WO2023167284A1 - バルブ、および、流体制御装置 - Google Patents

バルブ、および、流体制御装置 Download PDF

Info

Publication number
WO2023167284A1
WO2023167284A1 PCT/JP2023/007846 JP2023007846W WO2023167284A1 WO 2023167284 A1 WO2023167284 A1 WO 2023167284A1 JP 2023007846 W JP2023007846 W JP 2023007846W WO 2023167284 A1 WO2023167284 A1 WO 2023167284A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
hole
protrusion
wall
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/007846
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
幸治 兒玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to CN202380024647.5A priority Critical patent/CN118786299A/zh
Priority to JP2024504750A priority patent/JP7740501B2/ja
Publication of WO2023167284A1 publication Critical patent/WO2023167284A1/ja
Priority to US18/820,944 priority patent/US12601417B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/14—Check valves with flexible valve members
    • F16K15/144—Check valves with flexible valve members the closure elements being fixed along all or a part of their periphery
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure

Definitions

  • the present invention relates to a valve that rectifies fluid using a valve membrane and a fluid control device that includes this valve.
  • Patent Documents 1 and 2 describe a fluid control device that includes a piezoelectric pump and a check valve (valve).
  • the valve housing has opposed first and second walls.
  • a first hole is formed in the first wall.
  • a second hole and a third hole are formed in the second wall.
  • the first hole communicates with the piezoelectric pump.
  • the second hole communicates with a cuff outside the fluid control device.
  • the third hole is for exhaust and communicates with the exterior of the valve housing.
  • a diaphragm (membrane) is installed in the housing.
  • the diaphragm separates the internal space of the housing into a first wall-side space and a second wall-side space.
  • Deformation of the diaphragm by the fluid flow causes fluid (for example, gas) to flow from the ventilation hole to the communication hole (first flow) and fluid flow from the communication hole to the exhaust hole (second flow). switch.
  • fluid for example, gas
  • through holes are formed in the diaphragm.
  • a pedestal is formed on the first wall. The through hole of the diaphragm and the pedestal overlap when the valve is viewed from above.
  • the diaphragm separates from the pedestal.
  • the fluid that has flowed in through the first hole is discharged from the second hole through the through hole of the diaphragm.
  • the diaphragm abuts the surface of the pedestal.
  • the fluid that has flowed in through the second hole is discharged through the third hole.
  • an object of the present invention is to provide a valve structure that prevents foreign matter from being caught between the diaphragm and the pedestal.
  • a valve of the present invention includes a housing, a first hole, a second hole, a valve membrane, a pedestal, and a protrusion.
  • the housing has a first wall and a second wall facing each other, and a side wall connected to the first wall and the second wall and capable of defining a valve chamber together with the first wall and the second wall.
  • the first hole is formed in the first wall and communicates the valve chamber with the outside.
  • the second hole is formed in the second wall and communicates the valve chamber with the outside.
  • the valve membrane divides the valve chamber into a first space on the first wall side and a second space on the second wall side, and has a through hole that allows the first space and the second space to communicate with each other.
  • the pedestal protrudes into the valve chamber from the first wall, and is arranged at a position overlapping the through hole when the valve is viewed in plan in a first direction in which the second wall is viewed from the first wall.
  • the protrusion is disposed between the first hole and the base when the valve is viewed in a cross section in a second direction orthogonal to the first direction, and is provided on the valve membrane or the first wall in the first space. .
  • the protrusion exists in the flow path from the first hole to the pedestal and the membrane through-hole. Therefore, the foreign matter (such as solid matter) that has flowed in from the first hole and the foreign matter existing on the first hole side of the projection hit the projection when the fluid flows from the first hole to the membrane through-hole. This makes it difficult for foreign matter to reach the pedestal and the membrane through-hole.
  • FIG. 1 is a schematic side sectional view showing the configuration of the fluid control device according to the first embodiment.
  • FIG. 2 is a diagram showing a state in which a cuff is attached to the fluid control device according to the first embodiment.
  • 3(A) and 3(B) are enlarged plan views of a portion of the valve including the pedestal and the valve membrane, and
  • FIG. 3(C) is a side cross-sectional view thereof.
  • 4(A) and 4(B) are side cross-sectional views respectively showing modes of fluid flow.
  • FIG. 5 is a schematic side sectional view showing the configuration of the fluid control device according to the second embodiment.
  • FIG. 6 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the third embodiment.
  • FIG. 7 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the fourth embodiment.
