WO2023207159A1 - 离子源腔体、离子源和质谱仪 - Google Patents

离子源腔体、离子源和质谱仪 Download PDF

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Publication number
WO2023207159A1
WO2023207159A1 PCT/CN2022/141100 CN2022141100W WO2023207159A1 WO 2023207159 A1 WO2023207159 A1 WO 2023207159A1 CN 2022141100 W CN2022141100 W CN 2022141100W WO 2023207159 A1 WO2023207159 A1 WO 2023207159A1
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Prior art keywords
mounting
ion source
hole
cavity
electrode
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PCT/CN2022/141100
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English (en)
French (fr)
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黄晓圳
施继坚
黄飞鸿
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中元汇吉生物技术股份有限公司
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Publication of WO2023207159A1 publication Critical patent/WO2023207159A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers

Definitions

  • the invention belongs to the technical field of mass spectrometry analysis, specifically an ion source cavity, an ion source and a mass spectrometer.
  • FIG. 1-5 it is a schematic structural diagram of an existing ion source.
  • the existing ion source includes an ion source lower chamber 1.
  • the bottom of the ion source lower chamber 1 is provided with a bottom hole 17.
  • An ion source seat 2 is installed in the bottom hole 17.
  • An ion channel 3 is provided above the ion source seat 2.
  • the ion channel 3 extends upward and extends out of the lower ion source cavity 1.
  • An upper ion source cavity 4 is provided above the lower ion source cavity 1.
  • the portion of the ion channel 3 extending out of the lower ion source cavity 1 is located in the ion source.
  • a mounting plate 5 for fixing the ion channel 3 is provided in the upper chamber 4 of the ion source.
  • the lower chamber 1 of the ion source generally adopts a spindle structure, and there are mounting arc surfaces 6 on both sides of the top of the lower chamber 1 of the ion source.
  • the two mounting arc surfaces 6 are respectively provided with High-voltage vacuum electrode 7 and LED light source 8, one of the installation arc surfaces 6 is provided with an excitation light path assembly 10, and the high-voltage vacuum electrode 7 and LED light source 8 are respectively provided on both sides of the excitation light path assembly 10; the other installation arc surface 6 is provided with There is a video collection component 9, and high-voltage vacuum electrodes 7 and LED light sources 8 are respectively arranged on both sides of the video collection component 9.
  • the ion source base 2 is provided with an excitation channel 12 arranged coaxially with the excitation light path assembly 10, a video acquisition channel 11 arranged coaxially with the video acquisition assembly 9, and two optical fiber interfaces 13 for connection with the LED light source 8; the ion channel 3 is provided with a lens electrode 14, and the high-voltage vacuum electrode 7 is connected to the lens electrode 14.
  • the high-voltage vacuum electrode 7, LED light source 8, excitation light path component 10 and video collection component 9 are all set on the mounting arc surface 6, and the corresponding mounting holes need to be processed on the mounting arc surface 6, which is not only difficult to process, but also difficult to ensure processing accuracy;
  • the high-voltage vacuum electrode 7 is set on the mounting arc surface 6 and points toward the ion source seat 2, while the lens electrode 14 is set on the ion channel 3. This results in a large misalignment between the high-voltage vacuum electrode 7 and the lens electrode 14.
  • the electrode 7 needs to be bent upward before it can be connected to the lens electrode 14;
  • An upper ion source cavity 4 also needs to be provided above the lower ion source cavity 1.
  • the lower ion source cavity 1 is installed on the top cover 16 of the vacuum chamber 15.
  • a sealing structure is provided between the upper chamber 4 and between the lower chamber 1 of the ion source and the top cover 16, but there is still a risk of leakage; at the same time, there must be an assembly error between the lower chamber 1 of the ion source and the upper chamber 4 of the ion source. , resulting in assembly errors in ion channel 3.
  • the existing spindle-shaped lower chamber of the ion source has the advantages of compact structure, small size, light weight, less consumables, and convenient installation, positioning and sealing.
  • vacuuming it is found that the vacuum between the lower chamber of the ion source and the lower part There is a large pressure difference between the chambers; through analysis, it was found that the bottom space of the lower chamber of the existing ion source is smaller, that is, the flow area of the bottom hole is smaller. After installing the ion source seat, the flow area of the bottom hole is further reduced. This flow area is smaller than the flow area between the ion channel and the upper cavity of the ion source. This results in the gap between the vacuum chamber and the ion source during vacuuming. There is a large pressure difference between the chambers under the source.
  • the object of the present invention is to provide an ion source cavity, an ion source and a mass spectrometer that can make the vacuum degree more uniform.
  • the present invention first proposes an ion source cavity, which includes a cavity body.
  • the cavity body is provided with an inner cavity with a bottom opening, and the contour cut on the inner cavity by any horizontal plane is square; the cavity
  • the bottom opening of the body body forms a bottom hole, and the top surface of the cavity body is provided with a top hole connected with the inner cavity.
