WO2023131075A1 - 一种抛光垫修整装置 - Google Patents

一种抛光垫修整装置 Download PDF

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Publication number
WO2023131075A1
WO2023131075A1 PCT/CN2022/144028 CN2022144028W WO2023131075A1 WO 2023131075 A1 WO2023131075 A1 WO 2023131075A1 CN 2022144028 W CN2022144028 W CN 2022144028W WO 2023131075 A1 WO2023131075 A1 WO 2023131075A1
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Prior art keywords
polishing pad
connecting arm
head unit
connecting plate
movable
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PCT/CN2022/144028
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English (en)
French (fr)
Inventor
何红秀
杨渊思
周智鹏
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杭州众硅电子科技有限公司
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Publication of WO2023131075A1 publication Critical patent/WO2023131075A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Definitions

  • the invention belongs to the field of semiconductor integrated circuit chip manufacturing equipment, and in particular relates to a polishing pad dressing device.
  • CMP Chemical Mechanical Planarization
  • the wafer is polished on the surface of the rough polishing pad.
  • the surface of the polishing pad is ground and the polishing effect is lost. It is necessary to have a diamond
  • the dresser of the grinding wheel trims the surface of the polishing pad, making the surface of the polishing pad rough and frictional, so that it can continue to have the function of polishing.
  • the polishing pad dresser In order to complete the entire polishing process, the polishing pad dresser needs to have a process close to the polishing pad in the height direction.
  • the UP/Down process of the polishing pad dresser is basically realized by the principle of the lever. One end of the moment arm is used to realize the pitching of one end of the long moment arm of the lever, as shown in FIG. 1 , that is, the process of realizing the UP/Down of the dressing head of the polishing pad dresser.
  • the spatial angle ⁇ of the mechanical arm supporting the polishing pad dresser is a constantly changing process.
  • the pressure direction F2 applied to the polishing pad by the pad dresser is constantly changing, which leads to the inability to guarantee the state of the polished polishing pad in a relatively stable state, and ultimately leads to the inability to guarantee the consistency of the polished wafer on the polishing pad;
  • the ⁇ angle is not zero in most cases, and the pressure applied to the polishing pad by the polishing pad dresser is not a positive pressure in most cases, that is, the polishing pressure in different areas of the polishing pad dresser is inconsistent, and
  • the swing speed of the polishing pad dresser is limited during the working process, which leads to inconsistent dressing degrees in different areas of the polishing pad, that is, the consistency of the polishing pad shape cannot be guaranteed, which affects the consistency of the polished wafer; moreover, this The UP/
  • the present invention provides a polishing pad dressing device in which the power direction is consistent with the moving direction, so that the connecting arm carries the dressing head unit to achieve the dressing of the polishing pad in a translational manner, and the dressing pressure is more uniform.
  • a polishing pad dressing device comprising:
  • a trimming head unit located at one end of the connecting arm, is used for trimming the polishing pad
  • the base unit is arranged at the other end of the connecting arm, and is movably connected with the connecting arm, and is used to drive the connecting arm to move vertically up and down with the dressing head unit, so that the dressing head unit approaches or moves away from the polishing pad in a vertical direction.
  • the invention utilizes the base unit to drive the connecting arm to move vertically up and down, so that the dressing head unit can trim the polishing pad vertically downward, which ensures the consistency of the power direction and the moving direction, and realizes the up and down movement of the dressing head unit through translational motion , realize uniform and stable polishing pressure in the dressing process, solve the problem that the pressure applied to the polishing pad by the dressing head unit in the prior art leverage principle is constantly changing, and there is no problem of magnification of the force, ensuring the shape of the polishing pad consistency.
  • the connecting arm moves vertically up and down with the trimming head unit in a horizontal posture.
  • the dressing head unit moves vertically up and down to contact with the surface of the polishing pad, and maintain the state of surface contact to complete the dressing of the polishing pad.
  • the base unit at least includes,
  • the joint which can move up and down vertically relative to the mounting seat, is connected with the connecting arm;
  • the movable connecting plate is connected with the connecting arm and can vertically move up and down along the mounting seat driven by the connecting arm.
  • the movable connecting plate can bear the bending moment brought by the dressing head unit and the connecting arm, so as to ensure the stability of the whole structure.
  • the base unit also includes an adjustment component, which passes through the connecting arm and abuts against the top surface of the movable connecting plate to adjust the size of the gap between the connecting arm and the movable connecting plate to ensure that the connecting arm is in a horizontal posture.
