WO2023127526A1 - フィルタ - Google Patents

フィルタ Download PDF

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Publication number
WO2023127526A1
WO2023127526A1 PCT/JP2022/046220 JP2022046220W WO2023127526A1 WO 2023127526 A1 WO2023127526 A1 WO 2023127526A1 JP 2022046220 W JP2022046220 W JP 2022046220W WO 2023127526 A1 WO2023127526 A1 WO 2023127526A1
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WO
WIPO (PCT)
Prior art keywords
filter
protrusion
holes
convex portion
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2022/046220
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
優 萬壽
孝志 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to GB2309533.4A priority Critical patent/GB2617008B/en
Priority to JP2023525487A priority patent/JP7343079B1/ja
Priority to US18/334,772 priority patent/US20230321564A1/en
Publication of WO2023127526A1 publication Critical patent/WO2023127526A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • B01D29/05—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements supported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/10—Filter screens essentially made of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M1/00—Apparatus for enzymology or microbiology
    • C12M1/12—Apparatus for enzymology or microbiology with sterilisation, filtration or dialysis means

Definitions

  • the present invention relates to filters.
  • Patent Document 1 discloses a cell-trapping metal filter as a filter for trapping cells.
  • An object of the present invention is to provide a filter that can improve convenience.
  • a filter of one aspect of the present invention comprises a filter base portion having a first main surface and a second main surface opposite to the first main surface, and provided with a plurality of through holes communicating between the first main surface and the second main surface; prepared,
  • the filter base includes elastically deformable first and second protrusions provided between two adjacent through holes, A gap is provided between the first protrusion and the second protrusion to communicate with the two adjacent through holes.
  • FIG. 1 is a schematic diagram of an example of a filter according to Embodiment 1 of the present invention, viewed from the second main surface side;
  • FIG. 3 is an enlarged schematic diagram of a portion of the filter section;
  • It is a schematic diagram for demonstrating operation
  • It is a schematic diagram for demonstrating operation
  • It is a figure which shows an example of the manufacturing process of the filter of Embodiment 1 which concerns on this invention.
  • FIG. 1 It is a figure which shows an example of the manufacturing process of the filter of Embodiment 1 which concerns on this invention. It is a figure which shows an example of the manufacturing process of the filter of Embodiment 1 which concerns on this invention. It is a figure which shows an example of the manufacturing process of the filter of Embodiment 1 which concerns on this invention. It is a figure which shows an example of the manufacturing process of the filter of Embodiment 1 which concerns on this invention. It is a figure which shows an example of the manufacturing process of the filter of Embodiment 1 which concerns on this invention. It is a figure which shows an example of the manufacturing process of the filter of Embodiment 1 which concerns on this invention. FIG.
  • a filter provided with a plurality of through holes such as the mesh member described in Patent Document 1, is known.
  • the shape and size of the plurality of through holes are uniform.
  • the present inventors found a configuration of a filter that can filter objects of different sizes with one filter, resulting in the following invention.
  • a filter according to one aspect of the present invention has a first main surface and a second main surface opposite to the first main surface, and a plurality of through-holes communicating between the first main surface and the second main surface.
  • a filter base portion provided with a hole, the filter base portion including an elastically deformable first convex portion and a second convex portion provided between two adjacent through holes;
  • a gap that communicates with the two adjacent through holes is provided between the portion and the second convex portion.
  • the filter base portion includes a plurality of first base portions extending in a first direction and arranged in parallel with each other, and a plurality of second base portions extending in a second direction intersecting the first direction and arranged in parallel with each other. 2 base portions, wherein the plurality of through holes are defined by the plurality of first base portions and the plurality of second base portions, and the first protrusions and the second protrusions are defined by the plurality of It may constitute a part of the first base portion.
  • the first protrusion and the second protrusion extend along the first direction between the two adjacent through-holes, and the end of the first protrusion extends from the second protrusion. It may face the end.
  • the filter base portion includes a third convex portion and a fourth convex portion provided between two adjacent through holes, and between the third convex portion and the fourth convex portion, the adjacent A gap may be provided to communicate with two matching through-holes, and the third protrusion and the fourth protrusion may form part of the plurality of second base portions.
  • the third protrusion and the fourth protrusion may be provided between a through hole defined by the first protrusion and the second protrusion and an adjacent through hole.
  • the plurality of first base portions are arranged at equal intervals, the plurality of second base portions are arranged at equal intervals, and the plurality of second base portions are perpendicular to the plurality of first base portions. good too.
  • Such a configuration can improve the mechanical strength of the filter, make it easier to elastically deform, and improve convenience.
