WO2023181309A1 - Unité de vibrateur et machine à laver à vide à ultrasons - Google Patents

Unité de vibrateur et machine à laver à vide à ultrasons Download PDF

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Publication number
WO2023181309A1
WO2023181309A1 PCT/JP2022/014181 JP2022014181W WO2023181309A1 WO 2023181309 A1 WO2023181309 A1 WO 2023181309A1 JP 2022014181 W JP2022014181 W JP 2022014181W WO 2023181309 A1 WO2023181309 A1 WO 2023181309A1
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WO
WIPO (PCT)
Prior art keywords
ultrasonic
backing plate
convex surface
dish
front plate
Prior art date
Application number
PCT/JP2022/014181
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English (en)
Japanese (ja)
Inventor
祥博 青木
信長 渋谷
Original Assignee
本多電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 本多電子株式会社 filed Critical 本多電子株式会社
Priority to PCT/JP2022/014181 priority Critical patent/WO2023181309A1/fr
Publication of WO2023181309A1 publication Critical patent/WO2023181309A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction

Definitions

  • the present invention relates to a transducer unit that emits ultrasonic waves from an ultrasonic transducer, and an ultrasonic vacuum cleaner using the same.
  • Ultrasonic cleaning machines that clean objects to be cleaned (ultrasonic cleaning) by irradiating ultrasonic waves into a cleaning liquid have been put into practical use (for example, see Patent Document 1).
  • Ultrasonic cleaning uses a combination of the physical action of ultrasonic waves and the chemical action of cleaning liquid to efficiently clean even the smallest details of objects with complex shapes, such as precision mechanical parts, optical parts, It is essential for manufacturing liquid crystal displays, semiconductors, etc.
  • the ultrasonic cleaner described in Patent Document 1 includes a dish-shaped diaphragm also called a radiant plate.
  • the dish-shaped diaphragm also serves as the bottom of a cleaning tank in which cleaning liquid is stored, and a plurality of ultrasonic transducers are attached to the outer surface (convex surface).
  • the ultrasonic vibrator is bonded to the dish-shaped diaphragm using an adhesive such as epoxy resin, stud bolts, or the like.
  • the ultrasonic waves emitted from each ultrasonic transducer are emitted from the inner surface (concave surface) of the dish-shaped diaphragm and are concentrated at the center of the cleaning tank.
  • JP2008-86898A (Claim 1, Figure 1, Figure 2, etc.)
  • the present invention has been made in view of the above problems, and its purpose is to provide a transducer unit and an ultrasonic vacuum washer that can prevent damage to the ultrasonic transducer.
  • the invention according to claim 1 has a bottom portion having a first convex surface having a constant curvature on the outside, a side portion extending in the vertical direction, and a second convex surface having a larger curvature than the first convex surface. It has a structure in which a dish-shaped diaphragm is provided with a convex surface on the outside and a connection part that connects the bottom part and the side part, and a drive part is sandwiched between a front plate and a backing plate and fixed with bolts.
  • the front plate includes a plurality of bolted Langevin-type ultrasonic transducers attached to the first convex surface, the transducer unit irradiating ultrasonic waves from the radiation surface of the front plate; has a diameter that is 1/4 or more of the wavelength ⁇ of the driving frequency of the ultrasonic transducer, and the backing plate is tightened by screwing a nut onto the protruding portion of the bolt inserted through the backing plate.
  • the gist of the vibrator unit is that the backing plate and the nut are formed using a metal material having higher rigidity than the metal material constituting the front plate.
  • the backing plate and nut of the ultrasonic vibrator are formed using a metal material having higher rigidity than the metal material that constitutes the front plate of the ultrasonic vibrator, By tightening and fixing the backing plate with nuts, the bending rigidity of the backing plate can be increased. Accordingly, since the bending vibration component of the backing plate is reduced, the bending displacement of the backing plate is also reduced. As a result, the stress caused by the bending vibration component is less likely to act on the driving section of the ultrasonic transducer, so that damage to the ultrasonic transducer can be prevented.
  • the ultrasonic transducer since the ultrasonic transducer is less likely to be damaged, the ultrasonic transducer is susceptible to the vibration mode of the dish-shaped diaphragm, and specifically, the diameter of the radiation surface is 1/4 or more of the wavelength ⁇ .
