WO2023116158A1 - 用于半导体设备的门阀及其维护方法 - Google Patents

用于半导体设备的门阀及其维护方法 Download PDF

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Publication number
WO2023116158A1
WO2023116158A1 PCT/CN2022/126480 CN2022126480W WO2023116158A1 WO 2023116158 A1 WO2023116158 A1 WO 2023116158A1 CN 2022126480 W CN2022126480 W CN 2022126480W WO 2023116158 A1 WO2023116158 A1 WO 2023116158A1
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WO
WIPO (PCT)
Prior art keywords
actuator
connecting flange
valve
gate valve
valve box
Prior art date
Application number
PCT/CN2022/126480
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English (en)
French (fr)
Inventor
宋宇
谈太德
姜崴
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拓荆科技股份有限公司
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Publication of WO2023116158A1 publication Critical patent/WO2023116158A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0272—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor permitting easy assembly or disassembly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B5/00—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them
    • F16B5/02—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of fastening members using screw-thread
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B5/00—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them
    • F16B5/06—Joining sheets or plates, e.g. panels, to one another or to strips or bars parallel to them by means of clamps or clips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/08—Guiding yokes for spindles; Means for closing housings; Dust caps, e.g. for tyre valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face

Definitions

  • the present application relates generally to semiconductor equipment and, more particularly, to gate valves for semiconductor equipment and methods of maintaining the gate valves.
  • Semiconductor equipment generally refers to equipment for manufacturing or processing semiconductor devices, which includes, for example, atomic layer deposition (ALD) equipment, chemical vapor deposition (CVD) equipment, and the like.
  • ALD atomic layer deposition
  • CVD chemical vapor deposition
  • the above-mentioned semiconductor equipment generally includes a plurality of vacuum pipelines and component parts such as gate valves installed on the vacuum pipelines to control the on-off of the vacuum pipelines.
  • Gate valves used in semiconductor equipment usually consist of a valve box on the vacuum side, a sealing valve plate, and an actuator on the atmospheric side.
  • the valve box is connected to the vacuum pipeline through bolted flanges or vacuum clamps.
  • the daily maintenance of the gate valve requires the replacement of the sealing ring that seals the valve plate.
  • For the existing gate valve when the valve plate is maintained, it is necessary to dismantle the gate valve as a whole from the vacuum pipeline.
  • other components close to the gate valve need to be disassembled, for example, the vacuum pipeline near the gate valve, etc. This results in difficult disassembly and assembly, high time consumption, low equipment maintenance efficiency, and large disturbance to the dynamic balance of the vacuum system.
  • an embodiment of the present application provides a gate valve for semiconductor equipment, which includes: a valve box, which has a channel for connecting the vacuum pipeline in the semiconductor equipment; an actuator, which has a channel for connecting the connecting flange of the valve box; and a fixing device, which is arranged on the connecting flange and is configured to detachably connect the actuator to the valve box, wherein the detachment direction of the fixing device faces the executive body.
  • the gate valve further includes a sealing valve plate, the edge of the sealing valve plate is provided with a sealing ring, wherein the sealing valve plate is connected to the actuator, and the actuator is operable to drive the The sealing valve plate enters the valve box to close the channel or drives the sealing valve plate to move out of the valve box to open the channel.
  • the gate valve further includes a top wire, and the top wire is disposed on an edge side of the connecting flange facing the actuator, and can pass through the connecting flange to contact the valve box.
  • the top wires include a pair of top wires symmetrically disposed on the edge side.
  • the fixing device includes a plurality of fixing screws disposed on the edge side of the connecting flange.
  • the securing means includes a clamp.
  • the band includes first and second generally semi-annular band portions, wherein a first end of the first band portion is connected to a first end of the second band portion.
  • the first end is locked and fixed by a first locking screw
  • the second end of the first clamp part and the second end of the second clamp are locked and fixed by a second locking screw.
  • a first groove is provided on the edge of the part of the valve box adjacent to the connecting flange, and a groove corresponding to the first groove is provided on the edge of the connecting flange.
  • a second groove an intermediate portion of the first band portion between the first end portion of the first band portion and the second end portion of the first band portion rests in the the middle portion of the second band portion between the first end portion of the second band portion and the second end portion of the second band portion placed in the second groove.
  • the removal direction of the first locking screw and the second locking screw is toward the actuator.
  • the clip includes two clips symmetrically arranged on the connecting flange.
  • the gate valve further includes a positioning pin, which is disposed on an edge side of the connecting flange and inserted into a positioning hole on the valve box through the connecting flange.
  • an embodiment of the present application provides a method for maintaining the gate valve according to any one of the embodiments of the present application, wherein the gate valve is installed on the vacuum pipeline in the semiconductor device, the The method includes: disassembling the fixing device on the connecting flange from the actuator side; and removing the actuator for maintenance while maintaining the connection of the valve box and the vacuum pipeline.
  • removing the actuator includes removing a sealing valve plate connected to the actuator, and an edge of the sealing valve plate is provided with a sealing ring.
  • the method further includes: after maintenance is completed, aligning the actuator with the valve box, and connecting the actuator to the valve box through the fixing device.
  • the fixing device includes a plurality of fixing screws disposed on the edge side of the connecting flange.
  • the securing means includes a clamp.
