WO2023131075A1 - 一种抛光垫修整装置 - Google Patents
一种抛光垫修整装置 Download PDFInfo
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- WO2023131075A1 WO2023131075A1 PCT/CN2022/144028 CN2022144028W WO2023131075A1 WO 2023131075 A1 WO2023131075 A1 WO 2023131075A1 CN 2022144028 W CN2022144028 W CN 2022144028W WO 2023131075 A1 WO2023131075 A1 WO 2023131075A1
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- Prior art keywords
- polishing pad
- connecting arm
- head unit
- connecting plate
- movable
- Prior art date
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- 238000005498 polishing Methods 0.000 title claims abstract description 90
- 230000007246 mechanism Effects 0.000 claims abstract description 43
- 238000009966 trimming Methods 0.000 claims description 29
- 230000003750 conditioning effect Effects 0.000 claims description 17
- 238000013459 approach Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 16
- 230000003321 amplification Effects 0.000 abstract description 5
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000007730 finishing process Methods 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010534 mechanism of action Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/007—Cleaning of grinding wheels
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Definitions
- the invention belongs to the field of semiconductor integrated circuit chip manufacturing equipment, and in particular relates to a polishing pad dressing device.
- CMP Chemical Mechanical Planarization
- the wafer is polished on the surface of the rough polishing pad.
- the surface of the polishing pad is ground and the polishing effect is lost. It is necessary to have a diamond
- the dresser of the grinding wheel trims the surface of the polishing pad, making the surface of the polishing pad rough and frictional, so that it can continue to have the function of polishing.
- the polishing pad dresser In order to complete the entire polishing process, the polishing pad dresser needs to have a process close to the polishing pad in the height direction.
- the UP/Down process of the polishing pad dresser is basically realized by the principle of the lever. One end of the moment arm is used to realize the pitching of one end of the long moment arm of the lever, as shown in FIG. 1 , that is, the process of realizing the UP/Down of the dressing head of the polishing pad dresser.
- the spatial angle ⁇ of the mechanical arm supporting the polishing pad dresser is a constantly changing process.
- the pressure direction F2 applied to the polishing pad by the pad dresser is constantly changing, which leads to the inability to guarantee the state of the polished polishing pad in a relatively stable state, and ultimately leads to the inability to guarantee the consistency of the polished wafer on the polishing pad;
- the ⁇ angle is not zero in most cases, and the pressure applied to the polishing pad by the polishing pad dresser is not a positive pressure in most cases, that is, the polishing pressure in different areas of the polishing pad dresser is inconsistent, and
- the swing speed of the polishing pad dresser is limited during the working process, which leads to inconsistent dressing degrees in different areas of the polishing pad, that is, the consistency of the polishing pad shape cannot be guaranteed, which affects the consistency of the polished wafer; moreover, this The UP/
- the present invention provides a polishing pad dressing device in which the power direction is consistent with the moving direction, so that the connecting arm carries the dressing head unit to achieve the dressing of the polishing pad in a translational manner, and the dressing pressure is more uniform.
- a polishing pad dressing device comprising:
- a trimming head unit located at one end of the connecting arm, is used for trimming the polishing pad
- the base unit is arranged at the other end of the connecting arm, and is movably connected with the connecting arm, and is used to drive the connecting arm to move vertically up and down with the dressing head unit, so that the dressing head unit approaches or moves away from the polishing pad in a vertical direction.
- the invention utilizes the base unit to drive the connecting arm to move vertically up and down, so that the dressing head unit can trim the polishing pad vertically downward, which ensures the consistency of the power direction and the moving direction, and realizes the up and down movement of the dressing head unit through translational motion , realize uniform and stable polishing pressure in the dressing process, solve the problem that the pressure applied to the polishing pad by the dressing head unit in the prior art leverage principle is constantly changing, and there is no problem of magnification of the force, ensuring the shape of the polishing pad consistency.
- the connecting arm moves vertically up and down with the trimming head unit in a horizontal posture.
- the dressing head unit moves vertically up and down to contact with the surface of the polishing pad, and maintain the state of surface contact to complete the dressing of the polishing pad.
