WO2023238682A1 - 変形検出センサ - Google Patents

変形検出センサ Download PDF

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Publication number
WO2023238682A1
WO2023238682A1 PCT/JP2023/019516 JP2023019516W WO2023238682A1 WO 2023238682 A1 WO2023238682 A1 WO 2023238682A1 JP 2023019516 W JP2023019516 W JP 2023019516W WO 2023238682 A1 WO2023238682 A1 WO 2023238682A1
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WO
WIPO (PCT)
Prior art keywords
piezoelectric film
thickness
length
piezoelectric
detection sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/019516
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English (en)
French (fr)
Japanese (ja)
Inventor
昭三 大寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to CN202390000387.3U priority Critical patent/CN223272872U/zh
Priority to JP2024526360A priority patent/JP7635887B2/ja
Publication of WO2023238682A1 publication Critical patent/WO2023238682A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/047—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using sets of wires, e.g. crossed wires

Definitions

  • the present invention relates to deformation detection that detects deformation of an object.
  • the input device of Patent Document 1 includes an input pad whose periphery is held by a housing or the like.
  • the input device receives an operation from a user by applying force to an input pad.
  • the input device uses a plurality of sensors to detect and measure the position and magnitude of force applied to the input pad.
  • a plurality of sensors are arranged close to each corner of an input pad formed in a rectangular flat plate shape.
  • the plurality of sensors distort in response to forces applied to the input pad.
  • the input device of Patent Document 1 measures the magnitude and position of force applied to an input pad based on the outputs of a plurality of sensors.
  • the vibration device of Patent Document 2 includes a vibration unit and a touch panel. When a user presses the touch panel, the vibration unit transmits vibrations to the user.
  • the vibration unit includes a flat vibrating section, a frame member, and a beam (supporting section) connecting the vibrating section and the frame member.
  • the frame member and the vibrating section are connected via a piezoelectric film.
  • the vibrating device of Patent Document 2 expands and contracts the piezoelectric film by applying a voltage to the piezoelectric film, thereby vibrating the vibrating section.
  • Patent Document 1 requires at least two sensors in order to detect the position and magnitude of force applied to the input pad (touch panel) by multiple sensors.
  • Patent Document 2 since one sensor is connected to the vibrating part and the frame-shaped member, a force is generated on the piezoelectric film depending on the position where force is applied to the input pad in plan view. The deformation is different. In other words, when the user presses a point close to the connection point between the piezoelectric film and the vibrating section, the vertical displacement of the vibrating section at that connection point becomes larger than when pressing at a point far from the connection point, and the piezoelectric film The bending becomes large.
  • the deformation of the piezoelectric film caused by pressing in the vertical direction on the touch panel changes depending on the pressing position in plan view. Therefore, even if the pushing amount is the same, the deformation detection sensor will output different output values due to the difference in the pushing position.
  • An object of the present invention is to provide a deformation detection sensor that outputs a uniform output value even when the pushing position is different.
  • the deformation detection sensor includes a holding part that is connected to an operation panel that receives a push operation by a user and holds the operation panel, and a piezoelectric film that is connected to the holding part and detects deformation of the holding part.
  • the holding portion includes a first portion connected to the housing, a second portion connected to the operation panel, and a beam portion connecting the first portion and the second portion and having elasticity.
  • the piezoelectric film is connected across the first portion and the second portion.
  • the piezoelectric film has a first piezoelectric film and a second piezoelectric film stacked on each other. The first piezoelectric film and the second piezoelectric film are polarized to the same potential with different polarities when bent in the lamination direction.
  • the deformation detection sensor further includes: a holding part that is connected to an operation panel that receives a push operation by a user and holds the operation panel; and a piezoelectric film that is connected to the holding part and detects deformation of the holding part.
  • the holding portion includes a first portion connected to the housing, a second portion connected to the operation panel, and a plurality of elastic beam portions connecting the first portion and the second portion. , has.
  • the piezoelectric film is connected across the first portion and the second portion.
  • a first direction is a direction from a first connection position between the first part and the piezoelectric film to a second connection position between the second part and the piezoelectric film.
  • the plurality of beam portions include a first beam portion provided at a position near the second connection position along the first direction, and a position farther from the second connection position than the first beam portion. and a second beam section provided therein.
  • the first beam portion is less likely to deform in the thickness direction than the second beam portion.