  • the clamp includes a substantially semi-annular first clamp portion and a second clamp portion, and a first flange is provided on an edge of a portion of the valve box adjacent to the connecting flange.
  • a groove, the edge of the connecting flange is provided with a second groove corresponding to the first groove, the first end of the first clamp part is connected to the second groove of the first clamp part an intermediate portion of the first band portion between the ends is seated within the first groove, and a first end of the second band portion is connected to a second end of the second band portion
  • the middle part of the second clamp part between the parts is placed in the second groove, and the removal of the fixing device on the connecting flange includes loosening the first clamp part of the first clamp part.
  • the end portion and the first end portion of the second clamp portion are locked and fixed by the first locking screw and the second end portion of the first clamp portion and the first end portion of the second clamp portion are loosened.
  • the second locking screw fixed at the two ends is locked.
  • the clip includes two clips symmetrically arranged on the connecting flange.
  • the method further includes: prior to removing the actuator, aligning the actuator with the valve by rotating a jack screw disposed on the edge side of the connecting flange facing the actuator. cartridge separation; and returning the top wire after maintenance is complete.
  • rotating the top wire includes a pair of top wires synchronously and rotationally symmetrically disposed on the edge side.
  • alignment pins are used to align the actuator with the valve box, wherein the alignment pins are provided on edge sides of the connecting flange.
  • Fig. 1 is the structural representation of the gate valve in the prior art
  • FIG. 2 is a simplified cross-sectional view of a gate valve according to some embodiments of the present application.
  • Fig. 3 is a three-dimensional schematic diagram of the gate valve shown in Fig. 2;
  • Figure 3A is a front view of the door valve shown in Figure 3;
  • Fig. 3B is a bottom view of the door valve shown in Fig. 3;
  • Figure 3C is a left side view of the gate valve shown in Figure 3;
  • FIG. 3D is a right side view of the gate valve shown in FIG. 3 .
  • FIG. 1 shows a schematic structural diagram of a conventional gate valve 100 for semiconductor equipment.
  • the gate valve 100 is generally composed of a valve box 101 and an actuator 102 .
  • the valve box 101 is located on the vacuum side, which can be connected to the vacuum line of the semiconductor device as part of the vacuum line system.
  • the valve box 101 may have a channel 104, and two sections of vacuum pipelines may be respectively connected to the valve box 101 from both ends of the channel 104, and the valve box 101 may be connected to the vacuum pipeline through a bolted flange or a vacuum clamp.
  • the actuator 102 is located on the atmospheric side with respect to the aforementioned vacuum side.
  • the actuator 102 can be connected with the valve box 101 through screws 103 .
  • a sealing valve plate (not shown in FIG. 1 ) is connected to the actuator 102 .
  • the actuator 102 can drive the sealing valve plate to enter the valve box 101 to close the channel 104 or drive the sealing valve plate to move out of the valve box 101 to open the channel 104 .
  • the removal direction of the screw 103 is toward the valve box 101 , that is, toward the vacuum side where the valve box 101 and the vacuum pipeline are located. That is to say, if the actuator 102 is to be removed from the valve box 101 for maintenance operations (for example, to replace the sealing ring sealing the valve plate), it is necessary to perform operations on the vacuum side to remove the screw 103 .
  • the valve box 101 needs to be dismantled from the vacuum pipeline, that is, the entire gate valve 100 needs to be disassembled from the vacuum pipeline.
  • multiple components around the gate valve 100 (for example, part of the vacuum pipeline) need to be removed to remove the gate valve 100 from the vacuum pipeline. This makes the disassembly and assembly of the gate valve and the maintenance of the gate valve more time-consuming, and the efficiency of equipment maintenance is low.
  • the embodiment of the present application provides a gate valve with a different structure, which can solve the above-mentioned problems existing in conventional gate valves, and can realize daily maintenance of the gate valve, such as replacing the sealing valve, without removing the entire gate valve from the vacuum pipeline Plate sealing ring and other maintenance actions.
  • FIG. 2 shows a simplified cross-sectional view of a gate valve 200 according to some embodiments of the application.
  • FIG. 3 is a schematic perspective view of the gate valve 200 shown in FIG. 2 .
  • 3A-3D show a front view, a bottom view, a left side view and a right side view, respectively, of the gate valve 200 shown in FIG. 3 .
  • the gate valve 200 includes a valve box 201 and an actuator 202 .
  • the valve box 201 has a channel 206 for connecting a vacuum line in a semiconductor device.
  • the actuator 202 is operable to drive the sealing valve plate 221 into the valve box 201 to close the passage 206 (as shown in FIG. 2 ) or drive the sealing valve plate 221 to move out of the valve box 201 to open the passage 206 .
  • the actuator 210 of the actuator 202 is mechanically connected to the sealing valve plate 221 to drive the sealing valve plate 221 .
  • the edge of the sealing valve plate 221 is provided with a sealing ring, which can realize the airtight sealing between the sealing valve plate 221 and the side wall of the channel 206 .
  • the actuator 202 has a connecting flange 205 for connecting the actuator 202 to the valve box 201 .
  • the gate valve 200 also includes a fixing device disposed on the connecting flange 205 and configured to detachably connect the actuator 202 to the valve box 201 .
  • the fixing device is a fixing screw 203 .