- the base unit at least includes,
- the joint which can move up and down vertically relative to the mounting seat, is connected with the connecting arm;
- the movable connecting plate is connected with the connecting arm and can vertically move up and down along the mounting seat driven by the connecting arm.
- the movable connecting plate can bear the bending moment brought by the dressing head unit and the connecting arm, so as to ensure the stability of the whole structure.
- the base unit also includes an adjustment component, which passes through the connecting arm and abuts against the top surface of the movable connecting plate to adjust the size of the gap between the connecting arm and the movable connecting plate to ensure that the connecting arm is in a horizontal posture.
- the setting of the adjustment component can assist the adjustment to realize the horizontal attitude of the connecting arm, which can relatively reduce the machining accuracy of the parts.
- the adjustment assembly includes at least two first adjustment parts, the first adjustment parts are arranged at intervals along the length direction of the connecting arm, and the at least two first adjustment parts cooperate to form a second gap between the connecting arm and the movable connecting plate. An included angle to overcome the tilted posture in the length direction of the connecting arm.
- the adjustment assembly includes at least two second adjustment parts, the second adjustment parts are arranged at intervals along the width direction of the connecting arm, and the at least two second adjustment parts cooperate to form a first gap between the connecting arm and the movable connecting plate. Two included angles to overcome the tilting posture in the width direction of the connecting arm.
- first adjusting member and the second adjusting member are arranged perpendicularly to each other.
- the total number of the first adjusting member and the second adjusting member is six, which are divided into two groups arranged symmetrically with respect to the central axis of the connecting arm.
- connecting arm and the movable connecting plate are connected by a fastener, and the fastener is close to the first adjusting part and the second adjusting part.
- the mounting seat is provided with a vertically extending guide mechanism, and the movable connecting plate moves vertically up and down along the guide mechanism.
- the guide mechanism and the trimming head unit are respectively arranged on two sides of the mounting seat.
- the trimming head unit, joints and guide mechanism are arranged in sequence from left to right.
- the joint is arranged between the trimming head unit and the guide mechanism.
- the thrust of the power mechanism on the joint can overcome the self-weight of the trimming head unit to the guide mechanism to a certain extent.
- the bending moment reduces the load of the guiding mechanism and increases the life of the guiding mechanism.
- the upper and lower ends of the guide mechanism respectively form limit blocks to limit the up and down movable stroke of the movable connecting plate.
- the limit block acts as a limit during the entire UP/Down movement, ensuring the safe working range of the dressing head unit.
- the joint is set separately from the movable connection plate, or the joint is integrally set with the movable connection plate.
- the joint moves up and down under the drive of the power mechanism, and a movable gap is formed between the joint and the power mechanism;
- the joint is integrally connected with the power mechanism.
- the existence of the movable gap can form a protective effect between the joint and the power mechanism, and increase the flexibility of the two; the integral connection of the joint and the power mechanism makes the overall structure simpler.
- the power mechanism is a cylinder.
- the end of the connecting arm forms a cover body with an open bottom, and the joint and the movable connecting plate are respectively connected with the inner top surface of the cover body; the top surface of the cover body forms a hollow part.
- the trimming head unit includes a driving unit and a trimming sheet.
- the base unit is connected with the swing unit, and the swing unit is connected with the fixed seat, and the swing unit is used to drive the base unit, the connecting arm and the dressing head unit to swing in a circumferential direction as a whole.
- the beneficial effects of the present invention are: 1) Compared with the original rotating UP/Down structure, the translational UP/Down structure can stably realize uniform and stable positive pressure in the trimming process, ensuring the consistency of the polishing trimming process; 2) Compared with The original rotating UP/Down structure, the translational UP/Down structure is not a motion amplification mechanism, which can effectively reduce the impact of the dressing head unit on the polishing pad during the movement to the polishing pad; 3) Compared with the original rotating UP/Down structure, In terms of the position error of the hard limit structure, the translational UP/Down structure has no amplification effect, and it is easier to ensure the consistency of the status of the dressing head unit.
- FIG. 1 is a schematic diagram of the mechanism of action in the prior art. At this time, the dressing head unit moves up and down with A as the fulcrum.
