KR101874881B1 - Door opening and closing device for semiconductor manufacturing facility - Google Patents

Door opening and closing device for semiconductor manufacturing facility Download PDF

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Publication number
KR101874881B1
KR101874881B1 KR1020170182925A KR20170182925A KR101874881B1 KR 101874881 B1 KR101874881 B1 KR 101874881B1 KR 1020170182925 A KR1020170182925 A KR 1020170182925A KR 20170182925 A KR20170182925 A KR 20170182925A KR 101874881 B1 KR101874881 B1 KR 101874881B1
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South Korea
Prior art keywords
cylinder
door
opening
closing
vacuum chamber
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KR1020170182925A
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Korean (ko)
Inventor
이상수
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(주)에스제이오토메이션
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Priority to KR1020170182925A priority Critical patent/KR101874881B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Abstract

The present invention discloses a door opening / closing apparatus for a semiconductor manufacturing facility. A door opening / closing apparatus for a semiconductor manufacturing facility is provided with a door provided in a vacuum chamber, a cylinder part hinged to the door at one end and hinged to the vacuum chamber at the other end and connected to the cylinder part, And an opening / closing guide part for compressing or extending the part. Therefore, the present invention can easily open and close the door while maintaining the pressure of the vacuum chamber, and can stably maintain the opened state of the door.

Figure R1020170182925

Description

[0001] The present invention relates to a door opening and closing device for a semiconductor manufacturing facility,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a door opening and closing apparatus for a semiconductor manufacturing facility, and more particularly, to a door opening and closing apparatus for a semiconductor manufacturing facility which is capable of opening and closing a door while maintaining the pressure of a vacuum chamber, .

In general, various processes such as deposition, photolithography, etching, ashing, and cleaning are required for manufacturing a semiconductor device, and many processes are performed in a chamber.

There are various kinds of chambers for semiconductor fabrication according to the use thereof, but recently, a plasma chamber in which the frequency of use is increasing is used to perform deposition or etching using plasma.

In addition, a desired process is performed on the wafer in a process chamber while maintaining a proper correlation of internal pressure and external pressure during the semiconductor manufacturing process. The external pressure comes from the atmospheric pressure surrounding the semiconductor manufacturing equipment. And the internal pressure comes from an artificially controlled vacuum around the process chamber in the semiconductor manufacturing equipment.

The semiconductor manufacturing facility generally has a load lock chamber and a transfer chamber in order to maintain the internal pressure. The load lock chamber and the transfer chamber are maintained at internal pressure to protect the process chamber during the semiconductor manufacturing process.

Here, the process chamber, the load lock chamber, and the transfer chamber include a door moving device provided with a wafer moving path so that the wafer can move between the chambers, and the wafer moving path is sealed in accordance with a process so that the internal pressure of each chamber is maintained .

However, since the door device for a semiconductor manufacturing facility as described above needs to open a door of several hundred kilos by using a crane or the like, it is difficult to maintain the pressure inside the chamber, There is a problem that can not be maintained.

Therefore, there is a need to improve this.

On the other hand, Japanese Patent Laid-Open No. 10-2008-0082211 discloses a "cover of a processing chamber used in a substrate processing apparatus ".

It is an object of the present invention to provide a door opening / closing device for a semiconductor manufacturing facility which is capable of opening and closing a door while maintaining the pressure of a vacuum chamber, and stably maintaining the opened state thereof .

According to an aspect of the present invention, there is provided a door opening / closing apparatus for a semiconductor manufacturing facility, the door opening and closing apparatus comprising: a door provided in a vacuum chamber; a door hinged to the door at one end and hinged to the vacuum chamber at the other end; A cylinder part for opening and closing the door, and an opening / closing part connected to the cylinder part to compress or extend the cylinder part.

In the present invention, the cylinder portion includes a cylinder rod and a cylinder housing.

