WO2023214725A1

WO2023214725A1 - Lid opening and closing device

Info

Publication number: WO2023214725A1
Application number: PCT/KR2023/005552
Authority: WO
Inventors: 이상수
Original assignee: (주)에스제이오토메이션
Priority date: 2022-05-02
Filing date: 2023-04-24
Publication date: 2023-11-09

Abstract

Disclosed is a lid opening and closing device. The lid opening and closing device disclosed herein is characterized by comprising: at least one opening/closing operation unit that, while hinge-connected to one side of a chamber open on the one side, is hinge-connected to a lid for opening and closing the open side of the chamber, and guides the opening and closing operations of the lid with respect to the chamber; an opening/closing driving unit for transmitting a driving force for rotation to one side of the opening/closing operation unit hinge-connected to the one side of the chamber; and at least one auxiliary opening/closing guide unit that is hinge-connected to one side of the lid while hinge-connected to the one side of the chamber, and is linked to the opening and closing operation of the lid and supports the rotating lid.

Description

lid switch

The present invention relates to a lid opening and closing device, and more specifically, to a device that automatically opens and closes the open side of a chamber with a lid. It is provided on one side of the chamber and is hinged to the other side of the lid to open and close the other side of the lid. Through the opening and closing operation part that supports opening and closing, and the auxiliary opening and closing guide part that is hinged to one side of the chamber and one side of the lid and supports the opening and closing of one side of the lid, the lid stably guides the opening and closing operation and increases the sealing force on the open side of the chamber. It relates to a reed opening and closing device for this purpose.

In general, various processes such as deposition, photography, etching, etching, and cleaning are required to manufacture semiconductor devices and display OLEDs, and many processes are performed within a chamber.

There are various types of chambers for semiconductor and display manufacturing depending on their purpose, but the type that has recently been increasingly used is a plasma chamber that performs deposition or etching using plasma.

Additionally, during the semiconductor and display manufacturing process, a desired process is performed on the wafer within the process chamber while appropriately maintaining the correlation between internal and external pressures. External pressure comes from the atmospheric pressure surrounding the semiconductor manufacturing equipment. And the internal pressure comes from an artificially controlled vacuum around the process chamber within the semiconductor manufacturing equipment.

Semiconductor manufacturing facilities generally provide load lock chambers and transfer chambers to maintain internal pressure. The load lock chamber and transfer chamber are maintained at internal pressure to protect the process chamber during the semiconductor manufacturing process.

Here, a wafer movement passage is provided in the process chamber, load lock chamber, and transfer chamber to allow wafers to pass between each chamber, and a door device is provided to seal the wafer movement passage according to the process to maintain the internal pressure of each chamber. .

As related technology, Republic of Korea Patent Publication No. 10-2008-0082211 (title of the invention: cover of processing chamber used in substrate processing apparatus) has been disclosed.

The above-described technical configuration is background technology to aid understanding of the present invention, and does not mean that it is widely known prior art in the technical field to which the present invention belongs.

Existing door devices for semiconductor manufacturing facilities require doors with large loads to be opened by lifting them using a crane, etc., which not only makes it difficult to maintain pressure inside the chamber, but also makes it impossible to stably maintain the open state.

Therefore, there is a need to improve this.

The present invention was developed to improve the problems described above. It is a device that automatically opens and closes the open side of the chamber using a lid. It is provided on one side of the chamber and is hinged to the other side of the lid to open and close the other side of the lid. Through the opening and closing operation part that supports opening and closing, and the auxiliary opening and closing guide part that is hinged to one side of the chamber and one side of the lid and supports the opening and closing of one side of the lid, the lid stably guides the opening and closing operation and maintains a sealing force on the open side of the chamber. In order to increase the use, the purpose is to provide a reed opening and closing device that includes an opening and closing operation unit and an auxiliary opening and closing guide to suit the shape of the reed.

The lid opening and closing device according to the present invention is: hinged to one open side of the chamber and hinged to a lid that opens and closes the open side of the chamber, guides the opening and closing of the lid with respect to the chamber, and has one or more opening and closing devices. control panel; An opening/closing drive unit that transmits driving force to guide the rotation of one side of the opening/closing operation unit; and one or more auxiliary opening/closing guides that are hinged to one side of the chamber and are hinged to one side of the lid, and support the lid to rotate in conjunction with the opening and closing operation of the lid.

The lid forms an arc-shaped reinforcing member on the upper side excluding at least one edge and the other edge of the upper side for reinforcement, and the other side of the opening/closing operation unit is hingedly connected to the other edge of the reinforcing member.

The chamber has a main supporter on one side, and one side of the opening/closing operation unit is hingedly connected to the main supporter.

The chamber has a first sub-supporter on one side, the lid has a second sub-supporter on one side so as to correspond one-to-one to the first sub-supporter, and the auxiliary opening/closing guide unit has the corresponding first sub-supporter and the second sub-supporter. It is characterized by being supported by 2 sub-supporters.

