5f05614 A7 .......-- B7 五、發贼明（1 ) ' ~^ 發明領域 本發明一般係相關於一種製造光鏡系統的微電子機 械系統（MEMS)，該光鏡系統藉由靜電引動而可在兩個 正交軸上傾斜。強調在光學空間束偏向中使用這些反射铲 的特殊應用。 ^ 發明背景 光纖通訊系統目前係應用交換系統（switching system)以在中央辦公室交換中心選定路線發送信號。這 些電子光# (electro_〇ptic)系統係依賴將來自每個“進 入光纖的光輸出轉換成電形式，在合成電訊號中提取出 數據内容，然後利用習知電子交換器選定路線發送數據内 谷至可調變（modulatable )光源，而該光源係與“目的” 光纖相搞合。這種偵測、交換及再調整過程是昂貴的、複 雜的、耗電的而且需承受元件失效（failure )。 目前有使用替代的“全光學，，交換系統，這應用機 械式啟動巨大光鏡及微電子機械系統所製造的裝置。這些 裝置利用電磁啟動器、壓電啟動器及靜電啟動器以便實體 地移動稜鏡、反射鏡及部份光纖，以便影響介於光纖間的 訊號交換。 此外’應用光柵波導件（grating waveguide )、羅籣 圓光柵及平面光栅的光纖對光纖交換器係允許根據光波長 的專門交換。 應用靜電地可變指數材料之可交換光學耦合器的串 聯二進位樹枝結構（鈮化鋰、聚合物），及應用熱電加熱 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐 (請先閱讀背面之注意事項再填寫本頁) . 線—申 經濟部智慧时產局員工消費合作社印製 91834 B7 B7 經 .濟 部 智 慧 財 產 局 消 費 合 社 印 製 五、發明說明（2 ) 态以影響不均衡的馬赫 技術。 田玫干涉rr，係同樣地為現用狀態 許多微電子機械系统Θ^么一 ^ ％此 于統乂換态係徠用空間光束偏向系 統’这與系見於電話系锑 ❾ “ 4 ϋ / 、统的电子縱橫式，，交換器相似。卜 廷種方法係要求已知於 %5f05614 A7 .......-- B7 V. Fake Thieming (1) '~ ^ FIELD OF THE INVENTION The present invention relates generally to a micro-electro-mechanical system (MEMS) for manufacturing optical mirror systems. It can be tilted on two orthogonal axes by electrostatic induction. The special application of these reflectors in optical space beam deflection is emphasized. ^ BACKGROUND OF THE INVENTION Optical fiber communication systems currently employ a switching system to send signals at selected routes in a central office switching center. These electronic light # (electro_〇ptic) systems rely on converting the light output from each "into the optical fiber into an electrical form, extracting the data content from the synthesized electrical signal, and then sending the data within the selected route using a conventional electronic switch. Valley to tunable (modulatable) light source, which is combined with the "purpose" fiber. This detection, exchange and readjustment process is expensive, complex, power-consuming and need to withstand component failure (failure ). There are currently devices using alternative "all-optical, switching systems" that use mechanical activation of giant light mirrors and micro-electro-mechanical systems. These devices use electromagnetic starters, piezoelectric starters, and electrostatic starters to physically move plutonium, mirrors, and some optical fibers in order to affect the signal exchange between the optical fibers. In addition, the fiber-to-fiber switch system using grating waveguides, circular gratings, and planar gratings allows special switching according to the wavelength of light. Tandem binary tree structure (lithium niobium, polymer) of exchangeable optical coupler using electrostatically variable index material, and thermoelectric heating. This paper applies Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page). LINE—Printed by the Consumer Cooperatives of the Employees' Bureau of the Ministry of Economic Affairs 91834 B7 B7 Economics. Printed by the Consumer Cooperatives of the Ministry of Economic Affairs ’Intellectual Property Bureau ) State to affect the unbalanced Mach technique. Tian Mei interferes with rr, which is also the current state of many microelectromechanical systems. The telephone system is antimony ❾ "4 ϋ / 统, the electronic crossbar type, and the switch is similar. The method of Buding method is known in%
'/褕出埠數目用的反射鏡數目係 糟由孩埠數目的平方而。 a U — 4種由鬲埠數目交換方法而決尝The number of mirrors used for the number of ports is determined by the square of the number of ports. a U — 4 ways to switch by the number of ports