  • FIG. 1 is an exploded perspective view of an electronic device 100 including a deformation detection sensor 10 according to a first embodiment.
  • FIG. 2 is a cross-sectional view taken along line AA in FIG.
  • FIG. 3 is a bottom view of the deformation detection sensor 10 of the first embodiment.
  • the electronic device 100 includes a touch panel 1, a housing 2, a deformation detection sensor 10, and an actuator 5.
  • the touch panel 1 in this example is an example of an operation panel of the present invention.
  • the left-right direction X1 in this example corresponds to the first direction of the present invention.
  • the vertical direction Y1 in this example corresponds to the second direction of the present invention.
  • “B” indicates the rear.
  • “F” indicates front.
  • “D” indicates bottom.
  • “U” indicates top.
  • the touch panel 1 includes, for example, a capacitive touch sensor.
  • the capacitive touch sensor detects a user's touch on the touch panel 1 .
  • the touch panel 1 also accepts push operations from the user.
  • the deformation detection sensor 10 detects a user's pushing operation.
  • the housing 2 is a rigid body and has a flat frame shape.
  • the housing 2 is made of, for example, SUS (Steel Use Stainless).
  • the housing 2 is formed to be elongated in the left-right direction X1.
  • the housing 2 has an elongated opening Op1 formed in the left-right direction X1 when viewed from above. Opening Op1 is larger than touch panel 1 when viewed in plan. The touch panel 1 is exposed from the housing 2 through the opening Op1.
  • the deformation detection sensor 10 includes a holding section 3 and a piezoelectric film 4.
  • the first portion 31 connects to the lower surface of the housing 2 in the vertical direction Y1.
  • the second portion 32 is connected to the lower surface of the touch panel 1 in the vertical direction Y1.
  • the piezoelectric film 4 is elongated in the left-right direction X1 when viewed from above and has a film shape.
  • the piezoelectric film 4 is arranged under the holding part 3.
  • the piezoelectric film 4 is connected across the right end of the first portion 31 and the right end of the second portion 32 of the holding portion 3 . More specifically, as shown in FIGS. 2 and 3, the first connection position 43, which is the right end of the piezoelectric film 4, is connected to the portion 31A of the first portion 31 of the holding portion 3. Further, the second connection position 44, which is the left end of the piezoelectric film 4, is connected to the portion 32A of the second portion 32 of the holding portion 3.
  • the piezoelectric film 4 deforms according to the force applied to the touch panel 1 by the user. Details of the piezoelectric film 4 will be explained below.
  • the portion 31A is the right end side of the first portion 31 in the left-right direction X1.
  • the portion 32A is the right end side of the second portion 32 in the left-right direction X1.
  • the portion 32B is the left end side of the second portion 32 in the left-right direction X1.
  • the actuator 5 is elongated in the left-right direction X1 when viewed from above, and has a film shape.
  • the actuator 5 is connected to the first part 31 and the second part 32 of the holding part 3. More specifically, as shown in FIG. 3, the actuator 5 is connected to the portion 31A of the first portion 31 at the right end in the left-right direction X1. Further, the actuator 5 is connected to the portion 32B of the second portion 32 at the left end in the left-right direction X1.
  • FIG. 4 is a side view of the piezoelectric film 4 seen from the front and rear directions of the first embodiment.
  • FIG. 5 is a side view of the bent piezoelectric film 4.
  • first piezoelectric film 41 and the second piezoelectric film 42 generate charges opposite to each other, and when the charge capacity of the first piezoelectric film 41 and the charge capacity of the second piezoelectric film 42 are the same or substantially the same, , generates an opposite potential.
  • the stacking direction is the same as the vertical direction Y1 in this example.
  • the first piezoelectric film 41 and the second piezoelectric film 42 are the same piezoelectric film.
  • the first piezoelectric film 41 and the second piezoelectric film 42 are rectangular films made of polyvinylidene fluoride (PVDF), for example. PVDF has piezoelectricity.
  • the first piezoelectric film 41 and the second piezoelectric film 42 have a piezoelectric constant of d31.
  • the thickness ts1 of the first piezoelectric film 41 and the thickness ts2 of the second piezoelectric film 42 are the same length.
  • the thickness ts1 of the first piezoelectric film 41 and the thickness ts2 of the second piezoelectric film 42 are, for example, 30 ⁇ m.
  • the first piezoelectric film 41 and the second piezoelectric film 42 have the same shape and the same size when viewed from above.
  • the first piezoelectric film 41 and the second piezoelectric film 42 have a rectangular shape that is long in the left-right direction X1 when viewed from above.
  • Each of the first piezoelectric film 41 and the second piezoelectric film 42 has electrode portions formed on the front and back sides (in FIG. 4, the top and bottom surfaces).
  • the first piezoelectric film 41 has a first electrode portion P11 formed on its upper surface.
  • the first piezoelectric film 41 has a second electrode portion P12 formed on the lower surface.
  • the second piezoelectric film 42 has a first electrode portion P21 formed on its upper surface.
  • the second piezoelectric film 42 has a second electrode portion P22 formed on the lower surface.
  • Each of the first electrode part P11, the second electrode part P12, the first electrode part P21, and the second electrode part P22 is a metal film of Cu, Al, Ni, or the like formed by vapor deposition, for example.