  • the setting of the adjustment component can assist the adjustment to realize the horizontal attitude of the connecting arm, which can relatively reduce the machining accuracy of the parts.
  • the adjustment assembly includes at least two first adjustment parts, the first adjustment parts are arranged at intervals along the length direction of the connecting arm, and the at least two first adjustment parts cooperate to form a second gap between the connecting arm and the movable connecting plate. An included angle to overcome the tilted posture in the length direction of the connecting arm.
  • the adjustment assembly includes at least two second adjustment parts, the second adjustment parts are arranged at intervals along the width direction of the connecting arm, and the at least two second adjustment parts cooperate to form a first gap between the connecting arm and the movable connecting plate. Two included angles to overcome the tilting posture in the width direction of the connecting arm.
  • first adjusting member and the second adjusting member are arranged perpendicularly to each other.
  • the total number of the first adjusting member and the second adjusting member is six, which are divided into two groups arranged symmetrically with respect to the central axis of the connecting arm.
  • connecting arm and the movable connecting plate are connected by a fastener, and the fastener is close to the first adjusting part and the second adjusting part.
  • the mounting seat is provided with a vertically extending guide mechanism, and the movable connecting plate moves vertically up and down along the guide mechanism.
  • the guide mechanism and the trimming head unit are respectively arranged on two sides of the mounting seat.
  • the trimming head unit, joints and guide mechanism are arranged in sequence from left to right.
  • the joint is arranged between the trimming head unit and the guide mechanism.
  • the thrust of the power mechanism on the joint can overcome the self-weight of the trimming head unit to the guide mechanism to a certain extent.
  • the bending moment reduces the load of the guiding mechanism and increases the life of the guiding mechanism.
  • the upper and lower ends of the guide mechanism respectively form limit blocks to limit the up and down movable stroke of the movable connecting plate.
  • the limit block acts as a limit during the entire UP/Down movement, ensuring the safe working range of the dressing head unit.
  • the joint is set separately from the movable connection plate, or the joint is integrally set with the movable connection plate.
  • the joint moves up and down under the drive of the power mechanism, and a movable gap is formed between the joint and the power mechanism;
  • the joint is integrally connected with the power mechanism.
  • the existence of the movable gap can form a protective effect between the joint and the power mechanism, and increase the flexibility of the two; the integral connection of the joint and the power mechanism makes the overall structure simpler.
  • the power mechanism is a cylinder.
  • the end of the connecting arm forms a cover body with an open bottom, and the joint and the movable connecting plate are respectively connected with the inner top surface of the cover body; the top surface of the cover body forms a hollow part.
  • the trimming head unit includes a driving unit and a trimming sheet.
  • the base unit is connected with the swing unit, and the swing unit is connected with the fixed seat, and the swing unit is used to drive the base unit, the connecting arm and the dressing head unit to swing in a circumferential direction as a whole.
  • the beneficial effects of the present invention are: 1) Compared with the original rotating UP/Down structure, the translational UP/Down structure can stably realize uniform and stable positive pressure in the trimming process, ensuring the consistency of the polishing trimming process; 2) Compared with The original rotating UP/Down structure, the translational UP/Down structure is not a motion amplification mechanism, which can effectively reduce the impact of the dressing head unit on the polishing pad during the movement to the polishing pad; 3) Compared with the original rotating UP/Down structure, In terms of the position error of the hard limit structure, the translational UP/Down structure has no amplification effect, and it is easier to ensure the consistency of the status of the dressing head unit.
  • FIG. 1 is a schematic diagram of the mechanism of action in the prior art. At this time, the dressing head unit moves up and down with A as the fulcrum.
  • Fig. 2 is a schematic diagram of the action mechanism of the present invention, at this moment, the trimming head unit moves up and down.
  • Fig. 3 is a structural schematic diagram of the present invention.
  • FIG. 4 is a first perspective view of the base unit of the present invention.
  • FIG. 5 is a second perspective view of the base unit of the present invention.
  • Fig. 6 is a partial perspective view of the base unit of the present invention.
  • Fig. 7 is a top view of the base unit of the present invention.
  • Fig. 8 is a schematic diagram of the working principle of the first adjusting member of the present invention.
  • Fig. 9 is a top view of the present invention.
  • Fig. 10 is a D-D sectional view in Fig. 9 .