In the present invention, the cylinder part is hinged to the door through a rod-and-bearing member, and the cylinder housing is hinged to the vacuum chamber through a tilting member.

The tilting member may include a hinge block rotatably coupled to a hinge bracket coupled to the vacuum chamber, a hinge block coupled to the hinge block and the cylinder housing to interlock with the hinge block and the cylinder housing, And an interlocking gear box.

In the present invention, the cylinder unit may further include a cylinder operation sensing member for sensing a position where the cylinder unit is extended or contracted by the opening / closing part.

In the present invention, the opening and closing member includes a gear box coupled to the cylinder, and an actuator coupled to the gear box.

As described above, the door opening / closing apparatus for a semiconductor manufacturing facility according to one aspect of the present invention can open / close the door easily while maintaining the pressure of the vacuum chamber unlike the prior art, Can be stably maintained.

Further, according to the present invention, it is possible to easily detect the extension or contraction distance of the cylinder rod of the cylinder part.

1 is a perspective view illustrating a door opening / closing apparatus for a semiconductor manufacturing facility according to an embodiment of the present invention.
2 is a side view showing a door opening / closing apparatus for a semiconductor manufacturing facility according to an embodiment of the present invention.
3 is an enlarged view of a main part of a door opening / closing device for a semiconductor manufacturing facility according to an embodiment of the present invention.
4 is an exploded perspective view showing a cylinder part and an opening / closing guide part according to an embodiment of the present invention.
5 is an exploded perspective view showing a cylinder operation sensing member according to an embodiment of the present invention.
6 is an operational state view of a door opening / closing device for a semiconductor manufacturing facility according to an embodiment of the present invention.

Hereinafter, preferred embodiments of a door opening / closing apparatus for a semiconductor manufacturing facility according to the present invention will be described with reference to the accompanying drawings. In this process, the thicknesses of the lines and the sizes of the components shown in the drawings may be exaggerated for clarity and convenience of explanation.

In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout this specification.

2 is a side view showing a door opening / closing device for a semiconductor manufacturing facility according to an embodiment of the present invention. FIG. 3 is a side view of the door opening / Is an enlarged view of a main portion of a door opening / closing device for a semiconductor manufacturing facility according to an embodiment of the present invention.

5 is an exploded perspective view showing a cylinder operation sensing member according to an embodiment of the present invention, and FIG. 6 is an exploded perspective view illustrating a cylinder operation sensing member according to an embodiment of the present invention. FIG. 4 is an exploded perspective view showing a cylinder part and an opening / 1 is an operational state diagram of a door opening / closing device for a semiconductor manufacturing facility according to an embodiment of the present invention.

1 to 6, a door opening / closing apparatus 100 for a semiconductor manufacturing facility according to an embodiment of the present invention includes a vacuum chamber 10 installed in a vacuum chamber 10 for processing wafers, Thereby opening and closing.

A door 110 for opening and closing the vacuum chamber 10; a cylinder 120 for opening and closing the door 110; And an opening / closing part 130 for driving the cylinder part 120.

Since the door opening / closing apparatus 100 for a semiconductor manufacturing facility according to the present invention can open and close the vacuum chamber 10 without using a separate heavy equipment, the pressure of the clean room in which the vacuum chamber 10 is installed can be stably . Also, the door 110 can be opened and closed easily through the cylinder 120 and the opening / closing part 130, and the opened state of the door 110 can be stably maintained.

The door 110 is rotatably installed in the vacuum chamber 10 to selectively seal the opening formed in the upper surface of the vacuum chamber 10. The door 110 is rotatably coupled to the vacuum chamber 10 through a hinge member 111 at one side thereof, and the cylinder unit 120 is rotatably coupled to the upper surface of the center portion.

One end and the other end of the cylinder 120 are hinged to the door 110 and the vacuum chamber 10 and are opened or closed through contraction or expansion of the vacuum chamber 10 through the operation of the opening and closing member 130 . The cylinder part 120 according to the present embodiment may be provided by a screw cylinder.

