CN212276107U - Angle amplification type quasi-static micro-mirror device - Google Patents
Angle amplification type quasi-static micro-mirror device Download PDFInfo
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- CN212276107U CN212276107U CN202020941033.7U CN202020941033U CN212276107U CN 212276107 U CN212276107 U CN 212276107U CN 202020941033 U CN202020941033 U CN 202020941033U CN 212276107 U CN212276107 U CN 212276107U
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Abstract
The embodiment of the application discloses angle amplification type quasi-static micromirror device, including: the device comprises a mirror surface, a mirror surface torsion shaft, an angle amplification rod assembly, an anchor point structure and a driving structure; the anchor point structure comprises a first fixed anchor point, a second fixed anchor point and a third fixed anchor point; two ends of the mirror surface are respectively connected with the first fixed anchor point and the second fixed anchor point through mirror surface torsion shafts; the angle amplification assembly comprises an angle amplification rod, an angle amplification rod torsion shaft and a motion conduction part; one end of the angle amplification rod is connected with the mirror surface through the motion conduction part, and the other end of the angle amplification rod is connected with the third fixed anchor point through the torsion shaft of the angle amplification rod; the driving structure comprises a driving rod, and the driving rod is connected with the angle amplification rod; the included angle between the angle amplification rod and the axial direction of the mirror surface torsion shaft is alpha, and the value range of alpha is 0-alpha and is less than or equal to 90 degrees; the angle amplification rod can transmit the angle deflection provided by the driving structure through the motion transmission part and amplify the angle deflection to the mirror surface.
Description
Technical Field
The present application relates to a micromirror technology field, and more particularly, to an angle-magnifying quasi-static micromirror device.
Background
Since the first release of scanning silicon mirrors in 1980, micro-electro-mechanical systems (MEMS) have been widely used in the field of optical scanning, and a large number of technologies and products have been developed. The field of optical scanning has become an important direction of MEMS research. With the development of technology, in the past decade, the application of micro-projection technology and numerous medical imaging technologies has become the main direction for the development of current MEMS optical scanning devices, especially laser scanning devices. The development of the miniature projection technology promotes the appearance of a series of novel products, such as a miniature laser projector with the size of a mobile phone or a smart phone with a laser projection function, a head-up display HUD which is placed in a vehicle and can be used for displaying navigation information when the vehicle is driven, various wearable devices including a virtual reality technology VR, an augmented reality technology AR and the like.
Electrostatic actuation is one of the primary actuation modes of MEMS micromirrors. When the micro-mirror works, the micro-mirror is driven by a periodic electric signal to generate an electrostatic force, so that the mirror surface of the micro-mirror moves periodically. The operation modes of the electrostatically driven MEMS micro-mirror are classified into a resonant driving mode and a quasi-static driving mode, and particularly, for the quasi-static driving, it is generally realized by a vertical comb structure.
Most of the existing electrostatic drive type one-dimensional quasi-static micromirrors are rigidly connected with a drive structure in parallel to a mirror torsion axis, so that the deflection angle of a moving comb tooth is the same as the mirror deflection angle. For vertical comb drive, the comb capacitance will increase and then decrease with increasing deflection angle, so that the comb electrode cannot provide enough electrostatic force under large angle, i.e. it is difficult to achieve large angle deflection of the mirror (mechanical angle is usually below 7 °).
Disclosure of Invention
The application aims to solve the technical problem that the electrostatic driving type quasi-static MEMS micro-mirror is difficult to realize large-angle deflection.
In order to solve the above technical problem, an embodiment of the present application discloses an angle-amplifying type quasi-static micromirror device, including: the device comprises a mirror surface, a mirror surface torsion shaft, an angle amplification rod assembly, an anchor point structure and a driving structure;
the anchor point structure comprises a first fixed anchor point, a second fixed anchor point and a third fixed anchor point;
two ends of the mirror surface are respectively connected with the first fixed anchor point and the second fixed anchor point through mirror surface torsion shafts;
the angle amplification assembly comprises an angle amplification rod, an angle amplification rod torsion shaft and a motion conduction part; one end of the angle amplification rod is connected with the mirror surface through the motion conduction part, and the other end of the angle amplification rod is connected with the third fixed anchor point through the torsion shaft of the angle amplification rod;
the driving structure comprises a driving rod, and the driving rod is connected with the angle amplification rod;
the included angle between the angle amplification rod and the axial direction of the mirror surface torsion shaft is alpha, and the value range of alpha is 0-alpha and is less than or equal to 90 degrees;
the angle amplification rod can transmit the angle deflection provided by the driving structure through the motion transmission part and amplify the angle deflection to the mirror surface.
