WO2023140463A1 - Micro-miroir - Google Patents

Micro-miroir Download PDF

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Publication number
WO2023140463A1
WO2023140463A1 PCT/KR2022/015559 KR2022015559W WO2023140463A1 WO 2023140463 A1 WO2023140463 A1 WO 2023140463A1 KR 2022015559 W KR2022015559 W KR 2022015559W WO 2023140463 A1 WO2023140463 A1 WO 2023140463A1
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WO
WIPO (PCT)
Prior art keywords
conductor
mirror
moving electrode
electrode
electrostatic force
Prior art date
Application number
PCT/KR2022/015559
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English (en)
Korean (ko)
Inventor
김세민
김환선
구희성
김은비
Original Assignee
주식회사 멤스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 주식회사 멤스 filed Critical 주식회사 멤스
Publication of WO2023140463A1 publication Critical patent/WO2023140463A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Definitions

  • the present invention relates to a micromirror, and specifically, relates to a micromirror capable of maintaining a stable mirror inclination by generating an electrostatic force so as to provide a rotational force in the same direction at comb electrodes disposed on both sides of a rotating shaft by differentiating electrode body structures of a fixed electrode unit and a moving electrode unit, and by canceling unnecessary electrostatic force, thereby increasing the precision of mirror rotation and increasing the geometrical stability of rotational operation.
  • a micro mirror having a size of micrometers ( ⁇ m) and operating electrically varies the propagation path of light, a type of electromagnetic wave, so that a user can arbitrarily control a signal transmitted in a signal transmission system using light.
  • the currently introduced micromirror is an active element capable of providing a unique modulation mechanism of light signals with limited physical and chemical interactions.
  • Micro mirrors have been used as core components for optical storage devices or optical communications in the past.
  • the optical communication field is an essential technology field for smoothly transmitting increasing digital information along with the expansion of high-speed communication networks such as 5G.
  • the optical communication field such as FTTo (Fiber To The Office), FTTc (Fiber To The Curb), FTTH (Fiber To The Home), was mainly aimed at long-distance transmission of large amounts of information gathered in offices, homes, and specific areas.
  • DLP digital light processing
  • a generally known micromirror for optical communication uses a comb drive (comb driver) using electrostatic force.
  • the comb drive applies different potential values to comb-shaped electrodes facing each other and uses electrostatic force formed according to the potential difference (voltage).
  • the electrostatic force formed between the two electrodes causes the displacement of the moving electrode having a degree of freedom among the electrodes facing each other, and accordingly, a phenomenon of displacement of a mirror connected to the moving electrode can be used.
  • Such a comb drive can be divided into an in-plane comb drive and a vertical comb drive according to the geometry of operation and structure.
  • the fixed electrode and the moving electrode facing each other are formed on the same plane, and accordingly, the displacement of the moving electrode also occurs on the same plane.
  • the fixed electrode and the moving electrode are disposed at different heights, and thus the moving electrode can be rotated by the electrostatic force applied to the moving electrode.
  • a vertical comb drive is more suitable than a horizontal comb drive.
  • the vertical comb drive has a fine structure and a complicated three-dimensional electrode structure, it is difficult to manufacture.
  • This problem makes it difficult to perform complex mechanical and electrical patterning for bidirectional rotation of the mirror, and thus provides a cause for a situation in which a rotational micromirror having a unidirectional rotation function is used.
  • An object of the present invention is to provide a micro-mirror capable of increasing the precision of mirror rotation and increasing the geometrical stability of rotation operation.
  • a micro mirror in order to solve the above problem, includes a rod-shaped torsion beam having both ends fixed to a pair of supports; and a mirror unit having a plate shape and formed at the center of the torsion beam.
  • a fixing part formed around the mirror part; one moving electrode formed on one side of the torsion beam in the width direction; a moving electrode unit including a; the other side moving electrode formed on the other side of the torsion beam in the width direction; and one side fixed electrode formed in the fixing part and disposed to face the one side moving electrode; and a fixed electrode part including the other fixed electrode formed in the fixed part and arranged to face the other moving electrode, wherein when a driving voltage is applied from the outside, one electrostatic force is generated between the one fixed electrode and the one moving electrode, and the other electrostatic force is generated between the other fixed electrode and the other moving electrode, and the one electrostatic force and the other electrostatic force rotate in the same direction with the longitudinal axis of the torsion beam as a rotation axis. generate torque.