  • An arithmetic circuit (not shown) connected to the piezoelectric film 4 outputs an output value based on the sum of the first potential difference V1 and the second potential difference V2.
  • the deformation detection sensor 10 outputs a high output value for expansion and contraction deformation in the horizontal direction (including the longitudinal direction), and outputs an output value of zero or close to zero for bending deformation in the vertical direction.
  • FIG. 6 is a cross-sectional view showing an example of a pressed position of the touch panel 1 viewed from the front-rear direction Z1.
  • FIG. 7 is a cross-sectional view showing an example of deformation of the deformation detection section when point A is pressed.
  • FIG. 8 is a cross-sectional view showing an example of deformation of the deformation detection section when point B is pressed.
  • the vertical force Pd2 When pressed at point B, the vertical force Pd2 has a greater influence on the bending deformation of the piezoelectric film 4 than when pressed at point A. If the force applied when the user presses point A and point B on the touch panel 1 is the same, the amount of vertical bending deformation of the piezoelectric film 4 will be greater when pressed at point B.
  • FIG. 9 is a reference diagram showing an example of the output value of the piezoelectric film 4.
  • the horizontal axis shown in FIG. 9 indicates time.
  • the vertical axis shown in FIG. 9 is the output value of the piezoelectric film 4.
  • FIG. 10 is a reference diagram showing an example of the output value of the piezoelectric film of the reference example.
  • the horizontal axis shown in FIG. 10 indicates time.
  • the vertical axis shown in FIG. 10 is the output value of the piezoelectric film.
  • dotted lines Oa1 and Oa2 shown in FIGS. 9 and 10 indicate the output value at point A
  • solid lines Ob1 and Ob2 indicate the output value at point B.
  • the stress generated in the piezoelectric film is ⁇
  • the strain generated in the piezoelectric film is s
  • the Young's modulus of the piezoelectric film is Y
  • the electric field generated in the piezoelectric film is E
  • the potential difference (voltage) between the first and second principal surfaces of the piezoelectric film is )
  • the piezoelectric constant of the piezoelectric film is d31
  • the amount of bending deformation of the piezoelectric film in the left-right direction X1 is ⁇
  • the film length of the piezoelectric film in the left-right direction X1 is L
  • the dielectric constant of the piezoelectric film is ⁇
  • the thickness of the piezoelectric film Let be ts.
  • FIG. 11 is an exploded perspective view of an electronic device 100A including a deformation detection sensor 10A according to the second embodiment.
  • FIG. 12 is a side view of the piezoelectric film 4A viewed from the front-rear direction Z1 of the second embodiment.
  • FIG. 13 is a bottom view of the deformation detection sensor 10A of the second embodiment.
  • FIG. 14 is a sectional view taken along line BB in FIG. 13.
  • FIG. 15 is a reference diagram showing the output value of the piezoelectric film 4A when point A is pressed and when point B is pressed.
  • the horizontal axis in FIG. 15 indicates the distance from the second connection position 44. Further, the vertical axis in FIG. 15 indicates the output value of the deformation detection sensor 10A. Note that the same configurations as in Embodiment 1 are given the same reference numerals, and detailed explanations are omitted.
  • the amount of displacement of the second portion 32 of the holding portion 3A due to pressing on the touch panel 1 is controlled.
  • the deformation detection sensor 10A includes a piezoelectric film 4A, as shown in FIG.
  • the piezoelectric film 4A has a film shape that is elongated in the left-right direction X1, as shown in FIGS. 11 and 12.
  • the piezoelectric film 4A has a first electrode portion P31 on the upper surface and a second electrode portion P32 on the lower surface.
  • the piezoelectric film 4A has a piezoelectric body between the electrode parts.
  • the piezoelectric film 4A is connected to an arithmetic circuit (not shown).
  • the piezoelectric film 4A may be one piece, or may be configured by laminating a plurality of filters.
  • the holding portion 3A includes a plurality (two in FIG. 13) of first beam portions 33A and a plurality (two in FIG. 13) of second beam portions 33B.
  • the plurality of first beam portions 33A are provided at positions close to the second connection position 44 along the left-right direction X1. Further, the plurality of second beam portions 33B are provided at a position farther from the second connection position 44 than the position of the first beam portion 33A. Note that the number of the first beam portions 33A may be one. Further, the number of the second beam portions 33B may be one.
  • the first beam part 33A is less likely to deform in the thickness direction than the second beam part 33B. It is formed.
  • first beam portion 33A and the second beam portion 33B will be described in more detail.
  • the plurality of first beam portions 33A have a rectangular shape when viewed from above.
  • the plurality of second beam portions 33B have a rectangular shape when viewed from above.
  • the first thickness tf1 which is the length of the first beam portion 33A in the vertical direction Y1
  • the second thickness tf2 which is the length of the second beam portion 33B in the vertical direction Y1
  • the first thickness tf1 and the second thickness tf2 are preferably 0.3 mm to 10 mm.
  • a first length L1 is the length of the first beam portion 33A in the front-rear direction Z1
  • a second length is a length of the second beam portion 33B in the front-rear direction Z1. It is the same as L2.
  • the first length L1 and the second length L2 are preferably 5 mm to 30 mm.
