WO2023210474A1 - 光学フィルタ - Google Patents
光学フィルタ Download PDFInfo
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- WO2023210474A1 WO2023210474A1 PCT/JP2023/015699 JP2023015699W WO2023210474A1 WO 2023210474 A1 WO2023210474 A1 WO 2023210474A1 JP 2023015699 W JP2023015699 W JP 2023015699W WO 2023210474 A1 WO2023210474 A1 WO 2023210474A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/08—Compositions for glass with special properties for glass selectively absorbing radiation of specified wave lengths
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/26—Reflecting filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B11/00—Filters or other obturators specially adapted for photographic purposes
Definitions
- the present invention relates to an optical filter that selectively transmits visible light and a specific near-infrared light region, and blocks light outside these regions.
- imaging devices using solid-state imaging devices is expanding to devices that capture images both day and night, such as surveillance cameras and vehicle-mounted cameras. In such a device, it is necessary to obtain a visible light-based (color) image and an infrared light-based (black and white) image, respectively.
- optical filters that have a function of selectively transmitting specific near-infrared light are required.
- the use of dual bandpass filters is being considered.
- Patent Document 1 describes an optical filter that transmits visible light and near-infrared light around 850 nm and blocks other light, which is a combination of a dielectric multilayer film and a resin base material containing a near-infrared absorbing dye. has been done.
- sensors in the imaging field use laser light that includes a part of the range from 800 to 1000 nm, so optics that can transmit near-infrared light in the sensing range and block other near-infrared light that causes noise is needed. Filters are needed.
- the optical filter described in Patent Document 1 does not have sufficient transparency for near-infrared light around 850 nm.
- optical filters having a dielectric multilayer film since the optical thickness of the dielectric multilayer film changes depending on the incident angle of light, there is a problem in that the spectral transmittance curve changes depending on the incident angle. For example, as the incident angle of light increases, the reflection characteristics shift toward shorter wavelengths, which may result in a decrease in the reflection characteristics in the area that is originally desired to be shielded. Such a phenomenon is more likely to occur as the incident angle becomes larger. When such a filter is used, the spectral sensitivity of the solid-state imaging device may be affected by the angle of incidence. As camera modules have become shorter in recent years, they are expected to be used under high angle of incidence conditions, so there is a need for optical filters that are less susceptible to the angle of incidence.
- the shift in the visible light transmitting region or the region switching from the near-infrared shielding region on the short wavelength side to the near-infrared transmitting region can be reduced by using an absorbing material such as a dye.
- an absorbing material such as a dye.
- there is a concern that the color reproducibility of (color) images based on visible light and the reproducibility of (monochrome) images based on infrared light will be affected.
- the present invention aims to provide an optical filter that has excellent transmittance for visible light and specific near-infrared light, excellent shielding properties for other near-infrared light, and has a small shift in the spectral curve even at high incident angles. do.
- the present invention provides an optical filter having the following configuration.
- a light-absorbing material X 800S having a maximum absorption wavelength in a wavelength region shorter than 800 nm, a light-absorbing material Y850L having a maximum absorption wavelength in a wavelength region longer than 850 nm;
- An optical filter comprising a dielectric multilayer film, The optical filter satisfies all of the following spectral characteristics (i-1) to (i-5).
- the optical filter of the present invention it is possible to provide an optical filter that has excellent transmittance of visible light and specific near-infrared light and excellent shielding properties of other near-infrared light even at high incident angles.
- the optical filter of the present invention has particularly excellent transparency in the near-infrared light region of 800 to 1000 nm, which is the sensing wavelength region, even at high incident angles, and the boundary between this transmission region and the wavelength region on the long wavelength side that is desired to be blocked. It is an optical filter whose spectral transmittance curve of a region is not easily shifted by the angle of incidence, and is not easily affected by the angle of incidence.
- FIG. 1 is a cross-sectional view schematically showing an example of an optical filter according to an embodiment.
- FIG. 2 is a cross-sectional view schematically showing another example of the optical filter of one embodiment.
- FIG. 3 is a diagram showing spectral transmittance curves of Yb-containing glasses 1 to 3 and alkali glass.
- FIG. 4 is a diagram showing optical density curves of Yb-containing glasses 1 to 3.
- FIG. 5 is a diagram showing a spectral transmittance curve of the Yb-containing glass 4.
- FIG. 6 is a diagram showing an optical density curve of Yb-containing glass 4.
- FIG. 7 is a diagram showing a spectral transmittance curve of ceramics.
- FIG. 8 is a diagram showing an optical density curve of ceramics.
- FIG. 1 is a cross-sectional view schematically showing an example of an optical filter according to an embodiment.
- FIG. 2 is a cross-sectional view schematically showing another example of the optical filter of one embodiment.
- FIG. 9 is a diagram showing spectral transmittance curves of the absorption layers of Example 1-1 and Example 1-2.
- FIG. 10 is a diagram showing optical density curves of the absorption layers of Example 1-1 and Example 1-2.
- FIG. 11 is a diagram showing a spectral transmittance curve and a spectral reflectance curve of the optical filter of Example 2-1.
- FIG. 12 is a diagram showing the spectral transmittance curve of the optical filter of Example 2-2.
- FIG. 13 is a diagram showing the spectral transmittance curve of the optical filter of Example 2-3.
- FIG. 14 is a diagram showing the spectral transmittance curve and spectral reflectance curve of the optical filter of Example 2-4.
- FIG. 15 is a diagram showing the spectral transmittance curve of the optical filter of Example 2-5.
- FIG. 16 is a diagram showing the spectral transmittance curve of the optical filter of Example 2-6.
- FIG. 17 is a diagram showing the spectral transmittance curve of the optical filter of Example 2-7.
- FIG. 18 is a diagram showing the spectral transmittance curve of the optical filter of Example 2-8.
- FIG. 19 is a diagram showing the spectral transmittance curve of the optical filter of Example 2-9.