  • the area of the bottom hole is greater than or equal to the area cut by any horizontal plane on the inner cavity. The area enclosed by the square outline.
  • the bottom hole includes a mounting area and a flow-through area.
  • a first mounting seat for installing the ion source seat is provided in the installation area.
  • the flow-through area of the flow-through area is greater than or equal to the flow-through area of the top hole. area.
  • the bottom of the chamber body extends outward to form a top cover for covering the vacuum chamber.
  • the cavity body is provided with side walls respectively located on both sides of the top hole.
  • the side wall is parallel to the axis of the top hole.
  • the second mounting seats are provided with mounting slopes, and one of the mounting slopes is provided with a mounting bracket for installing the excitation device.
  • the excitation light path mounting hole of the optical path component, and the other mounting slope is provided with a video component mounting hole for installing the video collection component.
  • the side walls are provided with electrode mounting holes for installing high-voltage vacuum electrodes.
  • electrode mounting holes There are two electrode mounting holes and they are respectively provided on the two side walls.
  • the side wall is provided with light source mounting holes for installing LED light sources.
  • the invention also provides an ion source, including the ion source cavity as mentioned above.
  • the bottom hole includes a mounting area and a flow-passing area, a first mounting seat is provided in the mounting area, and an ion source seat is mounted on the first mounting seat.
  • the cavity body is provided with side walls respectively located on both sides of the top hole; the ion source base is provided with an excitation channel and a video acquisition channel; and above the two side walls, there are respectively located
  • the second mounting base on both sides of the top hole is provided with a mounting ramp.
  • One of the mounting ramps is provided with an excitation light path mounting hole, and the other mounting ramp is provided with a video component mounting hole.
  • the excitation light path mounting hole is mounted with an excitation light path component corresponding to the excitation channel
  • the video component mounting hole is mounted with a video capture component corresponding to the video capture channel.
  • the ion source seat is provided with two optical fiber interfaces; the side wall is provided with two light source installation holes, and an LED light source is installed on the light source installation hole.
  • the LED light source is connected to the corresponding optical fiber interface. They are connected by optical fiber.
  • an ion channel is installed on the ion source seat, and a lens electrode is provided on the ion channel; an electrode mounting hole is provided on the side wall, and a high-voltage vacuum electrode is installed on the electrode mounting hole. The electrode is connected to the lens electrode.
  • the present invention also proposes a mass spectrometer, including the ion source as described above, a vacuum chamber is provided below the cavity body, and the cavity body is connected to the vacuum chamber through the bottom hole. , a flight tube is provided above the ion source, and the cavity body is connected with the flight tube through the top hole.
  • the cross-section of the inner cavity of the cavity body is square, that is, the inner cavity is in the shape of a cube.
  • the square-shaped inner cavity is large in size and heavy in weight. , many consumables and difficulty in sealing, etc., but the area of the bottom hole can be set to be greater than or equal to the cross-sectional area at any position of the inner cavity, so that there will be no dead corners such as corners between the inner cavity and the bottom hole.
  • the top hole The air in the flight tube installed above the hole enters the cavity through the top hole, and the gas in the cavity is discharged through the bottom hole and then through the vacuum chamber below. Since the area of the bottom hole is larger and there is no dead angle between the inner cavity and the bottom hole, it is ensured
  • the vacuum degree in the vacuum chamber is consistent with the vacuum degree in the chamber body, which can make the vacuum degree more uniform.
  • the bottom of the cavity body extends outward to form a top cover, and the top cover is used to cover the vacuum chamber.
  • the sealing assembly structure between the cavity body and the top cover is reduced, and the sealing assembly structure can be reduced. Further reduce leakage points and improve assembly accuracy.
  • the area of the bottom hole can be easily increased;
  • the high-voltage vacuum electrode is introduced into the cavity body through the electrode mounting hole on the side wall, and then connected to the lens electrode. Since the position of the electrode mounting hole on the side wall can be flexible adjustment, so that the electrode mounting hole can be set in a position that is convenient for connecting to the lens electrode. At the same time, because the side wall is parallel to the axis of the top hole, the space in the cavity body can be larger, and it is also convenient for the high-voltage vacuum electrode and the lens electrode. connection operation;
  • the optical fiber is introduced from the light source installation hole and connected to the optical fiber interface. Since the position of the light source installation hole on the side wall can be flexibly adjusted, This allows the optical fiber to be connected to the corresponding optical fiber interface without spatial distortion.
  • Figure 1 is a schematic structural diagram of an existing ion source
  • Figure 2 is a cross-sectional view along line A-A of Figure 1;
  • Figure 3 is the right view of Figure 1;
  • Figure 4 is a B-B cross-sectional view of Figure 1;
  • Figure 5 is a bottom view of Figure 1;
  • Figure 6 is a schematic structural diagram of an embodiment of the ion source of the present invention.
  • Figure 7 is a top view of Figure 6;
  • Figure 8 is a rotated view of the top view of Figure 7;
  • Figure 9 is a D-D cross-sectional view of Figure 8.
