WO2023231756A1 - Three-dimensional stacked chip and data processing method therefor - Google Patents

Three-dimensional stacked chip and data processing method therefor Download PDF

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Publication number
WO2023231756A1
WO2023231756A1 PCT/CN2023/094307 CN2023094307W WO2023231756A1 WO 2023231756 A1 WO2023231756 A1 WO 2023231756A1 CN 2023094307 W CN2023094307 W CN 2023094307W WO 2023231756 A1 WO2023231756 A1 WO 2023231756A1
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storage
module
control
data
modules
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PCT/CN2023/094307
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French (fr)
Chinese (zh)
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李乾男
王棋
薛小飞
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西安紫光国芯半导体股份有限公司
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Publication of WO2023231756A1 publication Critical patent/WO2023231756A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/4063Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
    • G11C11/407Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
    • G11C11/409Read-write [R-W] circuits 
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5386Geometry or layout of the interconnection structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02DCLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
    • Y02D10/00Energy efficient computing, e.g. low power processors, power management or thermal management

Definitions

  • the present application relates to the field of integrated circuit technology, and in particular to a three-dimensional stacked chip and a data processing method thereof.
  • the traditional Dynamic Random Access Memory (DRAM) interface consists of address bits, data bits and command bits.
  • the command bits and address bits are first received and decoded to generate a storage array module (bank). Control signals and address information, then receive the data for serial-to-parallel conversion and then send it to the bank.
  • the command bit and address bit are first received, decoded to generate the bank's control signal and address information, and then the bank outputs the data, which is output through parallel-to-serial conversion.
  • traditional DRAM can only perform read and write operations on one bank at a time, that is, all banks operate in a time-sharing manner, and the bandwidth is greatly limited.
  • embodiments of the present application provide a three-dimensional stacked chip and a data processing method thereof, which can increase the bandwidth of the DARM, thus helping to increase the data processing speed of the chip.
  • embodiments of the present application provide a three-dimensional stacked chip, including: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer.
  • the storage wafer layer includes M storage array modules.
  • N storage control modules are correspondingly provided in the logic wafer layer, each of the storage control modules is connected to k storage array modules through a wafer-level interlayer connection structure, and is used to control the respective connected storage array modules.
  • the storage array module performs data writing or reading operations, where M and N are both integers greater than or equal to 2, and N is less than or equal to M, and k is an integer greater than or equal to 1 and less than M.
  • each of the storage control modules is directly connected to the data and control bus of one of the storage array modules through the wafer-level interlayer connection structure, and the data and control buses of different storage array modules are independent of each other.
  • the storage wafer layer also includes: a control set in one-to-one correspondence with the storage control module.
  • Logic module the storage control module is connected to the control logic module through a wafer-level interlayer connection structure, and the control logic module is directly connected to the data and control buses of k storage array modules respectively.
  • the control logic module The module is used to: time-share control of k storage array modules to perform data writing or reading operations according to the data writing or reading signals sent by the storage control module.
  • the data writing or reading signal includes chip selection control information and writing or reading information
  • the control logic module is specifically configured to: select data from k memory array modules according to the chip selection control information. Determine the storage array module to be written or read, and perform operations on the storage array module based on the write or read information. Row data writing or reading operations.
  • control logic module is specifically configured to: determine the storage array module to be written or read from the k storage array modules according to the address space corresponding to the data writing or reading signal, and according to The data write or read signal performs a data write or read operation on the storage array module.
  • the storage wafer layer includes k storage wafers arranged in a stack, and k storage array modules connected to one storage control module are respectively distributed in There are k memory wafers, and a chip select channel is provided between the memory control module and the k memory array modules for selecting one of the memory array modules to perform the data writing or reading operation.
  • the logic wafer layer is also provided with a processing module, and each of the storage control modules is connected to the processing module.
  • the processing module is used to determine the storage array module to be operated, and to connect the storage array module to be operated.
  • the storage control module of the storage array module sends data operation information; each storage control module is provided with a decoding and analysis module, and the decoding and analysis module decodes and analyzes the commands and addresses in the data operation information, to perform data writing or reading operations on the storage array module to be operated.
  • the processing module receives the data write command and the write data, and determines the write address of the write data according to the occupied space of the write data and the storage space of the storage array module to determine the The storage array module is to be operated.
  • the processing module stores the written data in the first storage array module and the second storage array module, the The first storage array module and the second storage array module are controlled by different storage control modules; or the first storage array module and the second storage array module are located on different storage wafer layers, and are controlled by different storage control modules. Control module control.
  • the inter-layer connection structure includes a data channel and a control channel, the data channel is used to transmit data signals for writing or reading, and the control channel is used for transmitting control signals for controlling data writing or reading.
  • control signal includes a command signal and an address signal; wherein the command signal includes a row operation enable signal, a column operation enable signal and a write data control signal; the address signal includes a row address signal and a column address. Signal.
  • embodiments of the present application also provide a data processing method for a three-dimensional stacked chip.
  • the three-dimensional stacked chip includes: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer.
  • the storage wafer layer includes M storage array modules, and N storage control modules are correspondingly provided in the logic wafer layer.
  • Each of the storage control modules is connected to k storage array modules through a wafer-level interlayer connection structure. connection, used to control the respective connected storage array modules to perform data writing or reading operations, where M and N are both integers greater than or equal to 2, and N is less than or equal to M, and k is greater than or equal to 1 and An integer less than M.
  • the method includes: receiving a storage control signal; based on the storage control signal, using multiple storage control modules to perform data writing or reading operations in parallel on the storage array module connected to the storage control module.
  • each storage control module is connected to k storage array modules through the wafer-level interlayer connection structure
  • the blocks are directly connected, and k is an integer greater than or equal to 1 and less than M, so that different storage control modules control the respective connected storage array modules to perform data writing or reading operations.
  • the DRAM interface bit width is no longer limited by packaging and hardware systems, and the DRAM storage array interface signal can be output directly to realize parallel read and write access to multiple storage array modules in the storage wafer layer, effectively improving the performance of DRAM. Data access bandwidth, thereby helping to improve the data processing speed of the chip.
  • Figure 1 shows an exemplary conventional DRAM block diagram
  • Figure 2 shows a schematic diagram 1 of the packaging of a three-dimensional stacked chip in the embodiment of this specification
  • Figure 3 shows a schematic diagram 1 of a two-layer structure chip in the embodiment of this specification
  • Figure 4 shows a schematic diagram of data writing in the embodiment of this specification
  • Figure 5 shows a schematic diagram of a three-layer structure chip in an embodiment of this specification
  • Figure 6 shows a schematic diagram 2 of a two-layer structure chip in the embodiment of this specification
  • Figure 7 shows a flow chart of a data processing method for three-dimensional stacked chips in an embodiment of this specification
  • Figure 8 shows the second package schematic diagram of the three-dimensional stacked chip in the embodiment of this specification
  • Figure 9 shows an exemplary timing relationship diagram of the address signal and the address enable signal
  • Figure 10 shows a circuit diagram of the first timing control circuit in the embodiment of this specification
  • Figure 11 shows an exemplary transmission timing diagram of the address enable signal and the address signal in the embodiment of this specification
  • Figure 12 shows a flow chart of the timing control method in the embodiment of this specification.
  • Figure 1 shows a traditional DRAM block diagram with an 8-bit data interface and 8x internal prefetching.
  • the entire DRAM has a total of 8 storage array modules (banks), namely bank0 ⁇ bank7.
  • the address and control lines of bank0 ⁇ bank7 are all connected to the same decoding and address analysis module set in the DRAM, and the data lines are all connected to the same decoding and address analysis module set in the DRAM.
  • the same parallel-to-serial conversion module is connected.
  • rwd0 to rwd7 represent the data of bank0 to bank7, and are illustrated as 64 bits in the figure. Taking the write operation as an example, the decoding and address parsing module first receives the command and address information sent from the outside.
  • the address information includes the bank address information.
  • the parallel-to-serial conversion module receives the data signal dqs/dq ⁇ 7:0> to be written, performs serial-to-parallel conversion, converts it into a 64-bit data signal rwd ⁇ 63:0>, and then sends it to the The bank completes data writing. In other words, only one bank can be read and written at a time.
  • the DRAM interface data bit width cannot be very large, which results in the internal storage array interface bit width being much larger than the DRAM interface bit width. Therefore, the interface speed after parallel-to-serial conversion is much higher than the internal Storage array storage rate, for example, for the 8x prefetch structure in the above example, if the external interface data bit width is 8 bits, then the internal storage array bit width is 64 bits, and if the storage array speed is 200Mbps, the interface rate needs to reach 1600Mbps. Therefore, it is not conducive to improving the data access bandwidth of DRAM.
  • embodiments of this specification provide a three-dimensional stacked chip that abandons the decoding and address resolution modules and serial-to-parallel conversion modules in traditional DRAM.
  • the chip package is Previously, each storage control module was directly connected to k storage array modules through a wafer-level interlayer connection structure, where k was an integer greater than or equal to 1 and less than M, thereby controlling the respective connected storage array modules through different storage control modules.
  • the embodiment of this specification provides a three-dimensional stacked chip 100, which may be, for example, a SOC chip (System on Chip).
  • the three-dimensional stacked chip 100 may include: a storage wafer layer 102 and a logic wafer layer 101 stacked with the storage wafer layer 102 .
  • the number of layers of memory wafers and logic wafers in the three-dimensional stacked chip 100 shown in the drawings provided in this embodiment is only for illustration and is not limiting. During specific implementation, it can be set according to actual needs.
  • the storage wafer layer 102 includes one or more stacked storage wafers for expanding storage space.
  • M memory array modules 121 are distributed in the memory wafer layer 102, where M is an integer greater than or equal to 2.
  • the specific number of layers of the storage wafer and the number of storage array modules 121 are set according to the requirements for chip storage capacity in actual application scenarios.
  • each memory wafer may include 4, 8, or 16 memory array modules 121.
  • N storage control modules 111 are provided in the logic wafer layer 101. N is also an integer greater than or equal to 2, and N is less than or equal to M. Each storage control module 111 is connected to k storage array modules 121 through the wafer-level interlayer connection structure 103, and is used to control the respective connected storage array modules 121 to perform data writing or reading operations. Where, k is an integer greater than or equal to 1 and less than M. Each storage array module 121 is connected to a storage control module 111 , and different storage control modules 111 are connected to different storage array modules 121 .
  • one storage control module 111 can be connected to one storage array module 121, that is, the storage control module 111 and the storage array module 121 are connected in a one-to-one correspondence; in another embodiment, one storage control module 111 can be connected to one storage array module 121. Connect multiple storage array modules 121, for example, a storage control module 111 Two storage array modules 121 are connected, and another storage control module 111 is connected to three storage array modules 121 .
  • multiple storage control modules 111 can simultaneously control the corresponding connected storage array modules 121 to perform data reading and writing operations, so that the logic wafer can read and write in parallel one of the storage array modules connected to different storage control modules 111 121, that is, it can at least realize parallel read and write access to N storage array modules 121 in the storage wafer layer 102, without being restricted by packaging and hardware systems, effectively improving the data access bandwidth of DRAM, thereby conducive to improving the data of the chip. Processing speed.
  • the specific number of storage control modules 111 and the connected storage array modules 121 are determined according to the number of storage array modules 121 in the storage wafer layer 102 and the actual control logic.
  • k can be 1, and N equals M, that is, one storage control module 111 can correspondingly control one storage array module 121.
  • the logic wafer can read and write all the storage array modules 121 of the storage wafer in parallel, so the bandwidth can be greatly improved.
  • the M storage array modules 121 distributed in the storage wafer layer 102 can also be divided into multiple groups. At least one group includes multiple storage array modules 121.
  • One storage control module 111 correspondingly controls one group of storage array modules 121.
  • k is the number of storage array modules 121 in the corresponding group, and N is equal to the number of divided groups.
  • the memory wafer (DRAM die) and the logic wafer (logic die) can be connected through wafer-level interconnection methods such as hybrid bonding technology (Hyrid bonding), RDL (Redistribution Layer, rewiring layer) and TSV (Through Silicon Via) technology are connected and packaged together to form a three-dimensional stacked chip 100.
  • wafer-level interconnection methods such as hybrid bonding technology (Hyrid bonding), RDL (Redistribution Layer, rewiring layer) and TSV (Through Silicon Via) technology are connected and packaged together to form a three-dimensional stacked chip 100.
  • each storage control module 111 and the corresponding k storage array modules 121 can be achieved through the wafer-level interlayer connection structure 103 .
  • the DRAM interface bit width is no longer limited by packaging and hardware systems, and the interface signals of the storage array module 121 can be directly output.
  • the logic wafer can directly control multiple storage array modules 121 to read and write at the same time, effectively improving the data of DRAM. Access bandwidth.
  • the inter-layer connection structure 103 can be implemented using applicable wafer-level interconnection technology, which is determined based on the actual wiring requirements between the storage control module 111 and the storage array module 121, and is not limited here.
  • the interlayer connection structure 103 may include one or more combinations of a hybrid bonding structure, a wiring structure in an RDL layer, and a through silicon via structure.
  • the inter-layer connection structure 103 serves as a signal transmission channel between the storage control module 111 and the storage array module 121, and is used to transmit signals required for data writing or reading operations on the storage array module 121.
  • the inter-layer connection structure 103 may include data channels and control channels.
  • the data channel is used to transmit written or read data signals, and the bit width of the data channel can be determined based on the data bit width that the storage array module 121 can write or read at one time and the data bit width of the actual logic wafer. As shown in Figure 3, 64 bits are used as an example.
  • rwd0 ⁇ 63:0> ⁇ rwd7 ⁇ 63:0> represent the data signals of bank0 ⁇ bank7. During specific implementation, it can also be other widths such as 128 or 256.
  • the control channel is used to transmit control signals that control data writing or reading.
  • the control signals transmitted in the control channel may include command signals and address signals.
  • the command signal may include but is not limited to: a row operation enable signal, a column operation enable signal, and a write data control signal, and the details may be determined according to actual needs.
  • the row operation enable signal can also be called a bank row valid indication, which is used to indicate that the row address can be captured for decoding.
  • the column operation enable signal which can also be called the bank column write and read address control signal, is used to indicate that the column address can be captured for decoding.
  • the write data control signal is used to instruct data to be written in the corresponding column.
  • the address signals may include row address signals and column address signals.
  • the address bit width is determined according to the row and column structure of DRAM.
  • control and status signals in Figure 3 represent the control signals required for DRAM operation, such as powerdown control, bank_fail, etc.
  • the specific signal types and the structure of other control circuits can be referred to DRAM related technologies, and will not be described in detail here.
  • a processing module 110 may also be provided in the logic wafer layer 101.
  • Each storage control module 111 is connected to the processing module 110.
  • the processing module 110 is used to determine the storage array module to be operated. , that is, determine which storage array modules 121 in the storage wafer layer 102 are to perform data reading or writing operations, and send data operation information to the storage control module connected to the above-mentioned storage array module to be operated.
  • the data operation information may include commands and addresses, and if the data operation is a write operation, it may also include data information to be written.
  • Each storage control module 111 includes a decoding and analysis module. The decoding and analysis module decodes and analyzes the commands and addresses in the data operation information to perform data writing or reading operations on the storage array module to be operated.
  • the processing module 110 may receive a data write command and write data, and determine the write address of the write data based on the occupied space of the write data and the storage space of the storage array module 121, that is, determine the storage array module to be operated. In response to the occupied space of the written data being less than or equal to the storage space of the storage array module 121, one storage array module 121 may be determined as the storage array module to be operated.
  • the processing module 110 In response to the occupied space of the written data being larger than the storage space of the storage array module 121, the processing module 110 needs to determine multiple storage array modules 121 that are adapted to the above occupied space as the storage array modules to be operated. The specific number is determined according to the written data. The occupied space and the storage space of the storage array module 121 are determined. For example, if the storage array module to be operated includes a first storage array module 121a and a second storage array module 121b, then the write data is stored in the first storage array module and the second storage array module. The first storage array module and the second storage array module are controlled by different storage control modules 111 . It should be noted that the first memory array module and the second memory array module may be located on the same storage wafer layer, or may be located on different memory wafer layers.
  • the storage control module 111 that controls the first storage array module 121a is the first storage control module 111a
  • the storage control module 111 that controls the second storage array module 121b is the second storage control module 111b
  • the processing module 110 may send the first data writing information to the first storage control module 111a and the second data writing information to the second storage control module 111b, so that the writing is performed in parallel through the first storage control module 111a and the second storage control module 111b.
  • the input data is stored in the first storage array module 121a and the second storage array module 121b.
  • the processing module 110 can respectively send the first data reading information to the first storage control module 111a and the second data reading information to the second storage control module 111b according to the data reading address, whereby, the first storage control module 111a and the second storage control module 111b process data from the first storage control module 111b in parallel. Data is read from the memory array module 121a and the second memory array module 121b.
  • the processing module 110 determines bank0 and bank1 as the storage array modules to be operated based on the occupied space of the written data and the storage space of the storage array module 121, Thus, part of the written data is stored in bank0 in parallel through bank0_ctrl and bank1_ctrl respectively, and the other part of the written data is stored in bank1. Specifically, the processing module 110 sends the first data writing information to bank0_ctrl and the second data writing information to bank1_ctrl respectively.
  • the information includes writing command, writing address and data information; the decoding and analysis module in bank0_ctrl
  • the write command and write address in the data write information are decoded and analyzed.
  • bank0_ctrl sends bank activation information to bank0.
  • the write command and write address are sent to bank0 through the data channel and control channel respectively. address and data information to complete the data writing to bank0; the decoding and analysis module in bank1_ctrl decodes and analyzes the write command and write address in the second data write information.
  • bank1_ctrl sends bank activation information to bank1 , after bank1 is activated, send the write command, write address and data information to bank1 through the data channel and control channel respectively to complete the data writing to bank1.
  • the processing module 110 can respectively send the first data reading information to bank0_ctrl, send the second data reading information to bank1_ctrl, and read from bank0 and bank1 in parallel through bank0_ctrl and bank1_ctrl. data.
  • connection relationship between the storage control module 111 in the logic wafer layer 101 and the storage array module 121 in the storage wafer layer 102 may have various situations. set up. Below are some main examples for explanation.
  • the structure is directly connected to the data and control bus of one memory array module 121 in the memory wafer, and the data and control buses of different memory array modules 121 are independent of each other.
  • the data and control bus include: data signal lines and control signal lines.
  • the data signal lines can be used to transmit data signals, such as rwd0 ⁇ 63:0>.
  • the control signal lines include command signal lines and address signal lines, which can be used to transmit the above command signals and address signals. In this way, the M memory array modules 121 in the memory wafer can perform read and write access at the same time.
  • the three-dimensional stacked chip chip0 includes a logic die and a DRAM die.
  • the DRAM die includes 8 banks, respectively represented as bank0 ⁇ bank7.
  • the logic die includes 8 storage control modules 111, respectively represented as bank0_ctrl ⁇ bank7_ctrl.
  • bank0_ctrl is connected to bank0 through the inter-layer connection structure
  • bank1_ctrl is connected to bank1 through the inter-layer connection structure
  • bank7_ctrl is connected to bank7 through the inter-layer connection structure.
  • the storage wafer layer includes multi-layer storage wafers.
  • the interconnection structure is directly connected to the data and control buses of each memory array module 121 in the memory wafer layer, and the data and control buses of different memory array modules 121 are independent of each other. In this way, all memory array modules 121 in different memory wafers can perform read and write access at the same time.
  • the three-dimensional stacked chip chip1 is a three-layer structure including one logic die and two DRAM dies, namely DRAM die0 and DRAM die1.
  • DRAM die0 includes 8 banks, respectively Represented as bank00 ⁇ bank07
  • DRAM die1 also includes 8 banks, respectively represented as bank10 ⁇ bank17.
  • there are 16 storage control modules 111 in the logic die respectively represented as bank0_ctrl ⁇ bank15_ctrl.
  • bank0_ctrl ⁇ bank7_ctrl are connected to bank00 ⁇ bank07 in DRAM die0 through the inter-layer connection structure in a one-to-one correspondence
  • bank8_ctrl ⁇ bank15_ctrl are connected through the layer
  • the inter-connection structure is connected to bank10 ⁇ bank17 in DRAM die1 in a one-to-one correspondence (not shown in the figure), so that bank00 ⁇ bank07 and bank10 ⁇ bank17 can perform read and write access at the same time.