疋 鏡的麼倒性數目則超過以任何實際的程庠產生且I 在任何合理的運轉期間餘留的數目。 ^ ▲除一些微電子機械系统靜電啟動裝置外，上述光學 交換的方法沒有一個符人 > 付。目别用於鬲光纖埠數量，（達到 1024x 1024)光學 $ 7 ;查拉β 土 > f 尤予乂又连接交換器的特定要求。成本、可 靠> 、·义損A殛化敏I度、隔離、波長依賴度、電源 消耗’以及在1情形下之交換速度的問題，則個別或者 整體地避免其使用。因此，雪 口几 而要一種乐統及方法，用來克 服在簡單的互補型金屬氧化物半導體（CM〇s)相容製造程 斤之限制下上述為人所發現的問題。 所需之光鏡系統設計具有高解析度2維掃描功能及 偏向功能，這以表面微加工過程來製造。為達到高解析度， 大反射鏡尺寸及轉動角度是必要的。 本發明係解決如此的需求。 發明概述 本發明係揭示一種光鏡系統。此光鏡系统包括一反 射鏡及第一框架構件，該第一框架構件經由第_複數個懸 吊樑而耦合到且環繞該反射鏡。該系統進一步包括經由第 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 497公釐） 91834 2 5ι〇5614 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（3 ) 二複數個懸吊樑而耦合到且環繞第一框架構件的第二框架 構件。該系統也包括至少一複數個靜電啟動器，而該啟動 器係具有耦合至第一及第二框架構件其中之一的交叉梳狀 之（interdigitated)靜電齒狀物。反射鏡係關於相對於第 一複數個撓曲樑的軸而轉動。 在操作過程中，啟動一個啟動器直到反射鏡達到臨 界角（critical angle )，隨後開啟第二啟動器。假如一個 啟動器失效，則第二個啟動器可固定反射鏡在它的位置 上。在較佳實施例中，差動電容感測（differential capacitive sensing )可藉由在兩側邊安裝齒狀物於梳狀驅動器來使 用’或者藉由偵測介於反射鏡相對側之啟動器間的差動訊 號來使用。同樣地可把差動電容感測用在降低該感測訊號 的雜訊（noise)。 根據本發明之裝置係符合可直接標度比例、高埠數 目光學交換器的要求，其中每個光學1/〇埠配置係使用兩 個反射鏡。根據本發明的光鏡可利用於下列應用中，但並 未义八限制·光學加減多工器（add-drop multiplexer)、 波長路由器、自由空間光學互連、晶片層光學I/O、光學 掃描顯不器、光學掃描器（條碼、微型照相機）、光學儲 存讀/寫頭、雷射印表機、醫療用替代玻璃（併以自適應 光子器件）' 醫療诊斷設備、防護用途用的光學掃描。光 學偵測器與光學掃描反射鏡之結合可藉由減少捕捉1維或 2維光學訊息所需要的偵測器數目而降低影像應用的成 本。 (請先閱讀背面之注意事項再填寫本頁) 訂ί •線丨—倒 The number of mirrors is more than the number produced by any actual process and I is left over during any reasonable operation. ^ ▲ Except for some electrostatic starters of micro-electro-mechanical systems, none of the above-mentioned methods of optical exchange are compatible with the above. This item is used for the number of optical fiber ports, (up to 1024x 1024) optical $ 7; Chala β soil > f especially for the specific requirements of connecting switches. The problems of cost, reliability, and loss of sensitivity, isolation, wavelength dependence, power consumption, and exchange speed in the case of one, can be avoided individually or collectively. Therefore, Xuekou needs a system and method to overcome the problems discovered above under the limitation of simple complementary metal oxide semiconductor (CM0s) compatible manufacturing processes. The required optical lens system design has a high-resolution 2D scanning function and a deflection function, which is manufactured by a surface micromachining process. To achieve high resolution, a large mirror size and rotation angle are necessary. The present invention addresses such a need. SUMMARY OF THE INVENTION The present invention discloses a light mirror system. The light mirror system includes a reflector and a first frame member. The first frame member is coupled to and surrounds the reflector via a plurality of suspension beams. The system further includes the application of the Chinese National Standard (CNS) A4 specification (21,0497 mm) via the first paper standard, 91834 2 5ι561414, printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, A7 and B7. 5. Description of the invention (3) 2 A plurality of suspension beams are coupled to and surround the second frame member of the first frame member. The system also includes at least a plurality of electrostatic starters having interdigitated electrostatic teeth coupled to one of the first and second frame members. The mirror is rotated about an axis relative to the first plurality of flexure beams. During operation, a starter is activated until the reflector reaches a critical angle, and then a second starter is activated. If one actuator fails, a second actuator can hold the reflector in its position. In a preferred embodiment, differential