  • a kind of polishing pad finishing device comprises the connecting arm 1 that extends horizontally, is arranged on one end of connecting arm 1, is used for finishing the finishing head unit 2 of polishing pad, and is arranged on connecting arm 1
  • the base unit 2 at the other end, the base unit 2 is movably connected with the connecting arm 1, and is used to drive the connecting arm 1 to move vertically up and down with the trimming head unit 2, so that the trimming head unit 2 moves along the direction of the polishing pad tending to be vertical.
  • the direction approaches or moves away from the polishing pad of course, it can also be said to approach or move away from the polishing pad along the direction perpendicular to the polishing pad.
  • the above-mentioned dressing head unit 2 is not only in contact with the surface of the polishing pad during the process of moving up and down to contact the polishing pad, but also in the state of surface contact during the whole dressing process after contact, that is, the polishing pad is completed in a state where the dressing head unit and the polishing pad maintain surface contact. trimming.
  • the connecting arm 1 moves vertically up and down with the trimming head unit 2 in a horizontal posture, that is, the connecting arm 1 does not tilt during the up and down movement.
  • the base unit 3 includes a mounting base 31 , a joint 32 , a movable connecting plate 33 , and an adjustment component 34 .
  • the mounting seat 31 is relatively fixed, and it is responsible for the installation and fixing of other parts. It is composed of one-piece parts, which can avoid installation errors caused by the installation process of multi-body parts, and ensure the accuracy requirements of the dressing head unit 2 during work.
  • the joint 32 is fixedly connected to the connecting arm 1 by bolts, and can move vertically up and down relative to the mounting seat 31, that is, the joint 21 moves vertically up and down with the connecting arm 1;
  • the joint 32 moves up and down under the drive of the power mechanism 36, and a movable gap 37 is formed between the joint 32 and the power mechanism 36.
  • a movable gap 37 is formed between the joint 32 and the power mechanism 36.
  • the power mechanism 36 is an air cylinder, which is installed vertically to realize the vertical translation of the joint 32 up and down.
  • the joint 32 and the power mechanism 36 can also be provided as an integral structure.
  • the movable connecting plate 33 is connected with the connecting arm 1, specifically the movable connecting plate 33 is connected under the connecting arm 1, and it can move vertically up and down along the mounting seat 31 under the drive of the connecting arm 1;
  • the movable connecting plate 33 can be arranged separately from the joint 32, or both can be connected as an integral structure;
  • a vertically extending guiding mechanism 311 is provided on the mounting base 31 , and the movable connecting plate 33 moves vertically up and down along the guiding mechanism 311 .
  • limit blocks 312 are respectively formed at the upper and lower ends of the guiding mechanism 311 , so as to limit the moving stroke of the movable connecting plate 33 up and down.
  • the guide mechanism 311 adopts a structure of double guide rails and four sliders arranged in parallel to ensure stability and strength.
  • the guide mechanism 311 and the trimming head unit 2 are respectively arranged on both sides of the mounting base 31 , that is, the trimming head unit 2 , the joint 32 and the guide mechanism 311 are arranged sequentially from left to right.
  • the adjustment assembly 34 passes through the connecting arm 1 and abuts against the top surface of the movable connecting plate 33, thereby adjusting the size of the gap between the connecting arm 1 and the movable connecting plate 33 to ensure that the connecting arm 1 is always in a horizontal posture.
  • the connecting arm 1 can always be in a horizontal posture, and the adjustment assembly 34 can also be omitted at this time.
  • the adjustment assembly 34 includes at least two first adjustment members 341, which are arranged at intervals along the length direction of the connecting arm 1, and the first adjustment members 341 are preferably is located in the direction of the central axis of the connecting arm 1 . Therefore, at least two first adjusting members 341 cooperate to form a first angle between the connecting arm 1 and the movable connecting plate 33 , so as to overcome the inclined posture of the connecting arm 1 in the length direction.
  • the ⁇ angle shown in Figure 8 is the above-mentioned first included angle. Taking the direction shown in Figure 2 as an example for illustration, under the action of the connecting arm 1's own weight, it has a tendency to rotate counterclockwise.
  • the member 341 rotates downward to abut against the top surface of the movable connecting plate 33, so that the right end of the connecting arm 1 lifts its left end relatively upwards, so as to overcome the inclination caused by the self-weight of the connecting arm 1, that is, to overcome the inclination of the connecting arm 1 in the length direction.