Further, the motion transmission part includes a hinge spring;
the angle between the extension line of the connecting line of the intersection point of the hinged spring and the central point of the mirror surface and the axial direction of the mirror surface torsion shaft is beta, and the value range of beta is more than or equal to 10 and less than or equal to 60 degrees.
Further, the hinge spring includes a connection rod and a plurality of frame springs, which are connected to each other by the connection rod.
Further, the hinge spring is a folding spring.
Furthermore, the hinged springs comprise folding springs and two U-shaped springs, the two U-shaped springs are arranged in a vertically staggered mode, and the folding springs are connected with the opening ends of the two U-shaped springs respectively.
Furthermore, the driving structure comprises a driving rod, a moving comb tooth structure and a static comb tooth structure;
the moving comb tooth structures and the static comb tooth structures are vertically staggered to form a vertical comb tooth driving structure; the movable comb tooth structure is arranged on the driving rod.
Furthermore, the driving rod comprises an outer side driving rod and an inner side driving rod, and the moving comb tooth structure comprises an outer side moving comb tooth structure and an inner side moving comb tooth structure;
the outside moves the broach structure and arranges in the both sides of outside actuating lever, and inboard moves the broach structure and arranges in the both sides of inboard actuating lever.
Furthermore, the number of the driving structures and the number of the angle amplification rod assemblies are both 4; the 4 driving structures are respectively connected with the corresponding angle amplifying rods;
two of the 4 driving structures are arranged on one side of the mirror surface torsion shaft, and the other two of the 4 driving structures are arranged on the other side of the mirror surface torsion shaft.
Further, an included angle between the angle amplification rod and the axial direction of the mirror surface torsion shaft is 90 degrees;
two driving structures positioned on the same side of the mirror surface torsion shaft are arranged at intervals through fixed structures.
Further, an included angle between the angle amplification rod and the axial direction of the mirror surface torsion shaft is 90 degrees;
the driving rods of the two driving structures which are positioned at the same side of the mirror surface torsion shaft are connected.
By adopting the technical scheme, the application has the following beneficial effects:
the angle amplification type quasi-static micromirror device disclosed by the embodiment of the application is characterized in that the angle amplification rod and the mirror surface torsion shaft are arranged in a non-parallel mode, and the driving structure is arranged at the other end of the angle amplification rod, so that the driving structure and the mirror surface torsion shaft are arranged in a non-parallel mode, and the deflection angle of the movable comb teeth of the driving structure is not the same as that of the mirror surface any more; and through the design of the angle amplification rod, the driving structure and the mirror surface are separated at two ends of the angle amplification rod, so that under the deflection of small angles of the comb teeth, the mirror surface can realize the deflection of large angles.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a first silicon device layer of an angle-magnifying quasi-static micromirror device according to embodiment 1 of the present application;
FIG. 2 is a schematic front view of an angle-magnifying quasi-static micromirror device according to embodiment 1 of the present application;
FIG. 3 is a schematic diagram illustrating a back side structure of an angle-magnifying quasi-static micromirror device according to embodiment 1 of the present application;
FIG. 4 is a schematic structural view of a hinge spring according to embodiment 1 of the present application;
FIG. 5 is a schematic structural view of a hinge spring according to embodiment 1 of the present application;
FIG. 6 is a schematic structural view of a hinge spring according to embodiment 1 of the present application;
FIG. 7 is a schematic structural view of a hinge spring according to embodiment 1 of the present application;
FIG. 8 is a schematic side view of an angle-magnifying quasi-static micromirror device according to embodiment 1 of the present application;
FIG. 9 is a cross-sectional view of the angle-enlarged quasi-static micromirror device A-A' of FIG. 2;
FIG. 10 is a cross-sectional view of the angle-enlarged quasi-static micromirror device B-B' of FIG. 2;
FIG. 11 is a schematic structural diagram illustrating a second silicon device layer of an angle-enlarged quasi-static micromirror device according to embodiment 1 of the present application;
FIG. 12 is a schematic diagram of a cavity structure and supporting rods of an angle-magnifying quasi-static micromirror device according to embodiment 1 of the present application;
FIG. 13 is a schematic structural diagram of an angle-magnifying quasi-static micromirror device according to embodiment 2 of the present application;
FIG. 14 is a schematic diagram illustrating a backside structure of an angle-magnifying quasi-static micromirror device according to embodiment 2 of the present application.