  • the connecting flange 205 does not have to be rectangular,
  • the boundaries 211, 213 of the connecting flange 205 and the boundaries 212, 214 of the portion of the valve housing 201 adjacent to the connecting flange 205 may extend beyond the boundaries 215, 216 of the actuator 202, and so on.
  • a plurality of fixing screws 203 are disposed on the edge side of the connecting flange 205 .
  • set screws 203 may be located at upper edge side 207 and lower edge side 208 of connecting flange 205 .
  • the fixing screws 203 may be located on other edge sides of the connecting flange 205 or other positions on the edge sides.
  • the fixing screws 203 pass through the connecting flange 205 and are connected to the valve box 201 , for example, coupled into corresponding threaded holes on the valve box 201 .
  • the gate valve 200 includes four fixing screws 203 . Those skilled in the art should understand that the gate valve 200 may also include any other number of fixing screws 203 .
  • the removal direction of the fixing device of the gate valve 200 is towards the actuator 202, rather than towards the valve box 201, for example, the head of the fixing screw 203 is towards the actuator 202 this side. Therefore, the actuator can be disassembled by disassembling the fixing device at the atmospheric side, so that the daily maintenance of the gate valve 200 can be realized without disassembling the entire gate valve 200 from the vacuum pipeline.
  • the sealing ring of the sealing valve plate 221 needs to be replaced, only the actuator 202 and the sealing valve plate 221 connected to it can be removed from the valve box 201, and the valve box 201 is kept on the vacuum pipeline, thereby eliminating the need to Disturbance factors and adverse effects brought by the removal of the valve box 201 from the vacuum pipeline to the vacuum pipeline system.
  • This is especially beneficial for complex vacuum pipelines or vacuum pipelines with small operating space, which can reduce disturbance factors to the vacuum pipeline as much as possible, and is beneficial to ensure that the overall precision of the semiconductor equipment and its system is not damaged.
  • the fixing device provided on the connecting flange 205 may be a clamp.
  • the band comprises two separable generally semi-annular band parts, each band part comprising a central part and two ends, wherein the first end of the first band part is connected to the second band
  • the first end of the hoop part can be locked and fixed by a first locking screw
  • the second end of the first hoop part and the second end of the second hoop part can be locked and fixed by a second locking screw.
  • Corresponding grooves can be set on the edge of the portion adjacent to the connecting flange 205 on the valve box 201 and on the edge of the connecting flange 205 (for example, beyond the boundary 215, 216 of the actuator 202).
  • the middle part of the part can be seated in the groove on the valve box 201
  • the middle part of the second clamp part can be seated in the groove on the connecting flange 205 .
  • the dismounting direction of the first locking screw and the second locking screw is towards the actuator 202 instead of towards the valve box 201, for example, the heads of the first locking screw and the second locking screw are facing the side of the actuator 202 , so that the clip can be disassembled by loosening the first locking screw and the second locking screw on the atmospheric side, and then the actuator 202 can be removed.
  • two clips can be arranged symmetrically (for example, symmetrically with respect to the center of the cross section of the connecting flange 205 ) on the connecting flange 205 , and the dismounting directions of the locking screws on the two clips are all toward the execution direction.
  • Agency 202 According to the spirit of the present application, a fixing device having other structures can also be used, and the fixing device can be disassembled by operating from the atmospheric side.
  • a sealing ring is generally provided between the valve box of the gate valve and the actuator (for example, at the connection surface of the valve box 101 and the actuator 102 and the connection surface of the valve box 201 and the actuator 202).
  • the sealing ring has a certain viscous force due to being pressed by the valve box and the actuator for a long time. Therefore, when the actuator is removed from the valve box, this viscous force will hinder the separation of the actuator from the valve box, thereby introducing additional disturbances and uncertainties to the vacuum system.
  • top wires can be used to solve the above problems.
  • the gate valve 200 may include a jack wire 204 disposed at an edge side of the connecting flange 205 facing the actuator 202 .
  • the gate valve 200 may include a pair of top wires 204 symmetrically disposed on edge sides of the connecting flange 205 (eg, at the upper edge side 207 and at the lower edge side 208 ).
  • the pair of jacking screws 204 can be located at any position symmetrical to the center of the cross section of the connecting flange 205 .
  • the gate valve 200 may also include other numbers of top wires 204 .
  • the top wire 204 can be rotated from the atmospheric side to pass through the connecting flange 205 and contact the valve box 201 , so as to push out the actuator 202 and separate it from the valve box 201 .
  • the top wire 204 can be rotated synchronously to smoothly eliminate the viscous force generated by the sealing ring between the valve box 201 and the actuator 202 , so as to further avoid the viscous force from bringing additional disturbance factors and uncertainties to the vacuum system.
  • the gate valve 200 further includes a positioning pin 209 .
  • the positioning pin 209 may be provided at an edge side of the connecting flange 205 (for example, the upper edge side 207 or the lower edge side 208 ).
  • the positioning pin 209 can pass through the connecting flange 205 and be inserted into the positioning hole on the valve box 201 .
  • the use of the positioning pin 209 can keep the position of the actuator 202 consistent when the actuator 202 is repeatedly installed and disassembled, thereby avoiding the different positions (even slightly different) of the actuator 202 after each maintenance. disturbance, and can improve maintenance efficiency.
  • FIG. 3D only one positioning pin 209 is shown in FIG. 3D , those skilled in the art should understand that other numbers of positioning pins 209 may be used depending on actual needs (eg positioning accuracy requirements).
