KR20220072418A - Ionizer using excimer lamp - Google Patents

Abstract

An apparatus for removing static electricity using an excimer lamp according to the present invention is an apparatus for removing static electricity using an excimer lamp installed in a vacuum chamber, wherein an accommodating space for accommodating the excimer lamp module is formed therein, and an opening communicating with a part of the accommodating space is provided. An excimer lamp module including a body formed in the accommodating space and including an excimer lamp for emitting vacuum ultraviolet rays and an irradiator for irradiating the radiated vacuum ultraviolet rays into the vacuum chamber, and the excimer lamp formed on one side of the body And it includes a socket unit including a connector for electrically connecting the voltage generating device provided inside or outside.

Description

Electrostatic removal device using excimer lamp {Ionizer using excimer lamp}

The present invention relates to an apparatus for removing static electricity using an excimer lamp, and more particularly, to an apparatus for removing static electricity using an excimer lamp that performs a static elimination function by irradiating vacuum ultraviolet rays using the excimer lamp.

A device for removing static electricity to prevent problems such as attachment of fine dust or damage to elements due to static electricity in various materials or product processing processes such as various substrates or sheet structures or film structures other than LCD, OLED, wafer, etc. It is common to install

On the other hand, as LCD, OLED, and semiconductor technologies have become more precise in recent years, processes carried out in a special environment, such as a vapor deposition process or a process in a vacuum chamber, or in a special environment such as handling an inert gas, are also increasing significantly. In this case, in the case of an X-ray radiation device, unlike under atmospheric pressure, it is difficult to use due to the low static removal performance in the above-mentioned special environment, and the corona discharge device has problems such as sputtering due to high voltage discharge and inconvenience due to ion balance adjustment. it is difficult to apply.

In order to improve this problem, the present applicant has proposed the invention of Republic of Korea Patent Registration No. 10-2065347 'electrostatic removal device using vacuum ultraviolet rays', and in the above patent, it is connected to the vacuum chamber, which is the above problem, to remove vacuum ultraviolet rays. The above problem has been improved by performing the antistatic function by irradiation, but this conventional static electricity removal device using vacuum ultraviolet rays is a filament type, and the filament requires a preheating time to emit hot electrons. During the operation of this filament type deuterium vacuum UV lamp, heat generated by the filament was high, and it took about 25 seconds or more to preheat, making it difficult to control real-time on/off.

Republic of Korea Patent Registration No. 10-2065347 (2020.01.07.)

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems. An excimer of a sealed structure in which an inert gas is enclosed, which is a structure in which a lamp can emit light without a preheating time by an external electrode, without a filament being present in the light emitting process. An object of the present invention is to provide an apparatus for removing static electricity using an excimer lamp capable of performing a static elimination function in a special environment such as a vacuum chamber by irradiating vacuum UV rays using an excimer lamp.

Objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those of ordinary skill in the art from the following description.

In order to achieve the above object, an apparatus for removing static electricity using an excimer lamp according to the present invention is an apparatus for removing static electricity using an excimer lamp installed in a vacuum chamber. An excimer lamp module including a body having an opening communicating with a part of the space, an excimer lamp provided inside the accommodation space for emitting vacuum ultraviolet rays, and an irradiator for irradiating the radiated vacuum ultraviolet rays into the vacuum chamber, and the body It is formed on one side and includes a socket unit including a connector for electrically connecting the excimer lamp and a voltage generating device provided inside or outside.

In addition, the excimer lamp includes a discharge tube having a communication shape having a discharge space filled with an inert gas therein, and an external electrode surrounding the discharge tube, and applies power to the external electrode to emit ultraviolet light from the inert gas. It is characterized by radiating.

In addition, the discharge tube is characterized in that it is made of a dielectric material.

In addition, the excimer lamp may further include an internal electrode formed inside the discharge tube, and apply power to the external electrode and the internal electrode to emit ultraviolet light from the inert gas.

In addition, the irradiation unit, is provided with an irradiation window coated with magnesium fluoride (Magnesium Fluoride) or calcium fluoride (Calcium Fluoride), characterized in that the vacuum ultraviolet rays are irradiated through the irradiation window.

In addition, it is coupled to the opening further includes a guide part for guiding the vacuum ultraviolet rays irradiated from the irradiating part to be irradiated toward the inside of the vacuum chamber.

In addition, the static electricity removal device using the excimer lamp is characterized in that an on-off control device is provided outside, and on/off control is possible in real time through the on-off control device.