- NIR dyes near-infrared absorbing dyes
- UV dyes ultraviolet absorbing dyes
- the compound represented by formula (I) is referred to as compound (I).
- the dye composed of compound (I) is also referred to as dye (I), and the same applies to other dyes.
- the group represented by formula (I) is also referred to as group (I), and the same applies to groups represented by other formulas.
- internal transmittance refers to the ratio of measured transmittance to interface reflection, which is expressed by the formula ⁇ actually measured transmittance (incident angle 0 degrees)/(100-reflectance (incident angle 5 degrees)) ⁇ 100. This is the transmittance obtained by subtracting the influence.
- optical density indicates a value converted from internal transmittance using the following formula.
- Optical density at wavelength ⁇ nm -log10 (iT ⁇ /100) iT ⁇ : Internal transmittance at an incident angle of 0 degrees at a wavelength of ⁇ nm
- transmittance Internal transmittance
- the transmittance measured by dissolving a dye in a solvent such as dichloromethane, the transmittance of a dielectric multilayer film, and the transmittance of an optical filter having a dielectric multilayer film are actually measured transmittances.
- a transmittance of 90% or more means that the transmittance is not less than 90% in the entire wavelength range, that is, the minimum transmittance is 90% or more in that wavelength range. means.
- a transmittance of 1% or less means that the transmittance does not exceed 1% in the entire wavelength range, that is, the maximum transmittance in that wavelength range is 1% or less.
- the average transmittance and average internal transmittance in a specific wavelength range are the arithmetic averages of the transmittance and internal transmittance for every 1 nm in the wavelength range. Spectral properties can be measured using a UV-visible spectrophotometer. In this specification, " ⁇ " representing a numerical range includes the upper and lower limits.
- An optical filter according to an embodiment of the present invention includes a light absorption material X 800S having a maximum absorption wavelength in a wavelength region shorter than 800 nm, and a light absorption material It includes a light absorbing material Y850L and a dielectric multilayer film. Due to the reflection properties of the dielectric multilayer film and the absorption properties of the light absorption material Excellent shielding performance in the near-infrared light region can be achieved.
- FIG. 1 and 2 are cross-sectional views schematically showing an example of an optical filter according to an embodiment.
- the optical filter 1A shown in FIG. 1 includes a support 10 made of light-absorbing material Y850L , a dielectric multilayer film 21 laminated on one main surface of the support 10, and a dielectric multilayer film 21 laminated on the other main surface of the support 10.
- the optical filter 1B shown in FIG. 2 is an example in which a dielectric multilayer film 22 is further provided on the surface of the absorption layer 30.
- the optical filter of the present invention satisfies all of the following spectral characteristics (i-1) to (i-5).
- i-1 In the spectral transmittance curve at a wavelength of 450 nm to 600 nm and an incident angle of 0 degrees, the average transmittance T 450-600 (0 deg) AVE is 60% or more (i-2) At a wavelength of 700 nm to 750 nm and an incident angle of 0 degrees In the spectral transmittance curve at 700-750 (0deg) AVE is 5% or less (i-3)
- the maximum transmittance T 1050-1200 (0deg) MAX is 7% or less (i-4)
- Maximum transmittance T 800-1000 (0deg) MAX is 60% or more (i -5) In the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 0 degrees, when the wavelength at which the maximum transmittance occurs is ⁇ 800-1000 (0 deg) MAX , A wavelength ⁇
- This filter which satisfies all of the spectral characteristics (i-1) to (i-5), has visible light transmittance as shown in characteristic (i-1) and specificity as shown in characteristic (i-4). It has excellent near-infrared light transmittance, as shown in characteristics (i-2) and (i-3), and has excellent shielding properties for other near-infrared light, as shown in characteristic (i-5).
- Satisfying the spectral characteristic (i-1) means having excellent transparency in the visible light region of 450 to 600 nm.
- T 450-600 (0deg) AVE is preferably 80% or more, more preferably 88% or more.
- a dielectric multilayer film, a light absorption material X 800S , and a light absorption material Y 850L having excellent transparency in the visible light region may be used.
- Satisfying the spectral characteristic (i-2) means that the material has excellent shielding properties in the near-infrared light region of 700 to 750 nm.
- T 700-750 (0deg) AVE is preferably 2% or less, more preferably 1% or less. Further, in order to satisfy the spectral characteristic (i-2), for example, light may be blocked by the absorption ability of the light-absorbing material X 800S .
- spectral characteristic (i-3) means that the material has excellent shielding properties in the near-infrared light region of 1050 to 1200 nm.
- T 1050-1200 (0deg) MAX is preferably 5% or less, more preferably 3% or less.
- light shielding is required due to the absorption ability of the light-absorbing material Y850L or the reflection characteristics of a dielectric multilayer film designed to reflect near-infrared light of 1050 nm or later. There are many things you can do.
- spectral characteristic (i-4) means having excellent transparency in the near-infrared light region of 800 to 1000 nm.
- T 800-1000 (0deg) MAX is preferably 70% or more, more preferably 80% or more, even more preferably 85% or more.
- a dielectric multilayer film having excellent transmittance in the near-infrared light region of 800 to 1000 nm may be used.
- spectral characteristic (i-5) means that the spectral curve in the wavelength range of 800 nm to 1000 nm is less likely to shift in the longer wavelength region than the maximum absorption wavelength even at a high incident angle.
- ytterbium-containing glass which will be described later, is used as the light-absorbing material Y 850L , and light is blocked by the absorption ability of the light-absorbing material Y 850L .
- the optical filter of the present invention further satisfies the following spectral characteristic (i-6).