  • FIG. 8A is a schematic side cross-sectional view showing the configuration of the fluid control device according to the fifth embodiment
  • FIG. 8B is a valve of the fluid control device according to the fifth embodiment. It is the top view which expanded the part containing a base and a valve membrane.
  • FIG. 9 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the sixth embodiment.
  • FIG. 10 is an enlarged plan view of a portion including the pedestal and the valve membrane of the valve of the fluid control device according to the seventh embodiment.
  • FIG. 11 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the eighth embodiment.
  • FIG. 12 is a schematic side sectional view showing the configuration of the fluid control device according to the ninth embodiment.
  • FIG. 13A is a schematic side cross-sectional view showing the configuration of the fluid control device according to the tenth embodiment, and
  • FIG. 13B is a valve of the fluid control device according to the tenth embodiment. It is the top view which expanded the part containing a base and a valve membrane.
  • FIG. 1 is a schematic side sectional view showing the configuration of the fluid control device according to the first embodiment.
  • FIG. 2 is a diagram showing a state in which a cuff is attached to the fluid control device according to the first embodiment.
  • 3(A) and 3(B) are enlarged plan views of a portion of the valve including the pedestal and the valve membrane, and
  • FIG. 3(C) is a side cross-sectional view thereof.
  • FIG. 3(B) shows the state in which the valve membrane in FIG. 3(A) is removed.
  • the fluid control device 10 includes a valve 11 and a pump 12.
  • the valve 11 and the pump 12 have common members and are integrally formed.
  • the cuff 2 is connected to the valve 11 .
  • the cuff 2 corresponds to a “fluid ejection target component” in the fluid control device 10 .
  • valve 11 The valve 11 includes a casing member 40 , a casing member 70 , a retaining plate 71 , a valve membrane 80 and a protrusion 90 .
  • the housing member 40 includes a flat plate 41, side walls 42, and a pedestal 43, and is made of metal, resin, or the like.
  • the flat plate 41 has holes 400 .
  • the hole 400 penetrates the flat plate 41 in the thickness direction and has an opening on one main surface side and an opening on the other main surface side of the flat plate 41 .
  • the flat plate 41 corresponds to the "first wall" of the invention.
  • the side wall 42 connects to the outer edge of the flat plate 41 .
  • Side wall 42 has a shape protruding from one main surface of flat plate 41 .
  • the flat plate 41 and the side wall 42 may be integrally formed or separately formed and joined or adhered.
  • the pedestal 43 protrudes from one main surface of the flat plate 41 .
  • the pedestal 43 is arranged at a position different from the hole 400 .
  • the pedestal 43 is, for example, cylindrical.
  • the housing member 70 is plate-shaped and made of metal, resin, or the like.
  • the shape which planarly viewed the member 70 for housings is substantially the same as the member 40 for housings.
  • the housing member 70 corresponds to the "second wall" of the present invention.
  • the housing member 70 has holes 700 and holes 790 .
  • the hole 700 penetrates the member 70 for housings in the thickness direction, and has an opening on one main surface side and an opening on the other main surface side of the member 70 for housings.
  • One end of the hole 790 opens to the other main surface of the housing member 70 .
  • the opening of the hole 700 and the opening of the hole 790 on the other main surface of the housing member 70 are separated from each other.
  • the other end of the hole 790 opens to the other main surface side in the vicinity of the outer surface of the housing member 70 .
  • the other end of the hole 790 may be open to the side surface of the housing member 70 . open to
  • the holding plate 71 is made of metal, resin, or the like.
  • the holding plate 71 is a frame.
  • the holding plate 71 may be integrally formed with the housing member 70 .
  • the housing member 40 and the housing member 70 are assembled with the holding plate 71 interposed therebetween, and are adhered or joined to each other. More specifically, one main surface of the housing member 40 and the other main surface of the housing member 70 face each other. In other words, the housing member 40 is arranged with respect to the flat plate 41 such that the side wall 42 is on the housing member 70 side.
  • the holding plate 71 abuts on the tip of the side wall 42 of the member 40 for cases and the other main surface of the member 70 for cases. That is, the retaining plate 71 functions as part of the side wall or first wall of the housing in the present invention. At this time, the holding plate 71 protrudes inward from the inner wall surface of the side wall 42 in plan view.
  • the valve 11 has a valve chamber 410 surrounded by the housing member 40 , the housing member 70 , and the retaining plate 71 .
  • the valve chamber 410 communicates with the outside of the valve 11 from one end surface of the housing of the valve 11 in the height direction through the hole 400 .
  • a hole 400 corresponds to the "first hole” of the present invention.
  • the valve chamber 410 communicates with the outside of the valve 11 from the other end face of the housing of the valve 11 in the height direction through the hole 700 .
  • Hole 700 corresponds to the "second hole” of the present invention.