The opening and closing operation unit includes a main one side hinge bracket provided on one side of the chamber; a housing hingedly connected to the main hinge bracket and guided to rotate along a trajectory of opening and closing the lid; a shaft that is provided to be able to enter and exit the housing in the axial direction, is naturally or forcibly moved in the axial direction by opening and closing the lid, and guides the opening and closing of the lid; and a main other side hinge bracket that connects the other side of the shaft along the axial direction and is fixed to the lead.

The opening and closing operation unit includes a first hinge pin that hinges and connects the other side of the shaft along the axial direction; One side is linked to the first hinge pin, and one or more link arms are provided; It is linked to the other side of the link arm and includes a second hinge pin hinged to the main other side hinge bracket.

The opening/closing drive unit includes a gear module that rotates by receiving driving force from a drive motor; a rotary rod that is axially inserted into the housing, receives rotational force from the gear module, rotates in one direction and the other in the circumferential direction, and has an external thread formed on an outer peripheral surface; And a joint that is fixed to one side of the shaft, forms an inner thread on an inner surface, and is gear-coupled with the outer thread, thereby guiding the axial movement of the shaft according to the rotation direction of the rotary rod.

The rotary rod is supported on the inside of the housing by a bearing.

The auxiliary opening and closing guide unit includes a fixed block provided on one side of the chamber; A moving block provided at one edge of the lead to correspond to the fixed block, moves along an arc trajectory along with the lead, and forms a slide groove that opens in the direction of the corresponding fixed block; and a support beam that has one side hingedly connected to the fixed block and the other side axially inserted into the slide groove, so as to move in the axial direction when the lead and the movable block move and support the lead.

The support beam has a first stopper, and the moving block has a second stopper corresponding to the first stopper to limit the distance at which the support beam is axially inserted.

The opening/closing operation unit includes a telescopic pushing bar connected to the reed and operating in a telescope manner to rotate the reed; a front pivot portion pivotally connected to the reed and the telescopic pushing bar and interacting with the reed when the reed is rotated by an operation of the telescopic pushing bar; and a rear pivot portion disposed on an opposite side of the front pivot portion with respect to the telescopic pushing bar, connected to the telescopic pushing bar, and rotatably supporting the telescopic pushing bar at a rear end region of the lid.

The front pivot portion includes a pivot unit including a base plate, a pair of pivot ribs, and a through hole formed in the pair of pivot ribs; a lower plate as a plate-shaped structure fixed to the lid; An upper plate coupled to the lower plate while being stacked on the lower plate, supports the pivot unit, and has a flow-permitting space formed therein that allows the base plate to move in the direction of the plate surface of the lid; And a unit bar connection unit connected to the pivot unit and the lead and capable of relative rotation connecting a telescopic pushing bar that rotates the lead while extending or shortening its length in a telescope manner.

The telescopic pushing bar is connected to and driven by a pushing bar driver that provides driving force to extend or shorten the length of the telescopic pushing bar.

As described above, the lid opening and closing device according to the present invention, unlike the prior art, is a facility that automatically opens and closes the open side of the chamber with a lid, and is provided on one side of the chamber and hinged to the other side of the lid. Through the opening and closing operation part that supports opening and closing the other side of the lid, and the auxiliary opening and closing guide part that is hinged to one side of the chamber and one side of the lid and supports the opening and closing of one side of the lid, the lid can stably guide the opening and closing operation, and the opening and closing of the chamber is possible. The sealing force on the side can be increased.

Figure 1 is a perspective view showing a closed state of a lid opening and closing device according to an embodiment of the present invention.

Figure 2 is a perspective view showing the open state of the lid opening and closing device according to an embodiment of the present invention.

Figure 3 is an enlarged perspective view of the main part of the lid opening and closing device according to an embodiment of the present invention.

Figure 4 is an exploded perspective view of the main portion of the lid opening and closing device according to an embodiment of the present invention.

Figure 5 is a perspective view showing the opening and closing actuator part of the lid opening and closing device according to an embodiment of the present invention.

Figure 6 is a longitudinal cross-sectional view of the opening and closing operation part of the lid opening and closing device according to an embodiment of the present invention.

Figure 7 is an exploded perspective view of the auxiliary opening and closing guide of the lid opening and closing device according to an embodiment of the present invention.

Figure 8 is a longitudinal cross-sectional view of the auxiliary opening and closing guide of the lid opening and closing device according to an embodiment of the present invention.

Figure 9 is a side cross-sectional view showing the operating state of the lid opening and closing device according to an embodiment of the present invention.

Figure 10 is an enlarged perspective view of the main part of a lid opening and closing device according to another embodiment of the present invention.

Figure 11 is a partially exploded perspective view of the main other side hinge bracket area of Figure 10.