  • the micromirror according to one aspect of the present invention further includes a first conductor and a second conductor formed of a conductive material, separated by an insulating layer and stacked in a vertical direction, to which different potential values are applied from the outside and to which the driving voltage is applied, wherein the one fixed electrode and the other moving electrode form a combination, the other fixed electrode and the one moving electrode form a combination, and one of the combinations is the first conductor and the second conductor It is a first combination formed of only one, and the other may be formed including both the first conductor and the second conductor.
  • the first combination may be configured only by being disposed on a lower side of the first conductor and the second conductor.
  • the fixing part, the tension part, and the mirror may include both the first conductor and the second conductor.
  • the rotational force of the mirror can be improved by using a comb drive structure disposed on both sides of the rotation axis of the mirror to act in different directions and generate electrostatic force having the same magnitude.
  • the mirror rotation operation can be stably and precisely controlled.
  • FIG. 1 is a view showing an embodiment of a micro mirror according to the present invention.
  • FIG. 2 is a cross-sectional view of the micromirror of FIG. 1 by partially removing it;
  • FIG. 3 is a view showing a state in which a driving voltage is applied to the micromirror of FIG. 1;
  • FIG. 4 is a cross-sectional view of the micromirror of FIG. 3 by partially removing it;
  • FIG. 5 is a view explaining the operation of the micro mirror according to the present invention.
  • FIG. 1 is a view showing an embodiment of a micromirror according to the present invention
  • FIG. 2 is a view showing a cross section of the micromirror of FIG. 1 with a part removed.
  • FIG. 3 is a view showing a state in which a driving voltage is applied to the micromirror of FIG. 1
  • FIG. 4 is a view showing a cross section of the micromirror of FIG. 3 with a part removed.
  • FIG. 5 is a diagram explaining the operation of the micro mirror according to the present invention.
  • the micromirror according to the present embodiment includes a mirror unit 100, a fixed unit 200, a moving electrode unit 300, and a fixed electrode unit 400.
  • the mirror unit 100 has a rod-shaped torsion beam 120 having both ends fixed to a pair of supports 130 and a plate-shaped mirror 110 formed at the center of the torsion beam 120.
  • the torsion beam 120 is torsionally deformed without irreversible damage when the mirror 110 rotates around the central axis of the torsion beam 120 as a driving voltage is applied.
  • the mirror 110 when the driving voltage is released, the mirror 110 returns to a horizontal state with the elastic force accumulated according to torsional deformation.
  • the mirror 110 reflects light projected onto the upper surface.
  • a driving voltage is applied, the longitudinal axis of the torsion beam 120 is rotated as a rotation center to change the light path.
  • the fixed part 200 is formed around the mirror part 100, and the fixed electrode part 400 described later is formed.
  • the fixing part 200 and the support 130 are preferably formed as an integrated structure.
  • the moving electrode unit 300 includes one moving electrode 310 formed on one side of the torsion beam 120 in the width direction and the other moving electrode 320 formed on the other side of the torsion beam 120 in the width direction.
  • the fixed electrode unit 400 includes one fixed electrode 410 formed on the fixing unit 200 and disposed to face the one moving electrode 310 and the other fixed electrode 420 disposed to face the other moving electrode 320 and formed on the fixed unit 200.
  • the operation of the micro mirror according to the present embodiment is as follows.
  • the electrostatic force f1 on one side and the electrostatic force f2 on the other side generate torque that rotates the longitudinal axis of the torsion beam 120 in the same direction as a rotation axis.
  • one side comb drive d1 composed of one side moving electrode 310 and one side fixed electrode 410 and the other side moving electrode 320 and the other side comb drive d2 composed of the other side fixed electrode 420 apply rotational force in the same direction to the torsion beam 120 according to the driving voltage.
  • the comb drive formed on the opposite side that does not operate becomes unnecessary.
  • the electrostatic force generated by one side or the other side comb drive generates an interference phenomenon that hinders the ideal rotational operation of the mirror due to the horizontal electrostatic force.
  • FIG. 5 the operation of the micro-mirror according to the present embodiment will be described in detail through vector analysis of forces constituting the one-side electrostatic force f1 and the other-side electrostatic force f2.
  • FIG. 5 is a state viewed in the lateral direction p1 in FIG. 4, and in order to clearly distinguish the operation of the moving electrode unit 300 and the fixed electrode unit 400, one and the other fixed electrodes 410 and 420 are moved. It is to be noted that it shows a state in which the electrode unit 300 is spaced apart to one side and the other side.
  • the one-side electrostatic force (f1) and the other-side electrostatic force (f2) are longitudinal component forces acting in the vertical direction in the electrostatic forces (f1t, f2t) generated by the one-side and other-side comb drives (d1, d2), respectively.