  • Figure 10 is a schematic structural diagram of the ion source cavity in this embodiment.
  • Figure 11 is a rear view of Figure 10;
  • Figure 12 is an upper isometric view of the ion source cavity in this embodiment
  • Figure 13 is a lower isometric view of the ion source cavity in this embodiment.
  • Figure 14 is a schematic structural diagram of an embodiment of the mass spectrometer of the present invention.
  • Figure 15 is a physical diagram of the mass spectrometer when it is evacuated.
  • 20-cavity body 21-first mounting seat; 22-top hole; 23-side wall; 24-second mounting seat; 25-mounting slope; 26-video component mounting hole; 27-excitation light path mounting hole; 28 -Electrode mounting hole; 29-Light source mounting hole; 30-Inner cavity; 31-Flight tube.
  • the ion source of this embodiment includes the ion source cavity.
  • the ion source cavity of this embodiment includes a cavity body 20.
  • the cavity body 20 is provided with an inner cavity 30 with a bottom opening.
  • the contour cut on the inner cavity 30 on any horizontal plane is a square; the cavity body 20
  • the bottom opening of 20 forms a bottom hole 17.
  • the top surface of the cavity body 20 is provided with a top hole 22 connected with the inner cavity 30.
  • the area of the bottom hole 17 is greater than or equal to the square profile cut on the inner cavity by any horizontal plane. The area enclosed by the line.
  • the cross-section of the inner cavity of the cavity body of this embodiment is square, that is, the inner cavity is in the shape of a cube.
  • the square-shaped inner cavity has the disadvantages of large volume, heavy weight, many consumables, and It is not easy to seal, etc., but the area of the bottom hole can be set to be greater than or equal to the cross-sectional area at any position of the inner cavity, so that there will be no dead corners such as corners between the inner cavity and the bottom hole.
  • the bottom hole 17 includes a mounting area 17a and a flow-passing area 17b.
  • the mounting area 17a is provided with a first mounting seat 21 for installing the ion source base 2.
  • the flow-passing area of the flow-passing area 17b is greater than or equal to that of the top hole 22.
  • the flow area is shown in Figure 11.
  • the first mounting base 21 is provided in the mounting area 17a of this embodiment, and the ion source base 2 is mounted on the first mounting base 21.
  • the bottom hole is divided into a flow area and an installation area.
  • the ion source seat is installed in the installation area.
  • the flow area is mainly used for gas circulation.
  • the air in the flight tube installed above the top hole can quickly enter the inner cavity through the top hole, and then be discharged through the bottom hole through the vacuum chamber below, further improving the vacuum degree in the vacuum chamber to be consistent with the vacuum degree in the cavity body. properties, which can make the vacuum degree more uniform.
  • the bottom of the cavity body 20 extends outward to form a top cover 16 for covering the vacuum chamber 15 , and the top cover 16 is used for covering the vacuum chamber 15 , as shown in FIG. 7 .
  • the sealing assembly structure between the cavity body 20 and the top cover 16 is reduced, which can further reduce leakage points and improve assembly accuracy.
  • the area of the bottom hole can be easily increased.
  • the cavity body 20 is provided with side walls 23 respectively located on both sides of the top hole 22 .
  • the side wall 23 is parallel to the axis of the top hole 22. This can increase the size of the internal space of the cavity body 20 and facilitate operations such as wiring.
  • the two side walls 23 or above the two side walls 23 are respectively provided with second mounting seats 24 located on both sides of the top hole 22.
  • the second mounting seats 24 are provided with mounting slopes 25, one of which is on the mounting slope 25.
  • the second mounting seat 24 of this embodiment is provided on the upper part of the corresponding side wall 23 .
  • the ion source seat 2 of this embodiment is equipped with an ion channel 3, and the ion channel 3 is provided with a lens electrode 14; the side wall 23 is provided with an electrode mounting hole 28 for installing the high-voltage vacuum electrode 7.
  • the electrode mounting hole is There are two numbers 28 and they are respectively arranged on the two side walls 23 correspondingly. That is, the high-voltage vacuum electrode 7 is installed on the electrode mounting hole 28 of this embodiment, and the high-voltage vacuum electrode 7 is connected to the lens electrode 14 .
  • the high-voltage vacuum electrode is introduced into the cavity body through the electrode mounting hole on the side wall, and then connected to the lens electrode.
  • the electrode mounting hole can be arranged in a position convenient for connecting to the lens electrode, thereby avoiding large bending of the high-voltage vacuum electrode 7.
  • the space in the cavity body can be larger. , and also facilitates the connection operation between the high-voltage vacuum electrode and the lens electrode.
  • the side wall 23 is provided with light source mounting holes 29 for installing the LED light source 8.
  • the two light source mounting holes 29 are respectively located on both sides of the axis of the top hole 22. That is, the LED light source 8 is installed on the light source installation hole 29 of this embodiment, and the LED light source 8 is connected to the corresponding optical fiber interface 13 using optical fibers.