  • the plurality of through holes When viewed from the first main surface side, the plurality of through holes have a square shape, and the size of the gap is 0.25 times or less of one side defining the through hole on the side communicating with the gap. There may be.
  • the plurality of through holes may have a circular shape, and the size of the gap may be 0.25 times or less the diameter of the through hole communicating with the gap. .
  • the length of the first protrusion may be 0.8 times or more and 1.2 times or less of the length of the second protrusion.
  • the elastic deformation of the first convex portion and the second convex portion becomes approximately the same, making it easy to adjust the size of the gap.
  • the length of the first protrusion may be longer than the length of the second protrusion.
  • FIG. 1 is a schematic diagram of an example of a filter 1 according to Embodiment 1 of the present invention, viewed from the first main surface PS1 side.
  • FIG. 2 is a schematic diagram of an example of the filter 1 according to Embodiment 1 of the present invention, viewed from the second main surface PS2 side.
  • the X, Y, and Z directions indicate the vertical direction, horizontal direction, and thickness direction of the filter 1, respectively.
  • the filter 1 is a filter that filters fluid containing an object to be filtered.
  • the term "object to be filtered” means an object to be filtered among the objects contained in the fluid.
  • the object to be filtered may be biological material contained in the fluid.
  • a “biological substance” means a substance derived from living organisms such as cells (eukaryotes), bacteria (eubacteria), and viruses.
  • Cells include, for example, induced pluripotent stem cells (iPS cells), ES cells, stem cells, mesenchymal stem cells, mononuclear cells, single cells, cell aggregates, planktonic cells, adherent cells, nerves Cells, white blood cells, regenerative medicine cells, autologous cells, cancer cells, circulating cancer cells (CTC), HL-60, HELA, fungi.
  • Bacteria include, for example, Escherichia coli and Mycobacterium tuberculosis.
  • Fluids include, for example, liquids and gases.
  • Liquids include, for example, electrolyte solutions, cell suspensions, cell culture media, and the like.
  • the filter 1 is a metal filter.
  • a material constituting the filter 1 is mainly composed of at least one of metal and metal oxide.
  • Materials constituting the filter 1 may be, for example, gold, silver, copper, platinum, nickel, palladium, titanium, alloys thereof, and oxides thereof. In particular, by using titanium or a nickel-palladium alloy, it is possible to reduce the elution of metals and reduce the influence on the objects to be filtered.
  • the filter 1 has a filter portion 10 and a frame portion 20 provided on the outer periphery of the filter portion 10 .
  • the filter 1 also has a first principal surface PS1 and a second principal surface PS2 opposite to the first principal surface PS1.
  • the filter portion 10 and the frame portion 20 are integrally formed.
  • the filter part 10 is a part that filters a fluid containing an object to be filtered.
  • the filter portion 10 is composed of a filter base portion 12 provided with a plurality of through-holes 11 communicating between the first principal surface PS1 and the second principal surface PS2. Further, in the filter portion 10 , a plurality of support portions 13 are arranged on the second main surface PS ⁇ b>2 of the filter base portion 12 .
  • the shape of the filter portion 10 is, for example, circular, polygonal, or elliptical when viewed from the thickness direction (Z direction) of the filter 1 .
  • the shape of the filter part 10 is substantially circular.
  • substantially circular means that the ratio of the length of the major axis to the length of the minor axis is 1.0 or more and 1.2 or less.
  • the frame portion 20 is provided on the outer periphery of the filter portion 10 and has a smaller number of through holes 11 per unit area than the filter portion 10 .
  • the number of through-holes 11 in frame portion 20 is 1% or less of the number of through-holes 11 in filter portion 10 .
  • the thickness of the frame portion 20 may be thicker than the thickness of the filter portion 10 . With such a configuration, the mechanical strength of the filter 1 can be enhanced.
  • the frame portion 20 may function as a connecting portion that connects the filter 1 and the device.
  • Information about the filter 1 may also be displayed on the frame portion 20. FIG.
  • the frame portion 20 is formed in a ring shape when viewed from the first main surface PS1 side of the filter portion 10 .
  • the center of the frame portion 20 coincides with the center of the filter portion 10 when the filter 1 is viewed from the first main surface PS1 side. That is, the frame portion 20 is formed concentrically with the filter 1 .
  • the filter unit 10 will be described in detail below.
  • FIG. 3 is an enlarged schematic diagram of part of the filter unit 10.
  • FIG. FIG. 3 is an enlarged view of a portion of the filter base portion 12 provided with the plurality of through holes 11, and is a view viewed from the first main surface PS1 side of the filter 1. As shown in FIG.
