WO2023177258A1 - Flexible vacuum ultraviolet ionizer for vacuum chamber - Google Patents

Flexible vacuum ultraviolet ionizer for vacuum chamber Download PDF

Info

Publication number
WO2023177258A1
WO2023177258A1 PCT/KR2023/003587 KR2023003587W WO2023177258A1 WO 2023177258 A1 WO2023177258 A1 WO 2023177258A1 KR 2023003587 W KR2023003587 W KR 2023003587W WO 2023177258 A1 WO2023177258 A1 WO 2023177258A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum chamber
vacuum
flexible
vacuum ultraviolet
ionizer
Prior art date
Application number
PCT/KR2023/003587
Other languages
French (fr)
Korean (ko)
Inventor
이동훈
이병준
이수영
박진철
정동길
허시환
임지형
Original Assignee
(주)선재하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)선재하이테크 filed Critical (주)선재하이테크
Publication of WO2023177258A1 publication Critical patent/WO2023177258A1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/36—Controlling

Definitions

  • the present invention relates to a flexible vacuum ultraviolet ionizer for a vacuum chamber, and more specifically, to a static electricity removal device using vacuum ultraviolet rays having a flexible cable that can be inserted into a vacuum chamber.
  • a static electricity removal device to prevent problems such as adhesion of fine dust or damage to devices due to static electricity during the processing of various materials or products such as LCD, OLED, wafers, various substrates, sheet structures, and various film structures. It is common to install .
  • the present applicant has proposed an invention called 'Static electricity removal device using vacuum ultraviolet rays' in Republic of Korea Patent No. 10-2065347.
  • it is connected to a vacuum chamber, which is the problem above, and uses vacuum ultraviolet rays.
  • the conventional static electricity removal device using vacuum ultraviolet rays has a problem in that it is difficult to accurately irradiate vacuum ultraviolet rays toward a wafer or display panel that requires static electricity removal in a vacuum chamber. .
  • Patent Document 1 Republic of Korea Patent No. 10-2065347 (2020.01.07.)
  • Patent Document 2 Republic of Korea Patent Publication No. 10-2021-0119203 (2021.10.05.)
  • the purpose of the present invention is to solve the problems described above, and is a flexible device that can be inserted into a vacuum chamber and bent at an arbitrary angle toward a charged object such as a wafer or display panel that needs to be destaticized in the vacuum chamber.
  • a static electricity removal device using vacuum ultraviolet rays with a cable To provide a static electricity removal device using vacuum ultraviolet rays with a cable.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber is a flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber,
  • a head part including a deuterium lamp that emits ultraviolet rays, a connector part coupled to the head part and allowing the vacuum ultraviolet ray radiation direction of the head part to be bent at an arbitrary angle toward a charged object, and one internal side coupled to the connector part.
  • It is provided in and includes a controller unit including a high voltage generator for applying a high voltage to the vacuum ultraviolet lamp.
  • At least one O-ring for vacuum is provided on the upper part of the vacuum ultraviolet ray lamp.
  • the connector part is characterized by including a flexible pipe that can be bent at an arbitrary angle.
  • the flexible pipe is characterized in that it is made of a material that has a fixing force after being bent at an arbitrary angle.
  • the connector part is characterized in that it includes a vacuum flange on one side for coupling to the vacuum chamber.
  • the connector part is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the high voltage generator may be separately provided inside or outside the controller unit.
  • the connector part and the controller part are formed between the connector part and the controller part to be electrically connected to a plurality of connector parts, and further includes a distributor for applying the high voltage generated from the controller part to the plurality of head parts.
  • the distributor may be selectively provided separately in the vacuum chamber or outside the vacuum chamber.
  • the distributor when provided in a vacuum chamber, it is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the distributor may be integrated with the high voltage generator or may be provided separately.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber is a flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber, which radiates vacuum ultraviolet rays within the vacuum chamber.
  • a head portion including an excimer lamp, a connector portion coupled to the head portion and allowing the vacuum ultraviolet ray radiation direction of the head portion to be bent at an arbitrary angle toward a charged object, and a connector portion coupled to the connector portion and provided on one side of the interior of the head portion. It includes a controller unit including a high frequency generator unit that applies radio frequency (RF) power to the excimer lamp.
  • RF radio frequency
  • At least one O-ring for vacuum is provided on the upper part of the vacuum ultraviolet ray lamp.
  • the connector part is characterized by including a flexible pipe that can be bent at an arbitrary angle.
  • the flexible pipe is characterized in that it is made of a material that has a fixing force after being bent at an arbitrary angle.
  • the connector part is characterized in that it includes a vacuum flange on one side for coupling to the vacuum chamber.
  • the connector part is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the high frequency generator may be separately provided inside or outside the controller unit.
  • a plurality of connector parts are formed to be electrically connectable between the connector part and the controller part, and the connector part further includes a distributor for applying high frequency power generated from the controller part to the plurality of head parts.
  • the distributor may be selectively provided separately in the vacuum chamber or outside the vacuum chamber.
  • the distributor when provided in a vacuum chamber, it is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  • the distributor may be integrated with the high frequency generator or may be provided separately.
  • the head part is characterized by including a trimmer capacitor provided to match the impedance between the excimer lamp and the high frequency generator.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber is configured to provide a head part inside the vacuum chamber that eliminates static electricity using vacuum ultraviolet rays, so that the head part can be used without the ionizer itself being directly built into the vacuum chamber. There is an effect of performing static electricity removal by inserting the bay.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber improves static electricity elimination performance by variably adjusting the direction of vacuum ultraviolet ray radiation within the vacuum chamber toward the charged object through a flexible cable in the head portion inserted into the vacuum chamber. There is an effect that can be achieved.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber according to the present invention is equipped with an RF coil and a trimmer capacitor to match the impedance between the two points of the high frequency generator and the vacuum ultraviolet lamp.
  • Figure 1 is a schematic diagram showing the configuration of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 2 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 3 is an exploded perspective view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 4 is a conceptual diagram illustrating a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • Figure 5 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • Figure 6 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • Figure 7 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • first, second, etc. are used to describe various components, these components are of course not limited by these terms. These terms are merely used to distinguish one component from another. Therefore, of course, the first component mentioned below may also be the second component within the technical spirit of the present invention.
  • FIG. 1 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention
  • FIG. 2 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention
  • 3 is an exploded perspective view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber largely includes a head portion 100, a connector portion 200, and a controller portion 300.
  • the head unit 100 includes a head housing 110 and a vacuum ultraviolet (VUV) lamp 120.
  • VUV vacuum ultraviolet
  • the size and shape of the head housing 110 used may be partially changed depending on the equipment, its structure, or static electricity removal specifications.
  • the head housing 110 may be formed in a structure that can be attached to and detached from the connector unit 200.
  • the vacuum ultraviolet ray lamp 120 is inserted and mounted inside the head unit 100 to irradiate vacuum ultraviolet rays to the entire object to be charged, and may mean a vacuum ultraviolet ray generator.
  • the vacuum ultraviolet ray lamp 120 may refer to a deuterium (D2) lamp, but is not limited thereto.
  • the head part 100 has a first connector 130 formed on the top so that it can be coupled to the connector part 200 through the first connector 130.
  • the first connector 130 may refer to a coaxial cable connector (BNC cable) for connecting the connector unit 200 through a cable.
  • At least one O-ring such as a vacuum O-ring 150, may be provided on the upper part of the vacuum ultraviolet lamp, but is not limited to this.
  • An O-ring 140 or the like may be provided at the bottom of the ultraviolet lamp to prevent damage.
  • one end of the connector portion 200 is coupled to the head portion 100 so that the vacuum ultraviolet ray radiation direction of the head portion 100 can be bent at an arbitrary angle toward the charged object.
  • the connector portion 200 may be formed in a tube shape of a certain length and made of a flexible material, but is not limited thereto, and preferably includes a flexible pipe 210 that can be bent at an arbitrary angle. It comes true.
  • the flexible pipe 210 may refer to a pipe that can be bent at any angle, including a bellow conduit, but is not limited thereto.
  • the flexible tube 210 is made of a material that has a fixing force after being bent at an arbitrary angle, allowing the angle of the head part 100 coupled to one end of the connector part 200 to be adjusted to charge the vacuum ultraviolet ray radiation direction. Allows variable adjustment toward an object.
  • the connector unit 200 electrically connects the head unit 100 and the controller unit 300 through a cable 220 including a voltage cable, etc. inside the flexible tube 210.
  • a second connector 230 is formed at the top of the connector unit 200 (toward the controller unit).
  • the second connector 230 may refer to a coaxial cable connector (BNC cable) for connecting the cable 220.
  • Figure 4 is a conceptual diagram illustrating a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
  • the connector portion 200 is fixedly coupled to the vacuum chamber by a vacuum flange 240.
  • the connector portion 200 when it passes through or is coupled to a vacuum chamber, it can be coupled to the vacuum chamber by utilizing a view port or feed-through generally formed in the vacuum chamber.
  • the vacuum flange 240 may be provided at a view port or feed-through.
  • the vacuum flange 240 is necessary not only to maintain the vacuum state of the vacuum chamber, but also to securely couple the connector portion 200 to the vacuum chamber after the head portion 100 is inserted into the vacuum chamber. do.
  • the vacuum chamber is formed in a structure that communicates with the outside so that it can be coupled to the vacuum flange 240 and maintain a vacuum state through the vacuum flange 240. Therefore, the cable 220 can pass outside the vacuum chamber and be connected to the controller unit 300.
  • the controller unit 300 is connected to the connector unit 200 and includes a high voltage generator 310 provided on one side of the interior to apply a high voltage to the vacuum ultraviolet lamp 120.
  • the vacuum ultraviolet ray lamp has the same configuration when it is a deuterium lamp.
  • the high voltage generator 310 may be separately provided inside or outside the controller unit 300.
  • the controller unit 300 has a third connector 320 formed on one side and is electrically connected to the second connector 230 through the third connector 320, thereby connecting the connector unit 200 and the controller unit 300. ) is electrically connected.
  • controller unit 300 is a means for controlling voltage application from an external power supply terminal, and controls the operation of the vacuum ultraviolet lamp 120 on/off in real time through the controller unit 300. It is configured to make it possible.
  • Figure 5 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention
  • Figure 6 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber largely includes a head part 100', a connector part 200, and a controller part 300'.
  • the head unit 100' may include a head housing 110 and a vacuum ultraviolet (VUV) lamp 120'.
  • the head housing 110 has the same configuration as the head housing 110 described above with reference to FIGS. 1 to 3, and detailed description thereof will be omitted.
  • vacuum ultraviolet lamp 120' to be described here may refer to an excimer lamp.
  • the excimer lamp 120' refers to a lamp with a sealed structure filled with an inert gas that has no filament inside and can emit gas as a light source without the need for preheating time.
  • the excimer lamp may emit ultraviolet light having a wavelength range of 100 nm to 200 nm depending on the type of inert gas.
  • the excimer lamp 120 includes a discharge tube and an external electrode.
  • the discharge tube may be formed into a communication shape made of a dielectric through a typical dielectric manufacturing process such as ceramic.
  • the dielectric is based on a ceramic material that has both electrical insulation and dielectric properties and includes quartz, glass, aluminum oxide, titanium oxide, magnesium oxide, silicon oxide, silver phosphate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, Iron oxide, lead zirconate titanate, carbon nanotubes, etc. can be used.
  • a discharge space is formed inside the discharge tube, and the discharge space is filled with an inert gas.
  • the external electrode has a cylindrical shape made of a conductive material such as a mesh or thin plate surrounding the discharge tube, and may be made of a metal material such as aluminum.
  • the external electrode is connected to an external voltage generator and a high frequency generator, so that the external electrode can receive power.
  • an inert gas forms excimer molecules (excited state) through a method such as dielectric barrier discharge (DBD), and the excimer When a molecule transitions to its ground state, it emits ultraviolet light with a wavelength of 100 to 200 nm (plasma).
  • DBD dielectric barrier discharge
  • the excimer lamp 120' is formed with an irradiation window on one side through which vacuum ultraviolet rays can pass, and the vacuum ultraviolet rays are irradiated to the outside through the irradiation window.
  • the irradiation window may be coated with magnesium fluoride (MgF2) or calcium fluoride, which has excellent vacuum ultraviolet ray transmittance in the wavelength range.
  • MgF2 magnesium fluoride
  • CaF2 calcium fluoride
  • the excimer lamp 120' may be configured to have its size and shape partially changed depending on the equipment, its structure, or static electricity removal specifications, in addition to having an overall shape similar to ' ⁇ '.
  • the excimer lamp 120' may be formed in an H type similar to 'H'.
  • the head part 110' may further include an impedance matching part.
  • the impedance matching unit is provided to match the impedance between the high frequency generator 310' and the excimer lamp 120'.
  • the impedance matching unit includes an RF ring 160 and an RF coil 170. It can be done. At this time, the excimer lamp 120' has an RF ring 160 formed on the outer peripheral surface.
  • the impedance matching unit is electrically connected to the first connector 130 and may be composed of an RF circuit including an RF coil 170.
  • the impedance matching unit has unique characteristics of the excimer lamp 120', and the difference in impedance appears as an impedance difference between the high frequency generator 310' and the excimer lamp.
  • the impedance matching unit further includes a trimmer capacitor 180 for matching the impedance between the high frequency generator 310' and the excimer lamp by varying the impedance according to the impedance change of the excimer lamp 120'. It can be done.
  • the impedance matching unit includes the RF coil 170 and the trimmer capacitor 180, thereby enabling detailed impedance matching.
  • the connector unit 200 has the same configuration as the connector unit 200 described above with reference to FIGS. 1 to 3, and detailed description thereof will be omitted.
  • the controller unit 300' is connected to the connector unit 200 and internally connects the head unit 100 through the connector unit 200. It includes a high frequency generator (310') that applies high frequency power to the excimer lamp (120').
  • the above-described controller unit 300 does not require high frequency generation when the vacuum ultraviolet ray lamp of the head unit 100 is a deuterium lamp and requires the high voltage generator 310, while the controller unit 300' uses the vacuum ultraviolet ray lamp.
  • the lamp is an excimer lamp, high frequency generation is required and a high frequency generator 310' is required, so the configuration of the controller units 300 and 300' can be changed and applied depending on the vacuum ultraviolet lamp. .
  • the high-frequency generator 310' generates high-frequency waves (RF) through a voltage applied from an external voltage supply source, and may be provided separately inside or outside the controller unit 300'.
  • the high frequency generator 310' is a power supply device that generates an RF signal that oscillates at a high frequency to supply power to the excimer lamp to generate vacuum ultraviolet rays (plasma wavelengths), and although not shown, it oscillates at a high frequency. It may refer to a device that includes an oscillator and a power amplifier that amplifies power to generate high-output RF (Radio Frequency) power.
  • RF Radio Frequency
  • Figure 7 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention has a head portion (100). , 100'), a connector unit 200, a controller unit (300, 300'), and a distributor 400.
  • the head portions (100, 100'), the connector portions (200), and the controller portions (300, 300') are the aforementioned head portions (100, 100'), connector portions (200), and controller portions (300, 300'). ), so detailed description will be omitted.
  • the distributor 400 is formed to be electrically connectable to a plurality of connector parts 200 between the connector part 200 and the controller parts 300, 300', so that the distribution generated from the controller parts 300, 300' High voltage (or high frequency) is applied to a plurality of head parts (100, 100').
  • a fourth connector 410 is formed on one side of the distributor 400 to enable electrical connection with the controller unit 300 located outside the vacuum chamber.
  • the fourth connector 410 can be electrically connected to the third connector 320 of the controller unit 300 or 300' using any one of cables including a radio frequency (RF) cable and a voltage cable.
  • RF radio frequency
  • the distributor 400 may optionally be provided separately in the vacuum chamber or outside the vacuum chamber.
  • the distributor 400 may be provided inside (inside) or outside the vacuum chamber.
  • the distributor 400 When the distributor 400 is provided in a vacuum chamber, it can be combined with the vacuum chamber, for example, using a view port or feed-through formed in the vacuum chamber.
  • one side of the distributor 400 (the fourth connector) is fixedly coupled to the vacuum chamber by the vacuum flange 240, so that the inside of the vacuum chamber is maintained in a vacuum state. make it possible to maintain it.
  • At least two fifth connectors 420 are formed on the other side of the distributor 400.
  • the fifth connector 420 is configured to connect to the second connector 230 side of the connector unit 200, and is intended to electrically connect at least two connector units 200.
  • connecting at least two or more connector parts 200 through the distributor 400 means that it can be connected to two or more head parts 100 and 100'.
  • the distributor 400 can improve static electricity elimination performance by connecting to a plurality of head units 100, 100' through one controller unit 300, 300', and can simplify the configuration in installation. It works.
  • the distributor 400 may be provided separately as described above, but of course, it may be formed integrally with the high voltage generator 310' or the high frequency generator 310'.
  • the flexible vacuum ultraviolet ionizer for a vacuum chamber includes a sensor unit for detecting the lighting state of the vacuum ultraviolet lamps (120, 120') inside the head unit (100, 100'). (not shown) may be further included.
  • the sensor unit includes a sensor board equipped with a light-receiving sensor for detecting light, and a light pipe connected to the sensor and the vacuum ultraviolet lamp.
  • the sensor board is connected to the vacuum ultraviolet ray lamp through the light pipe and can detect the lighting state through light transmitted along the light pipe.
  • the sensor board may be formed on the upper side inside the head portion, but the size and shape may be partially changed depending on the structure or static electricity removal specifications of the static electricity removal device, so that the sensor board may be formed on the side portion within the small head portion, and is limited to this. It doesn't work.
  • the light pipe may also have a straight or curved shape depending on the position of the sensor board formed inside the head.
  • the side of the light pipe is structured to block light in order to block the inflow of light from sources other than the light source.
  • the sensor unit may be configured to transmit information to an external control unit, etc. through a separate wired or wireless communication means.

