WO2023177258A1 - Ioniseur à ultraviolets flexible sous vide pour chambre à vide - Google Patents

Ioniseur à ultraviolets flexible sous vide pour chambre à vide Download PDF

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Publication number
WO2023177258A1
WO2023177258A1 PCT/KR2023/003587 KR2023003587W WO2023177258A1 WO 2023177258 A1 WO2023177258 A1 WO 2023177258A1 KR 2023003587 W KR2023003587 W KR 2023003587W WO 2023177258 A1 WO2023177258 A1 WO 2023177258A1
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WO
WIPO (PCT)
Prior art keywords
vacuum chamber
vacuum
flexible
vacuum ultraviolet
ionizer
Prior art date
Application number
PCT/KR2023/003587
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English (en)
Korean (ko)
Inventor
이동훈
이병준
이수영
박진철
정동길
허시환
임지형
Original Assignee
(주)선재하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)선재하이테크 filed Critical (주)선재하이테크
Publication of WO2023177258A1 publication Critical patent/WO2023177258A1/fr

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/36—Controlling

Definitions

  • the present invention relates to a flexible vacuum ultraviolet ionizer for a vacuum chamber, and more specifically, to a static electricity removal device using vacuum ultraviolet rays having a flexible cable that can be inserted into a vacuum chamber.
  • a static electricity removal device to prevent problems such as adhesion of fine dust or damage to devices due to static electricity during the processing of various materials or products such as LCD, OLED, wafers, various substrates, sheet structures, and various film structures. It is common to install .
  • the present applicant has proposed an invention called 'Static electricity removal device using vacuum ultraviolet rays' in Republic of Korea Patent No. 10-2065347.
  • it is connected to a vacuum chamber, which is the problem above, and uses vacuum ultraviolet rays.
  • the conventional static electricity removal device using vacuum ultraviolet rays has a problem in that it is difficult to accurately irradiate vacuum ultraviolet rays toward a wafer or display panel that requires static electricity removal in a vacuum chamber. .
  • Patent Document 1 Republic of Korea Patent No. 10-2065347 (2020.01.07.)
  • Patent Document 2 Republic of Korea Patent Publication No. 10-2021-0119203 (2021.10.05.)
  • the purpose of the present invention is to solve the problems described above, and is a flexible device that can be inserted into a vacuum chamber and bent at an arbitrary angle toward a charged object such as a wafer or display panel that needs to be destaticized in the vacuum chamber.
  • a static electricity removal device using vacuum ultraviolet rays with a cable To provide a static electricity removal device using vacuum ultraviolet rays with a cable.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber is a flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber,
  • a head part including a deuterium lamp that emits ultraviolet rays, a connector part coupled to the head part and allowing the vacuum ultraviolet ray radiation direction of the head part to be bent at an arbitrary angle toward a charged object, and one internal side coupled to the connector part.
  • It is provided in and includes a controller unit including a high voltage generator for applying a high voltage to the vacuum ultraviolet lamp.
  • At least one O-ring for vacuum is provided on the upper part of the vacuum ultraviolet ray lamp.
  • the connector part is characterized by including a flexible pipe that can be bent at an arbitrary angle.
  • the flexible pipe is characterized in that it is made of a material that has a fixing force after being bent at an arbitrary angle.
  • the connector part is characterized in that it includes a vacuum flange on one side for coupling to the vacuum chamber.
  • the connector part is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the high voltage generator may be separately provided inside or outside the controller unit.
  • the connector part and the controller part are formed between the connector part and the controller part to be electrically connected to a plurality of connector parts, and further includes a distributor for applying the high voltage generated from the controller part to the plurality of head parts.
  • the distributor may be selectively provided separately in the vacuum chamber or outside the vacuum chamber.
  • the distributor when provided in a vacuum chamber, it is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the distributor may be integrated with the high voltage generator or may be provided separately.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber is a flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber, which radiates vacuum ultraviolet rays within the vacuum chamber.
  • a head portion including an excimer lamp, a connector portion coupled to the head portion and allowing the vacuum ultraviolet ray radiation direction of the head portion to be bent at an arbitrary angle toward a charged object, and a connector portion coupled to the connector portion and provided on one side of the interior of the head portion. It includes a controller unit including a high frequency generator unit that applies radio frequency (RF) power to the excimer lamp.
  • RF radio frequency
  • At least one O-ring for vacuum is provided on the upper part of the vacuum ultraviolet ray lamp.
  • the connector part is characterized by including a flexible pipe that can be bent at an arbitrary angle.
  • the flexible pipe is characterized in that it is made of a material that has a fixing force after being bent at an arbitrary angle.
  • the connector part is characterized in that it includes a vacuum flange on one side for coupling to the vacuum chamber.