  • the plurality of through holes 11 are periodically arranged on the first main surface PS1 and the second main surface PS2 of the filter section 10 . Specifically, the plurality of through holes 11 are provided in a matrix at regular intervals in the filter section 10 .
  • the plurality of through holes 11 are arranged in two directions parallel to each side of the square when viewed from the first main surface PS1 side (Z direction) of the filter section 10, that is, the X direction in FIG. It is provided along the Y direction.
  • the arrangement of the plurality of through-holes 11 is not limited to the square lattice arrangement, and may be, for example, a quasi-periodic arrangement or a periodic arrangement.
  • periodic arrays include rectangular arrays with unequal intervals in two array directions, triangular lattice arrays, regular triangular lattice arrays, and the like, as long as they are square arrays.
  • a plurality of through-holes 11 may be provided in the filter section 10, and the arrangement is not limited.
  • the interval b between the through-holes 11 is appropriately designed according to the filtering object to be separated.
  • the interval b between the through-holes 11 is appropriately designed according to the type (size, shape, property, elasticity) or amount of the cell.
  • the interval b between the through-holes 11 is the distance between the through-holes 11 adjacent to the center of any through-hole 11 when the through-holes 11 are viewed from the first main surface PS1 side of the filter portion 10 .
  • through hole 11 is square when viewed from the first main surface PS1 side.
  • the center of the through hole 11 is the intersection point where two diagonal lines intersect.
  • the interval b of the through holes 11 is, for example, more than 1 time and 10 times or less the side a of the through holes 11, preferably 3 times or less the side a of the through holes 11.
  • the aperture ratio of the filter section 10 is 10% or more, preferably 25% or more.
  • the through hole 11 communicates with the opening on the side of the first main surface PS1 and the opening on the side of the second main surface PS2 through a continuous wall surface.
  • the through hole 11 is provided so that the opening on the first main surface PS1 side can be projected onto the opening on the second main surface PS2 side. That is, when the filter portion 10 is viewed from the second main surface PS2 side, the through hole 11 is provided so that the opening on the second main surface PS2 side overlaps with the opening on the first main surface PS1 side.
  • the inner wall defining through hole 11 is provided to be perpendicular to first main surface PS1 and second main surface PS2.
  • the through-hole 11 has a square shape when viewed from the first main surface PS1 side, and a side a of the through-hole 11 is 0.5 ⁇ m or more and 400 ⁇ m or less. Preferably, one side a of the through-hole 11 is 1 ⁇ m or more and 30 ⁇ m or less.
  • the shape of the through-hole 11 is not limited to a square when viewed from the first main surface PS1 side.
  • the shape of the through-hole 11 may be circular, elliptical, rectangular, polygonal, or the like when viewed from the first main surface PS1 side.
  • the filter base portion 12 is formed in a grid pattern.
  • the filter base portion 12 includes a plurality of first base portions 12A and a plurality of second base portions 12B.
  • the multiple first base portions 12A extend in the first direction and are arranged parallel to each other.
  • the plurality of second base portions 12B extend in a second direction that intersects with the first direction and are arranged parallel to each other.
  • the plurality of first base portions 12A and the plurality of second base portions 12B are formed of plate-like members.
  • a plurality of through holes 11 are defined by the intersection of the plurality of first base portions 12A and the plurality of second base portions 12B.
  • the first direction in which the plurality of first base portions 12A extend is the X direction
  • the second direction in which the plurality of second base portions 12B extends is the Y direction. That is, in Embodiment 1, the first direction and the second direction are orthogonal.
  • the plurality of first base portions 12A and the plurality of second base portions 12B are arranged at regular intervals.
  • the plurality of first base portions 12A and the plurality of second base portions 12B are integrally formed.
  • the filter base portion 12 includes an elastic deformation portion 30.
  • the elastically deformable portion 30 is a portion that elastically deforms when receiving a force greater than or equal to a predetermined force.
  • a plurality of elastic deformation portions 30 are provided in the filter portion 10 .
  • the elastically deformable portion 30 includes a first convex portion 31 and a second convex portion 32 that are elastically deformable.
  • the first convex portion 31 and the second convex portion 32 are formed of plate-like members.
  • the first convex portion 31 and the second convex portion 32 can be elastically deformed by designing them with an arbitrary thickness or width.
  • the first protrusions 31 and the second protrusions 32 form part of the plurality of first base portions 12A.
  • the first convex portion 31 and the second convex portion 32 are provided between two adjacent through holes 11A and 11B.