Landscapes

  • Elimination Of Static Electricity (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)

Abstract

The present invention relates to a flexible vacuum ultraviolet ionizer for a vacuum chamber, having a flexible cable that can be inserted into a vacuum chamber and, more specifically, to a flexible vacuum ultraviolet ionizer for a vacuum chamber, the ionizer using a vacuum ultraviolet lamp provided in a vacuum chamber, and comprising: a head part including a heavy hydrogen lamp for emitting vacuum ultraviolet rays within the vacuum chamber; a connector part which is coupled to the head part, and which enables the emission direction of the vacuum ultraviolet rays of the head part to be bent at any angle toward an object to be electrified; and a high voltage generation part which is coupled to the connector part, and which is provided at one inner side thereof so as to apply high voltage to the vacuum ultraviolet lamp.

Description

진공 챔버용 플렉시블 진공자외선 이오나이저Flexible vacuum ultraviolet ionizer for vacuum chambers
본 발명은 진공 챔버용 플렉시블 진공자외선 이오나이저에 관한 것으로서, 더욱 상세하게는 진공 챔버 내에 삽입 가능한 가요성 케이블을 가진 진공자외선을 이용한 정전기 제거 장치에 관한 것이다.The present invention relates to a flexible vacuum ultraviolet ionizer for a vacuum chamber, and more specifically, to a static electricity removal device using vacuum ultraviolet rays having a flexible cable that can be inserted into a vacuum chamber.
LCD, OLED, 웨이퍼 외 각종 기판 또는 시트 구조나 각종 필름 구조 등 각종 소재 또는 제품 처리 공정에서 미세한 먼지가 부착되거나 정전기에 의해 소자가 훼손되는 등의 문제가 발생하는 것을 미연에 방지하기 위하여 정전기 제거 장치를 설치하는 것이 일반적이다.A static electricity removal device to prevent problems such as adhesion of fine dust or damage to devices due to static electricity during the processing of various materials or products such as LCD, OLED, wafers, various substrates, sheet structures, and various film structures. It is common to install .
한편, 최근 들어 LCD, OLED, 반도체 기술이 더욱 정밀화됨에 따라 증착 공정이나 진공 챔버 내 공정과 같이 감압 진공 환경에서 진행되거나 불활성가스를 취급하는 등 특수한 환경에서 진행되는 공정도 크게 증가하고 있는 추세인데, 이 경우 엑스선 방사식 장치의 경우에는 대기압 하에서와는 달리 상술한 특수한 환경에서는 정전기 제거 성능이 낮아 활용하기 어렵고, 코로나 방전식 장치는 고전압 방전에 의한 스퍼터링 현상, 이온 밸런스 조정에 따른 불편 등의 문제점이 있어 적용이 어렵다.Meanwhile, as LCD, OLED, and semiconductor technologies have become more precise in recent years, the number of processes that are carried out in special environments, such as deposition processes or processes in vacuum chambers, in a reduced pressure vacuum environment or handling inert gases, is increasing significantly. In this case, unlike under atmospheric pressure, the It is difficult to apply.
이러한 문제점을 개선하기 위하여, 본 출원인은 대한민국 등록특허 제10-2065347호 '진공 자외선을 이용한 정전기 제거장치'라는 발명을 제안한 바가 있으며, 상기의 특허에서는 위의 문제점인 진공 챔버에 연결되어 진공자외선을 조사하여 제전 기능을 수행함으로써, 상기 문제점이 개선된 바가 있으나, 이러한 종래의 진공자외선을 이용한 정전기 제거 장치는 진공 챔버 내에서 제전이 필요한 웨이퍼나 디스플레이 패널을 향해 진공자외선을 정확하게 조사하기 어려운 문제점이 있었다.In order to improve this problem, the present applicant has proposed an invention called 'Static electricity removal device using vacuum ultraviolet rays' in Republic of Korea Patent No. 10-2065347. In the above patent, it is connected to a vacuum chamber, which is the problem above, and uses vacuum ultraviolet rays. Although the above problem has been improved by performing a static electricity removal function through irradiation, the conventional static electricity removal device using vacuum ultraviolet rays has a problem in that it is difficult to accurately irradiate vacuum ultraviolet rays toward a wafer or display panel that requires static electricity removal in a vacuum chamber. .
(특허문헌 1) 대한민국 등록특허 제10-2065347호 (2020.01.07.)(Patent Document 1) Republic of Korea Patent No. 10-2065347 (2020.01.07.)
(특허문헌 2) 대한민국 공개특허 제10-2021-0119203호 (2021.10.05.)(Patent Document 2) Republic of Korea Patent Publication No. 10-2021-0119203 (2021.10.05.)
본 발명의 목적은 상술한 바와 같은 문제점을 해결하기 위한 것으로, 진공 챔버 내에 삽입 가능하고, 진공 챔버 내에서 제전이 필요한 웨이퍼나 디스플레이 패널 등의 대전물체를 향해 임의의 각도로 구부릴 수 있도록 해주는 가요성 케이블을 가진 진공자외선을 이용한 정전기제거장치를 제공하는 것이다.The purpose of the present invention is to solve the problems described above, and is a flexible device that can be inserted into a vacuum chamber and bent at an arbitrary angle toward a charged object such as a wafer or display panel that needs to be destaticized in the vacuum chamber. To provide a static electricity removal device using vacuum ultraviolet rays with a cable.
본 발명의 목적들은 이상에서 언급한 목적으로 제한되지 않으며, 언급되지 않은 또 다른 목적들은 아래의 기재로부터 본 발명의 기술분야에서 통상의 지식을 지닌 자에게 명확하게 이해될 수 있을 것이다.The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those skilled in the art from the description below.
상기 목적을 달성하기 위하여, 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는, 진공 챔버에 설치되는 진공자외선 램프를 이용한 진공 챔버용 플렉시블 진공자외선 이오나이저에 있어서, 진공 챔버 내에서 진공자외선을 방사하는 중수소 램프를 포함하는 헤드부, 상기 헤드부와 결합되며 상기 헤드부의 진공자외선 방사 방향을 대전물체를 향해 임의의 각도로 구부릴 수 있도록 해주는 커넥터부, 및 상기 커넥터부와 결합되며 내부 일측에 구비되어 상기 진공자외선 램프로 고전압을 인가하는 고전압 발생부를 포함하는 컨트롤러부를 포함한다.In order to achieve the above object, the flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention is a flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber, A head part including a deuterium lamp that emits ultraviolet rays, a connector part coupled to the head part and allowing the vacuum ultraviolet ray radiation direction of the head part to be bent at an arbitrary angle toward a charged object, and one internal side coupled to the connector part. It is provided in and includes a controller unit including a high voltage generator for applying a high voltage to the vacuum ultraviolet lamp.
또한, 상기 헤드부는 내부에 진공자외선 램프가 삽입 장착될 때, 상기 진공자외선 램프 상부에 진공용 오링이 적어도 한 개 이상 구비되는 것을 특징으로 한다.In addition, when the vacuum ultraviolet ray lamp is inserted and mounted inside the head part, at least one O-ring for vacuum is provided on the upper part of the vacuum ultraviolet ray lamp.
또한, 상기 커넥터부는 임의의 각도로 구부릴 수 있는 가요관을 포함하는 것을 특징으로 한다.In addition, the connector part is characterized by including a flexible pipe that can be bent at an arbitrary angle.
또한, 상기 가요관은 임의의 각도로 구부러진 후 고정력을 가지는 재질로 이루어지는 것을 특징으로 한다.In addition, the flexible pipe is characterized in that it is made of a material that has a fixing force after being bent at an arbitrary angle.
또한, 상기 커넥터부는 일측에 진공 챔버와 결합하기 위한 진공 플랜지를 포함하는 것을 특징으로 한다.In addition, the connector part is characterized in that it includes a vacuum flange on one side for coupling to the vacuum chamber.
또한, 상기 커넥터부는 진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 한다.In addition, the connector part is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
또한, 상기 고전압 발생부는 상기 컨트롤러부 내부 또는 외부에 별도로 마련될 수 있는 것을 특징으로 한다.In addition, the high voltage generator may be separately provided inside or outside the controller unit.
또한, 상기 커넥터부와 상기 컨트롤러부 사이에서 다수 개의 커넥터부와 전기적으로 연결 가능하도록 형성되어, 상기 컨트롤러부로부터 발생되는 고전압을 다수 개의 헤드부로 인가하도록 하기 위한 분배기를 더 포함하는 것을 특징으로 한다.In addition, it is formed between the connector part and the controller part to be electrically connected to a plurality of connector parts, and further includes a distributor for applying the high voltage generated from the controller part to the plurality of head parts.
또한, 상기 분배기는 선택적으로 진공 챔버 또는 진공 챔버 외부에 별도로 마련될 수 있는 것을 특징으로 한다.Additionally, the distributor may be selectively provided separately in the vacuum chamber or outside the vacuum chamber.
또한, 상기 분배기는 진공 챔버에 마련될 때, 진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 한다.Additionally, when the distributor is provided in a vacuum chamber, it is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
또한, 상기 분배기는 상기 고전압 발생부와 일체형 또는 별도로 마련될 수 있는 것을 특징으로 한다.Additionally, the distributor may be integrated with the high voltage generator or may be provided separately.
한편, 본 발명의 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는, 진공 챔버에 설치되는 진공자외선 램프를 이용한 진공 챔버용 플렉시블 진공자외선 이오나이저에 있어서, 진공 챔버 내에서 진공자외선을 방사하는 엑시머 램프를 포함하는 헤드부, 상기 헤드부와 결합되며 상기 헤드부의 진공자외선 방사 방향을 대전물체를 향해 임의의 각도로 구부릴 수 있도록 해주는 커넥터부, 및 상기 커넥터부와 결합되며 내부 일측에 구비되어 상기 엑시머 램프로 고주파(RF) 전원을 인가하는 고주파 발생부를 포함하는 컨트롤러부를 포함한다.Meanwhile, the flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention is a flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber, which radiates vacuum ultraviolet rays within the vacuum chamber. A head portion including an excimer lamp, a connector portion coupled to the head portion and allowing the vacuum ultraviolet ray radiation direction of the head portion to be bent at an arbitrary angle toward a charged object, and a connector portion coupled to the connector portion and provided on one side of the interior of the head portion. It includes a controller unit including a high frequency generator unit that applies radio frequency (RF) power to the excimer lamp.