  • k is an integer greater than or equal to 2 and less than M
  • the k memory array modules 121 connected to each memory control module 111 are distributed on the same memory wafer.
  • the storage wafer is also provided with: a control logic module corresponding to the storage control module 111.
  • the storage control module 111 is connected to the control logic module through a wafer-level interlayer connection structure.
  • the control logic module is respectively connected to the above k
  • the data and control buses of the storage array modules 121 are directly connected.
  • the control logic module is used to: time-share control of the k connected storage array modules 121 to perform data writing or reading operations according to the data writing or reading signals sent by the storage control module 111.
  • the specific control logic of the control logic module can be set according to actual needs.
  • chip selection control information can be set in the data writing or reading signal, and the control logic module determines the storage array module 121 to be activated this time by identifying the chip selection control information. That is to say, the data writing or reading signal includes chip selection control information and writing or reading information.
  • the control logic module is specifically used to: determine the data to be written from the k memory array modules 121 according to the chip selection control information. or read the memory array module 121, and perform data writing or reading operations on the memory array module 121 according to the writing or reading information.
  • k storage array modules 121 connected to the same control logic module can also be divided into different address spaces, and the address space corresponding to the address information in the data writing or reading signal can be determined by distinguishing the address space.
  • the first control logic module 501, the second control logic module 502, the third control logic module 503 and the fourth control logic module 504 are respectively connected to the four storage control modules in the logic die through the wafer level inter-layer connection structure: bank01_ctrl, bank23_ctrl , bank45_ctrl, bank67_ctrl are connected in one-to-one correspondence.
  • the eight banks are respectively represented as bank0 ⁇ bank7.
  • the first control logic module 501 is connected to bank0 and bank1 respectively.
  • the second control logic module 502 is connected to bank2 and bank3 respectively.
  • the third control logic module 503 is connected to bank4 and bank5 respectively.
  • the four control logic modules 504 are connected to bank6 and bank7 respectively. In this way, each group of banks can be time-shared and connected to the interface in the DRAM die for connection with the corresponding storage control module 111 through the corresponding control logic module.
  • the logic die can realize parallel reading and writing of the four banks in the DRAM die.
  • k is an integer greater than or equal to 2 and less than M.
  • the storage wafer layer includes k stacked storage wafers.
  • the k storage array modules 121 connected to each storage control module 111 are respectively distributed in k Storage wafer. At this time, there are disposed between the storage control module 111 and the k connected storage array modules 121
  • the chip select channel is used to select one of the memory array modules 121 to perform data writing or reading operations.
  • the three-dimensional stacked chip 100 is a three-layer structure including one logic die and two DRAM dies, namely DRAM die0 and DRAM die1.
  • DRAM die0 includes 8 banks, represented by bank00 ⁇ bank07 respectively.
  • DRAM die1 also includes 8 banks, represented by bank10 ⁇ bank17 respectively.
  • bank0_ctrl is connected to bank00 in DRAM die0 and bank10 in DRAM die1 through the inter-layer connection structure
  • bank2_ctrl ⁇ bank7_ctrl is connected to bank0_ctrl. similar.
  • a chip select channel is set up between bank0_ctrl and the connected bank00 and bank10, and banks on different DRAM dies are activated according to the chip select channel.
  • the command channel used to transmit row valid instructions can be used as the chip select channel
  • other control channels and data channels between bank0_ctrl and bank00 and bank10 except the command channel can be used as the chip select channel. Can be shared.
  • inventions of this specification also provide a data processing method for three-dimensional stacked chips.
  • the three-dimensional stacked chip includes: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer.
  • the storage wafer layer includes M storage array modules 121 , and there are N corresponding logic wafer layers.
  • Each storage control module 111 is connected to k storage array modules 121 through a wafer-level interlayer connection structure, and is used to control the respective connected storage array modules 121 to perform data writing or reading operations, where M , N are all integers greater than or equal to 2, and N is less than or equal to M, and k is an integer greater than or equal to 1 and less than M.
  • M , N are all integers greater than or equal to 2
  • N is less than or equal to M
  • k is an integer greater than or equal to 1 and less than M.
  • the data processing method includes the following steps S701 and S702.
  • Step S701 receive storage control signal
  • Step S702 Based on the storage control signal, use multiple storage control modules to perform data writing or reading operations in parallel on the storage array module connected to the storage control module.
  • the storage control signal is used to indicate the storage array module 121 to be operated for this data access and operation-related information such as commands, addresses, data, etc.
  • the storage array module 121 to be operated may be one or multiple.
  • multiple storage control modules 111 can be used to perform data writing or reading operations on the connected storage array modules 121 in parallel.
  • the storage control signal may include a data writing command and writing data, and the writing address of the writing data may be determined according to the occupied space of the writing data and the storage space of the storage array module 121, so as to The storage array module 121 to be operated is determined. Specifically, in response to the occupied space of the written data being larger than the storage space of the storage array module 121, the written data is stored in the first storage array module and the second storage array module.
  • the first storage array module and the second storage array module They are controlled by different storage control modules 111; or, the first storage array module and the second storage array module are located on different storage wafer layers and are controlled by different storage control modules 111.
  • the specific process please refer to the relevant descriptions above and will not be repeated here.
  • bank0_ctrl For example, for the first three-dimensional stacked chip structure mentioned above, taking the exemplary structure shown in FIG. 3 as an example, assuming that the memory array modules 121 to be operated are: bank0 ⁇ bank7, the processing can be completed in parallel through bank0_ctrl ⁇ bank7_ctrl. Data writing or reading operations of bank0 ⁇ bank7. write with data Taking the operation as an example, you can send data operation information to bank0_ctrl ⁇ bank7_ctrl respectively. This information includes write command, write address and data information; then, the decoding and analysis module in bank0_ctrl writes the write command in the data write information and Write the address for decoding analysis. After that, bank0_ctrl sends bank activation information to bank0.
  • bank0 After bank0 is activated, it sends the write command, write address and data information to bank0 through the data channel and control channel respectively to complete the data writing to bank0. Enter; similarly, bank1_ctrl ⁇ bank7_ctrl complete the data writing to bank1 ⁇ bank7 respectively.
  • the memory array modules 121 to be operated are: bank0, bank2, bank4 and bank6, through bank01_ctrl, bank23_ctrl, bank45_ctrl and bank67_ctrl
  • the control logic module activates bank0, bank2, bank4 and bank6, thereby completing the data writing or reading operations on bank0, bank2, bank4 and bank6 in parallel.
  • the above three-layer structure of logic die, DRAM die0 and DRAM die1 is also taken as an example.
  • the memory array module 121 to be operated is: bank00 ⁇ bank07 in DRAM die0, then it can Activate bank00 ⁇ bank07 on DRAM die0 through the chip select channel, so that the data writing or reading operations on bank00 ⁇ bank07 are completed in parallel through bank0_ctrl ⁇ bank7_ctrl.
  • the three-dimensional stacked chip 200 provided by the embodiment of this specification includes: a logic chip 201, a memory chip 202, and a first timing control circuit 230.
  • the memory chip 202 includes M memory array modules 121 (banks) for storing data. M is an integer greater than or equal to 2.
  • the logic chip 201 and the memory chip 202 are stacked and packaged using chip stack packaging technology.
  • Chip stack packaging technology is a technology that realizes three-dimensional heterogeneous integration of chips.
  • the current technology that realizes three-dimensional heterogeneous integration of logic chips 201 and memory chips 202 is mainly hybrid bonding technology.
  • the logic chip 201 can access multiple banks in the memory chip 202 in parallel through the wafer-level interlayer connection structure 103, such as a hybrid bonding structure, a through silicon via structure, etc.
  • the specific structure of the logic chip 201 may refer to the structure of the logic wafer layer 101 in the first embodiment.
  • the specific structure of the memory chip 202 may refer to the structure of the storage wafer layer 102 in the first embodiment.
  • N storage control modules 111 are correspondingly provided in the logic chip 201.
  • N is also an integer greater than or equal to 2, and N is less than or equal to M.
  • Each storage control module 111 is connected to k storage array modules 121 through the wafer-level interlayer connection structure 103, and is used to control the respective connected storage array modules 121 to perform data writing or reading operations.
  • k is an integer greater than or equal to 1 and less than M.
  • multiple storage control modules 111 can simultaneously control the corresponding connected storage array modules 121 to perform data reading and writing operations.
  • the logic chip 201 can read and write in parallel one of the storage array modules connected to different storage control modules 111.
  • 121 that is, it can at least realize parallel read and write access to the N memory array modules 121 in the memory chip 202 without being limited by packaging and hardware systems, effectively improving the data access bandwidth of DRAM, thereby conducive to improving High chip data processing speed.
  • the three-dimensional stacked chip 200 includes a logic die and a DRAM die.
  • the DRAM die includes 8 banks, respectively represented as bank0 ⁇ bank7.
  • bank0_ctrl is connected to bank0 through the wafer-level interlayer connection structure 103
  • bank1_ctrl is connected to bank1 through the wafer-level interlayer connection structure 103
  • bank7_ctrl is connected to bank7 through the wafer-level interlayer connection structure 103.
  • the logic die can access all banks in parallel through eight storage control modules 111.
  • the logic die can also be equipped with a number of storage control modules 111 less than the number of banks.
  • storage control modules 111 there are four storage control modules 111, namely bank0_ctrl ⁇ bank3_ctrl.
  • bank0_ctrl is connected to bank0 and bank1 through the wafer level interlayer connection structure 103
  • bank1_ctrl is connected to bank2 and bank3 through the wafer level interlayer connection structure 103
  • bank3_ctrl is connected to bank6 and bank7 through the wafer level interlayer connection structure 103. connect.
  • each storage control module 111 in the logic chip 201 accesses the bank directly and directly accesses the storage array.
  • the access process involves the transmission of various signals needed to read and write data, such as address enable signal, address signal, data enable signal and data signal.
  • some signals need to meet certain timing relationships.
  • the address enable signal and the address signal need to match each other.
  • the required establishment time range of the address signal relative to the address enable signal is -100ps to 100ps;
  • the data enable signal and the data signal match each other to accurately complete the data read and write operations.
  • the above-mentioned multi-channel signals with timing matching relationships are called multiple-channel first target signals, and the port in the storage control module 111 that outputs the above-mentioned multiple-channel first target signals is referred to as a target output end.
  • the decoding and analysis module of each storage control module 111 is provided with a signal generation circuit that generates the multiple first target signals, and the above target output end is the output end of the corresponding signal generation circuit.
  • timing control logic can be added to the target output end of each storage control module 111 in the logic chip 201 to control the target output end to output the output of the multiple first target signals. time to meet the interface timing conditions of the DRAM memory array to the above-mentioned multiple first target signals. At this time, the target output terminals of each storage control module 111 in the logic chip 201 are connected to the above-mentioned timing control logic, and the output terminals of the timing control logic are directly connected to the storage array module 121 through the wafer-level interlayer connection structure.
  • the design of the above-mentioned timing control logic is relatively difficult. It is usually necessary to use a fully customized method to design a dedicated physical interface hard core on the logic chip 201 to meet this timing. This brings additional overhead to the design of the logic chip 201, which mostly adopts a semi-custom process, and also makes the semi-custom layout Cabling is restricted.
  • the logic chip 201 contains multiple hard cores PHY to meet the interface timing requirements of the DRAM, the timing and functional verification between these hard cores and the logic of the logic chip 201 involves full customization and semi-customization co-design verification, workload and difficulty Both are very large. In addition, the existence of the hard core blocks the layout and routing of the logic chip 201, making the back-end design more difficult.
  • a first timing control circuit 230 can be provided in the three-dimensional stacked chip to control the multiple first target signals output by the target output terminal to reach the memory array module based on the received clock signal. 121 to meet the interface timing conditions of the memory array module 121 for the above-mentioned multiple first target signals. This can meet the timing requirements of the storage array for these first target signals with timing matching relationships, thereby ensuring the normal operation of the three-dimensional stacked chip, and is easy to implement. There is no need to design a special physical interface hard core on the logic chip 201, which is beneficial to reducing the cost. The design difficulty of logic chip 201.
  • a first timing control circuit 230 can be added to control the timing of signals output by the corresponding signal output ports of the storage control module 111 reaching the corresponding bank.
  • this semi-custom process design is conducive to simplifying the design process and difficulty of the logic chip 201, thereby accelerating the logic chip 201 development progress.
  • each memory control module 111 in the logic chip 201 are connected to the corresponding terminals in the memory chip 202 through the first timing control circuit 230.
  • Storage array module 121 is connected. It should be noted that as a schematic, FIG. 10 only shows one storage control module 111 and one storage array module 121. In actual application, the specific number of storage control module 111, first timing control circuit 230 and storage array module 121 is It needs to be set according to the actual needs of three-dimensional stacked chips.
  • the first timing control circuit 230 is used to control the transmission timing of the multiple first target signals output from the target output terminal to the memory array module 121 based on the received clock signal, so as to meet the requirements of the memory array for the multiple first target signals.
  • Interface timing conditions are determined based on the timing requirements of the storage array in actual application scenarios. In this embodiment, there is a timing matching relationship between the multiple first target signals, such as the signals in the logic chip 201 that need to be output to the storage array module 121 synchronously.
  • the above-mentioned multiple first target signals include an address enable signal and an address signal.
  • the target output end includes an address enable output end of the address enable signal generation circuit in the logic chip 201 and an address output end of the address generation circuit.
  • the corresponding first timing control circuit 230 needs to control the transmission timing of the address enable signal output by the address enable output terminal and the address signal output by the address output terminal to reach the memory array module 121 to meet the requirements of the memory array for both types. Signal timing requirements.
  • the multiple first target signals include a write data enable signal and a write data signal, that is, a data signal that needs to be written to the memory array module 121.
  • the target output terminal includes a write data enable signal of the write data enable generation circuit. energy output terminal and the data output terminal of the data supply circuit.
  • the corresponding first timing control circuit 230 needs to control the transmission timing of the write data enable signal output by the write data enable output terminal and the write data signal output by the data output terminal to reach the memory array module 121 to meet the requirements of the memory array. Timing requirements for these two signals.
  • the first timing control circuit 230 may include: a first sampling sub-circuit 231 and a second sampling sub-circuit 232.
  • the first sampling sub-circuit 231 is provided on the logic chip 201
  • the second sampling sub-circuit 232 is provided on the memory chip 202 .
  • the above-mentioned three-dimensional stacked chip also includes a clock interface for providing a clock signal.
  • the clock terminals of the first sampling sub-circuit 231 and the second sampling sub-circuit 232 are both connected to the clock interface, that is, they are controlled by the same clock signal.
  • the clock interface can be the output interface of the internal clock circuit of the logic chip 201, or it can be an external Clock interface, this embodiment does not limit this.
  • the input end of the first sampling sub-circuit 231 is connected to the target output end, and is used to synchronously trigger the multiple first target signals output from the target output end to be output from the logic chip 201 under the control of the clock signal.
  • the input end of the second sampling sub-circuit 232 is connected to the output end of the first sampling sub-circuit 231, and the output end is connected to the memory array module 121, for synchronously triggering the output from the logic chip 201 under the control of the above clock signal.
  • the multiple first target signals are received by the storage array module 121 .
  • the first sampling sub-circuit 231 and the second sampling sub-circuit 232 may be connected through the wafer-level interlayer connection structure 103 .
  • the first sampling sub-circuit 231 may include: a plurality of first flip-flops arranged in one-to-one correspondence with the multiple first target signals.
  • the input terminals of the plurality of first flip-flops are connected to the above-mentioned target output terminals, that is, connected to the output terminals of respective first target signals, the clock terminals are connected to the above-mentioned clock interface, and the output terminals are connected to the second sampling sub-circuit 232 .
  • These first flip-flops are used to synchronously trigger multiple first target signals output from the above target output terminals to be output from the logic chip 201 at a first sampling time point based on the same clock signal.
  • the above target output terminal includes an address enable output terminal and an address output terminal
  • the first sampling subcircuit 231 includes a first flip-flop DFF0 and a first flip-flop DFF1.
  • the input terminal of the first flip-flop DFF0 and the address enable output terminal are terminal is connected, and the input terminal of the first flip-flop DFF1 is connected with the address output terminal.
  • the first flip-flop DFF0 and the first flip-flop DFF1 can synchronously trigger the output of the address enable signal and the address signal from the logic chip 201 to the memory chip 202 at the first sampling time point based on the same clock signal.
  • the second sampling sub-circuit 232 may include: a plurality of second flip-flops arranged in one-to-one correspondence with the plurality of first flip-flops.
  • the input terminals of the plurality of second flip-flops are connected to the output terminals of the corresponding first flip-flops, the clock terminals are connected to the above-mentioned clock interfaces, and the output terminals are connected to the storage array module 121 .
  • the clock terminals of the plurality of second flip-flops and the clock terminals of the plurality of first flip-flops are connected to the same clock interface and receive the same clock signal provided by the clock interface.
  • the plurality of second flip-flops are used to latch the first target signal received respectively, and based on the same clock signal, trigger the latched first target signal synchronously at the second sampling time point and output it to the storage array module 121 . Since the signal needs to be output from the logic chip 201 before being latched in the memory chip 202, the second sampling time point should be later than the first sampling time point.
  • the first sampling sub-circuit 231 includes the first flip-flop DFF0 and the first flip-flop DFF1.
  • the second sampling sub-circuit 232 may include the second flip-flop DFF2 and the second flip-flop DFF3.
  • the input terminal of the second flip-flop DFF2 is connected to the output terminal Q0 of the first flip-flop DFF0, and the received address enable signal is latched.
  • the input terminal of the second flip-flop DFF3 is connected to the output terminal Q1 of the first flip-flop DFF1 to latch the received address signal.
  • the second flip-flop DFF2 and the second flip-flop DFF3 can synchronously trigger the address enable signal and the address signal to be output to the memory array module 121 at the second sampling time point based on the same clock signal, that is, they are synchronously received by the memory array module 121 .
  • the address enable signal and the time when the address signal reaches the DRAM can be basically synchronized, and the address enable port and the address port between the logic chip 201 and the DRAM can be converted into a synchronization port.
  • the times when the multiple channels of first target signals arrive at the corresponding second flip-flop are located between the first sampling time point and the second sampling time. points, and the effective duration of the multiple first target signals is greater than or equal to the time interval between the first sampling time point and the second sampling time point. This ensures that each first target signal can be correctly sampled at the second sampling time point.
  • the time interval between the first sampling time point and the second sampling time point can be set according to the needs of the actual application scenario.
  • the time interval can be set to one clock cycle of the above-mentioned clock signal.
  • FIG. 11 shows an exemplary transmission timing diagram of the address enable signal and the address signal.
  • time Ta represents the first sampling time point
  • time Tb represents the second sampling time point
  • CLK represents the clock signal
  • Q0 represents the address enable signal represented by the output of the first flip-flop DFF0
  • Q1 represents the output of the first flip-flop DFF1
  • the address signal Q2 represents the address enable latch signal output by the second flip-flop DFF2
  • Q3 represents the address latch signal output by the second flip-flop DFF3.
  • first flip-flops DFF0 and DFF1 and the second flip-flops DFF2 and DFF3 adopt rising edge triggering mode.
  • the clock signal CLK jumps to high level, triggering the Q0 port of the first flip-flop DFF0 to output the address enable signal received by its own D port, causing the second flip-flop DFF2 to enable the address.
  • the signal is latched, and at the same time, the Q1 port of the first flip-flop DFF1 is triggered to output the address signal received by its own D port, causing the second flip-flop DFF3 to latch the address signal.
  • the clock signal CLK jumps from low level to high level, triggering the Q2 port of the second flip-flop DFF2 to output the latched address enable signal, that is, the address enable latch signal, and at the same time, triggering the second flip-flop
  • the Q3 port of DFF3 outputs the latched address signal, that is, the address latch signal, so that the address enable signal and the address signal can be received by the DRAM synchronously. It should be noted that considering that the flip-flop takes a certain amount of time from clock triggering to output response, it takes a certain period of time after the clock triggers before the output port outputs the corresponding signal.
  • the first timing control circuit 230 may also include: a delay sub-circuit 233 disposed in the memory chip 202, and the output end of the second sampling sub-circuit 232 is connected to the memory array module 121 through the delay sub-circuit 233.