[Explanation of symbols]

10: Chamber 12: Main supporter

14: 1st sub supporter 20: lead (lid)

22: Reinforcing member 24: Second sub supporter

100: Switching device 200, 500: Switching operation unit

210: Main one side hinge bracket 212: Main hinge pin

220: housing 230: shaft

240: first hinge pin 250: link arm

260: Second hinge pin 270: Main other side hinge bracket

300: Opening/closing drive unit 310: Gear module

312: drive motor 314: gearbox

320: rotary rod 330: joint

340: Bearing 400: Auxiliary opening/closing guide

410: Fixed block 420: Moving block

422: Slide groove 424: Second stopper

430: Support beam 436: Pivot pin

434: first stopper 438: spherical

520: Front pivot part 521: Lower plate

522: upper plate 524: pivot unit

530: Unit bar connection 540: Rear pivot part

580: Telescopic pushing bar 590: Pushing bar driving unit

The lid opening and closing device of the present invention,

an opening/closing operation unit that is hinged to one open side of the chamber, is hinged to a lid that opens and closes the open side of the chamber, and guides the opening and closing of the lid with respect to the chamber;

An opening/closing drive unit that transmits driving force to guide the rotation of one side of the opening/closing operation unit; and

It is hinged to one side of the chamber and is hinged to one side of the lid, and includes one or more auxiliary opening and closing guides supporting the lid that rotates in conjunction with the opening and closing operation of the lid,

The auxiliary opening and closing guide,

A fixing block provided on one side of the chamber;

A moving block provided at one edge of the lead to correspond to the fixed block, moves along an arc trajectory along with the lead, and forms a slide groove that opens in the direction of the corresponding fixed block; and

One side is hinged to the fixed block, the other side is axially inserted into the slide groove, and when the lead and the moving block move, it moves in the axial direction and includes a support beam that supports the lead,

The opening and closing operation unit,

a telescopic pushing bar connected to the lead and operating in a telescope manner to rotate the lead;

a front pivot portion pivotally connected to the reed and the telescopic pushing bar and interacting with the reed when the reed is rotated by an operation of the telescopic pushing bar; and

It is disposed on the opposite side of the front pivot part with respect to the telescopic pushing bar, is connected to the telescopic pushing bar, and includes a rear pivot part rotatably supporting the telescopic pushing bar at a rear end area of the lid,

The front pivot part,

A pivot unit including a base plate, a pair of pivot ribs, and a through hole formed in the pair of pivot ribs;

a lower plate as a plate-shaped structure fixed to the lid;

An upper plate coupled to the lower plate while being stacked on the lower plate, supports the pivot unit, and has a flow-permitting space formed therein that allows the base plate to move in the direction of the plate surface of the lid; and

It is connected to the pivot unit and the lead and includes a unit bar connection part that connects a telescopic pushing bar that rotates the lead while extending or reducing its length in a telescope manner to enable relative rotation.

Hereinafter, an embodiment of a lid opening and closing device according to the present invention will be described with reference to the attached drawings. In this process, the thickness of lines or sizes of components shown in the drawing may be exaggerated for clarity and convenience of explanation. In addition, the terms described below are terms defined in consideration of functions in the present invention, and may vary depending on the intention or custom of the user or operator. Therefore, definitions of these terms should be made based on the content throughout this specification.

Figure 1 is a perspective view showing a closed state of a lid opening and closing device according to an embodiment of the present invention, and Figure 2 is a perspective view showing an open state of a lid opening and closing device according to an embodiment of the present invention.

Figure 3 is an enlarged perspective view of the main part of the lid opening and closing device according to an embodiment of the present invention, and Figure 4 is an exploded perspective view of the main part of the lid opening and closing device according to an embodiment of the present invention.

Figure 5 is a perspective view showing the opening and closing actuator part of the reed opening and closing device according to an embodiment of the present invention, and Figure 6 is a longitudinal cross-sectional view of the opening and closing operation part of the lid opening and closing device according to an embodiment of the present invention.

Figure 7 is an exploded perspective view of the auxiliary opening and closing guide of the reed opening and closing device according to an embodiment of the present invention, and Figure 8 is a longitudinal cross-sectional view of the auxiliary opening and closing guide of the reed opening and closing device according to an embodiment of the present invention.

1 to 9, the opening and closing device 100 of the lid 20 according to an embodiment of the present invention includes an opening and closing operation unit 200, an opening and closing actuator 300, and an auxiliary opening and closing guide unit 400. .

In particular, the opening and closing device 100 according to the present invention serves to open and close the open side of the chamber 10 by rotating the lid 20 along an arc trajectory.

At this time, the chamber 10 can be applied in various ways, such as a vacuum chamber for semiconductors or a high-pressure gas chamber.

The opening/closing operation unit 200 is hinged to one side of the chamber 10, where one side is open, and is hinged to the lid 20 that opens and closes the chamber 10, and operates to open and close the lid 20. One or more opening/closing operation units 200 are provided depending on the size (load) of the lid 20 or a set pressing force for the internal pressure acting inside the chamber 10.

Of course, the lead 20 can be made of various materials.

In particular, the opening and closing operation unit 200 is hingedly connected to one edge of the open side of the chamber 10 or the peripheral surface of the chamber 10 and the other side of the lid 20, respectively.

And, the opening and closing actuator 300 transmits a driving force for rotation to one side of the opening and closing operation unit 200 hinged to the chamber 10.