또한, 상기 헤드부는 내부에 진공자외선 램프가 삽입 장착될 때, 상기 진공자외선 램프 상부에 진공용 오링이 적어도 한 개 이상 구비되는 것을 특징으로 한다.In addition, when the vacuum ultraviolet ray lamp is inserted and mounted inside the head part, at least one O-ring for vacuum is provided on the upper part of the vacuum ultraviolet ray lamp.
또한, 상기 커넥터부는 임의의 각도로 구부릴 수 있는 가요관을 포함하는 것을 특징으로 한다.In addition, the connector part is characterized by including a flexible pipe that can be bent at an arbitrary angle.
또한, 상기 가요관은 임의의 각도로 구부러진 후 고정력을 가지는 재질로 이루어지는 것을 특징으로 한다.In addition, the flexible pipe is characterized in that it is made of a material that has a fixing force after being bent at an arbitrary angle.
또한, 상기 커넥터부는 일측에 진공 챔버와 결합하기 위한 진공 플랜지를 포함하는 것을 특징으로 한다.In addition, the connector part is characterized in that it includes a vacuum flange on one side for coupling to the vacuum chamber.
또한, 상기 커넥터부는 진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 한다.In addition, the connector part is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
또한, 상기 고주파 발생부는 상기 컨트롤러부 내부 또는 외부에 별도로 마련될 수 있는 것을 특징으로 한다.In addition, the high frequency generator may be separately provided inside or outside the controller unit.
또한, 상기 커넥터부와 상기 컨트롤러부 사이에서 다수 개의 커넥터부가 전기적으로 연결 가능하도록 형성되어, 상기 컨트롤러부로부터 발생되는 고주파 전원을 다수 개의 헤드부로 인가하도록 하기 위한 분배기를 더 포함하는 것을 특징으로 한다.In addition, a plurality of connector parts are formed to be electrically connectable between the connector part and the controller part, and the connector part further includes a distributor for applying high frequency power generated from the controller part to the plurality of head parts.
또한, 상기 분배기는 선택적으로 진공 챔버 또는 진공 챔버 외부에 별도로 마련될 수 있는 것을 특징으로 한다.Additionally, the distributor may be selectively provided separately in the vacuum chamber or outside the vacuum chamber.
또한, 상기 분배기는 진공 챔버에 마련될 때, 진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 한다.Additionally, when the distributor is provided in a vacuum chamber, it is characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
또한, 상기 분배기는 상기 고주파 발생부와 일체형 또는 별도로 마련될 수 있는 것을 특징으로 한다.Additionally, the distributor may be integrated with the high frequency generator or may be provided separately.
또한, 상기 헤드부는 상기 엑시머 램프와 상기 고주파 발생부 사이의 임피던스를 정합시키기 위해 마련되는 트리머 캐패시터를 포함하는 것을 특징으로 한다.In addition, the head part is characterized by including a trimmer capacitor provided to match the impedance between the excimer lamp and the high frequency generator.
본 발명에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는 진공자외선을 이용하여 제전하는 헤드부를 진공 챔버 내부에 제공할 수 있도록 구성되어, 이오나이저 자체가 진공 챔버 내부에 직접적으로 내장되지 않은 상태에서 헤드부만의 삽입으로 제전을 수행할 수 있는 효과가 있다.The flexible vacuum ultraviolet ionizer for a vacuum chamber according to the present invention is configured to provide a head part inside the vacuum chamber that eliminates static electricity using vacuum ultraviolet rays, so that the head part can be used without the ionizer itself being directly built into the vacuum chamber. There is an effect of performing static electricity removal by inserting the bay.
또한, 본 발명에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는 진공 챔버의 내부에 삽입된 헤드부가 가요성 케이블을 통해 진공 챔버 내에서 진공자외선 방사 방향을 대전물체를 향해 가변적으로 조절되어 제전 성능을 향상시킬 수 있는 효과가 있다.In addition, the flexible vacuum ultraviolet ionizer for a vacuum chamber according to the present invention improves static electricity elimination performance by variably adjusting the direction of vacuum ultraviolet ray radiation within the vacuum chamber toward the charged object through a flexible cable in the head portion inserted into the vacuum chamber. There is an effect that can be achieved.
또한, 본 발명에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는 엑시머 램프를 이용하는 경우, 고주파 발생부와 진공자외선 램프 두 지점 간의 임피던스(Impedance)를 매칭하기 위해서 RF 코일 및 트리머 커패시터(Trimmer Capacitor)를 구비함으로써, 임피던스의 세밀한 매칭이 가능하며, 이로 인해 임피던스 매칭이 수행되지 않아 발생하였던 과도한 반사파등으로 인한 제품의 수명단축, 과독한 전류 소비, 발열 등의 문제를 해결할 수 있는 효과가 있다.In addition, when using an excimer lamp, the flexible vacuum ultraviolet ionizer for a vacuum chamber according to the present invention is equipped with an RF coil and a trimmer capacitor to match the impedance between the two points of the high frequency generator and the vacuum ultraviolet lamp. By doing so, detailed impedance matching is possible, which has the effect of solving problems such as shortened product lifespan, excessive current consumption, and heat generation caused by excessive reflected waves that occur when impedance matching is not performed.
도 1은 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 개략적으로 나타낸 구성도이다.Figure 1 is a schematic diagram showing the configuration of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
도 2는 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 나타낸 단면도이다.Figure 2 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
도 3은 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 나타낸 분해사시도이다.Figure 3 is an exploded perspective view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
도 4는 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 설명하기 위한 개념도이다.Figure 4 is a conceptual diagram illustrating a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
도 5는 본 발명의 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 개략적으로 나타낸 구성도이다.Figure 5 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
도 6은 본 발명의 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 나타낸 단면도이다.Figure 6 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
도 7은 본 발명의 또 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 개략적으로 나타낸 구성도이다.Figure 7 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
본 발명의 이점 및 특징, 그리고 그것들을 달성하는 방법은 첨부되는 도면과함께 상세하게 후술되어 있는 실시예들을 참조하면 명확해질 것이다. 그러나 본 발명은 이하에서 개시되는 실시예들에 한정되는 것이 아니라 서로 다른 다양한 형태로 구현될 것이며, 단지 본 실시예들은 본 발명의 개시가 완전하도록 하며, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 발명의 범주를 완전하게 알려주기 위해 제공되는 것이며, 본 발명은 청구항의 범주에 의해 정의될 뿐이다.The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and will be implemented in various different forms. The present embodiments only serve to ensure that the disclosure of the present invention is complete and that common knowledge in the technical field to which the present invention pertains is not limited. It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims.
아래 첨부된 도면을 참조하여 본 발명의 실시를 위한 구체적인 내용을 상세히 설명한다. 도면에 관계없이 동일한 부재번호는 동일한 구성요소를 지칭하며, "및/또는"은 언급된 아이템들의 각각 및 하나 이상의 모든 조합을 포함한다.Specific details for implementing the present invention will be described in detail with reference to the drawings attached below. Regardless of the drawings, the same reference numerals refer to the same elements, and “and/or” includes each and all combinations of one or more of the mentioned items.
비록 제1, 제2 등이 다양한 구성요소들을 서술하기 위해서 사용되나, 이들 구성요소들은 이들 용어에 의해 제한되지 않음은 물론이다. 이들 용어들은 단지 하나의 구성요소를 다른 구성요소와 구별하기 위하여 사용하는 것이다. 따라서, 이하에서 언급되는 제1 구성요소는 본 발명의 기술적 사상 내에서 제2 구성요소일 수도있음은 물론이다.Although first, second, etc. are used to describe various components, these components are of course not limited by these terms. These terms are merely used to distinguish one component from another. Therefore, of course, the first component mentioned below may also be the second component within the technical spirit of the present invention.
본 명세서에서 사용된 용어는 실시예들을 설명하기 위한 것이며, 본 발명을 제한하고자 하는 것은 아니다. 본 명세서에서, 단수형은 문구에서 특별히 언급하지 않는 한 복수형도 포함한다. 명세서에서 사용되는 "포함한다(comprises)" 및/또는 "포함하는(comprising)"은 언급된 구성요소 외에 하나 이상의 다른 구성요소의 존재 또는 추가를 배제하지 않는다.The terminology used herein is for describing embodiments and is not intended to limit the invention. As used herein, singular forms also include plural forms, unless specifically stated otherwise in the context. As used in the specification, “comprises” and/or “comprising” does not exclude the presence or addition of one or more other elements in addition to the mentioned elements.
다른 정의가 없다면, 본 명세서에서 사용되는 모든 용어(기술 및 과학적 용어를 포함)는 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 공통적으로 이해될 수 있는 의미로 사용될 수 있을 것이다. 또 일반적으로 사용되는 사전에 정의되어 있는 용어들은 명백하게 특별히 정의되어 있지 않는 한 이상적으로 또는 과도하게 해석되지 않는다.Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used with meanings that can be commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not interpreted ideally or excessively unless clearly specifically defined.
이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명하기로 한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings.