  • the valve chamber 410 communicates with the outside of the housing of the valve 11 through the hole 790 .
  • the opening of the hole 700 on the other main surface side of the housing member 70 overlaps with the pedestal 43 when the bulb 11 is viewed from above.
  • the opening area on the other main surface side of the housing member 70 is larger than the area of the pedestal 43 in plan view.
  • the opening of the hole 790 on the other main surface side of the housing member 70 and the hole 400 overlap, but this is not the only option.
  • the valve membrane 80 is made of a deformable material such as a rubber sheet.
  • a through hole 800 is formed in the valve membrane 80 near its outer edge.
  • the through hole 800 penetrates the valve membrane 80 in the thickness direction. This through-hole 800 corresponds to the "through-hole" for the membrane of the present invention.
  • the valve membrane 80 is arranged between the flat plate 41 of the housing member 40 and the housing member 70 .
  • the outer peripheral edge of the valve membrane 80 is fixed to the holding plate 71 . That is, the valve membrane 80 is fixed to the housing of the valve 11 so that the region inside the fixed outer peripheral end portion can be deformed.
  • valve chamber 410 is divided into a first space between the flat plate 41 of the housing member 40 and the valve membrane 80 and a second space between the housing member 70 and the valve membrane 80 . Divide into space. The first space and the second space communicate with each other through a through hole 800 .
  • the through hole 800 overlaps the pedestal 43 when the valve 11 is viewed from above.
  • the opening area (plane area) of the through hole 800 is smaller than the plane area of the pedestal 43 .
  • the protrusion 90 is made of metal, resin, or the like.
  • the projecting portion 90 is annular in plan view and has a height D90.
  • a height D90 of the protrusion 90 is smaller than a thickness (height) D43 of the base 43 . In other words, the protrusion 90 is thinner than the pedestal 43 .
  • the protruding portion 90 abuts and is adhered to the flat plate 41 side surface of the valve membrane 80 .
  • the protrusion 90 is arranged so that the through hole 800 overlaps (communicates with) the central opening of the protrusion 90 in plan view of the valve 11 (valve membrane 80).
  • the protrusion 90 is arranged so that the pedestal 43 overlaps the central opening of the protrusion 90 in plan view of the bulb 11 .
  • the pedestal 43 is arranged within the central opening of the protrusion 90 .
  • the protrusion 90 may be formed integrally with the valve membrane 80 .
  • FIGS. 4(A) and 4(B) are side cross-sectional views respectively showing modes of fluid flow.
  • thick dotted lines indicate the schematic flow of the fluid.
  • the first operation is, for example, an operation of supplying gas to the cuff 2 .
  • the pump 12 which will be described later, is driven.
  • the gas flows from the pump 12 through the hole 400 into the first space of the valve chamber 410.
  • the gas that flows in through the holes 400 pushes the valve membrane 80 .
  • the valve membrane 80 is deformed and separated from the pedestal 43 . Therefore, the first space and the second space communicate through the through hole 800 .
  • the gas that has flowed into the first space flows on the first space side of the valve membrane 80 in the valve chamber 410, enters the second space through the through hole 800, and is discharged from the second space to the outside of the valve 11 through the hole 700.
  • the hole 700 communicates with the cuff 2 , and the gas discharged from the hole 700 to the outside of the valve 11 is supplied to the cuff 2 .
  • the protrusion 90 is arranged in the middle of the gas flow path from the hole 400 to the through hole 800 .
  • the height of the flow path is narrowed at the position where the protrusion 90 is arranged. Therefore, even if foreign matter (for example, solid matter) arrives from the hole 400 side of the protrusion 90 in the gas flow path, the foreign matter is less likely to reach the through hole 800 due to the protrusion 90 . That is, foreign matter is likely to be trapped by the protrusions 90 .
  • the valve 11 can suppress clogging of the through hole 800 by foreign matter.
  • the height (gap) of the flow path at the arrangement position of the protrusion 90 is smaller than the maximum diameter (maximum dimension) of the through-hole 800 .
  • the valve 11 can more reliably prevent the through hole 800 from being clogged with foreign matter.
  • the valve 11 traps foreign matter by the protrusion 90 during the first operation, and can suppress the occurrence of problems caused by the foreign matter clogging the through hole 800 .
  • valve membrane 80 is deformed and closes the hole 790 . Accordingly, the gas that has flowed into the second space from the through hole 800 is discharged from the hole 700 without leaking into the hole 790 . Therefore, gas can be efficiently supplied to the cuff 2 .
  • the projection 90 does not have to be annular over the entire circumference, as shown in each embodiment described later.
  • the projecting portion 90 is a portion arranged in an area between the hole 400 and the through hole 800 (area indicated by area AB in FIGS. 3A and 3B) when the bulb 11 is viewed from above. You just have to. In that case, by forming the height D90 of the projection 90 to the same height D43 as the base 43, movement of the foreign matter can be prevented. However, since the protruding portion 90 has a shape that extends over the entire circumference, it is possible to more reliably prevent foreign matter from reaching the through hole 800 .