In addition, the auxiliary opening and closing guide 400 is hinged to one side of the chamber 10 and is hinged to one side of the lid 20, and supports the lid 20, which rotates in conjunction with the opening and closing operation of the lid 20. . At this time, one or more auxiliary opening/closing guide parts 400 are provided according to the size (load) of the lid 20 or a set pressing force for the internal pressure acting inside the chamber 10.

The lid 20 has an arc-shaped reinforcing member 22 protruding from the upper side excluding at least one edge and the other edge for reinforcement so as to withstand the internal pressure of the chamber 10 and prevent deformation. For convenience, the reinforcing member 22 is shown as protruding on the inside of the lid 20 except for the entire edge, and is formed in an arc shape along the direction from one edge to the other edge. At this time, the lower side of the lid 20 can be formed in various ways.

Meanwhile, the other side of the opening/closing operation unit 200 is hingedly connected to the other edge of the reinforcing member 22, so that a force is applied to directly lift the other edge of the lid 20.

At this time, since the reinforcing member 22 is formed in an arc shape with the central portion being the highest along the axial direction, the opening/closing operation unit 200 must prevent interference from the arc-shaped reinforcing member 22 during operation.

For this purpose, the chamber 10 is provided with a main supporter 12 on one edge or peripheral surface of the open side. The main supporter 12 is provided higher than the height of the reinforcing member 22. At this time, the main supporter 12 can be modified into various shapes and can be provided in one-to-one correspondence with one or more opening and closing operation units 200.

And, one side of the opening/closing operation unit 200 is hingedly connected to the main supporter 12. Therefore, the opening/closing operation unit 200 does not interfere with the reinforcing member 22 during operation.

In addition, the chamber 10 is provided with a first sub-supporter 14 on one edge or peripheral surface of the open side. The first sub-supporter 14 may be formed to be higher than the height of the reinforcing member 22, or may be formed to be lower than or similar to the height of the reinforcing member 22. The first sub-supporter 14 can be modified into various shapes and is provided in one-to-one correspondence with one or more auxiliary opening/closing guide parts 400.

In addition, the lead 20 is provided with a second sub-supporter 24 on one side so as to correspond one-to-one to the first sub-supporter 14. The second sub-supporter 24 can be transformed into various shapes.

In particular, the main supporter 12 and the first sub supporter 14 may be integrally provided in the chamber 10 or may be separably coupled to the chamber 10. In addition, the second sub-supporter 24 may be integrally provided with the lead 20 or may be detachably coupled to the lead 20.

Additionally, the auxiliary opening/closing guide 400 supports one edge of the lid 20 that is opened and closed while being supported by the corresponding first sub-supporter 14 and the second sub-supporter 24.

Accordingly, as one side of the opening/closing operation unit 200 is hingedly connected to the main supporter 12, and one side of the auxiliary opening/closing guide unit 400 is hingedly connected to the first sub supporter 14, the lid 20 forms an obtuse angle. While this is achieved, the open side of the chamber 10 can be opened.

Meanwhile, the opening/closing operation unit 200 includes a main one-side hinge bracket 210, a housing 220, a shaft 230, and a main other-side hinge bracket 270.

The main one-side hinge bracket 210 is provided on one side of the chamber 10. In particular, the main one-side hinge bracket 210 is detachably coupled and fixed to each of the main supports 12.

And, the housing 220 is hingedly connected to the main one-side hinge bracket 210. That is, the housing 220 is formed to be open to the other side along the axial direction, and one side is hingeably connected to the main one-side hinge bracket 210 by the main hinge pin 212. At this time, one side of the housing 220 is hinged to the main one-side hinge bracket 210 directly or indirectly along the axial direction.

In addition, the housing 220 is guided to rotate based on the main hinge pin 212 along the trajectory of opening and closing the lid 20.

That is, the shaft 230 is provided to be able to enter and exit the housing 220 in the axial direction. And, the other side of the shaft 230 is hingedly connected to the other side of the lid 20 along the axial direction.

Therefore, the shaft 230 is naturally moved in the axial direction while being axially inserted into the housing 220 by opening and closing the lid 20, or is forcibly moved in the axial direction while being axially inserted into the housing 220 and the lead 20 ) guides the opening and closing of

And, the main other side hinge bracket 270 connects the other side of the shaft 230 along the axial direction and is fixed to the lead 20.

Accordingly, the housing 220 and the shaft 230 rotate in both directions about the main hinge pin 212 and guide the opening and closing operation of the lid 20.

In particular, the housing 220 and the shaft 230 are arranged in a straight line in the axial direction, and the open side of the chamber 10 is sealed by pressing the lid 20.

At this time, the sealing force of the lid 20 is maximized when pressed in a vertical direction toward the chamber 10, but the housing 220 and shaft 230 are axially aligned with the upper side of the lid 20 or the reinforcing member 22. ) A pressing force acts in an oblique direction with respect to the tangential direction.

Accordingly, it is desirable that the force of the shaft 230 pressing the lead 20 acts more closely to the vertical.

For this purpose, the opening/closing operation unit 200 includes a first hinge pin 240, a link arm 250, and a second hinge pin 260.

The first hinge pin 240 hinges the other side of the shaft 230 along the axial direction.