도 1은 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 개략적으로 나타낸 구성도이고, 도 2는 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 나타낸 단면도이고, 도 3은 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 나타낸 분해사시도이다.1 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention. 3 is an exploded perspective view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
도 1 내지 도 3을 참조하면, 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는, 크게, 헤드부(100), 커넥터부(200) 및 컨트롤러부(300)를 포함한다.Referring to FIGS. 1 to 3 , the flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention largely includes a head portion 100, a connector portion 200, and a controller portion 300.
먼저, 헤드부(100)는 헤드부 하우징(110)과 진공자외선(VUV) 램프(120)를 포함하여 이루어진다.First, the head unit 100 includes a head housing 110 and a vacuum ultraviolet (VUV) lamp 120.
여기서, 사용되는 상기 헤드부 하우징(110)은 설비나 그 구조 또는 제전 사양에 따라 크기 및 형상이 일부 변경되어 구성될 수 있음은 물론이다.Here, it goes without saying that the size and shape of the head housing 110 used may be partially changed depending on the equipment, its structure, or static electricity removal specifications.
또한, 상기 헤드부 하우징(110)은 커넥터부(200)에 탈착될 수 있는 구조로 형성될 수 있다.Additionally, the head housing 110 may be formed in a structure that can be attached to and detached from the connector unit 200.
상기 진공자외선 램프(120)는 상기 헤드부(100) 내부에 삽입 장착되어 피대전체에 진공자외선을 조사하기 위한 것으로, 진공자외선 발생기를 의미할 수 있다. 여기서, 상기 진공자외선 램프(120)는 중수소(D2) 램프를 의미할 수 있으며, 이에 한정되는 것은 아니다.The vacuum ultraviolet ray lamp 120 is inserted and mounted inside the head unit 100 to irradiate vacuum ultraviolet rays to the entire object to be charged, and may mean a vacuum ultraviolet ray generator. Here, the vacuum ultraviolet ray lamp 120 may refer to a deuterium (D2) lamp, but is not limited thereto.
또한, 상기 헤드부(100)는 상부에 제1 커넥터(130)가 형성되어 상기 제1 커넥터(130)를 통해 커넥터부(200)와 결합할 수 있도록 한다. 상기 제1 커넥터(130)는 커넥터부(200)와 케이블을 통해 연결하기 위한 동축 케이블용 커넥터(BNC 케이블)을 의미할 수 있다.In addition, the head part 100 has a first connector 130 formed on the top so that it can be coupled to the connector part 200 through the first connector 130. The first connector 130 may refer to a coaxial cable connector (BNC cable) for connecting the connector unit 200 through a cable.
또한, 상기 헤드부(100) 내부에는 진공자외선 램프가 삽입 장착될 때, 상기 진공자외선 램프 상부에 진공용 오링(150) 등 적어도 한 개 이상의 오링이 구비될 수 있으며 이에 한정되는 것은 아니며, 상기 진공자외선 램프 하부에 파손을 방지하기 위한 오링(140) 등이 구비될 수 있다.In addition, when a vacuum ultraviolet ray lamp is inserted and mounted inside the head unit 100, at least one O-ring, such as a vacuum O-ring 150, may be provided on the upper part of the vacuum ultraviolet lamp, but is not limited to this. An O-ring 140 or the like may be provided at the bottom of the ultraviolet lamp to prevent damage.
다음, 커넥터부(200)는 일단이 상기 헤드부(100)와 결합되어 상기 헤드부(100)의 진공자외선 방사 방향을 대전물체를 향해 임의의 각도로 구부릴 수 있도록 한다.Next, one end of the connector portion 200 is coupled to the head portion 100 so that the vacuum ultraviolet ray radiation direction of the head portion 100 can be bent at an arbitrary angle toward the charged object.
상기 커넥터부(200)는 일정 길이를 이루고, 플렉시블한 재질로 이루어지는 튜브 형상으로 형성될 수 있으며, 이에 한정되는 것은 아니며, 바람직하게는, 임의의 각도로 구부릴 수 있는 가요관(210)을 포함하여 이루어진다.The connector portion 200 may be formed in a tube shape of a certain length and made of a flexible material, but is not limited thereto, and preferably includes a flexible pipe 210 that can be bent at an arbitrary angle. It comes true.
상기 가요관(210)은 벨로우(Bellow) 도관 등을 포함하여 임의의 각도로 구부릴 수 있는 관을 의미할 수 있으며, 이에 한정되는 것은 아니다.The flexible pipe 210 may refer to a pipe that can be bent at any angle, including a bellow conduit, but is not limited thereto.
또한, 상기 가요관(210)은 임의의 각도로 구부러진 후 고정력을 가지는 재질로 이루어져, 상기 커넥터부(200) 일단에 결합된 헤드부(100)의 각도 조절을 가능하게 함으로써 진공자외선 방사 방향을 대전물체를 향해 가변적으로 조절이 가능하도록 한다.In addition, the flexible tube 210 is made of a material that has a fixing force after being bent at an arbitrary angle, allowing the angle of the head part 100 coupled to one end of the connector part 200 to be adjusted to charge the vacuum ultraviolet ray radiation direction. Allows variable adjustment toward an object.
상기 가요관(210) 내부에 전압 케이블 등을 포함하는 케이블(220)을 통해 상기 커넥터부(200)는 상기 헤드부(100)와 상기 컨트롤러부(300)를 전기적으로 연결한다.The connector unit 200 electrically connects the head unit 100 and the controller unit 300 through a cable 220 including a voltage cable, etc. inside the flexible tube 210.
또한, 상기 커넥터부(200)는 상부(컨트롤러부 방향)에는 제2 커넥터(230)가 형성된다. 상기 제2 커넥터(230)는 상기 케이블(220)을 연결하기 위한 동축 케이블용 커넥터(BNC 케이블)을 의미할 수 있다.Additionally, a second connector 230 is formed at the top of the connector unit 200 (toward the controller unit). The second connector 230 may refer to a coaxial cable connector (BNC cable) for connecting the cable 220.
도 4는 본 발명의 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 설명하기 위한 개념도이다.Figure 4 is a conceptual diagram illustrating a flexible vacuum ultraviolet ionizer for a vacuum chamber according to an embodiment of the present invention.
도 4를 참조하면, 상기 커넥터부(200)는 진공 플랜지(240)에 의해 진공 챔버에 고정결합된다.Referring to FIG. 4, the connector portion 200 is fixedly coupled to the vacuum chamber by a vacuum flange 240.
이때, 상기 커넥터부(200)가 진공 챔버를 통과하거나, 결합될 때, 일반적으로 진공 챔버에 형성되는 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합될 수 있으며, 상기 진공 플랜지(240)도 마찬가지로, 뷰 포트(view port) 또는 피드 스루(feed-through)에 마련될 수 있다. At this time, when the connector portion 200 passes through or is coupled to a vacuum chamber, it can be coupled to the vacuum chamber by utilizing a view port or feed-through generally formed in the vacuum chamber. Likewise, the vacuum flange 240 may be provided at a view port or feed-through.
상기 진공 플랜지(240)는 진공 챔버의 진공 상태를 유지하기 위함은 물론이거니와, 상기 헤드부(100)가 진공 챔버 내 삽입된 후, 상기 커넥터부(200)를 진공 챔버에 고정결합하기 위해서는 반드시 필요하다.The vacuum flange 240 is necessary not only to maintain the vacuum state of the vacuum chamber, but also to securely couple the connector portion 200 to the vacuum chamber after the head portion 100 is inserted into the vacuum chamber. do.
이때, 물론 진공 챔버는 외부와 연통되는 구조로 형성되어 상기 진공 플랜지(240)와 결합은 물론이거니와 상기 진공 프랜지(240)를 통해 진공 상태를 유지할 수 있도록 마련되는 것은 당연하다. 따라서, 상기 케이블(220)이 진공 챔버 외부로 통과하여 컨트롤러부(300)에 체결 가능하다.At this time, of course, the vacuum chamber is formed in a structure that communicates with the outside so that it can be coupled to the vacuum flange 240 and maintain a vacuum state through the vacuum flange 240. Therefore, the cable 220 can pass outside the vacuum chamber and be connected to the controller unit 300.
다음, 컨트롤러부(300)는 상기 커넥터부(200)와 연결되며, 내부 일측에 구비되어 상기 진공자외선 램프(120)로 고전압을 인가하는 고전압 발생부(310)를 포함한다. 이때의 경우, 상기 진공자외선 램프는 중수소 램프일 경우 이와 같은 구성을 가진다.Next, the controller unit 300 is connected to the connector unit 200 and includes a high voltage generator 310 provided on one side of the interior to apply a high voltage to the vacuum ultraviolet lamp 120. In this case, the vacuum ultraviolet ray lamp has the same configuration when it is a deuterium lamp.
상기 고전압 발생부(310)는 컨트롤러부(300) 내부 또는 외부에 별도로 마련될 수 있다.The high voltage generator 310 may be separately provided inside or outside the controller unit 300.
상기 컨트롤러부(300)는 일측에 제3 커넥터(320)가 형성되어 제3 커넥터(320)를 통해 상기 제2 커넥터(230)와 전기적으로 연결되어 상기 커넥터부(200)와 상기 컨트롤러부(300)를 전기적으로 연결한다.The controller unit 300 has a third connector 320 formed on one side and is electrically connected to the second connector 230 through the third connector 320, thereby connecting the connector unit 200 and the controller unit 300. ) is electrically connected.
또한, 상기 컨트롤러부(300)는 외부에 마련된 전원공급단으로부터 전압 인가를 제어하기 위한 수단으로, 상기 컨트롤러부(300)를 통해 상기 진공자외선 램프(120)의 구동을 실시간으로 On/Off 제어가 가능하도록 구성된다.In addition, the controller unit 300 is a means for controlling voltage application from an external power supply terminal, and controls the operation of the vacuum ultraviolet lamp 120 on/off in real time through the controller unit 300. It is configured to make it possible.
도 5는 본 발명의 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 개략적으로 나타낸 구성도이고, 도 6은 본 발명의 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 나타낸 단면도이다.Figure 5 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention, and Figure 6 is a cross-sectional view showing a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention. .
하기에서는, 도 5 및 도 6을 참조하여, 본 발명의 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저에 대하여 설명하도록 한다.Below, with reference to FIGS. 5 and 6, a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention will be described.