  • the optical fiber is introduced from the light source mounting hole and connected to the optical fiber interface. Since the position of the light source mounting hole on the side wall can be flexibly adjusted, it can The optical fiber is connected to the corresponding optical fiber interface without spatial distortion.
  • two light source mounting holes 29 are provided on one side wall 23 .
  • FIG 14 it is a schematic structural diagram of an embodiment of the mass spectrometer of the present invention.
  • the mass spectrometer of this embodiment includes the ion source described above in this embodiment. Specifically, a vacuum chamber is provided below the cavity body 20, and the cavity body 20 is connected to the vacuum chamber 15 through the bottom hole 17. A flight tube 31 is provided above the ion source, and the cavity body 20 passes through the vacuum chamber 17. The top hole 22 is connected with the flight tube 31 .
  • the bottom of the cavity body 20 extends outward to form a top cover 16 for covering the vacuum chamber 15 , and the top cover 16 covers the vacuum chamber 15 .
  • FIG. 15 it is a physical picture of the mass spectrometer when it is evacuated.
  • the ion source of this embodiment is installed on the lower vacuum chamber, and the flight tube 31 is installed on the top hole 22 .
  • the vacuum pump is connected to the vacuum chamber below, and vacuum gauges are installed on the top surface of the ion source chamber 20 and the top of the flight tube 31 respectively.
  • the vacuum gauge installed on the top surface of the ion source cavity 20 is the lower vacuum gauge
  • the vacuum gauge installed on the top surface of the flight tube 31 is the upper vacuum gauge.
  • the brand of the vacuum pump is Edwards
  • the model is nEXT300
  • the ultimate vacuum degree is 2*10 -10 mbar.
  • the brands of the two vacuum gauges are: Edwards, and the models are: nEXT300 and AIM-X-NW25. Start the vacuum pump to evacuate, and run the vacuum pump for the same time under the same working conditions.
  • the vacuum degree of the mass spectrometer using the ion source of this embodiment and the vacuum degree of the mass spectrometer using the existing spindle ion source are obtained, as shown in Table 1. shown.