The cylinder part 120 is hinged to the upper surface of the vacuum chamber 10 while the cylinder rod 120a is hinged to the upper surface of the vacuum chamber 10. The cylinder housing 120b is hinged to the vacuum chamber 10 and operated by the opening / . In addition, the cylinder portion 120 further includes a cylinder operation sensing member 121 for sensing an elongated or contracted length of the cylinder rod 120a.

The cylinder rod 120a is coupled to the rod end bearing member 123 for hinging to the vacuum chamber 10 and the rod hinge bracket 125 is coupled to the rod end bearing member 123. [ The rod hinge bracket 125 is coupled to the upper surface of the door 110.

The cylinder housing 120b is rotatably coupled to the vacuum chamber 10 through a tilting member 127 and the opening and closing member 130 is coupled to the tilting member 127. [

The tilting member 127 is coupled to an end of the cylinder housing 120b so as to be connected to the cylinder rod 120a and is operated by the opening and closing member 130 to extend or contract the cylinder rod 120a. The tilting member 127 includes a hinge block 127a rotatably coupled to a hinge bracket 129 coupled to the vacuum chamber 10 and a cylinder housing 120b and a hinge block 120b interlocking the cylinder rod 120a. And an interlocking gear box 127b which is coupled between the gear box 127a. At this time, the hinge block 127a has a hinge shaft coupled to the hinge bracket 129, and the interlock gear box 127b is provided with an opening /

Meanwhile, a cylinder operation sensing member 121 for sensing the operation of the cylinder rod 120a is coupled to the cylinder housing 120b.

The cylinder operation sensing member 121 is disposed in the longitudinal direction of the cylinder housing 120b and senses the operated state of the cylinder rod 120a. To this end, the cylinder operation sensing member 121 includes a case 121a coupled to the cylinder housing 120b, a plurality of sensing sensors 121b spaced apart from each other in the case 121a, and a sensing sensor 121b And a sensing member 121c provided on the cylinder rod 120a so as to be sensed.

The case 121a is coupled in the longitudinal direction of the cylinder housing 120b and the elongated hole 121d is formed so that the sensing sensor 121b smoothly senses the sensing member 121c. In addition, the case 121a is provided with a sensor installation beam 121e for installing the detection sensor 121b.

A plurality of detection sensors 121b are provided on the sensor installation beam 121e so as to be spaced equidistantly from each other.

The sensing member 121c is coupled to the cylinder rod 120a and its position is changed according to the extension and contraction of the cylinder rod 120a and is sensed by the sensing sensor 121b.

A hydraulic cylinder may be used and the cylinder 120 and the opening and closing part 130 (130) may be used depending on the weight and the size of the door 110. In this case, ) May be provided at least one or three or more.

The opening and closing door 130 actuates the cylinder 120 to open and close the door 110 and controls the opening and closing degree of the door 110 by stopping the cylinder 120 at a specific position. The opening and closing drive unit 130 includes a gear box 131 coupled to the interlocking gear box 127b of the cylinder unit 120 and an actuator 133 coupled to the gear box 131 to provide a driving force.

In the door opening / closing device 100 for a semiconductor manufacturing facility according to an embodiment of the present invention, as the actuator 133 is driven, the gear box 131 and the interlocking gear box 127b are interlocked, The door 110 is closed or opened while the cylinder rod 120a is extended or contracted in the cylinder housing 120b by the spring 127b.

For example, as the cylinder rod 120a extends from the cylinder housing 120b, the door 110 rotates in a direction closing the vacuum chamber 10, and as the cylinder rod 120a contracts in the cylinder housing 120b, (110) rotates in a direction to open the vacuum chamber (10). At this time, as the cylinder rod 120a expands or contracts, the sensing member 121c provided on the cylinder rod 120a moves together, and the positional change is sensed by the sensing sensor 121b. So that the degree of sealing of the door 110 can be accurately confirmed.