- i-6 In the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 0 degrees, when the wavelength at which the maximum transmittance occurs is ⁇ 800-1000 (0 deg) MAX , A wavelength ⁇ IRL (0deg) (55%) at which the transmittance is 55% in a wavelength region longer than ⁇ 800-1000 (0deg) MAX , The wavelength ⁇ IRL (0deg) (45%) at which the transmittance is 45% in the wavelength region longer than ⁇ 800-1000 (0deg) MAX satisfies the following relational expression
- the above relational expression in spectral characteristics (i-6) is the spectral transmittance curve in the wavelength range of 800 nm to 1000 nm, which switches from the near-infrared light region that you want to transmit to the longer wavelength side of the near-infrared light region that you want to block. (the slope of the cutoff in the near-infrared band). From the viewpoint of efficiently capturing light, the steeper the spectral curve in the boundary region between the transmission region and the shielding region is, the more ideal it is.
- the above relational expression (inclination) in spectral characteristic (i-6) is 1.5 or more, it means that the transmittance of near-infrared light to be transmitted is excellent.
- the above relational expression (slope) in the spectral characteristic (i-6) is more preferably 1.6 or more, and still more preferably 1.7 or more.
- ytterbium-containing glass which will be described later, is used as the light-absorbing material Y 850L , and light is blocked by the absorption ability of the light-absorbing material Y 850L . .
- the optical filter of the present invention further satisfies the following spectral characteristic (i-7).
- i-7 spectral characteristic
- spectral characteristic (i-7) means that the spectral curve in the wavelength range of 800 nm to 1000 nm is less likely to shift in the shorter wavelength region than the maximum absorption wavelength even at a high incident angle.
- light may be blocked by the absorption ability of the light-absorbing material X 800S .
- the optical filter of the present invention preferably further satisfies the following spectral characteristics (i-8) to (i-10).
- spectral characteristics i-8) to (i-10).
- i-8) In the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 0 degrees, when the wavelength at which the maximum transmittance occurs is ⁇ 800-1000 (0 deg) MAX , Wavelength region longer than ⁇ 800-1000 (0deg) MAX and wavelength where the transmittance is 50% at an incident angle of 0 degrees ⁇ IRL (0deg) (50%) and the range of 800 nm to ⁇ 800-1000 (0deg) MAX nm And the wavelength ⁇ IRS(0deg)(50%) at which the transmittance is 50% at an incident angle of 0 degrees satisfies the following relational expression: 20nm ⁇ IRL(0deg)(50%) - ⁇ IRS(0deg)(50 %) ⁇ 100nm (i-9) In the spectral
- Spectral characteristics (i-8) to (i-10) are regulations regarding the bandwidth of the near-infrared light transmission band.
- the spectral characteristic (i-8) is an index of the bandwidth at an incident angle of 0 degrees
- the spectral characteristic (i-9) is an index of the bandwidth at an incident angle of 35 degrees
- the spectral characteristic (i-10) is an index of the bandwidth at an incident angle of 35 degrees. This is an index of the difference in bandwidth between an incident angle of 0 degrees and an incident angle of 35 degrees.
- the bandwidth is preferably within a specific range from the viewpoint of transmitting necessary near-infrared light and blocking unnecessary near-infrared light.
- ⁇ IRL (0deg) (50%) - ⁇ IRS (0deg) (50%) is more preferably 25 nm or more and 90 nm or less.
- ⁇ IRL (35 deg) (50%) - ⁇ IRS (35 deg) (50%) is more preferably 25 nm or more and 90 nm or less.
- ytterbium-containing glass which will be described later, as the light-absorbing material Y 850L , and to block light using the absorption ability of the light-absorbing material Y 850L .
- An example of this is to combine light shielding with the absorption ability of the absorbing material X 800S .
- the optical filter of the present invention preferably further satisfies the following spectral characteristics (i-11) to (i-12).
- spectral characteristics i-11) to (i-12).
- i-11) In the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 0 degrees, when the integral value of transmittance in the wavelength band where the transmittance is 20% or more is IRP-A (0 deg) , the following Satisfies the relational expression 800 (% ⁇ nm) ⁇ IRP-A (0deg) ⁇ 10000 (% ⁇ nm) (i-12)
- the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 35 degrees the sum of the products of the wavelength at which the transmittance is 20% or more and the transmittance at the above wavelength is IPR-A (35 deg) Then, the following relational expression is satisfied: 800 (% ⁇ nm) ⁇ IRP-A (35deg)
- Spectral characteristics (i-11) to (i-12) are regulations regarding the area of the band with a transmittance of 20% or more at each incident angle of 0 degrees and 35 degrees in the near-infrared light transmission region, and such area is This is an indicator of the amount of near-infrared light transmitted.
- IRP-A (0deg) is obtained by calculating the integral value of the transmittance in a wavelength band where the transmittance is 20% or more at an incident angle of 0 degrees.
- IRP-A (35deg) can also be obtained by similarly calculating from the transmittance and wavelength at an incident angle of 35 degrees.
- IRP-A (0deg) is more preferably 3000 or more, and more preferably 9000 or less.
- IRP-A (35deg) is more preferably 3000 or more, and more preferably 9000 or less.
- IRP-A (0deg) and IRP-A (35deg) satisfy the following relational expression.
- IRP-A (35deg) /IRP-A (0deg) means the ratio of the amount of near-infrared light at an angle of incidence of 0 degrees to the amount of near-infrared light at an angle of incidence of 35 degrees. This is preferable because the near-infrared light capture efficiency by the filter is less affected by the incident angle.
- IRP-A (35deg) /IRP-A (0deg) is more preferably 0.93 or more, and more preferably 1.07 or less.
- the optical filter of the present invention further satisfies the following spectral characteristic (i-13).