  • the generated electrostatic forces f1t and f2t also include transverse component forces f1h and f2h acting in the transverse direction.
  • the moving electrode unit 300 and the fixed electrode unit 400 include a first conductor 11 and a second conductor 12 .
  • the first conductor 11 and the second conductor 12 are formed of a conductive material, separated by an insulating layer, and stacked vertically, and different potential values are applied from the outside to apply a driving voltage, thereby inducing electrostatic force to one side and the other side comb drive described above.
  • the first combination is composed only of the first conductor 11 and the second conductor 12 disposed on the lower side.
  • the electrostatic force generated between the moving electrode unit 300 and the fixed electrode unit 400 is caused by a Coulomb force between electric charges of each electrode.
  • a repulsive force acts between electrodes having the same potential difference, and an attractive force acts between electrodes having different potential differences.
  • the first conductor 11 and the second conductor 12 have different electric potentials, when a driving voltage is applied, an attractive force is generated between the adjacent conductors having different electric potentials.
  • the other moving electrode 320 composed of the second conductor 12 forms an attractive force with the first conductor 11 of the other fixed electrode 420 .
  • the first conductor 11 of the one-side moving electrode 310 forms an attractive force with the second conductor 12 of the one-side fixed electrode 410 .
  • the electrostatic force thus formed includes a longitudinal component force that rotates the moving electrode unit 300, but also generates a horizontal component force according to the arrangement structure of the moving electrode unit 300 and the fixed electrode unit 400 formed on the same plane.
  • the horizontal component forces f1h and f2h cancel each other, but the longitudinal component force rotates the torsion beam 120 and the mirror 110 around the torsion beam 120. It acts as a rotational force consisting of the sum of the electrostatic force f1 and the electrostatic force f2 on the other side.
  • the rotational operation of the mirror 110 can have a geometrically ideal shape.
  • the micromirror according to the present embodiment can prevent an irreversible inoperability state in which the moving electrode unit and the fixed electrode unit are excessively close to each other or come into contact with each other so that they cannot be separated even when the driving voltage is released.
  • a micromirror is a microstructure made of a conductive material and having a size of several microns.
  • the mirror in a state in which the driving voltage is applied and the mirror moves or rotates, the mirror cannot be restored to its original state and becomes inoperable.
  • the electrostatic force on one side and the electrostatic force on the other side act in different directions, and especially the component forces in the transverse direction (f1h, f2h) act in mutually canceling directions, displacement of the moving electrode unit and consequently inoperable state can be prevented.
  • the torsion beam 120 is torsionally deformed by the electrostatic force f1 on one side and the electrostatic force f2 on the other side generated as the driving voltage is applied.
  • the horizontal component forces f1h and f2h have a vector component in the longitudinal direction of the torsion beam 120 due to torsional deformation of the torsion beam 120 .
  • This phenomenon may act as a factor that further intensifies the above-described contact or excessive proximity of the moving electrode unit and the fixed electrode unit.
  • the micromirror according to the present embodiment cancels both the lateral component forces f1h and f2h, not only the direct action of the lateral component forces f1h and f2h, but also the torsional deformation of the torsion beam 120. It has an effect of fundamentally eliminating the indirect action accompanying.
  • the fixing part 200, the tension part 120, and the mirror 110 include both the first conductor 11 and the second conductor 12 described above.
  • electrostatic force according to the Coulomb force may be generated at the opposite ends of the fixing part 200 and the mirror 110, respectively.
  • the micromirror according to the present embodiment is preferably manufactured using SOI (Silicon on Insulator) in which a first insulating layer is formed on a silicon wafer, a second conductor 12 is formed on the upper side, the second insulating layer is formed on the upper side, and the first conductor 11 is formed on the upper side.
  • SOI Silicon on Insulator
  • the first combination (combination consisting of the other moving electrode 320 and one fixed electrode 410 in the present embodiment) can be easily formed by removing one of the one and the other moving electrodes 310 and 320 and the first conductor 11 of either one of the other and one fixed electrodes 410 and 420 in a single etching process for selectively etching.
  • first electrode metal 13 on the upper side of the first conductor 11 and the second electrode metal 14 on the upper side of the second conductor 2
  • different potentials may be applied to the first and second conductors 11 and 12 to form a driving voltage
  • the second electrode metal 14 may be formed on the upper surface of the second conductor 12 exposed by etching the first conductor 11 and the second insulating layer.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)