  • the delay subcircuit 233 is used to adjust the relative time relationship between the first target signals output from the second sampling subcircuit 232 and arriving at the memory array module 121 to meet the above-mentioned interface timing conditions.
  • an adjustable delay unit can be set for each first target signal, and the delay time of each delay unit can be adjusted according to a preset delay rule.
  • the preset delay rules can be set according to the interface sampling timing requirements of the specific storage array.
  • the first delay unit and the second delay unit can be respectively set in a targeted manner, and the input end of the first delay unit and the second trigger
  • the output terminal Q2 of the flip-flop DFF2 is connected
  • the input terminal of the second delay unit is connected with the output terminal Q3 of the second flip-flop DFF3
  • the output terminals of the first delay unit and the second delay unit are respectively connected with the memory array module 121 Connect the corresponding signal receiving port.
  • the address enable latch signal output by the second flip-flop DFF2 and the address latch signal output by the second flip-flop DFF3 by respectively configuring the delay time of the first delay unit and the second delay unit.
  • the relative time relationship that finally reaches the memory array module 121 is to meet the timing requirements of the memory array for the address enable signal and the address signal. For example, if the storage array requires the address signal to arrive before the address enable signal, and the interval time is t, then the delay time of the first delay unit can be configured to be greater than the delay time of the second delay unit, and the delay time difference is t .
  • the delay unit can also be specifically set to delay a latch signal that arrives after it is needed, so as to meet the signal sampling timing requirements of the memory array.
  • the delay unit The specific implementation of sub-circuit 233 is not limited.
  • the technical solution provided by this embodiment can effectively synchronize the signal output by the logic chip 201 to the DRAM by setting the above-mentioned first timing control circuit 230 and inputting a synchronization clock, thereby converting the interface between the logic chip 201 and the DRAM into a synchronized state. interface.
  • the logic chip 201 When designing the logic chip 201, it is only necessary to set corresponding output delay constraints for the signals output to the DRAM interface according to the DRAM interface path to realize the semi-customized process design of the logic chip 201.
  • the memory chip 202 is a universal design and the corresponding logic chip 201 may have multiple forms, the synchronous output of the logic chip 201 is achieved by adding a second sampling sub-circuit 232 in the DRAM, which simplifies the design of the logic chip 201 The process and difficulty accelerated the development progress of logic chip 201.
  • the above-mentioned three-dimensional stacked chip further includes: a second timing control circuit (not shown in the figure).
  • the target input terminals of each memory control module 111 in the logic chip 201 are connected to the memory array module 121 in the memory chip 202 through the second timing control circuit.
  • the clock end of the second timing control circuit is also connected to the above-mentioned clock interface, that is, it is controlled by the same clock signal as the first timing control circuit 230 .
  • the second timing control circuit is used to control the transmission timing of the multiple second target signals output by the memory array module 121 to the target input terminal based on the clock signal, so as to meet the interface timing conditions of the logic chip 201 for the multiple second target signals.
  • the multiple second target signals are multiple signals with timing matching relationships. For example, they may include a read data enable signal and a read data signal, that is, a data signal read from the memory array module 121 .
  • the specific principle of the second timing control circuit is similar to the above-mentioned first timing control circuit 230.
  • the target input terminal in the logic chip 201 has its own signal capture logic.
  • the second timing control circuit does not need to set a delay sub-circuit. The circuit is used to adjust the relative time relationship of each second target signal arriving at the target input terminal.
  • the signal output by the DRAM to the logic chip 201 can be effectively synchronized, thereby converting the interface between the logic chip 201 and the DRAM into a synchronous interface.
  • the embodiment of this specification provides a timing control method, which can be applied to the three-dimensional stacked chip in the embodiment of FIG. 9 .
  • the method includes the following steps:
  • Step S1201 obtain the clock signal
  • Step S1202 Based on the clock signal, control the transmission timing of the multiple first target signals output from the target output terminal in the logic chip 201 to the memory array module 121 to meet the requirements of the memory array module 121 for the above multiple channels. Interface timing conditions for the first target signal.
  • step S1201 and step S1202 may refer to the corresponding descriptions in the above chip structure embodiment, and will not be described again here.
  • the above step S1202 may include: based on the clock signal, synchronously triggering the multiple first target signals output from the target output terminal at the first sampling time point to be output from the logic chip 201; A target signal is latched, and based on the clock signal, each latched first target signal is synchronously triggered and output to the storage array module 121 at a second sampling time point, which is later than the first sampling time point.
  • a target signal is latched, and based on the clock signal, each latched first target signal is synchronously triggered and output to the storage array module 121 at a second sampling time point, which is later than the first sampling time point.
  • the step of outputting each first target signal of the synchronous trigger latch to the memory array module 121 at the second sampling time point may include: synchronously triggering the latch at the second sampling time point.
  • Each channel of the stored first target signal is output; according to the preset delay rule, each channel of the output first target signal is delayed respectively, so as to calculate the relative time of each channel of the first target signal arriving at the storage array module 121 The relationship is adjusted to meet the interface timing conditions.
  • the above timing control method further includes: based on the clock signal, controlling the transmission timing of the multiple second target signals output by the memory array module 121 to the target input terminal in the logic chip 201, so as to The interface timing conditions of the logic chip 201 for the multiple second target signals are met.

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Abstract

The present application discloses a three-dimensional stacked chip and a data processing method therefor. The three-dimensional stacked chip comprises a storage die layer and a logic die layer stacked on the storage die layer. The storage die layer comprises M storage array modules, N storage control modules are correspondingly provided in the logic die layer, and each storage control module is connected to k storage array modules by means of a wafer-level interlayer connection structure and is used for controlling to perform a data writing or reading operation on the respective connected storage array modules. M and N are integers greater than or equal to 2, N is less than or equal to M, and k is an integer greater than or equal to 1 and less than M. In this way, parallel read-write access to a plurality of storage array modules can be implemented, and the data access bandwidth is effectively improved.

Description

一种三维堆叠芯片及其数据处理方法A three-dimensional stacked chip and its data processing method
相关申请的交叉引用Cross-references to related applications
本申请基于2022年6月2日提交的中国专利申请202210619304.0主张其优先权,此处通过参照引入其全部的记载内容。This application claims priority based on Chinese patent application 202210619304.0 submitted on June 2, 2022, the entire contents of which are incorporated herein by reference.
【技术领域】【Technical field】
本申请涉及集成电路技术领域,尤其涉及一种三维堆叠芯片及其数据处理方法。The present application relates to the field of integrated circuit technology, and in particular to a three-dimensional stacked chip and a data processing method thereof.
【背景技术】【Background technique】
传统的动态随机存取存储器(Dynamic Random Access Memory,简称DRAM)接口由地址位,数据位以及命令位组成,写操作时,先接收命令位和地址位,进行译码产生存储阵列模块(bank)的控制信号和地址信息,然后接收数据进行串并转换后发送给bank。读操作时,先接收命令位和地址位,进行译码产生bank的控制信号和地址信息,然后bank输出数据,经过并串转换输出。也就是说,传统DRAM每次仅能对一个bank进行读写操作,即所有bank分时操作,带宽受到极大的限制。The traditional Dynamic Random Access Memory (DRAM) interface consists of address bits, data bits and command bits. During a write operation, the command bits and address bits are first received and decoded to generate a storage array module (bank). Control signals and address information, then receive the data for serial-to-parallel conversion and then send it to the bank. During the read operation, the command bit and address bit are first received, decoded to generate the bank's control signal and address information, and then the bank outputs the data, which is output through parallel-to-serial conversion. In other words, traditional DRAM can only perform read and write operations on one bank at a time, that is, all banks operate in a time-sharing manner, and the bandwidth is greatly limited.
【发明内容】[Content of the invention]
有鉴于此,本申请实施例提供了一种三维堆叠芯片及其数据处理方法,能够提升DARM的带宽,从而有利于提高芯片的数据处理速度。In view of this, embodiments of the present application provide a three-dimensional stacked chip and a data processing method thereof, which can increase the bandwidth of the DARM, thus helping to increase the data processing speed of the chip.
第一方面,本申请实施例提供了一种三维堆叠芯片,包括:存储晶圆层以及与所述存储晶圆层层叠设置的逻辑晶圆层,所述存储晶圆层包括M个存储阵列模块,所述逻辑晶圆层中对应设置有N个存储控制模块,每个所述存储控制模块通过晶圆级层间连接结构与k个所述存储阵列模块连接,用于控制各自连接的所述存储阵列模块进行数据写入或读出操作,其中,M、N均为大于或等于2的整数,且N小于或等于M,k为大于或等于1且小于M的整数。In a first aspect, embodiments of the present application provide a three-dimensional stacked chip, including: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer. The storage wafer layer includes M storage array modules. , N storage control modules are correspondingly provided in the logic wafer layer, each of the storage control modules is connected to k storage array modules through a wafer-level interlayer connection structure, and is used to control the respective connected storage array modules. The storage array module performs data writing or reading operations, where M and N are both integers greater than or equal to 2, and N is less than or equal to M, and k is an integer greater than or equal to 1 and less than M.
进一步地,每个所述存储控制模块通过所述晶圆级层间连接结构与一个所述存储阵列模块的数据及控制总线直连,不同所述存储阵列模块的数据及控制总线相互独立。Further, each of the storage control modules is directly connected to the data and control bus of one of the storage array modules through the wafer-level interlayer connection structure, and the data and control buses of different storage array modules are independent of each other.
进一步地,k为大于或等于2且小于M的整数,k个所述存储阵列模块分布在同一存储晶圆,所述存储晶圆层还包括:与所述存储控制模块一一对应设置的控制逻辑模块,所述存储控制模块通过晶圆级层间连接结构与所述控制逻辑模块连接,所述控制逻辑模块分别与k个所述存储阵列模块的数据及控制总线直连,所述控制逻辑模块用于:根据所述存储控制模块发送的数据写入或读出信号,分时控制k个所述存储阵列模块进行数据写入或读出操作。Further, k is an integer greater than or equal to 2 and less than M, and k of the storage array modules are distributed on the same storage wafer. The storage wafer layer also includes: a control set in one-to-one correspondence with the storage control module. Logic module, the storage control module is connected to the control logic module through a wafer-level interlayer connection structure, and the control logic module is directly connected to the data and control buses of k storage array modules respectively. The control logic module The module is used to: time-share control of k storage array modules to perform data writing or reading operations according to the data writing or reading signals sent by the storage control module.
进一步地,所述数据写入或读出信号包括片选控制信息以及写入或读出信息,所述控制逻辑模块具体用于:根据所述片选控制信息从k个所述存储阵列模块中确定待写入或读出的存储阵列模块,并根据所述写入或读出信息对该存储阵列模块进 行数据写入或读出操作。Further, the data writing or reading signal includes chip selection control information and writing or reading information, and the control logic module is specifically configured to: select data from k memory array modules according to the chip selection control information. Determine the storage array module to be written or read, and perform operations on the storage array module based on the write or read information. Row data writing or reading operations.
进一步地,所述控制逻辑模块具体用于:根据所述数据写入或读出信号对应的地址空间,从k个所述存储阵列模块中确定待写入或读出的存储阵列模块,并根据数据写入或读出信号对该存储阵列模块进行数据写入或读出操作。Further, the control logic module is specifically configured to: determine the storage array module to be written or read from the k storage array modules according to the address space corresponding to the data writing or reading signal, and according to The data write or read signal performs a data write or read operation on the storage array module.
进一步地,k为大于或等于2且小于M的整数,所述存储晶圆层包括k个层叠设置的存储晶圆,与一个所述存储控制模块连接的k个所述存储阵列模块分别分布在k个存储晶圆,所述存储控制模块与k个所述存储阵列模块之间设置有片选信道,用于选定其中一个存储阵列模块进行所述数据写入或读出操作。Further, k is an integer greater than or equal to 2 and less than M, the storage wafer layer includes k storage wafers arranged in a stack, and k storage array modules connected to one storage control module are respectively distributed in There are k memory wafers, and a chip select channel is provided between the memory control module and the k memory array modules for selecting one of the memory array modules to perform the data writing or reading operation.
进一步地,所述逻辑晶圆层还设置有处理模块,每个所述存储控制模块均与所述处理模块连接,所述处理模块用于确定待操作存储阵列模块,并向连接所述待操作存储阵列模块的所述存储控制模块发送数据操作信息;每个存储控制模块中均设置有译码解析模块,所述译码解析模块对所述数据操作信息中的命令以及地址进行译码分析,以对所述待操作存储阵列模块进行数据写入或读出操作。Further, the logic wafer layer is also provided with a processing module, and each of the storage control modules is connected to the processing module. The processing module is used to determine the storage array module to be operated, and to connect the storage array module to be operated. The storage control module of the storage array module sends data operation information; each storage control module is provided with a decoding and analysis module, and the decoding and analysis module decodes and analyzes the commands and addresses in the data operation information, to perform data writing or reading operations on the storage array module to be operated.
进一步地,所述处理模块接收数据写入命令和写入数据,根据所述写入数据的占用空间和所述存储阵列模块的存储空间确定所述写入数据的写入地址,以确定所述待操作存储阵列模块。Further, the processing module receives the data write command and the write data, and determines the write address of the write data according to the occupied space of the write data and the storage space of the storage array module to determine the The storage array module is to be operated.
进一步地,响应于所述写入数据的占用空间大于所述存储阵列模块的存储空间,所述处理模块将所述写入数据存储在第一存储阵列模块和第二存储阵列模块中,所述第一存储阵列模块和所述第二存储阵列模块通过不同的存储控制模块控制;或者所述第一存储阵列模块和所述第二存储阵列模块位于不同的存储晶圆层,且通过不同的存储控制模块控制。Further, in response to the occupied space of the written data being larger than the storage space of the storage array module, the processing module stores the written data in the first storage array module and the second storage array module, the The first storage array module and the second storage array module are controlled by different storage control modules; or the first storage array module and the second storage array module are located on different storage wafer layers, and are controlled by different storage control modules. Control module control.
进一步地,所述层间连接结构包括数据通道以及控制通道,所述数据通道用于传输写入或读出的数据信号,所述控制通道用于传输控制数据写入或读出的控制信号。Further, the inter-layer connection structure includes a data channel and a control channel, the data channel is used to transmit data signals for writing or reading, and the control channel is used for transmitting control signals for controlling data writing or reading.
进一步地,所述控制信号包括命令信号和地址信号;其中,所述命令信号包括:行操作使能信号、列操作使能信号以及写数据控制信号;所述地址信号包括行地址信号和列地址信号。Further, the control signal includes a command signal and an address signal; wherein the command signal includes a row operation enable signal, a column operation enable signal and a write data control signal; the address signal includes a row address signal and a column address. Signal.
第二方面,本申请实施例还提供了一种三维堆叠芯片的数据处理方法,所述三维堆叠芯片包括:存储晶圆层以及与所述存储晶圆层层叠设置的逻辑晶圆层,所述存储晶圆层包括M个存储阵列模块,所述逻辑晶圆层中对应设置有N个存储控制模块,每个所述存储控制模块通过晶圆级层间连接结构与k个所述存储阵列模块连接,用于控制各自连接的所述存储阵列模块进行数据写入或读出操作,其中,M、N均为大于或等于2的整数,且N小于或等于M,k为大于或等于1且小于M的整数。所述方法包括:接收存储控制信号;基于所述存储控制信号,利用多个存储控制模块并行对所述存储控制模块连接的所述存储阵列模块进行数据写入或读出操作。In a second aspect, embodiments of the present application also provide a data processing method for a three-dimensional stacked chip. The three-dimensional stacked chip includes: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer. The storage wafer layer includes M storage array modules, and N storage control modules are correspondingly provided in the logic wafer layer. Each of the storage control modules is connected to k storage array modules through a wafer-level interlayer connection structure. connection, used to control the respective connected storage array modules to perform data writing or reading operations, where M and N are both integers greater than or equal to 2, and N is less than or equal to M, and k is greater than or equal to 1 and An integer less than M. The method includes: receiving a storage control signal; based on the storage control signal, using multiple storage control modules to perform data writing or reading operations in parallel on the storage array module connected to the storage control module.
本申请实施例提供的三维堆叠芯片及其数据处理方法,摒弃了传统存储器中的译码和地址解析模块以及串并转换模块,通过在逻辑晶圆层设置N个存储控制模块,在芯片封装之前,将每个存储控制模块通过晶圆级层间连接结构与k个存储阵列模 块直连,k为大于或等于1且小于M的整数,从而通过不同存储控制模块控制各自连接的存储阵列模块进行数据写入或读出操作。这样可以使得DRAM接口位宽不再受封装和硬件系统的限制,直接将DRAM的存储阵列接口信号输出,实现对存储晶圆层中多个存储阵列模块的并行读写访问,有效地提升DRAM的数据访问带宽,从而有利于提高芯片的数据处理速度。The three-dimensional stacked chips and their data processing methods provided by the embodiments of this application abandon the decoding and address parsing modules and serial-to-parallel conversion modules in traditional memories. By setting N storage control modules on the logic wafer layer, before chip packaging, , each storage control module is connected to k storage array modules through the wafer-level interlayer connection structure The blocks are directly connected, and k is an integer greater than or equal to 1 and less than M, so that different storage control modules control the respective connected storage array modules to perform data writing or reading operations. In this way, the DRAM interface bit width is no longer limited by packaging and hardware systems, and the DRAM storage array interface signal can be output directly to realize parallel read and write access to multiple storage array modules in the storage wafer layer, effectively improving the performance of DRAM. Data access bandwidth, thereby helping to improve the data processing speed of the chip.
上述说明仅是本申请技术方案的概述,为了能够更清楚了解本申请的技术手段,而可依照说明书的内容予以实施,并且为了让本申请的上述和其它目的、特征和优点能够更明显易懂,以下特举本申请的具体实施方式。The above description is only an overview of the technical solutions of the present application. In order to have a clearer understanding of the technical means of the present application, they can be implemented according to the content of the description, and in order to make the above and other purposes, features and advantages of the present application more obvious and understandable. , the specific implementation methods of the present application are specifically listed below.
【附图说明】[Picture description]
通过阅读下文优选实施方式的详细描述,各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的,而并不认为是对本申请的限制。而且在整个附图中,用相同的参考符号表示相同的部件。在附图中:Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are for the purpose of illustrating preferred embodiments only and are not to be construed as limiting the application. Also throughout the drawings, the same reference characters are used to designate the same components. In the attached picture:
图1示出了一种示例性传统DRAM框图;Figure 1 shows an exemplary conventional DRAM block diagram;
图2示出了本说明书实施例中一种三维堆叠芯片的封装示意图一;Figure 2 shows a schematic diagram 1 of the packaging of a three-dimensional stacked chip in the embodiment of this specification;
图3示出了本说明书实施例中一种两层结构芯片的示意图一;Figure 3 shows a schematic diagram 1 of a two-layer structure chip in the embodiment of this specification;
图4示出了本说明书实施例中一种数据写入示意图;Figure 4 shows a schematic diagram of data writing in the embodiment of this specification;
图5示出了本说明书实施例中一种三层结构芯片的示意图;Figure 5 shows a schematic diagram of a three-layer structure chip in an embodiment of this specification;
图6示出了本说明书实施例中一种两层结构芯片的示意图二;Figure 6 shows a schematic diagram 2 of a two-layer structure chip in the embodiment of this specification;
图7示出了本说明书实施例中一种三维堆叠芯片的数据处理方法的流程图;Figure 7 shows a flow chart of a data processing method for three-dimensional stacked chips in an embodiment of this specification;
图8示出了本说明书实施例中三维堆叠芯片的封装示意图二;Figure 8 shows the second package schematic diagram of the three-dimensional stacked chip in the embodiment of this specification;
图9示出了地址信号和地址使能信号的一种示例性时序关系图;Figure 9 shows an exemplary timing relationship diagram of the address signal and the address enable signal;
图10示出了本说明书实施例中第一时序控制电路的电路图;Figure 10 shows a circuit diagram of the first timing control circuit in the embodiment of this specification;
图11示出了本说明书实施例中地址使能信号和地址信号的一种示例性传输时序图;Figure 11 shows an exemplary transmission timing diagram of the address enable signal and the address signal in the embodiment of this specification;
图12示出了本说明书实施例中时序控制方法的流程图。Figure 12 shows a flow chart of the timing control method in the embodiment of this specification.