The following is a supplementary description of the drawings:
110-a first silicon device layer; 120-a first buried layer of silicon dioxide; 130-a second silicon device layer, 140-a second buried layer of silicon dioxide; 150-a monocrystalline silicon substrate layer;
111-mirror surface; 1121-mirror torsion axis; 1122-angularly enlarging the rod torsion axis; 113-moving comb tooth structure; 1131-outer moving comb tooth structure; 1132 — inner moving comb structure; 1141-outer drive rod; 1142-an inner drive rod; 115-a first electrically isolated trench; 1161-a first anchor point; 1162-a second anchor point; 1163-a third anchor point; 117-metal pads; 118-angle enlarging rod; 119-a window;
121-hinge spring; 3021-frame spring; 3022-a connecting rod; 3121-a U-shaped spring; 3122-a folding spring; 133-static comb tooth structure; 1331-edge static comb teeth; 1332-central static comb teeth; 134-connecting rod structure; 135-a second electrically isolated tank; 137-second metal pad; 151-cavity structure; 152-a support bar; 215-fixed frame.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the present application. In the description of the embodiments of the present application, it is to be understood that the terms "upper", "lower", "top", "bottom", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.
Example 1
Referring to fig. 1 in combination with fig. 2 and 3, fig. 1 is a schematic structural diagram of a first silicon device layer of an angle-magnifying quasi-static micromirror device according to embodiment 1 of the present application, and fig. 2 and 3 are schematic structural diagrams of a front side and a back side of the angle-magnifying quasi-static micromirror device according to the present application, respectively; as shown in fig. 1, the micromirror device comprises: mirror 111, mirror torsion axis 1121, angle amplification rod assembly, anchor point structure, and drive structure;
the anchor point structure is a fixed structure; the anchor structure includes a first anchor 1161, a second anchor 1162, and a third anchor 1163;
the two ends of the mirror 111 are respectively connected to the first fixed anchor 1161 and the second fixed anchor 1162 through a mirror torsion axis 1121;
the angle amplification lever assembly includes an angle amplification lever 118, an angle amplification lever torsion shaft 1122, and a motion transmission section;
one end of the angle amplification lever 118 is connected to the mirror 111 through the motion conduction part, and the other end of the angle amplification lever 118 is connected to the third fixed anchor 1163 through the angle amplification lever torsion shaft 1122; the driving structure is arranged on the angle amplification rod 118; the driving structure comprises a driving rod, a moving comb tooth structure and a static comb tooth structure 133; the moving comb tooth structures and the static comb tooth structures 133 are vertically staggered to form a vertical comb tooth driving structure; the driving rod comprises an outer driving rod 1141 and an inner driving rod 1142, and the moving comb tooth structure comprises an outer moving comb tooth structure 1131 and an inner moving comb tooth structure 1132; the outer movable comb structures 1131 are arranged on both sides of the outer driving rod 1141, and the inner movable comb structures 1132 are arranged on both sides of the inner driving rod 1142. Both the outboard drive rod 1141 and the inboard drive rod 1142 are rigidly cross-connected to the angularly enlarged rod 118. The angle amplification rod 118 is used for amplifying the small-angle deflection provided by the moving comb tooth structure and transmitting the amplified small-angle deflection to the large-angle deflection of the mirror surface 111, so as to realize the function of angle amplification.
In the embodiment of the present application, the moving comb structure and the static comb structure 133 may both adopt a four-row comb structure. According to the actual design requirement, the invention is not limited to the design of four rows of comb teeth, for example, the invention can also be designed into a single-row comb tooth structure or other multi-row comb tooth structures; and the number, the size, the spacing and other specific characteristics of the comb teeth can be designed according to actual requirements.