- Fig. 2 is a schematic diagram of the action mechanism of the present invention, at this moment, the trimming head unit moves up and down.
- Fig. 3 is a structural schematic diagram of the present invention.
- FIG. 4 is a first perspective view of the base unit of the present invention.
- FIG. 5 is a second perspective view of the base unit of the present invention.
- Fig. 6 is a partial perspective view of the base unit of the present invention.
- Fig. 7 is a top view of the base unit of the present invention.
- Fig. 8 is a schematic diagram of the working principle of the first adjusting member of the present invention.
- Fig. 9 is a top view of the present invention.
- Fig. 10 is a D-D sectional view in Fig. 9 .
- a kind of polishing pad finishing device comprises the connecting arm 1 that extends horizontally, is arranged on one end of connecting arm 1, is used for finishing the finishing head unit 2 of polishing pad, and is arranged on connecting arm 1
- the base unit 2 at the other end, the base unit 2 is movably connected with the connecting arm 1, and is used to drive the connecting arm 1 to move vertically up and down with the trimming head unit 2, so that the trimming head unit 2 moves along the direction of the polishing pad tending to be vertical.
- the direction approaches or moves away from the polishing pad of course, it can also be said to approach or move away from the polishing pad along the direction perpendicular to the polishing pad.
- the above-mentioned dressing head unit 2 is not only in contact with the surface of the polishing pad during the process of moving up and down to contact the polishing pad, but also in the state of surface contact during the whole dressing process after contact, that is, the polishing pad is completed in a state where the dressing head unit and the polishing pad maintain surface contact. trimming.
- the connecting arm 1 moves vertically up and down with the trimming head unit 2 in a horizontal posture, that is, the connecting arm 1 does not tilt during the up and down movement.
- the base unit 3 includes a mounting base 31 , a joint 32 , a movable connecting plate 33 , and an adjustment component 34 .
- the mounting seat 31 is relatively fixed, and it is responsible for the installation and fixing of other parts. It is composed of one-piece parts, which can avoid installation errors caused by the installation process of multi-body parts, and ensure the accuracy requirements of the dressing head unit 2 during work.
- the joint 32 is fixedly connected to the connecting arm 1 by bolts, and can move vertically up and down relative to the mounting seat 31, that is, the joint 21 moves vertically up and down with the connecting arm 1;
- the joint 32 moves up and down under the drive of the power mechanism 36, and a movable gap 37 is formed between the joint 32 and the power mechanism 36.
- a movable gap 37 is formed between the joint 32 and the power mechanism 36.
- the power mechanism 36 is an air cylinder, which is installed vertically to realize the vertical translation of the joint 32 up and down.
- the joint 32 and the power mechanism 36 can also be provided as an integral structure.
- the movable connecting plate 33 is connected with the connecting arm 1, specifically the movable connecting plate 33 is connected under the connecting arm 1, and it can move vertically up and down along the mounting seat 31 under the drive of the connecting arm 1;
- the movable connecting plate 33 can be arranged separately from the joint 32, or both can be connected as an integral structure;
- a vertically extending guiding mechanism 311 is provided on the mounting base 31 , and the movable connecting plate 33 moves vertically up and down along the guiding mechanism 311 .
- limit blocks 312 are respectively formed at the upper and lower ends of the guiding mechanism 311 , so as to limit the moving stroke of the movable connecting plate 33 up and down.
- the guide mechanism 311 adopts a structure of double guide rails and four sliders arranged in parallel to ensure stability and strength.
- the guide mechanism 311 and the trimming head unit 2 are respectively arranged on both sides of the mounting base 31 , that is, the trimming head unit 2 , the joint 32 and the guide mechanism 311 are arranged sequentially from left to right.
- the adjustment assembly 34 passes through the connecting arm 1 and abuts against the top surface of the movable connecting plate 33, thereby adjusting the size of the gap between the connecting arm 1 and the movable connecting plate 33 to ensure that the connecting arm 1 is always in a horizontal posture.
- the connecting arm 1 can always be in a horizontal posture, and the adjustment assembly 34 can also be omitted at this time.