  • the first protrusion 31 and the second protrusion 32 extend along the first direction (X direction) between the two adjacent through holes 11A and 11B.
  • two adjacent through holes 11A and 11B may be referred to as first through hole 11A and second through hole 11B, respectively.
  • the first convex portion 31 and the second convex portion 32 protrude along the first direction (X direction) from two adjacent second base portions 12B. Also, the end portion 31 a of the first convex portion 31 faces the end portion 32 a of the second convex portion 32 .
  • the end portion 31a of the first protrusion 31 means the free end of the first protrusion 31 .
  • the end portion 32a of the second protrusion 32 means the free end of the second protrusion 32 .
  • the shapes of the first convex portion 31 and the second convex portion 32 are not limited to the example shown in FIG.
  • the widths of the first convex portion 31 and the second convex portion 32 may differ between the base portion connected to the filter base portion 12 and the end portion.
  • the widths of the first protrusion 31 and the second protrusion 32 may vary from the base toward the end.
  • a gap 33 is provided between the first protrusion 31 and the second protrusion 32 to communicate with the two adjacent through holes 11A and 11B. Specifically, a gap 33 is formed between the end 31 a of the first protrusion 31 and the end 32 a of the second protrusion 32 .
  • the size of the gap 33 is 0.25 times or less of the side a defining the through holes 11A and 11B on the side communicating with the gap 33.
  • the size of the gap 33 is 0.2 times or less of the side a defining the through holes 11A and 11B on the side communicating with the gap 33 .
  • the size of the gap 33 is 0.1 times or less of the side a defining the through holes 11A and 11B communicating with the gap 33 .
  • the size of the gap 33 means the size of the gap 33 in the direction in which the first protrusions 31 and the second protrusions 32 extend when viewed from the first main surface PS1 side.
  • the length of the first protrusion 31 is approximately equal to the length of the second protrusion 32 .
  • the length of the first protrusion 31 is 0.8 times or more and 1.2 times or less of the length of the second protrusion 32 .
  • the length of the first protrusion 31 is 0.9 times or more and 1.1 times or less the length of the second protrusion 32 .
  • the length of the first convex portion 31 and the length of the second convex portion 32 mean dimensions in the first direction (X direction).
  • the thickness of the first protrusion 31 and the thickness of the second protrusion 32 are preferably smaller than the size of the through hole 11, that is, one side a of the through hole. Such a configuration makes it easier for the first convex portion 31 and the second convex portion 32 to elastically deform.
  • the thickness of the first convex portion 31 and the thickness of the second convex portion 32 mean the dimension of the filter 1 in the thickness direction (Z direction).
  • a plurality of first protrusions 31 and a plurality of second protrusions 32 are provided in the filter section 10.
  • the plurality of first protrusions 31 and the plurality of second protrusions 32 are provided dispersedly in the filter section 10 .
  • the thickness of the filter base portion 12 in the filter portion 10 is 0.5 ⁇ m or more and 20 ⁇ m or less. Thereby, the pressure loss of the fluid passing through the filter 1 can be reduced while providing the mechanical strength.
  • the thickness of the filter base portion 12 in the filter portion 10 is 1.0 ⁇ m or more and 3 ⁇ m or less. Thereby, the pressure loss of the fluid passing through the filter 1 can be further reduced.
  • the thickness of the filter base portion 12 is designed to be substantially constant. By making the thickness of the filter base portion 12 substantially constant, the position and amount of warpage of the curved portion 40 can be controlled with good reproducibility. “Substantially constant” means that the thickness of the filter base portion 12 is within an error of ⁇ 5%. Note that the thickness of the filter base portion 12 is not limited to be substantially constant.
  • the surface roughness of the first main surface PS1 and the second main surface PS2 is preferably small.
  • the surface roughness means the average value of the difference between the maximum value and the minimum value measured with a stylus profilometer at any five points.
  • the surface roughness is preferably smaller than the size of the object to be filtered, more preferably smaller than half the size of the object to be filtered. This is because adhesion of the object to be filtered can be reduced, and the object to be filtered can be collected with high efficiency after being captured by the filter 1 .
  • FIGS. 4A and 4B are schematic diagrams for explaining the operation of the elastic deformation section 30.
  • the fluid is passed through the filter 1 at a first pressure F1.
  • the first pressure F1 is smaller than the force with which the elastic deformation portion 30 is elastically deformed. Therefore, the elastic deformation portion 30 does not elastically deform. That is, when the first pressure F1 is applied to the filter 1, the first convex portion 31 and the second convex portion 32 of the elastic deformation portion 30 extend along the first direction (X direction). maintained in
  • the gap 33 has the smallest first size L1. Therefore, the first through hole 11 ⁇ /b>A and the second through hole 11 ⁇ /b>B that are adjacent to each other are substantially separated by the elastic deformation portion 30 .