The static electricity removal device using the excimer lamp according to the present invention is an excimer lamp with a sealed structure in which an inert gas is enclosed, which is a structure in which a filament (heat source) is not present in the light emitting process and the lamp can emit light without a preheating time by an external electrode (Excimer lamp) is used to irradiate the vacuum UV rays to perform the static electricity elimination function, so that the operating temperature of the lamp (excimer lamp) is low when performing the static electricity elimination function. It has the advantage of being able to control On/Off.

1 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
2 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
3 is a partially exploded perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
4 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.
5 is an exemplary view for explaining another embodiment of an excimer lamp constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
6 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
7 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
8 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
9 is an internal perspective view illustrating the inside of an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.
10 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.

With reference to the accompanying drawings will be described in detail for the implementation of the present invention. Irrespective of the drawings, like reference numbers refer to like elements, and "and/or" includes each and every combination of one or more of the recited items.

The terminology used herein is for the purpose of describing the embodiments, and is not intended to limit the present invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, “comprises” and/or “comprising” does not exclude the presence or addition of one or more other components in addition to the stated components.

Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used with the meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless clearly defined in particular.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention, FIG. 2 is a cross-sectional view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention, and FIG. It is a partial exploded perspective view showing an apparatus for removing static electricity using an excimer lamp according to an embodiment.

The static electricity removal device using an excimer lamp according to the present invention is a static electricity removal device using an excimer lamp installed in a vacuum chamber. .

The vacuum chamber is a vacuum deposition facility in a special environment such as handling a reduced pressure vacuum environment or inert gas, such as a deposition process or an in-chamber process, during the manufacturing process as display and semiconductor technologies become more precise, and argon (Ar), helium It is filled with an inert gas including (He) and neon (Ne), and the object enters the inside through the inlet.

An apparatus for removing static electricity using an excimer lamp according to a first embodiment of the present invention will be described in detail with reference to FIGS. 1 to 3 .

The static electricity removal apparatus 1000 using an excimer lamp according to the first embodiment of the present invention is a static electricity removal apparatus using an excimer lamp installed in a vacuum chamber, and includes a body 100a, an excimer lamp module 200a and and a socket unit 300 .

First, the body 100a has an accommodating space 110a in which the excimer lamp module 200a is accommodated. In addition, an opening 120a communicating with a part of the accommodation space 110a is formed.

The body 100a may be formed in a shape as shown in the drawings, but this is only an example for description and is not limited thereto, and the size and shape according to the equipment including a vacuum chamber or its structure or antistatic specifications. This may be configured with some changes. This will be described again below.

Next, the excimer lamp module 200a is inserted and mounted in the accommodation space 110a to irradiate the target object with vacuum UV rays, and may refer to a vacuum UV ray generator.

The excimer lamp module 200a includes an excimer lamp 210a and an irradiator 220a.

The excimer lamp 210a is provided inside the excimer lamp module 200a, and is a lamp that emits vacuum ultraviolet rays. There is no filament therein, and an inert gas capable of emitting gas as a light source without the need for preheating time is enclosed. It means a lamp with a closed structure.

When the excimer lamp module 200a is inserted and mounted in the receiving space 110a, an O-ring 130 for vacuum is provided on the upper portion of the excimer lamp module 200a, and an O-ring for preventing damage to the excimer lamp module at the lower portion 130 may be provided.

4 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to an embodiment of the present invention.

4 , the excimer lamp module 200a will be described in more detail. The excimer lamp 210a includes a discharge tube 211a and an external electrode 212a.

The discharge tube 211a may be formed in a communication shape made of a dielectric material through a conventional dielectric manufacturing process such as ceramic.

The dielectric is based on a ceramic material having both electrical insulation and dielectric properties, and includes quartz, glass, aluminum oxide, titanium oxide, magnesium oxide, silicon oxide, silver phosphate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, Iron oxide, lead zirconate titanate, carbon nanotubes, etc. can be used.

A discharge space 211-1 is formed in the discharge tube 211a, and an inert gas is filled in the discharge space 211-1.

The external electrode 212a has a shape such as a mesh surrounding the discharge tube 211a, a cylinder made of a conductive material such as a thin plate, and the like, and may be made of a metal material such as aluminum.

The external electrode 212a is connected to an internal or external voltage generator (not shown) through a socket part 300 to be described later, so that the external electrode 212a can receive power.