  • a method for maintaining a gate valve of a semiconductor device will be described below with reference to the gate valve 200 shown in FIGS. 2-3D . Those skilled in the art should understand that this method can also be applied to other gate valves with similar structures.
  • the gate valve 200 may be installed on a vacuum line in a semiconductor device.
  • the fixing screw 203 on the connecting flange 205 can be loosened from the atmosphere side, and the connection between the valve box 201 and the vacuum pipeline of the above-mentioned semiconductor equipment can be maintained.
  • the actuator 202 before removing the actuator 202 , can be separated from the valve box 201 by rotating the top wire 204 disposed on the edge side of the connecting flange 205 facing the actuator 202 .
  • a pair of top wires 204 disposed on the edge side can be rotated and symmetrically arranged synchronously.
  • the actuator 202 can be aligned with the valve box 201 and the set screw 203 can be tightened to connect the actuator 202 to the valve box 201 .
  • alignment pins 209 disposed on the edge side of the connecting flange 205 may be used to align the actuator 202 with the valve box 201 . With the jackscrew 204 unscrewed out of the attachment flange 205, the jackscrew 204 may be rotated back into the attachment flange 205 prior to alignment.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Valve Housings (AREA)

Abstract

用于半导体设备的门阀（200）及其维护方法。门阀（200）包括：阀盒（201），其具有用于连接半导体设备中的真空管路的通道（206）；执行机构（202），其具有用于连接阀盒（201）的连接法兰（205）；以及固定装置，其设置于连接法兰（205）上且经配置以将执行机构（202）可拆卸地连接至阀盒（201），其中固定装置的拆卸方向朝向执行机构（202）。

Description

用于半导体设备的门阀及其维护方法 技术领域
本申请大体上涉及半导体设备，且更具体来说，涉及用于半导体设备的门阀及该门阀的维护方法。
背景技术
半导体设备通常指制造或加工半导体器件的设备，其包括，例如，原子层沉积(ALD)设备和化学气相沉积(CVD)设备等。上述半导体设备通常包含若干真空管路以及安装于真空管路上以控制真空管路通断的门阀等组成部件。
半导体设备上使用的门阀通常由真空侧的阀盒、密封阀板及大气侧的执行机构组成。阀盒通过螺栓法兰或者真空卡箍连接在真空管路上。门阀的日常维护需要更换密封阀板的密封圈。对于现有的门阀，在进行阀板维护时，需要将门阀整体从真空管路上拆下。在管路复杂或者操作空间较小的情况下，为了拆下门阀，还需要拆卸靠近门阀的其它部件，例如，门阀附近的真空管路等。这导致拆装难度大，耗时高，设备维护效率低下，而且对真空系统动态平衡扰动较大。
发明内容
在一个方面中，本申请的实施例提供一种用于半导体设备的门阀，其包括：阀盒，其具有用于连接所述半导体设备中的真空管路的通道；执行机构，其具有用于连接所述阀盒的连接法兰；以及固定装置，其设置于所述连接法兰上且经配置以将所述执行机构可拆卸地连接至所述阀盒，其中所述固定装置的拆卸方向朝向所述执行机构。
在一些实施例中，所述门阀进一步包括密封阀板，所述密封阀板的边缘设置有密封圈，其中所述密封阀板连接于所述执行机构，所述执行机构可操作以驱动所述密封阀板进入所述阀盒而封闭所述通道或者驱动所述密封阀板移出所述阀盒而打开所述通道。