  • the inclined posture ensures the horizontal posture of the connecting arm 1 axis.
  • the adjustment assembly 34 also includes at least two second adjustment members 342, the second adjustment members 342 are arranged at intervals along the width direction of the connecting arm 1, and the second adjustment members 342 are preferably located on a horizontal line in the width direction of the connection arm 1 , so that at least two second adjusting parts 342 cooperate to form a second angle between the connecting arm 1 and the movable connecting plate 33, thereby overcoming the inclined posture of the connecting arm 1 in the width direction.
  • the specific principle is the same as that in the length direction, and will not be repeated .
  • the first adjusting member 341 and the second adjusting member 342 are arranged perpendicular to each other, that is, all the first adjusting members 341
  • the central line connecting the centers of all the second adjusting members 342 is connected, and the two connecting lines are perpendicular to each other.
  • the total number of the first adjusting member 341 and the second adjusting member 342 is six, which are divided into two groups arranged symmetrically with the central axis of the connecting arm 1, and each group is three At this time, there is no clear boundary between the first adjusting part 341 and the second adjusting part 342, and part of the adjusting parts can be used as the first adjusting part 341 for adjusting the posture in the length direction, and can also be used as the second adjusting part 342 for adjusting the posture in the width direction use.
  • the connecting arm 1 and the movable connecting plate 33 are connected by a fastener 35, and the fastener 35 is arranged close to the above-mentioned first adjustment member 341 and the second adjustment member 342.
  • the number of fasteners 35 There are four, arranged on the periphery of the adjustment assembly 34 . During specific assembly, the adjustment component 34 can be assembled first, and then the fastener 35 can be assembled.