  • valve 11 preferably has a configuration in which the valve membrane 80 is sandwiched between the retaining plate 71 and the protrusion 90, as shown in FIGS. As a result, detachment of the valve membrane 80 is suppressed.
  • the second action is, for example, the action of discharging gas from the cuff 2 .
  • the pump 12 which will be described later, is stopped. Stopping the pump 12 removes the pressure from the inflow of gas into the cuff 2 . Therefore, cuff 2 has a higher pressure than valve chamber 410 . Therefore, gas in the cuff 2 flows through the hole 700 into the second space of the valve chamber. The gas that flows in through the holes 700 pushes the valve membrane 80 . As a result, the valve membrane 80 is deformed and comes into contact with the pedestal 43 . Therefore, the through-hole 800 of the valve membrane 80 is closed by the surface of the base 43, and the first space and the second space are spatially separated.
  • the gas that has flowed in from the hole 700 pushes the valve membrane 80 .
  • the valve membrane 80 is deformed and the second space side of the hole 790 is opened.
  • the gas that has flowed in through the hole 700 is discharged to the outside of the valve 11 through the hole 790 .
  • valve 11 suppresses foreign matter from being caught between the valve membrane 80 and the pedestal 43 during the first operation. Therefore, the valve 11 can suppress the occurrence of problems such as leakage of gas into the first space due to foreign matter being caught between the valve membrane 80 and the pedestal 43 during the second operation.
  • the valve membrane 80 more reliably contacts the surface of the base 43.
  • the through hole 800 of the valve membrane 80 is more reliably closed by the surface of the base 43 . Therefore, the valve 11 can more reliably discharge the gas that has flowed from the cuff 2 , that is, the gas that has flowed from the hole 700 through the hole 790 .
  • the pump 12 includes a main flat plate 21, a frame 22, a connecting member 23, a piezoelectric element 30, a flat plate 41 of the housing member 40, a side wall member 50, and a lid member 60. .
  • the flat plate 41 of the housing member 40 is shared by the valve 11 and the pump 12 .
  • the main flat plate 21 is circular in plan view.
  • the frame 22 is arranged so as to surround the main flat plate 21 .
  • the plurality of connecting members 23 are beam-shaped and arranged between the main flat plate 21 and the frame 22 .
  • a plurality of connecting members 23 support the main flat plate 21 with respect to the frame 22 so as to be able to vibrate.
  • the piezoelectric element 30 has a circular shape in plan view.
  • the piezoelectric element 30 includes a piezoelectric body and a driving conductor.
  • the piezoelectric element 30 is arranged on one main surface of the main flat plate 21 .
  • the center of the piezoelectric element 30 and the center of the main flat plate 21 coincide. Note that matching here includes the range in which the center positions are shifted from each other within the range of manufacturing error.
  • the piezoelectric element 30 is distorted by applying a drive voltage.
  • the main flat plate 21 vibrates due to the stress caused by the strain of the piezoelectric element 30 .
  • the side wall member 50 has an annular shape with a hollow 500 and is arranged between the frame 22 and the housing member 40 .
  • the side wall member 50 connects to the frame 22 and the housing member 40 .
  • a space (hollow 500 ) surrounded by the structure consisting of the main flat plate 21 , the frame 22 , and the connecting member 23 , the housing member 40 , and the side wall member 50 serves as the pump chamber of the pump 12 .
  • the lid member 60 is composed of a flat plate portion and a frame portion, and the frame portion has a shape protruding from one main surface of the flat plate portion. A hole 600 passing through the flat plate portion is formed in the flat plate portion.
  • the lid member 60 is arranged to cover the main flat plate 21 , and the frame portion of the lid member 60 is connected to the frame body 22 .
  • the fluid control device 10 can prevent foreign matter on the pump 12 side of the protrusion 90 of the valve 11 in the gas flow path from reaching the through hole 800 . Therefore, the fluid control device 10 can suppress the occurrence of problems due to foreign matter described above during the first operation and during the second operation.
  • FIG. 5 is a schematic side sectional view showing the configuration of the fluid control device according to the second embodiment.
  • the fluid control device 10A according to the second embodiment differs from the fluid control device 10 according to the first embodiment in the configuration of the valve 11A.
  • the rest of the configuration of the fluid control device 10A is the same as that of the fluid control device 10, and the description of the similar portions will be omitted.
  • the fluid control device 10A includes a valve 11A.
  • the valve 11A differs from the valve 11 according to the first embodiment in the manner of arrangement of the protrusions 90 .
  • Other configurations of the valve 11A are the same as those of the valve 11, and descriptions of the same portions are omitted.