  • An ultrasonic transducer can be employed as the ultrasonic transducer according to claim 1. Since this ultrasonic transducer has a relatively large diameter, it is possible to reduce the number of ultrasonic transducers attached to the first convex surface of the dish-shaped diaphragm. Therefore, the manufacturing cost of the vibrator unit can be reduced.
  • the radiation surface is a concave surface having the same curvature as the first convex surface, and the concave surface is connected to the first convex surface through an adhesive layer having a uniform thickness. Its gist is that it is joined to a convex surface.
  • the distance from the first convex surface of the dish-shaped diaphragm is constant at any part of the radiation surface (concave surface) of the ultrasonic transducer, irradiation from the radiation surface is constant.
  • the transmission efficiency of ultrasonic waves can be made uniform.
  • the radiation surface and the first convex surface are bonded via the adhesive layer having a uniform thickness, high bonding strength can be easily imparted between them.
  • the invention according to claim 3 is the invention according to claim 1 or 2, wherein a stud bolt is provided protruding from the first convex surface, a bolt hole opening at the radial surface is provided in the front plate, and the bolt hole is provided with a bolt hole opening at the radial surface.
  • the gist is that the ultrasonic vibrator is attached to the plate-shaped diaphragm by screwing the stud bolt.
  • the ultrasonic transducer can be mounted by screwing the stud bolts protruding from the first convex surface of the dish-shaped diaphragm into the bolt holes of the ultrasonic transducer. Increases strength. Therefore, the ultrasonic transducer can be reliably attached to the dish-shaped diaphragm.
  • the plurality of ultrasonic transducers are divided into a plurality of groups, and each group has an electrical wiring system. This is the summary.
  • the gist of the invention according to claim 5 is that, in any one of claims 1 to 4, a flange is formed at the upper end of the side part, and a cleaning tank main body is joined onto the flange. do.
  • the invention according to claim 6 includes a cleaning tank including the vibrator unit according to any one of claims 1 to 5 and a cleaning tank main body joined to the upper side of the dish-shaped diaphragm,
  • An ultrasonic vacuum cleaner that irradiates ultrasonic waves from a radiation surface of the front plate into the cleaning tank while the inside of the cleaning tank is depressurized, the diameter of the radiation surface being equal to the driving frequency of the ultrasonic vibrator.
  • the backing plate is tightened and fixed by screwing a nut onto a protruding portion of the bolt inserted through the backing plate, and the backing plate and the nut
  • the gist is an ultrasonic vacuum washer characterized by being formed using a metal material having higher rigidity than the metal material constituting the front plate.
  • the backing plate and nut of the ultrasonic vibrator are formed using a metal material having higher rigidity than the metal material constituting the front plate of the ultrasonic vibrator, By tightening and fixing the backing plate with nuts, the bending rigidity of the backing plate can be increased. Accordingly, since the bending vibration component of the backing plate is reduced, the bending displacement of the backing plate is also reduced. As a result, the stress caused by the bending vibration component is less likely to act on the driving section of the ultrasonic transducer, so that damage to the ultrasonic transducer can be prevented. Therefore, by using this ultrasonic vibrator in the vibrator unit, the durability of the ultrasonic vacuum washer can be improved.
  • ultrasonic transducer is less likely to be damaged, even if the pressure inside the cleaning tank is reduced and the bending displacement of the dish-shaped diaphragm becomes large, ultrasonic waves can be transmitted from the radiation surface of the ultrasonic transducer into the cleaning tank. Irradiation can be performed reliably, and the object to be cleaned can be precisely cleaned.
  • the ultrasonic transducer since the ultrasonic transducer is less likely to be damaged, the ultrasonic transducer is susceptible to the vibration mode of the dish-shaped diaphragm, and specifically, the diameter of the radiation surface is 1/4 or more of the wavelength ⁇ .
  • An ultrasonic transducer can be employed as the ultrasonic transducer according to claim 6. Since this ultrasonic transducer has a relatively large diameter, it is possible to reduce the number of ultrasonic transducers attached to the first convex surface of the dish-shaped diaphragm. Therefore, the manufacturing cost of the ultrasonic vacuum cleaner can be reduced.
  • FIG. 1 is a schematic configuration diagram showing an ultrasonic vacuum washer in this embodiment.
  • FIG. 3 is a bottom view showing the vibrator unit.
  • FIG. 2 is a perspective view showing a bolted Langevin type ultrasonic transducer.
  • FIG. 4 is a sectional view taken along line AA in FIG. 3.
