WO2022114721A1 - Static electricity eliminating apparatus using excimer lamp - Google Patents

Static electricity eliminating apparatus using excimer lamp Download PDF

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Publication number
WO2022114721A1
WO2022114721A1 PCT/KR2021/017248 KR2021017248W WO2022114721A1 WO 2022114721 A1 WO2022114721 A1 WO 2022114721A1 KR 2021017248 W KR2021017248 W KR 2021017248W WO 2022114721 A1 WO2022114721 A1 WO 2022114721A1
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WO
WIPO (PCT)
Prior art keywords
excimer lamp
static electricity
vacuum
present
discharge tube
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Application number
PCT/KR2021/017248
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French (fr)
Korean (ko)
Inventor
이동훈
이병준
이수영
설동규
Original Assignee
(주)선재하이테크
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Publication of WO2022114721A1 publication Critical patent/WO2022114721A1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel

Definitions

  • the present invention relates to an apparatus for removing static electricity using an excimer lamp, and more particularly, to an apparatus for removing static electricity using an excimer lamp that performs a static elimination function by irradiating vacuum ultraviolet rays using the excimer lamp.
  • the present applicant has proposed the invention of Republic of Korea Patent Registration No. 10-2065347 'electrostatic removal device using vacuum ultraviolet rays', and in the above patent, it is connected to the vacuum chamber, which is the above problem, to remove vacuum ultraviolet rays.
  • the conventional static electricity removal device using vacuum ultraviolet rays is a filament type, and the filament requires a preheating time to emit hot electrons.
  • heat generated by the filament was high, and it took about 25 seconds or more to preheat, making it difficult to control real-time on/off.
  • An object of the present invention is to solve the above-mentioned problems.
  • An excimer of a sealed structure in which an inert gas is enclosed which is a structure in which a lamp can emit light without a preheating time by an external electrode, without a filament being present in the light emitting process.
  • An object of the present invention is to provide an apparatus for removing static electricity using an excimer lamp capable of performing a static elimination function in a special environment such as a vacuum chamber by irradiating vacuum UV rays using an excimer lamp.
  • an apparatus for removing static electricity using an excimer lamp is an apparatus for removing static electricity using an excimer lamp installed in a vacuum chamber.
  • An excimer lamp module including a body having an opening communicating with a part of the space, an excimer lamp provided inside the accommodation space for emitting vacuum ultraviolet rays, and an irradiator for irradiating the radiated vacuum ultraviolet rays into the vacuum chamber, and the body It is formed on one side and includes a socket unit including a connector for electrically connecting the excimer lamp and a voltage generating device provided inside or outside.
  • the excimer lamp includes a discharge tube having a communication shape having a discharge space filled with an inert gas therein, and an external electrode surrounding the discharge tube, and applies power to the external electrode to emit ultraviolet light from the inert gas. It is characterized by radiating.
  • the discharge tube is characterized in that it is made of a dielectric material.
  • the excimer lamp may further include an internal electrode formed inside the discharge tube, and apply power to the external electrode and the internal electrode to emit ultraviolet light from the inert gas.
  • the irradiation unit is provided with an irradiation window coated with magnesium fluoride (Magnesium Fluoride) or calcium fluoride (Calcium Fluoride), characterized in that the vacuum ultraviolet rays are irradiated through the irradiation window.
  • magnesium fluoride Magneium Fluoride
  • calcium fluoride Calcium Fluoride
  • the opening further includes a guide part for guiding the vacuum ultraviolet rays irradiated from the irradiating part to be irradiated toward the inside of the vacuum chamber.
  • the static electricity removal device using the excimer lamp is characterized in that an on-off control device is provided outside, and on/off control is possible in real time through the on-off control device.
  • the static electricity removal device using the excimer lamp according to the present invention is an excimer lamp with a sealed structure in which an inert gas is enclosed, which is a structure in which a filament (heat source) is not present in the light emitting process and the lamp can emit light without a preheating time by an external electrode (Excimer lamp) is used to irradiate the vacuum UV rays to perform the static electricity elimination function, so that the operating temperature of the lamp (excimer lamp) is low when performing the static electricity elimination function. It has the advantage of being able to control On/Off.
  • FIG. 1 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
  • FIG. 3 is a partially exploded perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
  • FIG. 4 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
  • FIG 5 is an exemplary view for explaining another embodiment of an excimer lamp constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • FIG. 6 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • FIG. 7 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • FIG. 8 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • FIG. 9 is an internal perspective view illustrating the inside of an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • FIG. 10 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • 211a, 211b discharge tube
  • FIG. 1 is a perspective view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention
  • FIG. 2 is a cross-sectional view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention
  • FIG. It is a partial exploded perspective view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment.
  • the static electricity removal device using an excimer lamp according to the present invention is a static electricity removal device using an excimer lamp installed in a vacuum chamber. .
  • the vacuum chamber is a vacuum deposition facility in a special environment such as handling a reduced pressure vacuum environment or inert gas, such as a deposition process or an in-chamber process, during the manufacturing process as display and semiconductor technologies become more precise, and argon (Ar), helium It is filled with an inert gas including (He) and neon (Ne), and the object enters the inside through the inlet.
  • FIGS. 1 to 3 An apparatus for removing static electricity using an excimer lamp according to a first embodiment of the present invention will be described in detail with reference to FIGS. 1 to 3 .
  • the static electricity removal apparatus 1000 using an excimer lamp according to the first embodiment of the present invention is a static electricity removal apparatus using an excimer lamp installed in a vacuum chamber.
  • a body 100a, an excimer lamp module 200a, and a socket part 300 are used to remove energy from an excimer lamp.
  • the body 100a has an accommodating space 110a in which the excimer lamp module 200a is accommodated.
  • an opening 120a communicating with a part of the accommodation space 110a is formed.
  • the body 100a may be formed in a shape as shown in the drawings, but this is only an example for description and is not limited thereto, and the size and shape according to the equipment including a vacuum chamber or its structure or antistatic specifications. This may be configured with some changes. This will be described again below.
  • the excimer lamp module 200a is inserted and mounted in the accommodation space 110a to irradiate the target object with vacuum UV rays, and may refer to a vacuum UV ray generator.
  • the excimer lamp module 200a includes an excimer lamp 210a and an irradiator 220a.
  • the excimer lamp 210a is provided inside the excimer lamp module 200a, and is a lamp that emits vacuum ultraviolet rays. There is no filament therein, and an inert gas capable of emitting gas as a light source without the need for preheating time is enclosed. It means a lamp with a closed structure.
  • an O-ring 130 for vacuum is provided on the upper portion of the excimer lamp module 200a, and an O-ring for preventing damage to the excimer lamp module at the lower portion 130 may be provided.
  • FIG. 4 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
  • the excimer lamp 210a includes a discharge tube 211a and an external electrode 212a.
  • the discharge tube 211a may be formed in a communication shape made of a dielectric material through a conventional dielectric manufacturing process such as ceramic.
  • the dielectric is based on a ceramic material having both electrical insulation and dielectric properties, and includes quartz, glass, aluminum oxide, titanium oxide, magnesium oxide, silicon oxide, silver phosphate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, Iron oxide, lead zirconate titanate, carbon nanotubes, etc. can be used.