  • the connector part is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the high frequency generator may be separately provided inside or outside the controller unit.
  • a plurality of connector parts are formed to be electrically connectable between the connector part and the controller part, and the connector part further includes a distributor for applying high frequency power generated from the controller part to the plurality of head parts.
  • the distributor may be selectively provided separately in the vacuum chamber or outside the vacuum chamber.
  • the distributor when provided in a vacuum chamber, it is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the distributor may be integrated with the high frequency generator or may be provided separately.
  • the head part is characterized by including a trimmer capacitor provided to match the impedance between the excimer lamp and the high frequency generator.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber is configured to provide a head part inside the vacuum chamber that eliminates static electricity using vacuum ultraviolet rays, so that the head part can be used without the ionizer itself being directly built into the vacuum chamber. There is an effect of performing static electricity removal by inserting the bay.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber improves static electricity elimination performance by variably adjusting the direction of vacuum ultraviolet ray radiation within the vacuum chamber toward the charged object through a flexible cable in the head portion inserted into the vacuum chamber. There is an effect that can be achieved.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber according to the present invention is equipped with an RF coil and a trimmer capacitor to match the impedance between the two points of the high frequency generator and the vacuum ultraviolet lamp.
  • Figure 1 is a schematic diagram showing the configuration of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 2 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 3 is an exploded perspective view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 4 is a conceptual diagram illustrating a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 5 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • Figure 6 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • Figure 7 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • first, second, etc. are used to describe various components, these components are of course not limited by these terms. These terms are merely used to distinguish one component from another. Therefore, of course, the first component mentioned below may also be the second component within the technical spirit of the present invention.
  • FIG. 1 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention
  • FIG. 2 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention
  • 3 is an exploded perspective view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber largely includes a head portion 100, a connector portion 200, and a controller portion 300.
  • the head unit 100 includes a head housing 110 and a vacuum ultraviolet (VUV) lamp 120.
  • VUV vacuum ultraviolet
  • the size and shape of the head housing 110 used may be partially changed depending on the equipment, its structure, or static electricity removal specifications.
  • the head housing 110 may be formed in a structure that can be attached to and detached from the connector unit 200.
  • the vacuum ultraviolet ray lamp 120 is inserted and mounted inside the head unit 100 to irradiate vacuum ultraviolet rays to the entire object to be charged, and may mean a vacuum ultraviolet ray generator.
  • the vacuum ultraviolet ray lamp 120 may refer to a deuterium (D2) lamp, but is not limited thereto.
  • the head part 100 has a first connector 130 formed on the top so that it can be coupled to the connector part 200 through the first connector 130.
  • the first connector 130 may refer to a coaxial cable connector (BNC cable) for connecting the connector unit 200 through a cable.
  • At least one O-ring such as a vacuum O-ring 150, may be provided on the upper part of the vacuum ultraviolet lamp, but is not limited to this.
  • An O-ring 140 or the like may be provided at the bottom of the ultraviolet lamp to prevent damage.
  • one end of the connector portion 200 is coupled to the head portion 100 so that the vacuum ultraviolet ray radiation direction of the head portion 100 can be bent at an arbitrary angle toward the charged object.
  • the connector portion 200 may be formed in a tube shape of a certain length and made of a flexible material, but is not limited thereto, and preferably includes a flexible pipe 210 that can be bent at an arbitrary angle. It comes true.
  • the flexible pipe 210 may refer to a pipe that can be bent at any angle, including a bellow conduit, but is not limited thereto.
  • the flexible tube 210 is made of a material that has a fixing force after being bent at an arbitrary angle, allowing the angle of the head part 100 coupled to one end of the connector part 200 to be adjusted to charge the vacuum ultraviolet ray radiation direction. Allows variable adjustment toward an object.
  • the connector unit 200 electrically connects the head unit 100 and the controller unit 300 through a cable 220 including a voltage cable, etc. inside the flexible tube 210.
  • a second connector 230 is formed at the top of the connector unit 200 (toward the controller unit).
  • the second connector 230 may refer to a coaxial cable connector (BNC cable) for connecting the cable 220.
  • Figure 4 is a conceptual diagram illustrating a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • the connector portion 200 is fixedly coupled to the vacuum chamber by a vacuum flange 240.