Therefore, in the excimer lamp 210a, when an AC voltage is applied to the external electrode 212a, the inert gas forms excimer molecules (excited state) in a manner such as a dielectric barrier discharge (DBD), When the excimer molecule transitions to the ground (ground) state, it emits ultraviolet light having a wavelength of 100 to 200 nm.

The ultraviolet light emitted from the excimer lamp 210a may have a wavelength range of 100 nm or more and 200 nm or less depending on the type of the inert gas.

5 is an exemplary view for explaining another embodiment of an excimer lamp constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.

Another embodiment of the excimer lamp constituting the static electricity removal device using the excimer lamp according to the present invention will be described with reference to FIG. 5 .

Referring to FIG. 5 , the excimer lamp 210b includes a discharge tube 211b , an external electrode 212b , and an internal electrode 213 .

The discharge tube 211b includes a cylindrical external discharge tube having a predetermined diameter and an internal discharge tube having a diameter smaller than the diameter of the external discharge tube, and formed inside the external discharge tube, between the external discharge tube and the inner discharge tube A discharge space 211 - 2 is formed in the . The discharge space 211-2 is filled with an inert gas, and the discharge tube 211b is made of a quartz glass or hard glass material through which ultraviolet rays can pass.

The external electrode 212b has a cylindrical shape made of a thin plate surrounding the discharge tube 211b, and may be made of a conductive metal material.

The internal electrode 213 is formed inside the discharge tube 211b and may be made of a conductive metal material. Preferably, the internal electrode 213 is formed inside the internal discharge tube.

The internal electrode 213 is connected to a power terminal (not shown) for supplying power from the outside, and the external electrode 212b has an internal or external voltage generating device (not shown) through a socket part 300 to be described later. ), so that the external electrode 212b and the internal electrode 213 may receive power.

Accordingly, the excimer lamp 210b forms excimer molecules (excited state) by discharging the inert gas enclosed in the discharge tube 211b, and when the excimer molecules transition to the ground state, ultraviolet light having a wavelength of 100 to 200 nm will emit

In summary, the excimer lamp 210a refers to an excimer lamp in which an internal electrode is not formed, and the excimer lamp 210b refers to an excimer lamp including an internal electrode.

The irradiation part 220a is a part in which the excimer lamp module 200a is inserted into the opening 120a and protrudes to the outside of the body 100a, and the vacuum UV rays emitted from the excimer lamp 210a are irradiated in one direction. serves to make it possible.

The irradiation unit 220a has an irradiation window 221 through which vacuum ultraviolet rays can pass on one side, and the vacuum ultraviolet rays are irradiated to the outside through the irradiation window 221 .

The irradiation window 221 may be coated with magnesium fluoride (MgF₂) or calcium fluoride having excellent vacuum ultraviolet transmittance in the wavelength region.

The irradiation unit 220a may be formed in a straight type similar to '│' in the overall shape as shown in the drawing, but is not limited thereto, and as another embodiment, an Angle type similar to '┤' (or Long- It is not excluded that it can be formed as a nose projecting type).

Hereinafter, an apparatus for removing static electricity using an excimer lamp of the angle type according to another embodiment of the present invention will be briefly described.

6 is an exemplary view for explaining an excimer lamp module constituting an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention, and FIG. 7 is a diagram for removing static electricity using an excimer lamp according to another embodiment of the present invention. It is an exemplary diagram for explaining the excimer lamp module constituting the device.

Referring to FIG. 6 , in the excimer lamp module 200b constituting the static electricity removal device using the excimer lamp according to another embodiment of the present invention, the irradiation part 220b is formed on one side, and the shape of the whole is '┤' and It may be formed in a similar angle type (or long-nose projecting type).

In FIG. 6 , the excimer lamp 210b is shown inside the excimer lamp module 200b to give an example, but the present invention is not limited thereto, and as shown in FIG. 7 , the excimer lamp module 200b has the excimer inside Of course, it may be configured to include a lamp (210a).

8 is a perspective view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention, and FIG. 9 is an internal perspective view showing the inside of the apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention. , FIG. 10 is a cross-sectional view illustrating an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention.

8 to 10 , in an apparatus for removing static electricity using an excimer lamp according to another embodiment of the present invention, a body 100b is provided inside the excimer lamp module to apply the angle-type excimer lamp module 200b. An accommodating space 110b in which the 200b is accommodated may be formed, and an opening 120b communicating with a portion of the accommodating space 110b may be formed at one side.

Next, the socket unit 300 includes a connector formed on the body 100a and 100b to electrically connect the excimer lamps 210a and 210b to an internal or external voltage generator.