  • connecting arm 1 forms the cover body 11 of lower opening, and joint 32, movable connecting plate 33 are connected with the inner top surface of cover body 11 respectively, thereby joint 32, movable connecting plate 33, mounting seat 31, power mechanism 36, guide
  • the mechanisms 311 are all housed in the cover body 11 ; a hollow portion 111 is formed on the top surface of the cover body 11 to reduce the weight of the connecting arm 1 .
  • the trimming head unit 2 is the executive mechanism of the trimming process, which includes a drive unit 21 and a trimming piece 22, the trimming piece 22 moves vertically up and down under the drive of the driving unit 21, and is realized by the trimming piece 22 rotation. Conditioning of polishing pads.
  • the base unit 3 is connected with the swing unit 4, and the swing unit 4 is connected with the fixed seat 5, and the swing unit 4 is used to drive the base unit 3, the connecting arm 1 and the trimming head unit 2 to swing in a whole circumferential direction, To achieve the dressing of the polishing pad everywhere.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

本发明公开了一种抛光垫修整装置，包括：连接臂，水平延伸；修整头单元，设于连接臂的一端，用于修整抛光垫；基座单元，设于连接臂的另一端，与连接臂活动连接，用于驱动连接臂带着修整头单元垂直上下移动，以使得修整头单元沿趋于垂直的方向靠近或远离抛光垫。本发明可以稳定实现修整过程中的均匀稳定的正压力，保证了抛光修整过程的一致性；不是一个运动放大机构，可以有效减轻修整头单元在运动至抛光垫过程中对抛光垫的冲击作用；无放大作用，更容易保证修整头单元工位状态的一致性。

Description

一种抛光垫修整装置 技术领域
本发明属于半导体集成电路芯片制造设备领域，尤其是涉及一种抛光垫修整装置。
背景技术
化学机械抛光平坦化(Chemical Mechanical Planarization,CMP)设备中晶圆在粗糙的抛光垫表面抛光晶圆，随着抛光时间的延长，抛光垫表面被磨平，失去抛光的效果，需要有带有金刚石砂轮盘的修整器对抛光垫表面修整，使抛光垫表面粗糙有摩擦力，使之继续拥有抛光的功能。
为了完成整个抛光过程，抛光垫修整器需要有一个在高度方向上接近抛光垫的过程，目前抛光垫修整器的这种UP/Down的过程基本通过杠杆的原理实现，动力装置通过控制杠杆的短力臂一端来实现杠杆的长力臂一端的俯仰，如图1所示，即实现抛光垫修整器修整头UP/Down的过程。
此种方式有几个缺陷：首先，在抛光垫磨损的过程中，由于抛光垫高度的变化，支撑抛光垫修整器的机械臂的空间角度α是一个不断变化的过程，换而言之，抛光垫修整器施加给抛光垫的压力方向F2在不断变化，这就导致修整后的抛光垫状态无法保证在一个相对稳定的状态，最终导致在抛光垫上完成抛光的晶圆也就无法保证一致性；其次，由于杠杆原理本身的特性，α角大多数情况下不为零，抛光垫修整器给抛光垫的压力大多情况下并不为正压力，即抛光垫修整器不 同区域的抛光压力不一致，而抛光垫修整器工作过程中的摆动速度有限，这就导致了抛光垫不同区域的修整程度不一致，即无法保证抛光垫形貌的一致性，影响完成抛光的晶圆的一致性；再者，此杠杆原理的UP/Down实现方式实际上是一个运动放大机构，将动力装置的位移放大以实现抛光垫修整器头部的运动，但同时也大大降低了抛光垫修整器的空间位置稳定性，容易把动力装置的波动加倍放大然后传递到抛光垫修整器的修整头上，带来的结果就是在抛光垫修整器接近抛光垫的过程中的运动冲击被放大，加大抛光垫被冲击损伤的可能；最后，抛光垫修整器在UP/Down运动过程中存在UP/Down的极限位置，需要设定硬限位，而硬限位在加工、安装、调试过程中的误差都会被杠杆机构放大，从而无法保证不同工位上抛光垫修整器的一致性。