  • substantially separated state means that although the first through-hole 11A and the second through-hole 11B are connected by the gap 33, the object to be filtered is to be captured by the first through-hole 11A and the second through-hole 11B. cannot pass through the gap 33.
  • an object to be filtered that is larger than the first through holes 11A and the second through holes 11B cannot pass through the filter 1 and is caught on the first main surface PS1 of the filter 1.
  • the fluid is passed through the filter 1 at a second pressure F2 higher than the first pressure F1.
  • the second pressure F2 is greater than the force with which the elastic deformation portion 30 is elastically deformed. Therefore, the elastic deformation portion 30 receives the second pressure F2 and is elastically deformed. That is, when the second pressure F2 is applied to the filter 1, the first convex portion 31 and the second convex portion 32 of the elastic deformation portion 30 are deformed in the fluid flow direction.
  • the end 31a of the first protrusion 31 and the end 32b of the second protrusion 32 move in the fluid flow direction.
  • the end portion of the first protrusion 31 opposite to the end portion 31a and the end portion of the second protrusion portion 32 opposite to the end portion 32a are respectively connected to the second base portion 12B and serve as fixed ends. It's becoming Therefore, the first convex portion 31 and the second convex portion 32 are elastically deformed so as to bend toward the flow direction of the fluid. In other words, the first convex portion 31 and the second convex portion 32 are cantilevered by two adjacent second base portions 12B.
  • the size of the gap 33 increases from the first size L1 to the second size L2 due to the elastic deformation of the first protrusion 31 and the second protrusion 32 . Therefore, the state in which the first through-hole 11A and the second through-hole 11B adjacent to each other are substantially separated by the elastic deformation portion 30 is released, and the first through-hole 11A and the second through-hole 11B adjacent to each other are substantially separated from each other. connected state.
  • the “substantially connected state” means that most of the first through-hole 11A and the second through-hole 11B are connected by the gap 33, and an object to be filtered that is larger in size than the first through-hole 11A and the second through-hole 11B.
  • the first convex portion 31 and the second convex portion 32 move in the direction of returning to their original shapes. That is, the end 31a of the first protrusion 31 and the end 32a of the second protrusion 32 move in the direction opposite to the fluid flow direction.
  • the size of the gap 33 becomes smaller than the second size L2.
  • the size of the gap 33 is larger than the first size L1 and smaller than the second size L2.
  • the deformation of the elastically deformable portion 30 can be controlled. Accordingly, it is possible to change the size of the gap 33 and adjust the size of an object to be filtered that can pass through the first through holes 11A and the second through holes 11B.
  • the elastically deformable portion 30 functions as a valve that can be adjusted by the applied pressure.
  • the filter 1 can filter a plurality of objects having different sizes by adjusting the pressure applied to the filter 1 without replacing the filter 1 .
  • FIGS. 5A to 5G show an example of the manufacturing process of the filter 1 according to Embodiment 1 of the present invention.
  • a substrate 41 such as silicon is prepared as shown in FIG. 5A.
  • the substrate 41 may be surface-cleaned, for example.
  • a Cu film 42 is formed on a substrate 41 as shown in FIG. 5B.
  • the Cu film 42 is formed by sputtering using a sputtering film forming apparatus.
  • the Cu film 42 may be formed by vapor deposition using a vapor deposition device.
  • a Ti film may be formed between the substrate 41 and the Cu film 42 in order to improve adhesion between the substrate 41 and the Cu film 42 .
  • a resist is applied onto the Cu film 42 and dried to form a resist film 43 .
  • a spin coater is used to apply a photosensitive positive liquid resist (manufactured by Sumitomo Chemical Co., Ltd.: Pfi-3A) onto the Cu film 42 .
  • a hot plate is used to dry the resist by heating to form a resist film 43 .
  • the resist film 43 is exposed and developed, and the portion of the resist film 43 corresponding to the filter base portion 12 is removed.
  • an i-line stepper (Pfi-37A manufactured by Canon) is used as an exposure machine.
  • the exposure uses a mask to form the elastically deformable portion 30 and the gap 33 .
  • a linear mask is designed at a position where the gap 33 is desired to be formed in the resist film 43 corresponding to the filter base portion 12 .
  • Developing is done using a paddle developing device.