본 발명의 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는, 크게, 헤드부(100`), 커넥터부(200) 및 컨트롤러부(300`)를 포함한다.The flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention largely includes a head part 100', a connector part 200, and a controller part 300'.
먼저, 헤드부(100`)는 헤드부 하우징(110)과 진공자외선(VUV) 램프(120`)를 포함하여 이루어질 수 있다. 상기 헤드부 하우징(110)은 앞서 도 1 내지 3을 통해 전술한 헤드부 하우징(110)과 동일한 구성으로 상세한 설명은 생략하도록 한다.First, the head unit 100' may include a head housing 110 and a vacuum ultraviolet (VUV) lamp 120'. The head housing 110 has the same configuration as the head housing 110 described above with reference to FIGS. 1 to 3, and detailed description thereof will be omitted.
하지만, 여기서 설명될 진공자외선 램프(120`)는 엑시머 램프를 의미할 수 있다. However, the vacuum ultraviolet lamp 120' to be described here may refer to an excimer lamp.
상기 엑시머 램프(120`)는 내부에 필라멘트가 없고 예열시간이 필요 없이 기체를 광원으로 발광할 수 있는 불활성 기체가 봉입된 밀폐형 구조의 램프를 의미한다. 여기서, 상기 엑시머 램프는 불활성 기체의 종류에 따라서 100nm 이상 200nm 이하의 파장 영역을 가지는 자외선 광을 방사할 수 있다.The excimer lamp 120' refers to a lamp with a sealed structure filled with an inert gas that has no filament inside and can emit gas as a light source without the need for preheating time. Here, the excimer lamp may emit ultraviolet light having a wavelength range of 100 nm to 200 nm depending on the type of inert gas.
상기 엑시머 램프(120`)에 대하여 좀 더 구체적으로 설명하자면, 상기 엑시머 램프는 방전관과 외부 전극을 포함한다.To describe the excimer lamp 120' in more detail, the excimer lamp includes a discharge tube and an external electrode.
상기 방전관은 통상적인 세라믹 등 유전체 제조공정을 통해 유전체로 이루어지는 연통 형상으로 이루어질 수 있다.The discharge tube may be formed into a communication shape made of a dielectric through a typical dielectric manufacturing process such as ceramic.
상기 유전체는 전기적 절연성 및 유전성을 동시에 갖는 세라믹 재질을 기초로 하며 석영, 유리, 산화알루미늄, 산화티탄, 산화마그네슘, 산화실리콘, 은인산염, 실리콘카바이드, 산화인듐, 산화카드뮴, 산화비스무스, 산화아연, 산화철, 티탄산 지르콘산 납, 카본 나노튜브 등을 사용할 수 있다.The dielectric is based on a ceramic material that has both electrical insulation and dielectric properties and includes quartz, glass, aluminum oxide, titanium oxide, magnesium oxide, silicon oxide, silver phosphate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, Iron oxide, lead zirconate titanate, carbon nanotubes, etc. can be used.
상기 방전관 내부에는 방전 공간이 형성되어 상기 방전 공간에는 불활성 기체가 충진된다.A discharge space is formed inside the discharge tube, and the discharge space is filled with an inert gas.
상기 외부 전극은 상기 방전관을 감싸는 매쉬, 얇은 판 등 전도성 재질로 만들어진 원통 등 형상을 지니며, 알루미늄 등 금속 재질로 이루어질 수 있다.The external electrode has a cylindrical shape made of a conductive material such as a mesh or thin plate surrounding the discharge tube, and may be made of a metal material such as aluminum.
상기 외부 전극에는 외부의 전압 발생장치와 고주파 발생부와 연결되어 있어, 상기 외부 전극은 전원을 공급받을 수 있다.The external electrode is connected to an external voltage generator and a high frequency generator, so that the external electrode can receive power.
따라서, 상기 엑시머 램프(120`)는 상기 외부 전극에 교류 전압을 인가하면, 유전체 장벽 방전(Dielectric Barrier Discharge, DBD) 등의 방식으로 불 불활성 기체가 엑시머 분자(여기 상태)를 형성시키고, 상기 엑시머 분자가 기저(바닥) 상태로 천이할 때, 100~200nm 파장(플라즈마)의 자외선 광을 방사하게 된다.Therefore, when an alternating voltage is applied to the external electrode of the excimer lamp 120', an inert gas forms excimer molecules (excited state) through a method such as dielectric barrier discharge (DBD), and the excimer When a molecule transitions to its ground state, it emits ultraviolet light with a wavelength of 100 to 200 nm (plasma).
또한, 상기 엑시머 램프(120`)는 일측에 진공자외선이 투과할 수 있는 조사창이 형성되어, 진공자외선이 상기 조사창을 통해 외부로 조사하게 된다.In addition, the excimer lamp 120' is formed with an irradiation window on one side through which vacuum ultraviolet rays can pass, and the vacuum ultraviolet rays are irradiated to the outside through the irradiation window.
상기 조사창은 상기 파장 영역의 진공자외선 투과율이 우수한 마그네슘 플루오라이드(Magnesium Fluoride, MgF₂) 또는 칼슘 플루오라이드(Calcium Fluoride)로 코팅되어 이루어질 수 있다.The irradiation window may be coated with magnesium fluoride (MgF₂) or calcium fluoride, which has excellent vacuum ultraviolet ray transmittance in the wavelength range.
또한, 상기 엑시머 램프(120`)는 전체적인 형상 '│'와 유사한 형상 이외에도 설비나 그 구조 또는 제전 사양에 따라 크기 및 형상이 일부 변경되어 구성될 수 있다. 예컨대, 상기 엑시머 램프(120`) 형상은 'H'와 유사한 H 타입으로 형성될 수 있음을 배제하지 않는다.In addition, the excimer lamp 120' may be configured to have its size and shape partially changed depending on the equipment, its structure, or static electricity removal specifications, in addition to having an overall shape similar to '│'. For example, it is not excluded that the excimer lamp 120' may be formed in an H type similar to 'H'.
한편, 상기 헤드부(110`)에는 임피던스 매칭부를 더 포함하여 이루어질 수 있다.Meanwhile, the head part 110' may further include an impedance matching part.
상기 임피던스 매칭부는 고주파 발생장치(310`)와 엑시머 램프(120`) 사이의 임피던스(Impedance)를 정합시키기 위해 마련되는 것으로, 상기 임피던스 매칭부는 RF 링(160), RF 코일(170)을 포함하여 이루어질 수 있다. 이때, 상기 엑시머 램프(120`)는 외주면에 RF 링(160)이 형성되어 있다.The impedance matching unit is provided to match the impedance between the high frequency generator 310' and the excimer lamp 120'. The impedance matching unit includes an RF ring 160 and an RF coil 170. It can be done. At this time, the excimer lamp 120' has an RF ring 160 formed on the outer peripheral surface.
따라서, 상기 임피던스 매칭부는 제1 커넥터(130)와 전기적으로 연결되며, RF코일(170)을 포함하는 RF 회로로 이루어질 수 있다.Therefore, the impedance matching unit is electrically connected to the first connector 130 and may be composed of an RF circuit including an RF coil 170.
또한, 상기 임피던스 매칭부는 상기 엑시머 램프(120`)는 고유의 특성을 가지게 되며 해당 임피던스의 차이는 고주파 발생부(310`)와 상기 엑시머 램프 간의 임피던스 차이로 나타나게 된다.In addition, the impedance matching unit has unique characteristics of the excimer lamp 120', and the difference in impedance appears as an impedance difference between the high frequency generator 310' and the excimer lamp.
따라서, 상기 임피던스 매칭부는 상기 엑시머 램프(120`)의 임피던스 변화에 따라 임피던스를 가변시켜 상기 고주파 발생부(310`)와 상기 엑시머 램프 사이의 임피던스를 정합시키기 위한 트리머 캐패시터(180)를 더 포함하여 이루어질 수 있다.Therefore, the impedance matching unit further includes a trimmer capacitor 180 for matching the impedance between the high frequency generator 310' and the excimer lamp by varying the impedance according to the impedance change of the excimer lamp 120'. It can be done.
이에 따라, 상기 임피던스 매칭부는 상기 RF 코일(170)과 상기 트리머 캐패시터(180)를 구비함으로써, 임피던스의 세밀한 매칭이 가능해진다.Accordingly, the impedance matching unit includes the RF coil 170 and the trimmer capacitor 180, thereby enabling detailed impedance matching.
따라서, 임피던스 매칭이 수행되지 않을 경우에 발생할 수 있는 과도한 반사파 등으로 인한 제품의 수명 단축, 과도한 전류 소비, 발열 등의 문제를 해결할 수 있다.Therefore, problems such as shortened product lifespan, excessive current consumption, and heat generation due to excessive reflected waves that may occur when impedance matching is not performed can be solved.
다음, 커넥터부(200)는 앞서 도 1 내지 3을 통해 전술한 커넥터부(200)와 동일한 구성으로 상세한 설명은 생략하도록 한다.Next, the connector unit 200 has the same configuration as the connector unit 200 described above with reference to FIGS. 1 to 3, and detailed description thereof will be omitted.
다음, 컨트롤러부(300`)는 상기 헤드부(100)의 진공자외선 램프가 엑시머 램프일 경우, 상기 커넥터부(200)와 연결되어 내부에 상기 커넥터부(200)를 통해 상기 헤드부(100)의 엑시머 램프(120`)로 고주파 전원을 인가하는 고주파 발생부(310`)를 포함한다.Next, when the vacuum ultraviolet ray lamp of the head unit 100 is an excimer lamp, the controller unit 300' is connected to the connector unit 200 and internally connects the head unit 100 through the connector unit 200. It includes a high frequency generator (310') that applies high frequency power to the excimer lamp (120').
전술한 컨트롤러부(300)는 헤드부(100)의 진공자외선 램프가 중수소 램프일 경우 고주파 발생이 필요하지 않으며, 고전압 발생부(310)가 필요한 반면, 상기 컨트롤러부(300`)는 상기 진공자외선 램프가 엑시머 램프일 경우 고주파 발생을 필요하여 고주파 발생부(310`)가 필요하기 때문에, 상기 컨트롤러부(300, 300`)는 이와 같이 구성이 진공자외선 램프에 따라 변경되어 적용될 수 있음을 의미한다.The above-described controller unit 300 does not require high frequency generation when the vacuum ultraviolet ray lamp of the head unit 100 is a deuterium lamp and requires the high voltage generator 310, while the controller unit 300' uses the vacuum ultraviolet ray lamp. When the lamp is an excimer lamp, high frequency generation is required and a high frequency generator 310' is required, so the configuration of the controller units 300 and 300' can be changed and applied depending on the vacuum ultraviolet lamp. .
상기 고주파 발생부(310`)는 외부에 마련된 전압공급원로부터 인가된 전압을 통해 고주파(RF)를 발생시키는 것으로, 상기 컨트롤러부(300`) 내부 또는 외부에 별도로 마련될 수 있다.The high-frequency generator 310' generates high-frequency waves (RF) through a voltage applied from an external voltage supply source, and may be provided separately inside or outside the controller unit 300'.