  • FIG. 3 is a sectional view of a main part showing a connection structure of an ultrasonic transducer to a dish-shaped diaphragm.
  • FIG. 7 is a schematic bottom view showing how groups are arranged in another embodiment.
  • FIG. 7 is a schematic bottom view showing how groups are arranged in another embodiment.
  • the ultrasonic vacuum washer 1 includes a cleaning tank 10 consisting of a vibrator unit 11 and a cleaning tank main body 12. A cleaning liquid W1 is stored in the cleaning tank 10. Further, the transducer unit 11 includes a dish-shaped diaphragm 21 and a plurality of (108 in this embodiment) ultrasonic transducers 30 joined to the dish-shaped diaphragm 21.
  • the ultrasonic vacuum washer 1 of the present embodiment irradiates the cleaning liquid W1 in the cleaning tank 10 with ultrasonic waves from each ultrasonic vibrator 30 in a reduced pressure state in which the inside of the cleaning tank 10 is depressurized. This is a device for cleaning objects to be cleaned 13 housed in a container. Note that the ultrasonic vacuum washer 1 is capable of cleaning the object to be cleaned 13 even in a normal pressure state in which the inside of the cleaning tank 10 is not depressurized or in a pressurized state in which the inside of the cleaning tank 10 is pressurized.
  • the dish-shaped diaphragm 21 constitutes the bottom of the cleaning tank 10, and is made of a metal plate (in this embodiment, a stainless steel plate made of SUS304 or the like).
  • the dish-shaped diaphragm 21 includes a bottom portion 22, a side portion 23 extending in the vertical direction, and a connecting portion 24 connecting the bottom portion 22 and the side portion 23.
  • the bottom portion 22 has a first convex surface 22a having a constant curvature on the outside, and the connecting portion 24 has a second convex surface 24a on the outside having a larger curvature than the first convex surface 22a.
  • a discharge pipe 25 for discharging the cleaning liquid W1 is provided at the center of the bottom portion 22.
  • the discharge pipe 25 projects downward from the first convex surface 22a and communicates between the inside and outside of the dish-shaped diaphragm 21.
  • a flange 26 is formed on the entire upper end portion of the side portion 23, and a plurality of screw holes 27 (see FIG. 2) are provided in the flange 26.
  • the screw holes 27 are arranged at equal angular intervals with respect to the central axis C1 (see FIGS. 1 and 2) of the dish-shaped diaphragm 21.
  • the ultrasonic transducer 30 of this embodiment is a bolted Langevin type transducer, and is sporadically bonded at multiple locations on the bottom 22 of the dish-shaped diaphragm 21. ing. Further, the ultrasonic transducer 30 includes a front mass 31 (front plate), a back mass 32 (backing plate), a driving section 41, and bolts 33.
  • the front mass 31 is arranged on the front end side of the ultrasonic transducer 30, and is configured to emit ultrasonic waves from a radiation surface 34 on the front surface thereof.
  • the front mass 31 is formed to have a circular cross section.
  • the radiation surface 34 is a concave surface having the same curvature as the first convex surface 22a of the dish-shaped diaphragm 21.
  • a plurality of stud bolts 28 are provided to protrude from the first convex surface 22a.
  • the front mass 31 is provided with a bolt hole 35 that opens at the radiation surface 34.
  • the ultrasonic vibrator 30 is attached to the dish-shaped diaphragm 21. Further, the concave surface (radiation surface 34) is bonded to the first convex surface 22a via an adhesive layer 36 (epoxy adhesive in this embodiment) having a uniform thickness.
  • the back mass 32 is arranged on the rear end side of the ultrasonic transducer 30.
  • the drive section 41 is formed by alternately stacking two piezoelectric elements 42 and two electrode plates 43, and is sandwiched between the front mass 31 and the back mass 32. Since the piezoelectric element 42 has an annular shape and the electrode plate 43 has a substantially annular shape with a tab portion in part, the drive section 41 has a bolt insertion hole 44 passing through its center. There is. Each piezoelectric element 42 is polarized in the thickness direction.
  • a female screw hole 37 is formed in the front mass 31 coaxially with the central axis C2 of the ultrasonic transducer 30.
  • the female screw hole 37 communicates with the bolt hole 35 and also with the bolt insertion hole 44 .
  • a through hole 38 is formed in the back mass 32 coaxially with the central axis C2.