capacitive sensing can be used by installing teeth on both sides of the comb drive, or by detecting an actuator located on the opposite side of the mirror. To use a differential signal. Similarly, differential capacitance sensing can be used to reduce the noise of the sensing signal. The device according to the present invention meets the requirements of a direct-scalable, high-port-number optical switch, where each optical 1/0 port configuration uses two mirrors. The optical mirror according to the present invention can be used in the following applications, but there are no restrictions: optical add-drop multiplexer, wavelength router, free-space optical interconnect, wafer-level optical I / O, optical scanning Displays, optical scanners (bar codes, miniature cameras), optical storage read / write heads, laser printers, medical alternative glass (and adaptive photonic devices) 'medical diagnostic equipment, protective optical scanning . The combination of optical detectors and optical scanning mirrors can reduce the cost of imaging applications by reducing the number of detectors required to capture 1- or 2-dimensional optical information. (Please read the precautions on the back before filling this page) Order ί • 线 丨 —
91834 505614 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（4 ) 圖說明 第1圖係顯示根據本發明之反射鏡用的機械佈置之 前視圖。 第2a及2b圖係描述轉動臂之載面圖。 第3圖係顯示可輕易整合入框架設計的梳狀驅動器 及轉動臂之側視圖。 第3a圖係顯示根據本發明之啟動器的頂部視圖。 第3b圖係第3a圖之啟動器的側視圖。 第4圖係顯示内部平衡環結構，該内部平衡環結構 包括内部框架構件、梳狀驅動器系統及電接地線。 第）圖係顯示内部及外部平衡環結構、自行組合機 構及至基板的電性連接。 -------------裝--------訂i ϋ an m n n n f (請先閱讀背面之注意事項再填寫本頁) 第6圖係顯示根據本發明，由基板至向上傾斜框架 (tilt-up frame)之電連接法 〇 元件符號之說明 100 反射鏡系統 102 反射鏡 103 轉動臂 104 内部反射鏡框架 105 轉動臂 105 啟動器系統 106 外部反射鏡框架 107,109 撓曲樑 108,110 懸吊樑 112,114 啟動器 112 梳狀啟動器 118，120 啟動器 121,123 轉動臂 131 啟動器元件 300 内部平衡環結構 301 内部框架構件 302 第一末端部分 302a-302c啟動器 本紙張尺度適用中國國家標準（CNS)A4規格（210 297公釐） 91834 5ί)5614 五、發明說明（$ ) A7 B7 304 第二末端部分 304a-304c啟動器 306 中間部分 306a，306b梳狀驅動器 308,310 齒狀物 400 外部平衡環結構 402 外部框架結構 500 反射鏡組件 510 釣環鉸鍵 600 基板 602 向上傾斜框架 608 可彎曲傳導彈簧 609 絕緣體 612 錨狀物 本發明係相關於一種以雙軸（dual-axis )微反射鏡為 基礎的系統。以下說明之提忠可使一般熟習此技藝者製造 使用本發明’並且作為專利申請内容及其說明書。實施例 之種種改良及在此所描述的一般原理及特徵對於熟習此技 蟄者是容易明白的。因此，本發明不打算予以限制在所示 (請先閱讀背面之注意事項再填寫本頁) 較隹實施例之詳細描琉 之貫施例裡’但卻符合在此所描述之原理及特徵的最大範 圍。 經濟部智慧財產局員工消費合作社印製 根據本發明的光鏡系統係於雙平衡環反射鏡的框架 令併該啟動益’反射鏡及其框架可傾斜向上而離開使用材 料為基礎或靜電為基礎之自行裝配機械的基板。介於基板 與反射鏡框架間的電性互連則提供電源至該反射鏡。 反射鏡及電極可裝配成任何角度（這並不限制在基 板上或幾乎平行於基板的框架方向）。在較佳實施例中， 反射鏡之懸吊是完全挽曲的。 第1圖係根據本發明，顯示用於反射鏡系統1 0Q的 機械設計之前視圖。反射鏡系統1 〇〇包括由内部反射鏡框 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 5 91834 經濟部智慧財產局員工消費合作社印製 505614 ’ Α7 _ Β7 五、發明說明（6 ) 架104所包圍的反射鏡102，這些由外部反射鏡框架1〇6 所包圍。反射鏡112係經由轉動臂i〇3、i〇5而關於其第 一轉動軸來轉動。第一轉動軸係與兩個懸吊樑1 〇8及n〇 共線’而懸吊樑則連接反射鏡1 〇 2至内部反射鏡框架1 〇 4。 在較佳實施例中，懸吊樑係為撓曲樑。啟動器〗丨2及n 4 則係耦合到該内部反射鏡框架1 〇4，而且附裝至反射鏡 102，而導致關於第一軸的運動。外部反射鏡框架ι〇6係 支撐第三及第四機械啟動器118及12〇,而經由轉動臂m 及12 3 ’第三及第四啟動器則引起關於第二軸的運動。第 二轴係垂直於第一軸，而且與連接内部反射鏡框架丨〇4至 外部反射鏡框架106的撓曲樑107及1〇9共線。 第2a及2b圖係以裁面圖描述耦合至轉動臂ι〇5之撓 曲樑1 0 8，而該轉動臂1 〇 5係為反射鏡組件的一部份。轉 動臂i05的至少一個表面係置放在平行於啟動器而且在反 射鏡轉動軸下方的位置上。第2a圖係顯示當啟動器（未 顯示）處於關閉位置時之轉動臂的位置。轉動臂1 〇5、撓 曲樑108 (載面圖）及啟動器元件131(我已經將參考5加 到第1圖裡的131)則係耦合至啟動器。第2b圖係顯示當 啟動器處於開啟位置時轉動臂的位置。轉動臂i〇5以角度 0而傾斜。第3圖係顯示經由轉動臂丨〇 5而將平面内之線 性啟動器112耦合至轉動反射鏡1〇2之載面圖。 Μ力董經過啟動态元件13 1而由啟動器112施加至 轉動臂105時，淨力矩相關於轉動軸而予以導入，而鏡1〇2 則轉動著。以啟動該啟動器丨12、11 4、11 8及1 2 0的次序 -------------^------— It--------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 6 91834 505614 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（7 ) 將決定反射鏡102轉動的方向。 誠如第4圖所示’可輕易地將梳狀驅動器112整合 入該框架設計—該梳狀物則沿著框 示又長度而設置。