Although the socket part 300 is shown to be formed on one side of the body in the drawings, the present invention is not limited thereto, and may be formed on the lower surface of the body.

In addition, the static electricity removal device using the excimer lamp according to the present invention is coupled to the openings 120a and 120b, and for guiding the vacuum UV rays irradiated from the irradiation units 220a and 200b to be irradiated toward the inside of the vacuum chamber. It may further include a guide unit 400 .

The guide part 400 extends from the opening to surround the irradiation part, and the extended end is coupled to a vacuum chamber (not shown) provided outside.

One end of the guide part 400 covers the opening, and the other end is connected to the vacuum chamber, so that the end of the irradiation part accommodated therein is guided so as to directly face the inside of the vacuum chamber.

When the guide part 400 is not formed, it is not excluded that the coupling part may be formed in a vacuum chamber to be directly connected to the coupling part and the opening part.

Also, referring to FIG. 2 or FIG. 10 , the static electricity removal device using the excimer lamp according to the present invention may further include a fan 500 formed on one side of the body 100a and 100b.

For example, the fan 500 may be formed on the lower portion of the body, but when the socket portion 300 is formed on the lower portion of the body, it may be formed on one side.

The fan 500 is formed in the body to form an air flow to help dissipate heat generated by the excimer lamps 210a and 210b toward the open lower part of the body.

The flow of air formed by the fan 330 is formed through the inside of the body. At this time, the body may be formed with an air conveying path (not shown) through which the air can pass therein, and externally through an air discharge through hole (not shown) provided separately on one side (preferably the upper surface) of the body. It may be configured to be discharged as

On the other hand, the static electricity removal device using the excimer lamp according to the present invention is provided with an external on-off control device, and by controlling the voltage application through the on-off control device, on/off control is possible in real time.

This is a filament type in the case of a general vacuum UV lamp, and the filament requires a preheating time (about 25 sec) in order to emit hot electrons. This is because the filament-type deuterium lamp is a specification in which a filament is essential to maintain or increase performance. Therefore, in the conventional deuterium lamp, real-time on/off control was impossible.

However, according to the present invention, the excimer lamps 210a and 210b have no filaments therein and can emit gas as a light source without a preheating time, so real-time on/off control is possible.

Although embodiments of the present invention have been described with reference to the above and the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

100a, 100b: body
110a, 110b: accommodation space
120a, 120b: opening
200a, 200b: excimer lamp module
210a, 200b: excimer lamp
211a, 211b: discharge tube
212a, 212b: external electrodes
213: inner electrode
220a, 220b: irradiation unit
221: investigation window
300: socket unit
400: guide unit
500: fan

Claims (7)

An apparatus for removing static electricity using an excimer lamp installed in a vacuum chamber, comprising:
a body having an accommodating space for accommodating the excimer lamp module therein and having an opening communicating with a portion of the accommodating space;
an excimer lamp module provided in the receiving space and including an excimer lamp emitting vacuum UV rays and an irradiator for irradiating the radiated vacuum UV rays into the vacuum chamber; and
and a socket part formed on one side of the body and including a connector electrically connecting the excimer lamp and a voltage generator provided inside or outside. According to claim 1,
The excimer lamp,
A discharge tube having a communication shape having a discharge space filled with an inert gas therein, and an external electrode surrounding the discharge tube,
An apparatus for removing static electricity using an excimer lamp, characterized in that by applying power to the external electrode to emit ultraviolet light from the inert gas. 3. The method of claim 2,
The discharge tube is
An apparatus for removing static electricity using an excimer lamp, characterized in that it is made of a dielectric material. 3. The method of claim 2,
The excimer lamp,
Further comprising an internal electrode formed inside the discharge tube,
An apparatus for removing static electricity using an excimer lamp, characterized in that by applying power to the external electrode and the internal electrode to emit ultraviolet light from the inert gas. According to claim 1,
The investigation unit,
An apparatus for removing static electricity using an excimer lamp, characterized in that an irradiation window coated with magnesium fluoride or calcium fluoride is provided, and vacuum ultraviolet rays are irradiated through the irradiation window. According to claim 1,
The static electricity removal apparatus using an excimer lamp further comprising a guide part coupled to the opening part for guiding the vacuum ultraviolet rays irradiated from the irradiation part to be irradiated toward the inside of the vacuum chamber. According to claim 1,
The static electricity removal device using the excimer lamp,
A static electricity removal device using an excimer lamp, characterized in that an on-off control device is provided externally to enable on/off control in real time through the on-off control device.

Images