And, one side of the link arm 250 is linked to the first hinge pin 240. In particular, one link arm 250 may be provided or a plurality of link arms 250 may be provided in parallel.

In addition, the second hinge pin 260 is linked to the other side of the link arm 250 along the axial direction and is hinged to the main other side hinge bracket 270.

That is, one side of the link arm 250 is linked to the first hinge pin 240 and the other side is linked to the second hinge pin 260 along the axial direction. At this time, as the shaft 230 is located above the arc-shaped reinforcing member 22, when the lid 20 closes the open side of the chamber 10, the link arm 250 is tilted downward. Guides the reed 20 to be intensively pressed by maintaining .

That is, when the lid 20 is in the closed state, the axial direction of the link arm 250 is inclined downward with respect to the axial direction of the shaft 230 to increase the pressing force for closing.

Meanwhile, the opening/closing actuator 300 includes a gear module 310, a rotary rod 320, and a joint 330.

The gear module 310 consists of a gear assembly and rotates by receiving the driving force of the drive motor 312. At this time, the gear module 310 can be applied to various types of gears, such as bevel gears, external gears, helical gears, and reduction gears. In particular, the drive motor 312 may be fixed to the gearbox 314 provided to protect the gears of the gear module 310.

In addition, the rotary rod 320 is inserted into the housing 220, receives rotational force from the gear module 310, and rotates in one direction and the other direction in the circumferential direction. At this time, the rotary rod 320 is connected to the gear module 310, and the rotary rod 320 is supported so as to rotate along the axial direction while one side is surrounded by the gearbox 314. Accordingly, one side of the housing 220 may be integrally or separably connected to the gearbox 314 along the axial direction.

In particular, the rotary rod 320 forms an external thread 322 on the entire or part of the outer surface along the axial direction.

Then, the joint 330 is fixed to one side of the shaft 230 along the axial direction, and an internal thread 332 is formed on the inner surface. So, the rotary rod 320 is inserted into the joint 330, and the outer thread 322 and the inner thread 332 are gear-coupled. Therefore, according to the rotation direction of the rotary rod 320, it moves backward in the axial direction of the shaft 230, pulls the other side of the lid 20 in the opening direction, and moves forward to push the lid 20 in the closing direction.

At this time, the shaft 230 is prevented from rotating in the circumferential direction as it is connected to the main other side hinge bracket 270.

Of course, the joint 340 can be applied in various shapes and is fixedly connected to the shaft 230 in various ways.

In particular, the joint 330 must be easily inserted into the housing 220 at first and must be prevented from completely leaving the other side of the housing 220.

For this purpose, the housing 220 is provided with a cap 350 on the other side to be able to open and close. At this time, the shaft 230 is linearly reciprocated while being axially inserted into the cap 350.

In addition, so that the rotary rod 320 can stably rotate in the circumferential direction inside the housing 220, the rotary rod 320 is provided with a bearing 340 on the circumferential surface, and the bearing 340 is attached to the housing 220. It touches the inner side of. Therefore, the bearing 340 supports the rotary rod 320 inside the housing 220 to prevent it from shaking when it rotates.

Meanwhile, the auxiliary opening and closing guide 400 includes a fixed block 410, a moving block 420, and a support beam 430.

The fixing block 410 is fixed to one edge or one peripheral surface of the open side of the chamber 10. At this time, the fixing block 410 may be provided in a one-to-one correspondence with the first sub-supporter 14. The fixing block 410 may be the first sub supporter 14 itself, or may be detachably coupled to the first sub supporter 14.

In addition, the moving block 420 is provided at one edge of the lead 20 to correspond to the fixed block 410 and moves along the arc trajectory together with the lead 20.

The moving block 420 may be provided in a one-to-one correspondence with the second sub-supporter 24. In addition, the moving block 420 may be the second sub-supporter 24 itself, or may be detachably coupled to the second sub-supporter 24.

In addition, the moving block 420 forms a slide groove 422 that opens in the direction of the corresponding fixed block 410. At this time, the slide groove 422 may be open only on one side of the movable block 420 facing the corresponding fixed block 410, or may be open on one side and both side directions of the movable block 420.

In addition, one side of the support beam 430 is hingedly connected to the fixed block 410 along the axial direction, and the other side is axially inserted into the slide groove 422. That is, the support beam 430 rotates along the opening/closing direction of the lid 20 as one side of the support beam 430 is hingedly connected to the fixing block 410 by the pivot pin 436 along the axial direction. In addition, the support beam 430 serves to lift one side of the lid 20, which is opened by inserting the other side into the slide groove 422 of the moving block 420 along the axial direction. Accordingly, the lid 20 is stably supported when opened.

At this time, when the lid 20 and the moving block 420 move along the opening/closing direction of the lid 20, the support beam 430 moves in the axial direction and supports the lid 20.

Therefore, when the opening and closing actuator 300 is operated and the lid 20 opens the open side of the chamber 10, the lid 20 has one or more main other side hinge brackets 270 provided on the other side of the opening and closing actuator 300. ) are connected and supported to each of the support beams 430, and one or more moving blocks 420 provided on one side are connected to and supported to each of the support beams 430.