  • a discharge space 211-1 is formed in the discharge tube 211a, and an inert gas is filled in the discharge space 211-1.
  • the external electrode 212a has a shape such as a mesh surrounding the discharge tube 211a, a cylinder made of a conductive material such as a thin plate, and the like, and may be made of a metal material such as aluminum.
  • the external electrode 212a is connected to an internal or external voltage generator (not shown) through a socket part 300 to be described later, so that the external electrode 212a can receive power.
  • the excimer lamp 210a when an AC voltage is applied to the external electrode 212a, the inert gas forms excimer molecules (excited state) in a manner such as a dielectric barrier discharge (DBD), When the excimer molecule transitions to the ground (ground) state, it emits ultraviolet light having a wavelength of 100 to 200 nm.
  • DBD dielectric barrier discharge
  • the ultraviolet light emitted from the excimer lamp 210a may have a wavelength range of 100 nm or more and 200 nm or less depending on the type of the inert gas.
  • FIG 5 is an exemplary view for explaining another embodiment of an excimer lamp constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • the excimer lamp 210b includes a discharge tube 211b , an external electrode 212b , and an internal electrode 213 .
  • the discharge tube 211b includes a cylindrical external discharge tube having a predetermined diameter and an internal discharge tube having a diameter smaller than the diameter of the external discharge tube, and formed inside the external discharge tube, between the external discharge tube and the inner discharge tube A discharge space 211 - 2 is formed in the .
  • the discharge space 211-2 is filled with an inert gas, and the discharge tube 211b is made of a quartz glass or hard glass material through which ultraviolet rays can pass.
  • the external electrode 212b has a cylindrical shape made of a thin plate surrounding the discharge tube 211b, and may be made of a conductive metal material.
  • the internal electrode 213 is formed inside the discharge tube 211b and may be made of a conductive metal material. Preferably, the internal electrode 213 is formed inside the internal discharge tube.
  • the internal electrode 213 is connected to a power terminal (not shown) for supplying power from the outside, and the external electrode 212b has an internal or external voltage generating device (not shown) through a socket part 300 to be described later. ), so that the external electrode 212b and the internal electrode 213 may receive power.
  • the excimer lamp 210b forms excimer molecules (excited state) by discharging the inert gas enclosed in the discharge tube 211b, and when the excimer molecules transition to the ground state, ultraviolet light having a wavelength of 100 to 200 nm will emit
  • the excimer lamp 210a refers to an excimer lamp in which an internal electrode is not formed
  • the excimer lamp 210b refers to an excimer lamp including an internal electrode
  • the irradiation part 220a is a part in which the excimer lamp module 200a is inserted into the opening 120a and protrudes to the outside of the body 100a, and the vacuum UV rays emitted from the excimer lamp 210a are irradiated in one direction. serves to make it possible.
  • the irradiation unit 220a has an irradiation window 221 through which vacuum ultraviolet rays can pass on one side, and the vacuum ultraviolet rays are irradiated to the outside through the irradiation window 221 .
  • the irradiation window 221 may be coated with magnesium fluoride (MgF2) or calcium fluoride having excellent vacuum ultraviolet transmittance in the wavelength region.
  • MgF2 magnesium fluoride
  • CaF2 calcium fluoride having excellent vacuum ultraviolet transmittance in the wavelength region.
  • the irradiation unit 220a may be formed in a straight type similar to ' ⁇ ' in the overall shape as shown in the drawing, but is not limited thereto, and as another embodiment, an Angle type similar to ' ⁇ ' (or Long- It is not excluded that it can be formed as a nose projecting type).
  • FIG. 6 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention
  • FIG. 7 is a diagram for removing static electricity using an excimer lamp according to another embodiment of the present invention. It is an exemplary diagram for explaining the excimer lamp module constituting the device.
  • the irradiation part 220b is formed on one side, and the shape of the whole is ' ⁇ ' and It may be formed in a similar angle type (or long-nose projecting type).
  • the excimer lamp 210b is shown inside the excimer lamp module 200b to give an example, but the present invention is not limited thereto, and as shown in FIG. 7 , the excimer lamp module 200b has the excimer inside Of course, it may be configured to include a lamp (210a).
  • FIG. 8 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention
  • FIG. 9 is an internal perspective view showing the inside of the apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention
  • FIG. 10 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
  • a body 100b is provided inside the excimer lamp module to apply the angle-type excimer lamp module 200b.
  • An accommodating space 110b in which the 200b is accommodated may be formed, and an opening 120b communicating with a portion of the accommodating space 110b may be formed at one side.
  • the socket unit 300 includes a connector formed on the body 100a and 100b to electrically connect the excimer lamps 210a and 210b to an internal or external voltage generator.
  • socket part 300 is shown to be formed on one side of the body in the drawings, the present invention is not limited thereto, and may be formed on the lower surface of the body.
  • the static electricity removal device using the excimer lamp according to the present invention is coupled to the openings 120a and 120b, and for guiding the vacuum UV rays irradiated from the irradiation units 220a and 200b to be irradiated toward the inside of the vacuum chamber. It may further include a guide unit 400 .
  • the guide part 400 extends from the opening to surround the irradiation part, and the extended end is coupled to a vacuum chamber (not shown) provided outside.
  • One end of the guide part 400 covers the opening, and the other end is connected to the vacuum chamber, so that the end of the irradiation part accommodated therein is guided so as to directly face the inside of the vacuum chamber.
  • the coupling part may be formed in a vacuum chamber to be directly connected to the coupling part and the opening part.
  • the static electricity removal device using the excimer lamp according to the present invention may further include a fan 500 formed on one side of the body 100a and 100b.
  • the fan 500 may be formed on the lower portion of the body, but when the socket portion 300 is formed on the lower portion of the body, it may be formed on one side.
  • the fan 500 is formed in the body to form an air flow to help dissipate heat generated by the excimer lamps 210a and 210b toward the open lower part of the body.
  • the flow of air formed by the fan 330 is formed through the inside of the body.
  • the body may have an air transport path (not shown) through which the air can pass therein, and an air discharge through hole (not shown) provided separately on one side (preferably the upper surface) of the body to the outside. It may be configured to be discharged as
  • the static electricity removal device using the excimer lamp according to the present invention is provided with an external on-off control device, and by controlling the voltage application through the on-off control device, on/off control is possible in real time.
  • the filament-type deuterium lamp is a specification in which a filament is essential to maintain or increase performance. Therefore, in the conventional deuterium lamp, real-time on/off control was impossible.
  • the excimer lamps 210a and 210b have no filaments therein and can emit gas as a light source without a preheating time, so real-time on/off control is possible.

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  • Elimination Of Static Electricity (AREA)
  • Cleaning In General (AREA)

Abstract

A static electricity eliminating apparatus using an excimer lamp that is installed in a vacuum chamber according to the present invention comprises: a body having an accommodation space formed therein for accommodating an excimer lamp module, and an opening that is in communication with a part of the accommodation space; the excimer lamp module which is provided in the accommodation space and includes an excimer lamp radiating vacuum ultraviolet ray and an irradiation unit for irradiating the radiated vacuum ultraviolet ray into the vacuum chamber; and a socket unit including a connector which is formed on one side of the body and electrically connects the excimer lamp and a voltage generation device that is provided inside or outside.