The angle amplification rod 118 and the mirror surface torsion shaft 1121 are arranged in a non-parallel manner, and the driving structures are arranged on two sides of the angle amplification rod 118, so that the driving structures are not arranged in parallel with the mirror surface torsion shaft 1121, and the deflection angle of the comb teeth is not the same as that of the mirror surface 111 any more; and the driving structure and the mirror surface 111 are separated at two ends of the angle amplification rod 118 through the design of the angle amplification rod 118, so that the mirror surface 111 can realize large-angle deflection under the deflection of small angles of the comb teeth. Wherein, the included angle between the angle enlarging rod 118 and the axial direction of the mirror surface torsion shaft 1121 is α, and the value range of α is 0< α <90 °; the angle, shape and size between the angle enlarging rod 118 and the axial direction of the mirror torsion shaft 1121 can be designed according to actual requirements.
The angular amplification lever 118 enables angular deflection that is conducted through the motion transmission portion and amplified to the mirror 111 by the angular deflection provided by the drive structure.
The motion conduction part in the embodiment of the present application may be a hinge spring 121 (as shown by a dotted line frame in fig. 1); the hinge spring 121 connects the angle-enlarging rod 118 and the mirror 111, so that the mirror 111 is suspended.
The arrangement of the hinge spring 121 can be varied, for example, as follows:
in a first possible implementation, the hinge spring 121 may include a connection rod and a plurality of frame springs, and the plurality of frame springs 3021 are connected to each other through the connection rod 3022. For example, as shown in fig. 4, the hinge spring 121 may be a double-frame spring, and the two frame springs are connected by a connecting rod 3022, which provides a degree of freedom for the deflection of the angle-enlarging lever 118 and the mirror 111; alternatively, the plurality of frame springs 3021 may be directly connected without the connecting rod 3022; the angle between the extension line of the connection line of the intersection point of the hinge spring 121 and the mirror 111 and the center point of the mirror 111 and the axial direction of the mirror torsion shaft 1121 is beta, the value range of beta is 10-60 degrees, and the geometric dimensions such as the shape and size of the hinge spring 121 can be designed according to actual requirements.
In a second possible embodiment, the hinge spring 121 may also be a folding spring 3122; for example, the spring may be folded in the lateral direction as shown in fig. 5 for 4 times, or in the longitudinal direction as shown in fig. 6 for 6 times; the folding times can be selected according to actual requirements.
In a third possible implementation, as shown in fig. 7, the hinge spring 121 is composed of U-shaped springs 3121 and folding springs 3122, wherein the two U-shaped springs 3121 are arranged in a staggered manner, the folding springs 3121 connect both ends of the two U-shaped springs 3121, and the folding springs 3122 are surrounded by the U-shaped springs 3121.
In the embodiment of the present application, as shown in fig. 1, the number of the driving structure and the angle-enlarging rod 118 may be 4; the 4 driving structures are respectively connected with the corresponding angle amplifying rods 118; two of the 4 driving structures are disposed on one side of the mirror torsion shaft 1121, and the other two of the 4 driving structures are disposed on the other side of the mirror torsion shaft 1121.
The micro mirror device provided by the first embodiment of the present application has a large mirror 111, and the diameter of the mirror 111 is 1-10 mm. And the thickness of the metal reflective layer evaporated on the upper surface of the mirror 111 is 50-500 nm.
The design philosophy of adopting "lever" among the micro mirror device that this application embodiment provided, place through drive structure and mirror surface 111 nonparallel, make the deflection angle of broach no longer keep equal with mirror surface 111, again through the design of longer angle amplification pole 118, separate drive structure and mirror surface 111 at the both ends of pole, when the broach deflects with the small-angle, because the inherent length of angle amplification pole 118, the angle has been enlarged several times on one side of mirror surface 111, thereby realize the wide-angle deflection of quasi-static MEMS micro mirror. Therefore, compared with other one-dimensional quasi-static micro-mirror devices, the micro-mirror device provided by the invention can keep enough electrostatic force under small-angle deflection of the comb teeth, and can deflect the mirror surface 111 by a larger angle (more than or equal to 10 degrees) through the angle amplification rod 118, so that the technical problem that the electrostatic driving quasi-static MEMS micro-mirror is difficult to realize large-angle deflection can be effectively solved. The micro-mirror device can be manufactured by the traditional mature process and the existing equipment, is simple and mature in process, high in reliability and good in repeatability, and can be manufactured in a large scale.