【具体实施方式】【Detailed ways】
图1展示了一个8位数据接口,内部8倍预取的传统DRAM框图。整个DRAM共8个存储阵列模块(bank),分别为bank0~bank7,bank0~bank7的地址和控制线均与设置在DRAM内的同一译码和地址解析模块连接,且数据线均与设置在DRAM内的同一并串转换模块连接。图1中,rwd0~rwd7表示bank0~bank7的数据,图中以64位来说明。以写操作为例,由译码和地址解析模块先接收外部发送的命令和地址信息,地址信息中包括bank地址信息,通过译码确定本次写操作针对的bank,并产生该bank的控制信号和地址信息,然后由并串转换模块接收要写入的数据信号dqs/dq<7:0>,并进行串并转换,转换成64位的数据信号rwd<63:0>,然后发送给该bank完成数据写入。也就是说,每次仅能对一个bank进行读写操作。 Figure 1 shows a traditional DRAM block diagram with an 8-bit data interface and 8x internal prefetching. The entire DRAM has a total of 8 storage array modules (banks), namely bank0~bank7. The address and control lines of bank0~bank7 are all connected to the same decoding and address analysis module set in the DRAM, and the data lines are all connected to the same decoding and address analysis module set in the DRAM. The same parallel-to-serial conversion module is connected. In Figure 1, rwd0 to rwd7 represent the data of bank0 to bank7, and are illustrated as 64 bits in the figure. Taking the write operation as an example, the decoding and address parsing module first receives the command and address information sent from the outside. The address information includes the bank address information. Through decoding, it determines the bank targeted by this write operation and generates the control signal of the bank. and address information, and then the parallel-to-serial conversion module receives the data signal dqs/dq<7:0> to be written, performs serial-to-parallel conversion, converts it into a 64-bit data signal rwd<63:0>, and then sends it to the The bank completes data writing. In other words, only one bank can be read and written at a time.
而且由于封装和硬件系统的限制,DRAM接口数据位宽不可能做到很大,这就造成内部存储阵列接口位宽远大于DRAM接口位宽,因此经过并串转换后接口速率要远高于内部存储阵列存储速率,例如对于上述示例的8倍预取结构,外部接口数据位宽如果为8位,则内部存储阵列位宽为64位,存储阵列速度如果为200Mbps,则接口速率需要达到1600Mbps。因此,不利于提高DRAM的数据访问带宽。Moreover, due to packaging and hardware system limitations, the DRAM interface data bit width cannot be very large, which results in the internal storage array interface bit width being much larger than the DRAM interface bit width. Therefore, the interface speed after parallel-to-serial conversion is much higher than the internal Storage array storage rate, for example, for the 8x prefetch structure in the above example, if the external interface data bit width is 8 bits, then the internal storage array bit width is 64 bits, and if the storage array speed is 200Mbps, the interface rate needs to reach 1600Mbps. Therefore, it is not conducive to improving the data access bandwidth of DRAM.
有鉴于此,本说明书实施例提供了一种三维堆叠芯片,摒弃了传统DRAM中的译码和地址解析模块以及串并转换模块,通过在逻辑晶圆层设置N个存储控制模块,在芯片封装之前,将每个存储控制模块通过晶圆级层间连接结构与k个存储阵列模块直连,k为大于或等于1且小于M的整数,从而通过不同存储控制模块控制各自连接的存储阵列模块进行数据写入或读出操作。这样可以使得DRAM接口位宽不再受封装和硬件系统的限制,直接将DRAM的存储阵列接口信号输出,从而使得逻辑晶圆可以直接并行读写多个存储阵列模块,有效地提升DRAM的数据访问带宽,从而有利于提高芯片的数据处理速度。In view of this, embodiments of this specification provide a three-dimensional stacked chip that abandons the decoding and address resolution modules and serial-to-parallel conversion modules in traditional DRAM. By arranging N storage control modules on the logic wafer layer, the chip package is Previously, each storage control module was directly connected to k storage array modules through a wafer-level interlayer connection structure, where k was an integer greater than or equal to 1 and less than M, thereby controlling the respective connected storage array modules through different storage control modules. Perform data writing or reading operations. This allows the DRAM interface bit width to no longer be limited by packaging and hardware systems, and directly outputs the DRAM storage array interface signal, allowing the logic wafer to directly read and write multiple storage array modules in parallel, effectively improving DRAM data access. bandwidth, thereby helping to increase the data processing speed of the chip.
下面将参照附图更详细地描述本公开的示例性实施例。虽然附图中显示了本公开的示例性实施例,然而应当理解,可以以各种形式实现本公开而不应被这里阐述的实施例所限制。相反,提供这些实施例是为了能够更透彻地理解本公开,并且能够将本公开的范围完整的传达给本领域的技术人员。需要说明的是,本文中描述的“逻辑晶圆层”和“逻辑芯片”应理解为相同结构,“存储晶圆层”和“存储芯片”也应理解为相同结构。对晶圆(wafer)进行切割后得到的小块wafer称为晶粒(die),对die进行封装形成芯片(chip)。实施例一Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a thorough understanding of the disclosure, and to fully convey the scope of the disclosure to those skilled in the art. It should be noted that the "logic wafer layer" and "logic chip" described in this article should be understood as the same structure, and the "storage wafer layer" and "memory chip" should also be understood as the same structure. The small piece of wafer obtained after cutting the wafer is called a die, and the die is packaged to form a chip. Embodiment 1
本说明书实施例提供了一种三维堆叠芯片100,例如,可以是SOC芯片(System on Chip,系统级芯片)。如图2所示,该三维堆叠芯片100可以包括:存储晶圆层102以及与存储晶圆层102层叠设置的逻辑晶圆层101。需要说明的是,本实施例提供的附图中示出的三维堆叠芯片100中存储晶圆以及逻辑晶圆的层数仅为示意,不作为限定,具体实施时,可以根据实际需要设置。The embodiment of this specification provides a three-dimensional stacked chip 100, which may be, for example, a SOC chip (System on Chip). As shown in FIG. 2 , the three-dimensional stacked chip 100 may include: a storage wafer layer 102 and a logic wafer layer 101 stacked with the storage wafer layer 102 . It should be noted that the number of layers of memory wafers and logic wafers in the three-dimensional stacked chip 100 shown in the drawings provided in this embodiment is only for illustration and is not limiting. During specific implementation, it can be set according to actual needs.
存储晶圆层102包括一个或多个层叠设置的存储晶圆,用于扩展存储空间。存储晶圆层102中分布有M个存储阵列模块121,M为大于或等于2的整数。具体实施时,存储晶圆的具体层数以及存储阵列模块121的数量根据实际应用场景中对芯片存储容量的需求设置。例如,每个存储晶圆可以包括4个、8个或16个存储阵列模块121。The storage wafer layer 102 includes one or more stacked storage wafers for expanding storage space. M memory array modules 121 are distributed in the memory wafer layer 102, where M is an integer greater than or equal to 2. During specific implementation, the specific number of layers of the storage wafer and the number of storage array modules 121 are set according to the requirements for chip storage capacity in actual application scenarios. For example, each memory wafer may include 4, 8, or 16 memory array modules 121.
相应地,逻辑晶圆层101中对应设置有N个存储控制模块111,N也为大于或等于2的整数,且N小于或等于M。每个存储控制模块111通过晶圆级层间连接结构103与k个存储阵列模块121连接,用于控制各自连接的存储阵列模块121进行数据写入或读出操作。其中,k为大于或等于1且小于M的整数,每个存储阵列模块121均接有存储控制模块111,且不同存储控制模块111连接不同的存储阵列模块121。在一具体实施例中,一个存储控制模块111可以连接1个存储阵列模块121,也即存储控制模块111与存储阵列模块121一一对应连接;在另一实施例中,一个存储控制模块111可以连接多个存储阵列模块121,例如,一个存储控制模块111 连接2个存储阵列模块121,另一个存储控制模块111连接3个存储阵列模块121。在进行数据读写时,多个存储控制模块111可以同时控制对应连接的存储阵列模块121进行数据读写操作,这样逻辑晶圆就可以并行读写不同存储控制模块111连接的其中一个存储阵列模块121,即至少能够实现对存储晶圆层102中N个存储阵列模块121的并行读写访问,无需受封装和硬件系统的限制,有效地提升DRAM的数据访问带宽,从而有利于提高芯片的数据处理速度。Correspondingly, N storage control modules 111 are provided in the logic wafer layer 101. N is also an integer greater than or equal to 2, and N is less than or equal to M. Each storage control module 111 is connected to k storage array modules 121 through the wafer-level interlayer connection structure 103, and is used to control the respective connected storage array modules 121 to perform data writing or reading operations. Where, k is an integer greater than or equal to 1 and less than M. Each storage array module 121 is connected to a storage control module 111 , and different storage control modules 111 are connected to different storage array modules 121 . In a specific embodiment, one storage control module 111 can be connected to one storage array module 121, that is, the storage control module 111 and the storage array module 121 are connected in a one-to-one correspondence; in another embodiment, one storage control module 111 can be connected to one storage array module 121. Connect multiple storage array modules 121, for example, a storage control module 111 Two storage array modules 121 are connected, and another storage control module 111 is connected to three storage array modules 121 . When reading and writing data, multiple storage control modules 111 can simultaneously control the corresponding connected storage array modules 121 to perform data reading and writing operations, so that the logic wafer can read and write in parallel one of the storage array modules connected to different storage control modules 111 121, that is, it can at least realize parallel read and write access to N storage array modules 121 in the storage wafer layer 102, without being restricted by packaging and hardware systems, effectively improving the data access bandwidth of DRAM, thereby conducive to improving the data of the chip. Processing speed.
具体实施时,存储控制模块111的具体数量以及所连接的存储阵列模块121,根据存储晶圆层102中存储阵列模块121的数量以及实际控制逻辑确定。例如,k可以为1,N等于M,即可以一个存储控制模块111对应控制一个存储阵列模块121。这样逻辑晶圆能够并行读写存储晶圆的所有存储阵列模块121,因此可以极大提高带宽,同样以存储晶圆速率200Mbps,数据接口位宽为64位为例,在图3所示的8bank示例中,则访问带宽可以达到200Mbps×64bit×8banks=100Gbps,是传统方案的8倍。又例如,也可以将存储晶圆层102中分布的M个存储阵列模块121划分为多组,至少有一组包括多个存储阵列模块121,一个存储控制模块111对应控制一组存储阵列模块121,此时,k为对应组中存储阵列模块121的个数,N等于所划分的组数。During specific implementation, the specific number of storage control modules 111 and the connected storage array modules 121 are determined according to the number of storage array modules 121 in the storage wafer layer 102 and the actual control logic. For example, k can be 1, and N equals M, that is, one storage control module 111 can correspondingly control one storage array module 121. In this way, the logic wafer can read and write all the storage array modules 121 of the storage wafer in parallel, so the bandwidth can be greatly improved. Similarly, taking the storage wafer rate of 200Mbps and the data interface bit width of 64 bits as an example, in the 8bank shown in Figure 3 In the example, the access bandwidth can reach 200Mbps×64bit×8banks=100Gbps, which is 8 times that of the traditional solution. For another example, the M storage array modules 121 distributed in the storage wafer layer 102 can also be divided into multiple groups. At least one group includes multiple storage array modules 121. One storage control module 111 correspondingly controls one group of storage array modules 121. At this time, k is the number of storage array modules 121 in the corresponding group, and N is equal to the number of divided groups.
可以理解的是,在3DIC(three Dimensional Integrated Circuit,三维集成电路)芯片中,存储晶圆(DRAM die)和逻辑晶圆(logic die)可以经过晶圆级互联的方式如混合键合技术(Hyrid bonding),RDL(Redistribution Layer,重布线层)以及TSV(Through Silicon Via,硅通孔)技术等连接后在一起封装,形成三维堆叠芯片100。It is understandable that in a 3DIC (three Dimensional Integrated Circuit) chip, the memory wafer (DRAM die) and the logic wafer (logic die) can be connected through wafer-level interconnection methods such as hybrid bonding technology (Hyrid bonding), RDL (Redistribution Layer, rewiring layer) and TSV (Through Silicon Via) technology are connected and packaged together to form a three-dimensional stacked chip 100.
由此,可以通过晶圆级层间连接结构103实现每个存储控制模块111与相应的k个存储阵列模块121的直连。这样可以使得DRAM接口位宽不再受封装和硬件系统的限制,直接将存储阵列模块121的接口信号输出,逻辑晶圆可以直接控制多个存储阵列模块121同时读写,有效地提升DRAM的数据访问带宽。Therefore, direct connection between each storage control module 111 and the corresponding k storage array modules 121 can be achieved through the wafer-level interlayer connection structure 103 . In this way, the DRAM interface bit width is no longer limited by packaging and hardware systems, and the interface signals of the storage array module 121 can be directly output. The logic wafer can directly control multiple storage array modules 121 to read and write at the same time, effectively improving the data of DRAM. Access bandwidth.
从结构层面来讲,层间连接结构103可以采用适用的晶圆级互联技术实现,具体根据实际存储控制模块111与存储阵列模块121之间的连线需求确定,此处不做限制。例如,层间连接结构103可以包括混合键合结构、RDL层中的布线结构以及硅通孔结构中的一个或多个组合。From a structural perspective, the inter-layer connection structure 103 can be implemented using applicable wafer-level interconnection technology, which is determined based on the actual wiring requirements between the storage control module 111 and the storage array module 121, and is not limited here. For example, the interlayer connection structure 103 may include one or more combinations of a hybrid bonding structure, a wiring structure in an RDL layer, and a through silicon via structure.
从功能层面来讲,层间连接结构103作为存储控制模块111与存储阵列模块121之间的信号传输通道,用于传输对存储阵列模块121进行数据写入或读出操作所需要的信号。From a functional perspective, the inter-layer connection structure 103 serves as a signal transmission channel between the storage control module 111 and the storage array module 121, and is used to transmit signals required for data writing or reading operations on the storage array module 121.
例如,层间连接结构103可以包括数据通道以及控制通道。其中,数据通道用于传输写入或读出的数据信号,数据通道的位宽可以根据存储阵列模块121一次能够写入或读出的数据位宽以及实际逻辑晶圆的数据位宽确定。如图3中是以64位为例,rwd0<63:0>~rwd7<63:0>表示bank0~bank7的数据信号,具体实施时,也可以是128或256等其他宽度。For example, the inter-layer connection structure 103 may include data channels and control channels. The data channel is used to transmit written or read data signals, and the bit width of the data channel can be determined based on the data bit width that the storage array module 121 can write or read at one time and the data bit width of the actual logic wafer. As shown in Figure 3, 64 bits are used as an example. rwd0<63:0>~rwd7<63:0> represent the data signals of bank0~bank7. During specific implementation, it can also be other widths such as 128 or 256.
控制通道用于传输控制数据写入或读出的控制信号。例如,控制通道中传输的控制信号可以包括命令信号和地址信号。 The control channel is used to transmit control signals that control data writing or reading. For example, the control signals transmitted in the control channel may include command signals and address signals.
命令信号可以包括但不限于:行操作使能信号、列操作使能信号以及写数据控制信号,具体可以根据实际需要确定。其中,行操作使能信号,也可以称为bank行有效指示,用于指示可以抓取行地址进行译码。列操作使能信号,也可以称为bank列写读地址控制信号,用于指示可以抓取列地址进行译码。写数据控制信号用于指示在相应列写入数据。The command signal may include but is not limited to: a row operation enable signal, a column operation enable signal, and a write data control signal, and the details may be determined according to actual needs. Among them, the row operation enable signal can also be called a bank row valid indication, which is used to indicate that the row address can be captured for decoding. The column operation enable signal, which can also be called the bank column write and read address control signal, is used to indicate that the column address can be captured for decoding. The write data control signal is used to instruct data to be written in the corresponding column.
地址信号可以包括行地址信号和列地址信号。地址位宽根据DRAM的行列结构来定。The address signals may include row address signals and column address signals. The address bit width is determined according to the row and column structure of DRAM.
需要说明的是,图3中其他控制和状态信号表示DRAM工作需要的控制信号,例如powerdown控制、bank_fail等,具体信号种类以及其他控制电路的结构可以DRAM参考相关技术,此处不做详述。It should be noted that other control and status signals in Figure 3 represent the control signals required for DRAM operation, such as powerdown control, bank_fail, etc. The specific signal types and the structure of other control circuits can be referred to DRAM related technologies, and will not be described in detail here.
另外,在一种可选的实施方式中,逻辑晶圆层101中还可以设置有处理模块110,每个存储控制模块111均与处理模块110连接,处理模块110用于确定待操作存储阵列模块,也就是确定对存储晶圆层102中哪些存储阵列模块121进行数据读取或写入操作,并向连接上述待操作存储阵列模块的存储控制模块发送数据操作信息。数据操作信息可以包括命令和地址,若数据操作为写操作,还包括要写入的数据信息。每个存储控制模块111中包含有译码解析模块,译码解析模块对数据操作信息中的命令以及地址进行译码分析,以对待操作存储阵列模块进行数据写入或读出操作。In addition, in an optional implementation, a processing module 110 may also be provided in the logic wafer layer 101. Each storage control module 111 is connected to the processing module 110. The processing module 110 is used to determine the storage array module to be operated. , that is, determine which storage array modules 121 in the storage wafer layer 102 are to perform data reading or writing operations, and send data operation information to the storage control module connected to the above-mentioned storage array module to be operated. The data operation information may include commands and addresses, and if the data operation is a write operation, it may also include data information to be written. Each storage control module 111 includes a decoding and analysis module. The decoding and analysis module decodes and analyzes the commands and addresses in the data operation information to perform data writing or reading operations on the storage array module to be operated.
例如,处理模块110可以接收数据写入命令和写入数据,根据写入数据的占用空间和存储阵列模块121的存储空间确定写入数据的写入地址,也就是确定待操作存储阵列模块。响应于写入数据的占用空间小于或等于存储阵列模块121的存储空间,则可以将一个存储阵列模块121确定为待操作存储阵列模块。For example, the processing module 110 may receive a data write command and write data, and determine the write address of the write data based on the occupied space of the write data and the storage space of the storage array module 121, that is, determine the storage array module to be operated. In response to the occupied space of the written data being less than or equal to the storage space of the storage array module 121, one storage array module 121 may be determined as the storage array module to be operated.
响应于写入数据的占用空间大于存储阵列模块121的存储空间,则处理模块110需要将与上述占用空间适配的多个存储阵列模块121确定为待操作存储阵列模块,具体数量根据写入数据的占用空间以及存储阵列模块121的存储空间确定。例如,待操作存储阵列模块包括第一存储阵列模块121a和第二存储阵列模块121b,则将写入数据存储在第一存储阵列模块和第二存储阵列模块中。其中,第一存储阵列模块和第二存储阵列模块通过不同的存储控制模块111控制。需要说明的是,第一存储阵列模块和第二存储阵列模块可以位于同一存储晶圆层,或者,也可以位于不同的存储晶圆层。In response to the occupied space of the written data being larger than the storage space of the storage array module 121, the processing module 110 needs to determine multiple storage array modules 121 that are adapted to the above occupied space as the storage array modules to be operated. The specific number is determined according to the written data. The occupied space and the storage space of the storage array module 121 are determined. For example, if the storage array module to be operated includes a first storage array module 121a and a second storage array module 121b, then the write data is stored in the first storage array module and the second storage array module. The first storage array module and the second storage array module are controlled by different storage control modules 111 . It should be noted that the first memory array module and the second memory array module may be located on the same storage wafer layer, or may be located on different memory wafer layers.
例如,如图4所示,控制第一存储阵列模块121a的存储控制模块111为第一存储控制模块111a,控制第二存储阵列模块121b的存储控制模块111为第二存储控制模块111b,处理模块110可以向第一存储控制模块111a发送第一数据写入信息,向第二存储控制模块111b发送第二数据写入信息,从而通过第一存储控制模块111a和第二存储控制模块111b并行将写入数据存储到第一存储阵列模块121a和第二存储阵列模块121b中。For example, as shown in Figure 4, the storage control module 111 that controls the first storage array module 121a is the first storage control module 111a, the storage control module 111 that controls the second storage array module 121b is the second storage control module 111b, and the processing module 110 may send the first data writing information to the first storage control module 111a and the second data writing information to the second storage control module 111b, so that the writing is performed in parallel through the first storage control module 111a and the second storage control module 111b. The input data is stored in the first storage array module 121a and the second storage array module 121b.