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Abstract

本发明公开了一种离子源腔体，包括腔体本体，所述腔体本体内设有底部开口的内腔，任意水平面在所述内腔上截得的廓线为方形；所述腔体本体的底部开口形成底孔，所述腔体本体的顶面上设有与所述内腔相连通的顶孔，所述底孔的面积大于等于任意水平面在所述内腔上截得的方形廓线围成的面积。本发明还公开了一种离子源和质谱仪。本发明的离子源腔体，抽真空时，顶孔上方安装的飞行管内的空气经顶孔进入腔体内，腔体内的气体通过底孔再经下方的真空腔室排出，由于底孔的面积更大且内腔与底孔之间无死角，保证真空腔室内的真空度与腔体本体内的真空度一致性，即可使真空度更加均匀。

Description

离子源腔体、离子源和质谱仪
本发明要求于2022年4月29日向中国国家知识产权局提交的申请号为202210467725.6、发明名称为“离子源腔体、离子源和质谱仪”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明属于质谱分析技术领域，具体的为一种离子源腔体、离子源和质谱仪。
背景技术
如图1-5所示，为现有的一种离子源的结构示意图。现有的离子源包括离子源下腔体1，离子源下腔体1的底部设有底孔17，底孔17内安装有离子源座2，离子源座2的上方设有离子通道3，离子通道3向上延伸伸出离子源下腔体1外，离子源下腔体1的上方设有离子源上腔体4，离子通道3延伸伸出离子源下腔体1外的部分位于离子源上腔体4内，并在离子源上腔体4设置用于固定离子通道3的安装板5。
具体的，现有技术中，离子源下腔体1一般采用纺锤体结构，并在离子源下腔体1的顶部两侧分别设有安装弧面6，两个安装弧面6上分别设有高压真空电极7和LED光源8，其中一个安装弧面6上设有激发光路组件10，高压真空电极7和LED光源8分别设置在激发光路组件10的两侧；另一个安装弧面6上设有视频采集组件9，高压真空电极7和LED光源8分别设置在视频采集组件9的两侧。
离子源座2上设有与激发光路组件10同轴设置的激发通道12、与视频采集组件9同轴设置的视频采集通道11以及两个用于与LED光源8连接的光纤接口13；离子通道3上设有透镜电极14，高压真空电极7与透镜电极14相连。
现有的离子源虽然在一定程度上能够满足质谱检测的使用要求，但仍存在以下不足：
1)高压真空电极7、LED光源8、激发光路组件10和视频采集组件9均设置在安装弧面6，需在安装弧面6对应加工安装孔，不仅加工困难，而且难以保证加工精度；
2)由于激发光路组件10与激发通道12同轴设置、视频采集组件9与视频采集通道11同轴设置，从而导致两个LED光源8的光纤与光纤接口13之间存在错位，光纤需要通过空间扭曲后才能安装在光纤接口上；
3)高压真空电极7设置在安装弧面6上并指向离子源座2，而透镜电极14设置离子通道3上，如此导致高压真空电极7与透镜电极14之间存在较大的错位，高压真空电极7需要向上折弯后才能与透镜电极14相连；
4)在离子源下腔体1上方还需要设置离子源上腔体4，同时离子源下腔体1安装在真空腔室15的顶盖16上，虽然在离子源下腔体1与离子源上腔体4之间以及离子源下腔体1与顶盖16之间设置了密封结构，但仍存在泄漏风险；同时离子源下腔体1与离子源上腔体4之间必然存在装配误差，导致离子通道3存在装配误差。
发明内容
现有的呈纺锤体的离子源下腔体，具有结构紧凑、体积小、重量轻、耗材少以及安装定位和密封方便的优点，但在抽真空时，发现离子源下腔体与下部的真空腔室之间存在较大的压差；通过分析发现，现有的离子源下腔体的底部空间较小，也即底孔的过流面积较小，在离子源下腔体的底孔内安装离子源座后，进一步减小了底孔的过流面积较小，该过流面积小于离子通道与离子源上腔体之间的过流面积，从而导致抽真空时，真空腔室与离子源下腔体之间存在较大压差。
有鉴于此，本发明的目的在于提供一种离子源腔体、离子源和质谱仪，可使真空度更加均匀。
为达到上述目的，本发明提供如下技术方案：
本发明首先提出了一种离子源腔体，包括腔体本体，所述腔体本体内设有底部开口的内腔，任意水平面在所述内腔上截得的廓线为方形；所述腔体本体的底部开口形成底孔，所述腔体本体的顶面上设有与所述内腔相连通的顶孔，所述底孔的面积大于等于任意水平面在所述内腔上截得的方形廓线围成的面积。
进一步，所述底孔包括安装区和过流区，所述安装区内设有用于安装离子源座的第一安装座，所述过流区的过流面积大于等于所述顶孔的过流面积。
进一步，所述腔体本体的底部向外延伸形成用于盖在真空腔室上的顶盖。
进一步，所述腔体本体上设有分别位于所述顶孔两侧的侧壁。
进一步，所述侧壁与所述顶孔的轴线平行。
进一步，两个所述侧壁的上方分别设有位于所述顶孔两侧的第二安装座，所述第二安装座上设有安装斜面，其中一个所述安装斜面上设有用于安装激发光路组件的激发光路安装孔，另一个所述安装斜面上设有用于安装视频采集组件的视频组件安装孔。
进一步，所述侧壁上设有用于安装高压真空电极的电极安装孔，所述电极安装孔设为两个并分别对应设置在两个所述侧壁上。