  • the through hole 38 communicates with the bolt insertion hole 44 and is open at the rear surface 39.
  • the bolt 33 which has a male thread formed on its outer circumferential surface, is inserted from the back mass 32 side, and its tip reaches the female thread hole 37 on the front mass 31 side through the through hole 38 and the bolt insertion hole 44. There is. Further, the bolt 33 is screwed into the female screw hole 37. Then, by screwing the nut 40 onto the protruding portion of the bolt 33 inserted through the back mass 32, the front mass 31, the drive section 41, and the back mass 32 are tightened and fixed to each other and integrated.
  • the front mass 31 is formed using an aluminum alloy (A5056).
  • the back mass 32 and the nut 40 are formed using a metal material having higher rigidity than the metal material (aluminum alloy) constituting the front mass 31.
  • the back mass 32 is formed using stainless steel (SUS304), and the nut 40 is formed using iron (S25C).
  • SUS304 stainless steel
  • S25C iron
  • the metal material for forming the bolt 33 is arbitrary, stainless steel is used here.
  • the piezoelectric element 42 constituting the drive unit 41 is formed using a lead-free ceramic piezoelectric material, specifically, an alkali niobate ceramic piezoelectric material.
  • a lead-free ceramic piezoelectric material specifically, an alkali niobate ceramic piezoelectric material.
  • the alkali niobate ceramic piezoelectric material includes a potassium sodium niobate (KNN) ceramic piezoelectric material having a perovskite structure and which is a solid solution of potassium niobate and sodium niobate.
  • KNN potassium sodium niobate
  • the piezoelectric element 42 may be formed using a ceramic piezoelectric material containing Pb (lead), such as lead zirconate titanate (PZT).
  • each ultrasonic transducer 30 is divided into four groups A to D. Each group A to D has the same number of ultrasonic transducers 30 (27 in this embodiment). In this embodiment, separate electrical wiring systems (ie, cables, drive control devices, and power supplies) are provided for each group A to D.
  • the ultrasonic vibrators 30 of each group A to D are simultaneously driven based on the drive signal from the drive control device and start vibrating. Then, the ultrasonic waves emitted from the radiation surface 34 of each ultrasonic transducer 30 are emitted from the inner surface (concave surface) of the dish-shaped diaphragm 21 into the cleaning liquid W1, and are concentrated at the center of the cleaning tank 10. At this time, bubbles are generated in the cleaning liquid W1 by the concentrated ultrasonic waves, and the object to be cleaned 13 is cleaned by the impact of the bursting of the bubbles.
  • a sample for measurement was prepared as follows.
  • a vibrator unit similar to the vibrator unit 11 of this embodiment was prepared and used as an example.
  • a plurality of ultrasonic transducers are prepared in which the back masses 32 and nuts 40 of this embodiment are replaced with aluminum alloy back masses (backing plates), and the plurality of prepared ultrasonic transducers are mounted on the dish-shaped diaphragm 21.
  • a vibrator unit was prepared and used as a comparative example.
  • the bending vibration component that causes cracking of the ceramic element is dominant (large) in the dish-shaped diaphragm. It was confirmed that a vibration mode was occurring. Along with this, it was also confirmed that the end face (radiation surface) of the ultrasonic vibrator was displaced obliquely, and that a vertical-bending complex vibration mode was excited in the ultrasonic vibrator. Furthermore, it was also confirmed that stress due to bending vibration components was concentrated on the outer periphery of the drive section. On the other hand, in the example in which the ultrasonic vibrator had a back mass made of stainless steel and a nut made of iron, it was confirmed that the bending vibration component was significantly reduced compared to the comparative example.
  • the bending rigidity EI resistance to bending deformation
  • the bending rigidity EI is derived from the formula (Young's modulus E) ⁇ (secondary moment of area I).
  • the bending rigidity EI becomes approximately 2.7 times.
  • the bending vibration component is reduced, it is considered that stress caused by the bending vibration component can be prevented from destroying the drive section.
  • the back mass 32 and nut 40 of the ultrasonic vibrator 30 are more rigid than the metal material (aluminum alloy) that constitutes the front mass 31 of the ultrasonic vibrator 30. It is made of metal materials (stainless steel, iron) with high resistance. Therefore, by tightening and fixing the back mass 32 with the nut 40, the bending rigidity EI of the back mass 32 can be increased. Accordingly, since the bending vibration component of the back mass 32 is reduced, the bending displacement of the back mass 32 is also reduced. As a result, the stress caused by the bending vibration component is less likely to act on the driving section 41 of the ultrasonic transducer 30, so that damage to the ultrasonic transducer 30 can be prevented.