In particular, the point at which the link arm 250 lifts the main other side hinge bracket 270 located on the other side of the lead 20, and the support beam 430 lifts the moving block 420 located on one side of the lead 20. The timing of posting is different. In this case, shaking may occur when the lid 20 is rotated in the opening direction.

To prevent this, the main other side hinge bracket 270 forms a slot hole 272 to insert the circular second hinge pin 260, and at least one of the shaft 230 and the link arm 250 is A hole 232 is formed at the other end or edge, and the circular first hinge pin 240 is inserted into the shaft. Accordingly, when the shaft 230 rotates with respect to the main hinge pin 212, the second hinge pin 260 expands the movement area within the slot hole 272 by a predetermined amount.

At this time, the long diameter of the slot hole 272 is formed in an arc or straight line shape along the movement trajectory of the other end of the shaft 230.

Accordingly, when the lid 20 covers the open side of the chamber 10, the second hinge pin 260 is located below the slot hole 272. And, to open the lid 20, at the beginning when the shaft 230 lifts (upwards) the link arm 250, the second hinge pin 260 moves to the upper side of the slot hole 272. After this, the lid 20 is rotated in the opening direction. In conjunction with this, one side of the support beam 430 gradually moves upward.

Conversely, when the lid 20 operates in the direction of closing the open side of the chamber 10, at the beginning when the shaft 230 rotates the link arm 250 downward, the second hinge pin 260 is positioned at the slot hole 272. ) moves to the lower side. After this, the lid 20 is rotated in the closing direction. In conjunction with this, one side of the support beam 430 gradually moves downward.

Therefore, one edge of the lid 20 varies its movement point in response to the rotational trajectory of the other edge.

In addition, when the lid 20 moves in the closing direction, it is preferable that the support beam 430 firmly supports one side of the lid 20 to prevent rapid downward movement.

At this time, when the end of the support beam 430 touches the inner surface of the slide groove 422 of the movable block 420 and is pressed, the movable block 420 may be damaged.

Therefore, the support beam 430 is provided with a first stopper 434 on the circumferential surface, and the moving block 420 is positioned to correspond to the first stopper 434 to limit the distance at which the support beam 430 is axially inserted. A second stopper (424) is provided. That is, just before the lid 20 completely closes the open side of the chamber 10, the first stopper 434 gradually comes into contact with the corresponding second stopper 424, so that one side of the lid 20 closes the chamber 10. ) prevents the open side from closing suddenly. Of course, the first stopper 434 and the second stopper 424 can be modified into various shapes.

In addition, as the support beam 430 rotates in contact with the inner bottom surface of the slide groove 422, the support beam 430 forms a spherical surface 438 at the area in contact with the inner bottom surface of the slide groove 422. can be formed. As the spherical surface 438 comes into rolling contact with the inner bottom surface of the slide groove 422, the frictional resistance of the support beam 430 against the moving block 420 is reduced. At this time, the slide groove 422 may have a curved groove formed to correspond to the spherical surface 438 of the support beam 430.

Figure 10 is an enlarged perspective view of the main part of the lid opening and closing device according to another embodiment of the present invention, and Figure 11 is a partially exploded perspective view of the main other side hinge bracket area of Figure 10.

Referring to FIGS. 10 and 11 , in this embodiment, the opening/closing operation unit 500 may include a front pivot unit 520, a rear pivot unit 540, and a telescopic pushing bar 580.

The telescopic pushing bar 580 is connected to the reed 20 and operates in a telescope manner to rotate the reed 20. This telescopic pushing bar 580 is driven by the pushing bar driving unit 590.

In this embodiment, the telescopic pushing bar 580 is connected to the lid 20, but it may also be connected to a reinforcing member (not shown). Also, in this embodiment, a six-stage telescopic pushing bar 580 is applied, but the number of stages may be changed. Accordingly, the scope of the present invention is not limited to the shape of FIG. 10. In this way, since the telescopic pushing bar 580, which extends or shortens in length in a telescope manner, is applied to the lid opening and closing device of this embodiment, the opening angle of the lid 20 can be increased. The detailed structure of the telescopic pushing bar 580 follows known technology.

The telescopic pushing bar 580 is provided with a cross-sectional area that gradually becomes smaller as it moves from the rear pivot portion 540 side to the front pivot portion 520 side. Therefore, the operation is stable. When the telescopic pushing bar 580 is applied as in this embodiment, the open angle of the lid 20 can be increased due to the structural characteristics of the telescopic pushing bar 580.

The pushing bar driving unit 590 is connected to the telescopic pushing bar 580 and is a means for providing driving force to extend or shorten the length of the telescopic pushing bar 580. The pushing bar drive unit 590 may be applied as a cylinder means, but in this embodiment, the drive motor 591 is applied. The pushing bar drive unit 590 includes a drive motor 591 that substantially generates power, a reducer 592 that is connected to the drive motor 591 and reduces the speed of the drive motor 591 while increasing torque, and a reducer It includes a gearbox 593 that is connected to (592) and the telescopic pushing bar 580 and transmits the power of the reducer 592 to the telescopic pushing bar 580 through a gear method. The gearbox 593 may be composed of a combination of a worm gear, a worm wheel, a bevel gear, etc., and transmits the rotational energy input from the drive motor 591 and the reducer 592 to the telescopic pushing bar 580 to perform telescopic pushing. The length of the bar 580 is extended or, conversely, reduced.