在一些实施例中，所述门阀进一步包括顶丝，所述顶丝设置于所述连接法兰朝向所述执行机构的边缘侧，且能够穿过所述连接法兰接触所述阀盒。在一些实施例中，所述顶丝包括对称地设置于所述边缘侧的一对顶丝。
在一些实施例中，所述固定装置包括设置于所述连接法兰的边缘侧的多个固定螺丝。
在一些实施例中，所述固定装置包括卡箍。
在一些实施例中，所述卡箍包括大体半环状的第一卡箍部分和第二卡箍部分，其中所述第一卡箍部分的第一端部与所述第二卡箍部分的第一端部通过第一锁紧螺丝锁紧固定，且所述第一卡箍部分的第二端部与所述第二卡箍部分的第二端部通过第二锁紧螺丝锁紧固定。
在一些实施例中，所述阀盒上与所述连接法兰相邻的部分的边缘上设置有第一凹槽，所述连接法兰的边缘上设置有与所述第一凹槽对应的第二凹槽，所述第一卡箍部分的所述第一端部与所述第一卡箍部分的所述第二端部之间的所述第一卡箍部分的中间部分安置于所述第一凹槽内，且所述第二卡箍部分的所述第一端部与所述第二卡箍部分的所述第二端部之间的所述第二卡箍部分的中间部分安置于所述第二凹槽内。
在一些实施例中，所述第一锁紧螺丝和所述第二锁紧螺丝的拆卸方向朝向所述执行机构。
在一些实施例中，所述卡箍包括对称地设置于所述连接法兰上的两个卡箍。
在一些实施例中，所述门阀进一步包括定位销，所述定位销设置于所述连接法兰的边缘侧，且穿过所述连接法兰而插入所述阀盒上的定位孔中。
在另一方面中，本申请的实施例提供一种用于维护根据本申请任一实施例所述的门阀的方法，其中所述门阀安装于所述半导体设备中的所述真空管路上，所述方法包括：从所述执行机构侧拆卸所述连接法兰上的所述固定装置；以及在保持所述阀盒与所述真空管路的连接的同时取下所述执行机构以进行维护。
在一些实施例中，取下所述执行机构包括取下与所述执行机构连接的密封阀板，所述密封阀板的边缘设置有密封圈。
在一些实施例中，所述方法进一步包括；在完成维护后，将所述执行机构与所述阀盒对准，并通过所述固定装置将所述执行机构连接至所述阀盒。
在一些实施例中，所述固定装置包括设置于所述连接法兰的边缘侧的多个固定螺丝。
在一些实施例中，所述固定装置包括卡箍。
在一些实施例中，所述卡箍包括大体半环状的第一卡箍部分和第二卡箍部分，所述阀盒上与所述连接法兰相邻的部分的边缘上设置有第一凹槽，所述连接法兰的边缘上设置有与所述第一凹槽对应的第二凹槽，所述第一卡箍部分的第一端部与所述第一卡箍部 分的第二端部之间的所述第一卡箍部分的中间部分安置于所述第一凹槽内，且所述第二卡箍部分的第一端部与所述第二卡箍部分的第二端部之间的所述第二卡箍部分的中间部分安置于所述第二凹槽内，拆卸所述连接法兰上的所述固定装置包括松开将所述第一卡箍部分的第一端部与所述第二卡箍部分的第一端部锁紧固定的第一锁紧螺丝以及松开将所述第一卡箍部分的第二端部与所述第二卡箍部分的第二端部锁紧固定的第二锁紧螺丝。
在一些实施例中，所述卡箍包括对称地设置于所述连接法兰上的两个卡箍。
在一些实施例中，所述方法进一步包括；在取下所述执行机构之前，通过旋转设置于所述连接法兰朝向所述执行机构的边缘侧的顶丝使所述执行机构与所述阀盒分离；以及在完成维护后退回所述顶丝。在一些实施例中，旋转所述顶丝包括同步地旋转对称地设置于所述边缘侧的一对顶丝。
在一些实施例中，使用定位销来使所述执行机构与所述阀盒对准，其中所述定位销设置于所述连接法兰的边缘侧。
在以下附图及描述中阐述本申请的一或多个实例的细节。其它特征、目标及优势将根据所述描述及附图以及权利要求书而显而易见。
附图说明
本说明书中的公开内容提及且包含以下各图：
图1为现有技术中的门阀的结构示意图；
图2为根据本申请的一些实施例的门阀的简化剖视图；
图3为图2所示的门阀的立体示意图；
图3A为图3所示的门阀的主视图；
图3B为图3所示的门阀的仰视图；
图3C为图3所示的门阀的左视图；
图3D为图3所示的门阀的右视图。
根据惯例，图示中所说明的各种特征可能并非按比例绘制。因此，为了清晰起见，可任意扩大或减小各种特征的尺寸。图示中所说明的各部件的形状仅为示例性形状，并非限定部件的实际形状。另外，为了清楚起见，可简化图示中所说明的实施方案。因此，图示可能并未说明给定设备或装置的全部组件。最后，可贯穿说明书和图示使用相同参考标号来表示相同特征。
具体实施方式
为更好地理解本申请的精神，以下结合本申请的部分实施例对其作进一步说明。
本说明书内使用的词汇“在一实施例”或“根据一实施例”并不必要参照相同具体实施例，且本说明书内使用的“在其他(一些/某些)实施例”或“根据其他(一些/某些)实施例”并不必要参照不同的具体实施例。其目的在于例如主张的主题包括全部或部分范例具体实施例的组合。本文所指“上”和“下”的意义并不限于图式所直接呈现的关系，其应包含具有明确对应关系的描述，例如“左”和“右”，或者是“上”和“下”的相反。本文所称的“连接”应理解为涵盖“直接连接”以及“经由一或多个中间部件连接”。本说明书中所使用的各种部件的名称仅出于说明的目的，并不具备限定作用，不同厂商可使用不同的名称来指代具备相同功能的部件。
以下详细地讨论本申请的各种实施方式。尽管讨论了具体的实施，但是应当理解，这些实施方式仅用于示出的目的。相关领域中的技术人员将认识到，在不偏离本申请的精神和保护范围的情况下，可以使用其他部件和配置。本申请的实施可不必包含说明书所描述的实施例中的所有部件或步骤，也可根据实际应用而调整各步骤的执行顺序。