Description

엑시머 램프를 이용한 정전기 제거 장치Electrostatic Removal Device Using Excimer Lamp
본 발명은 엑시머 램프를 이용한 정전기 제거 장치에 관한 것으로서, 더욱 상세하게는 엑시머 램프를 이용하여 진공자외선을 조사함으로써 제전 기능을 수행하는 엑시머 램프를 이용한 정전기 제거 장치에 관한 것이다. The present invention relates to an apparatus for removing static electricity using an excimer lamp, and more particularly, to an apparatus for removing static electricity using an excimer lamp that performs a static elimination function by irradiating vacuum ultraviolet rays using the excimer lamp.
LCD, OLED, 웨이퍼 외 각종 기판 또는 시트 구조나 각종 필름 구조 등 각종 소재 또는 제품 처리 공정에서 미세한 먼지가 부착되거나 정전기에 의해 소자가 훼손되는 등의 문제가 발생하는 것을 미연에 방지하기 위하여 정전기 제거 장치를 설치하는 것이 일반적이다.A device for removing static electricity to prevent problems such as attachment of fine dust or damage to elements due to static electricity in various materials or product processing processes such as various substrates or sheet structures or film structures other than LCD, OLED, wafer, etc. It is common to install
한편, 최근 들어 LCD, OLED, 반도체 기술이 더욱 정밀화됨에 따라 증착 공정이나 진공 챔버 내 공정과 같이 감압 진공 환경에서 진행되거나 불활성가스를 취급하는 등 특수한 환경에서 진행되는 공정도 크게 증가하고 있는 추세인데, 이 경우 엑스선 방사식 장치의 경우에는 대기압 하에서와는 달리 상술한 특수한 환경에서는 정전기 제거 성능이 낮아 활용하기 어렵고, 코로나 방전식 장치는 고전압 방전에 의한 스퍼터링 현상, 이온 밸런스 조정에 따른 불편 등의 문제점이 있어 적용이 어렵다.On the other hand, as LCD, OLED, and semiconductor technologies have become more precise in recent years, processes carried out in a special environment, such as a vapor deposition process or a process in a vacuum chamber, or in a special environment such as handling an inert gas, are also increasing significantly. In this case, in the case of an X-ray radiation device, unlike under atmospheric pressure, it is difficult to use due to the low static removal performance in the above-mentioned special environment, and the corona discharge device has problems such as sputtering by high voltage discharge and inconvenience due to ion balance adjustment. it is difficult to apply.
이러한 문제점을 개선하기 위하여, 본 출원인은 대한민국 등록특허 제10-2065347호 '진공 자외선을 이용한 정전기 제거장치'라는 발명을 제안한 바가 있으며, 상기의 특허에서는 위의 문제점인 진공 챔버에 연결되어 진공자외선을 조사하여 제전 기능을 수행함으로써, 상기 문제점이 개선된 바가 있으나, 이러한 종래의 진공자외선을 이용한 정전기 제거 장치는 필라멘트(Filament) 타입으로써, 상기 필라멘트는 열전자를 방출하기 위해 예열시간이 필요한 문제점이 있으며, 이러한 필라멘트 타입의 중수소 진공자외선 램프 동작 시, 필라멘트로 인한 발열이 높을뿐더러, 예열시간이 약 25초 이상 걸려 실시간 On/Off 제어가 어려운 문제점이 있었다.In order to improve this problem, the present applicant has proposed the invention of Republic of Korea Patent Registration No. 10-2065347 'electrostatic removal device using vacuum ultraviolet rays', and in the above patent, it is connected to the vacuum chamber, which is the above problem, to remove vacuum ultraviolet rays. Although the above problem has been improved by performing the antistatic function by irradiation, the conventional static electricity removal device using vacuum ultraviolet rays is a filament type, and the filament requires a preheating time to emit hot electrons. During the operation of this filament type deuterium vacuum UV lamp, heat generated by the filament was high, and it took about 25 seconds or more to preheat, making it difficult to control real-time on/off.
본 발명의 목적은 상술한 바와 같은 문제점을 해결하기 위한 것으로, 발광 프로세스 상에 필라멘트가 존재하지 않고, 외부 전극에 의해 예열시간 없이 램프가 발광할 수 있는 구조인 불활성 기체가 봉입된 밀폐형 구조의 엑시머 램프(Excimer lamp)를 이용하여 진공자외선을 조사함으로써 진공 챔버와 같은 특수한 환경에서 제전 기능을 수행할 수 있는 엑시머 램프를 이용한 정전기 제거 장치를 제공하는 것이다.SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems. An excimer of a sealed structure in which an inert gas is enclosed, which is a structure in which a lamp can emit light without a preheating time by an external electrode, without a filament being present in the light emitting process. An object of the present invention is to provide an apparatus for removing static electricity using an excimer lamp capable of performing a static elimination function in a special environment such as a vacuum chamber by irradiating vacuum UV rays using an excimer lamp.
본 발명의 목적들은 이상에서 언급한 목적으로 제한되지 않으며, 언급되지 않은 또 다른 목적들은 아래의 기재로부터 본 발명의 기술분야에서 통상의 지식을 지닌 자에게 명확하게 이해될 수 있을 것이다.Objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those of ordinary skill in the art from the following description.
상기 목적을 달성하기 위하여, 본 발명에 따른 엑시머 램프를 이용한 정전기 제거 장치는, 진공 챔버에 설치되는 엑시머 램프를 이용한 정전기 제거 장치에 있어서, 내부에 엑시머 램프 모듈이 수용되는 수용공간이 형성되고 상기 수용공간 일부와 연통하는 개구부가 형성되는 몸체, 상기 수용공간 내부에 구비되어 진공자외선을 방사하는 엑시머 램프와 상기 방사된 진공자외선을 진공 챔버 내부로 조사하기 위한 조사부를 포함하는 엑시머 램프 모듈, 및 상기 몸체 일측에 형성되어 상기 엑시머 램프와 내부 또는 외부에 마련된 전압 발생 장치를 전기적으로 연결하는 커넥터를 포함하는 소켓부를 포함한다.In order to achieve the above object, an apparatus for removing static electricity using an excimer lamp according to the present invention is an apparatus for removing static electricity using an excimer lamp installed in a vacuum chamber. An excimer lamp module including a body having an opening communicating with a part of the space, an excimer lamp provided inside the accommodation space for emitting vacuum ultraviolet rays, and an irradiator for irradiating the radiated vacuum ultraviolet rays into the vacuum chamber, and the body It is formed on one side and includes a socket unit including a connector for electrically connecting the excimer lamp and a voltage generating device provided inside or outside.
또한, 상기 엑시머 램프는, 내부에 불활성 기체가 충진되는 방전 공간이 형성되는 연통 형상의 방전관과 상기 방전관을 둘러싸는 외부 전극을 포함하여, 상기 외부 전극에 전원을 인가하여 상기 불활성 기체로부터 자외선 광을 방사하는 것을 특징으로 한다.In addition, the excimer lamp includes a discharge tube having a communication shape having a discharge space filled with an inert gas therein, and an external electrode surrounding the discharge tube, and applies power to the external electrode to emit ultraviolet light from the inert gas. It is characterized by radiating.