When the lid 20 is opened or closed by the action of the above-described telescopic pushing bar 580 and the pushing bar driving part 590, the front pivot part 520 and the rear pivot part 520 are provided to assist the operation of the telescopic pushing bar 580. Pivot portions 540 are provided at each position in the lid opening and closing device of this embodiment.

Meanwhile, the rear pivot portion 540 rotatably supports the telescopic pushing bar 580. This pivot module 543 is provided with a pair of main hinge pins that are respectively inserted into the through holes of the pair of rear pivot parts 540 to form the pivot axis. Since a pair of main hinge pins are inserted into the through holes of the rear pivot portion 540 and rotate, the telescopic pushing bar 580 can rotate around the main hinge pin.

The rear pivot part 540 is disposed on the opposite side of the front pivot part 520 based on the telescopic pushing bar 580 and is connected to the pushing bar driving part 590, and is telescopic in the rear area of the lid 20. It serves to rotatably support the pushing bar 580.

This rear pivot portion 540 may be placed on a separate bracket support 541. Of course, the bracket support 541 may also be placed in the chamber.

The bracket support 541 may be supported on the lid support plate 560 fixed to the support portion 561, which is an outer structure of the lid 20. The lead support plate 560 is a structure extending toward the lead 20.

Meanwhile, the front pivot portion 520 may include a lower plate 521, an upper plate 522, a pivot unit 524, and a unit bar connection portion 530.

The lower plate 521 is a plate-shaped structure fixed to the lid 20. The fixing method of the lower plate 521 to the lid 20 may be a screw connection. Meanwhile, in this embodiment, the case where the lower plate 521 is coupled to the lid 20 is described, but it may also be coupled to a reinforcing member (not shown).

The upper plate 522 is stacked on the lower plate 521, is coupled to the lower plate 521, and supports the pivot unit 524. At this time, unlike the lower plate 521, which is a closed plate-shaped structure, a flow-permitting space 523 is formed inside the upper plate 522. The flow-allowing space 523 is such that when the lid 20 is opened and closed, the pivot unit 524, especially the base plate 525 of the pivot unit 524, moves in the direction of the plate surface of the lid 20, that is, the lead 20. It provides space to allow slight movement in any direction, forward or backward, left or right. In this way, although the base plate 525 of the pivot unit 524 is supported by the upper plate 522, the base plate 525 may be able to move slightly in the flow-permitting space 523 as shown in FIG. 11, so the lead As (20) is closed and vacuum pressure is formed within the chamber, even if unintended movement occurs in the lid (20), it can be counteracted. Therefore, it does not lead to structural damage to the telescopic pushing bar 580 or the front pivot portion 520.

The pivot unit 524 is disposed in the flow-permitting space 523 of the upper plate 522 and includes a base plate 525 supported on the upper plate 522, one side of which is fixed to the base plate 525, and the other side of which flows. It includes a pair of pivot ribs 526 that pass through the allowable space 523 and are disposed on the outside of the upper plate 522. A through hole 526a is formed in the pivot rib 526.

The unit bar connection portion 530 serves to connect the pivot unit 524 and the telescopic pushing bar 580 to enable relative rotation. When the lid 20 is opened and closed, the length of the telescopic pushing bar 580 is shortened or extended, and in conjunction with this operation, the unit bar connection allows the end of the telescopic pushing bar 580 to rotate relative to the pivot unit 524. (530) applies.

The unit bar connection portion 530 is connected to the rotating ring 531 disposed between a pair of pivot ribs 526, and both sides extend to both sides of the rotating ring 531, and a pair of A rotating shaft portion 532 rotatably connected to the through hole 526a formed in the pivot rib 526, one end connected to the rotating ring 531 and the other end connected to the telescopic pushing bar 580 (533) ) may include. Since the pivot unit 524 and the telescopic pushing bar 580 are connected for relative rotation through the unit bar connection portion 530, assembly of parts can be made easier and maintenance can also be easier.

Meanwhile, the front pivot part 520 presented in this embodiment, the first hinge pin 240, link arm 250, and second hinge pin 260 shown in FIGS. 1 to 9, and the main other side hinge bracket 270 ) configurations can be replaced with each other.

According to the present embodiment, which operates based on the structure described above, the open angle of the lid 20 can be increased by including the telescopic pushing bar 580. In other words, by implementing the opening and closing device of the lid by applying a telescopic structure, which is the telescopic pushing bar 580, the open angle of the lid 20 can be increased, unlike in the related art. By increasing the open angle of the reed 20, various needs of customers can be met. Additionally, by increasing the open angle of the lid 20, the inside of the chamber can be easily cleaned. The maximum open angle of the existing lid was 110°, but the maximum open angle of the lid 20 of the present invention can be up to 150° by applying a telescopic structure.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will recognize that various modifications and other equivalent embodiments are possible therefrom. You will understand. Therefore, the true technical protection scope of the present invention should be determined by the claims below.