將啟 動器限定於鏡框架平面裡的運動係為不需要的。例如，該 梳狀物的可移動部分係垂直於該平面移動，或者關於㈣ 平面而轉動。冑如梳狀㈣器的可移動部 > 以轉動的模式 來移動的話，則該驅動器可以經由堅硬的機械式連接而直 接地連接主該反射鏡。假如梳狀物垂直於框架與反射鏡的 平面而移動的話，則需要連接到反射鏡的撓曲連接。第 圖係顯示根據本發明之啟動器的頂部視圖。第3b圖顯示 第3a圖之啟動器的側視圖。在此實施例中，具有啟動器 系統105的三個部分，第一端點部分3〇2、第二端點部分 3 04及中間部分3〇6。端點部分3〇2及3〇4係經由叉指式 齒狀物308及310而嚙合著該中間部分306。在此實施例 中’母一個末端部分302及304均分別包括三個電絕緣啟 動器302a至302c及304a至304c。在第3、4及5圖中， 將此啟動器的一個實施例予以顯示，該實施例包括元件 306 及 302b 或 304b 。 因此’假如啟動該啟動器302a及304a，則中間部分 3 06會“向上”拉動。假如啟動該啟動器302b及3〇41)，貝 306會維持目前位置，而且假如啟動該啟動器302c及 3 04c ’則306會“向下，，拉動。於是，啟動器系統105會以 不同方式，包括轉動而來移動該反射鏡，這視施加於馬達 302a至302c及304a至304 c的電壓而定。雖然已將啟動 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 91834 II-----------·--------——_----線署♦ (請先閱讀背面之注意事項再填寫本頁) 505614 A7 五、發明說明（S ) (請先閱讀背面之注意事項再填寫本頁) 器系統105描述於三個位置系統（向上、向下及固定位置） 的内容中，但是一般熟習此技藝者會輕易地認知到，可以 藉由使用2個啟動器，而非在此所揭示之系統裡的三個啟 動器，而可提供兩個位置（向上或向下），（固定位置或向 下）’（固定位置或向上）。再者，此系統可利用多個靜電 平行平板啟動〈在此系統裡，電極的運動係垂直於電極 表面）而且此系統之使用係位於本發明的精神及範疇内。 根據本發明的反射鏡可以雙向模式來加以操作，而 且在母個軸上的電極可以用來實施雙向運動。在習知設計 中，電極係專門用於每個軸上的每個轉動方向，這會增加 整體的成本。機械式連接到反射鏡的數量使能更多的獨立 電性互連，而機械式連結的數量可使用於其他的特徵，例 如反射鏡表面的活動成形（active shaping)。由於啟動器 (在反射鏡的相對側邊上）間的距離，本發明的光鏡之其 他優點是實質上沒有電串音干擾（cr〇ss_talk)。 經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 第4圖係顯示内部平衡環結構3⑽，該結構包括内部 框架構件301、梳狀驅動器系統3〇2及電接地線。該梳狀 驅動斋系統302係包括第一組梳狀驅動器部分3〇物至 3〇4b，夂第二組梳狀驅動器部分3〇6&及3〇讣。該梳狀驅 動器部分304a及306a係耦合至内部框架元件3〇i。當施 加電壓時，梳狀驅動器部分304a&3〇4b相對於彼此地移 動，而當施加電壓以提供啟動器機構時，梳狀驅動器3〇以 及306b則相對於彼此移動。 I 第5圖係顯示反射鏡組件500，而在該組件中，外部 8 t纸張尺度適用中關家標準（CNS)A4規格_(2IG X 297公爱） 91834 505614 A7 五、發明說明（9 ) 平衡環結構400則加入於該内部平衡環結構3〇〇。外部平 衡環結構權係包括外部框架構件402及第三與第四梳狀 驅動器結構404a、404b、406a及406b以提供該第二啟動 器機構。誠如所見’此組件刚係包括電撓曲引線用於方 便連接至基板，以及插梢與鈞環鉸鏈5丨0以便於紐合。框 架可藉由許多機構加以組合，這包括熱量啟動器或靜電啟 動器、雙®電晶片所啟動的组件或表面張力所啟動的組 件。 第6圖係顯示根據本發明的一種由基板6〇〇電連接 至反射鏡系統100用之傾斜框架6〇2的電連接方法。當允 許許夕導體在一個支撐構件時，此方法增強框架裡的結構 剛度。因為應力問題，不可以將大面積的絕緣體使用於一 些情形裡，而且絕緣層不可能具有結構層的強度。雖然經 由鬆開鉸鏈的電連接不可靠，但是由基板至向上傾斜框架 的電連接則可以是“插梢”轉動輛502、提供插梢轴轉的插 梢-及-鉤環鉸鏈510。如上述的反射鏡框架係包括複式的 導體及絕緣體。誠如所見，可彎曲傳導彈簧連接器6〇8係 經由絕緣體609而耦合至該框架。錨狀物612將可彎曲的 傳導彈簧608連接至基板，而且經由表面導體或者已摻雜 區域，將電連接定路徑至連接墊（bond pad )。 在較佳實施例中，外部框架可經由錨狀物而附裝至 基板。假如該基板是平面的，則可以設置連接反射鏡至其 框架的撓曲接頭，以致於受到轉動的反射鏡沒有接觸到該 基板。基板上具有啟動器。靜電啟動器可為單向或雙向， 本紙張尺度適用中®國家標準（CNSM4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 線！ 經濟部智慧財產局員工消費合作社印製 91834 505614 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（10 而且啟動裔可為平行板或梳狀驅動器。再者，啟動器並未 限制於靜電技術。最後，每個啟動器内部的電極可由雙麗 %晶片、犧牲層（sacrificial layer )或其任何組合而分隔ς 結論 根據本發明的光鏡系統在雙平衡環反射鏡的框架裡 併入啟動器。反射鏡及其框架可傾斜向上地離開使用材举 為基礎或靜電為基礎之自行裝配機構的基板。介於基板病 反射鏡框架間的電性互連則提供電源至該反射鏡。 由於靜電啟動，反射鏡的光學表面不會彎面。反射 鏡及f極可殂合成任意角度（該角度並不受限於基板上或 幾乎平行於基板的框架方向）。因為在電極上面，反射鏡 表面並未形成圖案，所以反射鏡表面則為完全平坦且具有 對稱的邊界條件。晶圓連接（wafer_b〇nding )是不需要 的。沒有摩擦損耗特性（除了一次裝配操作之外）。反射 鏡懸吊是撓曲的。 雖然已經根據所示之實施例來說明本發明，但是一 般熟悉此技藝者將輕易地.瞭解對於實施例所具有的改變， 而這些變化係在本發明的精神與範疇内。例如’雖然在較 佳實施例中揭*出該反射鏡在第—及第二方向_，但是 反射鏡可在視所施加靜電力而定的複數個方向轉動（亦^ 扭轉運動於是，許多變更可由一般熟習此技藝者來執 行，而沒有偏離所附屬之申請專利範圍的精神盘範疇。 ‘纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 91834 I--------^---------^ 2清先閱讀背面之注意事項再填寫本頁)91834 505614 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (4) Illustration of the drawing Figure 1 is a front view showing the mechanical arrangement of the mirror according to the present invention. Figures 2a and 2b are plan views illustrating the rotating arm. Figure 3 shows a side view of a comb drive and swivel arm that can be easily integrated into the frame design. Figure 3a shows a top view of a starter according to the invention. Figure 3b is a side view of the actuator of Figure 3a. Figure 4 shows the internal gimbal structure, which includes an internal frame