进一步，所述侧壁上设有用于安装LED光源的光源安装孔，所述光源安装孔设为两个，两个所述光源安装孔设置在一个所述侧壁上，或两个所述光源安装孔分别设置在两个所述侧 壁上；在垂直于所述侧壁的视图方向上，两个所述光源安装孔分别位于所述顶孔轴线的两侧。
本发明还提出了一种离子源，包括如上所述的离子源腔体。
进一步，所述底孔包括安装区和过流区，所述安装区内设有第一安装座，所述第一安装座上安装有离子源座。
进一步，所述腔体本体上设有分别位于所述顶孔两侧的侧壁；所述离子源座上设有激发通道和视频采集通道；两个所述侧壁的上方分别设有位于所述顶孔两侧的第二安装座，所述第二安装座上设有安装斜面，其中一个所述安装斜面上设有激发光路安装孔、另一个所述安装斜面上设有视频组件安装孔，所述激发光路安装孔上安装有与所述激发通道相对应的激发光路组件，所述视频组件安装孔上安装有与所述视频采集通道相对应的视频采集组件。
进一步，所述离子源座上设有两个光纤接口；所述侧壁上设有两个光源安装孔，所述光源安装孔上安装有LED光源，所述LED光源与对应的所述光纤接口之间采用光纤相连。
进一步，所述离子源座上安装有离子通道，所述离子通道上设有透镜电极；所述侧壁上设有电极安装孔，所述电极安装孔上安装有高压真空电极，所述高压真空电极与所述透镜电极相连。
本发明还提出了一种质谱仪，包括如上所述的离子源，所述腔体本体的下方设有真空腔室，且所述腔体本体通过所述底孔与所述真空腔室相连通，所述离子源的上方设有飞行管，所述腔体本体通过所述顶孔与所述飞行管相连通。
本发明的有益效果在于：
本发明的离子源腔体，腔体本体的内腔的横截面为方形，即内腔为方体形，相较于现有的纺锤形内腔，方体形的内腔虽然存在体积大、重量重、耗材多以及不易密封等不足，但可以将底孔的面积设置为大于等于内腔任意位置处的横截面积，使内腔与底孔之间不会存在转角等死角，抽真空时，顶孔上方安装的飞行管内的空气经顶孔进入腔体内，腔体内的气体通过底孔再经下方的真空腔室排出，由于底孔的面积更大且内腔与底孔之间无死角，保证真空腔室内的真空度与腔体本体内的真空度一致性，即可使真空度更加均匀。
本发明的离子源腔体还具有以下技术效果：
1)将底孔分为过流区和安装区，离子源座安装在安装区内，过流区主要用于气体流通，通过将过流区的过流面积设置为大于等于顶孔的过流面积，进一步使顶孔上方安装的飞行管内的空气能够通过顶孔快速进入内腔，而后通过底孔再经下方的真空腔室排出，进一步提高真空腔室内的真空度与腔体本体内的真空度一致性，也即可使真空度更加均匀；
2)腔体本体的底部向外延伸形成顶盖，顶盖用于盖在真空腔室上，如此，相较于现有技 术，减少了腔体本体与顶盖之间的密封装配结构，能够进一步减小泄漏点和提高装配精度，另外，还可方便地增大底孔的面积；
3)通过在侧壁上或侧壁上方设置第二安装座，并在第二安装座上设置安装斜面用于安装激发光路组件和视频采集组件，相较于现有技术中的安装弧面，不仅激发光路安装孔和视频组件安装孔的加工更加方便，而且也更能保证加工精度；
4)通过在侧壁上设置电极安装孔，从而将高压真空电极通过侧壁上的电极安装孔引入到腔体本体内，再与透镜电极相连，由于电极安装孔在侧壁上的位置可以灵活调整，从而可以使电极安装孔设置在便于与透镜电极相连的位置区域，同时由于侧壁与顶孔的轴线平行，可使腔体本体内的空间更大，也便于高压真空电极与透镜电极的连接操作；
5)通过在侧壁上设置光源安装孔，从而将LED光源安装在光源安装孔上后，将光纤从光源安装孔引入与光纤接口相连，由于光源安装孔在侧壁上的位置可以灵活调整，从而可以使光纤在不经过空间扭曲的条件下与对应的光纤接口相连。
附图说明
为了使本发明的目的、技术方案和有益效果更加清楚，本发明提供如下附图进行说明：
图1为现有的一种离子源的结构示意图；
图2为图1的A-A剖视图；
图3为图1的右视图；
图4为图1的B-B剖视图；
图5为图1的仰视图；
图6为本发明离子源实施例的结构示意图；
图7为图6的俯视图；
图8为图7的俯视图的旋转视图；
图9为图8的D-D剖视图；
图10为本实施例离子源腔体的结构示意图；
图11为图10的后视图；
图12为本实施例离子源腔体的上轴测图；
图13为本实施例离子源腔体的下轴测图；
图14为本发明质谱仪实施例的结构示意图；
图15为对质谱仪抽真空时的实物图。
附图标记说明：
1-离子源下腔体；2-离子源座；3-离子通道；4-离子源上腔体；5-安装板；6-安装弧面；7-高压真空电极；8-LED光源；9-视频采集组件；10-激发光路组件；11-视频采集通道；12-激发通道；13-光纤接口；14-透镜电极；15-真空腔室；16-顶盖；17-底孔；17a-安装区；17b-过流区；
20-腔体本体；21-第一安装座；22-顶孔；23-侧壁；24-第二安装座；25-安装斜面；26-视频组件安装孔；27-激发光路安装孔；28-电极安装孔；29-光源安装孔；30-内腔；31-飞行管。
具体实施方式
下面结合附图和具体实施例对本发明作进一步说明，以使本领域的技术人员可以更好的理解本发明并能予以实施，但所举实施例不作为对本发明的限定。