  • TMAH Tetramethylammonium hydroxide
  • water washing and drying processing are carried out. Resist residues are formed at the locations where the line-shaped mask is designed.
  • electrolytic plating is performed using an electrolytic plating apparatus.
  • a plating film 44 is formed on the portion where the resist film 43 has been removed.
  • the resist residue is formed in the portion where the mask is designed. If electroplating is performed in this state, the plating film 44 will not be formed at the position where the resist residue is formed. Thereby, the elastic deformation portion 30 and the gap 33 can be formed.
  • the thickness of the resist residue becomes smaller, the thicknesses of the first protrusions 31 and the second protrusions 32 tend to become more uniform. thins towards the ends.
  • the thickness of the resist residue can be adjusted by mask design, exposure and development conditions.
  • the resist film 43 is stripped with stripping solution NMP (N-methyl-2-pyrrolidone) using a resist stripping device capable of high-pressure spray processing. Thereafter, the plated film 44 is washed with IPA (Isopropyl alcohol) and water, and dried.
  • NMP N-methyl-2-pyrrolidone
  • acetic acid hydrogen peroxide mixture is prepared as an etchant, and the Cu film 42 is etched away by immersion treatment while stirring with a stirrer. As a result, the plated film 44 is removed from the substrate 41 to produce the filter base portion 12 .
  • the filter 1 can be produced.
  • the filter 1 has a first principal surface PS1 and a second principal surface PS2 opposite to the first principal surface PS1, and has a plurality of through holes 11 communicating between the first principal surface PS1 and the second principal surface PS2.
  • a filter base portion 12 is provided.
  • the filter base portion 12 includes elastically deformable first protrusions 31 and second protrusions 32 provided between two adjacent through holes 11A and 11B.
  • a gap 33 is provided between the first protrusion 31 and the second protrusion 32 to communicate the two adjacent through holes 11A and 11B.
  • the convenience of the filter 1 can be improved.
  • the size of an object to be filtered that can pass through the filter 1 can be adjusted by adjusting the pressure applied to the filter 1 .
  • the first protrusions 31 and the second protrusions 32 are elastically deformable. It is positioned between two adjacent through holes 11A and 11B without deformation. Therefore, an object to be filtered that is larger than the two adjacent through-holes 11A and 11B cannot pass through the filter 1 through the through-holes 11A and 11B and is captured on the first main surface PS1.
  • the first protrusions 31 and the second protrusions 32 When filtering a fluid in a state in which the filter 1 is subjected to a pressure to the extent that the first protrusions 31 and the second protrusions 32 are elastically deformed, the first protrusions 31 and the second protrusions 32 can It deforms elastically in the direction of flow. As a result, the gap 33 is increased, and the area where the two adjacent through holes 11A and 11B communicate is increased. That is, the opening area of the portion where the two adjacent through holes 11A and 11B are formed is increased. As a result, an object to be filtered that is larger than two adjacent through-holes 11A and 11B can pass through the filter 1 through the through-holes 11A and 11B and the gap 33 .
  • the first convex portion 31 and the second convex portion 32 separating the two adjacent through holes 11A and 11B can be elastically deformed. Further, by adjusting the pressure applied to the filter 1, the size of the gap 33 formed between the first convex portion 31 and the second convex portion 32 can be adjusted. As a result, the gap 33 can be used to adjust the area communicating with the two adjacent through holes 11A and 11B when viewed from the first main surface PS1 side, and the size of the object to be filtered to be captured can be selected. As a result, filtering can be performed without exchanging the filter 1 according to the size of the object to be filtered to be captured, so that the convenience of the filter 1 can be improved.
  • the gap 33 can improve the liquid permeability of the filter 1 .
  • the first projections 31 and the second projections 32 return in the direction opposite to the fluid flow direction due to elastic force.
  • turbulent flow occurs in the vicinity of the filter 1 . Due to this turbulent flow, an object to be filtered trapped on the first main surface PS1 of the filter 1 can be separated in a direction away from the first main surface PS1. As a result, clogging due to an object to be filtered can be suppressed.
  • the adjacent through holes 11A and 11B and the gap 33 increase the opening area of the fluid. It becomes easy to flow into the through holes 11A and 11B and the gap 33 . Therefore, the pressure generated by the fluid tends to concentrate near the adjacent through holes 11A and 11B and the gap 33 . As a result, the pressure applied to the filter 1 can be released from the adjacent through holes 11A and 11B and the gap 33, and damage to the filter 1 can be suppressed.
  • the filter base portion 12 includes a plurality of first base portions 12A and a plurality of second base portions (12B).
  • the multiple first base portions 12A extend in the first direction and are arranged parallel to each other.