  • the durability of the ultrasonic vacuum washer 1 can be improved. Furthermore, since the ultrasonic transducer 30 is less likely to be damaged, even if the inside of the cleaning tank 10 is depressurized and the bending displacement of the dish-shaped diaphragm 21 becomes large, the radiation surface 34 of the ultrasonic vibrator 30 can be Ultrasonic waves can be reliably irradiated within 10. Therefore, precision cleaning of the object 13 to be cleaned can be performed reliably.
  • the ultrasonic transducer 30 is less likely to be damaged, the ultrasonic transducer is susceptible to the vibration mode of the dish-shaped diaphragm 21, specifically, the diameter D1 of the radiation surface 34 is 1/1/1 of the wavelength ⁇ .
  • An ultrasonic transducer having a diameter of 4 or more (38 mm or more in this embodiment) can be employed as the ultrasonic transducer 30 of this embodiment. Since this ultrasonic transducer 30 has a relatively large diameter D1, the number of ultrasonic transducers 30 attached to the first convex surface 22a of the dish-shaped diaphragm 21 can be reduced. Therefore, the manufacturing cost of the ultrasonic vacuum cleaner 1 can be reduced.
  • the ultrasonic vacuum cleaner 1 of this embodiment uses an ultrasonic vibrator 30 with a driving frequency of 40 kHz.
  • the object to be cleaned 13 can be precisely cleaned in a short time, and power consumption can be suppressed.
  • the ultrasonic vacuum washer 1 a powerful cleaning effect can be obtained, so the amount of cleaning agent contained in the cleaning liquid W1 can be reduced. In this case, running costs such as cleaning agent costs and disposal costs can be reduced, and the environmental burden can also be reduced.
  • the ultrasonic transducer 30 since the radiation surface 34 of the front mass 31 of the ultrasonic transducer 30 is bonded to the first convex surface 22a of the dish-shaped diaphragm 21 via the adhesive layer 36, the ultrasonic transducer 30 Increased mounting strength. Furthermore, by screwing the stud bolts 28 protruding from the first convex surface 22a into the bolt holes 35 of the front mass 31, the mounting strength of the ultrasonic transducer 30 is further increased. Therefore, the ultrasonic transducer 30 can be reliably attached to the dish-shaped diaphragm 21.
  • the ultrasonic vibrator 30 with a driving frequency of 40 kHz and a diameter D1 of the radiation surface 34 of 45 mm was used, but the diameter D1 is 1 of the wavelength ⁇ .
  • the ultrasonic transducer 30 may be changed to an ultrasonic transducer with a driving frequency of 40 kHz and a radiation surface diameter of 38 mm.
  • the front mass 31 is formed using aluminum alloy (A5056, Young's modulus 71 GPa)
  • the back mass 32 is formed using stainless steel (SUS304, Young's modulus 190 GPa)
  • the nut 40 is made of iron (S25C, Young's modulus 190 GPa). Young's modulus of 205 to 206 GPa), but the invention is not limited to this.
  • the back mass 32 and the nut 40 are made of other metal materials having higher rigidity than the aluminum alloy, specifically, copper (Young's modulus: 117 GPa), brass ( Copper alloys such as Young's modulus 103 to 110 GPa), steel materials such as carbon steel (Young's modulus 205 GPa) and nickel steel (Young's modulus 193 GPa), nickel (Young's modulus 204 GPa), titanium (Young's modulus 106 GPa), titanium alloys (Young's modulus 106 GPa), etc. 106 GPa) or the like.
  • copper Young's modulus: 117 GPa
  • brass Copper alloys such as Young's modulus 103 to 110 GPa
  • steel materials such as carbon steel (Young's modulus 205 GPa) and nickel steel (Young's modulus 193 GPa), nickel (Young's modulus 204 GPa), titanium (Young's modulus 106 GPa), titanium alloy
  • the radiation surface 34 of the front mass 31 is a concave surface having the same curvature as the first convex surface 22a of the dish-shaped diaphragm 21, but the radiation surface 34 is a flat surface. There may be.
  • the plurality of ultrasonic transducers 30 attached to the dish-shaped diaphragm 21 were divided into four groups A to D.