  • the protrusion 90 is fixed to one main surface of the flat plate 41 of the housing member 40 .
  • the projecting portion 90 may be formed integrally with the flat plate 41 .
  • the fluid control device 10A can suppress the occurrence of problems due to foreign matter during the first operation and the second operation.
  • FIG. 6 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the third embodiment.
  • FIG. 6 shows the valve leaflet and removed.
  • valve of the fluid control device 10B according to the third embodiment differs from the valve of the fluid control device 10 according to the first embodiment in that it has a protrusion 90B.
  • Other configurations of the valves of the fluid control device 10B are the same as those of the valves of the fluid control device 10, and the description of the same portions will be omitted.
  • the valve of the fluid control device 10B has a protrusion 90B.
  • the projecting portion 90B has an annular shape (C annular shape) in which a part of the circumferential direction is notched.
  • the protrusion 90B has a notch 900 in the middle of the circumferential direction.
  • the protrusion 90 ⁇ /b>B has a structure in which the space on the outer peripheral side and the space on the inner peripheral side communicate with each other through the notch 900 .
  • the protrusion 90B is arranged so that the notch 900 does not overlap the region AB between the hole 400 and the through hole 800. More preferably, protrusion 90B is arranged on the opposite side of hole 400 with pedestal 43 as a reference in the direction in which hole 400, through hole 800, and pedestal 43 are aligned (the X-axis direction in FIG. 6).
  • the valve of the fluid control device 10B has the effect of suppressing foreign matter from reaching the through-hole 800 (trapping effect of foreign matter) by the protrusion 90B, while allowing the gas to flow from the hole 400 to the through-hole 800. A decrease in flow rate can be suppressed.
  • the length of the notch 900 in the circumferential direction (the width of the opening of the notch 900) can be appropriately set based on the required flow rate and the like.
  • FIG. 7 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the fourth embodiment.
  • FIG. 7 shows the valve leaflet and removed.
  • valve of the fluid control device 10C according to the fourth embodiment differs from the valve of the fluid control device 10B according to the third embodiment in that it includes a protrusion 90C.
  • Other configurations of the valves of the fluid control device 10C are the same as those of the valves of the fluid control device 10B, and the description of the same portions will be omitted.
  • the valve of the fluid control device 10C has a protrusion 90C.
  • the projecting portion 90C differs from the projecting portion 90B in that a thin portion 99 is provided.
  • Other configurations of the protrusion 90C are the same as those of the protrusion 90B, and the description of the similar portions will be omitted.
  • the projecting portion 90C has a thin portion 99.
  • the thin portion 99 is a portion in which the distance between the inner surface and the outer surface is shorter than other portions in the circumferential direction of the protrusion 90C.
  • the projecting portion 90C is arranged in the valve chamber 410 so that the thin portion 99 is between the hole 400 and the through hole 800.
  • the valve of the fluid control device 10C can suppress a decrease in the flow rate of the gas from the hole 400 to the through hole 800 while obtaining the effect of suppressing foreign matter from reaching the through hole 800 by the protrusion 90C. .
  • the outer surface 990 of the thin portion 99 is flat.
  • the protrusion 90 ⁇ /b>C is arranged so that the outer surface 990 faces the hole 400 .
  • the outer surface 990 is arranged perpendicular to the direction in which the holes 400 and the through holes 800 are arranged.
  • valve of the fluid control device 10C can further enhance the foreign matter trapping effect.
  • FIG. 8A is a schematic side sectional view showing the configuration of the fluid control device according to the fifth embodiment.
  • FIG. 8B is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the fifth embodiment.
  • FIG. 8(B) shows the valve leaflet removed.
  • the fluid control device 10D according to the fifth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve 11D. different.
  • the rest of the configuration of the fluid control device 10D is the same as that of the fluid control device 10, and the description of the similar portions will be omitted.
  • the fluid control device 10D includes a valve 11D.
  • the valve 11D differs from the valve 11 according to the first embodiment in that it includes a protrusion 90D1 and a protrusion 90D2.
  • the rest of the configuration of the valve 11D is the same as that of the valve 11, and the description of the same portions will be omitted.
  • the valve 11D includes a protrusion 90D1 and a protrusion 90D2.
  • the protrusion 90D1 and the protrusion 90D2 are annular in plan view.
  • the protrusion 90D2 is arranged so that the pedestal 43 overlaps the central opening of the protrusion 90D2 in plan view of the bulb 11D. In other words, the pedestal 43 is arranged within the central opening of the protrusion 90D2.
  • the protrusion 90D1 is arranged so that the pedestal 43 and the protrusion 90D2 overlap the central opening of the protrusion 90D1 in plan view of the bulb 11D. In other words, the pedestal 43 and the protrusion 90D2 are arranged within the central opening of the protrusion 90D1.