The angle amplification mechanism of the invention is specifically as follows: as indicated by the reference numeral in FIG. 1, assuming that the distance between the end point of the angle-enlarging rod 118 far from the mirror 111 and the end point of the hinge spring 121 connected to the mirror 111 is L, the radius of the mirror 111 is R, the intersection point of the hinge spring 121 and the mirror 111 passes through the extension line of the center point of the mirror 111, and the included angle formed by the pivot axis 112a is β, the deflection angle of the moving comb structure 113 around the pivot axis 1122 of the angle-enlarging rod is θcomb(not shown), the deflection angle of the mirror 111 about the mirror torsion axis 1121 is θmirror(not shown), then the specific angular magnification relationship can be expressed approximately as follows:
wherein, the magnification e is as follows:
alternatively, the angle magnification mechanism and the related structure of the present invention are not limited to the one-dimensional MEMS micro-mirror device, but are also applicable to the two-dimensional MEMS micro-mirror device.
The technical idea of angle enlargement is applied to a two-dimensional MEMS micro-mirror device, wherein the slow-axis rotation structure of the two-dimensional MEMS micro-mirror device is similar to the micro-mirror device shown in fig. 1, except that the angle enlarging rod 118 is connected via the hinge spring 121 instead of the mirror surface 111, but rather a movable frame. At this time, the mirror 111 is connected to the inside of the movable frame via a fast axis torsion shaft, and the mirror 111 can be rotated relative to the movable frame by electrostatic force driving. By applying a voltage, the angle amplification rod 118 is driven, the movable frame and the mirror 111 together make quasi-static deflection around the slow axis torsion axis, and the deflection angle is amplified by a certain multiple relative to the comb deflection angle, and simultaneously, inside the movable frame, the mirror 111 deflects around the fast axis torsion axis, thereby realizing two-dimensional deflection motion, and wherein the deflection of the X axis obtains angle amplification. In particular, the slow axis twist axis of the two-dimensional micromirror is in the same direction as the mirror plane twist axis 1121 of fig. 1, and the fast axis twist axis is perpendicular to the slow axis twist axis. The angle-amplified one-dimensional quasi-static MEMS micro-mirror is expanded into a two-dimensional micro-mirror structure, and the two-dimensional micro-mirror structure belongs to the protection scope of the invention.
In the embodiment of the application, the micro-mirror device is manufactured by processing an SOI wafer as a material through a semiconductor process. Fig. 8, 9, and 10 are side views, a-a 'cross section in fig. 2, and a B-B' cross section in fig. 2, respectively, of a micromirror device according to the present application, and as shown in fig. 8, an SOI wafer is composed of a first silicon device layer 110, a first buried silicon dioxide layer 120, a second silicon device layer 130, a second buried silicon dioxide layer 140, and a bottom single-crystal silicon substrate layer 150 stacked in this order. The thicknesses of the first silicon device layer 110 and the second silicon device layer 130 are 10-100 microns, the thicknesses of the first silicon dioxide buried layer 120 and the second silicon dioxide buried layer 140 are 0.1-3 microns, and the thickness of the monocrystalline silicon substrate layer 150 is 100-800 microns.
The mirror 111, the mirror torsion shaft 1121, the angle amplification rod assembly, the anchor point structure, the moving comb structure and the driving rod in the driving structure are all disposed on the first silicon device layer 110, and the static comb structure 133 in the driving structure is disposed on the second silicon device layer 130.
As shown in fig. 1, the main structure of the first silicon device layer 110 of the micro mirror device includes, in addition to the above:
the first electrical isolation groove 115 is a separated electrical isolation groove, and can be formed together with device layer structures such as comb teeth by a deep etching process. The first electrical isolation groove 115 electrically isolates the fixed frame 215 from the anchor point. The anchor is surrounded on its periphery by a first electrically isolating groove 115, electrically isolated from the fixed frame 215 of the micromirror device.