图1示出了一种现有的用于半导体设备的门阀100的结构示意图。
门阀100大体上由阀盒101和执行机构102组成。阀盒101位于真空侧，其可作为真空管路系统的一部分连接于半导体设备的真空管路。例如，阀盒101可具有通道104，两段真空管路可分别从通道104的两端连接到阀盒101，阀盒101可通过螺栓法兰或者真空卡箍与真空管路连接。
执行机构102位于相对于上述真空侧而言的大气侧。可通过螺丝103将执行机构102与阀盒101相连接。执行机构102上连接有密封阀板(图1中未示出)。执行机构102可驱动密封阀板进入阀盒101而封闭通道104或者驱动密封阀板移出阀盒101而打开通道104。
如图1所示，螺丝103的拆卸方向朝向阀盒101，即朝向阀盒101及真空管路所处的真空侧。也就是说，如果要将执行机构102从阀盒101上取下以进行维护操作(例如，更换密封阀板的密封圈)，就需要在真空侧执行操作才能将螺丝103拆下。要执行这样的操作就需要将阀盒101从真空管路上拆下，即需要将门阀100整体从真空管路上拆下。在涉及复杂的真空管路或者操作空间较小的真空管路时，还需要拆掉门阀100周围的多个部件(例如部分真空管路)才能将门阀100从真空管路上拆除。这使得拆装门阀及门阀维护的耗时较高，设备维护效率低下。
此外，半导体设备通常要求极高的设备精度，对门阀100维护时需要频繁地拆装门 阀及其周围的多个部件，这样的动作会破坏半导体设备原本的设备精度和真空系统的平衡，给半导体设备带来不利的影响。
本申请的实施例提供一种具有不同结构的门阀，其可解决常规门阀所存在的上述问题，可以在不将整个门阀从真空管路上拆下的情况下实现对门阀的日常维护，例如更换密封阀板的密封圈等维护动作。
图2示出了根据本申请的一些实施例的门阀200的简化剖视图。图3为图2所示的门阀200的立体示意图。图3A-3D分别示出了图3所示的门阀200的主视图、仰视图、左视图和右视图。
参见图2和图3C，门阀200包括阀盒201和执行机构202。阀盒201具有用于连接半导体设备中的真空管路的通道206。执行机构202可操作以驱动密封阀板221进入阀盒201而封闭通道206(如图2所示的状态)或者驱动密封阀板221移出阀盒201而打开通道206。执行机构202的执行部件210机械地连接于密封阀板221以驱动密封阀板221。密封阀板221边缘设置有密封圈，可实现密封阀板221与通道206侧壁之间的气密密封。
进一步参见图3和图3A，执行机构202具有连接法兰205，其用于将执行机构202与阀盒201相连接。门阀200还包括固定装置，其设置于连接法兰205上且经配置以将执行机构202可拆卸地连接至阀盒201。在图3所示的实施例中，固定装置为固定螺丝203。应了解，附图中所展示的各部件的形状和尺寸仅是出于示例性的目的，本申请的实施并不限于如图所示的形状和尺寸，例如，连接法兰205不必是矩形，连接法兰205的边界211、213和阀盒201上与连接法兰205相邻的部分的边界212、214可超出执行机构202的边界215、216等等。
在本申请的一些实施例中，多个固定螺丝203设置于连接法兰205的边缘侧。例如，如图3A和图3D所示，固定螺丝203可位于连接法兰205的上部边缘侧207处和下部边缘侧208处。在其他实施例中，固定螺丝203可位于连接法兰205的其他边缘侧或边缘侧的其他位置。固定螺丝203穿过连接法兰205而连接于阀盒201，例如耦合于阀盒201上的相应的螺纹孔内。示例性的，门阀200包括4个固定螺丝203。本领域技术人员应该了解，门阀200也可包括其他任何数目个固定螺丝203。
如图3和3A所示，与图1所示的常规门阀不同，门阀200的固定装置的拆卸方向朝向执行机构202，而并非朝向阀盒201，例如，固定螺丝203的头部朝向执行机构202这一侧。因此，可以在大气侧执行操作拆卸固定装置而将执行机构拆下，从而使得可以在不将整个门阀200从真空管路上拆卸的情况下实现对门阀200的日常维护。例如，当 需要更换密封阀板221的密封圈时，可以仅将执行机构202连同其所连接的密封阀板221从阀盒201上拆除，而将阀盒201保留在真空管路上，从而消除了将阀盒201从真空管路上拆除给真空管路系统带来的扰动因素和不利影响。这对于复杂的真空管路或者操作空间较小的真空管路是特别有利的，可以尽可能地减少对真空管路的扰动因素，有利于保证半导体设备及其系统整体的精密度不被破坏。
在本申请的另一些实施例中，设置于连接法兰205上的固定装置可为卡箍。根据一个实施例，卡箍包括可分离的两个大体半环状卡箍部分，每一卡箍部分包括中间部分和两个端部，其中第一卡箍部分的第一端部与第二卡箍部分的第一端部可通过第一锁紧螺丝锁紧固定，第一卡箍部分的第二端部与第二卡箍部分的第二端部可通过第二锁紧螺丝锁紧固定。阀盒201上与连接法兰205相邻的部分的边缘上和连接法兰205的边缘上(例如，超出执行机构202的边界215、216的部分)可设置对应的凹槽，第一卡箍部分的中间部分可安置于的阀盒201上的凹槽内，且第二卡箍部分的中间部分可安置于连接法兰205上的凹槽内。通过拧紧第一锁紧螺丝使第一卡箍部分的第一端部与第二卡箍部分的第一端部锁紧固定并且拧紧第二锁紧螺丝使第一卡箍部分的第二端部与第二卡箍部分的第二端部锁紧固定，可使阀盒201和连接法兰205连接固定。第一锁紧螺丝和第二锁紧螺丝的拆卸方向朝向执行机构202，而并非朝向阀盒201，例如，第一锁紧螺丝和第二锁紧螺丝的头部都朝向执行机构202这一侧，从而可以通过在大气侧松开所述第一锁紧螺丝和第二锁紧螺丝而将卡箍拆开，进而拆下执行机构202。在一些实施例中，连接法兰205上可对称(例如，相对于连接法兰205的横截面中心对称)地设置两个卡箍，两个卡箍上的锁紧螺丝的拆卸方向都朝向执行机构202。根据本申请的精神，也可采用具有其他结构的固定装置，该固定装置可从大气侧执行操作进行拆卸。
