, a motor and a transmission mechanism (for example, gears) that transmits the driving force of the motor to the lens array 20 .
  • the lens array driving section 350 drives the lens array 20 based on the control signal output from the control section 9 .
  • the control unit 9 controls the lens array driving unit 350 based on the moving direction of the stage 7, the properties of the additional material, and the like.
  • FIGS. 9A and 9B show changes in the positions of condensed spots 80a, 80b, 80c, and 80d of the plurality of second laser beams L21 (see FIG. 8) of the processing head 3 according to Embodiment 3. It is an explanatory view explaining.
  • the lens array 20 has four lenses 20a, 20b, 20c, and 20d, so in FIGS. Spots 80a, 80b, 80c, 80d are shown.
  • FIGS. Spots 80a, 80b, 80c, 80d are shown.
  • the moving direction of the stage 7 that is, the processing direction of the object to be added is defined as processing direction A.
  • FIG. 9A is a diagram of a plurality of condensed light spots 80a, 80b, 80c, and 80d at the processing position 70 before the lens array 20 rotates, viewed in the -z-axis direction.
  • the processing direction A is the +x-axis direction.
  • one focused spot 80 a is formed on the +x-axis side of the reference line S passing through the material supply section 6 .
  • the focused spot 80b is formed at a position rotated 90 degrees clockwise from the focused spot 80a
  • the focused spot 80c is formed at a position rotated 90 degrees clockwise from the focused spot 80b.
  • the focused spot 80d is formed at a position rotated 90 degrees clockwise from the focused spot 80c.
  • the plurality of condensed spots 80a, 80b, 80c, and 80d are formed at equal angular intervals of 90 degrees around the reference line S, for example.
  • FIG. 9(B) is a view of a plurality of condensed spots 80a, 80b, 80c, and 80d at the processing position 70 after the lens array 20 has been rotated, viewed in the -z-axis direction.
  • FIG. 9B is a diagram showing positions of a plurality of condensed spots 80a, 80b, 80c, and 80d when the processing direction A is inclined by 45 degrees so as to approach the -y-axis direction.
  • the lens array driving unit 350 shown in FIG.
  • the positions of the condensed spots 80a, 80b, 80c, and 80d are varied.
  • the positions of the plurality of condensed spots 80a, 80b, 80c, and 80d can be changed according to the processing direction A of the object to be added.
  • the positions of the plurality of condensed spots 80a, 80b, 80c, and 80d can also be changed by driving the condensing mirror 231 by the reflecting surface driving section 232.
  • the irradiation position of the second laser beam L21 applied to the additional material and the intensity distribution of the second laser beam L21 on the additional material are different in the vicinity of the position to be processed 70. may be restricted. Therefore, as in Embodiment 3, the control unit 9 controls the lens array driving unit 350 based on the processing direction A and the properties of the additional material, thereby improving processing quality.
  • the positional relationship between the processing direction A and the focused spots 80a, 80b, 80c, and 80d is not limited to the examples shown in FIGS.
  • the lens array 20 splits the first laser beam L11 emitted from the light source unit 10 to form a plurality of second laser beams L21, and the second laser beams L21 to focus.
  • the reflecting optical section 30 directs the plurality of second laser beams L21 branched by the lens array 20 to the positions 70 to be processed. This makes it possible to avoid light shielding by the material supply unit 6 with a simple configuration. Therefore, it is possible to improve the utilization efficiency of laser light with a simple configuration.
  • the processing head 3 further has a lens array driving section 350 that rotates the lens array 20 around the optical axis C of the first laser beam L11.
  • a lens array driving section 350 that rotates the lens array 20 around the optical axis C of the first laser beam L11.
  • FIG. 10 is a configuration diagram showing a schematic configuration of an additional manufacturing apparatus 400 according to Embodiment 4.
  • the same or corresponding components as those shown in FIG. 1 are given the same reference numerals as those shown in FIG.
  • An additional manufacturing apparatus 400 according to Embodiment 4 differs from the additional manufacturing apparatuses 100, 200, and 300 according to Embodiments 1 to 3 in that a lens array driving section 450 is provided in the processing head 4.