또한, 상기 방전관은, 유전체로 이루어지는 것을 특징으로 한다.In addition, the discharge tube is characterized in that it is made of a dielectric material.
또한, 상기 엑시머 램프는, 상기 방전관 내부에 형성되는 내부 전극을 더 포함하여, 상기 외부 전극과 내부 전극에 전원을 인가하여 상기 불활성 기체로부터 자외선 광을 방사하는 것을 특징으로 한다.In addition, the excimer lamp may further include an internal electrode formed inside the discharge tube, and apply power to the external electrode and the internal electrode to emit ultraviolet light from the inert gas.
또한, 상기 조사부는, 마그네슘 플루오라이드(Magnesium Fluoride) 또는 칼슘 플루오라이드(Calcium Fluoride)로 코팅된 조사창이 구비되어, 상기 조사창을 통해 진공자외선이 조사되는 것을 특징으로 한다.In addition, the irradiation unit, is provided with an irradiation window coated with magnesium fluoride (Magnesium Fluoride) or calcium fluoride (Calcium Fluoride), characterized in that the vacuum ultraviolet rays are irradiated through the irradiation window.
또한, 상기 개구부에 결합되어 상기 조사부에서 조사되는 진공자외선을 진공 챔버 내부를 향해 조사될 수 있도록 가이드하기 위한 가이드부를 더 포함한다.In addition, it is coupled to the opening further includes a guide part for guiding the vacuum ultraviolet rays irradiated from the irradiating part to be irradiated toward the inside of the vacuum chamber.
또한, 상기 엑시머 램프를 이용한 정전기 제거 장치는, 외부에 온오프 제어 장치가 구비되어, 상기 온오프 제어 장치를 통해 실시간으로 On/Off 제어가 가능한 것을 특징으로 한다. In addition, the static electricity removal device using the excimer lamp is characterized in that an on-off control device is provided outside, and on/off control is possible in real time through the on-off control device.
본 발명에 따른 엑시머 램프를 이용한 정전기 제거 장치는 발광 프로세스 상에 필라멘트(열원)가 존재하지 않고, 외부 전극에 의해 예열시간 없이 램프가 발광할 수 있는 구조인 불활성 기체가 봉입된 밀폐형 구조의 엑시머 램프(Excimer lamp)를 이용하여 진공자외선을 조사하여 제전기능을 수행할 수 있게 함으로써, 제전기능 수행 시, 램프(엑시머 램프)의 동작 온도가 낮은 효과가 있으며, 또한, 예열시간이 필요하지 않으므로, 실시간 On/Off 제어가 가능한 장점이 있다. The static electricity removal device using the excimer lamp according to the present invention is an excimer lamp with a sealed structure in which an inert gas is enclosed, which is a structure in which a filament (heat source) is not present in the light emitting process and the lamp can emit light without a preheating time by an external electrode (Excimer lamp) is used to irradiate the vacuum UV rays to perform the static electricity elimination function, so that the operating temperature of the lamp (excimer lamp) is low when performing the static electricity elimination function. It has the advantage of being able to control On/Off.
도 1은 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 사시도이다.1 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
도 2는 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 단면도이다.2 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
도 3은 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 일부 분해사시도이다.3 is a partially exploded perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
도 4는 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프 모듈을 설명하기 위한 예시도이다.4 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
도 5는 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프의 다른 실시예를 설명하기 위한 예시도이다.5 is an exemplary view for explaining another embodiment of an excimer lamp constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
도 6은 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프 모듈을 설명하기 위한 예시도이다.6 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
도 7은 본 발명의 또 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프 모듈을 설명하기 위한 예시도이다.7 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
도 8은 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 사시도이다.8 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
도 9는 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치의 내부를 나타내기 위한 내부사시도이다.9 is an internal perspective view illustrating the inside of an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
도 10은 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 단면도이다.10 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
<부호의 설명><Explanation of code>
100a, 100b: 몸체100a, 100b: body
110a, 110b: 수용공간110a, 110b: accommodation space
120a, 120b: 개구부120a, 120b: opening
200a, 200b: 엑시머 램프 모듈200a, 200b: excimer lamp module
210a, 200b: 엑시머 램프210a, 200b: excimer lamp
211a, 211b: 방전관211a, 211b: discharge tube
212a, 212b: 외부 전극212a, 212b: external electrodes
213: 내부 전극213: inner electrode
220a, 220b: 조사부220a, 220b: irradiation unit
221: 조사창221: investigation window
300: 소켓부300: socket part
400: 가이드부400: guide unit
500: 팬500: fan
본 발명의 이점 및 특징, 그리고 그것들을 달성하는 방법은 첨부되는 도면과함께 상세하게 후술되어 있는 실시예들을 참조하면 명확해질 것이다. 그러나 본 발명은 이하에서 개시되는 실시예들에 한정되는 것이 아니라 서로 다른 다양한 형태로 구현될 것이며, 단지 본 실시예들은 본 발명의 개시가 완전하도록 하며, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 발명의 범주를 완전하게 알려주기 위해 제공되는 것이며, 본 발명은 청구항의 범주에 의해 정의될 뿐이다. Advantages and features of the present invention, and a method of achieving them, will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.
아래 첨부된 도면을 참조하여 본 발명의 실시를 위한 구체적인 내용을 상세히 설명한다. 도면에 관계없이 동일한 부재번호는 동일한 구성요소를 지칭하며, "및/또는"은 언급된 아이템들의 각각 및 하나 이상의 모든 조합을 포함한다.With reference to the accompanying drawings will be described in detail for the implementation of the present invention. Irrespective of the drawings, like reference numbers refer to like elements, and "and/or" includes each and every combination of one or more of the recited items.
본 명세서에서 사용된 용어는 실시예들을 설명하기 위한 것이며, 본 발명을 제한하고자 하는 것은 아니다. 본 명세서에서, 단수형은 문구에서 특별히 언급하지 않는 한 복수형도 포함한다. 명세서에서 사용되는 "포함한다(comprises)" 및/또는 "포함하는(comprising)"은 언급된 구성요소 외에 하나 이상의 다른 구성요소의 존재 또는 추가를 배제하지 않는다.The terminology used herein is for the purpose of describing the embodiments, and is not intended to limit the present invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and/or “comprising” does not exclude the presence or addition of one or more other components in addition to the stated components.
다른 정의가 없다면, 본 명세서에서 사용되는 모든 용어(기술 및 과학적 용어를 포함)는 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 공통적으로 이해될 수 있는 의미로 사용될 수 있을 것이다. 또 일반적으로 사용되는 사전에 정의되어 있는 용어들은 명백하게 특별히 정의되어 있지 않는 한 이상적으로 또는 과도하게 해석되지 않는다.Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used with the meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless clearly defined in particular.
이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 상세히 설명하기로 한다. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 사시도이고, 도 2는 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 단면도이고, 도 3은 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 일부 분해사시도이다.1 is a perspective view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention, FIG. 2 is a cross-sectional view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention, and FIG. It is a partial exploded perspective view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment.