The lid opening and closing device of the present invention can be used in various chambers of semiconductor manufacturing equipment.

Claims

an opening/closing operation unit that is hinged to one open side of the chamber, is hinged to a lid that opens and closes the open side of the chamber, and guides the opening and closing of the lid with respect to the chamber;

An opening/closing drive unit that transmits driving force to guide the rotation of one side of the opening/closing operation unit; and

It is hinged to one side of the chamber and is hinged to one side of the lid, and includes one or more auxiliary opening and closing guides supporting the lid that rotates in conjunction with the opening and closing operation of the lid,

The auxiliary opening and closing guide unit includes a fixed block provided on one side of the chamber;

A moving block provided at one edge of the lead to correspond to the fixed block, moves along an arc trajectory along with the lead, and forms a slide groove that opens in the direction of the corresponding fixed block; and

One side is hinged to the fixed block, the other side is axially inserted into the slide groove, and when the lead and the moving block move, the lead moves in the axial direction and includes a support beam supporting the lead. Switchgear.
According to clause 1,

The lid forms an arc-shaped reinforcing member on the upper side excluding at least one edge and the other edge of the upper side for reinforcement,

An opening and closing device for a lid, characterized in that the other side of the opening and closing operation unit is hingedly connected to the other edge of the reinforcing member.
According to clause 1,

The chamber has a main supporter on one side,

A lid opening and closing device, characterized in that one side of the opening and closing operation part is hingedly connected to the main supporter.
According to claim 2 or 3,

The chamber has a first sub-supporter on one side,

The lead has a second sub-supporter on one side so as to correspond one-to-one to the first sub-supporter,

The opening and closing device of a lid, characterized in that the auxiliary opening and closing guide part is supported by the corresponding first sub supporter and the second sub supporter.
The method according to any one of claims 1 to 3, wherein the opening/closing operation unit,

A main one-side hinge bracket provided on one side of the chamber;

a housing hingedly connected to the main hinge bracket and guided to rotate along a trajectory of opening and closing the lid;

a shaft that is provided to be able to enter and exit the housing in the axial direction, is naturally or forcibly moved in the axial direction by opening and closing the lid, and guides the opening and closing of the lid; and

A lid opening and closing device comprising a main other side hinge bracket that connects the other side of the shaft along the axial direction and is fixed to the lid.
According to clause 5,

The opening and closing operation unit includes a first hinge pin that hinges and connects the other side of the shaft along the axial direction;

One side is linked to the first hinge pin, and one or more link arms are provided;

Including a second hinge pin connected to the other side of the link arm and hinged to the main other side hinge bracket,

When the lid is in a closed state, the link arm has an axial direction inclined downward with respect to the axial direction of the shaft to increase the pressing force for the closure.
The method of claim 6, wherein the opening/closing actuator,

A gear module that rotates by receiving the driving force of the drive motor;

a rotary rod that is axially inserted into the housing, receives rotational force from the gear module, rotates in one direction and the other in the circumferential direction, and has an external thread formed on an outer peripheral surface; and

The lead is fixed to one side of the shaft and includes a joint that guides the axial movement of the shaft according to the rotation direction of the rotary rod by forming an inner thread on the inner surface and gear-coupled with the outer thread. Switchgear.
According to clause 7,

A lid opening and closing device, characterized in that the rotary rod is supported on the inside of the housing by a bearing.
According to clause 1,

The support beam has a first stopper,

The moving block is a lid opening and closing device characterized in that the moving block is provided with a second stopper corresponding to the first stopper to limit the distance at which the support beam is axially inserted.
According to clause 1,

The opening and closing operation unit,

a telescopic pushing bar connected to the lead and operating in a telescope manner to rotate the lead;

a front pivot portion pivotally connected to the reed and the telescopic pushing bar and interacting with the reed when the reed is rotated by an operation of the telescopic pushing bar; and

It is disposed on the opposite side of the front pivot part with respect to the telescopic pushing bar, is connected to the telescopic pushing bar, and includes a rear pivot part rotatably supporting the telescopic pushing bar at a rear end area of the lid,

The front pivot part,

A pivot unit including a base plate, a pair of pivot ribs, and a through hole formed in the pair of pivot ribs;

a lower plate as a plate-shaped structure fixed to the lid;

An upper plate coupled to the lower plate while being stacked on the lower plate, supports the pivot unit, and has a flow-permitting space formed therein that allows the base plate to move in the direction of the plate surface of the lid; and

An opening and closing device for a reed including a unit bar connection portion that connects the pivot unit and the reed and relatively rotatably connects a telescopic pushing bar that extends or shortens in length in a telescopic manner and drives the reed to rotate.
The method of claim 10, wherein the telescopic pushing bar,

A reed opening and closing device connected to and driven by a pushing bar driver that provides driving force to extend or shorten the length of the telescopic pushing bar.