如图6所示，为本发明离子源实施例的结构示意图。本实施例的离子源，包括所述的离子源腔体。具体的，本实施例的离子源腔体，包括腔体本体20，腔体本体20内设有底部开口的内腔30，任意水平面在内腔30上截得的廓线为方形；腔体本体20的底部开口形成底孔17，腔体本体20的顶面上设有与内腔30相连通的顶孔22，底孔17的面积大于等于任意水平面在所述内腔上截得的方形廓线围成的面积。本实施例的腔体本体的内腔的横截面为方形，即内腔为方体形，相较于现有的纺锤形内腔，方体形的内腔虽然存在体积大、重量重、耗材多以及不易密封等不足，但可以将底孔的面积设置为大于等于内腔任意位置处的横截面积，使内腔与底孔之间不会存在转角等死角，抽真空时，顶孔上方安装的飞行管内的空气经顶孔进入腔体内，腔体内的气体通过底孔再经下方的真空腔室排出，由于底孔的面积更大且内腔与底孔之间无死角，保证真空腔室内的真空度与腔体本体内的真空度一致性，即可使真空度更加均匀。
优选的，底孔17包括安装区17a和过流区17b，安装区17a内设有用于安装离子源座2的第一安装座21，过流区17b的过流面积大于等于顶孔22的过流面积，如图11所示。具体的，本实施例的安装区17a内设有第一安装座21，第一安装座21上安装有离子源座2。将底孔分为过流区和安装区，离子源座安装在安装区内，过流区主要用于气体流通，通过将过流区的过流面积设置为大于等于顶孔的过流面积，进一步使顶孔上方安装的飞行管内的空气能够通过顶孔快速进入内腔，而后通过底孔再经下方的真空腔室排出，进一步提高真空腔室内的真空度与腔体本体内的真空度一致性，也即可使真空度更加均匀。
进一步，腔体本体20的底部向外延伸形成用于盖在真空腔室15上的顶盖16，顶盖16用于盖在真空腔室15上，如图7所示。如此，相较于现有技术，减少了腔体本体20与顶盖 16之间的密封装配结构，能够进一步减小泄漏点和提高装配精度，另外，还可方便地增大底孔的面积。
进一步，腔体本体20上设有分别位于顶孔22两侧的侧壁23。本实施例的侧壁23与顶孔22的轴线平行，如此，可增大腔体本体20的内部空间大小，便于连线等操作。
进一步，两个侧壁23上或两个侧壁23的上方分别设有位于顶孔22两侧的第二安装座24，第二安装座24上设有安装斜面25，其中一个安装斜面25上设有用于安装激发光路组件10的激发光路安装孔27，另一个安装斜面25上设有用于安装视频采集组件9的视频组件安装孔26，即本实施例的激发光路安装孔27上安装有与激发通道12相对应的激发光路组件10，视频组件安装孔26上安装有与视频采集通道11相对应的视频采集组件9。通过在侧壁上或侧壁上方设置第二安装座，并在第二安装座上设置安装斜面用于安装激发光路组件和视频采集组件，相较于现有技术中的安装弧面，不仅激发光路安装孔和视频组件安装孔的加工更加方便，而且也更能保证加工精度。本实施例的第二安装座24设置在对应的侧壁23的上部。
进一步，本实施例的离子源座2上安装有离子通道3，所述离子通道3上设有透镜电极14；侧壁23上设有用于安装高压真空电极7的电极安装孔28，电极安装孔28设为两个并分别对应设置在两个侧壁23上。即本实施例的电极安装孔28上安装有高压真空电极7，高压真空电极7与透镜电极14相连。通过在侧壁上设置电极安装孔，从而将高压真空电极通过侧壁上的电极安装孔引入到腔体本体内，再与透镜电极相连，由于电极安装孔在侧壁上的位置可以灵活调整，从而可以使电极安装孔设置在便于与透镜电极相连的位置区域，避免高压真空电极7出现较大的折弯，同时由于侧壁与顶孔的轴线平行，可使腔体本体内的空间更大，也便于高压真空电极与透镜电极的连接操作。
进一步，侧壁23上设有用于安装LED光源8的光源安装孔29，光源安装孔29设为两个，两个光源安装孔29设置在一个侧壁23上，或两个光源安装孔29分别设置在两个侧壁23上；在垂直于侧壁23的视图方向上，两个光源安装孔29分别位于顶孔22轴线的两侧。即本实施例的光源安装孔29上安装有LED光源8，LED光源8与对应的光纤接口13之间采用光纤相连。通过在侧壁上设置光源安装孔，从而将LED光源安装在光源安装孔上后，将光纤从光源安装孔引入与光纤接口相连，由于光源安装孔在侧壁上的位置可以灵活调整，从而可以使光纤在不经过空间扭曲的条件下与对应的光纤接口相连。本实施例的两个光源安装孔29设置在一个侧壁23上。
如图14所示，为本发明质谱仪实施例的结构示意图。本实施例的质谱仪，包括本实施例如上所述的离子源。具体的，腔体本体20的下方设有真空腔室，且腔体本体20通过底孔17 与所述真空腔室15相连通，离子源的上方设有飞行管31，腔体本体20通过所述顶孔22与所述飞行管31相连通。
进一步，腔体本体20的底部向外延伸形成用于盖在真空腔室15上的顶盖16，顶盖16盖在真空腔室15上。
实验验证
如图15所示，为对质谱仪抽真空时的实物图。该质谱仪中，将本实施例的离子源安装在下方的真空腔室上，在顶孔22上安装飞行管31。抽真空时，真空泵与下方的真空腔室相连，在离子源腔体20的顶面以及飞行管31的顶部分别安装真空计。令：安装在离子源腔体20顶面的真空计为下真空计，安装在飞行管31顶面的真空计为上真空计。具体的，本实施例中，真空泵的品牌为：爱德华(Edwards)，型号为：nEXT300，极限真空度为2*10 -10mbar。两个真空计的品牌为：爱德华(Edwards)，型号为：nEXT300，AIM-X-NW25。启动真空泵抽真空，以相同的工况条件运行真空泵相同的时间后，分别得到采用本实施例离子源的质谱仪的真空度和采用现有纺锤体离子源的质谱仪的真空度，如表1所示。