  • the connector portion 200 when it passes through or is coupled to a vacuum chamber, it can be coupled to the vacuum chamber by utilizing a view port or feed-through generally formed in the vacuum chamber.
  • the vacuum flange 240 may be provided at a view port or feed-through.
  • the vacuum flange 240 is necessary not only to maintain the vacuum state of the vacuum chamber, but also to securely couple the connector portion 200 to the vacuum chamber after the head portion 100 is inserted into the vacuum chamber. do.
  • the vacuum chamber is formed in a structure that communicates with the outside so that it can be coupled to the vacuum flange 240 and maintain a vacuum state through the vacuum flange 240. Therefore, the cable 220 can pass outside the vacuum chamber and be connected to the controller unit 300.
  • the controller unit 300 is connected to the connector unit 200 and includes a high voltage generator 310 provided on one side of the interior to apply a high voltage to the vacuum ultraviolet lamp 120.
  • the vacuum ultraviolet ray lamp has the same configuration when it is a deuterium lamp.
  • the high voltage generator 310 may be separately provided inside or outside the controller unit 300.
  • the controller unit 300 has a third connector 320 formed on one side and is electrically connected to the second connector 230 through the third connector 320, thereby connecting the connector unit 200 and the controller unit 300. ) is electrically connected.
  • controller unit 300 is a means for controlling voltage application from an external power supply terminal, and controls the operation of the vacuum ultraviolet lamp 120 on/off in real time through the controller unit 300. It is configured to make it possible.
  • Figure 5 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention
  • Figure 6 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber largely includes a head part 100', a connector part 200, and a controller part 300'.
  • the head unit 100' may include a head housing 110 and a vacuum ultraviolet (VUV) lamp 120'.
  • the head housing 110 has the same configuration as the head housing 110 described above with reference to FIGS. 1 to 3, and detailed description thereof will be omitted.
  • vacuum ultraviolet lamp 120' to be described here may refer to an excimer lamp.
  • the excimer lamp 120' refers to a lamp with a sealed structure filled with an inert gas that has no filament inside and can emit gas as a light source without the need for preheating time.
  • the excimer lamp may emit ultraviolet light having a wavelength range of 100 nm to 200 nm depending on the type of inert gas.
  • the excimer lamp 120 includes a discharge tube and an external electrode.
  • the discharge tube may be formed into a communication shape made of a dielectric through a typical dielectric manufacturing process such as ceramic.
  • the dielectric is based on a ceramic material that has both electrical insulation and dielectric properties and includes quartz, glass, aluminum oxide, titanium oxide, magnesium oxide, silicon oxide, silver phosphate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, Iron oxide, lead zirconate titanate, carbon nanotubes, etc. can be used.
  • a discharge space is formed inside the discharge tube, and the discharge space is filled with an inert gas.
  • the external electrode has a cylindrical shape made of a conductive material such as a mesh or thin plate surrounding the discharge tube, and may be made of a metal material such as aluminum.
  • the external electrode is connected to an external voltage generator and a high frequency generator, so that the external electrode can receive power.
  • an inert gas forms excimer molecules (excited state) through a method such as dielectric barrier discharge (DBD), and the excimer When a molecule transitions to its ground state, it emits ultraviolet light with a wavelength of 100 to 200 nm (plasma).
  • DBD dielectric barrier discharge
  • the excimer lamp 120' is formed with an irradiation window on one side through which vacuum ultraviolet rays can pass, and the vacuum ultraviolet rays are irradiated to the outside through the irradiation window.
  • the irradiation window may be coated with magnesium fluoride (MgF2) or calcium fluoride, which has excellent vacuum ultraviolet ray transmittance in the wavelength range.
  • MgF2 magnesium fluoride
  • CaF2 calcium fluoride
  • the excimer lamp 120' may be configured to have its size and shape partially changed depending on the equipment, its structure, or static electricity removal specifications, in addition to having an overall shape similar to ' ⁇ '.
  • the excimer lamp 120' may be formed in an H type similar to 'H'.
  • the head part 110' may further include an impedance matching part.
  • the impedance matching unit is provided to match the impedance between the high frequency generator 310' and the excimer lamp 120'.
  • the impedance matching unit includes an RF ring 160 and an RF coil 170. It can be done. At this time, the excimer lamp 120' has an RF ring 160 formed on the outer peripheral surface.
  • the impedance matching unit is electrically connected to the first connector 130 and may be composed of an RF circuit including an RF coil 170.
  • the impedance matching unit has unique characteristics of the excimer lamp 120', and the difference in impedance appears as an impedance difference between the high frequency generator 310' and the excimer lamp.
  • the impedance matching unit further includes a trimmer capacitor 180 for matching the impedance between the high frequency generator 310' and the excimer lamp by varying the impedance according to the impedance change of the excimer lamp 120'. It can be done.