发明内容
为了克服现有技术的不足，本发明提供一种动力方向和运动方向一致，使得连接臂带着修整头单元以平动的方式实现抛光垫的修整，修整压力更加均匀的抛光垫修整装置。
本发明解决其技术问题所采用的技术方案是：一种抛光垫修整装置，包括：
连接臂，水平延伸；
修整头单元，设于连接臂的一端，用于修整抛光垫；
基座单元，设于连接臂的另一端，与连接臂活动连接，用于驱动连接臂带着修整头单元垂直上下移动，以使得修整头单元沿趋于垂直的方向靠近或远离抛光垫。
本发明利用基座单元驱动连接臂垂直上下移动，以使得修整头单元垂直向下对抛光垫进行修整，保证了动力方向和运动方向的一致性，通过平动的方式实现修整头单元的上下运动，实现修整过程中均匀的、稳定的抛光压力，解决了现有技术杠杆原理存在的修整头单元施加给抛光垫的压力不断变化的问题，也没有作用力的放大问题，保证抛光垫形貌的一致性。
进一步的，所述连接臂以水平的姿态带着修整头单元垂直上下移动。
进一步的，所述修整头单元垂直上下移动以与抛光垫面接触，并保持面接触的状态完成抛光垫的修整。
进一步的，所述基座单元至少包括，
安装座；
接头，可相对安装座垂直上下活动，其与连接臂相连；
活动连接板，与连接臂相连，在连接臂的带动下可沿安装座垂直上下活动。
活动连接板可以承受修整头单元与连接臂带来的弯矩，保证整个结构的稳定性。
进一步的，所述基座单元还包括调节组件，其穿过连接臂与活动连接板顶面相抵，以调节连接臂和活动连接板之间的间隙大小，保证连接臂处于水平的姿态。调节组件的设置可以辅助调节实现连接臂的水平姿态，可以相对降低零部件的加工精度。
进一步的，所述调节组件包括至少两个第一调节件，该第一调节 件沿着连接臂的长度方向间隔布设，至少两个第一调节件配合形成连接臂和活动连接板之间的第一夹角，以克服连接臂长度方向上的倾斜姿态。
进一步的，所述调节组件包括至少两个第二调节件，该第二调节件沿着连接臂的宽度方向间隔布设，至少两个第二调节件配合形成连接臂和活动连接板之间的第二夹角，以克服连接臂宽度方向上的倾斜姿态。
进一步的，所述第一调节件和第二调节件相互垂直布设。
进一步的，所述第一调节件和第二调节件的总数量为六个，其分为以连接臂的中心轴线对称设置的两组。
进一步的，所述连接臂和活动连接板之间通过紧固件相连，该紧固件靠近所述第一调节件和第二调节件。
进一步的，所述安装座上设有垂直延伸的导向机构，所述活动连接板沿导向机构垂直上下活动。
进一步的，所述导向机构和修整头单元分别设于所述安装座的两侧。修整头单元、接头和导向机构从左往右依次布设，接头设置在修整头单元和导向机构之间，在工作过程中，动力机构对接头的推力可以一定程度上克服修整头单元自重对导向机构的弯矩，减小导向机构的负荷，增加导向机构的寿命。
进一步的，所述导向机构的上下两端分别形成限位块，以限制活动连接板的上下活动行程。限位块在整个UP/Down运动过程中起限位作用，保证修整头单元的安全工作范围。
进一步的，所述接头与活动连接板分体设置，或者，所述接头与活动连接板一体设置。
进一步的，所述接头在动力机构的驱动下上下活动，所述接头和动力机构之间形成活动间隙；
或者，所述接头与动力机构一体连接。
活动间隙的存在可以对接头和动力机构之间形成保护作用，增加两者的灵活性；接头和动力机构一体连接则使得整体结构更加简单。
进一步的，所述动力机构为气缸。
进一步的，所述连接臂的端部形成下部开口的罩体，所述接头、活动连接板分别与罩体的内顶面相连；所述罩体顶面形成镂空部。
进一步的，所述修整头单元包括驱动单元和修整片。
进一步的，所述基座单元与摆动单元相连，摆动单元与固定座相连，该摆动单元用于带动基座单元、连接臂和修整头单元整体周向摆动。
本发明的有益效果是，1)相对于原转动UP/Down结构，平动UP/Down结构可以稳定实现修整过程中的均匀稳定的正压力，保证了抛光修整过程的一致性；2)相对于原转动UP/Down结构，平动UP/Down结构不是一个运动放大机构，可以有效减轻修整头单元在运动至抛光垫过程中对抛光垫的冲击作用；3)相对于原转动UP/Down结构，在硬限位结构位置误差上，平动UP/Down结构无放大作用，更容易保证修整头单元工位状态的一致性。
附图说明
图1为现有技术的作用机制示意图，此时修整头单元以A为支点实现上下运动。
图2为本发明的作用机制示意图，此时修整头单元上下平移。
图3为本发明的结构示意图。
图4为本发明的基座单元的立体图一。
图5为本发明的基座单元的立体图二。
图6为本发明的基座单元局部透视图。
图7为本发明的基座单元的俯视图。
图8为本发明的第一调节件工作原理示意图。
图9为本发明的俯视图。
图10为图9中的D-D剖视图。
具体实施方式
为了使本技术领域的人员更好的理解本发明方案，下面将结合本发明实施例中的附图，对发明实施例中的技术方案进行清楚、完整的描述，显然，所描述的实施例仅仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都应当属于本发明保护的范围。