相应地,在读取数据时,处理模块110可以根据数据读取地址,分别向第一存储控制模块111a发送第一数据读取信息,向第二存储控制模块111b发送第二数据读取信息,从而通过第一存储控制模块111a和第二存储控制模块111b并行从第一 存储阵列模块121a和第二存储阵列模块121b中读出数据。Correspondingly, when reading data, the processing module 110 can respectively send the first data reading information to the first storage control module 111a and the second data reading information to the second storage control module 111b according to the data reading address, Thereby, the first storage control module 111a and the second storage control module 111b process data from the first storage control module 111b in parallel. Data is read from the memory array module 121a and the second memory array module 121b.
例如,仍以写数据为例,在图3所示的示例中,假设处理模块110根据写入数据的占用空间和存储阵列模块121的存储空间,将bank0和bank1确定为待操作存储阵列模块,从而分别通过bank0_ctrl和bank1_ctrl并行将其中一部分写入数据存储到bank0,另一部分写入数据存储到bank1。具体的,处理模块110分别向bank0_ctrl发送第一数据写入信息以及向bank1_ctrl发送第二数据写入信息,该信息包括写入命令、写入地址和数据信息;bank0_ctrl中的译码解析模块对第一数据写入信息中的写入命令以及写入地址进行译码分析,之后,bank0_ctrl向bank0发送bank激活信息,在bank0激活之后,分别通过数据通道和控制通道向bank0发送写入命令、写入地址和数据信息,完成对bank0的数据写入;bank1_ctrl中的译码解析模块对第二数据写入信息中的写入命令以及写入地址进行译码分析,之后,bank1_ctrl向bank1发送bank激活信息,在bank1激活之后,分别通过数据通道和控制通道向bank1发送写入命令、写入地址和数据信息,完成对bank1的数据写入。For example, still taking writing data as an example, in the example shown in Figure 3, assume that the processing module 110 determines bank0 and bank1 as the storage array modules to be operated based on the occupied space of the written data and the storage space of the storage array module 121, Thus, part of the written data is stored in bank0 in parallel through bank0_ctrl and bank1_ctrl respectively, and the other part of the written data is stored in bank1. Specifically, the processing module 110 sends the first data writing information to bank0_ctrl and the second data writing information to bank1_ctrl respectively. The information includes writing command, writing address and data information; the decoding and analysis module in bank0_ctrl The write command and write address in the data write information are decoded and analyzed. After that, bank0_ctrl sends bank activation information to bank0. After bank0 is activated, the write command and write address are sent to bank0 through the data channel and control channel respectively. address and data information to complete the data writing to bank0; the decoding and analysis module in bank1_ctrl decodes and analyzes the write command and write address in the second data write information. After that, bank1_ctrl sends bank activation information to bank1 , after bank1 is activated, send the write command, write address and data information to bank1 through the data channel and control channel respectively to complete the data writing to bank1.
进一步地,在读取上述写入的数据时,处理模块110可以分别向bank0_ctrl发送第一数据读取信息,向bank1_ctrl发送第二数据读取信息,通过bank0_ctrl和bank1_ctrl并行从bank0和bank1中读取数据。Further, when reading the above written data, the processing module 110 can respectively send the first data reading information to bank0_ctrl, send the second data reading information to bank1_ctrl, and read from bank0 and bank1 in parallel through bank0_ctrl and bank1_ctrl. data.
具体实施时,根据实际三维堆叠芯片100的架构不同以及带宽需求不同,逻辑晶圆层101中存储控制模块111与存储晶圆层102中存储阵列模块121之间的连接关系可以有多种情况的设置。下面就主要列举几种示例进行说明。During specific implementation, depending on the actual architecture of the three-dimensional stacked chip 100 and the different bandwidth requirements, the connection relationship between the storage control module 111 in the logic wafer layer 101 and the storage array module 121 in the storage wafer layer 102 may have various situations. set up. Below are some main examples for explanation.
第一种,三维堆叠芯片100为包括一层逻辑晶圆和一层存储晶圆的两层晶圆结构,k=1,即逻辑晶圆中每个存储控制模块111通过晶圆级层间连接结构与存储晶圆中一个存储阵列模块121的数据及控制总线直连,不同存储阵列模块121的数据及控制总线相互独立。可以理解的是,数据及控制总线包括:数据信号线和控制信号线。数据信号线可以用于传输数据信号,如rwd0<63:0>,控制信号线包括命令信号线和地址信号线,可以用于传输上述命令信号和地址信号。这样该存储晶圆中的M个存储阵列模块121就可以同时进行读写访问。First, the three-dimensional stacked chip 100 is a two-layer wafer structure including one layer of logic wafer and one layer of storage wafer, k=1, that is, each storage control module 111 in the logic wafer is connected through wafer-level interlayer The structure is directly connected to the data and control bus of one memory array module 121 in the memory wafer, and the data and control buses of different memory array modules 121 are independent of each other. It can be understood that the data and control bus include: data signal lines and control signal lines. The data signal lines can be used to transmit data signals, such as rwd0<63:0>. The control signal lines include command signal lines and address signal lines, which can be used to transmit the above command signals and address signals. In this way, the M memory array modules 121 in the memory wafer can perform read and write access at the same time.
例如,如图3所示,三维堆叠芯片chip0包括一个logic die和一个DRAM die。假设DRAM die包括8个bank,分别表示为bank0~bank7。那么,logic die包括8个存储控制模块111,分别表示为bank0_ctrl~bank7_ctrl。bank0_ctrl通过层间连接结构与bank0连接,bank1_ctrl通过层间连接结构与bank1连接,依此类推,bank7_ctrl通过层间连接结构与bank7连接。For example, as shown in Figure 3, the three-dimensional stacked chip chip0 includes a logic die and a DRAM die. Assume that the DRAM die includes 8 banks, respectively represented as bank0~bank7. Then, the logic die includes 8 storage control modules 111, respectively represented as bank0_ctrl~bank7_ctrl. bank0_ctrl is connected to bank0 through the inter-layer connection structure, bank1_ctrl is connected to bank1 through the inter-layer connection structure, and so on, bank7_ctrl is connected to bank7 through the inter-layer connection structure.
第二种,存储晶圆层包括多层存储晶圆,M个存储阵列模块121也就分布在不同存储晶圆,k=1,即逻辑晶圆中每个存储控制模块111通过晶圆级层间连接结构与存储晶圆层中每个存储阵列模块121的数据及控制总线一一对应直连,不同存储阵列模块121的数据及控制总线相互独立。这样不同存储晶圆中的所有存储阵列模块121就可以同时进行读写访问。Second, the storage wafer layer includes multi-layer storage wafers. M storage array modules 121 are distributed in different storage wafers, k=1, that is, each storage control module 111 in the logic wafer passes through the wafer level layer. The interconnection structure is directly connected to the data and control buses of each memory array module 121 in the memory wafer layer, and the data and control buses of different memory array modules 121 are independent of each other. In this way, all memory array modules 121 in different memory wafers can perform read and write access at the same time.
例如,如图5所示,三维堆叠芯片chip1为包括一个logic die和两个DRAM die的三层结构,分别为DRAM die0和DRAM die1。DRAM die0包括8个bank,分别 表示为bank00~bank07,DRAM die1也包括8个bank,分别表示为bank10~bank17。相应地,logic die中设置有16个存储控制模块111,分别表示为bank0_ctrl~bank15_ctrl,其中,bank0_ctrl~bank7_ctrl通过层间连接结构与DRAM die0中的bank00~bank07一一对应连接,bank8_ctrl~bank15_ctrl通过层间连接结构与DRAM die1中的bank10~bank17一一对应连接(图中未示出),从而bank00~bank07以及bank10~bank17就可以同时进行读写访问。For example, as shown in Figure 5, the three-dimensional stacked chip chip1 is a three-layer structure including one logic die and two DRAM dies, namely DRAM die0 and DRAM die1. DRAM die0 includes 8 banks, respectively Represented as bank00 ~ bank07, DRAM die1 also includes 8 banks, respectively represented as bank10 ~ bank17. Correspondingly, there are 16 storage control modules 111 in the logic die, respectively represented as bank0_ctrl~bank15_ctrl. Among them, bank0_ctrl~bank7_ctrl are connected to bank00~bank07 in DRAM die0 through the inter-layer connection structure in a one-to-one correspondence, and bank8_ctrl~bank15_ctrl are connected through the layer The inter-connection structure is connected to bank10~bank17 in DRAM die1 in a one-to-one correspondence (not shown in the figure), so that bank00~bank07 and bank10~bank17 can perform read and write access at the same time.
第三种,k为大于或等于2且小于M的整数,每个存储控制模块111所连接的k个存储阵列模块121分布在同一存储晶圆。此时,存储晶圆中还设置有:与存储控制模块111一一对应设置的控制逻辑模块,存储控制模块111通过晶圆级层间连接结构与控制逻辑模块连接,控制逻辑模块分别与上述k个存储阵列模块121的数据及控制总线直连。其中,控制逻辑模块用于:根据存储控制模块111发送的数据写入或读出信号,分时控制所连接的k个存储阵列模块121进行数据写入或读出操作。In the third type, k is an integer greater than or equal to 2 and less than M, and the k memory array modules 121 connected to each memory control module 111 are distributed on the same memory wafer. At this time, the storage wafer is also provided with: a control logic module corresponding to the storage control module 111. The storage control module 111 is connected to the control logic module through a wafer-level interlayer connection structure. The control logic module is respectively connected to the above k The data and control buses of the storage array modules 121 are directly connected. The control logic module is used to: time-share control of the k connected storage array modules 121 to perform data writing or reading operations according to the data writing or reading signals sent by the storage control module 111.
控制逻辑模块的具体控制逻辑可以根据实际需要设置。作为一种实施方式,可以通过在数据写入或读出信号中设置片选控制信息,控制逻辑模块通过识别该片选控制信息来确定本次要激活的存储阵列模块121。也就是说,数据写入或读出信号包括片选控制信息以及写入或读出信息,控制逻辑模块具体用于:根据片选控制信息从所述k个存储阵列模块121中确定待写入或读出的存储阵列模块121,并根据所述写入或读出信息对该存储阵列模块121进行数据写入或读出操作。The specific control logic of the control logic module can be set according to actual needs. As an implementation manner, chip selection control information can be set in the data writing or reading signal, and the control logic module determines the storage array module 121 to be activated this time by identifying the chip selection control information. That is to say, the data writing or reading signal includes chip selection control information and writing or reading information. The control logic module is specifically used to: determine the data to be written from the k memory array modules 121 according to the chip selection control information. or read the memory array module 121, and perform data writing or reading operations on the memory array module 121 according to the writing or reading information.
作为另一种实施方式,也可以将同一控制逻辑模块所连接的k个存储阵列模块121划分到不同的地址空间,通过区分数据写入或读出信号中地址信息对应的地址空间来确定本次要激活的存储阵列模块121。也就是说,控制逻辑模块具体用于:根据数据写入或读出信号对应的地址空间,从k个存储阵列模块121中确定待写入或读出的存储阵列模块121,并根据数据写入或读出信号对该存储阵列模块121进行数据写入或读出操作。As another implementation manner, k storage array modules 121 connected to the same control logic module can also be divided into different address spaces, and the address space corresponding to the address information in the data writing or reading signal can be determined by distinguishing the address space. Storage array module 121 to be activated. That is to say, the control logic module is specifically used to: determine the storage array module 121 to be written or read from the k storage array modules 121 according to the address space corresponding to the data writing or reading signal, and determine the memory array module 121 to be written or read according to the data writing or reading signal. or read signals to perform data writing or reading operations on the memory array module 121 .
例如,如图6所示,三维堆叠芯片chip2为包括一个logic die和一个DRAM die的两层结构,假设DRAM die包括8个bank以及4个控制逻辑模块,即k=2。第一控制逻辑模块501、第二控制逻辑模块502、第三控制逻辑模块503以及第四控制逻辑模块504通过晶圆级层间连接结构分别与logic die中的四个存储控制模块:bank01_ctrl、bank23_ctrl、bank45_ctrl、bank67_ctrl一一对应连接。8个bank分别表示为bank0~bank7,第一控制逻辑模块501分别与bank0和bank1连接,第二控制逻辑模块502分别与bank2和bank3连接,第三控制逻辑模块503分别与bank4和bank5连接,第四控制逻辑模块504分别与bank6和bank7连接。这样每组bank就可以经过相应控制逻辑模块后分时连接到DRAM die中用于与相应存储控制模块111连接的接口,logic die能够实现并行读写DRAM die中的四个bank。For example, as shown in Figure 6, the three-dimensional stacked chip chip2 is a two-layer structure including a logic die and a DRAM die. It is assumed that the DRAM die includes 8 banks and 4 control logic modules, that is, k=2. The first control logic module 501, the second control logic module 502, the third control logic module 503 and the fourth control logic module 504 are respectively connected to the four storage control modules in the logic die through the wafer level inter-layer connection structure: bank01_ctrl, bank23_ctrl , bank45_ctrl, bank67_ctrl are connected in one-to-one correspondence. The eight banks are respectively represented as bank0 ~ bank7. The first control logic module 501 is connected to bank0 and bank1 respectively. The second control logic module 502 is connected to bank2 and bank3 respectively. The third control logic module 503 is connected to bank4 and bank5 respectively. The four control logic modules 504 are connected to bank6 and bank7 respectively. In this way, each group of banks can be time-shared and connected to the interface in the DRAM die for connection with the corresponding storage control module 111 through the corresponding control logic module. The logic die can realize parallel reading and writing of the four banks in the DRAM die.
第四种,k为大于或等于2且小于M的整数,存储晶圆层包括k个层叠设置的存储晶圆,每个存储控制模块111所连接的k个存储阵列模块121分别分布在k个存储晶圆。此时,存储控制模块111与所连接的k个存储阵列模块121之间设置有 片选信道,用于选定其中一个存储阵列模块121进行数据写入或读出操作。In the fourth method, k is an integer greater than or equal to 2 and less than M. The storage wafer layer includes k stacked storage wafers. The k storage array modules 121 connected to each storage control module 111 are respectively distributed in k Storage wafer. At this time, there are disposed between the storage control module 111 and the k connected storage array modules 121 The chip select channel is used to select one of the memory array modules 121 to perform data writing or reading operations.
例如,三维堆叠芯片100为包括一个logic die和两个DRAM die的三层结构,分别为DRAM die0和DRAM die1。DRAM die0包括8个bank,分别表示为bank00~bank07,DRAM die1也包括8个bank,分别表示为bank10~bank17。相应地,logic die中设置有8个存储控制模块111,分别表示为bank0_ctrl~bank7_ctrl,其中,bank0_ctrl通过层间连接结构分别与DRAM die0中的bank00以及DRAM die1中的bank10连接,bank2_ctrl~bank7_ctrl与bank0_ctrl类似。For example, the three-dimensional stacked chip 100 is a three-layer structure including one logic die and two DRAM dies, namely DRAM die0 and DRAM die1. DRAM die0 includes 8 banks, represented by bank00~bank07 respectively. DRAM die1 also includes 8 banks, represented by bank10~bank17 respectively. Correspondingly, there are 8 storage control modules 111 in the logic die, respectively represented as bank0_ctrl~bank7_ctrl. Among them, bank0_ctrl is connected to bank00 in DRAM die0 and bank10 in DRAM die1 through the inter-layer connection structure, and bank2_ctrl~bank7_ctrl is connected to bank0_ctrl. similar.
以bank0_ctrl为例,为了实现对bank00和bank10的分时控制,bank0_ctrl与所连接的bank00和bank10之间设置有片选信道,根据片选信道激活不同的DRAM die上的bank。例如,可以将bank0_ctrl与bank00和bank10之间的控制通道中,用于传输行有效指示的命令通道作为片选通道,bank0_ctrl与bank00和bank10之间除了该命令通道以外的其他控制通道以及数据通道均可以共用。Taking bank0_ctrl as an example, in order to realize time-sharing control of bank00 and bank10, a chip select channel is set up between bank0_ctrl and the connected bank00 and bank10, and banks on different DRAM dies are activated according to the chip select channel. For example, in the control channel between bank0_ctrl and bank00 and bank10, the command channel used to transmit row valid instructions can be used as the chip select channel, and other control channels and data channels between bank0_ctrl and bank00 and bank10 except the command channel can be used as the chip select channel. Can be shared.
另外,本说明书实施例还提供了一种三维堆叠芯片的数据处理方法。该三维堆叠芯片包括:存储晶圆层以及与所述存储晶圆层层叠设置的逻辑晶圆层,所述存储晶圆层包括M个存储阵列模块121,逻辑晶圆层中对应设置有N个存储控制模块111,每个存储控制模块111通过晶圆级层间连接结构与k个存储阵列模块121连接,用于控制各自连接的存储阵列模块121进行数据写入或读出操作,其中,M、N均为大于或等于2的整数,且N小于或等于M,k为大于或等于1且小于M的整数。关于三维堆叠芯片的具体结构可以参照上文中的相关描述,此处不再赘述。In addition, embodiments of this specification also provide a data processing method for three-dimensional stacked chips. The three-dimensional stacked chip includes: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer. The storage wafer layer includes M storage array modules 121 , and there are N corresponding logic wafer layers. Storage control module 111. Each storage control module 111 is connected to k storage array modules 121 through a wafer-level interlayer connection structure, and is used to control the respective connected storage array modules 121 to perform data writing or reading operations, where M , N are all integers greater than or equal to 2, and N is less than or equal to M, and k is an integer greater than or equal to 1 and less than M. Regarding the specific structure of the three-dimensional stacked chip, please refer to the relevant description above and will not be described again here.
如图7所示,该数据处理方法包括以下步骤S701和步骤S702。As shown in Figure 7, the data processing method includes the following steps S701 and S702.
步骤S701,接收存储控制信号;Step S701, receive storage control signal;
步骤S702,基于存储控制信号,利用多个存储控制模块并行对存储控制模块连接的存储阵列模块进行数据写入或读出操作。Step S702: Based on the storage control signal, use multiple storage control modules to perform data writing or reading operations in parallel on the storage array module connected to the storage control module.
其中,存储控制信号用于指示本次数据访问待操作的存储阵列模块121以及操作相关信息如命令、地址以及数据等。待操作的存储阵列模块121可以是一个,也可以是多个。当待操作的存储阵列模块121为多个时,可以利用多个存储控制模块111并行对所连接的存储阵列模块121进行数据写入或读出操作。Among them, the storage control signal is used to indicate the storage array module 121 to be operated for this data access and operation-related information such as commands, addresses, data, etc. The storage array module 121 to be operated may be one or multiple. When there are multiple storage array modules 121 to be operated, multiple storage control modules 111 can be used to perform data writing or reading operations on the connected storage array modules 121 in parallel.
在一种可选的实施方式中,存储控制信号可以包括数据写入命令和写入数据,可以根据写入数据的占用空间和存储阵列模块121的存储空间确定写入数据的写入地址,以确定待操作的存储阵列模块121。具体的,响应于写入数据的占用空间大于存储阵列模块121的存储空间,将写入数据存储在第一存储阵列模块和第二存储阵列模块中,第一存储阵列模块和第二存储阵列模块通过不同的存储控制模块111控制;或者,第一存储阵列模块和第二存储阵列模块位于不同的存储晶圆层,且通过不同的存储控制模块111控制。具体过程可以参照上文中的相关描述,此处不再赘述。In an optional implementation, the storage control signal may include a data writing command and writing data, and the writing address of the writing data may be determined according to the occupied space of the writing data and the storage space of the storage array module 121, so as to The storage array module 121 to be operated is determined. Specifically, in response to the occupied space of the written data being larger than the storage space of the storage array module 121, the written data is stored in the first storage array module and the second storage array module. The first storage array module and the second storage array module They are controlled by different storage control modules 111; or, the first storage array module and the second storage array module are located on different storage wafer layers and are controlled by different storage control modules 111. For the specific process, please refer to the relevant descriptions above and will not be repeated here.