  • the impedance matching unit includes the RF coil 170 and the trimmer capacitor 180, thereby enabling detailed impedance matching.
  • the connector unit 200 has the same configuration as the connector unit 200 described above with reference to FIGS. 1 to 3, and detailed description thereof will be omitted.
  • the controller unit 300' is connected to the connector unit 200 and internally connects the head unit 100 through the connector unit 200. It includes a high frequency generator (310') that applies high frequency power to the excimer lamp (120').
  • the above-described controller unit 300 does not require high frequency generation when the vacuum ultraviolet ray lamp of the head unit 100 is a deuterium lamp and requires the high voltage generator 310, while the controller unit 300' uses the vacuum ultraviolet ray lamp.
  • the lamp is an excimer lamp, high frequency generation is required and a high frequency generator 310' is required, so the configuration of the controller units 300 and 300' can be changed and applied depending on the vacuum ultraviolet lamp. .
  • the high-frequency generator 310' generates high-frequency waves (RF) through a voltage applied from an external voltage supply source, and may be provided separately inside or outside the controller unit 300'.
  • the high frequency generator 310' is a power supply device that generates an RF signal that oscillates at a high frequency to supply power to the excimer lamp to generate vacuum ultraviolet rays (plasma wavelengths), and although not shown, it oscillates at a high frequency. It may refer to a device that includes an oscillator and a power amplifier that amplifies power to generate high-output RF (Radio Frequency) power.
  • RF Radio Frequency
  • Figure 7 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention has a head portion (100). , 100'), a connector unit 200, a controller unit (300, 300'), and a distributor 400.
  • the head portions (100, 100'), the connector portions (200), and the controller portions (300, 300') are the aforementioned head portions (100, 100'), connector portions (200), and controller portions (300, 300'). ), so detailed description will be omitted.
  • the distributor 400 is formed to be electrically connectable to a plurality of connector parts 200 between the connector part 200 and the controller parts 300, 300', so that the distribution generated from the controller parts 300, 300' High voltage (or high frequency) is applied to a plurality of head parts (100, 100').
  • a fourth connector 410 is formed on one side of the distributor 400 to enable electrical connection with the controller unit 300 located outside the vacuum chamber.
  • the fourth connector 410 can be electrically connected to the third connector 320 of the controller unit 300 or 300' using any one of cables including a radio frequency (RF) cable and a voltage cable.
  • RF radio frequency
  • the distributor 400 may optionally be provided separately in the vacuum chamber or outside the vacuum chamber.
  • the distributor 400 may be provided inside (inside) or outside the vacuum chamber.
  • the distributor 400 When the distributor 400 is provided in a vacuum chamber, it can be combined with the vacuum chamber, for example, using a view port or feed-through formed in the vacuum chamber.
  • one side of the distributor 400 (the fourth connector) is fixedly coupled to the vacuum chamber by the vacuum flange 240, so that the inside of the vacuum chamber is maintained in a vacuum state. make it possible to maintain it.
  • At least two fifth connectors 420 are formed on the other side of the distributor 400.
  • the fifth connector 420 is configured to connect to the second connector 230 side of the connector unit 200, and is intended to electrically connect at least two connector units 200.
  • connecting at least two or more connector parts 200 through the distributor 400 means that it can be connected to two or more head parts 100 and 100'.
  • the distributor 400 can improve static electricity elimination performance by connecting to a plurality of head units 100, 100' through one controller unit 300, 300', and can simplify the configuration in installation. It works.
  • the distributor 400 may be provided separately as described above, but of course, it may be formed integrally with the high voltage generator 310' or the high frequency generator 310'.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber includes a sensor unit for detecting the lighting state of the vacuum ultraviolet lamps (120, 120') inside the head unit (100, 100'). (not shown) may be further included.
  • the sensor unit includes a sensor board equipped with a light-receiving sensor for detecting light, and a light pipe connected to the sensor and the vacuum ultraviolet lamp.
  • the sensor board is connected to the vacuum ultraviolet ray lamp through the light pipe and can detect the lighting state through light transmitted along the light pipe.
  • the sensor board may be formed on the upper side inside the head portion, but the size and shape may be partially changed depending on the structure or static electricity removal specifications of the static electricity removal device, so that the sensor board may be formed on the side portion within the small head portion, and is limited to this. It doesn't work.
  • the light pipe may also have a straight or curved shape depending on the position of the sensor board formed inside the head.
  • the side of the light pipe is structured to block light in order to block the inflow of light from sources other than the light source.
  • the sensor unit may be configured to transmit information to an external control unit, etc. through a separate wired or wireless communication means.