- spectral transmittance curve at a wavelength of 450 nm to 600 nm and an angle of incidence of 0 degrees the integral value of transmittance in the wavelength band where the transmittance is 20% or more is VIS-A (0 deg)
- the integral value of transmittance in the wavelength band where the transmittance is 20% or more is VIS-A (35 deg)
- the integral value of transmittance in the wavelength band where the transmittance is 20% or more is IRP-A (0 deg)
- the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 35 degrees the integral value of transmittance in the wavelength band where the transmittance is 20% or more is IRP-A (0 deg)
- the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 35 degrees the integral value of transmittance in the wavelength band where the transmitt
- VIS-A (0deg) and VIS-A (35deg) are regulations regarding the area of the band with transmittance of 20% or more at incident angles of 0 degrees and 35 degrees, respectively, among visible light, This area is an index of the amount of visible light transmitted.
- IRP-A (0deg) and IRP-A (35deg) are indicators of the amount of near-infrared light to be transmitted, as explained in spectral characteristics (i-11) to (i-12).
- [IRP-A (35deg) /VIS-A (35deg) ] / [IRP-A (0deg) /VIS-A (0deg) ] in spectral characteristics (i-13) are visible light transmission band and near-infrared light transmission band.
- the ratio is more preferably 0.93 or more, and more preferably 1.07 or less.
- the optical filter of the present invention preferably further satisfies the following spectral characteristic (i-14).
- i-14 In the spectral transmittance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 0 degrees, when the wavelength at which the maximum transmittance occurs is ⁇ 800-1000 (0 deg) MAX , The wavelength at which the transmittance is 50% in the wavelength region longer than ⁇ 800-1000 (0deg) MAX is ⁇ IRL (0deg) (50%) , In the spectral reflectance curve at a wavelength of 800 nm to 1000 nm and an incident angle of 5 degrees, when the wavelength at which the reflectance is 50% in the wavelength region longer than 800 nm is ⁇ IRR (5 deg) (50%) , the following relational expression is Satisfy
- the spectral characteristic (i-14) means that the near-infrared light transmission band and the near-infrared light reflection band are sufficiently separated. It is preferable to block light in such a band by the absorption ability of the light absorbing material Y850L rather than by the reflection property of the dielectric multilayer film.
- This filter includes a light-absorbing material Y850L having a maximum absorption wavelength in a wavelength region longer than 850 nm. This allows the reflection characteristics of the dielectric multilayer film to compensate for the areas that are not shielded from light.
- the light-absorbing material Y 850L preferably satisfies the following spectral characteristics (iii-1).
- (iii-1) Optical density OD 1000 at wavelength 1000 nm / Optical density OD 800 at wavelength 800 nm >10
- the ratio of the spectral characteristic (iii-1) increases as the transmittance at a wavelength of 800 nm increases and the transmittance at a wavelength of 1000 nm decreases.
- the ratio of spectral characteristic (iii-1) is greater than 10
- the light absorbing material Y 850L sufficiently transmits near-infrared light with a wavelength of around 800 nm and sufficiently absorbs near-infrared light with a wavelength of around 1000 nm. It means that.
- the ratio of spectral characteristics (iii-1) is more preferably 50 or more.
- the light-absorbing material Y 850L is not limited as long as it is a material that can obtain the above-mentioned spectral characteristics, and is preferably an inorganic material containing ytterbium, such as Yb 2 O 3 , Yb:YAG (yttrium aluminum garnet), Yb:YVO Possible materials include single crystal and polycrystalline sintered bodies such as No. 4 , glass containing ytterbium, and the like. Among these, glass containing ytterbium is more preferable from the viewpoint of processability, stability of material quality, and ease of adjusting physical properties. If the light absorbing material Y 850L is such a material, it will easily satisfy the above spectral characteristic (iii-1).
- the ytterbium-containing glass preferably has a maximum absorption wavelength of 940 nm to 1000 nm.
- the average internal transmittance of the ytterbium-containing glass at a wavelength of 450 nm to 600 nm and an incident angle of 0 degrees is preferably 60% or more, more preferably 80% or more, and even more preferably 90% or more.
- the average internal transmittance of the ytterbium-containing glass at a wavelength of 700 nm to 800 nm and an incident angle of 0 degrees is preferably 60% or more, more preferably 80% or more, and still more preferably 90% or more.
- Ytterbium-containing glass has excellent transparency in the visible light region and in the near-infrared light region from visible light to about 800 nm, and absorbs near-infrared light from 850 nm onwards, particularly from 900 to 1000 nm. Furthermore, since light is blocked by absorption characteristics, the light blocking property is not affected by the incident angle, unlike a dielectric multilayer film. Therefore, by using ytterbium-containing glass, especially when the sensing wavelength range is 800 to 900 nm, it has excellent transmittance in the near-infrared light region even at high incident angles, and it is possible to achieve excellent transparency in the near-infrared light region even at high incident angles.
- the spectral transmittance curve of the boundary region of the spectral transmittance curve is less likely to shift depending on the angle of incidence, and an optical filter that is less affected by the angle of incidence can be obtained.
- Examples of the ytterbium-containing glass include glasses having any of the following compositions.
- a glass further contains SiO 2 as an essential component, and the SiO 2 content is 5 mol% to 35 mol%.
- a glass further contains La 2 O 3 as an essential component, and the content of La 2 O 3 is 1 mol% to 20 mol%.
- ytterbium-containing glass commercially available products may be used, and it can be produced by known methods described in Japanese Patent Application Laid-open No. 61-163138 and Japanese Patent Application Publication No. 56-78447.
- ytterbium-containing glass is a glass containing an alkali metal, and alkali metal ions (for example, Li ions, Na ions) with alkali ions having a larger ionic radius (for example, Na ions or K ions for Li ions, and K ions for Na ions). May be used.
- alkali metal ions for example, Li ions, Na ions
- alkali ions having a larger ionic radius for example, Na ions or K ions for Li ions, and K ions for Na ions.
- the thickness of the ytterbium-containing glass is preferably 3 mm or less, more preferably 2 mm or less, and still more preferably 1 mm or less, from the viewpoint of ease of optical design when incorporated into a camera module, and from the viewpoint of element strength and desired optical
- the thickness is preferably 0.1 mm or more in view of the need to obtain characteristics.