And a first metal pad 117 disposed on the upper surface of the anchor structure. The metal coating is formed through a metal evaporation process, the material is gold, and the thickness is 50-500 nm. The electrical signal provided by the external circuit is coupled into the micro-mirror device by wire bonding to the first metal pad 117. The number, size and specific arrangement position of the first metal pads 117 can be designed according to actual needs.
The window 119, the window 119 is opened to the upper surface of the second silicon device layer 130 to achieve the formation of the second metal pad 137 on the upper surface of the second silicon device layer 130, and the subsequent successful wire bonding.
As shown in fig. 11, the main structure of the second silicon device layer 130 of the micromirror device includes:
the static comb tooth structure 133, the static comb tooth structure 133 is composed of an edge static comb tooth 1331 and a central static comb tooth 1332. The edge static comb 1331 is attached to the fixed structure of the second silicon device layer 130 and the central static comb 1332 is attached to the connecting bar 134. The static comb structure 133 is vertically arranged with the moving comb of the first silicon device layer to jointly form a vertical comb driving structure of the micromirror device.
And the connecting rod structure 134, wherein the connecting rod structure 134 is rigidly connected to the second silicon device layer 130, and the central static comb 1332 is arranged on two sides of the connecting rod structure.
A second electrical isolation groove 135, the second electrical isolation groove 135 functioning to electrically isolate the stationary comb-tooth structure 133 from the stationary structure.
And a second metal pad 137, the second metal pad 137 connecting an external circuit signal to the static comb-tooth structure 133 through a lead.
In addition to the main device layer structure described above, the micromirror device has a cavity structure 151 and support rods 152 defining the movable range of the micromirror device, as shown in fig. 12. The cavity structure 151 is formed by etching the monocrystalline silicon substrate layer 150 and the second buried silicon dioxide layer 140. All movable structures of the micromirror device, as well as the stationary comb-tooth structure 133, are located right above the cavity structure 151. The movable structure includes: mirror 111, mirror torsion axis 1121, angle amplification lever torsion axis 1122, moving comb structure, driving lever, angle amplification lever 118, and hinge spring 121.
The support bar 152 supports the bar construction 134 and has a length shorter than the bar construction 134 but a width greater than the bar construction 134.
Example 2
Referring to fig. 13 in conjunction with fig. 14, fig. 13 is a schematic structural diagram of an angle-enlarged quasi-static micromirror device according to embodiment 2 of the present application, and fig. 14 is a three-dimensional view of the back side of the angle-enlarged quasi-static micromirror device according to embodiment 2 of the present application. As shown in fig. 13, the angle-enlarged quasi-static micromirror device of the second embodiment of the present application is similar to the first embodiment, except that: the angle of the angle enlarging rod 118 is 90 ° with respect to the axial direction of the mirror torsion shaft 1121, i.e., the driving structure is arranged vertically.
In embodiment 2 of the present application, the driving rods at the left and right ends on the same side of the mirror torsion shaft 1121 may be separated by the fixing frame 215 (as shown in fig. 13), and optionally, the driving rods at the left and right ends on the same side of the mirror torsion shaft 1121 may also be connected together, and when the driving rods are connected together, a space for the driving rods to move needs to be reserved in the second silicon device layer 130.
The present invention is not intended to be limited to the particular embodiments shown and described, but is to be accorded the widest scope consistent with the principles and novel features herein disclosed.
Claims (10)
1. An angle-magnifying quasi-static micromirror device, comprising: the device comprises a mirror (111), a mirror torsion shaft (1121), an angle amplification rod assembly, an anchor point structure and a driving structure;
the anchor structure comprises a first anchor (1161), a second anchor (1162), and a third anchor (1163);
two ends of the mirror surface (111) are respectively connected with the first fixed anchor point (1161) and the second fixed anchor point (1162) through the mirror surface torsion shaft (1121);
the angle amplification assembly includes an angle amplification lever (118), an angle amplification lever torsion shaft (1122), and a motion conduction section; one end of the angle amplification rod (118) is connected with the mirror surface (111) through the motion conduction part, and the other end of the angle amplification rod (118) is connected with the third fixed anchor point (1163) through the angle amplification rod torsion shaft (1122);
the driving structure comprises a driving rod, and the driving rod is connected with the angle amplification rod (118);
the included angle between the angle amplification rod (118) and the axial direction of the mirror surface torsion shaft (1121) is alpha, and the value range of alpha is 0-alpha and is less than or equal to 90 degrees;
the angular amplification lever (118) is capable of transmitting and amplifying the angular deflection provided by the drive structure through the motion transmission section to the angular deflection of the mirror surface (111).