举例来讲,对于上文中的第一种三维堆叠芯片结构,以图3示出的示例性结构为例,假设待操作的存储阵列模块121为:bank0~bank7,可以通过bank0_ctrl~bank7_ctrl并行完成对bank0~bank7的数据写入或读出操作。以数据写入 操作为例,可以分别向bank0_ctrl~bank7_ctrl发送数据操作信息,该信息包括写入命令、写入地址和数据信息;接着,bank0_ctrl中的译码解析模块对该数据写入信息中的写入命令以及写入地址进行译码分析,之后,bank0_ctrl向bank0发送bank激活信息,在bank0激活之后,分别通过数据通道和控制通道向bank0发送写入命令、写入地址和数据信息,完成对bank0的数据写入;同理,bank1_ctrl~bank7_ctrl分别完成对bank1~bank7的数据写入。For example, for the first three-dimensional stacked chip structure mentioned above, taking the exemplary structure shown in FIG. 3 as an example, assuming that the memory array modules 121 to be operated are: bank0~bank7, the processing can be completed in parallel through bank0_ctrl~bank7_ctrl. Data writing or reading operations of bank0~bank7. write with data Taking the operation as an example, you can send data operation information to bank0_ctrl~bank7_ctrl respectively. This information includes write command, write address and data information; then, the decoding and analysis module in bank0_ctrl writes the write command in the data write information and Write the address for decoding analysis. After that, bank0_ctrl sends bank activation information to bank0. After bank0 is activated, it sends the write command, write address and data information to bank0 through the data channel and control channel respectively to complete the data writing to bank0. Enter; similarly, bank1_ctrl ~ bank7_ctrl complete the data writing to bank1 ~ bank7 respectively.
对于上文中的第二种三维堆叠芯片结构,以图5示出的示例性结构为例,假设待操作的存储阵列模块121为:bank00~bank07以及bank10~bank17,可以通过bank0_ctrl~bank15_ctrl并行完成对bank00~bank07以及bank10~bank17的数据写入或读出操作。For the second three-dimensional stacked chip structure mentioned above, taking the exemplary structure shown in Figure 5 as an example, assuming that the memory array modules 121 to be operated are: bank00~bank07 and bank10~bank17, the alignment can be completed in parallel through bank0_ctrl~bank15_ctrl. Data writing or reading operations for bank00~bank07 and bank10~bank17.
对于上文中的第三种三维堆叠芯片结构,以图6示出的示例性结构为例,假设待操作的存储阵列模块121为:bank0、bank2、bank4以及bank6,通过bank01_ctrl、bank23_ctrl、bank45_ctrl和bank67_ctrl以及控制逻辑模块激活bank0、bank2、bank4以及bank6,从而并行完成对bank0、bank2、bank4以及bank6的数据写入或读出操作。For the third three-dimensional stacked chip structure above, taking the exemplary structure shown in FIG. 6 as an example, assuming that the memory array modules 121 to be operated are: bank0, bank2, bank4 and bank6, through bank01_ctrl, bank23_ctrl, bank45_ctrl and bank67_ctrl And the control logic module activates bank0, bank2, bank4 and bank6, thereby completing the data writing or reading operations on bank0, bank2, bank4 and bank6 in parallel.
对于上文中的第四种三维堆叠芯片结构,同样以上述logic die、DRAM die0和DRAM die1的三层结构为例,假设待操作的存储阵列模块121为:DRAM die0中的bank00~bank07,则可以通过片选信道激活DRAM die0上的bank00~bank07,从而通过bank0_ctrl~bank7_ctrl并行完成对bank00~bank07的数据写入或读出操作。For the fourth three-dimensional stacked chip structure above, the above three-layer structure of logic die, DRAM die0 and DRAM die1 is also taken as an example. Assume that the memory array module 121 to be operated is: bank00~bank07 in DRAM die0, then it can Activate bank00~bank07 on DRAM die0 through the chip select channel, so that the data writing or reading operations on bank00~bank07 are completed in parallel through bank0_ctrl~bank7_ctrl.
实施例二Embodiment 2
如图8所示,本说明书实施例提供的三维堆叠芯片200,包括:逻辑芯片201、存储芯片202以及第一时序控制电路230。As shown in FIG. 8 , the three-dimensional stacked chip 200 provided by the embodiment of this specification includes: a logic chip 201, a memory chip 202, and a first timing control circuit 230.
其中,存储芯片202包括M个存储阵列模块121(bank),用于存储数据。M为大于或等于2的整数。逻辑芯片201与存储芯片202通过芯片叠层封装技术进行层叠封装。芯片叠层封装技术为实现芯片三维异质集成的技术,具体的,目前实现逻辑芯片201和存储芯片202三维异质集成的技术主要是混合键合技术。具体的,逻辑芯片201能够通过晶圆级层间连接结构103如混合键合结构、硅通孔结构等并行访问存储芯片202中的多个bank。逻辑芯片201的具体结构可以参照上述实施例一中逻辑晶圆层101的结构,存储芯片202的具体结构可以参照上述实施例一中存储晶圆层102的结构。Among them, the memory chip 202 includes M memory array modules 121 (banks) for storing data. M is an integer greater than or equal to 2. The logic chip 201 and the memory chip 202 are stacked and packaged using chip stack packaging technology. Chip stack packaging technology is a technology that realizes three-dimensional heterogeneous integration of chips. Specifically, the current technology that realizes three-dimensional heterogeneous integration of logic chips 201 and memory chips 202 is mainly hybrid bonding technology. Specifically, the logic chip 201 can access multiple banks in the memory chip 202 in parallel through the wafer-level interlayer connection structure 103, such as a hybrid bonding structure, a through silicon via structure, etc. The specific structure of the logic chip 201 may refer to the structure of the logic wafer layer 101 in the first embodiment. The specific structure of the memory chip 202 may refer to the structure of the storage wafer layer 102 in the first embodiment.
逻辑芯片201中对应设置有N个存储控制模块111,N也为大于或等于2的整数,且N小于或等于M。每个存储控制模块111通过晶圆级层间连接结构103与k个存储阵列模块121连接,用于控制各自连接的存储阵列模块121进行数据写入或读出操作。其中,k为大于或等于1且小于M的整数。在进行数据读写时,多个存储控制模块111可以同时控制对应连接的存储阵列模块121进行数据读写操作,这样逻辑芯片201就可以并行读写不同存储控制模块111连接的其中一个存储阵列模块121,即至少能够实现对存储芯片202中N个存储阵列模块121的并行读写访问,无需受封装和硬件系统的限制,有效地提升DRAM的数据访问带宽,从而有利于提 高芯片的数据处理速度。N storage control modules 111 are correspondingly provided in the logic chip 201. N is also an integer greater than or equal to 2, and N is less than or equal to M. Each storage control module 111 is connected to k storage array modules 121 through the wafer-level interlayer connection structure 103, and is used to control the respective connected storage array modules 121 to perform data writing or reading operations. Among them, k is an integer greater than or equal to 1 and less than M. When reading and writing data, multiple storage control modules 111 can simultaneously control the corresponding connected storage array modules 121 to perform data reading and writing operations. In this way, the logic chip 201 can read and write in parallel one of the storage array modules connected to different storage control modules 111. 121, that is, it can at least realize parallel read and write access to the N memory array modules 121 in the memory chip 202 without being limited by packaging and hardware systems, effectively improving the data access bandwidth of DRAM, thereby conducive to improving High chip data processing speed.
例如,三维堆叠芯片200包括一个logic die和一个DRAM die。假设DRAM die包括8个bank,分别表示为bank0~bank7。那么,logic die中相应设置有8个存储控制模块111,分别为bank0_ctrl~bank7_ctrl。bank0_ctrl通过晶圆级层间连接结构103与bank0连接,bank1_ctrl通过晶圆级层间连接结构103与bank1连接,依此类推,bank7_ctrl通过晶圆级层间连接结构103与bank7连接。这样logic die就可以通过8个存储控制模块111并行访问所有bank。当然,在另一实施例中,logic die中还可以相应设置少于bank数量的存储控制模块111,例如有4个存储控制模块111,分别为bank0_ctrl~bank3_ctrl。bank0_ctrl通过晶圆级层间连接结构103与bank0、bank1连接,bank1_ctrl通过晶圆级层间连接结构103与bank2、bank3连接,依此类推,bank3_ctrl通过晶圆级层间连接结构103与bank6、bank7连接。For example, the three-dimensional stacked chip 200 includes a logic die and a DRAM die. Assume that the DRAM die includes 8 banks, respectively represented as bank0~bank7. Then, there are 8 storage control modules 111 correspondingly installed in the logic die, namely bank0_ctrl~bank7_ctrl. bank0_ctrl is connected to bank0 through the wafer-level interlayer connection structure 103, bank1_ctrl is connected to bank1 through the wafer-level interlayer connection structure 103, and so on, bank7_ctrl is connected to bank7 through the wafer-level interlayer connection structure 103. In this way, the logic die can access all banks in parallel through eight storage control modules 111. Of course, in another embodiment, the logic die can also be equipped with a number of storage control modules 111 less than the number of banks. For example, there are four storage control modules 111, namely bank0_ctrl~bank3_ctrl. bank0_ctrl is connected to bank0 and bank1 through the wafer level interlayer connection structure 103, bank1_ctrl is connected to bank2 and bank3 through the wafer level interlayer connection structure 103, and so on, bank3_ctrl is connected to bank6 and bank7 through the wafer level interlayer connection structure 103. connect.
这样,逻辑芯片201可以并行访问存储芯片202中的多个DRAM bank,访问效率大大增加。但是,由于此时的DRAM已不同于标准的DRAM颗粒,逻辑芯片201中各存储控制模块111对bank进行访问,是直接访问的存储阵列。访问过程中涉及读写数据需要的各种信号的传输,如地址使能信号、地址信号、数据使能信号以及数据信号。其中,一些信号需要满足一定的时序关系,如地址使能信号与地址信号需要相互匹配,例如,如图9所示,地址信号相对于地址使能信号的建立时间要求范围是-100ps到100ps;同样数据使能信号与数据信号相互匹配,才能准确完成数据的读写操作。In this way, the logic chip 201 can access multiple DRAM banks in the memory chip 202 in parallel, and the access efficiency is greatly increased. However, since the DRAM at this time is different from the standard DRAM particles, each storage control module 111 in the logic chip 201 accesses the bank directly and directly accesses the storage array. The access process involves the transmission of various signals needed to read and write data, such as address enable signal, address signal, data enable signal and data signal. Among them, some signals need to meet certain timing relationships. For example, the address enable signal and the address signal need to match each other. For example, as shown in Figure 9, the required establishment time range of the address signal relative to the address enable signal is -100ps to 100ps; Similarly, the data enable signal and the data signal match each other to accurately complete the data read and write operations.
本文中,将上述具有时序匹配关系的多路信号称为多路第一目标信号,将存储控制模块111中输出上述多路第一目标信号的端口称为目标输出端。可以理解的是,每个存储控制模块111的译码解析模块中均设置有产生上述多路第一目标信号的信号产生电路,上述目标输出端即为相应信号产生电路的输出端。In this article, the above-mentioned multi-channel signals with timing matching relationships are called multiple-channel first target signals, and the port in the storage control module 111 that outputs the above-mentioned multiple-channel first target signals is referred to as a target output end. It can be understood that the decoding and analysis module of each storage control module 111 is provided with a signal generation circuit that generates the multiple first target signals, and the above target output end is the output end of the corresponding signal generation circuit.
为了满足上述多路第一目标信号的传输时序要求,例如,可以在逻辑芯片201中各存储控制模块111的目标输出端增设时序控制逻辑,控制目标输出端输出上述多路第一目标信号的输出时间,以满足DRAM存储阵列对上述多路第一目标信号的接口时序条件。此时,逻辑芯片201中各存储控制模块111的目标输出端连接上述时序控制逻辑,时序控制逻辑的输出端再通过晶圆级层间连接结构与存储阵列模块121直连。In order to meet the transmission timing requirements of the multiple first target signals, for example, timing control logic can be added to the target output end of each storage control module 111 in the logic chip 201 to control the target output end to output the output of the multiple first target signals. time to meet the interface timing conditions of the DRAM memory array to the above-mentioned multiple first target signals. At this time, the target output terminals of each storage control module 111 in the logic chip 201 are connected to the above-mentioned timing control logic, and the output terminals of the timing control logic are directly connected to the storage array module 121 through the wafer-level interlayer connection structure.
考虑到存储阵列对上述多路第一目标信号的时序匹配要求较高,例如,要求地址信号相对于地址使能信号的建立时间范围达到-100ps到100ps,上述时序控制逻辑的设计难度较大,通常需要在逻辑芯片201上采用全定制的方法设计专门的物理接口硬核来满足此时序,这对于大部分都是采用半定制流程的逻辑芯片201设计带来了额外开销,同时使得半定制布局布线受到限制。Considering that the memory array has high timing matching requirements for the above-mentioned multiple first target signals, for example, the establishment time range of the address signal relative to the address enable signal is required to reach -100ps to 100ps, the design of the above-mentioned timing control logic is relatively difficult. It is usually necessary to use a fully customized method to design a dedicated physical interface hard core on the logic chip 201 to meet this timing. This brings additional overhead to the design of the logic chip 201, which mostly adopts a semi-custom process, and also makes the semi-custom layout Cabling is restricted.
如若逻辑芯片201包含多个硬核phy来满足DRAM的接口时序要求,这些硬核和逻辑芯片201自身逻辑之间的时序和功能验证涉及到全定制和半定制的协同设计验证,工作量和难度都很大,另外硬核的存在阻挡了逻辑芯片201的布局布线,使得后端设计难度加大。 If the logic chip 201 contains multiple hard cores PHY to meet the interface timing requirements of the DRAM, the timing and functional verification between these hard cores and the logic of the logic chip 201 involves full customization and semi-customization co-design verification, workload and difficulty Both are very large. In addition, the existence of the hard core blocks the layout and routing of the logic chip 201, making the back-end design more difficult.
由此,如图8所示,可以在三维堆叠芯片中,设置第一时序控制电路230,用于基于接收到的时钟信号,控制上述目标输出端输出的多路第一目标信号到达存储阵列模块121的传输时序,以满足存储阵列模块121对上述多路第一目标信号的接口时序条件。这样可以满足存储阵列对这些具有时序匹配关系的第一目标信号的时序需求,从而保证三维堆叠芯片的正常工作,且易于实现,无需在逻辑芯片201上设计专门的物理接口硬核,有利于降低逻辑芯片201的设计难度。Therefore, as shown in FIG. 8 , a first timing control circuit 230 can be provided in the three-dimensional stacked chip to control the multiple first target signals output by the target output terminal to reach the memory array module based on the received clock signal. 121 to meet the interface timing conditions of the memory array module 121 for the above-mentioned multiple first target signals. This can meet the timing requirements of the storage array for these first target signals with timing matching relationships, thereby ensuring the normal operation of the three-dimensional stacked chip, and is easy to implement. There is no need to design a special physical interface hard core on the logic chip 201, which is beneficial to reducing the cost. The design difficulty of logic chip 201.
具体的,可以针对逻辑芯片201中每个存储控制模块111,分别增设第一时序控制电路230来控制存储控制模块111的相应信号输出端口输出的信号到达相应bank的时序。相比于设计专门的物理接口硬核严格将这些信号的输出时间控制在极短的建立时间范围内,这种半定制流程设计,有利于简化逻辑芯片201的设计流程和难度,从而加速逻辑芯片201的研发进度。Specifically, for each storage control module 111 in the logic chip 201, a first timing control circuit 230 can be added to control the timing of signals output by the corresponding signal output ports of the storage control module 111 reaching the corresponding bank. Compared with designing a specialized physical interface hard core to strictly control the output time of these signals within a very short setup time range, this semi-custom process design is conducive to simplifying the design process and difficulty of the logic chip 201, thereby accelerating the logic chip 201 development progress.
具体来讲,如图10所示,逻辑芯片201内每个存储控制模块111的目标输出端(如图10示出的S1和S2)均通过第一时序控制电路230与存储芯片202内的相应存储阵列模块121连接。需要说明的是,图10中作为示意,仅示出了一个存储控制模块111和一个存储阵列模块121,实际应用中,存储控制模块111、第一时序控制电路230和存储阵列模块121的具体数量需要根据实际三维堆叠芯片的需要设置。Specifically, as shown in Figure 10, the target output terminals (S1 and S2 shown in Figure 10) of each memory control module 111 in the logic chip 201 are connected to the corresponding terminals in the memory chip 202 through the first timing control circuit 230. Storage array module 121 is connected. It should be noted that as a schematic, FIG. 10 only shows one storage control module 111 and one storage array module 121. In actual application, the specific number of storage control module 111, first timing control circuit 230 and storage array module 121 is It needs to be set according to the actual needs of three-dimensional stacked chips.
第一时序控制电路230用于基于接收到的时钟信号,控制上述目标输出端输出的多路第一目标信号到达存储阵列模块121的传输时序,以满足存储阵列对上述多路第一目标信号的接口时序条件。该接口时序条件根据实际应用场景中存储阵列的时序要求确定。本实施例中,上述多路第一目标信号之间具有时序匹配关系,如逻辑芯片201中需要同步输出给存储阵列模块121的信号。The first timing control circuit 230 is used to control the transmission timing of the multiple first target signals output from the target output terminal to the memory array module 121 based on the received clock signal, so as to meet the requirements of the memory array for the multiple first target signals. Interface timing conditions. The interface timing conditions are determined based on the timing requirements of the storage array in actual application scenarios. In this embodiment, there is a timing matching relationship between the multiple first target signals, such as the signals in the logic chip 201 that need to be output to the storage array module 121 synchronously.
例如,上述多路第一目标信号包括地址使能信号和地址信号,相应地,目标输出端包括逻辑芯片201内地址使能信号产生电路的地址使能输出端,以及地址产生电路的地址输出端。此时,对应设置的第一时序控制电路230需要控制地址使能输出端输出的地址使能信号与地址输出端输出的地址信号到达存储阵列模块121的传输时序,以满足存储阵列对这两种信号的时序需求。For example, the above-mentioned multiple first target signals include an address enable signal and an address signal. Correspondingly, the target output end includes an address enable output end of the address enable signal generation circuit in the logic chip 201 and an address output end of the address generation circuit. . At this time, the corresponding first timing control circuit 230 needs to control the transmission timing of the address enable signal output by the address enable output terminal and the address signal output by the address output terminal to reach the memory array module 121 to meet the requirements of the memory array for both types. Signal timing requirements.
又例如,上述多路第一目标信号包括写数据使能信号和写入数据信号即需要写入存储阵列模块121的数据信号,相应地,目标输出端包括写数据使能产生电路的写数据使能输出端以及数据供给电路的数据输出端。此时,对应设置的第一时序控制电路230需要控制写数据使能输出端输出的写数据使能信号与数据输出端输出的写入数据信号到达存储阵列模块121的传输时序,以满足存储阵列对这两种信号的时序需求。For another example, the multiple first target signals include a write data enable signal and a write data signal, that is, a data signal that needs to be written to the memory array module 121. Correspondingly, the target output terminal includes a write data enable signal of the write data enable generation circuit. energy output terminal and the data output terminal of the data supply circuit. At this time, the corresponding first timing control circuit 230 needs to control the transmission timing of the write data enable signal output by the write data enable output terminal and the write data signal output by the data output terminal to reach the memory array module 121 to meet the requirements of the memory array. Timing requirements for these two signals.
具体来讲,第一时序控制电路230可以包括:第一采样子电路231和第二采样子电路232。第一采样子电路231设置于逻辑芯片201,第二采样子电路232设置于存储芯片202。Specifically, the first timing control circuit 230 may include: a first sampling sub-circuit 231 and a second sampling sub-circuit 232. The first sampling sub-circuit 231 is provided on the logic chip 201 , and the second sampling sub-circuit 232 is provided on the memory chip 202 .
此外,上述三维堆叠芯片还包括用于提供时钟信号的时钟接口,第一采样子电路231和第二采样子电路232的时钟端均与该时钟接口连接,即由同一时钟信号控制。其中,时钟接口可以是逻辑芯片201内部时钟电路的输出接口,也可以是外部 时钟接口,本实施例对此不做限制。In addition, the above-mentioned three-dimensional stacked chip also includes a clock interface for providing a clock signal. The clock terminals of the first sampling sub-circuit 231 and the second sampling sub-circuit 232 are both connected to the clock interface, that is, they are controlled by the same clock signal. Among them, the clock interface can be the output interface of the internal clock circuit of the logic chip 201, or it can be an external Clock interface, this embodiment does not limit this.