  • the plurality of second base portions 12B extend in a second direction that intersects with the first direction and are arranged parallel to each other.
  • the plurality of through holes 11 are defined by the plurality of first base portions 12A and the plurality of second base portions 12B.
  • the first protrusions 31 and the second protrusions 32 form part of the plurality of first base portions 12A. With such a configuration, the mechanical strength of the filter 1 can be improved, and convenience can be improved.
  • the first protrusion 31 and the second protrusion 32 extend along the first direction between the two adjacent through holes 11A and 11B.
  • the end 31 a of the first protrusion 31 faces the end 32 a of the second protrusion 32 .
  • Such a configuration facilitates adjustment of the size of the gap 33 by elastic deformation of the first convex portion 31 and the second convex portion 32 .
  • the convenience of the filter 1 can be further improved.
  • the plurality of first base portions 12A are arranged at regular intervals.
  • the plurality of second base portions 12B are arranged at regular intervals.
  • the plurality of second base portions 12B are orthogonal to the plurality of first base portions 12A.
  • the plurality of through holes 11 have a square shape when viewed from the first main surface PS1 side.
  • the size of the gap 33 is 0.25 times or less of the side a defining the through holes 11A and 11B on the side communicating with the gap 33 .
  • the length of the first protrusion 31 is 0.8 times or more and 1.2 times or less of the length of the second protrusion 32 .
  • the elastic deformation of the first convex portion 31 and the elastic deformation of the second convex portion 32 tend to be the same. This facilitates adjustment of the size of the gap 33 .
  • filter 1 includes the frame portion 20
  • present invention is not limited to this.
  • filter 1 may not include frame 20 .
  • first convex portion 31 and the second convex portion 32 constitute a part of the first base portion 12A
  • present invention is not limited to this.
  • first convex portion 31 and the second convex portion 32 may form part of the second base portion 12B.
  • FIG. 6 is an enlarged schematic diagram of a portion of the filter unit 10A of Modification 1.
  • the length of the first convex portion 31A and the length of the second convex portion 32A may be different.
  • the length of the first convex portion 31A is longer than the length of the second convex portion 32A. With such a configuration, the first convex portion 31A is more likely to be elastically deformed than the second convex portion 32A.
  • FIG. 7A to 7C are schematic diagrams for explaining the operation of the elastic deformation section 30A of Modification 1.
  • FIG. 7A to 7C symbols “F11”, “F12” and “F13” indicate the first pressure, second pressure and third pressure applied to the filter 1, respectively.
  • size of pressure is "F11 ⁇ F12 ⁇ F13.”
  • the size of the gap 33A becomes the minimum first size L11.
  • the size of the gap 33A becomes a second size L12 that is larger than the first size L11.
  • the size of the gap 33A becomes a third size L13 that is larger than the second size L12.
  • the size of the gap 33 can be adjusted.
  • the same effects as those described in the first embodiment can be obtained.
  • the length of the first convex portion 31 is increased, the force against the flow of fluid tends to increase when returning to its original shape after being elastically deformed. As a result, turbulent flow is likely to occur, and the object to be filtered trapped on the first main surface PS1 of the filter 1 is likely to separate from the filter 1 .
  • FIG. 8 is an enlarged schematic diagram of a part of the filter unit 10B of Modification 2. As shown in FIG. 8 , in the filter portion 10B of Modification 2, the filter base portion 12 further includes an elastic deformation portion 34 . The elastic deformation portion 34 is provided between two adjacent through holes 11A and 11C.
  • the elastically deformable portion 34 includes a third convex portion 35 and a fourth convex portion 36 that are elastically deformable.
  • the third convex portion 35 and the fourth convex portion 36 are the same as the first convex portion 31 and the second convex portion 32 described in the first embodiment.
  • the third protrusion 35 and the fourth protrusion 36 are provided between the through hole 11A defined by the first protrusion 31 and the second protrusion 32 and the adjacent through hole 11C. .
  • the third protruding portion 35 and the fourth protruding portion 36 form part of the plurality of second base portions 12B.
  • the third convex portion 35 and the fourth convex portion 36 protrude along the second direction (Y direction) from the two adjacent first base portions 12A. Further, the end portion 35a of the third convex portion 35 faces the end portion 36a of the fourth convex portion 36. As shown in FIG.
  • the end portion 35 a of the third protrusion 35 means the free end of the third protrusion 35 .
  • the end portion 36 a of the fourth protrusion 36 means the free end of the fourth protrusion 36 .