  • FIG. Except for this point, the additional manufacturing apparatus 400 according to the fourth embodiment is the same as the additional manufacturing apparatuses 100, 200, and 300 according to the first to third embodiments. 4 and 6 are therefore referred to in the following description.
  • the additional manufacturing device 400 has a processing head 4, a stage 7, a stage driving section 8, and a control section 9 (see FIG. 6).
  • the processing head 4 has a material supply section 6, a light source section 10, a lens array 20, a plane mirror 40, a reflecting optical section 30, and a lens array driving section 450 as a second optical element driving section.
  • FIG. 11 is a diagram of the lens array 20 and the lens array driving section 450 shown in FIG. 10 viewed in the -x-axis direction.
  • the lens array driver 450 moves the lens array 20 in a direction perpendicular to the optical axis direction (that is, x-axis direction) of the first laser beam L11.
  • the lens array driver 450 translates the lens array 20 in the y-axis direction and the z-axis direction.
  • the processing head 4 may have the lens array driving section 350 of Embodiment 3 in addition to the lens array driving section 450 .
  • FIG. 12A is a diagram showing the lens array 20 before being driven by the lens array driving section 450 and the first laser light L11 incident on the lens array 20.
  • FIG. 12A the center of the lens array 20 is positioned on the optical axis C of the first laser beam L11, which is parallel light. In other words, in the example shown in FIG. 12A, the center of the lens array 20 is not decentered with respect to the optical axis C of the first laser beam L11.
  • FIG. 12B is a diagram showing the lens array 20 after being driven by the lens array driving section 450 and the first laser light L11 incident on the lens array 20.
  • the lens array driving section 450 moves the center of the lens array 20 in the ⁇ y-axis direction with respect to the optical axis C of the first laser beam L11.
  • the lens array driving section 450 is a lens array decentering moving section that decenters the center of the lens array 20 with respect to the optical axis C of the first laser beam L11.
  • the lens array driver 450 when the lens array driver 450 translates the lens array 20 in the -y-axis direction, the lenses 20a and 20b located on the +y-axis side of the center of the lens array 20 The incident amount of the first laser beam L11 increases. As a result, the light intensity at each condensed spot of the plurality of second laser beams L21 (see FIG. 10) split by the lenses 20a and 20b increases. In this manner, the lens array driver 450 translates the lens array 20 in the ⁇ y-axis direction, thereby controlling the light intensity at the processing position 70 (see FIG. 4).
  • the lens array driver 450 translates the lens array 20 in the ⁇ y-axis direction, but the lens array driver 450 moves the lens array 20 in the +y-axis direction. Alternatively, it may be translated in the ⁇ z-axis direction. In this manner, the lens array 20 is translated in the direction perpendicular to the optical axis C of the first laser beam L11, so that each of the plurality of second laser beams L21 split by the lens array 20 is focused.
  • the light intensity of the spot can be controlled.
  • the controller 9 controls the light intensity distribution of the focused spot 80 in the vicinity of the position to be processed 70 (see FIG. 4), based on at least one of the processing direction and processing speed of the stage 7, for example. Thereby, processing quality can be improved.
  • the lens array 20 splits the first laser beam L11 emitted from the light source unit 10 to form a plurality of second laser beams L21, and the second laser beam L21 to focus.
  • the reflecting optical section 30 directs the plurality of second laser beams L21 branched by the lens array 20 to the positions 70 to be processed. This makes it possible to avoid light shielding by the material supply unit 6 with a simple configuration. Therefore, it is possible to improve the utilization efficiency of laser light with a simple configuration.
  • the processing head 4 has a lens array driving section 450 that moves the lens array 20 in a direction perpendicular to the optical axis direction of the first laser beam L11.
  • the lens array driving section 450 moves the lens array 20 in a direction perpendicular to the optical axis direction of the first laser beam L11.
  • the light intensity of each focused spot of the plurality of second laser beams L21 split by the lens array 20 can be controlled. Therefore, the light intensity distribution of the focused spot 80 in the vicinity of the position to be processed 70 is controlled, so that the processing quality can be improved. Therefore, according to Embodiment 4, it is possible to improve the processing quality while improving the utilization efficiency of laser light with a simple configuration.