- This filter includes a light absorbing material X 800S having a maximum absorption wavelength in a wavelength region shorter than 800 nm. This allows the reflection characteristics of the dielectric multilayer film to compensate for the areas that are not shielded from light.
- the optical filter has an absorption layer containing the light absorption material X 800S . Further, it is preferable that such an absorption layer satisfies all of the following spectral characteristics (ii-1) to (ii-2). (ii-1) The shortest wavelength at which the internal transmittance is 30% in the spectral transmittance curve of wavelengths 650 to 720 nm is ⁇ A_VIS (30%) , and the internal transmittance is 30% in the spectral transmittance curve of wavelengths 720 to 1000 nm.
- the maximum absorption wavelength should be in the range of 680 to 740 nm.
- a certain dye may be combined with a dye having a wavelength of 740 to 800 nm.
- squarylium dyes may be used from the viewpoint of realizing a wide range of absorption with a small amount added.
- Characteristic (ii-2) means that the absorption layer has both high visible light transmittance at 450 nm and high near-infrared light shielding property at 720 nm.
- OD_720 - OD_450 is preferably 1.5 or more, more preferably 2 or more.
- a symmetrical squarylium dye may be used as a near-infrared absorbing dye, from the viewpoint of strongly absorbing around 720 nm and maintaining high transmittance in the visible light region. .
- the light-absorbing material X 800S is preferably a dye (hereinafter also referred to as "NIR dye") having a maximum absorption wavelength in the wavelength range of 680 to 800 nm in dichloromethane.
- NIR dye a dye having a maximum absorption wavelength in the wavelength range of 680 to 800 nm in dichloromethane.
- the absorption layer can absorb a wide range of near-infrared light absorption bands centered at 720 nm, and absorb visible light at 450 nm, as shown in characteristics (ii-1) and (ii-2) above. It is easy to achieve both transparency and near-infrared light shielding property of 720 nm.
- the absorption layer is also preferably a resin film containing the dye and resin.
- NIR dyes include squarylium dyes, cyanine dyes, phthalocyanine dyes, naphthalocyanine dyes, dithiol metal complex dyes, azo dyes, polymethine dyes, phthalide dyes, naphthoquinone dyes, anthraquinone dyes, indophenol dyes, pyrylium dyes, thiopyrylium dyes, At least one kind selected from the group consisting of quinceconium dyes, tetradehyde ocholine dyes, phenylmethane dyes, aminium dyes, and diimmonium dyes is preferred.
- the NIR dye preferably contains at least one dye selected from squarylium dyes, phthalocyanine dyes, and cyanine dyes.
- squarylium dyes and cyanine dyes are preferable from a spectral point of view, and phthalocyanine dyes are preferable from a durability point of view.
- the content of the NIR dye in the absorption layer is preferably 0.1 to 25 parts by weight, more preferably 0.3 to 15 parts by weight, based on 100 parts by weight of the resin. Note that when two or more types of compounds are combined, the above content is the sum of each compound.
- the absorption layer may contain other dyes in addition to the above NIR dyes.
- a dye (UV dye) having a maximum absorption wavelength in the resin from 370 to 440 nm is preferable. Thereby, the near-ultraviolet light region can be efficiently blocked.
- UV dyes examples include oxazole dyes, merocyanine dyes, cyanine dyes, naphthalimide dyes, oxadiazole dyes, oxazine dyes, oxazolidine dyes, naphthalic acid dyes, styryl dyes, anthracene dyes, cyclic carbonyl dyes, triazole dyes, and the like.
- merocyanine dyes are particularly preferred.
- one type may be used alone, or two or more types may be used in combination.
- the absorbent layer is preferably laminated on at least one main surface of the support.
- the support may be an organic material or an inorganic material.
- the light absorbing material Y 850L is an inorganic material since it can have near-infrared light absorbing ability and a function as a support.
- the resin in the absorption layer is not limited as long as it is a transparent resin, and examples include polyester resin, acrylic resin, epoxy resin, ene-thiol resin, polycarbonate resin, polyether resin, polyarylate resin, polysulfone resin, polyethersulfone resin, One or more transparent resins selected from polyparaphenylene resin, polyarylene ether phosphine oxide resin, polyamide resin, polyimide resin, polyamideimide resin, polyolefin resin, cyclic olefin resin, polyurethane resin, polystyrene resin, etc. are used. These resins may be used alone or in combination of two or more. From the viewpoint of the spectral characteristics, glass transition point (Tg), and adhesiveness of the absorption layer, one or more resins selected from polyimide resins, polycarbonate resins, polyester resins, and acrylic resins are preferred.
- NIR dyes or other dyes these may be contained in the same absorption layer, or may be contained in separate absorption layers.
- the absorption layer is prepared by preparing a coating solution by dissolving or dispersing the dye, resin or raw material components of the resin, and each component added as necessary in a solvent, and coating this on a support and drying it. It can be further formed by hardening as needed.
- the support may be the light-absorbing material Y 850L as long as the above-mentioned light-absorbing material Y 850L is an inorganic material, or it may be a peelable support used only when forming a resin film.
- the solvent may be any dispersion medium that can be stably dispersed or a solvent that can be dissolved.
- the coating liquid may also contain a surfactant to improve voids caused by microbubbles, dents caused by adhesion of foreign substances, and repellency during the drying process.
- a dip coating method, a cast coating method, a spin coating method, or the like can be used for applying the coating liquid.
- a curing treatment such as thermal curing or photocuring is further performed.
- the absorbent layer can also be produced in the form of a film by extrusion.
- the present filter can be manufactured by laminating the obtained film-like absorption layer on a support (for example, light-absorbing material Y 850L ) and integrating it by thermocompression bonding or the like.
- the optical filter may have one absorption layer, or two or more absorption layers.