또한, 상기 고주파 발생부(310`)는 상기 엑시머 램프에 진공자외선(플라즈마 파장) 발생을 위해 전력을 공급하기 위해 고주파로 발진되는 RF 신호를 발생시키는 전원 공급장치로서, 도시되지는 않았지만 고주파로 발진되는 발진기와 전원을 증폭시켜 고출력의 RF(Radio Frequency) 파워를 발생시키는 전력 증폭기를 포함하는 장치를 의미할 수 있다.In addition, the high frequency generator 310' is a power supply device that generates an RF signal that oscillates at a high frequency to supply power to the excimer lamp to generate vacuum ultraviolet rays (plasma wavelengths), and although not shown, it oscillates at a high frequency. It may refer to a device that includes an oscillator and a power amplifier that amplifies power to generate high-output RF (Radio Frequency) power.
도 7은 본 발명의 또 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저를 개략적으로 나타낸 구성도이다.Figure 7 is a schematic configuration diagram of a flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention.
도 7을 참조하여, 본 발명의 또 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저에 대하여 설명하자면, 본 발명의 또 다른 실시예에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는 헤드부(100, 100`), 커넥터부(200), 컨트롤러부(300, 300`) 및 분배기(400)를 포함한다.Referring to FIG. 7, to describe the flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention, the flexible vacuum ultraviolet ionizer for a vacuum chamber according to another embodiment of the present invention has a head portion (100). , 100'), a connector unit 200, a controller unit (300, 300'), and a distributor 400.
상기 헤드부(100, 100`), 상기 커넥터부(200) 및 컨트롤러부(300, 300`)는 전술한 헤드부(100, 100`), 커넥터부(200) 및 컨트롤러부(300, 300`)와 동일한 구성으로 상세한 설명은 생략하도록 한다.The head portions (100, 100'), the connector portions (200), and the controller portions (300, 300') are the aforementioned head portions (100, 100'), connector portions (200), and controller portions (300, 300'). ), so detailed description will be omitted.
상기 분배기(400)는 커넥터부(200)와 컨트롤러부(300, 300`) 사이에서 다수 개의 커넥터부(200)와 전기적으로 연결 가능하도록 형성되어, 상기 컨트롤러부(300, 300`)로부터 발생되는 고전압(또는 고주파)을 다수 개의 헤드부(100, 100`)로 인가한다.The distributor 400 is formed to be electrically connectable to a plurality of connector parts 200 between the connector part 200 and the controller parts 300, 300', so that the distribution generated from the controller parts 300, 300' High voltage (or high frequency) is applied to a plurality of head parts (100, 100').
또한, 상기 분배기(400) 일측에는 진공 챔버 외부에 위치하는 컨트롤러부(300)와 전기적으로 연결될 수 있도록 하는 제4 커넥터(410)가 형성된다.In addition, a fourth connector 410 is formed on one side of the distributor 400 to enable electrical connection with the controller unit 300 located outside the vacuum chamber.
상기 제4 커넥터(410)는 고주파(RF) 케이블, 전압 케이블 등을 포함하는 케이블 중 어느 하나로 상기 컨트롤러부(300 또는 300`)의 제3 커넥터(320)와 전기적으로 연결할 수 있도록 한다.The fourth connector 410 can be electrically connected to the third connector 320 of the controller unit 300 or 300' using any one of cables including a radio frequency (RF) cable and a voltage cable.
상기 분배기(400)는 선택적으로 진공 챔버 또는 진공 챔버 외부에 별도로 마련될 수 있다.The distributor 400 may optionally be provided separately in the vacuum chamber or outside the vacuum chamber.
또한, 상기 분배기(400)는 진공 챔버 내측(내부) 또는 외측에 마련될 수 있음은 물론이다. Additionally, of course, the distributor 400 may be provided inside (inside) or outside the vacuum chamber.
상기 분배기(400)가 진공 챔버에 마련될 때, 예컨대, 진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 진공 챔버와 결합될 수 있다.When the distributor 400 is provided in a vacuum chamber, it can be combined with the vacuum chamber, for example, using a view port or feed-through formed in the vacuum chamber.
이와 같이, 상기 분배기(400)가 진공 챔버와 결합될 때, 상기 분배기(400) 일측(상기 제4 커넥터)은 진공 플랜지(240)에 의해 진공 챔버에 고정결합되어, 진공 챔버 내부가 진공상태를 유지할 수 있도록 한다.In this way, when the distributor 400 is coupled to the vacuum chamber, one side of the distributor 400 (the fourth connector) is fixedly coupled to the vacuum chamber by the vacuum flange 240, so that the inside of the vacuum chamber is maintained in a vacuum state. make it possible to maintain it.
상기 분배기(400) 타측은 제5 커넥터(420)가 적어도 둘 이상 형성된다.At least two fifth connectors 420 are formed on the other side of the distributor 400.
상기 제5 커넥터(420)는 상기 커넥터부(200)의 제2 커넥터(230) 측과 연결하기 위한 구성으로, 적어도 둘 이상의 커넥터부(200)와 전기적으로 연결하기 위함이다.The fifth connector 420 is configured to connect to the second connector 230 side of the connector unit 200, and is intended to electrically connect at least two connector units 200.
즉, 상기 분배기(400)를 통해 적어도 둘 이상의 커넥터부(200)와 연결함은 둘 이상의 헤드부(100, 100`)와 연결될 수 있음을 의미한다.In other words, connecting at least two or more connector parts 200 through the distributor 400 means that it can be connected to two or more head parts 100 and 100'.
따라서, 상기 분배기(400)는 하나의 컨트롤러부(300, 300`)를 통해 다수의 헤드부(100, 100`)와 연결하여 제전 성능을 향상시킬 수 있으며, 설치에 있어서 구성을 간소화시킬 수 있는 효과가 있다.Therefore, the distributor 400 can improve static electricity elimination performance by connecting to a plurality of head units 100, 100' through one controller unit 300, 300', and can simplify the configuration in installation. It works.
추가 실시예로, 상기 분배기(400)는 상술한 바와 같이 별도로 마련될 수 있으나, 상기 고전압 발생부(310`) 또는 상기 고주파 발생부(310`)와 일체형으로 형성될 수 있음은 물론이다.In a further embodiment, the distributor 400 may be provided separately as described above, but of course, it may be formed integrally with the high voltage generator 310' or the high frequency generator 310'.
한편, 도시되어 있지는 않지만, 본 발명에 따른 진공 챔버용 플렉시블 진공자외선 이오나이저는, 헤드부(100, 100`) 내부에 상기 진공자외선 램프(120, 120`)의 점등 상태를 감지하기 위한 센서부(미도시)를 더 포함하여 이루어질 수 있다.Meanwhile, although not shown, the flexible vacuum ultraviolet ionizer for a vacuum chamber according to the present invention includes a sensor unit for detecting the lighting state of the vacuum ultraviolet lamps (120, 120') inside the head unit (100, 100'). (not shown) may be further included.
상기 센서부는 빛을 감지하기 위한 수광센서가 구비되는 센서보드와 상기 센서와 상기 진공자외선 램프와 연결되는 라이트 파이프를 포함한다.The sensor unit includes a sensor board equipped with a light-receiving sensor for detecting light, and a light pipe connected to the sensor and the vacuum ultraviolet lamp.
따라서, 상기 센서보드는 상기 라이트 파이프를 통해 상기 진공자외선 램프와 연결되어, 상기 라이트 파이프를 따라 전달되는 빛을 통해 점등 상태를 감지하는 것이 가능하다.Accordingly, the sensor board is connected to the vacuum ultraviolet ray lamp through the light pipe and can detect the lighting state through light transmitted along the light pipe.
상기 센서보드는 상기 헤드부 내부 상부측에 형성될 수 있으나, 정전기 제거장치의 구조 또는 제전 사양에 따라 크기 및 형상이 일부 변경되어 센서보드가 소헤드부 내 측면부측에 형성될 수 있으며, 이에 한정되는 것은 아니다.The sensor board may be formed on the upper side inside the head portion, but the size and shape may be partially changed depending on the structure or static electricity removal specifications of the static electricity removal device, so that the sensor board may be formed on the side portion within the small head portion, and is limited to this. It doesn't work.
또한, 상기 라이트 파이프도 상기 헤드부 내부에 형성되는 상기 센서보드의 위치에 따라 일자 또는 구부러진 형상을 가질 수 있다.Additionally, the light pipe may also have a straight or curved shape depending on the position of the sensor board formed inside the head.
또한, 상기 라이트 파이프는 광원 이외의 소스로부터의 유입을 차단하기 위하여 라이트 파이프의 측면은 빛을 차단하는 구조로 이루어진다.Additionally, the side of the light pipe is structured to block light in order to block the inflow of light from sources other than the light source.
한편, 상기 센서부는 별도의 유무선 통신 수단을 통해 외부에 마련된 제어부 등에 정보를 전송토록 구성될 수 있다.Meanwhile, the sensor unit may be configured to transmit information to an external control unit, etc. through a separate wired or wireless communication means.
이상과 첨부된 도면을 참조하여 본 발명의 실시예를 설명하였지만, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자는 본 발명이 그 기술적 사상이나 필수적인 특징을 변경하지 않고서 다른 구체적인 형태로 실시될 수 있다는 것을 이해할 수 있을 것이다. 그러므로 이상에서 기술한 실시예들은 모든 면에서 예시적인 것이며 한정적이 아닌 것으로 이해되어야 한다.Although embodiments of the present invention have been described with reference to the above and the attached drawings, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical idea or essential features. You will understand that it exists. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive.
<부호의 설명><Explanation of symbols>
100, 100`: 헤드부100, 100`: Head part
110: 헤드부 하우징110: Head housing
120: 진공자외선 램프(중수소 램프)120: Vacuum ultraviolet lamp (deuterium lamp)
120`: 엑시머 램프120`: excimer lamp
130: 제1 커넥터130: first connector
140, 150: 오링140, 150: O-ring
160: RF 링160: RF ring
170: RF 코일170: RF coil
180: 트리머 커패시터180: trimmer capacitor
200: 커넥터부200: connector part
210: 가요관210: Song Hall
220: 케이블220: cable
230: 제2 커넥터230: second connector
240: 진공 플랜지240: vacuum flange
300, 300`: 컨트롤러부300, 300`: Controller part
310: 고압발생부310: High pressure generator
310`: RF 발생부310`: RF generator
320: 제3 커넥터320: third connector
400: 분배기400: distributor
410: 제4 커넥터410: fourth connector
420: 제5 커넥터420: Fifth connector