  • a gap 37 is provided between the third protrusion 35 and the fourth protrusion 36 to communicate with the two adjacent through holes 11A and 11C. Specifically, a gap 37 is formed between the end 35 a of the third protrusion 35 and the end 36 a of the fourth protrusion 36 .
  • the elastic deformation portion 34 can have the same effects as the elastic deformation portion 30, and the second modification can also have the same effects as those described in the first embodiment.
  • the elastically deformable portion 30 and the elastically deformable portion 34 are provided near the first through hole 11A. Therefore, the portion 38 of the filter base portion 12 that defines the first through hole 11A is elastically deformed under pressure when the fluid flows. Thereby, the opening area can be increased. In addition, since the portion 38 is likely to vibrate, the object to be filtered that has been captured by the filter 1 can be easily separated from the filter 1, and clogging can be suppressed.
  • FIG. 9 is an enlarged schematic diagram of a part of the filter unit 10C of Modification 3. As shown in FIG. As shown in FIG. 9, in Modification 3, the plurality of through holes 14 have a circular shape with a diameter d when viewed from the first main surface PS1 side.
  • the elastic deformation portion 30C is provided between two adjacent through holes 14A and 14B.
  • the first convex portion 31C and the second convex portion 32C protrude in the first direction (X direction) along the shapes of the through holes 14A and 14B.
  • a gap 33C is provided between the first protrusion 31C and the second protrusion 32C.
  • the size of the gap 33C is 0.25 times or less the diameter of the through holes 14A and 14B communicating with the gap 33C.
  • the filter of the present invention is useful for filtering objects in fluid.

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  • Chemical & Material Sciences (AREA)
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  • Biochemistry (AREA)
  • Biomedical Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Sustainable Development (AREA)
  • Medicinal Chemistry (AREA)
  • Filtering Materials (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Filtration Of Liquid (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Food-Manufacturing Devices (AREA)
PCT/JP2022/046220 2021-12-28 2022-12-15 フィルタ Ceased WO2023127526A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB2309533.4A GB2617008B (en) 2021-12-28 2022-12-15 Filter
JP2023525487A JP7343079B1 (ja) 2021-12-28 2022-12-15 フィルタ
US18/334,772 US20230321564A1 (en) 2021-12-28 2023-06-14 Filter

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JP2021214998 2021-12-28
JP2021-214998 2021-12-28

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008199994A (ja) * 2007-02-22 2008-09-04 Toray Ind Inc 培養液濾過用平膜エレメント
JP2011147872A (ja) * 2010-01-21 2011-08-04 Kansai Kanaami Kk 積層焼結フィルター
JP2015188323A (ja) * 2014-03-27 2015-11-02 日立化成株式会社 細胞捕捉金属フィルタ、細胞捕捉金属フィルタシート、細胞捕捉金属フィルタシートの製造方法、及び、細胞捕捉デバイス
WO2017030069A1 (ja) * 2015-08-19 2017-02-23 日本スレッド株式会社 ろ過装置
WO2020039936A1 (ja) * 2018-08-23 2020-02-27 株式会社村田製作所 濾過フィルタ
WO2020066578A1 (ja) * 2018-09-28 2020-04-02 株式会社村田製作所 濾過フィルタ及び濾過方法
JP2021003680A (ja) * 2019-06-27 2021-01-14 株式会社イチネンジコーポリマー 樹脂製造装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008199994A (ja) * 2007-02-22 2008-09-04 Toray Ind Inc 培養液濾過用平膜エレメント
JP2011147872A (ja) * 2010-01-21 2011-08-04 Kansai Kanaami Kk 積層焼結フィルター
JP2015188323A (ja) * 2014-03-27 2015-11-02 日立化成株式会社 細胞捕捉金属フィルタ、細胞捕捉金属フィルタシート、細胞捕捉金属フィルタシートの製造方法、及び、細胞捕捉デバイス
WO2017030069A1 (ja) * 2015-08-19 2017-02-23 日本スレッド株式会社 ろ過装置
WO2020039936A1 (ja) * 2018-08-23 2020-02-27 株式会社村田製作所 濾過フィルタ
WO2020066578A1 (ja) * 2018-09-28 2020-04-02 株式会社村田製作所 濾過フィルタ及び濾過方法
JP2021003680A (ja) * 2019-06-27 2021-01-14 株式会社イチネンジコーポリマー 樹脂製造装置

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GB202309533D0 (en) 2023-08-09
JPWO2023127526A1 (https=) 2023-07-06
GB2617008B (en) 2025-03-12
JP7343079B1 (ja) 2023-09-12
US20230321564A1 (en) 2023-10-12

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