  • the protrusion 90D1 is fixed to the valve membrane 80 and not fixed to the flat plate 41 of the housing member 40.
  • the protrusion 90 ⁇ /b>D ⁇ b>2 is fixed to the flat plate 41 of the housing member 40 and not fixed to the valve membrane 80 .
  • the protrusions are double arranged with respect to the gas flow path, so that the valve 11D can improve the foreign matter trapping effect.
  • the fixing targets of the protrusions 90D1 and 90D2 are different, and the position of the gap by the protrusion 90D1 and the position of the gap by the protrusion 90D2 in the thickness direction of the valve 11D are different. Therefore, the valve 11D can further improve the foreign matter trapping effect.
  • FIG. 9 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the sixth embodiment.
  • FIG. 9 shows the valve leaflet and removed.
  • valve of the fluid control device 10E according to the sixth embodiment differs from the valve of the fluid control device 10D according to the fifth embodiment in that it includes projections 90E1 and 90E2. different.
  • Other configurations of the valves of the fluid control device 10E are the same as those of the valves of the fluid control device 10D, and the description of the same portions will be omitted.
  • the valve of the fluid control device 10E includes a protrusion 90E1 and a three-dimensional valve 90E2.
  • the protrusion 90E2 is similar to the protrusion 90D2.
  • the protruding portion 90E1 has an annular shape (C annular shape) with a part cut out in the circumferential direction.
  • the protrusion 90E1 has a notch 900E1 in the middle of the circumferential direction. That is, the protrusion 90E1 has the same configuration as the protrusion 90D1 to which the configuration of the protrusion 90B is applied.
  • the valve of the fluid control device 10E can suppress a decrease in the flow rate of gas from the hole 400 to the through hole 800 while improving the effect of trapping foreign matter.
  • FIG. 10 is an enlarged plan view of a portion including the pedestal and the valve membrane of the valve of the fluid control device according to the seventh embodiment.
  • FIG. 10 shows the valve leaflets and removed.
  • valve of the fluid control device 10F according to the seventh embodiment differs from the valve of the fluid control device 10E according to the sixth embodiment in that it has projections 90F1 and 90F2. different.
  • Other configurations of the valves of the fluid control device 10F are the same as those of the valves of the fluid control device 10E, and the description of the same portions will be omitted.
  • the valve of the fluid control device 10F has a protrusion 90F1 and a three-dimensional valve 90F2.
  • the projecting portion 90F1 has a configuration similar to that of the projecting portion 90E1.
  • the protrusion 90F1 has a notch 900F1.
  • the projecting portion 90F2 has an annular shape (C-annular shape) in which a part of the circumferential direction is notched like the projecting portion 90F1.
  • the protrusion 90F2 has a notch 900F2 in the middle of the circumferential direction.
  • the protrusion 90F2 has an annular shape (C-ring) that is smaller than the protrusion 90F1, and is arranged between the protrusion 90F1 and the base 43 in plan view.
  • the notch 900F1 and the notch 900F2 do not overlap. That is, the direction in which the notch portion 900F1 is present and the direction in which the notch portion 900F2 is present are different with respect to the pedestal 43 . At this time, it is preferable that the direction of the notch 900F1 with respect to the pedestal 43 and the direction of the notch 900F2 with respect to the pedestal 43 be as far apart as possible with the pedestal 43 as a reference. For example, at this time, it is preferable that the direction of the notch 900F1 with respect to the pedestal 43 and the direction of the notch 900F2 with respect to the pedestal 43 be opposite as much as possible.
  • valve of the fluid control device 10E can further suppress the decrease in the flow rate of the gas from the hole 400 to the through hole 800 while improving the foreign matter trapping effect.
  • FIG. 11 is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the eighth embodiment.
  • FIG. 11 shows the valve leaflets removed.
  • valve of the fluid control device 10G according to the eighth embodiment differs from the valve 11 of the fluid control device 10 according to the first embodiment in that it has a protrusion 90G.
  • Other configurations of the valve of the fluid control device 10G are the same as those of the valve 11 of the fluid control device 10, and the description of the same portions will be omitted.
  • the valve of the fluid control device 10G has a protrusion 90G.
  • the projecting portion 90G has a planar spiral shape with a predetermined thickness.
  • the pedestal 43 is positioned within the central opening of the spiral formed by the protrusion 90G.
  • the gas from the hole 400 flows from the opening at the outer end of the protrusion 90G, flows spirally according to the spiral shape of the protrusion 90G, and flows into the through hole 800 from the opening at the inner end of the protrusion 90G. flow.
  • the valve of the fluid control device 10G can secure a predetermined amount of gas flow from the hole 400 to the through hole 800 while obtaining the effect of trapping foreign matter.