2. The angle-amplified quasi-static micromirror device of claim 1, wherein the motion-conducting part comprises a hinge spring (121);
an included angle formed by an extension line of a connecting line of an intersection point of the hinge spring (121) and the mirror surface (111) and a central point of the mirror surface (111) and an axial direction of the mirror surface torsion shaft (1121) is beta, and the value range of the included angle is that beta is more than or equal to 10 degrees and less than or equal to 60 degrees.
3. The angle-amplified quasi-static micromirror device of claim 2, wherein the hinge spring (121) comprises a connecting rod (3022) and a plurality of frame springs (3021), the plurality of frame springs (3021) being interconnected by the connecting rod (3022).
4. The angle-amplified quasi-static micromirror device of claim 2, wherein the hinge spring (121) is a folding spring (3122).
5. The angle-enlarged quasi-static micromirror device of claim 2, wherein the hinge spring (121) comprises a folding spring (3122) and two U-shaped springs (3121), the two U-shaped springs (3121) are staggered up and down, and the folding springs (3122) are connected to the open ends of the two U-shaped springs (3121), respectively.
6. The angle-amplified quasi-static micromirror device of claim 1, wherein the driving structure comprises a moving comb-tooth structure and a static comb-tooth structure (133);
the moving comb tooth structures and the static comb tooth structures (133) are vertically staggered to form a vertical comb tooth driving structure; the moving comb tooth structure is arranged on the driving rod.
7. The angle-amplified quasi-static micromirror device of claim 6, wherein the driving rods comprise an outer driving rod (1141) and an inner driving rod (1142), and the moving comb-tooth structure comprises an outer moving comb-tooth structure (1131) and an inner moving comb-tooth structure (1132);
the outer moving comb tooth structures (1131) are arranged on two sides of the outer driving rod (1141), and the inner moving comb tooth structures (1132) are arranged on two sides of the inner driving rod (1142).
8. The angle-amplified quasi-static micromirror device of claim 6, wherein the number of the driving structures and the angle-amplifying rod assemblies is 4; the 4 driving structures are respectively connected with the corresponding angle amplification rods (118);
two of the 4 driving structures are arranged on one side of the mirror torsion shaft (1121), and the other two of the 4 driving structures are arranged on the other side of the mirror torsion shaft (1121).
9. The angle-amplified quasi-static micromirror device of claim 8, wherein the angle between the angle-amplifying rod (118) and the axial direction of the mirror torsion axis (1121) is 90 °;
two driving structures positioned on the same side of the mirror surface torsion shaft (1121) are arranged at intervals through a fixed frame.
10. The angle-amplified quasi-static micromirror device of claim 8, wherein the angle between the angle-amplifying rod and the axial direction of the mirror torsion axis (1121) is 90 °;
the driving rods of the two driving structures positioned on the same side of the mirror surface torsion shaft (1121) are connected.
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| CN202020941033.7U CN212276107U (en) | 2020-05-28 | 2020-05-28 | Angle amplification type quasi-static micro-mirror device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113534449A (en) * | 2021-07-27 | 2021-10-22 | 西南大学 | Bending beam and electromagnetic scanning micro-mirror with same |
| US20230035607A1 (en) * | 2019-03-22 | 2023-02-02 | Stmicroelectronics S.R.L. | Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics |
-
2020
- 2020-05-28 CN CN202020941033.7U patent/CN212276107U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230035607A1 (en) * | 2019-03-22 | 2023-02-02 | Stmicroelectronics S.R.L. | Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics |
| US11933968B2 (en) * | 2019-03-22 | 2024-03-19 | Stmicroelectronics S.R.L. | Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics |
| CN113534449A (en) * | 2021-07-27 | 2021-10-22 | 西南大学 | Bending beam and electromagnetic scanning micro-mirror with same |
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