- each layer may have the same or different configurations, and may be formed on each surface of the dielectric multilayer film, or two or more layers may be stacked on the surface of one dielectric multilayer film.
- the thickness of the absorption layer is 10 ⁇ m or less, preferably 5 ⁇ m or less from the viewpoint of in-plane film thickness distribution within the substrate after coating and appearance quality, and from the viewpoint of expressing desired spectral characteristics at an appropriate dye concentration. It is preferably 0.5 ⁇ m or more.
- the total thickness of each absorption layer is within the said range.
- This filter includes a dielectric multilayer film.
- This filter may have one or more dielectric multilayer films, but at least one is designed as a reflective film that reflects a portion of near-infrared light (hereinafter also referred to as "NIR reflective film”). It is preferable.
- Other dielectric multilayer films may be designed as reflective layers or antireflection layers having a reflection region other than the near-infrared region.
- the NIR reflective layer has wavelength selectivity, for example, to transmit visible light, transmit near-infrared light in the transmission region of the absorption layer, and mainly reflect other near-infrared light.
- the NIR reflective layer may be appropriately designed to further reflect light in a wavelength range other than near-infrared light, for example, near-ultraviolet light.
- a dielectric multilayer film designed as an NIR reflective layer preferably satisfies the following spectral characteristics.
- the average reflectance R D_450-600AVE in the spectral reflectance curve of the optical filter at a wavelength of 450 to 600 nm and an incident angle of 5 degrees is 3% or less
- the average reflectance R D_1000 in the spectral reflectance curve of the optical filter at a wavelength of 1000 to 1200 nm and an incident angle of 5 degrees is a dielectric multilayer film designed as a NIR reflective layer.
- the reflection characteristics of the dielectric multilayer film can be appropriately designed so that the optical filter as a whole has a desired transmittance.
- the NIR reflective layer is composed of, for example, a dielectric multilayer film in which dielectric films with a low refractive index (low refractive index film) and dielectric films with a high refractive index (high refractive index film) are alternately laminated.
- the high refractive index film preferably has a refractive index of 1.6 or more, more preferably 2.2 to 2.5.
- materials for the high refractive index film include Ta 2 O 5 , TiO 2 , and Nb 2 O 5 . Among these, TiO 2 is preferred in terms of film formability, reproducibility in refractive index, stability, and the like.
- the low refractive index film preferably has a refractive index of less than 1.6, more preferably 1.45 or more and less than 1.55.
- the material for the low refractive index film include SiO 2 and SiO x N y .
- SiO 2 is preferred from the viewpoint of reproducibility in film formation, stability, economic efficiency, and the like.
- the NIR reflective layer In order for the NIR reflective layer to transmit visible light and specific near-infrared light, it is possible to combine several types of dielectric multilayer films with different spectral characteristics when transmitting and selecting a desired wavelength band. For example, it can be adjusted by the material constituting the film, the thickness of each layer, and the number of layers.
- the NIR reflective layer preferably has a total number of dielectric multilayer films constituting the reflective layer of 20 or more layers, more preferably 25 or more layers, and a ripple suppression layer. From this point of view, the number of layers is preferably 60 or less.
- the thickness of the dielectric multilayer film is preferably 100 nm or more, more preferably 300 nm or more, from the viewpoint of suppressing deterioration of the absorbing material, and in order to improve productivity and suppress reflection ripples in the visible light region. From this viewpoint, the thickness is preferably 5 ⁇ m or less.
- a vacuum film forming process such as a CVD method, a sputtering method, a vacuum evaporation method, or a wet film forming process such as a spray method or a dip method can be used.
- the NIR reflecting layer may have one layer (a group of dielectric multilayer films) that provides predetermined optical properties, or two layers that provide predetermined optical properties.
- each reflective layer may have the same configuration or different configurations.
- it is usually composed of a plurality of reflective layers with different reflection bands.
- one is a near-infrared reflective layer that blocks light in the short wavelength band of the near-infrared region
- the other is a near-infrared reflective layer that blocks light in the long wavelength band of the near-infrared region and the near-ultraviolet region. It may also be a near-infrared/near-ultraviolet reflective layer that blocks light.
- dielectric multilayers may be designed as antireflection layers.
- the antireflection layer include a dielectric multilayer film, an intermediate refractive index medium, and a moth-eye structure in which the refractive index gradually changes.
- dielectric multilayer films are preferred from the viewpoint of optical efficiency and productivity.
- the antireflection layer is obtained by alternately laminating high refractive index dielectric films and low refractive index dielectric films.
- This filter may also include, as other components, a component (layer) that provides absorption by inorganic fine particles or the like that controls the transmission and absorption of light in a specific wavelength range.
- a component (layer) that provides absorption by inorganic fine particles or the like that controls the transmission and absorption of light in a specific wavelength range.
- inorganic fine particles include ITO (Indium Tin Oxides), ATO (Antimony-doped Tin Oxides), cesium tungstate, lanthanum boride, and the like.
- ITO fine particles and cesium tungstate fine particles have high visible light transmittance and have light absorption properties over a wide range of infrared wavelengths exceeding 1200 nm, so they can be used when such infrared light shielding properties are required. .
- the imaging device of the present invention preferably includes the optical filter of the present invention.
- the imaging device further includes a solid-state imaging device and an imaging lens.
- This filter has excellent transmittance for visible light and specific near-infrared light, and has properties that block specific near-infrared light, and the spectral curve does not easily shift even at high incident angles.
- An imaging device with excellent color reproducibility even for angular light can be obtained.
- the present invention relates to the following optical filter and the like.
- An optical filter comprising a dielectric multilayer film, The optical filter satisfies all of the following spectral characteristics (i-1) to (i-5).