member, a comb drive system, and an electrical ground wire. (F) The figure shows the internal and external gimbal structure, self-assembly mechanism, and electrical connection to the substrate. ------------- 装 -------- Order i ϋ an mnnnf (Please read the precautions on the back before filling out this page) Figure 6 shows according to the present invention, Electrical connection method from substrate to tilt-up frame 〇 Explanation of component symbols 100 Mirror system 102 Mirror 103 Rotating arm 104 Internal mirror frame 105 Rotating arm 105 Starter system 106 External mirror frame 107, 109 Flexure Beam 108, 110 Suspension beam 112, 114 Starter 112 Comb starter 118, 120 Starter 121, 123 Rotary arm 131 Starter element 300 Internal gimbal structure 301 Internal frame member 302 First end part 302a-302c Starter This paper size applies to China Standard (CNS) A4 specification (210 297 mm) 91834 5ί) 5614 V. Description of invention ($) A7 B7 304 Second end part 304a-304c Starter 306 Middle part 306a, 306b Comb drive 308,310 Tooth 400 External Balance ring structure 402 External frame structure 500 Mirror assembly 510 Fishing ring hinge 600 Base plate 602 Tilt up frame 608 Flexible conductive spring 609 Insulator 612 Anchor It was related to one biaxially (dual-axis) of the micromirror-based systems. The promotion described below can be used by a person skilled in the art to make and use the present invention 'as the content of a patent application and its specification. The various modifications of the embodiments and the general principles and features described herein will be readily apparent to those skilled in the art. Therefore, the present invention is not intended to be limited to those shown (please read the notes on the back before filling out this page). The detailed description of the embodiment is described in the conventional embodiment, but it conforms to the principles and characteristics described here. Maximum range. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the frame of the optical mirror system according to the present invention, which is attached to the frame of the double balance ring mirror. The substrate of self-assembly machinery. An electrical interconnection between the substrate and the mirror frame provides power to the mirror. The mirror and electrode can be assembled at any angle (this is not limited to the substrate or almost parallel to the frame direction of the substrate). In the preferred embodiment, the suspension of the mirror is fully bent. Figure 1 is a front view showing the mechanical design of a mirror system 100Q according to the present invention. Mirror system 100 includes the internal mirror frame. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 5 91834 Printed by the Intellectual Property Bureau Staff Consumer Cooperative of the Ministry of Economic Affairs 505614 'Α7 _ Β7 V. Invention Explanation (6) The mirrors 102 surrounded by the frame 104 are surrounded by the outer mirror frame 106. The mirror 112 is rotated about its first rotation axis via the rotation arms i03 and i05. The first rotating shaft system is collinear 'with the two suspension beams 108 and n0, and the suspension beam connects the mirror 102 to the inner mirror frame 104. In a preferred embodiment, the suspension beam is a flexure beam. The starter 2 and n 4 are coupled to the internal mirror frame 104 and are attached to the mirror 102, resulting in movement about the first axis. The external