  • each ultrasonic transducer 30 may be divided into five or more groups, or may be divided into three or less groups.
  • each ultrasonic transducer 30 does not need to be divided into a plurality of groups. In this case, all the ultrasonic transducers 30 are driven using one electrical wiring system (cable, drive control device, and power supply device).
  • each ultrasonic transducer 30 was divided into four groups A to D along the diameter direction (vertical direction in FIG. 2) of the dish-shaped diaphragm 21. May be changed.
  • each ultrasonic transducer 30 is divided into a plurality of groups (groups A to D in FIG. 6) arranged at equal angular intervals with respect to the central axis C1 of the dish-shaped diaphragm 21. May be separated.
  • each ultrasonic transducer 30 may be divided into a plurality of groups (groups A to D in FIG. 7) arranged concentrically.
  • the flange 26 of the dish-shaped diaphragm 21 and the lower end of the cleaning tank body 12 were connected by screws, but they may be connected by welding.
  • the driving part is formed by laminating a piezoelectric element and an electrode plate, and the ultrasonic vibrator is moved by the bolt passing through the driving part.
  • a vibrator unit characterized by having a structure in which a face plate and the backing plate are fastened together.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

Le but de la présente divulgation est de fournir une unité de vibrateur dans laquelle des vibrateurs à ultrasons peuvent être empêchés d'être rompus. Une unité de vibrateur 11 selon la présente invention comprend une membrane en forme de cuvette 21 et des vibrateurs à ultrasons 30 et émet des ondes ultrasonores à partir d'une surface d'émission 34 d'une plaque avant des vibrateurs à ultrasons 30. La membrane en forme de cuvette 21 comprend une partie inférieure 22 comportant une première surface convexe 22a sur le côté externe, une partie latérale 23 s'étendant dans la direction verticale, et une partie de liaison 24 comprenant une seconde surface convexe 24a sur le côté externe. Les vibrateurs à ultrasons 30 comportent chacun une structure dans laquelle une unité d'entraînement est prise en sandwich entre la plaque avant et une plaque de support et fixée à un boulon, et la plaque avant est fixée à la première surface convexe 22a. Le diamètre de la surface d'émission 34 est de 1/4 ou plus d'une longueur d'onde λ de la fréquence d'entraînement du vibrateur à ultrasons 30. La plaque de support est fixée et fixée par ajustement par filetage d'un écrou 40 à une partie en saillie du boulon insérée à travers la plaque de support. La plaque de support et l'écrou 40 sont formés au moyen d'un matériau métallique présentant une rigidité supérieure à celle d'un matériau métallique qui forme la plaque avant. Dessin sélectionné : FIG. 1 :
PCT/JP2022/014181 2022-03-24 2022-03-24 Unité de vibrateur et machine à laver à vide à ultrasons WO2023181309A1 (fr)

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Application Number Priority Date Filing Date Title
PCT/JP2022/014181 WO2023181309A1 (fr) 2022-03-24 2022-03-24 Unité de vibrateur et machine à laver à vide à ultrasons

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Application Number Priority Date Filing Date Title
PCT/JP2022/014181 WO2023181309A1 (fr) 2022-03-24 2022-03-24 Unité de vibrateur et machine à laver à vide à ultrasons

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008086898A (ja) * 2006-09-30 2008-04-17 Honda Electronic Co Ltd 超音波洗浄装置
WO2014084184A1 (fr) * 2012-11-29 2014-06-05 株式会社ダイセル Corps élastique pour actionneur, et actionneur piézoélectrique
JP2017099566A (ja) * 2015-11-30 2017-06-08 セイコーエプソン株式会社 圧電デバイス、圧電モジュール及び電子機器
JP2021137750A (ja) * 2020-03-06 2021-09-16 日本製鉄株式会社 超音波洗浄装置及び超音波洗浄方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008086898A (ja) * 2006-09-30 2008-04-17 Honda Electronic Co Ltd 超音波洗浄装置
WO2014084184A1 (fr) * 2012-11-29 2014-06-05 株式会社ダイセル Corps élastique pour actionneur, et actionneur piézoélectrique
JP2017099566A (ja) * 2015-11-30 2017-06-08 セイコーエプソン株式会社 圧電デバイス、圧電モジュール及び電子機器
JP2021137750A (ja) * 2020-03-06 2021-09-16 日本製鉄株式会社 超音波洗浄装置及び超音波洗浄方法

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