- optical filter (iii-1) Optical density OD 1000 at wavelength 1000 nm / Optical density OD 800 at wavelength 800 nm >10 [10]
- the optical filter according to any one of [1] to [9], wherein the light absorbing material Y 850L is an inorganic material containing ytterbium. [11]
- the optical filter has an absorption layer containing the light absorption material X 800S ,
- the optical filter according to any one of [1] to [11], wherein the absorption layer satisfies all of the following spectral characteristics (ii-1) to (ii-2).
- An ultraviolet-visible spectrophotometer manufactured by Hitachi High-Technologies Corporation, model UH-4150 was used to measure each spectral characteristic. Note that, unless the incident angle is specified, the spectral characteristics are values measured at an incident angle of 0 degrees (perpendicular to the main surface of the optical filter).
- the dyes used in each example are as follows.
- Compound 1 (squarylium compound): Synthesized based on US Pat. No. 5,543,086.
- Compound 2 squarylium compound: Synthesized based on International Publication No. 2017/135359.
- Compound 3 (merocyanine compound): Synthesized based on German Patent Publication No. 10109243.
- Compound 4 (cyanine compound): Synthesized based on Dyes and Pigments 73 (2007) 344-352.
- Compound 5 (squarylium compound): Synthesized based on Japanese Patent Application Publication No. 2020-31198. Note that Compound 1, Compound 2, Compound 4, and Compound 5 are near-infrared absorbing dyes (NIR dyes), and Compound 3 is a near-ultraviolet absorbing dye (UV dye).
- NIR dyes near-infrared absorbing dyes
- UV dye near-ultraviolet absorbing dye
- Y 850L ⁇ Spectral characteristics of near-infrared absorption glass (light absorption material Y 850L )>
- Yb ytterbium-containing glass having the composition shown in Table 2 below was produced with reference to Japanese Patent Application Laid-open No. 61-163138 and Japanese Patent Application Publication No. 56-78447.
- the reflectance curve was measured, and the optical density was calculated from the obtained transmittance.
- Table 3 Table 3 below. Note that the spectral characteristics shown in the table below were evaluated based on internal transmittance in order to avoid the influence of reflection at the air interface and glass interface.
- Internal transmittance (%) ⁇ Actually measured transmittance (0deg) / (100 - reflectance (5deg) ) ⁇ ⁇ 100
- the spectral transmittance curves of Yb-containing glasses 1 to 3 and alkali glass are shown in FIG. 3
- the optical density curves of Yb-containing glasses 1 to 3 are shown in FIG. 4
- the spectral transmittance curve of Yb-containing glass 4 is shown in FIG.
- the optical density curves of the Yb-containing glass 4 are shown in FIG. 6, respectively.
- ⁇ Spectral characteristics of near-infrared absorbing ceramics (light absorbing material Y850L )> As near-infrared absorbing ceramics, 10% Yb:YAG ceramics (manufactured by Kamishima Kagaku) and 5% Yb:YAG ceramics (manufactured by Kamishima Kagaku), which are polycrystalline sintered bodies containing ytterbium, were prepared. Note that "%" here refers to the doping amount of Yb, that is, the composition ratio of Yb to the element in the base material to be substituted, and the unit is at %.
- YAG since Y out of 12 Y 3 Al 5 O is substituted with Yb, it refers to the value of [Yb/(Yb+Y)] ⁇ 100.
- Yb YAG ceramics
- Internal transmittance (%) ⁇ Actually measured transmittance (0deg) / (100 - reflectance (5deg) ) ⁇ ⁇ 100 Further, the spectral transmittance curves of 10% Yb:YAG ceramics and 5% Yb:YAG ceramics are shown in FIG. 7, and the optical density curves of 10% Yb:YAG ceramics and 5% Yb:YAG ceramics are shown in FIG. 8, respectively.
- Spectral characteristics of absorption layer Mix any of the dyes of Compounds 1 to 5 to a polyimide resin solution prepared in the same manner as when calculating the spectral characteristics of the above compound at the concentrations listed in the table below, and stir and dissolve at 50 ° C. for 2 hours. A coating solution was thus obtained. The resulting coating solution was applied to alkali glass (manufactured by SCHOTT, D263 glass, thickness 0.2 mm) by a spin coating method to form an absorption layer having the thickness shown in the table below. The spectral transmittance curve and spectral reflectance curve of the obtained absorption layer in the wavelength range of 350 to 1200 nm were measured using an ultraviolet-visible spectrophotometer.
- Example 2-1 Spectral characteristics of optical filter>
- a first dielectric multilayer film (reflective film) was formed by alternately stacking SiO 2 and TiO 2 on one surface of an infrared absorbing glass (Yb-containing glass 1) by vapor deposition.
- Yb-containing glass 1 an infrared absorbing glass
- a resin solution was applied to the surface of the first dielectric multilayer film, and the organic solvent was removed by sufficient heating to form an absorption layer with a thickness of 1.3 ⁇ m.
- a second dielectric multilayer film (antireflection film) was formed on the surface of the absorption layer by alternately stacking SiO 2 and TiO 2 by vapor deposition.
- Example 2-2 Optical filter 2-2 was produced in the same manner as Example 2-1 except that the infrared absorbing glass was changed from Yb-containing glass 1 to Yb-containing glass 2.
- Example 2-3 Optical filter 2-3 was produced in the same manner as Example 2-1 except that the infrared absorbing glass was changed from Yb-containing glass 1 to Yb-containing glass 3.
- Optical filter 2-4 was prepared in the same manner as Example 2-1, except that the infrared absorbing glass (Yb-containing glass 1) was changed to non-absorbing glass (alkali glass, manufactured by SCHOTT, D263, 0.3 mm). Manufactured.
- Example 2-5 The infrared absorbing glass (Yb-containing glass 1) was changed to a non-absorbing glass (alkali glass, made by SCHOTT, D263, 0.2 mm), and the absorption layer was changed from Example 1-1 to Example 1-2 with a thickness of 1.5 ⁇ m.
- Optical filter 2-5 was manufactured in the same manner as Example 2-1 except for the following changes.