Further, when the driving of the actuator 133 is stopped, the cylinder rod 120a is hooked to the interlocking gear box 127b, so that the opened state of the door 110 can be stably maintained.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. I will understand.

Accordingly, the true scope of protection of the present invention should be defined by the claims.

100: Door opening / closing device for semiconductor manufacturing facility 10: Vacuum chamber
110: door 111: hinge member
120: cylinder part 120a: cylinder rod
120b: cylinder housing 121: cylinder operation sensing member
123: Rod and bearing 125: Rod hinge bracket
127: tilting member 129: hinge bracket
130: opening and closing port opening 131: opening and closing port opening
131: gear box 133: actuator

Claims (5)

A door provided in the vacuum chamber; A cylinder part hinged to the door at one end and hinged to the vacuum chamber at the other end, the cylinder part opening and closing the door; And an opening / closing part connected to the cylinder part to compress or extend the cylinder part,
The cylinder part includes a cylinder rod and a cylinder housing, the cylinder rod is hinged to the door through a rod-and-bearing member, the cylinder housing is hinged to the vacuum chamber through a tilting member,
Wherein the tilting member comprises: a hinge block rotatably coupled to a hinge bracket coupled to the vacuum chamber; And
An interlocking gear box coupled to the hinge block and the cylinder housing for interlocking with the opening and closing drive unit and driving the cylinder rod;
And a door opening / closing device for a semiconductor manufacturing facility.
delete delete The method according to claim 1,
Wherein the cylinder portion further comprises a cylinder operation sensing member for sensing a position where the cylinder portion is extended or contracted by the opening / closing drive portion.
The method according to claim 1,
The opening and closing guide portion includes a gear box coupled to the cylinder portion; And
An actuator coupled to the gear box;
And a door opening / closing device for a semiconductor manufacturing facility.
KR1020170182925A 2017-12-28 2017-12-28 Door opening and closing device for semiconductor manufacturing facility KR101874881B1 (en)

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KR1020170182925A KR101874881B1 (en) 2017-12-28 2017-12-28 Door opening and closing device for semiconductor manufacturing facility

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102420197B1 (en) 2022-05-03 2022-07-14 (주)에스제이오토메이션 Door opening and closing device for semiconductor or display manufacturing facility to prevent gaps from occuring
KR102439228B1 (en) * 2022-05-02 2022-09-02 (주)에스제이오토메이션 Door open-and-close device
KR20230060578A (en) 2021-10-27 2023-05-08 (주)에스제이오토메이션 Door opening and closing device for semiconductor or display manufacturing facility to prevent gaps from occuring
KR102565797B1 (en) * 2022-11-22 2023-08-16 (주)에스제이오토메이션 Ai-based chamber door monitoring device
WO2023214725A1 (en) * 2022-05-02 2023-11-09 (주)에스제이오토메이션 Lid opening and closing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001158347A (en) * 1999-12-01 2001-06-12 Kawasaki Heavy Ind Ltd Motor-driven trap door device for vehicle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001158347A (en) * 1999-12-01 2001-06-12 Kawasaki Heavy Ind Ltd Motor-driven trap door device for vehicle

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230060578A (en) 2021-10-27 2023-05-08 (주)에스제이오토메이션 Door opening and closing device for semiconductor or display manufacturing facility to prevent gaps from occuring
KR102439228B1 (en) * 2022-05-02 2022-09-02 (주)에스제이오토메이션 Door open-and-close device
WO2023214725A1 (en) * 2022-05-02 2023-11-09 (주)에스제이오토메이션 Lid opening and closing device
KR102420197B1 (en) 2022-05-03 2022-07-14 (주)에스제이오토메이션 Door opening and closing device for semiconductor or display manufacturing facility to prevent gaps from occuring
KR102565797B1 (en) * 2022-11-22 2023-08-16 (주)에스제이오토메이션 Ai-based chamber door monitoring device

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