Claims (23)

  1. 진공 챔버에 설치되는 진공자외선 램프를 이용한 진공 챔버용 플렉시블 진공자외선 이오나이저에 있어서,In the flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber,
    진공 챔버 내에서 진공자외선을 방사하는 중수소 램프를 포함하는 헤드부;A head unit including a deuterium lamp that emits vacuum ultraviolet rays within a vacuum chamber;
    상기 헤드부와 결합되며, 상기 헤드부의 진공자외선 방사 방향을 대전물체를 향해 임의의 각도로 구부릴 수 있도록 해주는 커넥터부; 및A connector part coupled to the head part and allowing the vacuum ultraviolet ray radiation direction of the head part to be bent at an arbitrary angle toward a charged object; and
    상기 커넥터부와 결합되며, 내부 일측에 구비되어 상기 진공자외선 램프로 고전압을 인가하는 고전압 발생부를 포함하는 컨트롤러부;를 포함하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber including a controller unit coupled to the connector unit and provided on one side of the interior and including a high voltage generator for applying a high voltage to the vacuum ultraviolet lamp.
  2. 제1항에 있어서,According to paragraph 1,
    상기 헤드부는,The head part,
    내부에 진공자외선 램프가 삽입 장착될 때, 상기 진공자외선 램프 상부에 진공용 오링이 적어도 한 개 이상 구비되는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that at least one vacuum O-ring is provided on the upper part of the vacuum ultraviolet lamp when a vacuum ultraviolet lamp is inserted and mounted therein.
  3. 제1항에 있어서,According to paragraph 1,
    상기 커넥터부는,The connector part,
    임의의 각도로 구부릴 수 있는 가요관을 포함하는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, comprising a flexible tube that can be bent at an arbitrary angle.
  4. 제3항에 있어서,According to paragraph 3,
    상기 가요관은,The flexible pipe is,
    임의의 각도로 구부러진 후 고정력을 가지는 재질로 이루어지는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it is made of a material that has fixing force after being bent at an arbitrary angle.
  5. 제1항에 있어서,According to paragraph 1,
    상기 커넥터부는,The connector part,
    일측에 진공 챔버와 결합하기 위한 진공 플랜지를 포함하는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, comprising a vacuum flange on one side for coupling to the vacuum chamber.
  6. 제1항에 있어서,According to paragraph 1,
    상기 커넥터부는,The connector part,
    진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  7. 제1항에 있어서,According to paragraph 1,
    상기 고전압 발생부는,The high voltage generator,
    상기 컨트롤러부 내부 또는 외부에 별도로 마련될 수 있는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it can be separately provided inside or outside the controller unit.
  8. 제1항에 있어서,According to paragraph 1,
    상기 커넥터부와 상기 컨트롤러부 사이에서 다수 개의 커넥터부와 전기적으로 연결 가능하도록 형성되어,Formed to be electrically connectable to a plurality of connector parts between the connector part and the controller part,
    상기 컨트롤러부로부터 발생되는 고전압을 다수 개의 헤드부로 인가하도록 하기 위한 분배기를 더 포함하는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, further comprising a distributor for applying the high voltage generated from the controller unit to the plurality of head units.
  9. 제8항에 있어서,According to clause 8,
    상기 분배기는,The distributor,
    선택적으로 진공 챔버 또는 진공 챔버 외부에 별도로 마련될 수 있는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, which can optionally be separately provided in the vacuum chamber or outside the vacuum chamber.
  10. 제9항에 있어서,According to clause 9,
    상기 분배기는,The distributor,
    진공 챔버에 마련될 때, 진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that when provided in a vacuum chamber, it is combined with the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  11. 제8항에 있어서,According to clause 8,
    상기 분배기는,The distributor is,
    상기 고전압 발생부와 일체형 또는 별도로 마련될 수 있는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it can be integrated with the high voltage generator or provided separately.
  12. 진공 챔버에 설치되는 진공자외선 램프를 이용한 진공 챔버용 플렉시블 진공자외선 이오나이저에 있어서,In the flexible vacuum ultraviolet ionizer for a vacuum chamber using a vacuum ultraviolet lamp installed in the vacuum chamber,
    진공 챔버 내에서 진공자외선을 방사하는 엑시머 램프를 포함하는 헤드부;A head unit including an excimer lamp that emits vacuum ultraviolet rays within a vacuum chamber;
    상기 헤드부와 결합되며, 상기 헤드부의 진공자외선 방사 방향을 대전물체를 향해 임의의 각도로 구부릴 수 있도록 해주는 커넥터부; 및A connector part coupled to the head part and allowing the vacuum ultraviolet ray radiation direction of the head part to be bent at an arbitrary angle toward a charged object; and
    상기 커넥터부와 결합되며, 내부 일측에 구비되어 상기 엑시머 램프로 고주파(RF) 전원을 인가하는 고주파 발생부를 포함하는 컨트롤러부;를 포함하는 진공 챔버용 플렉시블 진공자외선 이오나이저A flexible vacuum ultraviolet ionizer for a vacuum chamber comprising a controller unit coupled to the connector unit and including a high frequency generator unit provided on one side of the interior to apply high frequency (RF) power to the excimer lamp.
  13. 제12항에 있어서,According to clause 12,
    상기 헤드부는,The head part,
    내부에 진공자외선 램프가 삽입 장착될 때, 상기 진공자외선 램프 상부에 진공용 오링이 적어도 한 개 이상 구비되는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that at least one vacuum O-ring is provided on the upper part of the vacuum ultraviolet lamp when a vacuum ultraviolet lamp is inserted and mounted therein.
  14. 제12항에 있어서,According to clause 12,
    상기 커넥터부는,The connector part,
    임의의 각도로 구부릴 수 있는 가요관을 포함하는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, comprising a flexible tube that can be bent at an arbitrary angle.
  15. 제12항에 있어서,According to clause 12,
    상기 가요관은,The flexible pipe is,
    임의의 각도로 구부러진 후 고정력을 가지는 재질로 이루어지는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it is made of a material that has fixing force after being bent at an arbitrary angle.
  16. 제12항에 있어서,According to clause 12,
    상기 커넥터부는,The connector part,
    일측에 진공 챔버와 결합하기 위한 진공 플랜지를 포함하는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, comprising a vacuum flange on one side for coupling to the vacuum chamber.
  17. 제12항에 있어서,According to clause 12,
    상기 커넥터부는,The connector part,
    진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it is coupled to the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  18. 제12항에 있어서,According to clause 12,
    상기 고주파 발생부는,The high frequency generator,
    상기 컨트롤러부 내부 또는 외부에 별도로 마련될 수 있는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it can be separately provided inside or outside the controller unit.
  19. 제12항에 있어서,According to clause 12,
    상기 커넥터부와 상기 컨트롤러부 사이에서 다수 개의 커넥터부가 전기적으로 연결 가능하도록 형성되어,A plurality of connector parts are formed to be electrically connectable between the connector part and the controller part,
    상기 컨트롤러부로부터 발생되는 고주파 전원을 다수 개의 헤드부로 인가하도록 하기 위한 분배기를 더 포함하는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, further comprising a distributor for applying high-frequency power generated from the controller unit to a plurality of head units.
  20. 제19항에 있어서,According to clause 19,
    상기 분배기는,The distributor,
    선택적으로 진공 챔버 또는 진공 챔버 외부에 별도로 마련될 수 있는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, which can optionally be separately provided in the vacuum chamber or outside the vacuum chamber.
  21. 제20항에 있어서,According to clause 20,
    상기 분배기는,The distributor,
    진공 챔버에 마련될 때, 진공 챔버에 형성된 뷰 포트(view port) 또는 피드 스루(feed-through)를 활용하여 상기 진공 챔버와 결합되는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that when provided in a vacuum chamber, it is combined with the vacuum chamber using a view port or feed-through formed in the vacuum chamber.
  22. 제19항에 있어서,According to clause 19,
    상기 분배기는,The distributor,
    상기 고주파 발생부와 일체형 또는 별도로 마련될 수 있는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, characterized in that it can be integrated with the high frequency generator or provided separately.
  23. 제12항에 있어서,According to clause 12,
    상기 헤드부는,The head part,
    상기 엑시머 램프와 상기 고주파 발생부 사이의 임피던스를 정합시키기 위해 마련되는 트리머 캐패시터를 포함하는 것을 특징으로 하는 진공 챔버용 플렉시블 진공자외선 이오나이저.A flexible vacuum ultraviolet ionizer for a vacuum chamber, comprising a trimmer capacitor provided to match impedance between the excimer lamp and the high frequency generator.
PCT/KR2023/003587 2021-12-06 2023-03-17 Flexible vacuum ultraviolet ionizer for vacuum chamber WO2023177258A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR20210173224 2021-12-06
KR10-2022-0034179 2022-03-18
KR1020220034179A KR20230085050A (en) 2021-12-06 2022-03-18 Flexible VUV ionizer for vacuum chamber