본 발명에 따른 엑시머 램프를 이용한 정전기 제거 장치는 진공 챔버에 설치되는 엑시머 램프를 이용한 정전기 제거 장치로서, 진공 또는 불활성가스 챔버에 연결되어 진공자외선을 조사함으로써 제전 기능을 수행하는 정전기 제거 장치를 의미한다. The static electricity removal device using an excimer lamp according to the present invention is a static electricity removal device using an excimer lamp installed in a vacuum chamber. .
상기 진공 챔버는 디스플레이 및 반도체 기술이 더욱 정밀화됨에 따라 제조공정 중 증착 공정이나 챔버 내 공정과 같이 감압 진공 환경이나 불활성가스를 취급하는 등 특수한 환경의 진공증착설비로, 내부에 아르곤(Ar), 헬륨(He), 네온(Ne) 등을 포함하는 비활성가스로 충진되며, 피대전체가 입구를 통해 내부로 진입하게 된다.The vacuum chamber is a vacuum deposition facility in a special environment such as handling a reduced pressure vacuum environment or inert gas, such as a deposition process or an in-chamber process, during the manufacturing process as display and semiconductor technologies become more precise, and argon (Ar), helium It is filled with an inert gas including (He) and neon (Ne), and the object enters the inside through the inlet.
도 1 내지 도 3을 참조하여, 본 발명의 제1 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치에 대하여 상세히 설명하도록 한다.An apparatus for removing static electricity using an excimer lamp according to a first embodiment of the present invention will be described in detail with reference to FIGS. 1 to 3 .
본 발명의 제1 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치(1000)는 진공 챔버에 설치되는 엑시머 램프를 이용한 정전기 제거 장치에 있어서, 크게, 몸체(100a), 엑시머 램프 모듈(200a) 및 소켓부(300)를 포함한다.The static electricity removal apparatus 1000 using an excimer lamp according to the first embodiment of the present invention is a static electricity removal apparatus using an excimer lamp installed in a vacuum chamber. In general, a body 100a, an excimer lamp module 200a, and a socket part 300 .
먼저, 상기 몸체(100a)는 내부에 엑시머 램프 모듈(200a)이 수용되는 수용공간(110a)이 형성된다. 또한, 상기 수용공간(110a) 일부와 연통하는 개구부(120a)가 형성된다.First, the body 100a has an accommodating space 110a in which the excimer lamp module 200a is accommodated. In addition, an opening 120a communicating with a part of the accommodation space 110a is formed.
상기 몸체(100a)는 도면에 도시된 바와 같은 형상으로 형성될 수 있으나, 이는 설명을 위한 일례일 뿐, 이에 한정되지 않으며, 진공 챔버를 포함하는 설비나 그 구조 또는, 제전 사양에 따라 크기 및 형상이 일부 변경되어 구성될 수 있다. 이에 대해서는 하기에서 다시 설명하도록 한다.The body 100a may be formed in a shape as shown in the drawings, but this is only an example for description and is not limited thereto, and the size and shape according to the equipment including a vacuum chamber or its structure or antistatic specifications. This may be configured with some changes. This will be described again below.
다음, 상기 엑시머 램프 모듈(200a)은 상기 수용공간(110a)에 삽입 장착되어 피대전체에 진공자외선을 조사하기 위한 것으로, 진공자외선 발생기를 의미할 수 있다.Next, the excimer lamp module 200a is inserted and mounted in the accommodation space 110a to irradiate the target object with vacuum UV rays, and may refer to a vacuum UV ray generator.
상기 엑시머 램프 모듈(200a)은 엑시머 램프(210a)와 조사부(220a)를 포함한다.The excimer lamp module 200a includes an excimer lamp 210a and an irradiator 220a.
상기 엑시머 램프(210a)는 상기 엑시머 램프 모듈(200a) 내부에 구비되어, 진공자외선을 방사시키는 램프로서, 내부에 필라멘트가 없고 예열시간이 필요 없이 기체를 광원으로 발광할 수 있는 불활성 기체가 봉입된 밀폐형 구조의 램프를 의미한다.The excimer lamp 210a is provided inside the excimer lamp module 200a, and is a lamp that emits vacuum ultraviolet rays. There is no filament therein, and an inert gas capable of emitting gas as a light source without the need for preheating time is enclosed. It means a lamp with a closed structure.
상기 엑시머 램프 모듈(200a)은 상기 수용공간(110a)에 삽입 장착될 때, 상기 엑시머 램프 모듈(200a) 상부에 진공용 오링(130)이 구비되며, 하부에는 엑시머 램프 모듈 파손을 방지하기 위한 오링(130)이 구비될 수 있다. When the excimer lamp module 200a is inserted and mounted in the receiving space 110a, an O-ring 130 for vacuum is provided on the upper portion of the excimer lamp module 200a, and an O-ring for preventing damage to the excimer lamp module at the lower portion 130 may be provided.
도 4는 본 발명의 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프 모듈을 설명하기 위한 예시도이다.4 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
도 4를 더 참조하여, 상기 엑시머 램프 모듈(200a)에 대하여 좀 더 구체적으로 설명하자면, 상기 엑시머 램프(210a)는 방전관(211a)과 외부 전극(212a)을 포함한다.4 , the excimer lamp module 200a will be described in more detail. The excimer lamp 210a includes a discharge tube 211a and an external electrode 212a.
상기 방전관(211a)은 통상적인 세라믹 등 유전체 제조공정을 통해 유전체로 이루어지는 연통 형상으로 이루어질 수 있다.The discharge tube 211a may be formed in a communication shape made of a dielectric material through a conventional dielectric manufacturing process such as ceramic.
상기 유전체는 전기적 절연성 및 유전성을 동시에 갖는 세라믹 재질을 기초로 하며 석영, 유리, 산화알루미늄, 산화티탄, 산화마그네슘, 산화실리콘, 은인산염, 실리콘카바이드, 산화인듐, 산화카드뮴, 산화비스무스, 산화아연, 산화철, 티탄산 지르콘산 납, 카본 나노튜브 등을 사용할 수 있다.The dielectric is based on a ceramic material having both electrical insulation and dielectric properties, and includes quartz, glass, aluminum oxide, titanium oxide, magnesium oxide, silicon oxide, silver phosphate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, Iron oxide, lead zirconate titanate, carbon nanotubes, etc. can be used.
상기 방전관(211a) 내부에는 방전 공간(211-1)이 형성되어 상기 방전 공간(211-1)에는 불활성 기체가 충진된다.A discharge space 211-1 is formed in the discharge tube 211a, and an inert gas is filled in the discharge space 211-1.
상기 외부 전극(212a)은 상기 방전관(211a)을 감싸는 매쉬, 얇은 판 등 전도성 재질로 만들어진 원통 등 형상을 지니며, 알루미늄 등 금속 재질로 이루어질 수 있다.The external electrode 212a has a shape such as a mesh surrounding the discharge tube 211a, a cylinder made of a conductive material such as a thin plate, and the like, and may be made of a metal material such as aluminum.
상기 외부 전극(212a)에는 후술하는 소켓부(300)를 통해 내부 또는 외부의 전압 발생 장치(미도시)와 연결되어 있어, 상기 외부 전극(212a)은 전원을 공급받을 수 있다.The external electrode 212a is connected to an internal or external voltage generator (not shown) through a socket part 300 to be described later, so that the external electrode 212a can receive power.