  • FIG. 13 is a configuration diagram showing a schematic configuration of an additive manufacturing apparatus 500 according to Embodiment 5. As shown in FIG. 13, the same or corresponding components as those shown in FIG. 1 are given the same reference numerals as those shown in FIG.
  • An additional manufacturing apparatus 500 according to Embodiment 5 differs from the additional manufacturing apparatuses 100, 200, 300, and 400 according to Embodiments 1 to 4 in that a lens array driving section 550 is provided in the processing head 5. . Except for this point, the additional manufacturing apparatus 500 according to the fifth embodiment is the same as the additional manufacturing apparatuses 100, 200, 300, and 400 according to the first to fourth embodiments. 4 and 6 are therefore referred to in the following description.
  • the additional manufacturing device 500 has a processing head 5, a stage 7, a stage driving section 8, and a control section 9 (see FIG. 6).
  • the processing head 5 has a light source section 10, a lens array 20, a plane mirror 40, a reflecting optical section 30, and a lens array driving section 550 as a third optical element driving section.
  • the lens array driver 550 moves the lens array 20 in the optical axis direction of the first laser beam L11. That is, the lens array driving section 550 is a lens array translation section that translates the lens array 20 in the ⁇ x-axis directions. In addition to the lens array driving section 550, the processing head 5 may have at least one of the lens array driving section 350 of the third embodiment and the lens array driving section 450 of the fourth embodiment. .
  • FIGS. 14A and 14B are explanatory diagrams explaining changes in the positions of the focused spots of the plurality of second laser beams L21 in the processing head 5 according to Embodiment 5.
  • FIG. FIG. 14(A) is a ray diagram showing the second laser beam L21 focused on the focused spot 80a when the lens array 20 shown in FIG. 13 is stopped.
  • the position of the condensed spot 80a in the z-axis direction when the lens array 20 is stopped is the position z1.
  • the distance between the lens array 20 and the light-collecting spot 80a is It matches the focal length of the lens that makes up 20 .
  • FIG. 14(B) is a ray diagram showing the second laser light L21 focused on the focused spots 80aa and 80ab when the lens array 20 shown in FIG. 13 moves in the -x-axis direction.
  • the position z2 is the position of the focused spots 80aa and 80ab in the z-axis direction.
  • the position z2 moves to the ⁇ z-axis side from the position z1 shown in FIG. 14(A).
  • the diameter of the focused spot of the second laser beam L21 with which the additional material is irradiated is increased. That is, in Embodiment 5, the diameter of the focused spot of the second laser beam L21 can be changed by moving the lens array 20 in the ⁇ x-axis directions.
  • the control unit 9 drives the lens array driving unit 550 based on at least one of the diameter of the wire and the properties of the additional material. In this way, by varying the diameter of the focused spot according to the diameter of the wire and the characteristics of the additional material, it is possible to control the heat distribution of each of the additional material and the object to be added, thereby improving the processing quality. can.
  • the lens array 20 splits the first laser beam L11 emitted from the light source unit 10 to form a plurality of second laser beams L21, and the second laser beams L21 to focus.
  • the reflecting optical section 30 directs the plurality of second laser beams L21 branched by the lens array 20 to the positions 70 to be processed. This makes it possible to avoid light shielding by the material supply unit 6 with a simple configuration. Therefore, it is possible to improve the utilization efficiency of laser light with a simple configuration.
  • the processing head 5 has the lens array driving section 550 that moves the lens array 20 in the optical axis direction of the first laser beam L11.
  • the lens array driving section 550 can change the diameters of the focused spots 80aa and 80ab of the plurality of second laser beams L21 split by the lens array 20.
  • FIG. The lens array driver 550 can change the diameters of the focused spots 80aa and 80ab according to, for example, the diameter of the additional material and the properties of the additional material. Therefore, it is possible to control the heat distribution of each of the addition material and the addition target, thereby improving the processing quality.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
PCT/JP2021/024519 2021-06-29 2021-06-29 加工ヘッド及び付加製造装置 Ceased WO2023275979A1 (ja)

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