第一采样子电路231的输入端与上述目标输出端连接,用于在上述时钟信号的控制下,同步触发上述目标输出端输出的多路第一目标信号从逻辑芯片201输出。第二采样子电路232的输入端与第一采样子电路231的输出端连接,输出端与所述存储阵列模块121连接,用于在上述时钟信号的控制下,同步触发从逻辑芯片201输出的多路第一目标信号被存储阵列模块121接收。具体实施时,第一采样子电路231与第二采样子电路232可以通过晶圆级层间连接结构103连接。The input end of the first sampling sub-circuit 231 is connected to the target output end, and is used to synchronously trigger the multiple first target signals output from the target output end to be output from the logic chip 201 under the control of the clock signal. The input end of the second sampling sub-circuit 232 is connected to the output end of the first sampling sub-circuit 231, and the output end is connected to the memory array module 121, for synchronously triggering the output from the logic chip 201 under the control of the above clock signal. The multiple first target signals are received by the storage array module 121 . During specific implementation, the first sampling sub-circuit 231 and the second sampling sub-circuit 232 may be connected through the wafer-level interlayer connection structure 103 .
在一种可选的实施方式中,第一采样子电路231可以包括:与上述多路第一目标信号一一对应设置的多个第一触发器。上述多个第一触发器的输入端与上述目标输出端连接,即与各自对应的第一目标信号的输出端连接,时钟端均与上述时钟接口连接,输出端与第二采样子电路232连接。这些第一触发器用于基于同一时钟信号,在第一采样时间点同步触发上述目标输出端输出的多路第一目标信号从逻辑芯片201输出。In an optional implementation, the first sampling sub-circuit 231 may include: a plurality of first flip-flops arranged in one-to-one correspondence with the multiple first target signals. The input terminals of the plurality of first flip-flops are connected to the above-mentioned target output terminals, that is, connected to the output terminals of respective first target signals, the clock terminals are connected to the above-mentioned clock interface, and the output terminals are connected to the second sampling sub-circuit 232 . These first flip-flops are used to synchronously trigger multiple first target signals output from the above target output terminals to be output from the logic chip 201 at a first sampling time point based on the same clock signal.
例如,上述目标输出端包括地址使能输出端和地址输出端,则第一采样子电路231包括第一触发器DFF0和第一触发器DFF1,第一触发器DFF0的输入端与地址使能输出端连接,第一触发器DFF1的输入端与地址输出端连接。这样,第一触发器DFF0和第一触发器DFF1就可以基于同一时钟信号,在第一采样时间点同步触发地址使能信号和地址信号从逻辑芯片201向存储芯片202输出。For example, the above target output terminal includes an address enable output terminal and an address output terminal, then the first sampling subcircuit 231 includes a first flip-flop DFF0 and a first flip-flop DFF1. The input terminal of the first flip-flop DFF0 and the address enable output terminal are terminal is connected, and the input terminal of the first flip-flop DFF1 is connected with the address output terminal. In this way, the first flip-flop DFF0 and the first flip-flop DFF1 can synchronously trigger the output of the address enable signal and the address signal from the logic chip 201 to the memory chip 202 at the first sampling time point based on the same clock signal.
在一种可选的实施方式中,第二采样子电路232可以包括:与上述多个第一触发器一一对应设置的多个第二触发器。多个第二触发器的输入端与各自对应的第一触发器的输出端连接,时钟端均与上述时钟接口连接,输出端与存储阵列模块121连接。需要说明的是,上述多个第二触发器的时钟端与上述多个第一触发器的时钟端均连接同一时钟接口,接收由该时钟接口提供的同一时钟信号。In an optional implementation, the second sampling sub-circuit 232 may include: a plurality of second flip-flops arranged in one-to-one correspondence with the plurality of first flip-flops. The input terminals of the plurality of second flip-flops are connected to the output terminals of the corresponding first flip-flops, the clock terminals are connected to the above-mentioned clock interfaces, and the output terminals are connected to the storage array module 121 . It should be noted that the clock terminals of the plurality of second flip-flops and the clock terminals of the plurality of first flip-flops are connected to the same clock interface and receive the same clock signal provided by the clock interface.
上述多个第二触发器用于对各自接收到的第一目标信号进行锁存,基于同一时钟信号,在第二采样时间点同步触发锁存的第一目标信号输出给存储阵列模块121。由于信号需要先从逻辑芯片201输出才能在存储芯片202进行锁存,因此,第二采样时间点应晚于第一采样时间点。The plurality of second flip-flops are used to latch the first target signal received respectively, and based on the same clock signal, trigger the latched first target signal synchronously at the second sampling time point and output it to the storage array module 121 . Since the signal needs to be output from the logic chip 201 before being latched in the memory chip 202, the second sampling time point should be later than the first sampling time point.
例如,在上述示例中,第一采样子电路231包括第一触发器DFF0和第一触发器DFF1,相应地,第二采样子电路232可以包括第二触发器DFF2和第二触发器DFF3。第二触发器DFF2的输入端与第一触发器DFF0的输出端Q0连接,对接收到的地址使能信号进行锁存。第二触发器DFF3的输入端与第一触发器DFF1的输出端Q1连接,对接收到的地址信号进行锁存。这样,第二触发器DFF2和第二触发器DFF3就可以基于同一时钟信号,在第二采样时间点同步触发地址使能信号和地址信号输出给存储阵列模块121,即同步被存储阵列模块121接收。这样就可以使得地址使能信号与地址信号到达DRAM的时间基本保持同步,将逻辑芯片201与DRAM之间的地址使能端口与地址端口转换为同步端口。For example, in the above example, the first sampling sub-circuit 231 includes the first flip-flop DFF0 and the first flip-flop DFF1. Correspondingly, the second sampling sub-circuit 232 may include the second flip-flop DFF2 and the second flip-flop DFF3. The input terminal of the second flip-flop DFF2 is connected to the output terminal Q0 of the first flip-flop DFF0, and the received address enable signal is latched. The input terminal of the second flip-flop DFF3 is connected to the output terminal Q1 of the first flip-flop DFF1 to latch the received address signal. In this way, the second flip-flop DFF2 and the second flip-flop DFF3 can synchronously trigger the address enable signal and the address signal to be output to the memory array module 121 at the second sampling time point based on the same clock signal, that is, they are synchronously received by the memory array module 121 . In this way, the address enable signal and the time when the address signal reaches the DRAM can be basically synchronized, and the address enable port and the address port between the logic chip 201 and the DRAM can be converted into a synchronization port.
进一步地,为了保证上述多路第一目标信号均能被时钟正常采样,上述多路第一目标信号到达相应第二触发器的时间均位于第一采样时间点与所述第二采样时间 点之间,且上述多路第一目标信号的有效时长均大于或等于第一采样时间点与第二采样时间点之间的时间间隔。这样就可以确保在第二采样时间点各路第一目标信号均能够被正确采样到。Further, in order to ensure that the multiple channels of first target signals can all be sampled normally by the clock, the times when the multiple channels of first target signals arrive at the corresponding second flip-flop are located between the first sampling time point and the second sampling time. points, and the effective duration of the multiple first target signals is greater than or equal to the time interval between the first sampling time point and the second sampling time point. This ensures that each first target signal can be correctly sampled at the second sampling time point.
具体实施时,第一采样时间点与第二采样时间点之间的时间间隔可以根据实际应用场景的需要设置。例如,该时间间隔可以设置为上述时钟信号的一个时钟周期。During specific implementation, the time interval between the first sampling time point and the second sampling time point can be set according to the needs of the actual application scenario. For example, the time interval can be set to one clock cycle of the above-mentioned clock signal.
可以理解的是,相比于设计专门的物理接口硬核将上述目标输出端的信号输出时间控制在极短的建立时间范围如-100ps到100ps内,对这些目标输出端的相对时钟设置相应的约束,控制各路第一目标信号在Ta和Tb之间到达DRAM中的触发器,简单易实现,有效地降低了对逻辑芯片201中目标输出端的设计要求。It is understandable that compared to designing a specialized physical interface hard core to control the signal output time of the above target output terminals in a very short settling time range such as -100ps to 100ps, setting corresponding constraints on the relative clocks of these target output terminals, Controlling each first target signal to reach the flip-flop in the DRAM between Ta and Tb is simple and easy to implement, and effectively reduces the design requirements for the target output end of the logic chip 201.
例如,上述第一触发器和第二触发器可以均采用D触发器。图11示出了地址使能信号和地址信号的一种示例性传输时序图。图11中,Ta时刻表示第一采样时间点,Tb时刻表示第二采样时间点,CLK表示时钟信号,Q0表示表示第一触发器DFF0输出的地址使能信号,Q1表示第一触发器DFF1输出的地址信号,Q2表示第二触发器DFF2输出的地址使能锁存信号,Q3表示第二触发器DFF3输出的地址锁存信号。For example, the above-mentioned first flip-flop and the second flip-flop may both adopt D flip-flops. FIG. 11 shows an exemplary transmission timing diagram of the address enable signal and the address signal. In Figure 11, time Ta represents the first sampling time point, time Tb represents the second sampling time point, CLK represents the clock signal, Q0 represents the address enable signal represented by the output of the first flip-flop DFF0, and Q1 represents the output of the first flip-flop DFF1 The address signal, Q2 represents the address enable latch signal output by the second flip-flop DFF2, and Q3 represents the address latch signal output by the second flip-flop DFF3.
假设上述第一触发器DFF0、DFF1和第二触发器DFF2、DFF3均采用上升沿触发方式。如图11所示,Ta时刻,时钟信号CLK跳变为高电平,触发第一触发器DFF0的Q0端口输出自身D端口接收到的地址使能信号,使得第二触发器DFF2对地址使能信号进行锁存,同时,触发第一触发器DFF1的Q1端口输出自身D端口接收到的地址信号,使得第二触发器DFF3对地址信号进行锁存。Tb时刻,时钟信号CLK从低电平跳变到高电平,触发第二触发器DFF2的Q2端口输出锁存的地址使能信号,即地址使能锁存信号,同时,触发第二触发器DFF3的Q3端口输出锁存的地址信号,即地址锁存信号,从而使得地址使能信号与地址信号能够同步被DRAM接收。需要说明的是,考虑到触发器从时钟触发到输出响应需要一定的耗时,所以在时钟触发后需要间隔一定时间输出端口才会输出相应的信号。It is assumed that the above-mentioned first flip-flops DFF0 and DFF1 and the second flip-flops DFF2 and DFF3 adopt rising edge triggering mode. As shown in Figure 11, at time Ta, the clock signal CLK jumps to high level, triggering the Q0 port of the first flip-flop DFF0 to output the address enable signal received by its own D port, causing the second flip-flop DFF2 to enable the address. The signal is latched, and at the same time, the Q1 port of the first flip-flop DFF1 is triggered to output the address signal received by its own D port, causing the second flip-flop DFF3 to latch the address signal. At time Tb, the clock signal CLK jumps from low level to high level, triggering the Q2 port of the second flip-flop DFF2 to output the latched address enable signal, that is, the address enable latch signal, and at the same time, triggering the second flip-flop The Q3 port of DFF3 outputs the latched address signal, that is, the address latch signal, so that the address enable signal and the address signal can be received by the DRAM synchronously. It should be noted that considering that the flip-flop takes a certain amount of time from clock triggering to output response, it takes a certain period of time after the clock triggers before the output port outputs the corresponding signal.
可以理解的是,上述第二采样子电路232是同步触发各路第一目标信号输出的,在一种可选的实施方式中,为了更好地适应DRAM的采样时序,第一时序控制电路230还可以包括:延时子电路233,设置于存储芯片202中,上述第二采样子电路232的输出端通过延时子电路233与存储阵列模块121连接。延时子电路233用于调整从第二采样子电路232输出的各路第一目标信号到达存储阵列模块121的相对时间关系,以满足上述的接口时序条件。例如,可以分别针对每路第一目标信号设置一个可调延迟单元,按照预设延时规则,调节每个延时单元的延迟时间。预设延迟规则可以根据具体存储阵列的接口采样时序要求设置。It can be understood that the above-mentioned second sampling sub-circuit 232 triggers the output of each first target signal synchronously. In an optional implementation, in order to better adapt to the sampling timing of the DRAM, the first timing control circuit 230 It may also include: a delay sub-circuit 233 disposed in the memory chip 202, and the output end of the second sampling sub-circuit 232 is connected to the memory array module 121 through the delay sub-circuit 233. The delay subcircuit 233 is used to adjust the relative time relationship between the first target signals output from the second sampling subcircuit 232 and arriving at the memory array module 121 to meet the above-mentioned interface timing conditions. For example, an adjustable delay unit can be set for each first target signal, and the delay time of each delay unit can be adjusted according to a preset delay rule. The preset delay rules can be set according to the interface sampling timing requirements of the specific storage array.
还是以上述多路第一目标信号包括地址使能信号和地址信号为例,可以分别针对性地设置第一延时单元和第二延时单元,第一延时单元的输入端与第二触发器DFF2的输出端Q2连接,第二延时单元的输入端与第二触发器DFF3的输出端Q3连接,第一延时单元与第二延时单元的输出端分别与存储阵列模块121中的相应信号接收端口连接。 Still taking the above-mentioned multi-channel first target signal including the address enable signal and the address signal as an example, the first delay unit and the second delay unit can be respectively set in a targeted manner, and the input end of the first delay unit and the second trigger The output terminal Q2 of the flip-flop DFF2 is connected, the input terminal of the second delay unit is connected with the output terminal Q3 of the second flip-flop DFF3, and the output terminals of the first delay unit and the second delay unit are respectively connected with the memory array module 121 Connect the corresponding signal receiving port.
此时,就可以通过分别配置第一延时单元和第二延时单元的延时时间,控制第二触发器DFF2输出的地址使能锁存信号和第二触发器DFF3输出的地址锁存信号最终到达存储阵列模块121的相对时间关系,以满足存储阵列对地址使能信号以及地址信号的时序要求。例如,存储阵列需要地址信号在地址使能信号之前到达,且间隔时间为t,则可以配置第一延时单元的延时时间大于第二延时单元的延时时间,且延时时间差为t。At this time, you can control the address enable latch signal output by the second flip-flop DFF2 and the address latch signal output by the second flip-flop DFF3 by respectively configuring the delay time of the first delay unit and the second delay unit. The relative time relationship that finally reaches the memory array module 121 is to meet the timing requirements of the memory array for the address enable signal and the address signal. For example, if the storage array requires the address signal to arrive before the address enable signal, and the interval time is t, then the delay time of the first delay unit can be configured to be greater than the delay time of the second delay unit, and the delay time difference is t .
或者,在本说明书其他实施例中,也可以仅针对性地设置延时单元对需要后到达的一路锁存信号进行延时,即可满足存储阵列的信号采样时序要求,本实施例对延时子电路233的具体实现不做限制。Alternatively, in other embodiments of this specification, the delay unit can also be specifically set to delay a latch signal that arrives after it is needed, so as to meet the signal sampling timing requirements of the memory array. In this embodiment, the delay unit The specific implementation of sub-circuit 233 is not limited.
本实施例提供的技术方案,通过设置上述第一时序控制电路230并输入一个同步时钟,能够有效地同步逻辑芯片201输出给DRAM的信号,从而将逻辑芯片201和DRAM之间的接口转换成同步接口。The technical solution provided by this embodiment can effectively synchronize the signal output by the logic chip 201 to the DRAM by setting the above-mentioned first timing control circuit 230 and inputting a synchronization clock, thereby converting the interface between the logic chip 201 and the DRAM into a synchronized state. interface.
在逻辑芯片201设计时只需要对输出给DRAM接口的信号根据DRAM接口路径设置相应的输出延迟约束即可实现逻辑芯片201的半定制流程设计。另外,由于存储芯片202是一个通用的设计,而对应的逻辑芯片201可能有多种形态,通过在DRAM中增设第二采样子电路232实现逻辑芯片201的同步输出,简化了逻辑芯片201的设计流程和难度,加速了逻辑芯片201的研发进度。When designing the logic chip 201, it is only necessary to set corresponding output delay constraints for the signals output to the DRAM interface according to the DRAM interface path to realize the semi-customized process design of the logic chip 201. In addition, since the memory chip 202 is a universal design and the corresponding logic chip 201 may have multiple forms, the synchronous output of the logic chip 201 is achieved by adding a second sampling sub-circuit 232 in the DRAM, which simplifies the design of the logic chip 201 The process and difficulty accelerated the development progress of logic chip 201.
进一步地,在一种可选的实施方式中,上述三维堆叠芯片还包括:第二时序控制电路(图中未示出)。逻辑芯片201内各存储控制模块111的目标输入端通过第二时序控制电路与存储芯片202内的存储阵列模块121连接。第二时序控制电路的时钟端也与上述的时钟接口连接,即与第一时序控制电路230受同一时钟信号的控制。第二时序控制电路用于基于该时钟信号,控制存储阵列模块121输出的多路第二目标信号到达目标输入端的传输时序,以满足逻辑芯片201对多路第二目标信号的接口时序条件。其中,多路第二目标信号为多路具有时序匹配关系的信号,例如,可以包括读数据使能信号和读出数据信号即从存储阵列模块121读出的数据信号。Further, in an optional implementation, the above-mentioned three-dimensional stacked chip further includes: a second timing control circuit (not shown in the figure). The target input terminals of each memory control module 111 in the logic chip 201 are connected to the memory array module 121 in the memory chip 202 through the second timing control circuit. The clock end of the second timing control circuit is also connected to the above-mentioned clock interface, that is, it is controlled by the same clock signal as the first timing control circuit 230 . The second timing control circuit is used to control the transmission timing of the multiple second target signals output by the memory array module 121 to the target input terminal based on the clock signal, so as to meet the interface timing conditions of the logic chip 201 for the multiple second target signals. The multiple second target signals are multiple signals with timing matching relationships. For example, they may include a read data enable signal and a read data signal, that is, a data signal read from the memory array module 121 .
需要说明的是,第二时序控制电路的具体原理与上述第一时序控制电路230类似,具体可以参照上述第一时序控制电路230的相关描述,此处不再赘述。It should be noted that the specific principle of the second timing control circuit is similar to the above-mentioned first timing control circuit 230. For details, reference can be made to the relevant description of the above-mentioned first timing control circuit 230, which will not be described again here.
在一种可选的实施方式中,逻辑芯片201内的目标输入端具备自身的信号抓取逻辑,此时,相比于第一时序控制电路230,第二时序控制电路可以无需设置延时子电路来调整到达目标输入端的各路第二目标信号的相对时间关系。In an optional implementation, the target input terminal in the logic chip 201 has its own signal capture logic. At this time, compared with the first timing control circuit 230, the second timing control circuit does not need to set a delay sub-circuit. The circuit is used to adjust the relative time relationship of each second target signal arriving at the target input terminal.
通过设置第二时序控制电路并输入一个同步时钟,能够有效地同步DRAM输出给逻辑芯片201的信号,从而将逻辑芯片201与DRAM之间的接口转换成同步接口。By setting up the second timing control circuit and inputting a synchronization clock, the signal output by the DRAM to the logic chip 201 can be effectively synchronized, thereby converting the interface between the logic chip 201 and the DRAM into a synchronous interface.
另外,本说明书实施例提供了一种时序控制方法,可以应用于图9实施例的三维堆叠芯片。如图12所示,该方法包括以下步骤:In addition, the embodiment of this specification provides a timing control method, which can be applied to the three-dimensional stacked chip in the embodiment of FIG. 9 . As shown in Figure 12, the method includes the following steps:
步骤S1201,获取时钟信号;Step S1201, obtain the clock signal;
步骤S1202,基于时钟信号,控制逻辑芯片201内目标输出端输出的多路第一目标信号到达存储阵列模块121的传输时序,以满足存储阵列模块121对上述多路 第一目标信号的接口时序条件。Step S1202: Based on the clock signal, control the transmission timing of the multiple first target signals output from the target output terminal in the logic chip 201 to the memory array module 121 to meet the requirements of the memory array module 121 for the above multiple channels. Interface timing conditions for the first target signal.
需要说明的是,步骤S1201和步骤S1202的具体实施过程可以参照上文芯片结构实施例中的相应描述,此处不再赘述。It should be noted that the specific implementation processes of step S1201 and step S1202 may refer to the corresponding descriptions in the above chip structure embodiment, and will not be described again here.