따라서, 상기 엑시머 램프(210a)는 상기 외부 전극(212a)에 교류 전압을 인가하면, 유전체 장벽 방전(Dielectric Barrier Discharge, DBD) 등의 방식으로 불 불활성 기체가 엑시머 분자(여기 상태)를 형성시키고, 상기 엑시머 분자가 기저(바닥) 상태로 천이할 때, 100~200nm 파장의 자외선 광을 방사하게 된다.Therefore, in the excimer lamp 210a, when an AC voltage is applied to the external electrode 212a, the inert gas forms excimer molecules (excited state) in a manner such as a dielectric barrier discharge (DBD), When the excimer molecule transitions to the ground (ground) state, it emits ultraviolet light having a wavelength of 100 to 200 nm.
상기 엑시머 램프(210a)에서 방사되는 자외선 광은 불활성 기체의 종류에 따라서 100nm이상 200nm이하의 파장 영역을 가질 수 있다. The ultraviolet light emitted from the excimer lamp 210a may have a wavelength range of 100 nm or more and 200 nm or less depending on the type of the inert gas.
도 5는 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프의 다른 실시예를 설명하기 위한 예시도이다.5 is an exemplary view for explaining another embodiment of an excimer lamp constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
도 5를 참조하여, 본 발명에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프의 다른 실시예를 설명하도록 한다.Another embodiment of the excimer lamp constituting the static electricity removal device using the excimer lamp according to the present invention will be described with reference to FIG. 5 .
도 5를 참조하면, 엑시머 램프(210b)는 방전관(211b), 외부 전극(212b) 및 내부 전극(213)을 포함한다.Referring to FIG. 5 , the excimer lamp 210b includes a discharge tube 211b , an external electrode 212b , and an internal electrode 213 .
상기 방전관(211b)은 소정의 직경을 가지는 원통 형상의 외부 방전관과 상기 외부 방전관의 직경보다 더 작은 직경을 가지되, 상기 외부 방전관 내부에 형성되는 내부 방전관으로 이루어져, 상기 외부 방전관과 상기 내부 방전관 사이에는 방전 공간(211-2)이 형성된다. 상기 방전 공간(211-2)에는 불활성 기체로 충진되며, 상기 방전관(211b)은 자외선이 투과될 수 있는 석영유리(Quartz) 또는 경질유리(Hard glass) 재질로 이루어진다.The discharge tube 211b includes a cylindrical external discharge tube having a predetermined diameter and an internal discharge tube having a diameter smaller than the diameter of the external discharge tube, and formed inside the external discharge tube, between the external discharge tube and the inner discharge tube A discharge space 211 - 2 is formed in the . The discharge space 211-2 is filled with an inert gas, and the discharge tube 211b is made of a quartz glass or hard glass material through which ultraviolet rays can pass.
상기 외부 전극(212b)은 상기 방전관(211b)을 감싸는 얇은 판으로 만들어진 원통 형상을 지니며, 전도성 금속 재질로 이루어질 수 있다.The external electrode 212b has a cylindrical shape made of a thin plate surrounding the discharge tube 211b, and may be made of a conductive metal material.
상기 내부 전극(213)은 상기 방전관(211b) 내부에 형성되며, 전도성 금속 재질로 이루어질 수 있다. 바람직하게는 상기 내부 전극(213) 상기 내부 방전관 내측에 형성된다.The internal electrode 213 is formed inside the discharge tube 211b and may be made of a conductive metal material. Preferably, the internal electrode 213 is formed inside the internal discharge tube.
상기 내부 전극(213)에는 외부로부터 전원을 공급하기 위한 전원단자(미도시)로 연결되고, 상기 외부 전극(212b)에는 후술하는 소켓부(300)를 통해 내부 또는 외부의 전압 발생 장치(미도시)와 연결되어 있어, 상기 외부 전극(212b) 및 상기 내부 전극(213)은 전원을 공급받을 수 있다.The internal electrode 213 is connected to a power terminal (not shown) for supplying power from the outside, and the external electrode 212b has an internal or external voltage generating device (not shown) through a socket part 300 to be described later. ), so that the external electrode 212b and the internal electrode 213 may receive power.
따라서, 상기 엑시머 램프(210b)는 상기 방전관(211b) 내 봉입된 불활성 기체를 방전시킴으로써 엑시머 분자(여기 상태)를 형성시키고, 상기 엑시머 분자가 기저 상태로 천이할 때, 100~200nm 파장의 자외선 광을 방사하게 된다.Accordingly, the excimer lamp 210b forms excimer molecules (excited state) by discharging the inert gas enclosed in the discharge tube 211b, and when the excimer molecules transition to the ground state, ultraviolet light having a wavelength of 100 to 200 nm will emit
정리하자면, 상기 엑시머 램프(210a)는 내부 전극이 형성되지 않는 엑시머 램프를 의미하며, 상기 엑시머 램프(210b)는 내부 전극을 포함하는 엑시머 램프를 의미한다.In summary, the excimer lamp 210a refers to an excimer lamp in which an internal electrode is not formed, and the excimer lamp 210b refers to an excimer lamp including an internal electrode.
상기 조사부(220a)는 상기 엑시머 램프 모듈(200a)이 상기 개구부(120a)에 삽입 및 상기 몸체(100a) 외측으로 돌출되는 부분으로, 상기 엑시머 램프(210a)에서 방사된 진공자외선을 일측 방향으로 조사되도록 하는 역할을 한다.The irradiation part 220a is a part in which the excimer lamp module 200a is inserted into the opening 120a and protrudes to the outside of the body 100a, and the vacuum UV rays emitted from the excimer lamp 210a are irradiated in one direction. serves to make it possible.
상기 조사부(220a)는 일측에 진공자외선이 투과할 수 있는 조사창(221)이 형성되어, 진공자외선이 상기 조사창(221)을 통해 외부로 조사하게 된다.The irradiation unit 220a has an irradiation window 221 through which vacuum ultraviolet rays can pass on one side, and the vacuum ultraviolet rays are irradiated to the outside through the irradiation window 221 .
상기 조사창(221)은 상기 파장 영역의 진공자외선 투과율이 우수한 마그네슘 플루오라이드(Magnesium Fluoride, MgF₂) 또는 칼슘 플루오라이드(Calcium Fluoride)로 코팅되어 이루어질 수 있다.The irradiation window 221 may be coated with magnesium fluoride (MgF₂) or calcium fluoride having excellent vacuum ultraviolet transmittance in the wavelength region.
상기 조사부(220a)는 도면에 도시된 바와 같이 전체적인 형상이 '│'와 유사한 Straight 타입으로도 형성될 수 있으나, 이에 제한되는 것은 아니며, 다른 실시예로서 '┤'와 유사한 Angle 타입(또는 Long-nose projecting 타입)으로 형성될 수 있음을 배제하지 않는다.The irradiation unit 220a may be formed in a straight type similar to '│' in the overall shape as shown in the drawing, but is not limited thereto, and as another embodiment, an Angle type similar to '┤' (or Long- It is not excluded that it can be formed as a nose projecting type).