mirror frame ιo6 supports the third and fourth mechanical actuators 118 and 120, and the third and fourth actuators via the rotating arms m and 12 3 ′ cause movements about the second axis. The second axis system is perpendicular to the first axis and is collinear with the flexure beams 107 and 109 connecting the internal mirror frame 104 to the external mirror frame 106. Figures 2a and 2b are cut-away views of a deflection beam 108 coupled to a rotating arm ι05, which is a part of a mirror assembly. At least one surface of the swing arm i05 is attached to a position parallel to the actuator and below the mirror rotation axis. Figure 2a shows the position of the swing arm when the actuator (not shown) is in the closed position. Rotating arm 105, deflection beam 108 (front view) and starter element 131 (I have added reference 5 to 131 in Figure 1) are coupled to the starter. Figure 2b shows the position of the swivel arm when the actuator is in the open position. The rotation arm i05 is inclined at an angle of 0. Figure 3 is a plan view showing the coupling of the linear actuator 112 in the plane to the rotating mirror 102 via the rotating arm 05. When M Li Dong is applied to the turning arm 105 by the starter 112 through the starting state element 13 1, the net torque is introduced in relation to the turning axis, and the mirror 10 2 is turning. In order of starting the launcher: 12, 11, 4, 11, 8 and 1 2 0 ------------- ^ -------- It --------- (Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) 6 91834 505614 Printed by A7, Consumer Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs (7) The direction in which the mirror 102 rotates will be determined. As shown in Fig. 4, the comb driver 112 can be easily integrated into the frame design-the comb is arranged along the frame and the length. The movement that restricts the starter to the plane of the mirror frame is unnecessary. For example, the movable part of the comb is moved perpendicular to the plane, or is rotated about the plane of the puppet. If the movable part of the comb-shaped device is moved in a rotating mode, the driver can be directly connected to the main mirror via a rigid mechanical connection. If the comb moves perpendicular to the plane of the frame and the mirror, a flex connection to the mirror is required. Figure shows a top view of a starter according to the invention. Figure 3b shows a side view of the actuator of Figure 3a. In this embodiment, there are three sections of the initiator system 105, a first endpoint section 302, a second endpoint section 304, and a middle section 306. The end portions 302 and 304 engage the middle portion 306 via the interdigital teeth 308 and 310. In this embodiment, each of the female end portions 302 and 304 includes three electrically insulated starters 302a to 302c and 304a to 304c. In Figures 3, 4 and 5, an embodiment of this launcher is shown, which embodiment includes elements 306 and 302b or 304b. Therefore, if the starters 302a and 304a are activated, the middle portion 306 will be pulled "up". If the launcher 302b and 3041 are activated, Bay 306 will maintain its current position, and if the launcher 302c and 304c 'is activated, then 306 will "down and pull." Thus, the launcher system 105 will be different , Including rotating to move the mirror, depending on the voltages applied to the motors 302a to 302c and 304a to 304c. Although this paper size has been activated, the Chinese National Standard (CNS) A4 specification (210 X 297 cm) Li) 91834 II ----------- · ------------ _---- line agency ♦ (Please read the precautions on the back before filling this page) 505614 A7 5 、 Explanation (S) (Please read the notes on the back before filling this page) The device system 105 is described in the content of the three position systems (up, down, and fixed positions), but those who are familiar with this art will easily Recognizes that two positions (up or down), (fixed position or down), (fixed position or down) can be provided by using two launchers instead of the three launchers in the system disclosed here Position or up). Furthermore, the system can be activated using multiple electrostatic parallel plates (here In the system, the electrode movement is perpendicular to the electrode surface) and the use of this system is within the spirit and scope of the present invention. The mirror according to the present invention can be operated in a bidirectional mode, and the electrode on the mother axis can be used To implement bidirectional motion. In the conventional design, the electrode system is dedicated to each direction of rotation on each axis, which will increase the overall cost. The number of mechanical connections to the mirror enables more independent electrical interconnections The number of mechanical connections can be used for other features, such as active shaping of the mirror surface. Due to the distance between the actuators (on the opposite sides of the mirror), other aspects of the optical mirror of the present invention The advantage is that there is virtually no electric crosstalk interference (cr0ss_talk). The 4th figure printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs shows the internal balance ring structure 3⑽, which includes an internal frame member 301 and a comb drive system 3〇 2 and electrical ground wire. The comb-shaped drive system 302 includes a first set of comb-shaped driver parts 30 to 300b, and a second set of comb-shaped drives. The actuator portions 3 06 & 30. The comb driver portions 304a and 306a are coupled to the inner frame element 30i. When a voltage is applied, the comb driver portions 304a & 304b move relative to each other, When a voltage is applied to provide the starter mechanism, the comb drivers 30 and 306b move relative to each other. I Figure 5 shows a mirror assembly 500, in which an external 8 t paper scale is applied to Zhongguan Home Standard (CNS) A4 Specification_ (2IG X 297 Public Love) 91834 505614 A7 V. Description of Invention (9) The balance ring structure 400 is added to the internal balance ring structure 300. The external balance ring structure system includes an outer frame member 402 and third and fourth comb drive structures 404a, 404b, 406a, and 406b to provide the second starter mechanism. As you can see, this component just includes electrical flex leads for easy connection to the base plate, and a pin and a hinge ring 5 丨 0 for easy connection. The frame can be combined by a number of mechanisms, including thermal or electrostatic starters, components powered by dual® wafers, or components activated by surface tension. FIG. 6 shows an electrical connection method for electrically connecting a substrate 600 to a tilt frame 602 for a mirror system 100 according to the present invention. This method enhances the structural stiffness in the frame when the Xu Xi conductor is allowed to be on a supporting member. Due to stress problems, large-area