  • FIG. 12 is a schematic side sectional view showing the configuration of the fluid control device according to the ninth embodiment.
  • the fluid control device 10H according to the ninth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve 11H.
  • the rest of the configuration of the fluid control device 10H is the same as that of the fluid control device 10, and the description of the similar portions will be omitted.
  • the bulb 11H differs from the bulb 11 according to the first embodiment in that it includes a protrusion 90H.
  • Other configurations of the valve 11H are the same as those of the valve 11, and descriptions of the same parts are omitted.
  • the valve 11H has a protrusion 90H.
  • the protrusion 90H differs from the protrusion 90 in terms of material.
  • the projecting portion 90H is made of a mesh material. At this time, the maximum opening of the mesh material is preferably equal to or less than the maximum opening of the through-holes 800 .
  • valve of the fluid control device 10H can further suppress the decrease in the gas flow rate from the hole 400 to the through hole 800 while improving the foreign matter trapping effect.
  • the protrusion 90H may cover the through-hole 800 .
  • at least the portion overlapping the through-hole 800 is composed only of the mesh communicating in the thickness direction.
  • FIG. 13A is a schematic side sectional view showing the configuration of the fluid control device according to the tenth embodiment.
  • FIG. 13B is an enlarged plan view of a portion including a pedestal and a valve membrane in the valve of the fluid control device according to the tenth embodiment.
  • FIG. 13(B) shows the valve leaflet removed.
  • the fluid control device 10I according to the tenth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve 11I. different.
  • the rest of the configuration of the fluid control device 10I is the same as that of the fluid control device 10, and the description of the similar portions will be omitted.
  • the bulb 11I differs from the bulb 11 according to the first embodiment in that it has an adhesive layer 98 .
  • Other configurations of the valve 11I are the same as those of the valve 11, and the description of the similar parts is omitted.
  • the adhesive layer 98 is arranged on the outer surface of the protrusion 90 . More specifically, the adhesive layer 98 is arranged in a region on the hole 400 side of the pedestal 43 and the through hole 800 on the outer surface of the protrusion 90 .
  • the valve of the fluid control device 10I can improve the foreign matter trapping effect.
  • the adhesive layer 98 is not limited to the above example, and may be any of the entire outer peripheral surface of the protrusion 90, the surface opposite to the surface in contact with the valve membrane 80, the inner main surface, or a combination of these. may be placed on the surface.
  • a housing having a first wall and a second wall facing each other, and a side wall connected to the first wall and the second wall and capable of defining a valve chamber together with the first wall and the second wall.
  • body and a first hole formed in the first wall and communicating between the valve chamber and the outside; a second hole formed in the second wall and communicating between the valve chamber and the outside; a valve membrane that divides the valve chamber into a first space on the first wall side and a second space on the second wall side, and has a through hole that allows communication between the first space and the second space; , a pedestal that protrudes into the valve chamber from the first wall and is arranged at a position that overlaps the through hole when the valve is viewed from above in a first direction in which the second wall is viewed from the first wall; When the valve is viewed in a cross-section in a second direction perpendicular to the first direction, the valve is disposed between the first hole and the pedestal, and the valve membrane or the first wall is disposed in the first space. and
  • ⁇ 2> The valve according to ⁇ 1>, wherein the protrusions are arranged in a ring shape surrounding the pedestal when viewed in plan in the first direction.
  • ⁇ 5> The valve of ⁇ 4>, wherein the missing portion is located at a different position from between the first hole and the pedestal when the valve is viewed in cross-section in the second direction on the side surface.
  • the protrusions are a first protrusion provided on the valve membrane; a second protrusion provided on the first wall;
  • the protrusions are a first protrusion provided on the valve membrane; a second protrusion provided on the first wall; with The valve according to ⁇ 5>, wherein the missing portion of the first protrusion and the missing portion of the second protrusion are located at different positions when viewed in plan in the first direction.
  • ⁇ 11> The valve according to any one of ⁇ 1> to ⁇ 10>, wherein the distance between the protrusion formed on the first wall and the valve membrane is smaller than the maximum dimension of the protrusion and the through hole.
  • ⁇ 12> The valve according to any one of ⁇ 1> to ⁇ 10>, wherein the distance between the protrusion formed on the valve membrane and the first wall is smaller than the maximum dimension of the through hole.
  • ⁇ 13> The valve according to any one of ⁇ 1> to ⁇ 12>, wherein the length of the protrusion in the first direction is smaller than the length of the base in the first direction.
  • a fluid control device comprising:

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Details Of Valves (AREA)
  • Valve Housings (AREA)
  • Check Valves (AREA)
PCT/JP2023/007846 2022-03-04 2023-03-02 バルブ、および、流体制御装置 Ceased WO2023167284A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202380024647.5A CN118786299A (zh) 2022-03-04 2023-03-02 阀和流体控制装置
JP2024504750A JP7740501B2 (ja) 2022-03-04 2023-03-02 バルブ、および、流体制御装置
US18/820,944 US12601417B2 (en) 2022-03-04 2024-08-30 Valve and fluid control device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-033147 2022-03-04
JP2022033147 2022-03-04

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/820,944 Continuation US12601417B2 (en) 2022-03-04 2024-08-30 Valve and fluid control device

Publications (1)

Publication Number Publication Date
WO2023167284A1 true WO2023167284A1 (ja) 2023-09-07

Family

ID=87883724

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/007846 Ceased WO2023167284A1 (ja) 2022-03-04 2023-03-02 バルブ、および、流体制御装置

Country Status (4)

Country Link
US (1) US12601417B2 (https=)
JP (1) JP7740501B2 (https=)
CN (1) CN118786299A (https=)
WO (1) WO2023167284A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012023396A1 (ja) * 2010-08-20 2012-02-23 株式会社村田製作所 順止バルブ、燃料電池システム
WO2012141113A1 (ja) * 2011-04-11 2012-10-18 株式会社村田製作所 バルブ、流体制御装置
WO2016194564A1 (ja) * 2015-05-29 2016-12-08 株式会社村田製作所 吸引装置
WO2017195475A1 (ja) * 2016-05-09 2017-11-16 株式会社村田製作所 バルブ、流体制御装置および血圧計
WO2018021099A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
WO2020084978A1 (ja) * 2018-10-22 2020-04-30 株式会社村田製作所 バルブ、及び、気体制御装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5907256B2 (ja) * 2012-04-19 2016-04-26 株式会社村田製作所 バルブ、流体制御装置
DE112014002557T5 (de) * 2013-05-24 2016-03-03 Murata Manufacturing Co., Ltd. Vorrichtung zur Ventil- und Flüssigkeitsregelung
WO2016063710A1 (ja) * 2014-10-21 2016-04-28 株式会社村田製作所 バルブ、流体制御装置および血圧計
WO2016104673A1 (ja) * 2014-12-26 2016-06-30 株式会社村田製作所 バルブ、流体制御装置
JP6743994B2 (ja) * 2018-03-09 2020-08-19 株式会社村田製作所 バルブおよびバルブを備える流体制御装置
WO2022234778A1 (ja) * 2021-05-06 2022-11-10 株式会社村田製作所 バルブ、流体制御装置、加圧装置、および、血圧計

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012023396A1 (ja) * 2010-08-20 2012-02-23 株式会社村田製作所 順止バルブ、燃料電池システム
WO2012141113A1 (ja) * 2011-04-11 2012-10-18 株式会社村田製作所 バルブ、流体制御装置
WO2016194564A1 (ja) * 2015-05-29 2016-12-08 株式会社村田製作所 吸引装置
WO2017195475A1 (ja) * 2016-05-09 2017-11-16 株式会社村田製作所 バルブ、流体制御装置および血圧計
WO2018021099A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
WO2020084978A1 (ja) * 2018-10-22 2020-04-30 株式会社村田製作所 バルブ、及び、気体制御装置

Also Published As

Publication number Publication date
JPWO2023167284A1 (https=) 2023-09-07
US20240426389A1 (en) 2024-12-26
JP7740501B2 (ja) 2025-09-17
US12601417B2 (en) 2026-04-14
CN118786299A (zh) 2024-10-15

Similar Documents

Publication Publication Date Title
US10502328B2 (en) Valve and fluid control appratus
JP6687170B2 (ja) ポンプ
CN112204256B (zh) 泵
WO2012141113A1 (ja) バルブ、流体制御装置
US11293428B2 (en) Pump and fluid control device
JPWO2018021099A1 (ja) バルブ、気体制御装置、及び血圧計
WO2016063710A1 (ja) バルブ、流体制御装置および血圧計
WO2014188915A1 (ja) バルブ、流体制御装置
JP7670125B2 (ja) バルブ、流体制御装置、加圧装置、および、血圧計
US11879449B2 (en) Piezoelectric pump with vibrating plate, protrusion and valve arrangement
GB2582518A (en) Pump and fluid control device
JP5668582B2 (ja) 流体制御装置
US20110079299A1 (en) Check valve
CN108496004B (zh) 气体控制装置
WO2007055136A1 (ja) ユニモルフ振動板を用いたポンプ
CN119957476A (zh) 流体控制装置
WO2023167284A1 (ja) バルブ、および、流体制御装置
JP6288395B1 (ja) バルブ、流体制御装置および血圧計
US11300115B2 (en) Pump and fluid control device
JP6293028B2 (ja) 逆止弁機構およびそれを用いたポンプ装置
JP2003083459A (ja) アンブレラバルブを用いたチェックバルブ
WO2021002100A1 (ja) 流体制御装置
WO2025121404A1 (ja) バルブおよび流体制御装置
WO2025121405A1 (ja) バルブおよび流体制御装置
WO2012140932A1 (ja) アクティブバルブ、流体制御装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23763541

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 202380024647.5

Country of ref document: CN

ENP Entry into the national phase

Ref document number: 2024504750

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 23763541

Country of ref document: EP

Kind code of ref document: A1