하기에서는 본 발명의 다른 실시예에 따른 상기 Angle 타입으로 구성되는 엑시머 램프를 이용한 정전기 제거 장치에 대하여 간략히 설명하도록 한다.Hereinafter, an apparatus for removing static electricity using an excimer lamp of the angle type according to another embodiment of the present invention will be briefly described.
도 6은 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프 모듈을 설명하기 위한 예시도이고, 도 7은 본 발명의 또 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프 모듈을 설명하기 위한 예시도이다.6 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention, and FIG. 7 is a diagram for removing static electricity using an excimer lamp according to another embodiment of the present invention. It is an exemplary diagram for explaining the excimer lamp module constituting the device.
도 6을 참조하면, 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 구성하는 엑시머 램프 모듈(200b)은 조사부(220b)가 일측에 형성되어, 그 형상이 전체적으로, '┤'와 유사한 Angle 타입(또는 Long-nose projecting 타입)으로 형성될 수 있다.Referring to FIG. 6 , in the excimer lamp module 200b constituting the static electricity removal device using the excimer lamp according to another embodiment of the present invention, the irradiation part 220b is formed on one side, and the shape of the whole is '┤' and It may be formed in a similar angle type (or long-nose projecting type).
도 6에서는 엑시머 램프 모듈(200b) 내부에 상기 엑시머 램프(210b)를 도시하여 일례를 들었지만, 이에 제한되는 것은 아니고, 도 7에 도시된 바와 같이, 상기 엑시머 램프 모듈(200b)는 내부에 상기 엑시머 램프(210a)를 포함하여 구성될 수 있음은 물론이다.In FIG. 6 , the excimer lamp 210b is shown inside the excimer lamp module 200b to give an example, but the present invention is not limited thereto, and as shown in FIG. 7 , the excimer lamp module 200b has the excimer inside Of course, it may be configured to include a lamp (210a).
도 8은 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 사시도이고, 도 9는 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치의 내부를 나타내기 위한 내부사시도이고, 도 10은 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치를 나타낸 단면도이다.8 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention, and FIG. 9 is an internal perspective view showing the inside of the apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention. , FIG. 10 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
도 8 내지 10을 참조하면, 본 발명의 다른 실시예에 따른 엑시머 램프를 이용한 정전기 제거 장치는, 상기 Angle 타입의 엑시머 램프 모듈(200b)을 적용하기 위해 몸체(100b)는 내부에 상기 엑시머 램프 모듈(200b)이 수용되는 수용공간(110b)가 형성되고, 일측에는 상기 수용공간(110b) 일부와 연통하는 개구부(120b)가 형성되도록 이루어질 수 있다.8 to 10 , in an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention, a body 100b is provided inside the excimer lamp module to apply the angle-type excimer lamp module 200b. An accommodating space 110b in which the 200b is accommodated may be formed, and an opening 120b communicating with a portion of the accommodating space 110b may be formed at one side.
다음, 상기 소켓부(300)는 상기 몸체(100a, 100b)에 형성되어, 상기 엑시머 램프(210a, 210b)와 내부 또는 외부에 마련된 전압 발생 장치를 전기적으로 연결하는 커넥터를 포함한다.Next, the socket unit 300 includes a connector formed on the body 100a and 100b to electrically connect the excimer lamps 210a and 210b to an internal or external voltage generator.
상기 소켓부(300)는 도면 상에 상기 몸체 일측면에 형성되어 도시되어 있지만, 이에 한정되는 것은 아니며, 상기 몸체 하부면에 형성될 수 있음은 물론이다.Although the socket part 300 is shown to be formed on one side of the body in the drawings, the present invention is not limited thereto, and may be formed on the lower surface of the body.
또한, 본 발명에 따른 엑시머 램프를 이용한 정전기 제거 장치는 상기 개구부(120a, 120b)에 결합되어, 상기 조사부(220a, 200b)에서 조사되는 진공자외선을 진공 챔버 내부를 향해 조사될 수 있도록 가이드하기 위한 가이드부(400)를 더 포함할 수 있다.In addition, the static electricity removal device using the excimer lamp according to the present invention is coupled to the openings 120a and 120b, and for guiding the vacuum UV rays irradiated from the irradiation units 220a and 200b to be irradiated toward the inside of the vacuum chamber. It may further include a guide unit 400 .
상기 가이드부(400)는 상기 개구부에서 상기 조사부를 둘러싸며 연장되되, 연장 끝단은 외부에 마련된 진공 챔버(미도시)와 결합된다.The guide part 400 extends from the opening to surround the irradiation part, and the extended end is coupled to a vacuum chamber (not shown) provided outside.
상기 가이드부(400)는 일단은 상기 개구부를 커버하고, 타단은 상기 진공 챔버에 연결됨으로써, 내부에 수용된 상기 조사부의 끝단이 직접 상기 진공 챔버의 내부를 향할 수 있도록 가이드한다.One end of the guide part 400 covers the opening, and the other end is connected to the vacuum chamber, so that the end of the irradiation part accommodated therein is guided so as to directly face the inside of the vacuum chamber.
상기 가이드부(400)가 형성되지 않는 경우, 진공 챔버에 결합부가 형성되도록 하여 상기 결합부와 상기 개구부에 직접 연결되도록 구성될 수 있음을 배제하지 않는다.When the guide part 400 is not formed, it is not excluded that the coupling part may be formed in a vacuum chamber to be directly connected to the coupling part and the opening part.
또한, 도 2 또는 도 10을 참조하면, 본 발명에 따른 엑시머 램프를 이용한 정전기 제거 장치는 상기 몸체(100a, 100b) 일측에 형성되는 팬(500)을 더 포함하여 이루어질 수 있다.Also, referring to FIG. 2 or FIG. 10 , the static electricity removal device using the excimer lamp according to the present invention may further include a fan 500 formed on one side of the body 100a and 100b.
일례로, 상기 팬(500)은 상기 몸체 하부에 형성될 수 있으나, 상기 몸체 하부에 소켓부(300)가 형성되는 경우, 일측면에 형성될 수 있다.For example, the fan 500 may be formed on the lower portion of the body, but when the socket portion 300 is formed on the lower portion of the body, it may be formed on one side.
상기 팬(500)은 상기 몸체의 개방된 하부를 향해 상기 엑시머 램프(210a, 210b)에서 발생되는 열의 방출을 돕기 위한 공기의 흐름을 형성시킬 수 있도록 상기 몸체에 형성된다. The fan 500 is formed in the body to form an air flow to help dissipate heat generated by the excimer lamps 210a and 210b toward the open lower part of the body.