  • the straight line Cp1 shown in FIG. 15 shows an inclination when the ratio of the first width W1 of the first beam part 33A to the second width W2 of the second beam part 33B is "1" to "1".
  • the straight line Cp2 shown in FIG. 15 shows an inclination when the ratio of the first width W1 of the first beam portion 33A to the second width W2 of the second beam portion 33B is “2” to “1”.
  • the slope of the straight line Cp1 is the largest.
  • the slope of straight line Cp3 is the smallest. That is, when the ratio of the first width W1 to the second width W2 is "1" to "1", the position of the piezoelectric film 4A when the point B is pressed increases as the pressed position moves away from the second connection position 44. The amount of deformation and the difference become larger.
  • the output value as a relative value of the piezoelectric film 4A when the point A is pressed is the smallest compared to the straight line Cp2 and the straight line Cp3.
  • the output value of the piezoelectric film 4A on the straight line Cp3 when the point A is pressed is closest to "1" compared to the straight lines Cp1 and Cp2. In this way, if the ratio between the first width W1 and the second width W2 is "3" to "1", the piezoelectric film 4A will change when point A is pressed and when point B is pressed. It can be considered that there is no difference in the amount of deformation in practical terms.
  • the piezoelectric film 4A is less likely to deform in the vertical direction Y1 when the touch panel 1 is pressed at point B than when the touch panel 1 is pressed at point A. Furthermore, when the piezoelectric film 4A is pressed at point A, it becomes more easily deformed in the vertical direction Y1 than when it is pressed at point B.
  • the amount of deformation of the piezoelectric film in the vertical direction Y1 when point A is pressed is the same. become.
  • the output value of the piezoelectric film 4A is the same as that of the piezoelectric film when point B is pressed. It will be the same as the output value of 4A.
  • the deformation detection sensor 10A of the second embodiment can output a uniform output value even if the touch panel 1 is pressed at different positions, as long as the amount of pressing is uniform.
  • FIG. 16 is a side view of a member showing an example of the deflection of the member used in the following explanation.
  • FIG. 16 is a side view of the member 6.
  • L shown in FIG. 16 indicates the length of the member 6 in the longitudinal direction of the member 6.
  • P shown in FIG. 16 indicates the force applied perpendicularly to the member 6. Further, the direction of the force P shown in FIG. 17 is indicated by an arrow.
  • FIG. 17 is a sectional view taken along line CC in FIG. 16.
  • h shown in FIG. 17 indicates the length (thickness) of the member 6 in the direction in which the member 6 is bent by the force P.
  • b shown in FIG. 17 indicates the length (width) of the member 6 in the direction perpendicular to the direction in which the force P is applied.
  • the member 6 is a long member with one end (the left end in FIG. 16) fixed. Further, the member 6 has a rectangular cross section, for example, as shown in FIG. 17.
  • the other end (free end) of the member 6 bends downward when a vertical force P is applied.
  • the cross section of the member 6 is rectangular with a width b and a thickness h.
  • the moment of inertia l of the member 6 is calculated using the following [Formula 4].
  • the bendability K1 of the first beam portion 33A in the vertical direction is expressed by the following [Formula 8].
  • the ratio of the two widths W2 is (W1:W2). Therefore, the ratio of the ease of bending K1 of the first beam portion 33A to the ease of bending K2 of the second beam portion 33B due to the force P in the perpendicular direction can be controlled by the first width W1 and the second width W2.
  • the first beam portion 33A and the second beam portion 33B are made of the same material.
  • the first thickness tf1, which is the length of the first beam portion 33A in the vertical direction Y1 (thickness direction), and the second thickness tf2, which is the length of the second beam portion 33B in the vertical direction Y1, are the same ( (See Figure 14).
  • the bendability of the first beam portion 33A in the horizontal direction (left-right direction X1) and the bendability of the second beam portion 33B in the horizontal direction (left-right direction X1) are the same K.
  • first beam portion 33A and the second beam portion 33B may be formed such that the first length L1 is longer than the second length L2.
  • the metal plate forming the housing 2 may be coated with a resin such as polyimide.
  • the housing 2 may be formed of a material other than a metal plate (for example, acrylic resin, PET, polycarbonate, glass epoxy, FRP, metal, glass, etc.).
  • the metal plates forming the holding parts 3 and 3A may be coated with a resin such as polyimide. Furthermore, the holding parts 3 and 3A may be formed of a material other than a metal plate (for example, acrylic resin, PET, polycarbonate, glass epoxy, FRP, metal, or glass).
  • the first portion 31, the second portion 32, and the plurality of beam portions 33 do not need to be formed from a single member.
  • the first portion 31, the second portion 32, the first beam portion 33A, and the second beam portion 33B do not need to be formed of a single member.
  • the electrode on the lower surface of the first piezoelectric film 41 and the electrode on the upper surface of the second piezoelectric film 42 do not need to be at ground potential (reference potential). In this case, the electrode on the upper surface of the first piezoelectric film 41 and the electrode on the lower surface of the second piezoelectric film 42 may be at ground potential.
  • ts1 ⁇ 2 ts2 ⁇ 1