此外，门阀的阀盒与执行机构之间一般设有密封圈(例如在阀盒101与执行机构102的连接面处以及阀盒201与执行机构202的连接面处)。该密封圈由于长时间被阀盒和执行机构压紧而具有一定的粘滞力。因此，当将执行机构从阀盒拆除时，该粘滞力会阻碍执行机构与阀盒的分离，从而给真空系统带来额外的扰动和不确定性。
在本申请的一些实施例中，可使用顶丝来解决上述问题。如图3和3D所示，门阀200可包括设置于连接法兰205朝向执行机构202的边缘侧处的顶丝204。在一些实施例中，如图3D所示，门阀200可包括对称地设置于连接法兰205的边缘侧(例如上部边缘侧207处和下部边缘侧208处)的一对顶丝204。该对顶丝204可位于相对于连接法兰205的横截面中心对称的任何位置。在其他实施例中，门阀200也可包括其他数量的顶丝204。
可从大气侧旋转顶丝204使其穿过连接法兰205而接触阀盒201，从而将执行机构202顶出，使其与阀盒201分离。具体而言，当从连接于真空管路的阀盒201上拆卸执行机构202时，可同步地旋转顶丝204以平稳地消解阀盒201与执行机构202之间的密封圈所产生的粘滞力，从而进一步避免该粘滞力给真空系统带来额外的扰动因素和不确定性。
根据本申请的一些实施例，如图3D所示，门阀200还包括定位销209。定位销209可设置于连接法兰205的边缘侧(例如上部边缘侧207或下部边缘侧208)处。定位销209可穿过连接法兰205而插入阀盒201上的定位孔中。定位销209的使用可以在重复地安装和拆卸执行机构202时使得执行机构202的位置保持一致，从而避免每次维护之后执行机构202的不同位置(哪怕轻微的不同)给真空管路系统带来的扰动，并且可以提高维护效率。虽然图3D仅示出了一个定位销209，本领域技术人员应了解，可视实际需要(例如定位精度要求)使用其他数量的定位销209。
下面结合图2-3D所示的门阀200描述根据本申请的一些实施例的用于维护半导体设备的门阀的方法。本领域技术人员应了解，该方法也可应用于其他具有类似结构的门阀。
门阀200可安装于半导体设备中的真空管路上。当需要对门阀200进行维护(例如更换密封阀板221的密封圈)时，可从大气侧松开连接法兰205上的固定螺丝203，在保持阀盒201与上述半导体设备的真空管路的连接的同时取下执行机构202及密封阀板221以进行维护。
在一些实施例中，在取下执行机构202之前，可通过旋转设置于连接法兰205朝向执行机构202的边缘侧的顶丝204使执行机构202与阀盒201分离。为了尽可能避免受力不平衡而影响真空系统，可同步地旋转对称地设置于所述边缘侧的一对顶丝204。
在维护完门阀200之后，可将执行机构202与阀盒201对准，并拧紧固定螺丝203以将执行机构202连接至阀盒201。在一些实施例中，可使用设置于连接法兰205的边缘侧的定位销209来使执行机构202与阀盒201对准。在顶丝204已被旋出连接法兰205的情况下，在进行对准之前，可旋转顶丝204使其退回连接法兰205内。
本说明书中的描述经提供以使所述领域的技术人员能够进行或使用本申请。所属领域的技术人员将易于显而易见对本申请的各种修改，且本说明书中所定义的一般原理可应用于其它变化形式而不会脱离本申请的精神或范围。因此，本申请不限于本说明书所述的实例和设计，而是被赋予与本说明书所揭示的原理和新颖特征一致的最宽范围。

Claims (21)

  1. 一种用于半导体设备的门阀，其包括：
    阀盒，其具有用于连接所述半导体设备中的真空管路的通道；
    执行机构，其具有用于连接所述阀盒的连接法兰；以及
    固定装置，其设置于所述连接法兰上且经配置以将所述执行机构可拆卸地连接至所述阀盒，其中所述固定装置的拆卸方向朝向所述执行机构。
  2. 根据权利要求1所述的门阀，其进一步包括密封阀板，所述密封阀板的边缘设置有密封圈，其中所述密封阀板连接于所述执行机构，所述执行机构可操作以驱动所述密封阀板进入所述阀盒而封闭所述通道或者驱动所述密封阀板移出所述阀盒而打开所述通道。
  3. 根据权利要求1所述的门阀，其进一步包括顶丝，所述顶丝设置于所述连接法兰朝向所述执行机构的边缘侧，且能够穿过所述连接法兰接触所述阀盒。
  4. 根据权利要求3所述的门阀，其中所述顶丝包括对称地设置于所述边缘侧的一对顶丝。
  5. 根据权利要求1所述的门阀，其中所述固定装置包括设置于所述连接法兰的边缘侧的多个固定螺丝。
  6. 根据权利要求1所述的门阀，其中所述固定装置包括卡箍。