상기 팬(330)에 의해 형성되는 공기의 흐름은 상기 몸체 내부를 관통하여 형성된다. 이때 상기 몸체는 내부에 상기 공기가 통과할 수 있는 공기이송로(미도시)가 형성될 수 있으며, 상기 몸체의 일 측부(바람직하게는 상면)에 별도로 마련된 공기 배출 통공(미도시)을 통해 외부로 배출되도록 구성될 수 있다.The flow of air formed by the fan 330 is formed through the inside of the body. At this time, the body may have an air transport path (not shown) through which the air can pass therein, and an air discharge through hole (not shown) provided separately on one side (preferably the upper surface) of the body to the outside. It may be configured to be discharged as
한편, 본 발명에 따른 엑시머 램프를 이용한 정전기 제거 장치는 외부에 온오프 제어 장치가 구비되어, 상기 온오프 제어 장치를 통해 전압 인가를 제어함으로써, 실시간으로 On/Off 제어가 가능하다.On the other hand, the static electricity removal device using the excimer lamp according to the present invention is provided with an external on-off control device, and by controlling the voltage application through the on-off control device, on/off control is possible in real time.
이는, 일반적인 진공자외선 램프의 경우 필라멘트(Filament) 타입으로, 상기 필라멘트는 열전자를 방출하기 위해서는 예열시간(약 25sec)이 필요하다. 성능을 일정하게 유지하거나 늘리기 위해서는 상기 필라멘트 타입의 중수소 램프는 필라멘트가 필수적으로 들어가는 사양이기 때문이다. 따라서 종래의 중수소 램프는 실시간 On/Off 제어가 불가능했다.This is a filament type in the case of a general vacuum UV lamp, and the filament requires a preheating time (about 25 sec) in order to emit hot electrons. This is because the filament-type deuterium lamp is a specification in which a filament is essential to maintain or increase performance. Therefore, in the conventional deuterium lamp, real-time on/off control was impossible.
하지만, 본 발명에 따르면 상기 엑시머 램프(210a, 210b)는 내부에 필라멘트가 없고 예열시간이 필요 없이 기체를 광원으로 발광할 수 있는 특징으로 인하여 실시간 On/Off 제어가 가능하다.However, according to the present invention, the excimer lamps 210a and 210b have no filaments therein and can emit gas as a light source without a preheating time, so real-time on/off control is possible.
이상과 첨부된 도면을 참조하여 본 발명의 실시예를 설명하였지만, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자는 본 발명이 그 기술적 사상이나 필수적인 특징을 변경하지 않고서 다른 구체적인 형태로 실시될 수 있다는 것을 이해할 수 있을 것이다. 그러므로 이상에서 기술한 실시예들은 모든 면에서 예시적인 것이며 한정적이 아닌 것으로 이해되어야 한다. Although embodiments of the present invention have been described with reference to the above and the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing its technical spirit or essential features. You can understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

Claims (7)

  1. 진공 챔버에 설치되는 엑시머 램프를 이용한 정전기 제거 장치에 있어서,An apparatus for removing static electricity using an excimer lamp installed in a vacuum chamber, comprising:
    내부에 엑시머 램프 모듈이 수용되는 수용공간이 형성되고, 상기 수용공간 일부와 연통하는 개구부가 형성되는 몸체;a body having an accommodating space for accommodating the excimer lamp module therein and having an opening communicating with a portion of the accommodating space;
    상기 수용공간 내부에 구비되어 진공자외선을 방사하는 엑시머 램프와, 상기 방사된 진공자외선을 진공 챔버 내부로 조사하기 위한 조사부를 포함하는 엑시머 램프 모듈; 및an excimer lamp module provided in the receiving space and including an excimer lamp emitting vacuum UV rays and an irradiator for irradiating the radiated vacuum UV rays into the vacuum chamber; and
    상기 몸체 일측에 형성되어, 상기 엑시머 램프와 내부 또는 외부에 마련된 전압 발생 장치를 전기적으로 연결하는 커넥터를 포함하는 소켓부;를 포함하는 엑시머 램프를 이용한 정전기 제거 장치.and a socket part formed on one side of the body and including a connector electrically connecting the excimer lamp and a voltage generator provided inside or outside.
  2. 제1항에 있어서,According to claim 1,
    상기 엑시머 램프는,The excimer lamp,
    내부에 불활성 기체가 충진되는 방전 공간이 형성되는 연통 형상의 방전관과, 상기 방전관을 둘러싸는 외부 전극을 포함하여,A discharge tube having a communication shape having a discharge space filled with an inert gas therein, and an external electrode surrounding the discharge tube,
    상기 외부 전극에 전원을 인가하여 상기 불활성 기체로부터 자외선 광을 방사하는 것을 특징으로 하는 엑시머 램프를 이용한 정전기 제거 장치.An apparatus for removing static electricity using an excimer lamp, characterized in that by applying power to the external electrode to emit ultraviolet light from the inert gas.
  3. 제2항에 있어서,3. The method of claim 2,
    상기 방전관은,The discharge tube is
    유전체로 이루어지는 것을 특징으로 하는 엑시머 램프를 이용한 정전기 제거 장치.An apparatus for removing static electricity using an excimer lamp, characterized in that it is made of a dielectric material.
  4. 제2항에 있어서,3. The method of claim 2,
    상기 엑시머 램프는,The excimer lamp,
    상기 방전관 내부에 형성되는 내부 전극을 더 포함하여,Further comprising an internal electrode formed inside the discharge tube,
    상기 외부 전극과 내부 전극에 전원을 인가하여 상기 불활성 기체로부터 자외선 광을 방사하는 것을 특징으로 하는 엑시머 램프를 이용한 정전기 제거 장치.An apparatus for removing static electricity using an excimer lamp, characterized in that by applying power to the external electrode and the internal electrode to emit ultraviolet light from the inert gas.
  5. 제1항에 있어서,According to claim 1,
    상기 조사부는,The investigation unit,
    마그네슘 플루오라이드(Magnesium Fluoride) 또는 칼슘 플루오라이드(Calcium Fluoride)로 코팅된 조사창이 구비되어, 상기 조사창을 통해 진공자외선이 조사되는 것을 특징으로 하는 엑시머 램프를 이용한 정전기 제거 장치.An apparatus for removing static electricity using an excimer lamp, characterized in that an irradiation window coated with magnesium fluoride or calcium fluoride is provided, and vacuum ultraviolet rays are irradiated through the irradiation window.
  6. 제1항에 있어서,According to claim 1,
    상기 개구부에 결합되어, 상기 조사부에서 조사되는 진공자외선을 진공 챔버 내부를 향해 조사될 수 있도록 가이드하기 위한 가이드부를 더 포함하는 엑시머 램프를 이용한 정전기 제거 장치.The static electricity removal apparatus using an excimer lamp further comprising a guide part coupled to the opening part for guiding the vacuum ultraviolet rays irradiated from the irradiation part to be irradiated toward the inside of the vacuum chamber.
  7. 제1항에 있어서,The method of claim 1,
    상기 엑시머 램프를 이용한 정전기 제거 장치는,The static electricity removal device using the excimer lamp,
    외부에 온오프 제어 장치가 구비되어, 상기 온오프 제어 장치를 통해 실시간으로 On/Off 제어가 가능한 것을 특징으로 하는 엑시머 램프를 이용한 정전기 제거 장치.A static electricity removal device using an excimer lamp, characterized in that an on-off control device is provided outside, and on/off control is possible in real time through the on-off control device.
PCT/KR2021/017248 2020-11-25 2021-11-23 Static electricity eliminating apparatus using excimer lamp WO2022114721A1 (en)

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US5559584A (en) * 1993-03-08 1996-09-24 Nikon Corporation Exposure apparatus
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