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)
PCT/JP2023/019516 2022-06-10 2023-05-25 変形検出センサ Ceased WO2023238682A1 (ja)

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Application Number Priority Date Filing Date Title
CN202390000387.3U CN223272872U (zh) 2022-06-10 2023-05-25 变形检测传感器
JP2024526360A JP7635887B2 (ja) 2022-06-10 2023-05-25 変形検出センサ

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006107140A (ja) * 2004-10-05 2006-04-20 Sony Corp 触覚機能付きの入出力装置及び電子機器
WO2010143528A1 (ja) * 2009-06-11 2010-12-16 株式会社村田製作所 タッチパネルおよびタッチ式入力装置
JP2015118015A (ja) * 2013-12-18 2015-06-25 日本写真印刷株式会社 圧力検出器を備えたタッチパネル
WO2015129829A1 (ja) * 2014-02-26 2015-09-03 ダイキン工業株式会社 バイモルフ型圧電フィルム
WO2020137266A1 (ja) * 2018-12-27 2020-07-02 株式会社村田製作所 振動構造体および振動発生装置
WO2020213477A1 (ja) * 2019-04-19 2020-10-22 株式会社村田製作所 振動装置
WO2021005922A1 (ja) * 2019-07-08 2021-01-14 株式会社村田製作所 振動装置
WO2021079837A1 (ja) * 2019-10-23 2021-04-29 株式会社村田製作所 面方向型振動構造
WO2021177268A1 (ja) * 2020-03-06 2021-09-10 株式会社村田製作所 振動装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6048722B2 (ja) * 2012-06-26 2016-12-21 カシオ計算機株式会社 入力装置、電圧検出装置、入力操作解析方法、および、入力操作解析プログラム

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006107140A (ja) * 2004-10-05 2006-04-20 Sony Corp 触覚機能付きの入出力装置及び電子機器
WO2010143528A1 (ja) * 2009-06-11 2010-12-16 株式会社村田製作所 タッチパネルおよびタッチ式入力装置
JP2015118015A (ja) * 2013-12-18 2015-06-25 日本写真印刷株式会社 圧力検出器を備えたタッチパネル
WO2015129829A1 (ja) * 2014-02-26 2015-09-03 ダイキン工業株式会社 バイモルフ型圧電フィルム
WO2020137266A1 (ja) * 2018-12-27 2020-07-02 株式会社村田製作所 振動構造体および振動発生装置
WO2020213477A1 (ja) * 2019-04-19 2020-10-22 株式会社村田製作所 振動装置
WO2021005922A1 (ja) * 2019-07-08 2021-01-14 株式会社村田製作所 振動装置
WO2021079837A1 (ja) * 2019-10-23 2021-04-29 株式会社村田製作所 面方向型振動構造
WO2021177268A1 (ja) * 2020-03-06 2021-09-10 株式会社村田製作所 振動装置

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