  7. 根据权利要求6所述的门阀，其中所述卡箍包括大体半环状的第一卡箍部分和第二卡箍部分，其中所述第一卡箍部分的第一端部与所述第二卡箍部分的第一端部通过第一锁紧螺丝锁紧固定，且所述第一卡箍部分的第二端部与所述第二卡箍部分的第二端部通过第二锁紧螺丝锁紧固定。
  8. 根据权利要求7所述的门阀，其中所述阀盒上与所述连接法兰相邻的部分的边缘上设置有第一凹槽，所述连接法兰的边缘上设置有与所述第一凹槽对应的第二凹槽， 所述第一卡箍部分的所述第一端部与所述第一卡箍部分的所述第二端部之间的所述第一卡箍部分的中间部分安置于所述第一凹槽内，且所述第二卡箍部分的所述第一端部与所述第二卡箍部分的所述第二端部之间的所述第二卡箍部分的中间部分安置于所述第二凹槽内。
  9. 根据权利要求7所述的门阀，其中所述第一锁紧螺丝和所述第二锁紧螺丝的拆卸方向朝向所述执行机构。
  10. 根据权利要求6所述的门阀，其中所述卡箍包括对称地设置于所述连接法兰上的两个卡箍。
  11. 根据权利要求1所述的门阀，其进一步包括定位销，所述定位销设置于所述连接法兰的边缘侧，且穿过所述连接法兰而插入所述阀盒上的定位孔中。
  12. 一种用于维护根据权利要求1所述的门阀的方法，其中所述门阀安装于所述半导体设备中的所述真空管路上，所述方法包括：
    从所述执行机构侧拆卸所述连接法兰上的所述固定装置；以及
    在保持所述阀盒与所述真空管路的连接的同时取下所述执行机构以进行维护。
  13. 根据权利要求12所述的方法，其中取下所述执行机构包括取下与所述执行机构连接的密封阀板，所述密封阀板的边缘设置有密封圈。
  14. 根据权利要求12所述的方法，其进一步包括：
    在完成维护后，将所述执行机构与所述阀盒对准，并通过所述固定装置将所述执行机构连接至所述阀盒。
  15. 根据权利要求12所述的方法，其中所述固定装置包括设置于所述连接法兰的边缘侧的多个固定螺丝。
  16. 根据权利要求12所述的方法，其中所述固定装置包括卡箍。
  17. 根据权利要求16所述的方法，其中所述卡箍包括大体半环状的第一卡箍部分和第 二卡箍部分，所述阀盒上与所述连接法兰相邻的部分的边缘上设置有第一凹槽，所述连接法兰的边缘上设置有与所述第一凹槽对应的第二凹槽，所述第一卡箍部分的第一端部与所述第一卡箍部分的第二端部之间的所述第一卡箍部分的中间部分安置于所述第一凹槽内，且所述第二卡箍部分的第一端部与所述第二卡箍部分的第二端部之间的所述第二卡箍部分的中间部分安置于所述第二凹槽内，拆卸所述连接法兰上的所述固定装置包括松开将所述第一卡箍部分的第一端部与所述第二卡箍部分的第一端部锁紧固定的第一锁紧螺丝以及松开将所述第一卡箍部分的第二端部与所述第二卡箍部分的第二端部锁紧固定的第二锁紧螺丝。
  18. 根据权利要求16所述的门阀，其中所述卡箍包括对称地设置于所述连接法兰上的两个卡箍。
  19. 根据权利要求12所述的方法，其进一步包括：
    在取下所述执行机构之前，通过旋转设置于所述连接法兰朝向所述执行机构的边缘侧的顶丝使所述执行机构与所述阀盒分离；以及
    在完成维护后退回所述顶丝。
  20. 根据权利要求19所述的方法，其中旋转所述顶丝包括同步地旋转对称地设置于所述边缘侧的一对顶丝。
  21. 根据权利要求14所述的方法，其中使用定位销来使所述执行机构与所述阀盒对准，其中所述定位销设置于所述连接法兰的边缘侧。
PCT/CN2022/126480 2021-12-20 2022-10-20 用于半导体设备的门阀及其维护方法 WO2023116158A1 (zh)

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CN207278922U (zh) * 2017-10-10 2018-04-27 上海泰科龙阀门有限公司 一种密封性能好的球阀
CN207814597U (zh) * 2017-12-26 2018-09-04 成都国光电气股份有限公司 一种专用于压力容器的双通真空阀门结构
CN108730542A (zh) * 2018-07-11 2018-11-02 扬州松源管阀有限公司 一种新型真空闸阀
CN208587528U (zh) * 2018-07-16 2019-03-08 四川凯茨阀门制造有限公司 一种煤层气开采用高耐蚀保温夹套球阀
CN209875966U (zh) * 2019-06-04 2019-12-31 浙江有氟密阀门有限公司 一种可适用高压的柱塞阀
CN212564407U (zh) * 2020-06-18 2021-02-19 上海畅桥真空系统制造有限公司 一种密封性能好的挡板阀装置
CN216200695U (zh) * 2021-11-19 2022-04-05 浙江荣一阀门有限公司 双承压真空闸阀

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CN207278922U (zh) * 2017-10-10 2018-04-27 上海泰科龙阀门有限公司 一种密封性能好的球阀
CN207814597U (zh) * 2017-12-26 2018-09-04 成都国光电气股份有限公司 一种专用于压力容器的双通真空阀门结构
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