表1相同工况条件下抽真空的结果对比
Figure PCTCN2022141100-appb-000001
由表1可知，对采用本实施例离子源的质谱仪抽真空后，飞行管31顶部的真空度与离子源腔体20内的真空度之间的比值为1.07；对采用现有的纺锤体离子源的质谱仪抽真空后，飞行管31顶部的真空度与离子源腔体20内的真空度之间的比值为2.17。由此可知，本实施例的离子源腔体、离子源和质谱仪，可使真空度更加均匀。
以上所述实施例仅是为充分说明本发明而所举的较佳的实施例，本发明的保护范围不限于此。本技术领域的技术人员在本发明基础上所作的等同替代或变换，均在本发明的保护范围之内。本发明的保护范围以权利要求书为准。

Claims (12)

  1. 一种离子源腔体，其特征在于：包括腔体本体(20)，所述腔体本体(20)内设有底部开口的内腔(30)，任意水平面在所述内腔(30)上截得的廓线为方形；所述腔体本体(20)的底部开口形成底孔(17)，所述腔体本体(20)的顶面上设有与所述内腔相连通的顶孔(22)，所述底孔(17)的面积大于等于任意水平面在所述内腔上截得的方形廓线围成的面积。
  2. 根据权利要求1所述的离子源腔体，其特征在于：所述底孔(17)包括安装区(17a)和过流区(17b)，所述安装区(17a)内设有用于安装离子源座(2)的第一安装座(21)，所述过流区(17b)的过流面积大于等于所述顶孔(22)的过流面积。
  3. 根据权利要求1所述的离子源腔体，其特征在于：所述腔体本体(20)的底部向外延伸形成用于盖在真空腔室(15)上的顶盖(16)。
  4. 根据权利要求1所述的离子源腔体，其特征在于：所述腔体本体(20)上设有分别位于所述顶孔(22)两侧的侧壁(23)。
  5. 根据权利要求4所述的离子源腔体，其特征在于：所述侧壁(23)与所述顶孔(22)的轴线平行。
  6. 根据权利要求4所述的离子源腔体，其特征在于：两个所述侧壁(23)的上方分别设有位于所述顶孔(22)两侧的第二安装座(24)，所述第二安装座(24)上设有安装斜面(25)，其中一个所述安装斜面(25)上设有用于安装激发光路组件(10)的激发光路安装孔(27)，另一个所述安装斜面(25)上设有用于安装视频采集组件(9)的视频组件安装孔(26)。
  7. 根据权利要求4所述的离子源腔体，其特征在于：所述侧壁(23)上设有用于安装高压真空电极(7)的电极安装孔(28)，所述电极安装孔(28)设为两个并分别对应设置在两个所述侧壁(23)上。
  8. 根据权利要求4所述的离子源腔体，其特征在于：所述侧壁(23)上设有用于安装LED光源(8)的光源安装孔(29)，所述光源安装孔(29)设为两个，两个所述光源安装孔(29)设置在一个所述侧壁(23)上，或两个所述光源安装孔(29)分别设置在两个所述侧壁(23)上；在垂直于所述侧壁(23)的视图方向上，两个所述光源安装孔(29)分别位于所述顶孔(22)轴线的两侧。
  9. 一种离子源，其特征在于：包括如权利要求1-8任一项所述的离子源腔体。
  10. 根据权利要求8所述的离子源，其特征在于：所述底孔(17)包括安装区(17a)和过流区(17b)，所述安装区(17a)内设有第一安装座(21)，所述第一安装座(21)上安装有离子源座(2)。
  11. 根据权利要求10所述的离子源，其特征在于：所述腔体本体(20)上设有分别位于 所述顶孔(22)两侧的侧壁(23)；
    所述离子源座(2)上设有激发通道(12)和视频采集通道(11)；两个所述侧壁(23)的上方分别设有位于所述顶孔(22)两侧的第二安装座(24)，所述第二安装座(24)上设有安装斜面(25)，其中一个所述安装斜面(25)上设有激发光路安装孔(27)、另一个所述安装斜面(25)上设有视频组件安装孔(26)，所述激发光路安装孔(27)上安装有与所述激发通道(12)相对应的激发光路组件(10)，所述视频组件安装孔(26)上安装有与所述视频采集通道(11)相对应的视频采集组件(9)；
    所述离子源座(2)上设有两个光纤接口(13)；所述侧壁(23)上设有两个光源安装孔(29)，所述光源安装孔(29)上安装有LED光源(8)，所述LED光源(8)与对应的所述光纤接口(13)之间采用光纤相连；
    所述离子源座(2)上安装有离子通道(3)，所述离子通道(3)上设有透镜电极(14)；所述侧壁(23)上设有电极安装孔(28)，所述电极安装孔(28)上安装有高压真空电极(7)，所述高压真空电极(7)与所述透镜电极(14)相连。
  12. 一种质谱仪，其特征在于：包括如权利要求9-11任一项所述的离子源，所述腔体本体(20)的下方设有真空腔室，且所述腔体本体(20)通过所述底孔(17)与所述真空腔室(15)相连通，所述离子源的上方设有飞行管(31)，所述腔体本体(20)通过所述顶孔(22)与所述飞行管(31)相连通。
PCT/CN2022/141100 2022-04-29 2022-12-22 离子源腔体、离子源和质谱仪 WO2023207159A1 (zh)

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