在一种可选的实施方式中,上述步骤S1202可以包括:基于时钟信号,在第一采样时间点同步触发目标输出端输出的多路第一目标信号从逻辑芯片201输出;分别对多路第一目标信号进行锁存,并基于时钟信号,在第二采样时间点同步触发锁存的各路第一目标信号输出给存储阵列模块121,第二采样时间点晚于第一采样时间点。具体实施过程可以参照上述第一方面提供的实施例中的相应描述,此处不再赘述。In an optional implementation, the above step S1202 may include: based on the clock signal, synchronously triggering the multiple first target signals output from the target output terminal at the first sampling time point to be output from the logic chip 201; A target signal is latched, and based on the clock signal, each latched first target signal is synchronously triggered and output to the storage array module 121 at a second sampling time point, which is later than the first sampling time point. For the specific implementation process, reference may be made to the corresponding description in the embodiment provided in the first aspect, and details will not be described again here.
在一种可选的实施方式中,上述在第二采样时间点同步触发锁存的各路第一目标信号输出给所述存储阵列模块121的步骤可以包括:在第二采样时间点同步触发锁存的各路第一目标信号输出;按照预设延时规则,对输出的各路第一目标信号分别进行延时处理,以对各路第一目标信号到达所述存储阵列模块121的相对时间关系进行调整,以满足所述接口时序条件。具体实施过程可以参照上述第一方面提供的实施例中的相应描述,此处不再赘述。In an optional implementation, the step of outputting each first target signal of the synchronous trigger latch to the memory array module 121 at the second sampling time point may include: synchronously triggering the latch at the second sampling time point. Each channel of the stored first target signal is output; according to the preset delay rule, each channel of the output first target signal is delayed respectively, so as to calculate the relative time of each channel of the first target signal arriving at the storage array module 121 The relationship is adjusted to meet the interface timing conditions. For the specific implementation process, reference may be made to the corresponding description in the embodiment provided in the first aspect, and details will not be described again here.
在一种可选的实施方式中,上述时序控制方法还包括:基于所述时钟信号,控制所述存储阵列模块121输出的多路第二目标信号到达逻辑芯片201内目标输入端的传输时序,以满足所述逻辑芯片201对所述多路第二目标信号的接口时序条件。具体实施过程可以参照上述第一方面提供的实施例中的相应描述,此处不再赘述。In an optional implementation, the above timing control method further includes: based on the clock signal, controlling the transmission timing of the multiple second target signals output by the memory array module 121 to the target input terminal in the logic chip 201, so as to The interface timing conditions of the logic chip 201 for the multiple second target signals are met. For the specific implementation process, reference may be made to the corresponding description in the embodiment provided in the first aspect, and details will not be described again here.
所属领域的技术人员可以清楚地了解到,为描述的方便和简洁,上述描述的方法的具体工作过程,可以参考前述结构实施例中的对应过程,在此不再赘述。Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working process of the above-described method can be referred to the corresponding process in the foregoing structural embodiment, and will not be described again here.
在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。术语“多个”表示两个以上,包括两个或大于两个的情况。In this document, relational terms such as first, second, etc. are used only to distinguish one entity or operation from another entity or operation and do not necessarily require or imply the existence of any such entity or operation between these entities or operations. Actual relationship or sequence. Furthermore, the terms "comprises," "comprises," or any other variation thereof are intended to cover a non-exclusive inclusion such that a process, method, article, or apparatus that includes a list of elements includes not only those elements, but also those not expressly listed other elements, or elements inherent to the process, method, article or equipment. Without further limitation, an element defined by the statement "comprises a..." does not exclude the presence of additional identical elements in a process, method, article, or apparatus that includes the stated element. The term "plurality" means more than two, including two or more than two.
尽管已描述了本说明书的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例作出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本说明书范围的所有变更和修改。Although the preferred embodiments of this specification have been described, those skilled in the art will be able to make additional changes and modifications to these embodiments once the basic inventive concepts are apparent. Therefore, it is intended that the appended claims be construed to include the preferred embodiments and all changes and modifications that fall within the scope of this specification.
显然,本领域的技术人员可以对本说明书进行各种改动和变型而不脱离本说明书的精神和范围。这样,倘若本说明书的这些修改和变型属于本说明书权利要求及其等同技术的范围之内,则本说明书也意图包含这些改动和变型在内。 Obviously, those skilled in the art can make various changes and modifications to this specification without departing from the spirit and scope of this specification. In this way, if these modifications and variations of this specification fall within the scope of the claims of this specification and equivalent technologies, this specification is also intended to include these modifications and variations.

Claims (20)

  1. 一种三维堆叠芯片,其中,包括:存储晶圆层以及与所述存储晶圆层层叠设置的逻辑晶圆层,A three-dimensional stacked chip, which includes: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer,
    所述存储晶圆层包括M个存储阵列模块,所述逻辑晶圆层中对应设置有N个存储控制模块,每个所述存储控制模块通过晶圆级层间连接结构与k个所述存储阵列模块连接,用于控制各自连接的所述存储阵列模块进行数据写入或读出操作,The storage wafer layer includes M storage array modules, and N storage control modules are correspondingly provided in the logic wafer layer. Each of the storage control modules is connected to k storage array modules through a wafer-level interlayer connection structure. Array module connections are used to control the respective connected storage array modules to perform data writing or reading operations,
    其中,M、N均为大于或等于2的整数,且N小于或等于M,k为大于或等于1且小于M的整数。Among them, M and N are both integers greater than or equal to 2, and N is less than or equal to M, and k is an integer greater than or equal to 1 and less than M.
  2. 根据权利要求1所述的三维堆叠芯片,其中,每个所述存储控制模块通过所述晶圆级层间连接结构与一个所述存储阵列模块的数据及控制总线直连,不同所述存储阵列模块的数据及控制总线相互独立。The three-dimensional stacked chip according to claim 1, wherein each of the storage control modules is directly connected to the data and control bus of one of the storage array modules through the wafer-level interlayer connection structure, and different storage arrays The module's data and control buses are independent of each other.
  3. 根据权利要求1所述的三维堆叠芯片,其中,k为大于或等于2且小于M的整数,k个所述存储阵列模块分布在同一存储晶圆,所述存储晶圆层还包括:与所述存储控制模块一一对应设置的控制逻辑模块,The three-dimensional stacked chip according to claim 1, wherein k is an integer greater than or equal to 2 and less than M, k memory array modules are distributed on the same memory wafer, and the memory wafer layer further includes: The above storage control modules correspond to the control logic modules set one by one.
    所述存储控制模块通过晶圆级层间连接结构与所述控制逻辑模块连接,所述控制逻辑模块分别与k个所述存储阵列模块的数据及控制总线直连,The storage control module is connected to the control logic module through a wafer-level interlayer connection structure, and the control logic module is directly connected to the data and control buses of k storage array modules,
    所述控制逻辑模块用于:根据所述存储控制模块发送的数据写入或读出信号,分时控制k个所述存储阵列模块进行数据写入或读出操作。The control logic module is configured to: time-share control of k storage array modules to perform data writing or reading operations according to the data writing or reading signals sent by the storage control module.
  4. 根据权利要求3所述的三维堆叠芯片,其中,所述数据写入或读出信号包括片选控制信息以及写入或读出信息,所述控制逻辑模块具体用于:根据所述片选控制信息从k个所述存储阵列模块中确定待写入或读出的存储阵列模块,并根据所述写入或读出信息对该存储阵列模块进行数据写入或读出操作。The three-dimensional stacked chip according to claim 3, wherein the data writing or reading signal includes chip selection control information and writing or reading information, and the control logic module is specifically configured to: control according to the chip selection The information determines the storage array module to be written or read from the k storage array modules, and performs data writing or reading operations on the storage array module according to the writing or reading information.
  5. 根据权利要求3所述的三维堆叠芯片,其中,所述控制逻辑模块具体用于:根据所述数据写入或读出信号对应的地址空间,从k个所述存储阵列模块中确定待写入或读出的存储阵列模块,并根据数据写入或读出信号对该存储阵列模块进行数据写入或读出操作。The three-dimensional stacked chip according to claim 3, wherein the control logic module is specifically configured to: determine the data to be written from the k storage array modules according to the address space corresponding to the data writing or reading signal. or read out the memory array module, and perform data writing or reading operations on the memory array module according to the data writing or reading signals.
  6. 根据权利要求1所述的三维堆叠芯片,其中,k为大于或等于2且小于M的整数,所述存储晶圆层包括k个层叠设置的存储晶圆,与一个所述存储控制模块连接的k个所述存储阵列模块分别分布在k个存储晶圆,The three-dimensional stacked chip according to claim 1, wherein k is an integer greater than or equal to 2 and less than M, and the storage wafer layer includes k stacked storage wafers, connected to one of the storage control modules. k memory array modules are respectively distributed on k memory wafers,
    所述存储控制模块与k个所述存储阵列模块之间设置有片选信道,用于选定其中一个存储阵列模块进行所述数据写入或读出操作。A chip select channel is provided between the storage control module and the k storage array modules for selecting one of the storage array modules to perform the data writing or reading operation.
  7. 根据权利要求1-6中任一项所述的三维堆叠芯片,其中,所述逻辑晶圆层还设置有处理模块,每个所述存储控制模块均与所述处理模块连接,The three-dimensional stacked chip according to any one of claims 1 to 6, wherein the logic wafer layer is further provided with a processing module, and each of the storage control modules is connected to the processing module,
    所述处理模块用于确定待操作存储阵列模块,并向连接所述待操作存储阵列模块的所述存储控制模块发送数据操作信息;The processing module is used to determine the storage array module to be operated and send data operation information to the storage control module connected to the storage array module to be operated;
    每个存储控制模块中均设置有译码解析模块,所述译码解析模块对所述数据操作信息中的命令以及地址进行译码分析,以对所述待操作存储阵列模块进行数据写 入或读出操作。Each storage control module is provided with a decoding and analysis module. The decoding and analysis module decodes and analyzes the commands and addresses in the data operation information to write data to the storage array module to be operated. input or read operation.
  8. 根据权利要求7任一项所述的三维堆叠芯片,其中,所述处理模块接收数据写入命令和写入数据,根据所述写入数据的占用空间和所述存储阵列模块的存储空间确定所述写入数据的写入地址,以确定所述待操作存储阵列模块。The three-dimensional stacked chip according to any one of claims 7, wherein the processing module receives a data writing command and writing data, and determines the location of the data according to the occupied space of the writing data and the storage space of the storage array module. The write address of the write data is used to determine the storage array module to be operated.
  9. 根据权利要求8所述的三维堆叠芯片,其中,The three-dimensional stacked chip according to claim 8, wherein,
    响应于所述写入数据的占用空间大于所述存储阵列模块的存储空间,所述处理模块将所述写入数据存储在第一存储阵列模块和第二存储阵列模块中,所述第一存储阵列模块和所述第二存储阵列模块通过不同的存储控制模块控制;或者In response to the occupied space of the written data being larger than the storage space of the storage array module, the processing module stores the written data in the first storage array module and the second storage array module, and the first storage module The array module and the second storage array module are controlled by different storage control modules; or
    所述第一存储阵列模块和所述第二存储阵列模块位于不同的存储晶圆层,且通过不同的存储控制模块控制。The first storage array module and the second storage array module are located on different storage wafer layers and are controlled by different storage control modules.
  10. 根据权利要求1-6中任一项所述的三维堆叠芯片,其中,所述层间连接结构包括数据通道以及控制通道,所述数据通道用于传输写入或读出的数据信号,所述控制通道用于传输控制数据写入或读出的控制信号。The three-dimensional stacked chip according to any one of claims 1 to 6, wherein the inter-layer connection structure includes a data channel and a control channel, the data channel is used to transmit writing or reading data signals, The control channel is used to transmit control signals that control data writing or reading.
  11. 根据权利要求10所述的三维堆叠芯片,其中,所述控制信号包括命令信号和地址信号;The three-dimensional stacked chip according to claim 10, wherein the control signal includes a command signal and an address signal;
    其中,所述命令信号包括:行操作使能信号、列操作使能信号以及写数据控制信号;Wherein, the command signal includes: a row operation enable signal, a column operation enable signal and a write data control signal;
    所述地址信号包括行地址信号和列地址信号。The address signals include row address signals and column address signals.
  12. 根据权利要求1所述的三维堆叠芯片,其中,还包括:The three-dimensional stacked chip according to claim 1, further comprising:
    第一时序控制电路,所述逻辑晶圆层内的目标输出端通过所述第一时序控制电路与所述存储晶圆层内的存储阵列模块连接,所述第一时序控制电路用于基于接收到的时钟信号,控制所述目标输出端输出的多路第一目标信号到达所述存储阵列模块的传输时序,以满足所述存储阵列模块对所述多路第一目标信号的接口时序条件。A first timing control circuit. The target output end in the logic wafer layer is connected to the memory array module in the storage wafer layer through the first timing control circuit. The first timing control circuit is used to receive The received clock signal controls the transmission timing of the multiple first target signals output from the target output terminal to the memory array module to meet the interface timing conditions of the memory array module for the multiple first target signals.
  13. 根据权利要求12所述的三维堆叠芯片,其中,所述第一时序控制电路包括:The three-dimensional stacked chip according to claim 12, wherein the first timing control circuit includes:
    第一采样子电路,设置于所述逻辑晶圆层,所述第一采样子电路的输入端与所述目标输出端连接,用于在所述时钟信号的控制下,同步触发所述目标输出端输出的多路第一目标信号从所述逻辑晶圆层输出;A first sampling sub-circuit is provided on the logic wafer layer. The input end of the first sampling sub-circuit is connected to the target output end for synchronously triggering the target output under the control of the clock signal. Multiple first target signals output from the terminal are output from the logic wafer layer;
    第二采样子电路,设置于所述存储晶圆层,所述第二采样子电路的输入端与所述第一采样子电路的输出端连接,输出端与所述存储阵列模块连接,用于在所述时钟信号的控制下,同步触发从所述逻辑晶圆层输出的多路第一目标信号被所述存储阵列模块接收;A second sampling subcircuit is provided on the storage wafer layer. The input end of the second sampling subcircuit is connected to the output end of the first sampling subcircuit, and the output end is connected to the storage array module. Under the control of the clock signal, multiple first target signals output from the logic wafer layer are synchronously triggered and received by the memory array module;
    所述三维堆叠芯片还包括用于提供所述时钟信号的时钟接口,所述第一采样子电路和所述第二采样子电路的时钟端均与所述时钟接口连接。The three-dimensional stacked chip further includes a clock interface for providing the clock signal, and clock terminals of the first sampling subcircuit and the second sampling subcircuit are both connected to the clock interface.
  14. 根据权利要求13所述的三维堆叠芯片,其中,所述第一采样子电路包括:与所述多路第一目标信号一一对应设置的多个第一触发器,The three-dimensional stacked chip according to claim 13, wherein the first sampling sub-circuit includes: a plurality of first flip-flops arranged in one-to-one correspondence with the multiple first target signals,
    所述多个第一触发器的输入端与所述目标输出端连接,时钟端均与所述时钟接口连接,输出端与所述第二采样子电路连接,The input terminals of the plurality of first flip-flops are connected to the target output terminal, the clock terminals are connected to the clock interface, and the output terminals are connected to the second sampling sub-circuit,
    所述多个第一触发器用于基于所述时钟信号,在第一采样时间点同步触发所述 目标输出端输出的多路第一目标信号从所述逻辑晶圆层输出。The plurality of first flip-flops are used to trigger the synchronously at a first sampling time point based on the clock signal. The multiple first target signals output from the target output terminal are output from the logic wafer layer.
  15. 根据权利要求14所述的三维堆叠芯片,其中,所述第二采样子电路包括:与所述多个第一触发器一一对应设置的多个第二触发器,The three-dimensional stacked chip according to claim 14, wherein the second sampling sub-circuit includes: a plurality of second flip-flops arranged in one-to-one correspondence with the plurality of first flip-flops,
    所述多个第二触发器的输入端与各自对应的第一触发器的输出端连接,时钟端均与所述时钟接口连接,输出端与所述存储阵列模块连接,The input terminals of the plurality of second flip-flops are connected to the output terminals of the corresponding first flip-flops, the clock terminals are connected to the clock interface, and the output terminals are connected to the storage array module,
    所述多个第二触发器用于对各自接收到的第一目标信号进行锁存,并基于所述时钟信号,在第二采样时间点同步触发锁存的第一目标信号输出给所述存储阵列模块,所述第二采样时间点晚于所述第一采样时间点。The plurality of second flip-flops are used to latch the first target signal received respectively, and based on the clock signal, synchronously trigger the latched first target signal to be output to the storage array at a second sampling time point. module, the second sampling time point is later than the first sampling time point.
  16. 根据权利要求15所述的三维堆叠芯片,其中,所述多路第一目标信号到达相应第二触发器的时间均位于所述第一采样时间点与所述第二采样时间点之间,且所述多路第一目标信号的有效时长均大于或等于所述第一采样时间点与所述第二采样时间点之间的时间间隔。The three-dimensional stacked chip according to claim 15, wherein the times when the multiple first target signals arrive at the corresponding second flip-flop are all between the first sampling time point and the second sampling time point, and The effective durations of the multiple first target signals are all greater than or equal to the time interval between the first sampling time point and the second sampling time point.
  17. 根据权利要求16所述的三维堆叠芯片,其中,所述第一采样时间点与所述第二采样时间点之间的时间间隔为所述时钟信号的一个时钟周期。The three-dimensional stacked chip according to claim 16, wherein the time interval between the first sampling time point and the second sampling time point is one clock cycle of the clock signal.
  18. 根据权利要求13所述的三维堆叠芯片,其中,所述第一时序控制电路还包括:延时子电路,设置于所述存储晶圆层中,The three-dimensional stacked chip according to claim 13, wherein the first timing control circuit further includes: a delay sub-circuit disposed in the storage wafer layer,
    所述第二采样子电路的输出端通过所述延时子电路与所述存储阵列模块连接,所述延时子电路用于调整从所述第二采样子电路输出的各路第一目标信号到达所述存储阵列模块的相对时间关系,以满足所述接口时序条件。The output end of the second sampling subcircuit is connected to the memory array module through the delay subcircuit, and the delay subcircuit is used to adjust each first target signal output from the second sampling subcircuit. The relative time relationship of arrival at the storage array module is to satisfy the interface timing conditions.
  19. 根据权利要求12所述的三维堆叠芯片,其中,还包括:第二时序控制电路,The three-dimensional stacked chip according to claim 12, further comprising: a second timing control circuit,
    所述逻辑晶圆层内的目标输入端通过所述第二时序控制电路与所述存储晶圆层内的存储阵列模块连接,所述第二时序控制电路用于基于所述时钟信号,控制所述存储阵列模块输出的多路第二目标信号到达所述目标输入端的传输时序,以满足所述逻辑晶圆层对所述多路第二目标信号的接口时序条件。The target input end in the logic wafer layer is connected to the memory array module in the storage wafer layer through the second timing control circuit, and the second timing control circuit is used to control all the processes based on the clock signal. The transmission timing of the multiple second target signals output by the memory array module reaching the target input terminal is to meet the interface timing conditions of the logical wafer layer to the multiple second target signals.
  20. 一种三维堆叠芯片的数据处理方法,其中,所述三维堆叠芯片包括:存储晶圆层以及与所述存储晶圆层层叠设置的逻辑晶圆层,所述存储晶圆层包括M个存储阵列模块,所述逻辑晶圆层中对应设置有N个存储控制模块,每个所述存储控制模块通过晶圆级层间连接结构与k个所述存储阵列模块连接,用于控制各自连接的所述存储阵列模块进行数据写入或读出操作,其中,M、N均为大于或等于2的整数,且N小于或等于M,k为大于或等于1且小于M的整数;所述方法包括:A data processing method for three-dimensional stacked chips, wherein the three-dimensional stacked chip includes: a storage wafer layer and a logic wafer layer stacked with the storage wafer layer, and the storage wafer layer includes M storage arrays Module, N storage control modules are correspondingly provided in the logic wafer layer, each of the storage control modules is connected to k storage array modules through a wafer-level interlayer connection structure, and is used to control all connected The storage array module performs data writing or reading operations, wherein M and N are both integers greater than or equal to 2, and N is less than or equal to M, and k is an integer greater than or equal to 1 and less than M; the method includes :
    接收存储控制信号;Receive storage control signals;
    基于所述存储控制信号,利用多个存储控制模块并行对所述存储控制模块连接的所述存储阵列模块进行数据写入或读出操作。 Based on the storage control signal, multiple storage control modules are used to perform data writing or reading operations on the storage array module connected to the storage control module in parallel.
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