Publications (1)

Publication Number Publication Date
WO2023177258A1 true WO2023177258A1 (en) 2023-09-21

Family

ID=86763116

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2023/003587 WO2023177258A1 (en) 2021-12-06 2023-03-17 Flexible vacuum ultraviolet ionizer for vacuum chamber

Country Status (3)

Country Link
KR (1) KR20230085050A (en)
TW (1) TW202339549A (en)
WO (1) WO2023177258A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004304123A (en) * 2003-04-01 2004-10-28 Tokyo Electron Ltd Treatment apparatus and method
KR100539359B1 (en) * 1999-12-28 2005-12-27 쿼크 시스템즈 가부시키가이샤 Excimer irradiation apparatus
JP2007012467A (en) * 2005-06-30 2007-01-18 Hamamatsu Photonics Kk Static eliminator and chamber equipped therewith
KR20100024886A (en) * 2008-08-26 2010-03-08 하리슨 도시바 라이팅 가부시키가이샤 Ultraviolet ray radiation apparatus
KR20120033290A (en) * 2010-09-29 2012-04-06 오스람 실바니아 인코포레이티드 Power splitter circuit for electrodeless lamp

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102065347B1 (en) 2018-02-13 2020-01-13 (주)선재하이테크 VUV Ionizer
KR20210119203A (en) 2020-03-24 2021-10-05 (주)선재하이테크 On-off control system of ionizer using VUV

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100539359B1 (en) * 1999-12-28 2005-12-27 쿼크 시스템즈 가부시키가이샤 Excimer irradiation apparatus
JP2004304123A (en) * 2003-04-01 2004-10-28 Tokyo Electron Ltd Treatment apparatus and method
JP2007012467A (en) * 2005-06-30 2007-01-18 Hamamatsu Photonics Kk Static eliminator and chamber equipped therewith
KR20100024886A (en) * 2008-08-26 2010-03-08 하리슨 도시바 라이팅 가부시키가이샤 Ultraviolet ray radiation apparatus
KR20120033290A (en) * 2010-09-29 2012-04-06 오스람 실바니아 인코포레이티드 Power splitter circuit for electrodeless lamp

Also Published As

Publication number Publication date
KR20230085050A (en) 2023-06-13
TW202339549A (en) 2023-10-01

Similar Documents

Publication Publication Date Title
WO2009091189A2 (en) Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the same
US20080302761A1 (en) Plasma processing system and use thereof
KR100393277B1 (en) Electron source, image display device manufacturing apparatus and method, and substrate processing appararus and method
WO2022114721A1 (en) Static electricity eliminating apparatus using excimer lamp
WO2014104615A1 (en) Plasma apparatus and substrate processing apparatus
KR20010112324A (en) Plasma processing apparatus and method of maintaining the same
WO2023177258A1 (en) Flexible vacuum ultraviolet ionizer for vacuum chamber
WO2014007472A1 (en) Plasma generation apparatus and plasma generation method
WO2023027342A1 (en) Substrate processing apparatus
WO2022181927A1 (en) Load lock chamber, and substrate treatment apparatus
WO2020162653A1 (en) Method for controlling driving frequency of pulsed variable frequency rf generator
WO2021172686A1 (en) Low-voltage plasma ionizer
WO2023128325A1 (en) Substrate treatment apparatus
WO2016108568A1 (en) Plasma processing apparatus
WO2022145737A1 (en) Substrate processing device
WO2024063362A1 (en) Electrodeless excimer lamp
WO2018174508A1 (en) Semiconductor donor substrate, and system and method for manufacturing organic light emitting device
WO2023080548A1 (en) Substrate processing device and substrate processing method
WO2023234568A1 (en) Substrate processing apparatus
WO2019117657A1 (en) Light sintering device and cooling method for light sintering device
WO2023085662A1 (en) Support unit and substrate processing apparatus comprising same
WO2023090685A1 (en) Substrate treatment apparatus and substrate treatment method
WO2023080325A1 (en) Substrate processing apparatus and substrate processing method
WO2023008728A1 (en) Photoionizer
WO2023017908A1 (en) Substrate processing device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23771137

Country of ref document: EP

Kind code of ref document: A1