如图2-图3所示，一种抛光垫修整装置，包括水平延伸的连接臂1，设置在连接臂1的一端、用于修整抛光垫的修整头单元2，及设置在连接臂1的另一端的基座单元2，该基座单元2与连接臂1活动连接，用于驱动连接臂1带着修整头单元2垂直上下移动，以使得修 整头单元2沿着趋于垂直抛光垫的方向靠近或远离抛光垫，当然也可以说是沿着垂直抛光垫的方向靠近或远离抛光垫。上述修整头单元2不仅在上下移动接触抛光垫的过程与抛光垫面接触，而且在接触后的整个修整过程也是以面接触的状态，即修整头单元与抛光垫保持面接触的状态完成抛光垫的修整。
而且连接臂1是以水平的姿态带着修整头单元2垂直上下移动，即上下移动的过程连接臂1不会发生倾斜。
如图4、图5所示，基座单元3包括安装座31，接头32，活动连接板33，及调节组件34。
安装座31相对固定，其负责其他零件的安装固定，为一体式零件构成，可避免多体零件安装过程中带来的安装误差，保证修整头单元2工作过程中的精度需求。
接头32与连接臂1通过螺栓固定连接，且可以相对安装座31垂直上下活动，即接头21带着连接臂1垂直上下活动；
接头32在动力机构36的驱动下上下活动，接头32和动力机构36之间形成活动间隙37，如图5所示，上述活动间隙37包括横向活动的间隙，包括竖直方向活动的间隙，也包括周向旋转活动的间隙。在本实施例中，动力机构36选用气缸，其垂直安装以实现接头32的垂直上下平移。当然，接头32和动力机构36也可以设置为一体结构。
活动连接板33与连接臂1相连，具体是活动连接板33连接在连接臂1的下方，其在连接臂1的带动下可以沿着安装座31垂直上下活动；
活动连接板33可以是与接头32分体设置，也可以是两者连接为一体结构；
为了保证活动连接板33的垂直上下平移，在安装座31上设置有垂直延伸的导向机构311，活动连接板33沿着该导向机构311垂直上下活动。为了防止活动连接板33脱离导向机构311，在导向机构311的上下两端分别形成限位块312，从而可以限制活动连接板33的上下活动行程。在本实施例中，导向机构311采用平行设置的双导轨四滑块结构，保证稳定性和强度。
而且导向机构311和修整头单元2分别设置在安装座31的两侧，即修整头单元2、接头32和导向机构311从左往右依次布设。
调节组件34穿过连接臂1与活动连接板33顶面相抵，从而调节连接臂1和活动连接板33之间的间隙大小，保证连接臂1一直是处于水平的姿态。当然在理想状态下，保证各个工件的加工精度的前提下，连接臂1也能一直处于水平的姿态，此时调节组件34也可以省略。
具体的，如图6、图7所示，调节组件34包括至少两个第一调节件341，该第一调节件341沿着连接臂1的长度方向间隔布设，而且第一调节件341最好是位于连接臂1的中心轴线方向上。从而至少两个第一调节件341配合形成连接臂1和活动连接板33之间的第一夹角，从而克服连接臂1长度方向上的倾斜姿态。如图8所示的β角即为上述的第一夹角，以图2所示方向为例进行说明，在连接臂1的自重作用下，其有逆时针旋转的趋势，通过将第一调节件341向下旋 转抵接活动连接板33的顶面，使得连接臂1的右端将其左端相对向上翘起，以克服连接臂1的自重带来的倾斜，即克服连接臂1长度方向上的倾斜姿态，保证连接臂1轴向的水平姿态。
调节组件34还包括至少两个第二调节件342，该第二调节件342沿着连接臂1的宽度方向间隔布设，而且第二调节件342最好是位于连接臂1宽度方向的一条水平线上，从而至少两个第二调节件342配合形成连接臂1和活动连接板33之间的第二夹角，从而克服连接臂1宽度方向上的倾斜姿态，具体原理与长度方向相同，不再赘述。
为了方便调节，也为了第一调节件341和第二调节件342配合使得连接臂1达到一个水平的姿态，第一调节件341和第二调节件342相互垂直布设，即将所有第一调节件341的中心连线，将所有第二调节件342的中心连线，两个连线相互垂直。
在本实施例中，如图7所示，第一调节件341和第二调节件342的总数量为六个，其分为以连接臂1的中心轴线对称设置的两组，每组三个，此时第一调节件341和第二调节件342没有明确的分界，部分调节件既可以作为调整长度方向姿态的第一调节件341用，也可以作为调整宽度方向姿态的第二调节件342用。
连接臂1和活动连接板33之间通过紧固件35相连，该紧固件35靠近上述的第一调节件341和第二调节件342设置，在本实施例中，紧固件35的数量为四个，布设在调节组件34的外围。具体装配时可以先装配调节组件34，再装配紧固件35。
连接臂1的端部形成下部开口的罩体11，接头32、活动连接板 33分别与罩体11的内顶面相连，从而接头32、活动连接板33、安装座31、动力机构36、导向机构311都被罩设在罩体11内；在罩体11的顶面形成镂空部111，以减轻连接臂1的重量。
如图9、图10所示，修整头单元2为修整过程的执行机构，其包括驱动单元21和修整片22，修整片22在驱动单元21的驱动下垂直上下活动，通过修整片22自转实现抛光垫的修整。
如图3所示，基座单元3与摆动单元4相连，摆动单元4与固定座5相连，该摆动单元4用于带动基座单元3、连接臂1和修整头单元2整体周向摆动，以实现抛光垫各处的修整。