Landscapes

  • Elimination Of Static Electricity (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)

Abstract

La présente invention concerne un ioniseur à ultraviolets sous vide flexible pour une chambre à vide, ayant un câble flexible qui peut être inséré dans une chambre à vide et, plus spécifiquement, un ioniseur à ultraviolets sous vide flexible pour une chambre à vide, l'ioniseur utilisant une lampe à ultraviolets sous vide disposée dans une chambre à vide, et comprenant : une partie tête comprenant une lampe à hydrogène lourd pour émettre des rayons ultraviolets sous vide à l'intérieur de la chambre à vide ; une partie connecteur qui est couplée à la partie tête, et qui permet à la direction d'émission des rayons ultraviolets sous vide de la partie tête d'être pliée à n'importe quel angle vers un objet à électrifier ; et une partie de génération de haute tension qui est couplée à la partie connecteur, et qui est disposée sur un côté interne de celle-ci de façon à appliquer une haute tension à la lampe à ultraviolets sous vide.
PCT/KR2023/003587 2021-12-06 2023-03-17 Ioniseur à ultraviolets flexible sous vide pour chambre à vide WO2023177258A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR20210173224 2021-12-06
KR1020220034179A KR20230085050A (ko) 2021-12-06 2022-03-18 진공 챔버용 플렉시블 진공자외선 이오나이저
KR10-2022-0034179 2022-03-18

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Publication Number Publication Date
WO2023177258A1 true WO2023177258A1 (fr) 2023-09-21

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Application Number Title Priority Date Filing Date
PCT/KR2023/003587 WO2023177258A1 (fr) 2021-12-06 2023-03-17 Ioniseur à ultraviolets flexible sous vide pour chambre à vide

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KR (1) KR20230085050A (fr)
TW (1) TW202339549A (fr)
WO (1) WO2023177258A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004304123A (ja) * 2003-04-01 2004-10-28 Tokyo Electron Ltd 処理装置および処理方法
KR100539359B1 (ko) * 1999-12-28 2005-12-27 쿼크 시스템즈 가부시키가이샤 엑시머 조사 장치
JP2007012467A (ja) * 2005-06-30 2007-01-18 Hamamatsu Photonics Kk 除電装置及びこれを備えたチャンバ
KR20100024886A (ko) * 2008-08-26 2010-03-08 하리슨 도시바 라이팅 가부시키가이샤 자외선 조사 장치
KR20120033290A (ko) * 2010-09-29 2012-04-06 오스람 실바니아 인코포레이티드 무전극 램프를 위한 전력 분할기 회로

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102065347B1 (ko) 2018-02-13 2020-01-13 (주)선재하이테크 진공 자외선을 이용한 정전기 제거장치
KR20210119203A (ko) 2020-03-24 2021-10-05 (주)선재하이테크 진공자외선을 이용한 정전기제거장치의 온오프 제어 시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100539359B1 (ko) * 1999-12-28 2005-12-27 쿼크 시스템즈 가부시키가이샤 엑시머 조사 장치
JP2004304123A (ja) * 2003-04-01 2004-10-28 Tokyo Electron Ltd 処理装置および処理方法
JP2007012467A (ja) * 2005-06-30 2007-01-18 Hamamatsu Photonics Kk 除電装置及びこれを備えたチャンバ
KR20100024886A (ko) * 2008-08-26 2010-03-08 하리슨 도시바 라이팅 가부시키가이샤 자외선 조사 장치
KR20120033290A (ko) * 2010-09-29 2012-04-06 오스람 실바니아 인코포레이티드 무전극 램프를 위한 전력 분할기 회로

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KR20230085050A (ko) 2023-06-13

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