insulators cannot be used in some cases, and the insulating layer cannot have the strength of a structural layer. Although the electrical connection by loosening the hinge is unreliable, the electrical connection from the base plate to the upwardly inclined frame can be a "plug" turning vehicle 502, and a pin-and-hook hinge 510 that provides a pin-shaft rotation. The mirror frame as described above includes a multiple type of conductor and insulator. As can be seen, the flexible conductive spring connector 608 is coupled to the frame via an insulator 609. The anchor 612 connects the flexible conductive spring 608 to the substrate, and routes the electrical connection to a bond pad via a surface conductor or a doped region. In a preferred embodiment, the outer frame may be attached to the substrate via an anchor. If the substrate is flat, a flex joint that connects the mirror to its frame can be provided so that the rotating mirror does not contact the substrate. A starter is provided on the substrate. The electrostatic starter can be one-way or two-way. This paper size is applicable to the national standard (CNSM4 specification (210 X 297 mm)) (Please read the precautions on the back before filling this page). Order! Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the Consumer Cooperative 91834 505614 Printed by the Consumer Property Cooperative of the Ministry of Economic Affairs Intellectual Property Cooperative A7 V. Invention Description (10) The starter can be a parallel plate or comb drive. Furthermore, the starter is not limited to electrostatic technology. Finally, every The electrodes inside each starter can be separated by Shuangli% wafers, sacrificial layers, or any combination thereof. Conclusion The optical mirror system according to the present invention is incorporated into the starter in the frame of a dual gimbal mirror. The mirror and The frame can be tilted upwards and away from the substrate of the self-assembly mechanism using a material-based or electrostatic-based mechanism. The electrical interconnection between the substrate and the mirror frame provides power to the mirror. Due to electrostatic activation, the mirror The optical surface will not be curved. The mirror and f pole can be combined at any angle (the angle is not limited to the substrate or is almost parallel to the substrate Frame direction). Because the mirror surface is not patterned on the electrode, the mirror surface is completely flat and has symmetrical boundary conditions. Wafer connection (wafer_bonding) is not required. There is no friction loss characteristic ( Except for one assembly operation). The mirror suspension is deflected. Although the invention has been described in accordance with the embodiment shown, those skilled in the art will readily understand the changes to the embodiment, and These variations are within the spirit and scope of the present invention. For example, 'Although the mirror is revealed in the first and second directions in the preferred embodiment, the mirror may be plural depending on the electrostatic force applied. Rotate in all directions (also twist motion), so many changes can be carried out by those skilled in the art without departing from the scope of the spirit disk attached to the scope of patent application attached. 'The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) 91834 I -------- ^ --------- ^ 2 Please read the notes on the back before filling in this page)