上述具体实施方式用来解释说明本发明，而不是对本发明进行限制，在本发明的精神和权利要求的保护范围内，对本发明作出的任何修改和改变，都落入本发明的保护范围。

Claims (19)

  1. 一种抛光垫修整装置，其特征在于，包括：
    连接臂(1)，水平延伸；
    修整头单元(2)，设于连接臂(1)的一端，用于修整抛光垫；
    基座单元(3)，设于连接臂(1)的另一端，与连接臂(1)活动连接，用于驱动连接臂(1)带着修整头单元(2)垂直上下移动，以使得修整头单元(2)沿趋于垂直的方向靠近或远离抛光垫。
  2. 根据权利要求1所述的抛光垫修整装置，其特征在于：所述连接臂(1)以水平的姿态带着修整头单元(2)垂直上下移动。
  3. 根据权利要求1所述的抛光垫修整装置，其特征在于：所述修整头单元(2)垂直上下移动以与抛光垫面接触，并保持面接触的状态完成抛光垫的修整。
  4. 根据权利要求1或2或3所述的抛光垫修整装置，其特征在于：所述基座单元(3)至少包括，
    安装座(31)；
    接头(32)，可相对安装座(31)垂直上下活动，其与连接臂(1)相连；
    活动连接板(33)，与连接臂(1)相连，在连接臂(1)的带动下可沿安装座(31)垂直上下活动。
  5. 根据权利要求4所述的抛光垫修整装置，其特征在于：所述基座单元(3)还包括调节组件(34)，其穿过连接臂(1)与活动连接板(33)顶面相抵，以调节连接臂(1)和活动连接板(33)之间的间隙大小，保证连接臂(1)处于水平的姿态。
  6. 根据权利要求5所述的抛光垫修整装置，其特征在于：所述调节组件(34)包括至少两个第一调节件(341)，该第一调节件(341)沿着连接臂(1)的长度方向间隔布设，至少两个第一调节件(341)配合形成连接臂(1)和活动连接板(33)之间的第一夹角，以克服连接臂(1)长度方向上的倾斜姿态。
  7. 根据权利要求6所述的抛光垫修整装置，其特征在于：所述调节组件(34)包括至少两个第二调节件(342)，该第二调节件(342)沿着连接臂(1)的宽度方向间隔布设，至少两个第二调节件(342)配合形成连接臂(1)和活动连接板(33)之间的第二夹角，以克服连接臂(1)宽度方向上的倾斜姿态。
  8. 根据权利要求7所述的抛光垫修整装置，其特征在于：所述第一调节件(341)和第二调节件(342)相互垂直布设。
  9. 根据权利要求7所述的抛光垫修整装置，其特征在于：所述第一调节件(341)和第二调节件(342)的总数量为六个，其分为以连接臂(1)的中心轴线对称设置的两组。
  10. 根据权利要求7所述的抛光垫修整装置，其特征在于：所述连接臂(1)和活动连接板(33)之间通过紧固件(35)相连，该紧固件(35)靠近所述第一调节件(341)和第二调节件(342)。
  11. 根据权利要求4所述的抛光垫修整装置，其特征在于：所述安装座(31)上设有垂直延伸的导向机构(311)，所述活动连接板(33)沿导向机构(311)垂直上下活动。
  12. 根据权利要求11所述的抛光垫修整装置，其特征在于：所述导向机构 (311)和修整头单元(2)分别设于所述安装座(31)的两侧。
  13. 根据权利要求11所述的抛光垫修整装置，其特征在于：所述导向机构(311)的上下两端分别形成限位块(312)，以限制活动连接板(33)的上下活动行程。
  14. 根据权利要求4所述的抛光垫修整装置，其特征在于：所述接头(32)与活动连接板(33)分体设置，或者，所述接头(32)与活动连接板(33)一体设置。
  15. 根据权利要求4所述的抛光垫修整装置，其特征在于：所述接头(32)在动力机构(36)的驱动下上下活动，所述接头(32)和动力机构(36)之间形成活动间隙(37)；
    或者，所述接头(32)与动力机构(36)一体连接。
  16. 根据权利要求15所述的抛光垫修整装置，其特征在于：所述动力机构(36)为气缸。
  17. 根据权利要求4所述的抛光垫修整装置，其特征在于：所述连接臂(1)的端部形成下部开口的罩体(11)，所述接头(32)、活动连接板(33)分别与罩体(11)的内顶面相连；所述罩体(11)顶面形成镂空部(111)。
  18. 根据权利要求1或2或3所述的抛光垫修整装置，其特征在于：所述修整头单元(2)包括驱动单元(21)和修整片(22)。
  19. 根据权利要求1或2或3所述的抛光垫修整装置，其特征在于：所述基座单元(3)与摆动单元(4)相连，摆动单元(4)与固定座(5)相连，该摆动单元(4)用于带动基座单元(3)、连接臂(1)和修整头单元(2)整体周向摆动。
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CN114012605A (zh) * 2022-01-05 2022-02-08 杭州众硅电子科技有限公司 一种抛光垫修整装置

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