- the adjustment assembly 34 includes at least two first adjustment members 341, which are arranged at intervals along the length direction of the connecting arm 1, and the first adjustment members 341 are preferably is located in the direction of the central axis of the connecting arm 1 . Therefore, at least two first adjusting members 341 cooperate to form a first angle between the connecting arm 1 and the movable connecting plate 33 , so as to overcome the inclined posture of the connecting arm 1 in the length direction.
- the ⁇ angle shown in Figure 8 is the above-mentioned first included angle. Taking the direction shown in Figure 2 as an example for illustration, under the action of the connecting arm 1's own weight, it has a tendency to rotate counterclockwise.
- the member 341 rotates downward to abut against the top surface of the movable connecting plate 33, so that the right end of the connecting arm 1 lifts its left end relatively upwards, so as to overcome the inclination caused by the self-weight of the connecting arm 1, that is, to overcome the inclination of the connecting arm 1 in the length direction.
- the inclined posture ensures the horizontal posture of the connecting arm 1 axis.
- the adjustment assembly 34 also includes at least two second adjustment members 342, the second adjustment members 342 are arranged at intervals along the width direction of the connecting arm 1, and the second adjustment members 342 are preferably located on a horizontal line in the width direction of the connection arm 1 , so that at least two second adjusting parts 342 cooperate to form a second angle between the connecting arm 1 and the movable connecting plate 33, thereby overcoming the inclined posture of the connecting arm 1 in the width direction.
- the specific principle is the same as that in the length direction, and will not be repeated .
- the first adjusting member 341 and the second adjusting member 342 are arranged perpendicular to each other, that is, all the first adjusting members 341
- the central line connecting the centers of all the second adjusting members 342 is connected, and the two connecting lines are perpendicular to each other.
- the total number of the first adjusting member 341 and the second adjusting member 342 is six, which are divided into two groups arranged symmetrically with the central axis of the connecting arm 1, and each group is three At this time, there is no clear boundary between the first adjusting part 341 and the second adjusting part 342, and part of the adjusting parts can be used as the first adjusting part 341 for adjusting the posture in the length direction, and can also be used as the second adjusting part 342 for adjusting the posture in the width direction use.
- the connecting arm 1 and the movable connecting plate 33 are connected by a fastener 35, and the fastener 35 is arranged close to the above-mentioned first adjustment member 341 and the second adjustment member 342.
- the number of fasteners 35 There are four, arranged on the periphery of the adjustment assembly 34 . During specific assembly, the adjustment component 34 can be assembled first, and then the fastener 35 can be assembled.
- connecting arm 1 forms the cover body 11 of lower opening, and joint 32, movable connecting plate 33 are connected with the inner top surface of cover body 11 respectively, thereby joint 32, movable connecting plate 33, mounting seat 31, power mechanism 36, guide
- the mechanisms 311 are all housed in the cover body 11 ; a hollow portion 111 is formed on the top surface of the cover body 11 to reduce the weight of the connecting arm 1 .
- the trimming head unit 2 is the executive mechanism of the trimming process, which includes a drive unit 21 and a trimming piece 22, the trimming piece 22 moves vertically up and down under the drive of the driving unit 21, and is realized by the trimming piece 22 rotation. Conditioning of polishing pads.