- Example 2-6 A first dielectric multilayer film (reflective film) is formed by alternately layering SiO 2 and TiO 2 on one surface of non-absorbing glass (alkali glass, manufactured by SCHOTT, D263, 0.2 mm) by vapor deposition. was formed. A second dielectric multilayer film (antireflection film) was formed on the other surface of the non-absorbing glass by alternately stacking SiO 2 and TiO 2 by vapor deposition. Through the above steps, optical filter 2-6 was manufactured.
- non-absorbing glass alkali glass, manufactured by SCHOTT, D263, 0.2 mm
- Optical filter 2-7 was manufactured in the same manner as Example 2-1 except that the light absorbing material Y850L was changed from Yb-containing glass 1 to Yb-containing glass 4.
- Optical filter 2-8 was manufactured in the same manner as Example 2-1 except that the light absorbing material Y 850L was changed from Yb-containing glass 1 to 10% Yb:YAG ceramics.
- Optical filter 2-9 was manufactured in the same manner as Example 2-1 except that the light-absorbing material Y 850L was changed from Yb-containing glass 1 to 5% Yb:YAG ceramics.
- the table below shows the reflectance of each of the above optical filters when measured using the first dielectric multilayer film as the incident surface.
- the spectral transmittance curve at an incident angle of 0 degrees and 35 degrees in the wavelength range of 350 to 1200 nm and the spectral reflection at an incident angle of 5 degrees were determined using a UV-visible spectrophotometer. The rate curve was measured. From the obtained spectral characteristic data, the characteristics shown in Tables 6 and 7 below were calculated. Further, spectral transmittance (reflectance) curves of the optical filters of Examples 2-1 to 2-9 are shown in FIGS. 11 to 19, respectively.
- Examples 2-1 to 2-3 and 2-7 to 2-8 are examples, and Examples 2-4 to 2-6 and 2-9 are comparative examples.
- the optical filters of Examples 2-1, 2-2, and 2-3 have excellent transmittance for visible light and near-infrared light of 800 to 1000 nm, especially 800 to 900 nm, and It can be seen that this optical filter has excellent light-shielding properties for external light, especially in the wavelength range of 1050 to 1200 nm, and also has a small shift in the spectral curve even at high incident angles.
- Example 2-4 which does not use the light absorption material Y 850L (ytterbium-containing glass) and blocks light in the wavelength region longer than 850 nm by the reflection characteristics of the dielectric multilayer film,
- Example 2-5 which does not use the light absorption material Y 850L (ytterbium-containing glass) and blocks light in the wavelength region longer than 850 nm by the absorption characteristics of the near-infrared light absorption dye, the maximum transmittance T 800-1000 (0 deg. ) MAX was less than 60%, resulting in low near-infrared light transmittance.
- Example 2 where a part of the near-infrared light region was blocked only by the reflective properties of the dielectric multilayer film without using the light-absorbing material Y 850L (ytterbium-containing glass) and the light-absorbing material X 800S (near-infrared light-absorbing dye) -6 optical filter exceeds
- the optical filters of Examples 2-7 and 8 also have excellent transmittance for visible light and near-infrared light of 800 to 1000 nm, especially 800 to 900 nm, and have excellent transparency for other near-infrared light, especially 1050 nm. It can be seen that this optical filter has excellent light blocking properties in the wavelength region of ⁇ 1200 nm, and further shows a small shift in the spectral curve even at high incident angles.
- Example 2-9 in which 5% Yb:YAG ceramics was used as the light-absorbing material Y 850L , absorption near 1000 nm by the light-absorbing material Y 850L was insufficient, so
- the optical filter of the present invention has excellent transmittance of visible light and specific near-infrared light, and has properties of blocking other near-infrared light. In recent years, performance has been increasing, and it is useful for information acquisition devices such as cameras and sensors for transportation aircraft.
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| WO2015056734A1 (ja) * | 2013-10-17 | 2015-04-23 | Jsr株式会社 | 光学フィルター、固体撮像装置およびカメラモジュール |
| WO2017030174A1 (ja) * | 2015-08-20 | 2017-02-23 | 旭硝子株式会社 | 光学フィルタおよび撮像装置 |
| JP2017216678A (ja) * | 2016-05-27 | 2017-12-07 | パナソニックIpマネジメント株式会社 | 撮像システム |
| WO2018043500A1 (ja) * | 2016-08-31 | 2018-03-08 | 株式会社大真空 | 光学フィルタ |
| WO2018155634A1 (ja) * | 2017-02-24 | 2018-08-30 | 株式会社オプトラン | カメラ構造、撮像装置 |
| JP2021006901A (ja) * | 2019-06-27 | 2021-01-21 | Jsr株式会社 | 光学フィルターおよびその用途 |
| WO2022075291A1 (ja) * | 2020-10-09 | 2022-04-14 | Agc株式会社 | 光学フィルタ |
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| WO2015056734A1 (ja) * | 2013-10-17 | 2015-04-23 | Jsr株式会社 | 光学フィルター、固体撮像装置およびカメラモジュール |
| WO2017030174A1 (ja) * | 2015-08-20 | 2017-02-23 | 旭硝子株式会社 | 光学フィルタおよび撮像装置 |
| JP2017216678A (ja) * | 2016-05-27 | 2017-12-07 | パナソニックIpマネジメント株式会社 | 撮像システム |
| WO2018043500A1 (ja) * | 2016-08-31 | 2018-03-08 | 株式会社大真空 | 光学フィルタ |
| WO2018155634A1 (ja) * | 2017-02-24 | 2018-08-30 | 株式会社オプトラン | カメラ構造、撮像装置 |
| JP2021006901A (ja) * | 2019-06-27 | 2021-01-21 | Jsr株式会社 | 光学フィルターおよびその用途 |
| WO2022075291A1 (ja) * | 2020-10-09 | 2022-04-14 | Agc株式会社 | 光学フィルタ |
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