Abstract

Un micro-miroir divulgué permet à des structures de corps d'électrode empilées ayant différentes valeurs de potentiel et structures de corps d'électrode d'une partie d'électrode fixe et d'une partie d'électrode mobile d'être différentes, de façon à générer une force électrostatique de telle sorte qu'une force de rotation est fournie dans la même direction à partir d'électrodes en peigne disposées des deux côtés d'un arbre rotatif, et ainsi une inclinaison de miroir stable est maintenue, et une force électrostatique inutile peut être décalée, ce qui permet d'augmenter la précision de rotation de miroir et d'augmenter la stabilité géométrique d'une opération de rotation.
PCT/KR2022/015559 2022-01-20 2022-10-14 Micro-miroir WO2023140463A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020220008719A KR102585787B1 (ko) 2022-01-20 2022-01-20 마이크로 미러
KR10-2022-0008719 2022-01-20

Publications (1)

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WO2023140463A1 true WO2023140463A1 (fr) 2023-07-27

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KR (1) KR102585787B1 (fr)
WO (1) WO2023140463A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050053053A (ko) * 2003-12-02 2005-06-08 삼성전자주식회사 마이크로 미러 및 그 제조방법
KR20060018683A (ko) * 2004-08-25 2006-03-02 엘지전자 주식회사 정전력 구동 스캐닝 마이크로미러 및 그 제조방법
KR100682961B1 (ko) * 2006-01-20 2007-02-15 삼성전자주식회사 회전형 마이크로 미러
KR20080003996A (ko) * 2006-07-04 2008-01-09 삼성전자주식회사 스캔 장치 및 그 방법
KR102343643B1 (ko) * 2021-04-23 2021-12-27 탈렌티스 주식회사 이중 soi를 이용한 광 스캐너 및 그의 제조 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100469062B1 (ko) 2002-08-13 2005-02-02 한국전자통신연구원 광통신용 주사 미세거울 및 그 제조 방법
KR20060010419A (ko) * 2004-07-28 2006-02-02 삼성전자주식회사 구동각도가 향상된 광스캐너 및 이를 적용한 레이저영상투사장치
KR102337083B1 (ko) 2021-04-27 2021-12-08 주식회사 멤스 캡핑층을 포함하는 멤스 미러 및 그의 제조 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050053053A (ko) * 2003-12-02 2005-06-08 삼성전자주식회사 마이크로 미러 및 그 제조방법
KR20060018683A (ko) * 2004-08-25 2006-03-02 엘지전자 주식회사 정전력 구동 스캐닝 마이크로미러 및 그 제조방법
KR100682961B1 (ko) * 2006-01-20 2007-02-15 삼성전자주식회사 회전형 마이크로 미러
KR20080003996A (ko) * 2006-07-04 2008-01-09 삼성전자주식회사 스캔 장치 및 그 방법
KR102343643B1 (ko) * 2021-04-23 2021-12-27 탈렌티스 주식회사 이중 soi를 이용한 광 스캐너 및 그의 제조 방법

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KR102585787B1 (ko) 2023-10-06
KR20230112450A (ko) 2023-07-27

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