- the base unit 3 is connected with the swing unit 4, and the swing unit 4 is connected with the fixed seat 5, and the swing unit 4 is used to drive the base unit 3, the connecting arm 1 and the trimming head unit 2 to swing in a whole circumferential direction, To achieve the dressing of the polishing pad everywhere.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims (19)
- 一种抛光垫修整装置,其特征在于,包括:连接臂(1),水平延伸;修整头单元(2),设于连接臂(1)的一端,用于修整抛光垫;基座单元(3),设于连接臂(1)的另一端,与连接臂(1)活动连接,用于驱动连接臂(1)带着修整头单元(2)垂直上下移动,以使得修整头单元(2)沿趋于垂直的方向靠近或远离抛光垫。
- 根据权利要求1所述的抛光垫修整装置,其特征在于:所述连接臂(1)以水平的姿态带着修整头单元(2)垂直上下移动。
- 根据权利要求1所述的抛光垫修整装置,其特征在于:所述修整头单元(2)垂直上下移动以与抛光垫面接触,并保持面接触的状态完成抛光垫的修整。
- 根据权利要求1或2或3所述的抛光垫修整装置,其特征在于:所述基座单元(3)至少包括,安装座(31);接头(32),可相对安装座(31)垂直上下活动,其与连接臂(1)相连;活动连接板(33),与连接臂(1)相连,在连接臂(1)的带动下可沿安装座(31)垂直上下活动。
- 根据权利要求4所述的抛光垫修整装置,其特征在于:所述基座单元(3)还包括调节组件(34),其穿过连接臂(1)与活动连接板(33)顶面相抵,以调节连接臂(1)和活动连接板(33)之间的间隙大小,保证连接臂(1)处于水平的姿态。
- 根据权利要求5所述的抛光垫修整装置,其特征在于:所述调节组件(34)包括至少两个第一调节件(341),该第一调节件(341)沿着连接臂(1)的长度方向间隔布设,至少两个第一调节件(341)配合形成连接臂(1)和活动连接板(33)之间的第一夹角,以克服连接臂(1)长度方向上的倾斜姿态。
- 根据权利要求6所述的抛光垫修整装置,其特征在于:所述调节组件(34)包括至少两个第二调节件(342),该第二调节件(342)沿着连接臂(1)的宽度方向间隔布设,至少两个第二调节件(342)配合形成连接臂(1)和活动连接板(33)之间的第二夹角,以克服连接臂(1)宽度方向上的倾斜姿态。
- 根据权利要求7所述的抛光垫修整装置,其特征在于:所述第一调节件(341)和第二调节件(342)相互垂直布设。
- 根据权利要求7所述的抛光垫修整装置,其特征在于:所述第一调节件(341)和第二调节件(342)的总数量为六个,其分为以连接臂(1)的中心轴线对称设置的两组。
- 根据权利要求7所述的抛光垫修整装置,其特征在于:所述连接臂(1)和活动连接板(33)之间通过紧固件(35)相连,该紧固件(35)靠近所述第一调节件(341)和第二调节件(342)。
- 根据权利要求4所述的抛光垫修整装置,其特征在于:所述安装座(31)上设有垂直延伸的导向机构(311),所述活动连接板(33)沿导向机构(311)垂直上下活动。
- 根据权利要求11所述的抛光垫修整装置,其特征在于:所述导向机构 (311)和修整头单元(2)分别设于所述安装座(31)的两侧。
- 根据权利要求11所述的抛光垫修整装置,其特征在于:所述导向机构(311)的上下两端分别形成限位块(312),以限制活动连接板(33)的上下活动行程。
- 根据权利要求4所述的抛光垫修整装置,其特征在于:所述接头(32)与活动连接板(33)分体设置,或者,所述接头(32)与活动连接板(33)一体设置。
- 根据权利要求4所述的抛光垫修整装置,其特征在于:所述接头(32)在动力机构(36)的驱动下上下活动,所述接头(32)和动力机构(36)之间形成活动间隙(37);或者,所述接头(32)与动力机构(36)一体连接。
- 根据权利要求15所述的抛光垫修整装置,其特征在于:所述动力机构(36)为气缸。
- 根据权利要求4所述的抛光垫修整装置,其特征在于:所述连接臂(1)的端部形成下部开口的罩体(11),所述接头(32)、活动连接板(33)分别与罩体(11)的内顶面相连;所述罩体(11)顶面形成镂空部(111)。
- 根据权利要求1或2或3所述的抛光垫修整装置,其特征在于:所述修整头单元(2)包括驱动单元(21)和修整片(22)。
- 根据权利要求1或2或3所述的抛光垫修整装置,其特征在于:所述基座单元(3)与摆动单元(4)相连,摆动单元(4)与固定座(5)相连,该摆动单元(4)用于带动基座单元(3)、连接臂(1)和修整头单元(2)整体周向摆动。
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CN114012605B (zh) | 2022-05-17 |
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